JP2000058629A - Stage device and electron beam lithography system using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a stage device which can be positioned with high accuracy and is high in maintainability. SOLUTION: A stage device is constituted by successively mounting a first stage 3 on a base 2 via a pair of cross roller guides 5 and a second stage 4 on the first stage 3 via a pair of second cross roller guides 8. The first stage 3 is moved in one direction by means of a first ultrasonic motor 7, which is brought into contact with the press are contact surface of a first driven member 6 formed on the lower surface of the first stage 3. The second stage 4 is moved in a different direction by means of a second ultrasonic motor 10, which is brought into contact with the press are contact surface of a second driven member 9 formed on the lower surface of the second stage 4. Then the first cross guides 5 which guide the first stage 3 and the second cross roller guides 8 which guide the second stage 4 are arranged in such a way, that V-grooves 17a and 18a of their guide rails 14, 15, 17, and 18 are directed in the vertical direction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a stage device capable of biaxial positioning and an electron beam writing apparatus using the same.

[0002]

2. Description of the Related Art For example, in a manufacturing process of a semiconductor device, in a projection exposure apparatus or an electron beam drawing apparatus,
2. Description of the Related Art A stage device is used to move and guide a semiconductor wafer serving as a sample in an X direction and a Y direction, respectively.

FIG. 3 is a perspective view showing a conventional stage device. Reference numeral 21 denotes a base, on which a first stage 22 and a second stage 23 are sequentially mounted. At the center, a sample stage 30 for mounting a sample W such as a semiconductor wafer is provided.
The movable mirrors 31 of the laser interferometer for detecting the position coordinates in the directions are provided respectively. The first stage 22
Is mounted on the base 2 by the pair of first cross roller guides 24.
The first stage 23 is guided to move in the X direction on the first stage 23.
Are guided to move on the first stage 22 in the Y direction by a pair of second cross roller guides 27.

The first stage 22 and the second stage 23
An ultrasonic motor is used as a means for driving the first stage 22. In order to drive the first stage 22, the first stage 22 is pressed against the pressure contact surface 25a of the first driven member 25 integrally formed on the lower surface thereof. When the first ultrasonic motor 26 is driven in a state in which the friction member 26a of the ultrasonic motor 26 is in contact with the first stage 22, the friction member 26a performs an elliptical motion and the first stage 22 is driven by friction with the first driven member 25. Can be moved in the X direction along the first cross roller guide 24, and to drive the second stage 23, similarly to the first stage 22, the second stage 23 is integrally formed on the lower surface of the second stage 23. The second ultrasonic motor 29 is brought into contact with the pressure contact surface 28 a of the second driven member 28, and the second stage 23 is moved in the Y direction along the second cross roller guide 27 by driving the ultrasonic motor 29. Sa Rukoto can.

A first cross roller guide 24 for guiding the first stage 22 and the second stage 23 and a second
The cross roller guide 27 has a V-shaped groove 33 as shown in FIG.
The two V-grooves 33 of the two guide rails 34 are disposed facing each other in the horizontal direction, and a plurality of rollers 3 are provided between the V-grooves 33.
5 was used in a state of being interposed in a cross shape. In addition,
Reference numeral 39 denotes an adjusting screw for applying a preload to the guide rail 34 in order to increase the straightness of the cross roller guides 24 and 27.

When this stage apparatus is used in an electron beam lithography apparatus, it is installed and used in a vacuum processing chamber equipped with a vacuum lens barrel, but the stage apparatus must be periodically maintained. Until now, the vacuum apparatus installed on the top plate of the vacuum processing chamber was removed to disassemble and assemble the stage device. However, due to poor workability, an opening was provided on the side wall of the vacuum processing chamber. It has been proposed to connect a lid for closing the part to the base of the stage device and to provide a wheel on the base to open the lid to pull out the stage device from the vacuum processing chamber (Japanese Patent Laid-Open No. 4-171715). Reference).

[0007]

However, the stage device shown in FIG. 5 has a problem that maintenance is poor.

That is, when the stage device shown in FIG. 5 is to be disassembled, first, the first ultrasonic motor 26 and the second ultrasonic motor 29 are pressed against the first driven member 25 and the second driven member 28. After separating from the surfaces 25a and 28a, the first
Cross roller guide 24 and second cross roller guide 27
The first stage 22 and the second stage 23 must be pulled out along the first cross roller guide 24 and the second cross roller guide 27. Further, when assembling, the operation is the reverse of the disassembling operation. Was very time consuming.

Further, when the first stage 22 or the second stage 23 is pulled out or returned from the first cross roller guide 24 or the second cross roller guide 27, the guide rail 3
If the parallelism between the four is lost, the guide rail 34 may be deformed or the V-groove 33 of the guide rail 34 may be damaged, so that the straightness accuracy may decrease when assembled. There was also a problem that it was difficult.

[0010]

SUMMARY OF THE INVENTION In view of the above-mentioned problems, the present invention has been made in consideration of the above-mentioned problems, and has a plate-shaped base, and is disposed on the base.
A first stage driven by a first ultrasonic motor; and a second stage disposed on the first stage and driven by a second ultrasonic motor. A first lower guide rail having a groove is provided, and a first lower guide rail facing the first lower guide rail is provided.
A first upper guide rail having a pair of V grooves is provided on the lower surface of the stage, and a plurality of rollers are interposed in a cross shape between the V grooves of the first upper guide rail and the lower guide rail facing each other. A pair of first cross roller guides, the first stage is movably guided along the first cross roller guide, and a second lower guide rail having a pair of V grooves on the upper surface of the first stage. Is installed in a direction different from that of the first cross roller guide, and a second upper guide rail having a pair of V-grooves is provided on the lower surface of the second stage facing the second lower guide rail. A plurality of rollers are interposed in a cross shape between V grooves of the guide rail and the lower guide rail which face each other to form a second cross roller guide, and the second stage is used as the second cross roller guide. It is obtained by constituting the stage apparatus to freely guided movement I.

Further, according to the present invention, a first driven member parallel to the first upper guide rail is provided on a lower surface of the first stage, and the first driven member is connected to the first ultrasonic motor. The first stage is moved by being driven by friction driving with the second stage, and a second driven member parallel to the second upper guide rail is provided on the lower surface of the second stage, and the second driven member is The second stage is driven by friction drive with a second ultrasonic motor to move the second stage.

Further, according to the present invention, the pressure-contact surface of the first driven member is disposed so as to be located at the center of the pair of first cross roller guides, and the pressure-contact surface of the second driven member is formed. , Are arranged at the center of the pair of second cross roller guides.

Further, according to the present invention, at least the base, the first stage, the second stage, the first driven member, and the second driven member among the constituent members of the stage device are formed of ceramics. .

Further, according to the present invention, a third lower guide rail having a V-groove is provided on a bottom surface of the vacuum processing chamber when the stage apparatus is installed in a vacuum processing chamber to constitute an electron beam writing apparatus. A third upper guide rail having a V groove is provided on the lower surface of the base of the stage device facing the third lower guide rail, and between the opposed V grooves of the third upper guide rail and the lower guide rail. A third cross roller guide is formed by interposing a plurality of rollers in a cross shape, and the stage device is positioned in the vacuum processing chamber to form an electron beam drawing apparatus.

[0015]

According to the present invention, an ultrasonic motor is used as the driving means for the first and second stages, and the first and second cross roller guides for moving and guiding the first and second stages. Since the V-grooves are arranged in the vertical direction, they can be disassembled simply by lifting the first stage and the second stage vertically upward during maintenance. The disassembling and assembling of the stage device can be easily performed such that the reverse operation can be performed. Further, according to the present invention, the pressure-contact surface of the first driven member is disposed so as to be located at the center of the pair of first cross roller guides, and the pressure-contact surface of the second driven member is also formed of a pair of second The straightness of the first stage and the second stage can be further improved since the first stage and the second stage are arranged so as to be located at the center of the cross roller guide.

Further, according to the present invention, at least a base, a first stage, a second stage, a first driven member, and a second driven member among the constituent members of the stage device,
Since each of the stages is formed of ceramics having high hardness and which can be processed with high accuracy, each stage can be moved with a small driving torque, and high-precision positioning can be performed. In addition, since the wear of each driven member during sliding with the ultrasonic motor can be significantly reduced, it can be used for a long period of time.

According to the electron beam writing apparatus of the present invention, a third cross roller guide is provided as a means for positioning the stage device in the vacuum processing chamber, and the V-groove of the third cross roller guide is vertically extended. The stage device can be easily taken out of the vacuum processing chamber because of the arrangement, and when the stage device is returned to the vacuum processing chamber, the stage device can be positioned at the original position with good reproducibility. it can.

[0018]

Embodiments of the present invention will be described below. FIG. 1 is a diagram showing a stage device of the present invention.
(A) is a perspective view, (b) is a side view.

In this stage apparatus 1, reference numeral 2 denotes a flat base, on which a first stage 3 and a second stage 4 are sequentially arranged.
A sample stage 11 on which a sample W such as a semiconductor wafer is mounted is provided at the upper center, and movable mirrors 12 and 13 of a laser interferometer for detecting positional coordinates in the X and Y directions are provided on the periphery thereof. It is.

The first stage 3 is adapted to move and guide on the base 2 in the X direction by a pair of first cross roller guides 5, and the second stage 4 is controlled by a pair of second cross roller guides 8. Y on the first stage 3
It is designed to guide movement in the direction.

An ultrasonic motor is used for driving the first stage 3 and the second stage 4. To drive the first stage 3, the lower surface of the first stage 3 is parallel to the first cross roller guide 5. When the friction material 7a of the first ultrasonic motor 7 is brought into contact with the pressure contact surface 6a of the first driven member 6 formed integrally with the first driven member 6, the first ultrasonic motor 7 is driven in this state. The friction member 7a moves in an elliptical manner, and the first stage 3 is moved to the first stage by the friction drive with the first driven member 6.
It is configured to move in the X direction along the cross roller guide 5, and to drive the second stage 4,
Similarly to the first stage 3, the second ultrasonic motor 1 is pressed against a pressure contact surface 9a of a second driven member 9 integrally formed on the lower surface of the second stage 4 in parallel with the second cross roller guide 8.
When the second ultrasonic motor 10 is driven in this state, the friction material 10a makes an elliptical motion, and the second stage 4 is moved to the second stage 4 by friction driving with the driven member 9. It is configured to guide movement along the cross roller guide 8 in the Y direction.

In FIG. 1, the pressure contact surface 6a of the first driven member 6 formed integrally with the first stage 3 is located at the center of the pair of first cross roller guides 5, and The pressure contact surface 9a of the second driven member 9 formed integrally with the second stage 4 is configured to be located at the center of the pair of second cross roller guides 8, respectively. By doing so, vibrations generated in the first stage 3 and the second stage 4 due to the driving of the ultrasonic motors 7 and 10 and a decrease in straightness accuracy can be minimized.

In FIG. 1, each ultrasonic motor 7, 1
As means for contacting the driven members 6 with the driven members 6 and 9, for example, the piezoelectric actuator 17 is brought into contact with the rear portions of the ultrasonic motors 7 and 10 and the amount of expansion and contraction of the piezoelectric actuator 17 is controlled. Each driven member 6, 9
What is necessary is just to adjust the pressing force to the. The ultrasonic motor 7,
Other methods may be used as a method for pressing the member 10 against the driven members 6 and 9.

Further, in FIG. 1, the first driven member 6 is provided on the first stage 3 and the first ultrasonic motor 7 is provided on the base 2, and the second driven member 9 is provided on the second stage 4. , The structure in which the second ultrasonic motor 10 is provided on each of the first stages 3 is shown, but the present invention is not limited to this structure.
When the first driven member 6 is provided on the base 2, the first ultrasonic motor 7 is mounted on the first stage 3, and when the second driven member 9 is provided on the first stage 3, the second ultrasonic motor 7 is mounted on the second stage. May be mounted on the second stage 4.

As shown in FIG. 1B, according to the present invention, the first cross roller guide 5 for guiding the first stage 3 is provided with a first V-groove having a pair of V-grooves on the upper surface of the base 2. The lower guide rail 14 is installed so that the V-groove faces upward, and the first upper guide rail 15 having a V-groove on the lower surface of the first stage 3 facing the first lower guide rail 14 is formed by the V-groove. Install it so that it faces downward,
A plurality of rollers 16 are interposed between V grooves of the upper guide rail 15 and the lower guide rail 14 facing each other in a cross shape, and a second guide 4 for guiding the second stage 4 is provided.
The cross roller guide 8 is connected to the second lower guide rail 17 having a pair of V-grooves 17 a on the upper surface of the first stage 3.
The groove 17a is installed so as to face upward, and the second
A second upper guide rail 18 having a V-groove 18a on the lower surface of the second stage 3 facing the lower guide rail 17 is installed so that the V-groove 18a faces downward, and the second upper guide rail 18 and the lower guide are provided. V of rail 17 facing each other
A plurality of rollers 19 are interposed between the grooves 17a and 18a in a cross shape.

Thus, the stage apparatus 1 can move each of the stages 3 and 4 at high speed by the ultrasonic motors 7 and 10 which are the driving means of the first stage 3 and the second stage 4 and have high resolution. Positioning becomes possible.
Moreover, since the ultrasonic motors 7, 10 themselves are compact, they can be incorporated in the stage device 1, and the entire stage device 1 can be reduced in size.

Further, since the cross roller guides 5 and 8 are used as the guide means for each of the stages 3 and 4, the rigidity is high, and yawing, pitching, vibration or the like hardly occurs when guiding each of the stages 3 and 4. Ultrasonic motor 7, 1
High-precision positioning can be performed by combining with 0.

In addition, the cross roller guide is usually provided with V-grooves 17 a, of two guide rails 14, 15, 17, 18.
The stage device 1 is used in a state in which the 18a is oriented in the horizontal direction, and strict adjustment of the preload is required by an adjusting screw in order to increase the straightness accuracy. Since the structures 17a and 18a are arranged in the vertical direction, the own weight of each stage 3 and 4 becomes the preload applied to the cross roller guide as it is, and it is not necessary to perform the strict preload adjustment by the conventional adjusting screw. At the time of disassembly for maintenance, the ultrasonic motors 7 and 10 are separated from the driven members 6 and 9 of the respective stages 3 and 4, and the first stage 3 and the second stage 4 can be disassembled simply by sequentially lifting them vertically upward. At the same time, it is only necessary to perform the reverse of the disassembly work without much care when assembling. Can scan, further has the advantage can be easily stage apparatus 1 assembly and disassembly without a skilled technician.

By the way, among the constituent members constituting such a stage device 1, at least the base 2, the first stage 3, the second stage 4, the first driven member 6, and the second driven member 9 are made of ceramics. It is preferable to form with. That is, since the ceramics are less deformed and lightweight, and furthermore have excellent wear resistance, for example, by forming the base 2 and each of the stages 3 and 4 from ceramics, the flatness can be increased, and Each stage 3, 4 can be moved with a small drive torque,
Further, by forming each of the driven members 6 and 9 from ceramics, it is possible to suppress abrasion of the press contact surfaces 6a and 9a due to friction driving with the ultrasonic motors 7 and 10. As a specific material, ceramics mainly containing alumina, zirconia, silicon carbide, silicon nitride, and aluminum nitride can be used. In addition, the base 2, each stage 3,
4. It goes without saying that not only the driven members 6 and 9 but also other constituent members may be ceramicized.

Next, FIG. 2A shows an example in which the stage device 1 shown in FIGS. 1A and 1B is used for an electron beam drawing apparatus.
This will be described in (b).

This electron beam lithography system comprises a vacuum processing chamber 5
1, a vacuum column 52 is provided on a top plate 51a of the vacuum processing chamber 51. In the vacuum column 52, a charged beam gun 53, a diaphragm 54,
A reduction lens 55, an objective lens 56, and a polarizer 57 are sequentially arranged. The electron beam emitted from the charged beam gun 53 is applied to the sample W via the reduction lens 55 and the objective lens 56 via the diaphragm 54. The irradiation position of the electron beam is adjusted by the polarizer 57 and the stage device 1 installed in the vacuum processing chamber 51.

In the vacuum processing chamber 51, movable mirrors 12, 13 installed on the second stage 4 of the stage device 1 are provided.
The laser interferometers 58 and 59 are disposed at positions opposite to the above, and the amount of movement of the first stage 3 can be reduced by detecting the laser light reflected from the movable mirror 13 with the laser interferometer 59.
The laser light reflected from the movable mirror 12 is transmitted to a laser interferometer 58.
, The amount of movement of the second stage 4 is detected.

An opening 51b is provided on one side wall of the vacuum processing chamber 51, and a lid 60 for hermetically sealing is detachably attached to the opening 51b. In some cases, the vacuum processing chamber 51 is moved in and out of the vacuum processing chamber 51 through the opening 51b.

When the stage apparatus 1 is installed in the vacuum processing chamber 51, strict alignment is required.
Third upper guide rail 6 having V groove 61a along the direction
1 and an upper guide rail 65 having a plurality of semicircular concave portions are fixed, and these upper guide rails 61 and 6 are fixed.
On the surface plate 69 of the vacuum processing chamber 51 opposite to the surface 5, similarly to the base 2 of the stage device 1, a V groove 62 a is formed along the X direction.
And a lower guide rail 67 having a plurality of semicircular recesses. A plurality of rollers are provided between the V groove 61a of the third upper guide rail 61 fixed to the base 2 of the stage device 1 and the V groove 62a of the third lower guide rail 62 fixed to the surface plate 69 of the vacuum processing chamber 51. The third cross roller guide 64 is configured by interposing the cross 63 in a cross shape, and the lower guide fixed to the recess of the upper guide rail 65 fixed to the base 2 of the stage device 1 and the surface plate 69 of the vacuum processing chamber 51. Rail 67
A flat roller guide 68 is configured by horizontally interposing a plurality of rollers 66 between the concave roller and the concave portion. The cross roller guide 64 and the flat roller guide 68 serve as a pair of positioning guides.

The stage device 1 is positioned in the Y direction by a positioning guide in the vacuum processing chamber 51, and is positioned in the X direction by the stopper 75 and the clamp mechanism 74. At 70, the stage device 1 is installed by being pressed vertically downward and fixed.

Next, a method for pulling out the stage apparatus 1 from the vacuum processing chamber 51 for maintenance will be described.

First, the lid 60 for hermetically sealing the opening 51b of the vacuum processing chamber 51 is removed, and the pressing force of the clamper 70 is released. The release of the pressing force is performed by the clamper 70.
, The one end of the clamp rod 71 may be pushed down. Next, the stage device 1 is pulled out. The base 2 of the stage device 1 can be smoothly pulled out by the two positioning guides of the third cross roller guide 64 and the flat roller guide 68. After the guide rails 61 and 65 are separated from the lower guide rails 62 and 67 on the vacuum processing chamber 51 side, the wheels 76 provided on the base 2 can be smoothly pulled out of the vacuum processing chamber 51. The disassembly after the stage device 1 is pulled out is basically the first stage 3 as described above.
And the second stage 4 only need to be sequentially lifted vertically upward, so that it can be easily disassembled, and the labor for maintenance work can be greatly reduced.

Conversely, in order to return the assembled stage apparatus 1 to the inside of the vacuum processing chamber 51, the reverse procedure may be taken, and the space between the base 2 of the stage apparatus 1 and the surface plate 69 of the vacuum processing chamber 51 may be changed. Since at least one of the two positioning guides is the cross roller guide 64, the positioning in the Y direction can be performed with good reproducibility by the cross roller guide 64.

Further, after the stage device 1 is further pushed in and the substrate 2 is pressed against the stopper 75, the clamping mechanism 74 presses the substrate 2 toward the stopper 75, so that the positioning in the X direction can be performed with good reproducibility. it can.

When the cam 73 of the clamper 70 is rotated after the positioning in the X and Y directions, the cam 73 is rotated.
The four corners of the base 2 are pressed by the clamp rods 71 by the elastic force of the spring 72 attached to the opposite side, and the stage device 1 can be accurately installed at the original predetermined position. Therefore, it is unnecessary to readjust the positional relationship between the laser interferometers 58 and 59 and the movable mirrors 12 and 13 provided in the stage device 1 and the positional relationship between the vacuum lens barrel 52 and the stage device 1 again.

FIG. 2 shows an example in which the cross roller guide 64 is used as one of the two positioning guides disposed between the stage device 1 and the surface plate 69 of the vacuum processing chamber 51. It goes without saying that the positioning guide may be constituted by the cross roller guide 64.

[0042]

As described above, according to the present invention, a flat base, a first stage disposed on the base and driven by a first ultrasonic motor, And a second stage driven by a second ultrasonic motor, and a pair of V
A first lower guide rail having a groove is provided, and a first upper guide rail having a pair of V-grooves is provided on a lower surface of the first stage facing the first lower guide rail. A pair of first cross roller guides is formed by interposing a plurality of rollers in a cross shape between V grooves of the lower guide rail facing each other, and the first stage is movable along the first cross roller guide. And a second lower guide rail having a pair of V-grooves is provided on the upper surface of the first stage in a direction different from that of the first cross roller guide, and a second lower guide rail facing the second lower guide rail is provided. A second upper guide rail having a pair of V grooves is provided on the lower surface of the stage, and a plurality of rollers are formed in a cross shape between the V grooves of the second upper guide rail and the lower guide rail which are opposed to each other. And the stage device is configured to guide the second stage movably along the second cross roller guide, so that the first table and the second table can be smoothly moved. It can be moved in a predetermined direction, and high-resolution positioning can be performed. In addition, at the time of maintenance, it is not necessary to adjust with the preload adjusting screw, and the first table and the second table can be disassembled simply by lifting them vertically upward, and at the time of assembling, the operation opposite to the disassembly may be performed. Since the stage device can be easily disassembled and assembled, the maintainability is high and the working time can be greatly reduced.

Further, according to the present invention, the pressure-contact surface of the first driven member is disposed so as to be located at the center of the pair of first cross roller guides, and the pressure-contact surface of the second driven member is formed. By arranging them so as to be located at the center of the pair of second cross roller guides, the straightness accuracy of the first table and the second table can be further improved.

Further, according to the present invention, at least the substrate, the first table, the second table, the first driven member, and the second driven member among the constituent members of the stage device are provided.
Because it is made of ceramics that can be machined with high hardness and high precision, each stage can be moved with a small driving torque, and a stage device that can perform high-precision positioning can be obtained. Since the abrasion of each driven member in the sliding operation can be reduced, it can be used for a long period of time.

According to the present invention, when the stage device is installed in a vacuum processing chamber to form an electron beam drawing apparatus, a third lower guide rail having a V-groove is installed on the bottom surface of the vacuum processing chamber. A third upper guide rail having a V groove is provided on the lower surface of the base of the stage device facing the third lower guide rail, and between the opposed V grooves of the third upper guide rail and the lower guide rail. A third cross roller guide is configured by interposing a plurality of rollers in a cross shape, and the stage device is positioned in the vacuum processing chamber to form an electron beam drawing apparatus. When returning to the position, the stage device can be installed in the original position with good reproducibility by the cross roller guide provided between the base of the stage device and the vacuum processing chamber. By synergistic effect of the structure of the stage device, it is possible to greatly save labor of maintenance work.

[Brief description of the drawings]

FIG. 1 is a view showing a stage device of the present invention, wherein (a) is a perspective view and (b) is a side view.

FIGS. 2A and 2B are diagrams schematically showing the use of the stage device of the present invention in an electron beam drawing apparatus, wherein FIG. 2A is a front view and FIG. 2B is a side view.

3A and 3B are views showing a conventional stage device, wherein FIG. 3A is a perspective view and FIG. 3B is a side view.

Claims (5)

[Claims] A first stage disposed on the substrate and driven by a first ultrasonic motor; and a first stage disposed on the first stage and driven by a second ultrasonic motor. A second stage to be driven, a first lower guide rail having a pair of V-grooves is installed on the upper surface of the base, and a pair of first lower guide rails is provided on the lower surface of the first stage opposed to the first lower guide rail. A first upper guide rail having a V-groove is provided, and a plurality of rollers are interposed between the V grooves of the first upper guide rail and the lower guide rail which are opposed to each other in a cross shape to form a pair of first cross roller guides. Constitute
The first stage is movably guided along a first cross roller guide, and a second lower guide rail having a pair of V-grooves is provided on an upper surface of the first stage in a direction different from that of the first cross roller guide. At the same time, a second upper guide rail having a pair of V-grooves was provided on the lower surface of the second stage facing the second lower guide rail, and the second upper guide rail and the lower guide rail were opposed to each other. A plurality of rollers are interposed between the V grooves in a cross shape to form a second cross roller guide, and the second stage is movably guided along the second cross roller guide. Stage equipment. 2. A first driven member parallel to the first upper guide rail is provided on a lower surface of the first stage, and the first driven member is frictionally driven with the first ultrasonic motor. To move the first stage, and to provide a second driven member parallel to the second upper guide rail on the lower surface of the second stage, and to move the second driven member to the second super 2. The stage device according to claim 1, wherein the second stage is moved by being driven by friction drive with an acoustic wave motor. 3. A pressure contact surface of the first driven member is provided so as to be located at the center of the pair of first cross roller guides, and a pressure contact surface of the second driven member is a pair of second cross roller guides. 3. The stage device according to claim 2, wherein the stage device is provided at a center of the cross roller guide. 4. The stage device according to claim 1, wherein at least a base, a first stage, a second stage, a first driven member, and a second driven member are formed of ceramics. The stage device according to claim 1. 5. An electron beam writing apparatus comprising the stage apparatus according to claim 1 in a vacuum processing chamber, wherein the third lower guide rail has a V-groove on the bottom surface of the vacuum processing chamber. And a third upper guide rail having a V-groove is provided on the lower surface of the base of the stage device facing the third lower guide rail, and the third upper guide rail and the lower guide rail are opposed to each other. An electron beam writing apparatus, wherein a plurality of rollers are interposed between V grooves in a cross shape to form a third cross roller guide, and the stage device is positioned in the vacuum processing chamber.