CN107591187A - A kind of micromotion platform with damping - Google Patents
A kind of micromotion platform with damping Download PDFInfo
- Publication number
- CN107591187A CN107591187A CN201710847619.XA CN201710847619A CN107591187A CN 107591187 A CN107591187 A CN 107591187A CN 201710847619 A CN201710847619 A CN 201710847619A CN 107591187 A CN107591187 A CN 107591187A
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- China
- Prior art keywords
- pedestal
- piezoelectric ceramic
- ceramic actuator
- damping
- supporting plate
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Abstract
The present invention discloses a kind of micromotion platform with damping, motion platform including a rectangular susceptor and in pedestal, damping, pedestal is provided with orthogonal first piezoelectric ceramic actuator of two driving directions and the second piezoelectric ceramic actuator, damping includes the first supporting plate and the second supporting plate, second spring is provided between first supporting plate and the second supporting plate, second supporting plate is on pedestal, first piezoelectric ceramic actuator is fixedly connected by screw with the first corresponding supporting plate respectively with the second piezoelectric ceramic actuator, the side wall of pedestal is provided with rubber layer, the bottom wall of pedestal is provided with waterproof layer, the other end of first spring supports a displacement amplifying mechanism.The application, so as to ensure that the precision of micromotion platform, reduces error by setting damping to reduce damage of the extraneous vibration for micromotion platform on pedestal.
Description
Technical field
The present invention relates to the microoperation technical field in advanced manufacture, more particularly, to a kind of with damping
Micromotion platform.
Background technology
In recent years, it is micro-electronic manufacturing, ultraprecise machine-building, micro- with the continuous progress of science and technology and industrial technology
The field rapid developments such as robot manipulation, accurate measurement optical instrument and biomedical operation, there is an urgent need to can be in nanoscale
The system and equipment for being positioned and being operated in precision.In these areas, the micromotion platform with nano-precision is its core
Part, it studies the favor by domestic and foreign scholars.Traditional mechanical structure, such as motor, gear, hinge are due to being assembled
And the influence of the factor such as movement clearance, friction, damping, nano-precision is unable to reach, and using piezoelectric ceramics as driver, extensively
Applied to the micromotion platform with nano-precision.
The micromotion platform of enlarger is currently based on transmission is inaccurate, error is big, shock pair due to external world's generation
In the damage of piezoelectric ceramic actuator, and worked in the case of impaired, to transmission accuracy by strong influence.
The content of the invention
In order to solve the above technical problems, it is an object of the invention to provide a kind of micromotion platform with damping.
A kind of micromotion platform with damping of the present invention, it is characterised in that：Including a rectangular susceptor and located at institute
The motion platform in pedestal is stated, the pedestal is provided with orthogonal first piezoelectric ceramic actuator of two driving directions and second
The both ends of piezoelectric ceramic actuator, first piezoelectric ceramic actuator and second piezoelectric ceramic actuator are respectively equipped with half
Spherical thrust ball, wherein one end of first piezoelectric ceramic actuator and second piezoelectric ceramic actuator are held in the
The end of one spring, first piezoelectric ceramic actuator with the other end of second piezoelectric ceramic actuator is corresponding respectively sets
Have a damping, the damping includes the first supporting plate and the second supporting plate, first supporting plate with described second
Second spring is provided between fagging, second supporting plate is on the pedestal, first piezoelectric ceramic actuator and institute
State the second piezoelectric ceramic actuator to be fixedly connected with the first corresponding supporting plate by screw respectively, the side wall of the pedestal is set
There is rubber layer, the bottom wall of the pedestal is provided with waterproof layer, and the other end of first spring supports a displacement amplifying mechanism.
Further, the displacement amplifying mechanism includes a triangle push pedal and the right angle in the triangle push pedal
Trapezoidal plate, the hypotenuse and the hypotenuse of the right-angled trapezium plate of the triangle push pedal are slidably connected, the right-angled trapezium plate and three
The contact surface that angular push pedal is slidably connected is provided with a blocking arm being limited in the triangle push pedal in contact surface, the blocking arm
Set along the length direction of the hypotenuse of the right-angled trapezium plate, the triangle push pedal has the first right-angle side and the second right angle
Side, the length of first right-angle side are less than the length of second right-angle side, and the right-angled trapezium plate has upper bottom and bottom,
The length at the upper bottom is less than the length of the bottom, and first right-angle side and the upper bottom are located at the same side, and described second
Right-angle side is located at the same side with the bottom.
Further, the pedestal is provided with two orthogonal rectangular recess, first piezoelectric ceramic actuator with
Second piezoelectric ceramic actuator is respectively arranged in corresponding groove.
Further, the thrust ball is sheet rubber.
Further, the internal diameter of first spring is less than the external diameter of the thrust ball.
Further, the outlet of piezoelectric ceramics signal wire is additionally provided with the pedestal, the pedestal upper end is provided with micromotion platform
End cap, micromotion platform end cap are connected by bolt with pedestal.
By such scheme, the present invention at least has advantages below：
The application by pedestal set damping can reduce damage of the extraneous vibration for micromotion platform, so as to
The precision of micromotion platform is ensure that, reduces error.
Described above is only the general introduction of technical solution of the present invention, in order to better understand the technological means of the present invention,
And can be practiced according to the content of specification, below with presently preferred embodiments of the present invention and coordinate accompanying drawing describe in detail as after.
Brief description of the drawings
Fig. 1 is the structural representation of micromotion platform of the present invention with damping；
Fig. 2 is the right-angled trapezium plate structure schematic diagram of micromotion platform of the present invention with damping.
Wherein：
2 it is pedestal, 4 be motion platform, 6 be the first piezoelectric ceramic actuator, 8 be the second piezoelectric ceramic actuator, 10 is
Thrust ball, 12 be the first spring, 14 be the first supporting plate, 16 be the second supporting plate, 18 be second spring, 20 be rubber layer, 22
Be triangle push pedal, 2201 be the first right-angle side, 2202 be the second right-angle side, 24 be groove, 25 be right-angled trapezium plate, 26 be gear
Arm.
Embodiment
With reference to the accompanying drawings and examples, the embodiment of the present invention is described in further detail.Implement below
Example is used to illustrate the present invention, but is not limited to the scope of the present invention.
Referring to Fig. 1 to Fig. 2, a kind of micromotion platform with damping described in a preferred embodiment of the present invention, including
One rectangular susceptor 2 and the motion platform 4 in the pedestal 2, the pedestal are provided with two driving directions orthogonal the
One piezoelectric ceramic actuator 6 and the second piezoelectric ceramic actuator 8, first piezoelectric ceramic actuator 6 and second piezoelectricity
The both ends of ceramic driver 8 are respectively equipped with hemispheric thrust ball 10, first piezoelectric ceramic actuator 6 and the described second pressure
Wherein one end of electroceramics driver 8 is held in the end of the first spring 12, and the internal diameter of the first spring is less than the thrust ball
External diameter, preferably thrust ball are sheet rubber.
The other end of first piezoelectric ceramic actuator 6 and second piezoelectric ceramic actuator 8 is correspondingly provided with respectively
Damping, the damping include the first supporting plate 14 and the second supporting plate 16, first supporting plate 14 and described the
Second spring 18 is provided between two supporting plates 16, second supporting plate 16 is on the pedestal 2, first piezoelectric ceramics
Driver 6 is fixedly connected by screw with the first corresponding supporting plate 14 respectively with second piezoelectric ceramic actuator 8, institute
The side wall for stating pedestal 2 is provided with rubber layer 20, and the bottom wall of the pedestal is provided with waterproof layer, and the other end of first spring supports
One displacement amplifying mechanism.
The displacement amplifying mechanism includes a triangle push pedal 22 and the right-angled trapezium plate in the triangle push pedal 22
25, the hypotenuse of the triangle push pedal 22 and the hypotenuse of the right-angled trapezium plate 25 are slidably connected, the right-angled trapezium plate and three
The contact surface that angular push pedal is slidably connected is provided with a blocking arm 26 being limited in the triangle push pedal in contact surface, the gear
The length direction of hypotenuse of the arm along the right-angled trapezium plate is set, and the triangle push pedal has the first right-angle side 2201 and second
Right-angle side 2202, the length of first right-angle side are less than the length of second right-angle side, and the right-angled trapezium plate has upper
Bottom and bottom, the length at the upper bottom are less than the length of the bottom, and first right-angle side is located at the same side with the upper bottom,
Second right-angle side is located at the same side with the bottom.
The pedestal is provided with two orthogonal rectangular recess 24, first piezoelectric ceramic actuator 6 and described the
Two piezoelectric ceramic actuators 8 are respectively arranged in corresponding groove 24.
It is preferred that being additionally provided with the outlet of piezoelectric ceramics signal wire on pedestal, the pedestal upper end is provided with micromotion platform end cap, fine motion
Platform end cap is connected by bolt with pedestal.
Described above is only the preferred embodiment of the present invention, is not intended to limit the invention, it is noted that for this skill
For the those of ordinary skill in art field, without departing from the technical principles of the invention, can also make it is some improvement and
Modification, these improvement and modification also should be regarded as protection scope of the present invention.
Claims (6)
- A kind of 1. micromotion platform with damping, it is characterised in that：Including a rectangular susceptor and in the pedestal Motion platform, the pedestal is provided with orthogonal first piezoelectric ceramic actuator of two driving directions and the second piezoelectric ceramics drives Dynamic device, the both ends of first piezoelectric ceramic actuator and second piezoelectric ceramic actuator are respectively equipped with hemispheric thrust Wherein one end of ball, first piezoelectric ceramic actuator and second piezoelectric ceramic actuator is held in the end of the first spring Portion, the other end of first piezoelectric ceramic actuator and second piezoelectric ceramic actuator are correspondingly provided with damping machine respectively Structure, the damping includes the first supporting plate and the second supporting plate, between first supporting plate and second supporting plate Provided with second spring, second supporting plate is on the pedestal, first piezoelectric ceramic actuator and the described second pressure Electroceramics driver is fixedly connected by screw with the first corresponding supporting plate respectively, and the side wall of the pedestal is provided with rubber Layer, the bottom wall of the pedestal are provided with waterproof layer, and the other end of first spring supports a displacement amplifying mechanism.
- 2. the micromotion platform according to claim 1 with damping, it is characterised in that：The displacement amplifying mechanism bag Include a triangle push pedal and the right-angled trapezium plate in the triangle push pedal, the hypotenuse of the triangle push pedal with it is described straight The hypotenuse of angle trapezoidal plate is slidably connected, and the right-angled trapezium plate is provided with one by institute with the contact surface that triangle push pedal is slidably connected The blocking arm that triangle push pedal is limited in contact surface is stated, the length direction of hypotenuse of the blocking arm along the right-angled trapezium plate is set Put, the triangle push pedal has the first right-angle side and the second right-angle side, and the length of first right-angle side is less than described second The length of right-angle side, the right-angled trapezium plate have upper bottom and bottom, and the length at the upper bottom is less than the length of the bottom, institute State the first right-angle side and be located at the same side with the upper bottom, second right-angle side is located at the same side with the bottom.
- 3. the micromotion platform according to claim 1 with damping, it is characterised in that：The pedestal is provided with two-phase Mutually vertical rectangular recess, first piezoelectric ceramic actuator is respectively arranged on corresponding with second piezoelectric ceramic actuator In groove.
- 4. the micromotion platform according to claim 1 with damping, it is characterised in that：The thrust ball is rubber Piece.
- 5. the micromotion platform according to claim 1 with damping, it is characterised in that：The internal diameter of first spring Less than the external diameter of the thrust ball.
- 6. the micromotion platform according to claim 1 with damping, it is characterised in that：Pressure is additionally provided with the pedestal Electroceramics signal wire exports, and the pedestal upper end is provided with micromotion platform end cap, and micromotion platform end cap is connected by bolt with pedestal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710847619.XA CN107591187A (en) | 2017-09-19 | 2017-09-19 | A kind of micromotion platform with damping |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710847619.XA CN107591187A (en) | 2017-09-19 | 2017-09-19 | A kind of micromotion platform with damping |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107591187A true CN107591187A (en) | 2018-01-16 |
Family
ID=61048451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710847619.XA Withdrawn CN107591187A (en) | 2017-09-19 | 2017-09-19 | A kind of micromotion platform with damping |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107591187A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108615546A (en) * | 2018-03-26 | 2018-10-02 | 郑州航空工业管理学院 | A kind of measurement Gear Root residual stress angle regulator |
| CN113404806A (en) * | 2021-07-07 | 2021-09-17 | 四川大学 | Active vibration damping device based on metamaterial |
-
2017
- 2017-09-19 CN CN201710847619.XA patent/CN107591187A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108615546A (en) * | 2018-03-26 | 2018-10-02 | 郑州航空工业管理学院 | A kind of measurement Gear Root residual stress angle regulator |
| CN108615546B (en) * | 2018-03-26 | 2023-05-02 | 郑州航空工业管理学院 | Angle adjusting device for measuring residual stress of gear tooth root |
| CN113404806A (en) * | 2021-07-07 | 2021-09-17 | 四川大学 | Active vibration damping device based on metamaterial |
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| Date | Code | Title | Description |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20180116 |