CN201413642Y - TDOF (three degrees of freedom) integrated flexible precision positioning table - Google Patents

TDOF (three degrees of freedom) integrated flexible precision positioning table Download PDF

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Publication number
CN201413642Y
CN201413642Y CN2009200735093U CN200920073509U CN201413642Y CN 201413642 Y CN201413642 Y CN 201413642Y CN 2009200735093 U CN2009200735093 U CN 2009200735093U CN 200920073509 U CN200920073509 U CN 200920073509U CN 201413642 Y CN201413642 Y CN 201413642Y
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China
Prior art keywords
groups
flexible
freedom
precision
positioning table
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Expired - Fee Related
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CN2009200735093U
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Chinese (zh)
Inventor
王宏峰
陈道炯
刘魏
迟玉伦
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University of Shanghai for Science and Technology
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University of Shanghai for Science and Technology
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Abstract

The utility model relates to a TDOF (three degrees of freedom) integrated flexible precision positioning table, which comprises a movement table and a base, wherein the movement table is connected with the base by four groups of micrometric displacement amplification mechanisms; and the four groups of micrometric displacement amplification mechanisms are arranged in 90-degree cross-distribution between the base and the movement table. The positioning table can achieve the nano-grade positioning precision, has very good operability, solves the problems of input coupling and output coupling among three groups of micrometric displacement amplification mechanisms effectively, and improves the working flexibility. In the utility adopts the two-grade or higher-grade flexible amplification mechanisms to amplify the movement scope of the worktable. The precision positioning table has wide application prospect in the fields of mechanical precision pressure processing, micro-mechanical hand, optical system location, medical treatment and biology micro-operation and the like.

Description

The flexible precisely locating platform of Three Degree Of Freedom integral type
Technical field
The utility model relates to a kind of flexible precisely locating platform, specifically is a kind of the realization along the precision positioning of Z direction and around the flexible precision positioning platform of the meticulous adjustment of angle of X, Y-axis.
Background technology
At present, precisely locating platform does not have the redundant performance of driving.So-called redundant, be exactly to consider a unnecessary amount from security standpoint, this is measured in order to ensure that instrument, equipment or a certain being operated under the improper situation also can run well.When if motion platform is in improper situation, reduce the ability of finishing the work with losing one or several degree of freedom.Therefore, can drive the ability to work that input improves worktable, satisfy the requirement of avoiding near improper situation by increasing by one or several.This redundant precisely locating platform can be optimized operability, improve kinematics and dynamics.In addition, existing three-freedom degree precision locating platform generally all exists input, output coupled problem, thereby has influenced operating accuracy, increases the control difficulty.
Summary of the invention
The purpose of this utility model is at the existing shortcoming of prior art, provide a kind of Three Degree Of Freedom integral type flexible precision positioning platform, but this positioning table can be avoided near improper situation, optimization operational readiness simultaneously, improve kinematics and dynamics, and whole locating platform body is one, can be processed by a block of material.
For achieving the above object, the utility model adopts following technical proposals:
The flexible precisely locating platform of a kind of Three Degree Of Freedom integral type comprises motion platform, pedestal.Be connected by four groups of micro displacement magnifying mechanisms between motion platform and the pedestal; And four groups of micro displacement magnifying mechanisms are 90 ° of cross-distribution between pedestal and motion platform.
Micro displacement magnifying mechanism is by first to fourth member, first to the 8th flexible hinge, and the first, two connecting rod, microdrive constitutes; Microdrive upper surface and the 4th member lower surface bonds are together, the input end of the first structure bar connects microdrive, and first member and the 4th member are by second connecting rod and second, the 3rd flexible hinge connects, first connecting rod and the 4th member are by second member and first, the 5th flexible hinge connects, and the 3rd member connects by the seven, the eight flexible hinge with the first connecting rod and first member respectively.
Micro displacement magnifying mechanism is that differential secondary amplifies or multistage enlarger.
Compared with the prior art, this experiment is novel has a following beneficial effect:
This experiment is novel has adopted four groups to drive input, and locating platform has only three degree of freedom, this redundant drive has increased the operability of locating platform, can satisfy the kinematics requirement, can also enlarge the working range of locating platform by the progression of further increase enlarger; Owing to adopted four groups of flexible hinges, having guaranteed no gap that motion transmits, do not had friction, exempt to lubricate, high precision and high stability; Owing to adopted symmetrical structure, can effectively avoid the coupling effect importing, export, avoid accumulated error, effectively improve the precision of platform; Owing to adopted displacement amplifying mechanism, the stroke of microdrive can be amplified according to multiple, can realize that motion platform is in motion in a big way; Because motion platform and pedestal all are integrated on the one, can process by a block of material, realize exempting from assembling.
The utility model can not only reach nano grade positioning precision, but and the operational readiness of whole locating platform body, kinematics and dynamics can both obtain very big improvement.Redundant precisely locating platform can also enlarge the working range of locating platform when satisfying the kinematics requirement, increase its operation flexibility, effectively overcomes input, output coupled problem.
Description of drawings
Fig. 1 is a structural front view of the present utility model;
Fig. 2 is the cut-open view of Fig. 1.
Embodiment
The utility model is described in further detail below in conjunction with Figure of description.
Shown in accompanying drawing 1,2, the flexible precisely locating platform of Three Degree Of Freedom integral type of the present utility model comprises pedestal 1, motion platform 2, micro displacement magnifying mechanism 18.
Adopt four groups of micro displacement magnifying mechanisms 18 to be connected between motion platform 2 and the pedestal 1; These four groups of micro displacement magnifying mechanisms 18 are 90 ° of cross-distribution between pedestal and motion platform.
Four groups of micro displacement magnifying mechanism 18 structures are identical.Wherein, arbitrary group of micro displacement magnifying mechanism 18 is by first to fourth member the 3,4,5,6, the first to the 8th flexible hinge 9,10,11,12,13,14,15,16 and the first, two connecting rod 7,8, and microdrive 19 constitutes.
Microdrive 19 upper surfaces and the 4th member 6 lower surface bonds are together, the input end of the first structure bar 3 connects microdrive 19, and first member 3 and the 4th member 6 are by second connecting rod 8 and second, the 3rd flexible hinge 10,11 connects, first connecting rod 7 and the 4th member 6 are by second member 4 and first, the 5th flexible hinge 9,13 connects, and the 3rd member 5 connects by the seven, the eight flexible hinge 15,16 with the first connecting rod 7 and first member 3 respectively.
Micro displacement magnifying mechanism 18 is that differential secondary amplifies or multistage enlarger.

Claims (3)

1. the flexible precisely locating platform of a Three Degree Of Freedom integral type comprises motion platform (2), and pedestal (1) is characterized in that: be connected by four groups of micro displacement magnifying mechanisms (18) between described motion platform (2) and the pedestal (1); And four groups of micro displacement magnifying mechanisms (18) are 90 ° of cross-distribution between pedestal (1) and motion platform (2).
2. the flexible precisely locating platform of Three Degree Of Freedom integral type according to claim 1, it is characterized in that: described micro displacement magnifying mechanism (18) is by first to fourth member (3,4,5,6), first to the 8th flexible hinge (9,10,11,12,13,14,15,16) and first, two connecting rods (7,8), microdrive (19) constitutes; Microdrive (19) upper surface and the 4th member (6) lower surface bonds are together, the input end of the first structure bar (3) connects microdrive (19), and first member (3) passes through second connecting rod (8) and second with the 4th member (6), the 3rd flexible hinge (10,11) connects, first connecting rod (7) passes through second member (4) and first with the 4th member (6), the 5th flexible hinge (9,13) connects, the 3rd member (5) connects by the seven, the eight flexible hinge (15,16) with first connecting rod (7) and first member (3) respectively.
3. the flexible precisely locating platform of Three Degree Of Freedom integral type according to claim 1 is characterized in that: described micro displacement magnifying mechanism (18) amplifies or multistage enlarger for differential secondary.
CN2009200735093U 2009-06-08 2009-06-08 TDOF (three degrees of freedom) integrated flexible precision positioning table Expired - Fee Related CN201413642Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009200735093U CN201413642Y (en) 2009-06-08 2009-06-08 TDOF (three degrees of freedom) integrated flexible precision positioning table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009200735093U CN201413642Y (en) 2009-06-08 2009-06-08 TDOF (three degrees of freedom) integrated flexible precision positioning table

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101871549A (en) * 2010-06-04 2010-10-27 上海理工大学 Three-degree-of-freedom precision-positioning workbench
CN102705661A (en) * 2012-05-29 2012-10-03 合肥工业大学 Three-dimensional no-coupling micro displacement workbench fixed by driver
CN104534244A (en) * 2014-12-30 2015-04-22 北京航空航天大学 Differential-principle-based two-degree-of-freedom parallel-connection rotating platform
CN104575623A (en) * 2014-12-30 2015-04-29 北京航空航天大学 Two-degree-of-freedom parallel connection rotating platform based on flexible rolling contact theory
CN104742046A (en) * 2015-03-24 2015-07-01 中国科学院长春光学精密机械与物理研究所 Parallel two-freedom-degree flexible precision guide mechanism
CN104999452A (en) * 2015-06-26 2015-10-28 中国矿业大学 Three-freedom-degree micro-operation robot
CN104999457A (en) * 2015-06-26 2015-10-28 中国矿业大学 Large-stroke three-freedom-degree micro-operation robot
CN105003799A (en) * 2015-06-26 2015-10-28 中国矿业大学 Multi-configuration precision positioning platform
CN106782673A (en) * 2017-01-03 2017-05-31 南京航空航天大学 A kind of micro-displacement detent mechanism based on piezoelectric stack
CN108615548A (en) * 2018-03-16 2018-10-02 天津大学 Novel three freedom meek parallel precise locating platform
CN109872767A (en) * 2019-01-18 2019-06-11 宁波大学 The submissive parallel micro-manipulator device of multi-source driving

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101871549A (en) * 2010-06-04 2010-10-27 上海理工大学 Three-degree-of-freedom precision-positioning workbench
CN102705661A (en) * 2012-05-29 2012-10-03 合肥工业大学 Three-dimensional no-coupling micro displacement workbench fixed by driver
CN102705661B (en) * 2012-05-29 2013-11-06 合肥工业大学 Three-dimensional no-coupling micro displacement workbench fixed by driver
CN104534244B (en) * 2014-12-30 2016-03-16 北京航空航天大学 A kind of two-degree-of-freedoparallel parallel rotatable platform based on differential principle
CN104575623A (en) * 2014-12-30 2015-04-29 北京航空航天大学 Two-degree-of-freedom parallel connection rotating platform based on flexible rolling contact theory
CN104534244A (en) * 2014-12-30 2015-04-22 北京航空航天大学 Differential-principle-based two-degree-of-freedom parallel-connection rotating platform
CN104575623B (en) * 2014-12-30 2017-01-18 北京航空航天大学 Two-degree-of-freedom parallel connection rotating platform based on flexible rolling contact theory
CN104742046A (en) * 2015-03-24 2015-07-01 中国科学院长春光学精密机械与物理研究所 Parallel two-freedom-degree flexible precision guide mechanism
CN104999452A (en) * 2015-06-26 2015-10-28 中国矿业大学 Three-freedom-degree micro-operation robot
CN104999457A (en) * 2015-06-26 2015-10-28 中国矿业大学 Large-stroke three-freedom-degree micro-operation robot
CN105003799A (en) * 2015-06-26 2015-10-28 中国矿业大学 Multi-configuration precision positioning platform
CN106782673A (en) * 2017-01-03 2017-05-31 南京航空航天大学 A kind of micro-displacement detent mechanism based on piezoelectric stack
CN108615548A (en) * 2018-03-16 2018-10-02 天津大学 Novel three freedom meek parallel precise locating platform
CN109872767A (en) * 2019-01-18 2019-06-11 宁波大学 The submissive parallel micro-manipulator device of multi-source driving

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C53 Correction of patent for invention or patent application
CB03 Change of inventor or designer information

Inventor after: Wang Hongfeng

Inventor after: Chen Daojiong

Inventor after: Liu Wei

Inventor after: Chi Yulun

Inventor before: Wang Hongfeng

Inventor before: Chen Daojiong

Inventor before: Liu Wei

Inventor before: Chi Yulun

DD01 Delivery of document by public notice

Addressee: Liu Wei

Document name: Notification that Application Deemed not to be Proposed

C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20100224

Termination date: 20100608