200832444 九、發明說明： 【發明所屬之技術領域】 本發明係關於-種四動對位對準機構，特別是指一種消 除夏測平台於X軸與γ軸間產生之干涉誤差，且量測平台進行 旋轉運動時，其旋轉中心會落在量測平台中心點，而具有高精 度、高速度特性之四驅動對位對準機構。 【先前技術】 文，近年來，隨著高科技產業的發展，精度的要求也愈來 愈高，工具機、各種產業機械、量測儀器的高精度化，加上超 精搶加工機、半導體製程裝置、電子資訊機器、原子力顯微鏡 等機具的精度已經達到微/奈米等級。載具平台是影響上述機具 精度最主要的因音之_ · Η Γ7 y- ” ’目刚已經有多種型式之載具平台，主 要可以分為串聯式平台與並聯式平台。 串聯式平台是目前常見的載具平台，該型式的平台是以一 軸加幸由…的方式組裝，每一個驅動系統控制單一轴向 運^ ’㈣的精度會直接影響平台之精度，以串聯式二自由度 "而=由於Θ型式的载具平台是將χ軸與Y軸以九十度做 : 且裝，但是在组裝時，兩轴無法百分之百達到九十度，此即被 —Υ气垂直度誤差，因此該型式的载具平台會產生X軸 Υ軸之間的干涉誤差，而降低機具精度。 並聯式平台係以多個驅動系統控制一個以上之輛向運動， 包括平移運動與旋轉運動，具有多轴同動之特性，但是由於目· 5 200832444 前的量測技術無法達到大範圍多軸量測，以及並聯式機構剛性 車乂弱等因素’因此並聯式平台之精度不如串聯式平台高。 此外另有一種以三組平移旋轉單元結合三組驅動系統與 一自由單元所組成的载具平台，該平台是藉由三組驅動系統間 相互之配合，以達到x軸、y軸與—旋轉動元件之三自由度運 動’但是該旋轉運動之中心會因為三組驅動系統造成不固定之 現象。 【發明内容】 本發明之目的即在於提供一種利用模組化之多铜零組件方 式組合規劃平台機構，使其具有極佳剛性之四驅動對位對準機 構。200832444 IX. INSTRUCTIONS: [Technical field of the invention] The present invention relates to a four-action alignment mechanism, and particularly to an interference error between the X-axis and the γ-axis of the summer measurement platform, and the measurement is performed. When the platform performs a rotary motion, its center of rotation will fall at the center of the measurement platform, and the four-drive alignment alignment mechanism with high precision and high speed characteristics. [Prior Art] In recent years, with the development of high-tech industries, the requirements for precision have become higher and higher, and the precision of machine tools, various industrial machinery and measuring instruments has been improved, and super-precision processing machines and semiconductors have been added. Processes such as process devices, electronic information machines, and atomic force microscopes have reached the micro/nano level. The vehicle platform is the most important factor for affecting the accuracy of the above-mentioned machines. _ Η Γ7 y- ” 'There are already a variety of types of vehicle platforms, which can be divided into series platform and parallel platform. The serial platform is currently Common vehicle platform, this type of platform is assembled by means of one axis, and each drive system controls the accuracy of a single axial operation. The accuracy of the platform directly affects the accuracy of the platform to two degrees of freedom in series. And = because the Θ type of vehicle platform is to make the χ axis and the Y axis at 90 degrees: and installed, but when assembled, the two axes can not reach 100 degrees, which is the Υ vertical error, Therefore, this type of vehicle platform will generate interference errors between the X-axis and the axis, and reduce the accuracy of the machine. The parallel platform controls more than one vehicle movement with multiple drive systems, including translational motion and rotational motion. The characteristics of the axis are the same, but because the measurement technology before the 200832444 can not reach the large-scale multi-axis measurement, and the rigid mechanism of the parallel mechanism is weak, so the accuracy of the parallel platform is not For example, the tandem platform is high. In addition, there is a carrier platform consisting of three sets of translational rotating units combined with three sets of driving systems and one free unit. The platform is matched by three sets of driving systems to achieve the x-axis. The y-axis and the three-degree-of-freedom motion of the rotating component 'but the center of the rotational motion may be unfixed due to the three sets of drive systems. SUMMARY OF THE INVENTION The object of the present invention is to provide a modularization The copper component assembly combines the planning platform mechanism to provide an extremely rigid four-drive alignment alignment mechanism.
本發明之次-目的係在於提供一種零組件搭配之使用壽命 較為長久’相對亦能減少很多修護上和生產上㈣間有效& 才疋升整體品質及良率之四驅動對位對準機構。 可達成上述發明目的之四驅動對位對準機構，主要包含有 安裝於固定平台之兩組第一平移旋轉單元 干及*兩組罘二平移旋轉 單元，以及一固定於該等平移旋轉單元上之量測平台，其中， 利用該等平移旋轉單元中之驅動單元、兩可相對彈性位移之平 移元件與_單元，可使驅料元適當作動時，得以透過該等 第-平移旋轉單元個別驅動、第二平移旋轉單元個別驅㈣第 一平移旋轉單元與第二平移旋轉單元共同驅動該量測平台往χ 6 200832444 預定方向旋轉 軸或γ軸位移或往 本創作所提供量測平台 動a ^ 利用四組平移旋轉單元與四組驅 動早几’可提供量測平台， 而可有效·各軸運動時所造m轉方向之位移作動’ 精度，_，該㈣提高量測平台· 口之方疋轉中心可準確地落在量測平台之 中…占，以有效地控制旋轉自垮^ 口口一 _ 又，另外，採用四組對稱式驅動The second objective of the present invention is to provide a component assembly with a longer service life, which can also reduce the effectiveness of the four-drive alignment of the overall quality and yield of many repairs and production (4). mechanism. The four-drive alignment alignment mechanism capable of achieving the above object of the invention mainly comprises two sets of first translational rotation unit stems and *two sets of two translational rotation units mounted on the fixed platform, and one fixed on the translational rotation units The measuring platform, wherein the driving unit in the translational rotating unit, the two elastically displaceable translation elements and the _ unit, enable the driving element to be individually driven through the first translational rotation unit when the driving element is properly actuated The second translational rotation unit is driven by the first translational rotation unit and the second translational rotation unit to drive the measurement platform toward the χ 6 200832444 The predetermined direction of the rotation axis or the γ-axis displacement or the measurement platform provided by the creation office is a ^ Using four sets of translational rotation units and four sets of drive early can provide a measurement platform, which can effectively move the displacement of the m-direction in each axis movement. Accuracy, _, the (four) improve the measurement platform · mouth square The twirling center can accurately fall in the measurement platform...according to effectively control the rotation of the 垮^ mouth _ again, in addition, using four sets of symmetrical drive
早凡’亦可用以加速線性定位與角度定位。 【實施方式】 呑月爹閲圖一至圖二，士政ηα ^本發明所提供之四驅動對位對準機構 較佳實施例，主要包括右· •“平口機構可用以安裝於一預定形 恶之固疋平台（1 )上，同時么 豕十口械構包括有二組第一平移旋 轉單元（3)、二組第二平移旋轉 疋得早70 )及一置測平台（2)，以 下係針對該等組成元件逐一說明。 有關於該等第一平移旋轉單元⑶，請再參閱圖四，其係對 角設置於固定平台⑴上，且分別包括有—安裝於固定平台⑴ 上之驅動單元（41)、-可受該驅動單元⑹往χ軸方向驅動位 移之第-平移it件⑻…可隨該第—平移元件⑻位移或產 生相對彈性位移之第二平移元件⑽，以及—可隨該第二平移 元件（32)位移及提供旋轉作用之旋轉單元（5)。 有關於該等第二平移旋轉單元（3,），其係對角設置於固定 平台（1)上，並與第一平移旋轉單元（3)之安裝方向相差九十 7 200832444 χ 刀別包括有一安裝於固定平台（1)上之驅動單元（41)、一 可受該驅動單元⑼往γ軸方向驅動位移之第一平移元件 、可卩返°亥第一平移元件（31)位移或產生相對彈性位移之 第-平私7L件（32 )’以及—可隨該第二平移元件（32)位移及提 供旋轉作用之旋轉單元（5)。 有關於該量測平台⑵’本實施例之量測平台⑵概呈矩形 板狀，且四角隅分別固定於該等第一平移旋轉單元（3)與第二平 私方疋轉單^(3 )之旋轉單（⑸上，而可隨之作X軸或Y轴位 移或往預定方向旋轉。 需特別說明的是，本實施例之驅動單元⑷）係設為一馬達 或線性馬達’因此，可藉由該馬達驅動—線性移動裝置（如螺桿 與螺帽、線性滑軌與滑塊）後，再連動相連之第一平移元件（31) 產生位移；如線性移動裝置為螺桿（42)與螺帽（33)時，其可經 由馬達之正轉與反轉驅動一螺桿（42)，如圖四所示，再藉由螺 設於螺桿（42)上之螺帽（33)連動相連之第一平移元件（31)產生. 位移。如線性移動裝置為線性滑軌與滑塊時，其可經由線性馬 達直接驅動第-平移元件（31)產生位m卜，請再參閱圖五 至圖九，本實施例安装於第二平移元件（32)之旋轉單元（5)更進 一步包括有： 一底盤（51)，其内部周圍形成有一容置空間（Bn)，該容置 空間（511)周壁形成有預定形狀之環槽（512)，而該底盤亦再設 200832444 有定位部（513); 一轉動元件（52)，可設置於底盤（51)之容置空間（511)中’ 且相對環槽（512)的一端環設有一凹槽部（521)，同時，該轉動 元件（52)頂面設有複數螺孔（522)，可藉由螺栓（56)與量測平台 (2)之相對部位相互螺鎖固定； 一固定元件（54)，係固定於底盤（51)頂端，且其周圍亦形· 成有限位槽（541)，該固定元件（54)其上係可開設通孔（542)， 供螺栓（55)經由通孔（542)與底盤（51)之定位部（513)螺固結 合，或供螺栓（55)經由通孔（542)通過底盤（51)定位部（513)螺 鎖固定於第二平移元件（32)上，如圖七所示；或如圖六所示， 該固定元件（54)其底部設置有複數導接部（543)，該導接部（543) 可直接設置於底盤（51)之定位部（513)，導接部（543)能以緊配 合方式與底盤（51)之定位部（513)固定，或是固定元件（54)以導 接部（543)定位設置於底盤（51)之定位部（513)後，再以粘著劑 將固定元件（54)與底盤（51)固定。其中，該限位槽（541)亦與該 凹槽部（521 )、環槽（512)共同形成一滾動槽空間。 複數滾動體（53)，係為滾珠、滾子以及滾柱，其可分別容 納分佈於該底盤（51)之環槽（512)、轉動元件（52)之凹槽部（521) 與固定元件（54)之限位槽（541)所共同界定的滾動槽空間中； 請爹閱圖十一，本創作四驅動對位對準機構，當欲進行X 轴方向位移時，可啟動平台機構上兩組第一平移旋轉單元（幻中 200832444 I為馬達之鶴單元（41)往X轴之同-方向作動，“帶_ 杯(42)上之螺帽⑶)、該連結於螺帽⑽上之第—平浐Early can also be used to accelerate linear positioning and angular positioning. [Embodiment] 呑月爹 Reading Figures 1 to 2, Shizheng ηα ^ The preferred embodiment of the four-drive alignment alignment mechanism provided by the present invention mainly includes a right--"flat mechanism can be installed to install a predetermined shape On the solid platform (1), at the same time, the ten-member mechanism includes two sets of first translational rotation units (3), two sets of second translational rotations (70), and a set-up platform (2), below For the first component of the rotating unit (3), please refer to FIG. 4, which is diagonally disposed on the fixed platform (1) and includes a driving device mounted on the fixed platform (1). a unit (41), a second translation element (10) that can be displaced by the drive unit (6) in a z-axis direction, a second translation element (10) that can be displaced with the first translation element (8) or that produces a relative elastic displacement, and a rotating unit (5) that is displaced with the second translating element (32) and provides a rotation. With respect to the second translating units (3,), the diagonally disposed on the fixed platform (1) and Mounting direction of the first translational rotation unit (3) The difference between the nine and seven 200832444 χ 刀 includes a driving unit (41) mounted on the fixed platform (1), a first translating element that can be driven and displaced by the driving unit (9) in the γ-axis direction, and can be returned to the a translating element (31) that displaces or produces a relative elastic displacement of the first-flat 7L piece (32)' and a rotating unit (5) that is displaceable with the second translating element (32) and provides a rotational action. Measuring platform (2) 'The measuring platform (2) of the present embodiment has a rectangular plate shape, and the four corners are respectively fixed to the rotation of the first translational rotation unit (3) and the second flat private rotation unit (3) Single ((5), and can be X-axis or Y-axis displacement or rotate in a predetermined direction. It should be specially noted that the driving unit (4) of this embodiment is set as a motor or a linear motor. Therefore, The motor is driven by a linear moving device (such as a screw and a nut, a linear slide and a slider), and then the first translational element (31) connected to the displacement is displaced; for example, the linear moving device is a screw (42) and a nut ( 33), it can be driven by the forward and reverse of the motor The rod (42), as shown in Fig. 4, is generated by the first translation element (31) connected by the nut (33) screwed on the screw (42). The linear movement device is a linear slide. When the slider is used, it can directly drive the first translational element (31) via the linear motor to generate the position m. Please refer to FIG. 5 to FIG. 9 again. The embodiment is mounted on the rotary unit of the second translational component (32) (5). Further, the utility model further comprises: a chassis (51) having an accommodating space (Bn) formed around the inner circumference thereof, wherein the peripheral wall of the accommodating space (511) is formed with a ring groove (512) of a predetermined shape, and the chassis is further provided with 200832444 There is a positioning portion (513); a rotating member (52) is disposed in the receiving space (511) of the chassis (51) and is provided with a groove portion (521) at one end of the ring groove (512), and simultaneously The top surface of the rotating component (52) is provided with a plurality of screw holes (522) which can be screwed and fixed to each other by the bolts (56) and the measuring platform (2); a fixing component (54) is fixed to The top end of the chassis (51) is also formed into a limited position groove (541), and the fixing member (54) can be opened (542), the bolt (55) is screwed to the positioning portion (513) of the chassis (51) via the through hole (542), or the bolt (55) is passed through the chassis (51) through the through hole (542) ( 513) the screw lock is fixed on the second translating element (32), as shown in FIG. 7; or as shown in FIG. 6, the fixing element (54) is provided at the bottom with a plurality of guiding portions (543), the guiding portion (543) can be directly disposed on the positioning portion (513) of the chassis (51), and the guiding portion (543) can be fixed to the positioning portion (513) of the chassis (51) in a tight fitting manner, or the fixing member (54) can be After the guiding portion (543) is positioned and positioned on the positioning portion (513) of the chassis (51), the fixing member (54) is fixed to the chassis (51) with an adhesive. The limiting groove (541) also forms a rolling groove space together with the groove portion (521) and the ring groove (512). The plurality of rolling elements (53) are balls, rollers and rollers, which respectively accommodate the ring groove (512) distributed on the chassis (51), the groove portion (521) of the rotating member (52) and the fixing member (54) The limit groove (541) is commonly defined in the rolling groove space; please refer to Figure XI, the creation of the four-drive alignment mechanism, when the X-axis direction displacement is required, the platform mechanism can be activated. The two sets of first translational rotation units (the imaginary 200832444 I is the crane unit (41) of the motor moves in the same direction as the X axis, "the nut (3) on the belt _ cup (42)), the connection to the nut (10) The first - Pingyi
⑻，以及位於[平移元件⑽上之第二平移元件（3:旋 轉單元⑸，均可被帶動而往X轴方向位移；當然，在此期間， 由於另外兩組第二平移旋轉單元（3’）之驅動單元⑻是不動 的’但其第二平移元件⑽與第—平移元件（3ι)間是可:奈米 級之相對彈性位移的’因此，該第二平移旋轉單元(3,）上之旋 轉早7〇(5)’亦可藉由該㈣級之微幅彈性位移特性而一起隨 著第-平移旋轉單元⑻往X軸方向位移，使該量測平台⑵: 體得以順利往X軸方向位移，而不會產生χ軸與γ軸方向之干 涉誤差。 請參閱圖十，當本創作欲進行γ軸方向之位移時，可啟動 平台機構上兩組第二平移旋轉單元（3,)中可為馬達之驅動單 元（41)往Υ軸之同一方向位移作動，同樣地，雖然另外兩組第 平私》疋轉單元（3 )之驅動單元（41)並沒有啟動，但仍可使整體 量測平台（2)往γ軸之同一方向作奈米級之微幅位移作動。 請參閱圖十二，當本創作欲以某一中心基準點作預定角度 之旋轉位移作動時，第一個情形是只需將一組第一平移旋轉單 元（3)之驅動單元（41)往預定之X軸方向位移作動，或分別將兩 組第一平移旋轉單元（3)之驅動單元（41)往X軸之不同方向位 移作動，便可在兩組第一平移旋轉單元（3)與兩組第二平移旋轉 200832444 單元…上之旋轉單元(5)上產生旋轉作用使量測平台⑵软 之T:定方向作旋轉位移。當然，該量測平台⑵旋轉位移 之弟一個情形，亦可珠丨丨田 4 了利用一組弟二平移旋轉單元（3,）之驅動單 =⑽定⑽方向㈣_，❹賴㈣二平移旋 早-3 :之驅動單元(41)往¥軸之不同方向位移作動來達 、。此外’當上述兩種情形同時發生時，亦可使量測平台⑵達 成所需之旋轉位移作用。 >本創作具有多數個特徵，第-個特徵在於利用該等第一平 私旋轉早70(3)與第二平移旋轉單元（3，）中之驅動單元⑷），· 可使量測平台⑵達到快速定位效果。 本創作第一個4寸破在於利用該等第一平移旋轉單元⑶與 第平私方疋轉單疋（3 )中之旋轉單元⑸，可提供量測平台⑵ 旋轉之用。 本創作第二個特徵在於利用第一平移元件（31)與第二平移 元件（32)間可作奈米級之微幅彈性位移特性，可有效地消除第 平私旋轉單几⑶與第二平移旋轉單元（3,)在χ轴與Y轴間 產生之干涉誤差，此外，亦可使量測平台⑵在卫作中承受高負 何之m ’仍能保有良好精度’並達到奈米級三自由度微動 平台之實質效益。 本發明所提供之四驅動對位對準機構，與前述引證案及其 他習用技術相互比較時，更具有下列之優點： 200832444 (一） 、本創作採用四組驅動單元（41)作為兩組第一平移旋 轉單元（3)與兩組第二平移旋轉單元（3，）之驅動源，可藉助其 具有可控制性、高頻響應之特性，以及微小化等優點，以消除 置測平台⑵在X軸與γ軸間產生之干涉誤差，並可確保量測平 台⑵進行旋轉運動時，其旋轉中心得以準確地落於量測平台⑵ 之中心點’而達到高精度、高速度之實質效益。 (二） 、本創作利用第一平移旋轉單元（3)與第二平移旋轉單 兀（3 )所採用具線性運動特性之第一平移元件（31)與第二平 移元件（32)，以及具旋轉特性之旋轉單元⑸設計，由於其運動 模式均屬於動摩擦’因此，整體摩擦力較小’且最小移動單位 準確’更具有熱變位小、精度安定、裝配容易，以及具互換性 及擴充性專諸多特性。 )本幻作之第-平移旋轉單元⑶與第二平移旋轉單元(8), and the second translation element (3: rotation unit (5) on the [translation element (10) can be driven to move in the X-axis direction; of course, during this period, due to the other two sets of second translational rotation units (3') The drive unit (8) is stationary 'but the second translation element (10) and the first translation element (3) are: the relative elastic displacement of the nanometer's, therefore, the second translational rotation unit (3,) The rotation of 7〇(5)' can also be shifted along with the first-translational rotation unit (8) in the X-axis direction by the micro-amplitude displacement characteristic of the (fourth) level, so that the measurement platform (2): the body can smoothly go to X The axial direction is displaced without the interference error between the χ axis and the γ axis direction. Referring to Figure 10, when the creation is to be displaced in the γ-axis direction, two sets of second translational rotation units on the platform mechanism can be activated (3, In the same direction, the drive unit (41) of the motor can be displaced in the same direction of the x-axis. Similarly, although the driving units (41) of the other two sets of flat-turning units (3) are not activated, Make the whole measurement platform (2) to the same direction as the γ axis The micro-displacement actuation. Referring to Figure 12, when the creation is intended to operate with a central reference point for a predetermined angular rotation displacement, the first case is to simply set a group of first translational rotation units (3). The driving unit (41) is displaced in the predetermined X-axis direction, or the driving units (41) of the two sets of the first translational rotation unit (3) are respectively displaced in different directions of the X-axis, so that the first two groups of translations can be performed. The rotation unit (3) and the two sets of second translational rotations on the 200832444 unit...the rotation unit (5) produces a rotation effect to make the measurement platform (2) soft T: the fixed direction of the rotational displacement. Of course, the measurement platform (2) rotational displacement In the case of a younger brother, it is also possible to use a group of two brothers to rotate the unit (3,) to drive the single = (10) fixed (10) direction (four) _, ❹ (four) two translation rotation early - 3: the drive unit (41 ) Displace the movement in different directions of the ¥ axis. In addition, when the above two situations occur simultaneously, the measurement platform (2) can also achieve the required rotational displacement effect. > This creation has many features, the first - Using the first flat private spin Early 70 (3) and the second translating rotation unit (3) in the drive unit ⑷), · measuring internet ⑵ can achieve rapid positioning effect. The first 4-inch break of this creation is to provide the rotation of the measuring platform (2) by using the first translational rotation unit (3) and the rotary unit (5) in the first flat-turning unit (3). The second feature of the present invention is that the micro-elastic displacement characteristic of the nano-level can be used between the first translating element (31) and the second translating element (32), which can effectively eliminate the first and third rotations (3) and the second. The interference error caused by the translational rotation unit (3,) between the x-axis and the Y-axis, in addition, can also make the measurement platform (2) withstand high and negative in the maintenance, and still maintain good precision and reach the nanometer level. The substantial benefits of the three-degree-of-freedom micro-motion platform. The four-drive alignment alignment mechanism provided by the present invention has the following advantages when compared with the aforementioned citations and other conventional techniques: 200832444 (1) This creation uses four sets of drive units (41) as two groups. The driving source of a translational rotation unit (3) and two sets of second translational rotation units (3,) can eliminate the detection platform (2) by virtue of its controllability, high-frequency response characteristics, and miniaturization. The interference error between the X-axis and the γ-axis can ensure the accuracy of high-precision and high-speed when the measuring platform (2) rotates and the center of rotation accurately falls to the center point of the measuring platform (2). (2) The present invention utilizes the first translational element (31) and the second translational element (32) having linear motion characteristics using the first translational rotation unit (3) and the second translational rotation unit (3), and The rotary unit (5) with rotating characteristics is designed to be dynamic friction. Therefore, the overall friction is small and the minimum moving unit is accurate. It has small thermal displacement, stable stability, easy assembly, and interchangeability and expandability. A lot of features. The first-translational rotation unit (3) and the second translational rotation unit
(3’），均採用模組化設計’因此，不但檢測與維修容易，更可 個別針對_的零件單獨祕或更換，而可延長整體之使用壽 命’並提升產品品質與良率。 上列詳細說明係針對本發明之一可行實施例之具體說明， 惟該實施例並非心限制本發明之專利_，凡未脫離本發明 技藝精神所為之等效實施或變更 又妁如·4變化之等效性實施 例，均應包含於本案之專利範圍中。 · 綜上所述’本案不但在空間型態上韻創新，並能較習用 12 * i 200832444 利申請案’以勵發明，至感德便 【圖式簡單說明】 物品增進上述多項功效，應已充分符合新穎性及進步性之法〜 發明專利要件，爰依法提出申請，懇請t局核准本明^ 圖一係本創作平台機構之立體外觀組合圖。 圖一係本創作平台機構之立體分解示意圖。 圖三係本創作平台機構之俯視平面圖。 圖四係本創作旋轉單元之剖面分解示意圖。 圖係本創作疑轉單元第一實施例之剖面示意圖。 圖’、係本創作旋轉單元第二實施例之剖面示意圖。 圖七係本創作旋轉單元組設於第二平移元件之示意圖。 Θ \係本創作平移旋轉單元之立體示意圖。 圖九係本創作旋轉單元之分解示意圖。 圖十係本創作量測平台往γ軸方向位移作動之俯視示意 圖十-係本創作量測平台往X軸方向位移作動之俯視示責 圖。 " -圖十二係本創作量測平台往預定方向旋轉位移作動之俯視 示意圖。 【主要元件符號說明】 1固定平台 13 200832444 2量測平台 3第一平移旋轉單元 3’ 第二平移旋轉單元 31第一平移元件 32第二平移元件 33螺帽 41驅動單元 • 42螺桿 5旋轉單元 51底盤 511容置空間 512環槽 513定位部 5 2轉動元件 • 521凹槽部 522螺孔 53滾動體 5 4固定元件 541限位槽 542通孔 543導接部 200832444 5 5螺栓 56螺栓(3'), all adopt modular design. Therefore, not only is it easy to inspect and repair, but also individual parts can be individually or replaced, which can extend the overall life of the product and improve product quality and yield. The detailed description above is a detailed description of a possible embodiment of the present invention, but the embodiment is not intended to limit the invention, and the equivalent implementation or modification is not changed from the spirit of the invention. Equivalent embodiments are to be included in the scope of the patent. · In summary, 'this case is not only innovative in the spatial pattern, but also able to use the 12 * i 200832444 application" to encourage the invention, to the sense of convenience [simplified description of the schema] Fully in line with the novelty and progressiveness of the law ~ the invention patent requirements, 提出 apply in accordance with the law, please ask the t-office to approve this description ^ Figure 1 is a three-dimensional appearance combination diagram of the creation platform. Figure 1 is a three-dimensional exploded view of the creation platform. Figure 3 is a top plan view of the creation platform. Figure 4 is a schematic exploded view of the rotating unit of the present invention. The figure is a schematic cross-sectional view of a first embodiment of the present suspected transfer unit. Figure ' is a schematic cross-sectional view showing a second embodiment of the present rotating unit. Figure 7 is a schematic diagram of the present rotating unit set in the second translating element. Θ \ is a three-dimensional schematic diagram of the translational rotation unit. Figure 9 is an exploded view of the rotating unit of the present invention. Figure 10 is a top view of the displacement of the creation measurement platform to the γ-axis direction. Figure 10 is a top-down view of the displacement of the measurement platform to the X-axis. " - Figure 12 is a schematic view of the top view of the creation measurement platform rotating in a predetermined direction. [Main component symbol description] 1 fixed platform 13 200832444 2 measurement platform 3 first translation rotation unit 3' second translation rotation unit 31 first translation element 32 second translation element 33 nut 41 drive unit • 42 screw 5 rotation unit 51 chassis 511 accommodation space 512 ring groove 513 positioning portion 5 2 rotating element • 521 groove portion 522 screw hole 53 rolling element 5 4 fixing member 541 limiting groove 542 through hole 543 guiding portion 200832444 5 5 bolt 56 bolt
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