JPH06294B2 - Positioning device - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a positioning device used, for example, in stacking printed circuit boards without misalignment.

(Prior art and its problems) In recent years, the pattern of a printed circuit board has been further miniaturized, and along with this, the positioning of the board is required to have an accuracy on the order of micron. In particular, in a multi-layer substrate formed by stacking a plurality of substrates on which an integrated circuit is mounted, even a slight misalignment between layers causes a defect, and therefore extremely high-precision positioning is required. . In addition, such miniaturized boards and electronic components are generally produced in a clean room, and since the cost per area is high in a clean room, it is indispensable to make the equipment compact in order to reduce product costs. Is. Furthermore, in order to maintain high quality, it is necessary to fully consider dust generation from the device.

9 (a) and 9 (b) are a plan view and a right side view showing a conventional substrate positioning device, respectively. In the figure, reference numeral 1 is a table for placing a substrate (not shown) which is an object to be positioned, and has a hollow structure so that the substrate can be punched by a pressing device after the positioning. The table 1 is mounted on the X-axis rail 3a via the bearings 2a and 2b.
It is movably mounted on 3b and is moved and positioned in the X-axis direction in accordance with the rotation of the ball screw 5 extending on the rotary shaft of the X-axis drive motor 4. Further, the table 1, bearings 2a and 2b, X-axis rails 3a and 3b, and X-axis drive motor 4
And the ball screw 5 as a whole has bearings 6a, 6b.
A ball screw 9 which is movably mounted on Y-axis rails 7a and 7b via (the bearing 6a is visible in FIG. 9 (b)) and extends on the rotation shaft of the Y-axis drive motor 8. Is moved and positioned in the Y-axis direction according to the rotation of the.

In such a conventional device, the following various problems have been pointed out. Since the X-axis drive motor 4 and the Y-axis drive motor 8 are placed horizontally and cannot be concentrated in one place, the device cannot be made compact. For positioning to the micron order with ball screws 5 and 9, use 2 nuts.
As a W nut to be used, a preload is applied to remove backlash, and a precise ball screw is required, resulting in a large device and high cost. Dust may be generated from the friction parts of the ball screws 5 and 9. Ball screws 5 and 9 are locked during runaway, and it takes time to recover. Mechanisms such as sensors and stoppers are required at the stroke end, making the device complicated and large.

(Object of the Invention) Therefore, an object of the present invention is to solve the above-mentioned problems of the prior art, and to provide a positioning device that is compact, has a simple structure, and can perform highly accurate positioning easily.

(Means for Achieving the Object) In order to achieve the above object, the positioning device according to the present invention is provided on the base member and on the base member so as to be movable back and forth in the first linear direction with respect to the base member. A first moving plate, a surface parallel to the first moving plate, and on the first moving plate, the first moving plate being orthogonal to the first linear direction; Two
A second movable plate provided so as to be able to move forward and backward in a linear direction, and a surface parallel to the second movable plate, and
A third moving plate, which is provided on the second moving plate so as to be rotatable in both forward and backward directions about a predetermined axis with respect to the second moving plate, and positioning fixed to the third moving plate. The object placing member, the first urging means for urging the first moving plate in one of its movable directions, and the second moving plate in one of its movable directions. Second urging means for urging, third urging means for urging the third moving plate in either one of forward and reverse rotation directions, and one of the front, rear, left, and right sides of the base plate. With respect to the base plate, the first drive motor is fixed to the first moving plate in a state in which the rotation drive shaft extends downward, and the rotation drive shaft is rotatable by a required angle in response to a command from the outside. The first drive A second drive which is fixed to the first moving plate in a state where the rotation drive shaft extends upward on the same side as the motor and whose rotation drive coaxial is rotatable by a required angle in response to a command from the outside. The motor and the base plate are fixed to the second moving plate in a state in which the rotary drive shaft extends upward on the same side as the first drive motor, and the rotary drive shaft receives an external command. Accordingly, a third drive motor rotatable by a required angle, first to third eccentric rollers attached to rotation shafts of the first to third drive motors, and fixed to the base member, the first drive motor The first follower plate pressed against the first eccentric roller by the urging force of the urging means and the second moving plate are fixed, and the second urging force of the second urging means causes the second follower plate to be pressed. A second follower plate that is pressed against the center roller; and a third follower plate that is fixed to the third moving plate and that is pressed against the third eccentric roller by the biasing force of the third biasing means. ing.

(Embodiment) FIG. 1 is an explanatory diagram showing an overall configuration of a substrate laminating apparatus to which a positioning device according to an embodiment of the present invention is applied. 1
Reference numeral 1 is an XYθ table for positioning the board, which is a metal frame 1
Substrate 13 glued to No. 2 (see FIG. 2) is placed and fixed. Four positioning ITVs 14a to 14d are arranged above the XYθ table 11, and each of the ITVs 14a to 14d is a controller 15a.
Under the control of 15d, the substrate 13 is imaged in accordance with a command from the control device 16. The captured image is the monitor T
Displayed on V17. The XYθ table 11 is driven by an X-axis drive motor 102, a Y-axis drive motor 202, and a θ-axis drive motor 302 so as to be movable in the X-axis direction, the Y-axis direction, and the θ-axis direction, respectively. A drive command according to the operation of 18 is given to each motor.

2 and 3 are explanatory views showing a state at the time of positioning. As shown in FIG. 2, four positioning reference holes 19 are formed in the substrate 13, and these reference holes 19 are I
The images are picked up by the TVs 14a to 14d and displayed on the monitor TV 17 as shown in FIG. FIG. 3A shows a state in which the reference hole 19 is not within the positioning frame surrounded by the reference bright lines displayed on the four-division screen of the monitor TV 17. The worker looks at the monitor TV 17,
As shown in FIG. 3 (b), the chessler handle 18 is operated so that the reference hole 19 is located in the positioning frame, and the XYθ table 11 is moved in a required direction to position the substrate 13 at a fixed position.

In FIG. 1, reference numeral 20 denotes an upper die press for punching out the outer shape of the positioned substrate 13, pin holes, etc., and adsorbing after punching, 21.
Is a lower die press that can move up and down, and an XYθ table 11
Is mounted on the rail 22 and is movable to the press position as shown by an arrow 23. Reference numeral 24 is a laminated plate for picking up the substrate 13 adsorbed by the upper die press 20 to the press position and laminating the substrate 13, and the XYθ table 1
As with No. 1, it is placed on the rail 22 and can move between the press position and the standby position as shown by an arrow 25. Above the standby position of the laminating plate 24, two confirmation ITVs 26a and 26b for surely confirming whether or not they are laminated with high accuracy are arranged. These ITVs 26a and 26b are the controllers 27a and 26b, respectively.
Under the control of 27b, the board 13 laminated after pressing is imaged in accordance with a command from the control device 16. The captured image is displayed on the monitor TV 17. The operator selects the positioning ITVs 14a-1
4d and the ITVs 26a and 26b for confirmation are switched.

To briefly describe a series of operations, the worker first uses the chessner handle 18 while watching the monitor TV 17 and the board 1
After positioning 3, the XYθ table 11 is moved to the press position. Next, the lower die press 21 is raised to punch the substrate 13, the punched substrate 13 is adsorbed by the upper die press 20, and the lower die press 21 is lowered. Next, the stacking table 24 is moved to the press position while retracting the XYθ table 11, and further raised to the height of the substrate 13 adsorbed by the upper die press 20, and then the suction by the upper die press 20 is stopped to stop the substrate 13 Are stacked on the stacking table 24. And the stacking table 24
ITV26 for confirmation by retracting and retracting to the standby position
The monitor TV 17 is switched to the mode of a or 26b to confirm the laminated state. By repeating the above operation, the required number of substrates 13 are accurately stacked on the stacking table 24.

FIG. 4 and FIG. 5 are a plan view and a front sectional explanatory view showing the mechanism of the XYθ table 11 in detail, respectively.
FIG. 6 shows the XYθ table 1 shown in FIGS. 4 and 5.
1 is an explanatory view schematically showing only the X-axis and Y-axis drive mechanisms, and FIG. 7 is a front cross-sectional explanatory view thereof. Further, FIGS. 8 (a) and 8 (b) are a partial plan view and a front cross-sectional view showing, on an enlarged scale, only the drive portion of the θ-axis drive mechanism.

As shown in these drawings, the XYθ table 11 includes an X-axis plate 101, a Y-axis plate 201, a θ-axis plate 301, and these respective plates 10 which constitute an X-axis drive mechanism, a Y-axis drive mechanism and a θ-axis drive mechanism, respectively.
It is configured to include an X-axis motor 102, a Y-axis motor 202, and a θ-axis motor 302 for respectively driving 1, 201 and 301. The θ-axis motor 302 is attached to the Y-axis plate 201 via a bracket 303 as shown in FIGS.
Is attached to the X-axis plate 101 via a bracket 203 as shown in FIG.
02 is a bracket 1 as shown in FIGS. 6 and 7.
03 (the bracket 103 is omitted in FIG. 6) is attached to the X-axis plate 101.

The X-axis plate 101 includes rails 104a and 104b extending on the upper surface of the base plate 401 along the X-axis direction.
Further, it is arranged on the base plate 401 so as to be movable in the X-axis direction via bearings 105a, 105b fitted to the rails 104a, 104b so as to be movable. The Y-axis plate 201 includes rails 204a, 2 extending on the upper surface of the X-axis plate 101 along the Y-axis direction.
04b and bearings 205a and 205b movably fitted to the rails 204a and 204b, respectively, and are arranged on the X-axis plate 101 so as to be movable in the Y-axis direction. Further, the θ-axis plate 301 is provided with a Y-axis plate 2 via a ball chain 304 and a ball chain receiver 305 which are annularly arranged on the Y-axis plate 201.
01 is rotatably arranged in the θ-axis direction.

The ball chain receiver 305 is attached to the cam follower 30 from the outside.
6. The cam follower 307 is pressed from the inside to apply a preload, and the rattling of the θ-axis plate 301 is prevented. The upper surface of the θ-axis plate 301 is a substrate setting place, and the set pins 403a and 403b are brought into contact with the metal frame 12 of the substrate 13 by the action of the substrate setting cylinder 402 to set the substrate 13 at a predetermined position. X axis,
The base plate 401 that supports the Y-axis and θ-axis plates 101, 201, 301 includes a bearing 404a, which is movably fitted to the rail 22 (see FIG. 1).
It is arranged so as to be able to travel between a standby position (substrate positioning position) and a press position via the 404b. X
Axes 101, 102, 30 for the Y-axis and the Y-axis
1 has a hollow structure so that the lower die press 21 can penetrate therethrough.

The X-axis eccentric roller 10 is attached to each rotating shaft of the X-axis motor 102, the Y-axis motor 202, and the θ-axis motor 302.
6, Y-axis eccentric roller 206 and θ-axis eccentric roller 308
Is installed. These eccentric rollers 106, 206,
Regarding the detailed structure of 308, the Y-axis eccentric roller 206 shown in FIG. 6 and the θ-axis eccentric roller 30 shown in FIG.
8, the eccentric rollers 106, 20 will be described.
6 and 308 are hexagon socket set screws 4 on the corresponding motor rotation shafts.
Eccentric bush (eccentric cam) 406 fixed by 05
And a bearing 407 on the outer circumference of the eccentric bush 406.
And an outer rotor 408 that is provided around the outer rotor 408. The eccentricity amount Δd of the eccentric bush 406 is preset based on the required stroke of each table 101, 201, 301.

The X-axis profile plate 107 is attached to the base plate 401, and the base plate 401 and the X-axis plate 1
The X-axis follower plate 107 is always in contact with the X-axis eccentric roller 106 by urging the X-axis plate 101 rightward in the X-axis by the X-axis spring 108 interposed between the X-axis eccentric roller 106 and the X-axis eccentric roller 106. is there. Similarly, a Y-axis follower plate 207 is attached to the Y-axis plate 201, and the Y-axis plate 201 is inserted between the X-axis plate 101 and the Y-axis plate 201.
The Y-axis follower plate 207 is always in contact with the Y-axis eccentric roller 206 by urging the Y-axis plate 201 in the Y-axis front direction by the shaft spring 208.
The θ-axis plate 301 has a θ-axis follower plate 309.
Is attached, and Y-axis plate 201 and θ-axis plate 3
By biasing the θ-axis plate 301 in the θ-axis counterclockwise direction by the θ-axis spring 310 inserted between
The θ-axis follower plate 309 is always the θ-axis eccentric roller 308.
Is configured to abut.

In such a configuration, when precisely positioning the substrate 12 set on the θ-axis plate 301, the operator operates the chest handle 18 while watching the monitor TV 17. Then, the motor 10 corresponding to the operated button
2, 202 or 302 actuates and the corresponding eccentric roller 1
If the 06, 206 or 308 rotates by an angle corresponding to the operation amount and is in contact with this, the follower plates 107, 20
7 or 309 is the X-axis by a distance corresponding to the rotation angle,
It is displaced in the Y-axis or the θ-axis direction. For example, X-axis motor 1
02 drive, the X-axis motor 102 is the X-axis plate 1
01 and the X-axis follower plate 107 is fixed to the base plate 401.
01 and the base plate 401, a relative displacement in the X-axis direction occurs, and this displacement is externally applied to the X-axis plate 10.
1 and the Y-axis plate 201 mounted thereon,
This appears as an integral movement of the θ-axis plate 301 in the X-axis direction, and the substrate 12 is positioned in the X-axis direction.

When driving the Y-axis motor 202, the Y-axis motor 202
Is fixed to the X-axis plate 101 and the Y-axis follower plate 207 is fixed to the Y-axis plate 201.
A relative displacement in the Y-axis direction occurs between the X-axis plate 101 and the Y-axis plate 201, and this displacement is externally applied to the Y-axis plate 201 and the Y-axis plate 301 mounted thereon. This appears as an integral movement in the axial direction, and the substrate 12 is positioned in the Y-axis direction. Also θ
In the case of driving the shaft motor 302, the θ-axis motor 302 is fixed to the Y-axis plate 201 and the θ-axis follower plate is fixed to the θ-axis plate 301. A relative displacement occurs in the θ-axis direction between them, and this displacement appears externally as rotation of the θ-axis plate 301 in the θ-axis direction, and the substrate 12 is positioned in the θ-axis direction.

The control device 16 in FIG. 1 detects the motor rotation angle by counting the pulses from encoders (not shown) built in the X-axis, Y-axis, and θ-axis motors 102, 202, 302. When the number of encoder pulses per motor revolution is P, the total stroke is 2 · Δ
Since d is the worst, the resolution is N = 2 · Δd · π / P (mm / pulse), and 0 <resolution ≦ N. Therefore, if the stroke is small, the resolution can be easily increased,
Further, theoretically, the resolution can be increased infinitely near the top dead center and the bottom dead center of the eccentric rollers 106, 206, 308. Further, it is not necessary to attach a sensor or a stopper at the stroke end, which is simpler and cheaper than the structure using a ball screw.

The eccentric rollers 106, 206, 308 and the X-axis, Y-axis, θ-axis tracing plates 107 which are in contact with these rollers,
Between 207 and 309, friction does not occur due to the action of the bearing 407 interposed between the outer rotor 408 of each eccentric roller and the eccentric bush 406, and dust is effectively prevented. In addition, each drive motor 102, 20
As shown in the figure, the units 2 and 302 can be centrally arranged in one place, so that the device can be made compact. Further, the X-axis motor 102 is not mounted upright on the base plate 401 but is mounted upright on the X-axis plate 101, thereby saving the space required for each drive motor 102, 202, 302.

(Effects of the Invention) As is apparent from the above description, according to the positioning device of the present invention, the positioning target object is moved in the first and second linear directions and rotated about the predetermined axis. Despite being a positioning device that requires drive motors, all three drive motors can be arranged on any one of the front, rear, left, and right sides of the base member. It is possible to provide a positioning device that is more compact than the required conventional positioning device.

Further, the first drive motor is fixed to the first moving plate in a state where the rotation drive shaft extends downward, and the third drive motor is moved in the second movement in a state where the rotation drive shaft extends upward. By fixing to the plate, it is possible to simplify the configuration interposed between the first to third moving plates and the first to third drive motors that drive these moving plates. This has the effect of making the device more compact.

[Brief description of drawings]

FIG. 1 is an overall configuration diagram of a substrate laminating apparatus to which an embodiment of the present invention is applied, FIGS. 2 and 3 are explanatory diagrams showing a state at the time of positioning, and FIGS. 4 and 5 are respectively an XYθ table. A plan view and a front sectional view showing the mechanism, and FIG.
FIG. 7 is a diagram schematically showing the shaft and Y-axis drive mechanism, FIG. 7 is an explanatory front sectional view thereof, FIG. 8 is an enlarged view of a drive portion of the θ-axis drive mechanism, and FIG. 9 is a conventional substrate positioning device. FIG. 101 ... X-axis plate, 102 ... X-axis motor, 104a, 104b ... Rail, 105a, 105b ... Bearing, 106 ... X-axis eccentric roller, 107 ... X-axis tracing plate, 108 ... Spring, 201 ... Y-axis plate, 202 ... Y-axis motor, 204a, 204b ... Rail, 205a, 205b ... Bearing, 206 ... Y-axis eccentric roller, 207 ... Y-axis tracing plate, 208 ... Spring, 301 ... θ-axis plate, 302 ... θ-axis motor, 304 ... Ball chain , 305 ... Ball chain receiver, 308 ... θ-axis eccentric roller, 309 ... θ-axis tracing plate, 310 ... Spring

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Yoshiyuki Osawa Inventor Yoshiyuki Osawa 1 Horiyamashita, Hadano City, Kanagawa Pref., Inside the Kanagawa Factory, Hiritsu Manufacturing Co., Ltd. (72) Inventor, Akira Yamada, 292, Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa Prefecture, Ltd. Inside, Production Engineering Laboratory, Hitachi, Ltd. (56) Reference JP-A-56-52142 (JP, A) 58-202769 (JP, A) Actually opened 52-125181 (JP, U) Actually opened 61-154637 (JP, U)

Claims (2)

[Claims] 1. A base member, a first moving plate provided on the base member so as to be movable back and forth in a first linear direction with respect to the base member, and a surface parallel to the first moving plate. A second moving plate which is provided on the first moving plate and is capable of moving back and forth in a second linear direction orthogonal to the first linear direction with respect to the first moving plate; A third movable plate having a surface parallel to the second movable plate and rotatably provided on the second movable plate in both forward and backward directions about a predetermined axis with respect to the second movable plate; Moving plate, a positioning object placement member fixed to the third moving plate, and a first urging unit that urges the first moving plate in one of its movable directions, How to move the second moving plate Second biasing means for biasing the third moving plate in either one of the forward and reverse directions of rotation, and either the front, back, left, or right of the base plate. A first drive motor which is fixed to the first moving plate in a state where the rotary drive shaft extends downward at one side and which is rotatable by a required angle in response to a command from the outside. And the base plate is fixed to the first moving plate in a state in which the rotary drive shaft extends upward on the same side as the first drive motor, and the rotary drive coaxial thereof responds to a command from the outside. Second, which can be rotated by the required angle
Drive motor, and the rotation drive shaft is fixed to the second moving plate in a state where the rotation drive shaft extends upward on the same side as the first drive motor with respect to the base plate, and the rotation drive shaft from the outside. A third drive motor rotatable by a required angle in response to a command; first to third eccentric rollers attached to rotation shafts of the first to third drive motors; fixed to the base member; A first urging means for pressing the first eccentric roller.
Follower plate, a second follower plate fixed to the second moving plate and pressed against the second eccentric roller by the urging force of the second urging means, and fixed to the third moving plate. And a third follower plate which is pressed against the third eccentric roller by the urging force of the third urging means. 2. Each of the eccentric rollers acts on an eccentric cam fixed to a corresponding rotary shaft of the drive motor and on the corresponding profile plate disposed on the outer circumference of the eccentric cam via a bearing. The positioning device according to claim 1, further comprising an outer rotor.