< M319503 八、新型說明： 【新型所屬之技術領域】 本創作係關於一種四驅動對位對準平台，特別是指一種消 除量測平台於X軸與γ軸間產生之干涉誤差，且量測平台進行旋 轉運動時，其旋轉中心“在量測平台中心點，而具有高精度、 、高速度特性之四驅動對位對準平台。 -【先前技術】 扣近年來，|^者尚科技產業的發展，精度的要求也愈來愈 高，工具機、各種產業機械、量測儀器的高精度化，加上超精密 加工機、半導體製程裝置、 电丁貝Λ機為、原子力顯微鏡等機具 的精度已經達到微/奈米等級。载罝 Η 戰/、干口疋影響上述機具精度最 主要的因素之一；目前已經有多 生式之載具平台，主要可以分 為串聯式平台與並聯式平台。 串聯式平台是目前常見的載且 千台，該型式的平台是以一軸 加一軸加一軸…的方式組裝， 個驅動糸統控制單一軸向運 動’組裝的精度會直接料平台< M319503 VIII. New description: [New technical field] This creation is about a four-drive alignment alignment platform, especially the interference error caused by the elimination measurement platform between the X-axis and the γ-axis. When the measuring platform rotates, its center of rotation "is at the center of the measuring platform, and the four-drive alignment alignment platform with high precision and high speed characteristics. - [Prior Art] In recent years, |^者尚科技With the development of the industry, the requirements for precision are getting higher and higher, and the precision of machine tools, various industrial machines and measuring instruments is high, and ultra-precision processing machines, semiconductor processing devices, electric Dingbei machines, atomic force microscopes, etc. The accuracy has reached the micro/nano level. One of the most important factors affecting the accuracy of the above-mentioned machine tools is that there are already many types of carrier platforms, which can be divided into series platforms and parallel. The platform is a common type of load and thousands of platforms. The platform of this type is assembled by one axis plus one axis plus one axis... each drive system controls single axial operation. The accuracy of the assembly will directly predict the platform
月沒以串聯式二自由度平A 而言，由於該型式的载具平台是 a . ^ 軸與Y軸以九十度做組裝， 仁疋在組裝時，兩軸無法百分之 v ^ 白達到九十度，此即被稱為X 一 Y軸垂直度誤差，因此該型式 ’、、、 沾工、來# β 十σ會產生X軸與γ軸之間 的干涉誤差，而降低機具精度。 之門 並聯式平台係以多個驅動系 子工制一個以上之軸向運 括平移運動與旋轉運動，具有多軸 動已 動之特性，但是由於目前的 M319503 里測技術無法達到大範圍多軸量測，以及並聯式機構剛性較弱等 因素，因此並聯式平台之精度不如串聯式平台高。 此外，另有一種以二組平移旋轉單元結合三組驅動系統與 -自由單it所組成的載具平台，該平台是藉由三組驅動系統間相 互之配合，以達到X軸、γ軸與一旋轉動元件之三自由度運動， 但是該旋轉運動之中心會因為三組驅動系統造成不固定之現象。 【新型内容】 本創作之目的即在於提供一種利用模組化之多個零組件方 式組合規劃平台機構，使其具有極佳剛性之四驅動對位對準平 台0 本作之_人—目的係在於提供—種零組件搭配之使用壽命 較為長久，相對亦能減少很多修護上和生產上的時間，有效地提 升整體品質及良率之四驅動對位對準平台。 可達成上述創作目的之四驅動對位對準平台，主要包含有安 裝於固定平台之兩組第—平移旋轉單元、兩組第二平移旋轉單 兀，以及-㈣於該等平移旋轉單元上之量測平台，其中，利用 該等平移旋轉單元中之驅動單元、 π τ相對弹性位移之平移元件 與旋轉單元，可使驅動單元適當 卞動時，仔以透過該等第一平銘 旋轉單元個別軀動、第二平移旌 。 夕疋轉早，驅動或第-平移旋轉 早兀與第二平移旋韓蕈 轉早7^料驅動該量測平台彳 移或往預定方向旋轉。 平仅 本創作所提供量測平台，刹 …利用四組平移旋轉單元與四組驅 M319503 ·In the case of the series two-degree-of-freedom flat A, since the type of the vehicle platform is a. ^ The shaft and the Y-axis are assembled at ninety degrees, and the two shafts cannot be assembled at the time of assembly. Up to ninety degrees, this is called the X-Y axis perpendicularity error, so the type ',,,,, and #β ten σ will produce interference error between the X-axis and the γ-axis, and reduce the accuracy of the tool. . The door parallel type system is composed of more than one axial system including multiple translational motions and rotary motions. It has the characteristics of multi-axis motion, but the current M319503 measurement technology cannot reach a wide range of multi-axis. Measurements, as well as the rigidity of the parallel mechanism are weak, so the accuracy of the parallel platform is not as high as that of the tandem platform. In addition, there is a carrier platform consisting of two sets of translational rotation units combined with three sets of drive systems and a free single it. The platform is matched by three sets of drive systems to achieve the X-axis and the γ-axis. A three-degree-of-freedom motion of a rotating component, but the center of the rotational motion is not fixed due to the three sets of drive systems. [New Content] The purpose of this creation is to provide a four-drive alignment platform that uses a modularized multiple component method to combine the planning platform mechanism with excellent rigidity. It provides a long-life service with a combination of components, which can reduce the time on repair and production, and effectively improve the overall quality and yield of the four-drive alignment alignment platform. The four-drive alignment alignment platform capable of achieving the above-mentioned creation purpose mainly comprises two sets of the first translational rotation unit mounted on the fixed platform, two sets of the second translational rotation unit, and - (four) on the translational rotation unit The measuring platform, wherein the driving unit in the translational rotation unit, the translation element and the rotation unit of the π τ relative elastic displacement, can make the driving unit rotate properly when the driving unit is properly swayed Body movement, second translation. The eve turns early, the drive or the first-translational rotation, the early 兀 and the second translation 旋 蕈 蕈 蕈 蕈 驱动 驱动 驱动 驱动 驱动 驱动 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该Only the measurement platform provided by this creation, the brakes ... use four sets of translational rotation unit and four groups of drives M319503 ·
I I 件（32)’以及一可隨該第二平移元件（32)位移及提供旋轉作用之 旋轉單元（5)。 · 有關於該量測平台（2)，本實施例之量測平台（2)概呈矩形板 狀，且四角隅分別固定於該等第一平移旋轉單元與第二平移 旋轉單元（3，）之旋轉單元（5)上，而可隨之作X軸或γ軸位移或 、往預定方向旋轉。 • 需特別說明的是，本實施例之驅動單元（41)係設為一馬達或 _線性馬達，因此，可藉由該馬達驅動一線性移動裝置（如螺桿與 螺帽、線性滑軌與滑塊）後，再連動相連之第一平移元件（31)產 生位移，如線性移動裝置為螺桿（4 2 )與螺帽（3 3 )時，其可經由馬 達之正轉與反轉驅動一螺桿（42)，如圖四所示，再藉由螺設於螺 ^桿（42)上之螺帽（33)連動相連之第一平移元件（31)產生位移。如 線性私動裝置為線性滑執與滑塊時，其可經由線性馬達直接驅動 第一平移元件（31)產生位移。另外，請再參閱圖五至圖九，本實 _施例安裝於第二平移元件（32)之旋轉單元（5)更進一步包括有： 一底盤（51)，其内部周圍形成有一容置空間（5丨丨），該容置 空間（511)周壁形成有預定形狀之環槽（512)，而該底盤亦再設有 定位部（513); 一轉動元件（52)，可設置於底盤（51)之容置空間（5丨1)中·， 且相對環槽（512)的一端環設有一凹槽部（521)，同時，該轉動元 件（52)頂面設有複數螺孔（522)，可藉由螺栓（56)與量測平台（2) 之相對部位相互螺鎖固定； 8 M319503 , I ( 一固疋元件（54)’係固定於底盤（51)頂端，且其周圍亦形成 有限位槽（541)，該固定元件（54)其上係可開設通孔（542)，供螺 栓（55)經由通孔（542)與底盤（51)之定位部（513)螺固結合，或供 螺栓（55)經由通孔（542)通過底盤（51)定位部（513)螺鎖固定於 第二平移元件（32)上，如圖七所示；或如圖六所示，該固定元件 (54)其底部設置有複數導接部（543)，該導接部（543)可直接設置 _於底盤（51)之定位部（513)，導接部（543)能以緊配合方式與底盤 (51)之定位部（513)固定，或是固定元件（54)以導接部π")定位 設置於底盤（51)之定位部⑸3)後，再以枯著劑將固定元件⑽ 與底盤（51)固定。其中，該限位槽（541)亦與該凹槽部（52〇、環 槽（512)共同形成一滾動槽空間。 複數滾動體（53)，係為滾珠、滾子以及滾柱，其可分別容納 分佈於該底盤（51)之環槽（512)、轉動元件（52)之凹槽部（52〇 與固定元件（54)之限位槽（541)所共同界定的滾動槽空間中； 請參閱圖十-’本創作四駆動對位對準平台，當欲進行χ轴 方向位移時，可啟動平台機構上兩組第_平移旋轉單元⑶中可 為馬達之驅動單元（41)往X軸之同一方向作動，進而帶動螺桿 (42)上之螺帽（33)、該連結於螺帽彳卜 丨目上之弟一平移元件（31)， 以及位於第一平移元件（31)上第- 弟一千移兀件（32)與旋轉單元 ⑸’均可被帶動而往X軸方向位移；當然，在此期間，由於另 外兩組第二平移旋轉單元（3,）之驅動單元⑼是不動的，作直 第二平移元件⑽與第-平移元件⑻間是可作奈米級之相對 9 M319503 彈性位移的，因此，該第二平移旋轉單元（3,)上之旋轉單元 (5)，亦可藉由該奈米級之微幅彈性位移特性，而一起隨著第一 平移旋轉單元⑶往X轴方向位移，使該量測平台⑵整^得以順 利往X軸方向位移，而不會產生χ軸與γ軸方向之干涉誤差。 請參閱圖十，當本創作欲進行丫軸方向之位移時，可啟動平 .台機構上兩組第：平移旋轉單元（3,）中可為馬達之驅動單元 • (41)往Υ軸之同一方向位移作動，同樣地，雖然另外兩組第—平 φ料轉單元⑻之驅動單元⑼並沒有啟動，但仍可使整體量測 平台⑺往Υ軸之同—方向作奈米級之微幅位移作動。 請參閱圖十二，當本創作欲以某—中心基準點作預定角度之 •旋轉位移作動時，第—個情形是只需將—組第_平移旋轉單 -之驅動單元⑹往預定^軸方向㈣作動，或分料兩組第— 平移旋轉單元⑶之驅動單元（41)Μ軸之不同方向位移作動， 便可在兩組第一平移旋轉單元⑺與兩組第二平移旋轉單元（ #上之旋轉單元⑸上產生旋轉作用，使量測平台⑺整個得以往預 定方向作旋轉位移。當然，該量測平台⑵旋轉位移之第二奸 :’亦可利用一組第二平移旋轉單元(3,）之驅動單元⑷)往： 定之Υ轴方向位移作動，或分別將兩組第二平移旋轉單 之驅動單元⑼^軸之不同方向位移作動來達成。此外，） 述兩種情形同時發生時，亦可使量測平台⑺ 移作用。 π而之方疋轉位 平移 本創作具有多數個特徵，第一個特徵在於利用該等第 M319503 旋轉單元⑺與第二平移旋轉單元（3,）中之驅動單元⑷），可使 里測平台（2 )達到快速定位效果。 本創作第二個特徵在於制該等第—平移_單元⑻與第 二平移旋轉單元(3,）中之旋轉單元⑸，可提供量測平台⑵旋 轉之用。 . 本創作第三個特徵在於利用第一平移元件（31)與第二平移 .元件（32)間可作奈米級之微幅彈性位移特性，可有效地消除第一 平移旋轉單元⑻與第二平移旋轉單元(3,）在又軸與間產 由度微動平台 生之干涉誤差，此外，亦可使量測平台⑵在卫作中承受高負荷 之情況下，仍能保有良好精度，並達到奈米級三 、 之實質效益。 ，本創作所提供之四驅動對位對準平台，與前述引證案及其他 習用技術相互比較時，更具有下列之優點·· 时㈠、本創作㈣四組驅動單元⑼作為兩組第—平移旋轉 單元(3)與兩組第二平移旋轉單元(3,）之驅動源，可藉助 可控制性、高頻響應之特性，以及微小化等優點，以消除量測平 台⑺在X軸與”由間產生之干涉誤差，並可讀保量測平台⑵ 進行旋轉運動時，其旋轉中心得以準確地落於量測平台⑵之中 心點’而達到高精度、高速度之實質效益。 ，(二）、本創作利用第-平移旋轉單元⑻與第二平移旋轉單 凡（3 )所採用具線性運動特性之第一平移元件⑻與第二平移 兀件（32) ’以及具旋轉特性之旋轉單元⑸設計，由於其運動模 M319503 式均屬於動摩擦， 更具有熱變位小、 等諸多特性。 因此，整體摩擦力較小， 且最小移動單位準確 精度安定、裝配容易 以及具互換性及擴充性 (二）、本創作之第一平移旋轉單元⑻與第二平移旋轉單元 )’均採用模組化料，因此，不但檢測與維修容易更可 -個別針對損壞的零件單獨維修或更換，而可延長整體之使用壽 •印，並&升產品品質與良率。 · 口細上所述，本案不但在空間型態上確屬創新，並能較習用物 :增進上❹項功效’應已充分符合新穎性及進步性之法定新型 利要件，爰依法提出申請，㈣貴局核准本 案，以勵創作，至感德便。 " 【圖式簡單說明】 圖一係本創作平台機構之立體外觀組合圖。 圖二係本創作平台機構之立體分解示意圖。 圖三係本創作平台機構之俯視平面圖。 圖四係本創作旋轉單元之剖面分解示意圖。 圖五係本創作旋轉單元第—實施例之剖面示意圖。 圖六係本創作旋轉單元第二實施例之❹示意圖。 圖係本創作方疋轉單凡組設於第二平移元件之示意圖。 圖八係本創作平移旋轉單元之立體示意圖。 圖九係本創作旋轉單元之分解示意圖。 圖十係本創作！測平台往γ軸方向位移作動之俯視示意圖。 12 M3195U3 圖。圖十—係本創作量測平台往x轴方向位移作動之俯視示意 定方向旋轉位移作動之俯 圖十二係本創作量測平台往預 視示意圖。 【主要元件符號說明】 1固定平台 2量測平台 第一平移旋轉單元 3，第 平移旋轉單 元 31第一平移元件 32第二平移元件 33螺帽 41驅動單元 42螺桿 5旋轉單元 51底盤 511容置空間 512環槽 513定位部 5 2轉動元件 521凹槽部 522螺孔 13 M319503 53滾動體 54固定元件 541限位槽 542通孔 543導接部 55螺栓 56螺栓I I (32)' and a rotating unit (5) that is displaceable with the second translating element (32) and provides a rotational action. The measuring platform (2) of the embodiment has a rectangular plate shape, and the four corners are respectively fixed to the first translational rotation unit and the second translational rotation unit (3,). On the rotating unit (5), the X-axis or the γ-axis can be displaced or rotated in a predetermined direction. • It should be specially noted that the driving unit (41) of this embodiment is set as a motor or a linear motor, so that a linear moving device (such as a screw and a nut, a linear sliding rail and a sliding device) can be driven by the motor. After the block), the first translational element (31) connected to the linkage is displaced. If the linear moving device is the screw (4 2 ) and the nut (3 3 ), the screw can be driven by the forward and reverse rotation of the motor. (42), as shown in FIG. 4, the first translational element (31) connected by the screw (33) screwed on the screw rod (42) is displaced. If the linear singular device is a linear slider and a slider, it can directly drive the first translational element (31) to generate displacement via a linear motor. In addition, referring to FIG. 5 to FIG. 9 , the rotating unit (5) mounted on the second translating element (32) further includes: a chassis (51) having an accommodation space formed around the inside thereof. (5丨丨), the peripheral wall of the accommodating space (511) is formed with a ring groove (512) of a predetermined shape, and the chassis is further provided with a positioning portion (513); a rotating member (52) can be disposed on the chassis ( 51) a receiving space (5丨1), and a groove portion (521) is arranged at one end of the ring groove (512), and a plurality of screw holes (522) are arranged on the top surface of the rotating member (52). ), can be screwed and fixed to each other by the bolt (56) and the measuring platform (2); 8 M319503, I (a solid element (54)' is fixed to the top of the chassis (51), and its surroundings are also Forming a slot (541), the fixing component (54) is provided with a through hole (542), and the bolt (55) is screwed to the positioning portion (513) of the chassis (51) via the through hole (542). Or the bolt (55) is screwed to the second translating member (32) via the through hole (542) through the chassis (51) positioning portion (513), as shown in FIG. 7; or As shown in FIG. 6, the fixing member (54) is provided with a plurality of guiding portions (543) at the bottom thereof, and the guiding portion (543) can be directly disposed at the positioning portion (513) of the chassis (51), and the guiding portion ( 543) can be fixed in a tight fit manner with the positioning portion (513) of the chassis (51), or the fixing member (54) can be positioned at the positioning portion (5) 3) of the chassis (51) with the guiding portion π"), and then The fixing agent fixes the fixing member (10) to the chassis (51). The limiting groove (541) also forms a rolling groove space together with the groove portion (52〇, the ring groove (512). The plurality of rolling elements (53) are balls, rollers and rollers, which can be Each of the annular groove (512) distributed in the chassis (51), the groove portion (52) of the rotating member (52) and the limiting groove (541) of the fixing member (54) are respectively accommodated in the rolling groove space; Please refer to Figure 10 - 'This creation is a four-pitch alignment alignment platform. When you want to perform the χ-axis displacement, you can start the platform mechanism. The two sets of _ translational rotation unit (3) can be the motor drive unit (41) to X. Actuating in the same direction of the shaft, thereby driving the nut (33) on the screw (42), the translating member (31) coupled to the nut, and the first translating member (31) - The other one of the moving parts (32) and the rotating unit (5)' can be driven to move in the X-axis direction; of course, during this period, since the driving units (9) of the other two sets of the second translational rotating units (3,) are Immovable, between the straight second translating element (10) and the first translating element (8) is comparable to the nanometer level 9 M319503 Elastically displaced, therefore, the rotating unit (5) on the second translational rotation unit (3,) can also be rotated along with the first translational rotation unit (3) by the micro-elastic displacement characteristic of the nanometer The displacement in the X-axis direction allows the measuring platform (2) to be smoothly displaced in the X-axis direction without the interference error between the χ-axis and the γ-axis direction. See Figure 10, when the creation is to be displaced in the y-axis direction When the two stages of the flat mechanism can be activated: the translational rotation unit (3,) can be the drive unit of the motor. (41) The displacement is in the same direction as the Υ axis. Similarly, although the other two groups are flat The drive unit (9) of the φ material transfer unit (8) is not activated, but the entire measurement platform (7) can be operated in the same direction as the x-axis of the nano-level displacement. Please refer to Figure 12, when the creation wants to When a certain central reference point is used for a predetermined angle and the rotational displacement is actuated, the first case is that the driving unit (6) of the group _ translational rotation single-only needs to be actuated to the predetermined axis direction (four), or the two groups are divided. The difference between the x-axis of the drive unit (41) of the translation rotary unit (3) Actuating to the displacement, the rotation of the two sets of the first translational rotation unit (7) and the two sets of the second translational rotation unit (# on the rotation unit (5) can be rotated, so that the measurement platform (7) is rotated in the predetermined direction. The second platform of the measurement platform (2) rotational displacement: 'You can also use a set of second translational rotation unit (3,) drive unit (4)) to: move in the direction of the axis, or respectively move the two groups of second translation The rotation of the single drive unit (9) ^ axis in different directions of displacement to achieve. In addition, when the two situations occur simultaneously, the measurement platform (7) can also be moved. π and the square 疋 transposition translation of this creation has a majority The first feature is that the driving unit (4) in the M319503 rotating unit (7) and the second translation rotating unit (3) can be used to achieve a fast positioning effect. The second feature of the present invention is the provision of the rotation unit (5) in the first translational unit (8) and the second translational rotation unit (3,) for providing rotation of the metrology platform (2). The third feature of the present invention is that the first translational rotation unit (8) can be effectively eliminated by utilizing the microscopic elastic displacement characteristic between the first translational element (31) and the second translational component (32). The two translational rotation unit (3,) can also interfere with the interference between the shaft and the inter-production micro-motion platform, and can also ensure that the measurement platform (2) can maintain high precision under high load in the maintenance, and Reach the substantial benefits of nanometer three. The four-drive alignment alignment platform provided by this creation has the following advantages when compared with the above-mentioned citations and other conventional techniques. (1), this creation (four) four groups of driving units (9) as two groups of pan-transition The driving unit of the rotating unit (3) and the two sets of second translating rotating units (3,) can eliminate the measurement platform (7) on the X-axis by virtue of controllability, high-frequency response characteristics, and miniaturization. The interfering error generated by the interfering error, and the readable and fixed measurement platform (2), when rotating, the center of rotation can accurately fall at the center point of the measuring platform (2) to achieve the substantial benefits of high precision and high speed. The present invention utilizes the first translational element (8) and the second translational element (32) with linear motion characteristics and the rotation unit with rotational characteristics using the first-translational rotation unit (8) and the second translational rotation (3). (5) Design, because its moving mode M319503 is a dynamic friction, it has many characteristics of small thermal displacement, etc. Therefore, the overall friction is small, and the minimum moving unit is accurate and stable, and the assembly is easy. Interchangeability and expandability (2), the first translational rotation unit (8) and the second translational rotation unit of the creation are both modularized, so that it is not only easy to detect and repair - individually for damaged parts Repair or replacement, and can extend the overall use of life, printing, and & product quality and yield. · The mouth is fine, the case is not only innovative in space type, and can be used in comparison with: "Effects of the project" should have fully complied with the statutory new essentials of novelty and progressiveness, and apply in accordance with the law. (4) The court approves the case to encourage creation and to the sense of virtue. " [Simple diagram] Figure 3 is a three-dimensional exploded view of the creation platform. Figure 3 is a top plan view of the creation platform. Figure 4 is a schematic exploded view of the rotation unit of the creation. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 6 is a schematic view of a second embodiment of the present rotating unit. The drawing system is set in the second translation. Fig. 8 is a schematic perspective view of the translational rotation unit of the present invention. Fig. 9 is an exploded view of the rotation unit of the creation. Fig. 10 is a schematic view of the creation of the platform to the displacement of the γ axis. 12 M3195U3 Fig. The ten-series is the top view of the displacement measurement platform in the direction of the x-axis. The plan shows the direction of the rotation and the displacement. The 12-series is the schematic diagram of the pre-view. [Main component symbol description] 1 fixed platform 2 measurement Platform first translation rotation unit 3, first translation rotation unit 31 first translation element 32 second translation element 33 nut 41 drive unit 42 screw 5 rotation unit 51 chassis 511 accommodation space 512 ring groove 513 positioning portion 5 2 rotation element 521 Groove portion 522 screw hole 13 M319503 53 rolling element 54 fixing member 541 limiting groove 542 through hole 543 guiding portion 55 bolt 56 bolt