M324557 八、新型說明： 【新型所屬之技術領域】 本創作係有關於-種對位峰θ角線性移動裝置，尤指一種 利用X軸致動器組、Y軸致動器組及0軸移動致動器組線性移動控 制定位平台一次定位，達到精度高、步進量可控制之目的。 【先前技術】 習用對位檢測利用Χ、γ、0轴三自由度的有限行程移動對位， 係利用^k(l/r)tan(AY/AX)之公式以計算偏移角度之距離，其 中0為角度，X、Y為垂直及水平座標，！^為對應半徑之改變而改 變之常數，惟習用對位過程中產生0角位之移易產生誤差，如第 一圖所示，以0軸係由馬達驅動連動桿B以螺桿或滾珠軸D於預 設之軌道轴A作直線前進，其中連動桿b必須預留空間E，以利滾 珠軸D作彈性調整，否則無法順暢連動，惟如此即造成在大幅度 調整0軸至第二個位置時，以執道F為直線軌道運動，因此，當 滾珠轴D由位置C1移動至位置C2時必須移動至空間e的頂端， 如此造成移動半徑必須由半徑r改變成較長的半徑rl，如此將使 變動參數k增加，而根據不同的角度，其半徑增減的長度只能以 粗略的估計，偏移的角度因此也僅是粗估的量，因此在對位調校 時’計算偏移量的0及移動的X、Y軸之數值常不夠精準，因此必 需耗費不少時間重覆測量或檢測相關的移動數值，無形中增加對 位次數及時間，不僅耗時、耗能、精度不足，使量能無法提升， 有鋸於此，本創作人乃亟思加以改良創新，並經多年苦心孤諸潛 5 M324557 ====== 【新型内容】 本創作之主要目的，在於提供—種對餘軸θ祕性移動褒 主要侧轉槪移動偏擺的随絲，產生㈣變半徑的^ 況下’可以鮮_整基準物與制物件之相對位置，= 的半徑以單純化計量測兩者間之偏差值，再透過運動控^介面二 制線性致動器動作，使X軸致動器組、γ轴致動器組及叫移動^ 動器組線性移動控败位平台—次到位，達聰度 可控制之效果。 乂運置 。為了達成上述目的，本創作包括—x轴致動器組、一 Y轴致 動器組及-0轴移動致動器組，其係以線性組合各致動器租改 變輸入脈·量及正反轉職控做移，錢與魅制介面控 制線性致動n_，於台面可進行水平位_及偏則度之調^ 者，達到精密調校之目的。 ^ 【實施方式】 為使貴審查員方便簡捷瞭解本創作之特徵内容與優點及其 所達成之功效能夠更為顯現，祕將本創作為達成其創作目的之 整體構造上設計，配合_及實_，作進_步詳細說明如下·· 請參閱第二圖、第三圖、第四圖、第四之一圖和第五圖所示， 本創作係提供—種對位4軸Θ肖線性移動裝置丨，包括_ χ轴致動 M324557 琴衾H In ^ 、一 Y軸致動器組2〇及一 Θ軸移動致動器組30連結移動 ^ ° 40’整體裝置設置於—旋轉軸座5〇上，χ軸致動器組1〇與¥ 器址20係分別連結組合於移動平台4〇之一侧，移動平台 40 ^含上蓋41、中移動座42及下移動座43所組成，使移動平台 〃可藉由各移動座之線性滑動作χ軸、γ轴移動，其中順逆時鐘 • 旋轉運動則以移動平S 4G透過旋轉軸座5Q連翻定於底座1〇〇， 並藉由下移動座43連結<9軸移動致動器組3〇以作旋轉調整，其 中0輛移動致動器組3〇透過一旋轉軸1〇1與底座1〇〇固定，而其 移動平台40係以線性組合各χ軸致動器組1〇、一 γ軸致動器組 20及—β軸移動致動器組30，藉由改變輸入脈波數量及正反轉訊 號控制位移，並透過運動控制介面控制各線性致動器（12、22、 32)動作，於底座1〇〇可進行水平、垂直位移以及偏旋角度之調 整者’達到精密調校之目的。 X軸致動器組10包括一心軸η之外部裝設有一為驅動源之致 動器12’心軸η與移動平台4〇間設有一軸向位移裝置（圖未示）， 丨供移動平台軸向移動；Υ軸致動器組20包括一心軸21之外部裝設 有一為驅動源之致動器22，心軸21與移動平台40間設有一軸向 位移裝置23，供移動平台4〇軸向移動；0軸移動致動器組3〇包 括一心軸31之外部裝設有一為驅動源之致動器32，心軸31穿置 軸向位移裝置33,該軸向位移裝置33為一可滑動之座體嵌套於心 軸31上，其上設有螺桿或軸桿34可連結一連接片體π與移勤 台40連接。 ^ ^ 言月參閱第五圖和第六圖所示，當旋轉角度不同時，可藉利用 致動器32旋動心軸31用以改變軸向位移裝置羽至位 ι ’ 而 7 M324557 促使軸桿34藉由連結片體35拉動移動平台40形成旋轉，此時藉 由轴向位移裝置33的偏移帶動θ轴移動致動器組30整組以旋轉 抽101為轴心之旋轉’抵銷因移動平台4〇以旋轉軸座5〇為軸心 旋轉一 0角所產生的半徑r改變效果，如此即可控制旋轉軸座5〇 圓心至連接片體35之軸桿34間移動半徑固定，而可以達到半徑 完全不動_確對位的效果，此時計算公式^k(l/r)tan(AY/^ X)中之k(l/r)為固定值不再是粗估值，因僅需計算tan(AY/Ax) 即可得到精確的位移角度。 ^上列詳細說明係針對本創作之一可行實施例之具體說明，惟 該實施例並_赚制摘作之補細，凡未雌本創作技藝 精神所為之等效實施或變更，均應包含於本案之專利範圍中。 申4刚未曾公開，其所具之進步性、實用性， 綜上所述，本創作在突破先前之技術結構下，確實已達到所 欲增進之功效’且也非熟該項技藝者所祕思及，再者，本創作 顯已符合新型專利 【圖式簡單說明】 第-圖為習用裝置示意圖 第二圖係本創作之分解圖。 第二圖係本創作之組合圖。 第四圖係本創作之θ軸移動致動器組與移動平台的動作今—立 圖。 則不思 第四之—_本_之θ轴移動致動驗與移動平㈣動作後示 M324557 意圖。 第五圖係本創作之線性移動示意圖。 第六圖係本創作之<9軸線性移動狀態比較示意圖。 【主要元件符號說明】 1對位主軸0角線性移動裝置 10 X軸致動器組 20 Y軸致動器組 30 β轴移動致動器組 11、 2卜31心轴 12、 22、32致動器 23、33軸向位移裝置 34軸桿 35連接片體 40移動平台 41上蓋 42中移動座 43下移動座 50旋轉軸座 100底座 101旋轉軸 Α軌道軸 B連動桿M324557 VIII. New description: [New technical field] The author has a linear movement device for the paragon-angle angle θ angle, especially one that uses the X-axis actuator group, the Y-axis actuator group and the 0-axis movement. The actuator group linear movement control positioning platform is positioned once, achieving high precision and controllable stepping amount. [Prior Art] Conventional alignment detection uses the finite-stroke movement alignment of three degrees of freedom of Χ, γ, and 0 axes, and uses the formula of ^k(l/r)tan(AY/AX) to calculate the distance of the offset angle. Where 0 is the angle, X and Y are vertical and horizontal coordinates,! ^ is a constant that changes according to the change of the radius, but the shift of the 0-corner position in the process of the alignment is easy to produce an error. As shown in the first figure, the linkage lever B is driven by the motor in the 0-axis system to the screw or the ball axis D. The preset track axis A advances in a straight line, wherein the interlocking bar b must reserve space E for the ball axis D to be elastically adjusted, otherwise it cannot be smoothly linked, but this causes a large adjustment of the 0 axis to the second position. , the orbital F is linear orbital movement, therefore, when the ball axis D moves from the position C1 to the position C2, it must move to the top of the space e, so that the moving radius must be changed from the radius r to the longer radius rl, thus The variation parameter k is increased, and according to different angles, the length of the radius increase and decrease can only be roughly estimated, and the angle of the offset is therefore only a rough estimate, so the offset is calculated when the alignment is adjusted. 0 and the value of the X and Y axes of the movement are often not accurate enough. Therefore, it takes a lot of time to repeatedly measure or detect the relevant movement values. Invisibly increase the number of registrations and time, which is not only time-consuming, energy-consuming, and insufficient in precision. the amount Can't improve, there is a saw here, this creator is thinking and improving and innovating, and after many years of hard work and loneliness 5 M324557 ====== [New content] The main purpose of this creation is to provide a kind of pair of residual axes θ 性 褒 褒 褒 褒 褒 褒 褒 褒 褒 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘The deviation value is then transmitted through the motion control interface two linear actuators, so that the X-axis actuator group, the γ-axis actuator group and the mobile actuator group linear movement control platform are in place. The effect that Cong can control.乂运置. In order to achieve the above object, the present invention includes an -x-axis actuator group, a Y-axis actuator group, and a -axis moving actuator group, which linearly combines actuators to change the input pulse amount and positive Reversing the job control to move, the money and the fascinating interface control linear actuation n_, on the table can be adjusted horizontally _ and the degree of partiality, to achieve the purpose of precision tuning. ^ [Implementation] In order to make it easier for your examiner to understand the characteristics and advantages of this creation and the effects achieved by it, the secret design of this creation is to achieve the overall construction of its creation purpose. _, 进行进_steps are explained in detail below. · Please refer to the second, third, fourth, fourth and fifth figures. This creation provides a kind of alignment 4-axis Θ-axis linear The mobile device 丨 includes a _ χ axis actuating M324557 hammer H In ^ , a Y-axis actuator group 2 〇 and a 移动 axis moving actuator group 30 connected to move the ^ 40 ′ unit device is disposed on the rotating shaft seat 5〇, the χ-axis actuator group 1〇 and the ¥ 器 site 20 are respectively combined and combined on one side of the mobile platform 4〇, and the moving platform 40^ is composed of an upper cover 41, a middle movable seat 42 and a lower moving seat 43. The moving platform can be moved by the linear sliding action axis and the γ axis of each moving seat, wherein the forward clocking and the rotating motion are respectively turned to the base 1 by the moving flat S 4G through the rotating shaft seat 5Q, and by The lower moving seat 43 is coupled to the <9-axis moving actuator group 3' for rotation adjustment, wherein 0 The moving actuator group 3 is fixed to the base 1 through a rotating shaft 1〇1, and the moving platform 40 linearly combines the respective shaft actuator groups 1 and γ-axis actuator groups 20 and The β-axis moving actuator group 30 controls the displacement by changing the number of input pulse waves and the forward and reverse signals, and controls the movement of each linear actuator (12, 22, 32) through the motion control interface. The adjustment of the horizontal, vertical displacement and the angle of rotation 'to achieve the purpose of precision adjustment. The X-axis actuator set 10 includes a spindle η externally mounted with a drive source actuator 12' between the spindle η and the moving platform 4 设有 is provided with an axial displacement device (not shown) for the mobile platform Axial movement; the shaft actuator set 20 includes a mandrel 21 externally provided with an actuator 22 as a driving source, and an axial displacement device 23 is disposed between the mandrel 21 and the moving platform 40 for the mobile platform 4〇 The axial movement; the 0-axis moving actuator group 3 includes a mandrel 31 externally provided with an actuator 32 as a driving source, and the spindle 31 passes through the axial displacement device 33, and the axial displacement device 33 is a The slidable seat body is nested on the mandrel 31, and a screw or shaft 34 is disposed thereon to connect with a connecting piece π to be connected to the transfer station 40. ^ ^ 月月 Referring to the fifth and sixth figures, when the rotation angle is different, the mandrel 31 can be rotated by the actuator 32 to change the axial displacement device feather to the position ι ' while the 7 M324557 causes the shaft 34 is rotated by pulling the moving platform 40 by the connecting piece 35. At this time, the rotation of the axial displacement device 33 drives the entire group of the θ-axis moving actuator group 30 to rotate the pumping 101 as the axis of rotation. The movement platform 4 turns the radius r generated by rotating the 0-angle of the rotating shaft base 5〇 as an axis to change the effect, so that the radius of movement of the rotating shaft seat 5〇 to the shaft 34 of the connecting piece 35 can be controlled, and It is possible to achieve the effect that the radius is completely immobile _ true alignment. At this time, the k(l/r) in the calculation formula ^k(l/r)tan(AY/^ X) is a fixed value and is no longer a rough estimate, because only You need to calculate tan(AY/Ax) to get an accurate displacement angle. ^ The detailed description above is a detailed description of one of the possible embodiments of the present invention, but the embodiment is exemplified by the exaggeration of the abstract, and the equivalent implementation or change of the female creative spirit should include In the scope of the patent in this case. Shen 4 has never been publicized, and its progress and practicality. In summary, this creation has indeed achieved the desired effect under the previous technical structure, and it is not familiar with the skill of the artist. Thinking again, in addition, this creation has been in line with the new patent [Simple Description of the Drawings] The first picture is a schematic diagram of the second diagram of the conventional device. The second picture is a combination of the creations. The fourth picture is the action of the θ-axis moving actuator group and the mobile platform of the present creation. Then do not think the fourth - _ _ θ axis movement actuation test and move flat (four) action after the M324557 intention. The fifth picture is a schematic diagram of the linear movement of the creation. The sixth figure is a schematic diagram of the comparison of the linear motion state of the present invention. [Main component symbol description] 1 registration spindle 0 angle linear movement device 10 X axis actuator group 20 Y axis actuator group 30 β axis movement actuator group 11, 2b 31 spindle 12, 22, 32 Actuator 23, 33 axial displacement device 34 shaft 35 connecting piece 40 moving platform 41 upper cover 42 moving seat 43 lower moving seat 50 rotating shaft seat 100 base 101 rotating shaft Α track shaft B linkage rod
Cl、C2、33’ 位置 M324557 D滾珠軸 E空間 F執道 r、rl半徑Cl, C2, 33' position M324557 D ball axis E space F way r, rl radius