CN104007768A - Origin regression method of four-axis coplanar alignment platform - Google Patents
Origin regression method of four-axis coplanar alignment platform Download PDFInfo
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- CN104007768A CN104007768A CN201310058708.8A CN201310058708A CN104007768A CN 104007768 A CN104007768 A CN 104007768A CN 201310058708 A CN201310058708 A CN 201310058708A CN 104007768 A CN104007768 A CN 104007768A
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Abstract
The invention relates to an origin regression method of a four-axis coplanar alignment platform. Quadrant angles of a fixed platform are respectively provided with a translation rotary unit. The transition rotary units of the quadrant angles are jointly provided with a measuring platform. Each of the transition rotary units is driven by a driving device. Origins, plus/minus limit sensors and a controller used for control are provided for displacement paths of the driving devices such that origin regression of the four-axis coplanar alignment platform can be achieved. Meanwhile, the condition that the platform gets stuck due to four-axis asynchronous motions during origin regression is avoided.
Description
Technical field
The present invention relates to the control field to bit platform, refer to that especially a kind of application is arranged at four axle coplines that the translation rotary unit of quadrant angle carries out initial point involution to the former point methods of the recurrence of bit platform.
Background technology
Four axle coplines are to bit platform (hereinafter to be referred as XXY to bit platform) based on three axle coplines to the basis of bit platform development, its framework is in all the people present's translation rotary unit is set up in to stationary platform, and power is provided and then drives measuring table by driver, its advantage is accurately to control the amount of movement of translation rotary unit, but, the degree of freedom of measuring table is all driven by driver, therefore, many compared with XXY contraposition platform complex in motion control.
Especially in the time that four axle coplines are carried out search initial point to bit platform, four described axle coplines to bit platform except need, to X, Y-axis involution, also needing the side-play amount of already present angle θ to do involution.Because its degree of freedom is all controlled by motor power, thus the method for the search initial point of application XXY to bit platform, and be not suitable for being applied to four axle coplines in bit platform.
In other words, how controlling four axle coplines and make it be applied to the method for searching bit platform initial point to the translation rotary unit of bit platform, to increase work efficiency, and reduce the stuck situation of machinery, is the important discussion problem of industry.
This case inventor is not enough to be applied to four axle coplines to bit platform in view of above-mentioned existing XXY returns initial point to bit platform, be urgently to think to be improved innovation, and after concentrating on studies through taking great pains to attain one's goal for many years, this part four axle coplines are are finally successfully researched and developed to the former point methods of the recurrence of bit platform.
Summary of the invention
Object of the present invention is to provide a kind of four axle coplines to the former point methods of the recurrence of bit platform, makes four axle coplines can return initial point to bit platform, and while avoiding because of initial point involution, four axle Asynchronies cause the stuck situation of platform simultaneously.
For achieving the above object, the technical solution used in the present invention is:
A kind of four axle coplines are to the former point methods of the recurrence of bit platform, by the quadrant angle of a stationary platform, one translation rotary unit is respectively set, on each described translation rotary unit at all quadrants angle, a measuring table is set jointly, each described translation rotary unit is also driven by drive unit, and described drive unit is provided with initial point, positive and negative limit sensor with the displacement path of rectangle and is used for the controller of manipulation; It is characterized in that, the step of the former point methods of described recurrence includes:
Step 1: controller drives two drive units that be arranged in parallel along X axis to move axially toward negative, until arbitrary drive unit is detected by negative pole limit sensor, described controller stops two drive units of X axis, and the negative pole limit sensor of record detecting;
Step 2: controller drives two drive units that be arranged in parallel along Y-axis to move axially toward negative, until arbitrary drive unit is detected by negative pole limit sensor, described controller stops two drive units of Y-axis, and the negative pole limit sensor of record detecting;
Step 3: controller carries out logical combination according to the negative pole limit sensor of X-axis and Y-axis, measuring table angular deflection direction and angle that judgement is described, the involution program of carrying out clockwise or counterclockwise angle rotation to control described measuring table;
Step 4: controller drives two drive units adjacent and right angle setting to move axially toward negative, and taking cornerwise quadrant angle as rotation center, then, impose clockwise angle rotation, until arbitrary drive unit is detected by negative pole limit sensor, described controller stops drive unit, completes the axial involution of clockwise θ;
Step 5: controller drives away from two drive units adjacent and right angle setting of the drive unit of step 4 and moves axially toward negative, and taking cornerwise quadrant angle as rotation center, then, impose counterclockwise angle rotation, until arbitrary drive unit is detected by negative pole limit sensor, described controller stops drive unit, completes the axial involution of counterclockwise θ;
So, complete four described axle coplines the work origin of bit platform is returned to action.
Four described axle coplines are to the former point methods of the recurrence of bit platform, wherein: also include an initial point involution step, this step includes controller and drives described two drive units that be arranged in parallel along X axis toward just moving axially, until arbitrary drive unit is detected by initial point sensor, described controller stops two drive units of X axis; Then drive described two drive units that be arranged in parallel along Y-axis toward just moving axially, until arbitrary drive unit is detected by initial point sensor, described controller stops two drive units of Y-axis; And wantonly three the initial point sensors generation of controller judgement reaction completes initial point involution step.
Compared with prior art, the beneficial effect that the present invention has is: so, when no matter four axle coplines produce the compound side-play amount of X, Y and θ to the measuring table 6 of bit platform, can be all to return initial point by above-mentioned controlling party, and can not cause the stuck situation of machinery to occur.
Brief description of the drawings
Fig. 1 is the vertical views of the present invention's four axle coplines to bit platform; Structural outline of the present invention is described;
Fig. 2 is the process block diagram of the described four axle coplines former point methods of recurrence to bit platform;
Fig. 3 ~ Fig. 7 is the action schematic diagram that four described axle coplines return work origin method when bit platform is produced to clockwise angle error;
Fig. 8 ~ 11 return the action schematic diagram of work origin method while bit platform being produced to counterclockwise angular error for four described axle coplines;
Figure 12 is four described axle coplines return initial point action schematic diagram to bit platform.
Description of reference numerals: 1-stationary platform; 2-the first translation rotary unit; 21-drive unit; The positive limit sensor of 22-; 23-initial point sensor; 24-negative pole limit sensor; 3-the second translation rotary unit; 31-drive unit; The positive limit sensor of 32-; 33-initial point sensor; 34-negative pole limit sensor; 4-the 3rd translation rotary unit; 41-drive unit; The positive limit sensor of 42-; 43-initial point sensor; 44-negative pole limit sensor; 5-Siping City moves rotary unit; 51-drive unit; The positive limit sensor of 52-; 53-initial point sensor; 54-negative pole limit sensor; 6-measuring table; 7-controller.
Embodiment
Refer to Fig. 1, four axle coplines provided by the present invention are to the former point methods of the recurrence of bit platform, its structure mainly by a translation rotary unit (or being called XY θ device) being respectively set in a stationary platform 1, four quadrant angles, a measuring table 6 is formed.
Described stationary platform 1, is used to provide measurement mechanism setting or fixing.
Described translation rotary unit 2,3,4,5, comprise the first translation rotary unit 2 and the 3rd translation rotary unit 4 that two groups of drive units 21,41 be arranged in parallel along X axis, the second translation rotary unit 3 and Siping City that two groups of drive units 31,51 be arranged in parallel along Y-axis move rotary unit 5, so, each described translation rotary unit 2,3,4,5 driven by drive unit 21,31,41,51; And described drive unit 21,31,41,51 provides measuring table 6 position detectings for being provided with positive limit sensor 22,32,42,52 and initial point sensor 23,33,43,53 and negative pole limit sensor 24,34,44,54 with the displacement path of rectangle and being used for the controller 7 of manipulation.Further illustrate the feature of described translation rotary unit 2,3,4,5; Described the first translation rotary unit 2 and the 3rd translation rotary unit 4 have a two-way mobile unit and a rotating unit, described way moving unit, be arranged in stationary platform, provide and after being driven, there is the device that moves and move along a Y vertical with X along directions X; Described rotating unit, is arranged on way moving unit, for provide driven after with the camber line relative sliding of θ direction on one day;
The second described translation rotary unit 3 and Siping City move rotary unit 5 and have a two-way mobile unit and a rotating unit, described way moving unit, be arranged in stationary platform, provide and after being driven, there is the device that moves and move along an X vertical with Y along Y-direction; Described rotating unit, is arranged on way moving unit, for provide driven after with the camber line relative sliding of θ direction on one day; Rely under drive unit 21,31,41,51 drives, measuring table is moved on assigned address.
Described measuring table 6, is arranged on the each described translation rotary unit at all quadrants angle 2,3,4,5, can move in directions X, Y-direction and θ direction by translation rotary unit 2,3,4,5.
Described controller 7, is used for manipulating four described axle coplines and to bit platform, described measuring table 6 is moved towards directions X, Y-direction and θ direction.
So, the above-mentioned introduction about the construction of the present invention's four axle coplines to bit platform that be, then please refer to the step that Fig. 2 ~ Fig. 7 returned former point methods again and is introduced:
Step 1: as shown in Figure 3, in the time that measuring table 6 produces directions X, Y-direction and θ direction combination misalignment, controller 7 drives two drive units 21,41 that described X axis be arranged in parallel to move axially toward negative, until arbitrary drive unit 21,41 is subject to 24,44 detectings of negative pole limit sensor, described controller 7 stops two drive units 21,41 of X axis, and the negative pole limit sensor 24,44 (as shown in Figure 4) of record detecting.
Step 2: as shown in Figure 5, described controller 7 drives two drive units 31,51 that described Y-axis be arranged in parallel to move axially toward negative, until arbitrary drive unit 31,51 is subject to 34,54 detectings of negative pole limit sensor, described controller 7 stops two drive units 31,51 of Y-axis, and the negative pole limit sensor 34,54 of record detecting.
Step 3: as shown in Figure 6, controller 7 carries out logical combination according to the negative pole limit sensor 24,34 of X-axis and Y-axis, measuring table 6 angular deflection direction and the angles that judgement is described, the involution program of carrying out clockwise or counterclockwise angle rotation to control described measuring table 6.
Step 4: as shown in Figure 7, controller 7 drives two drive units 21,31 adjacent and right angle setting to make two described adjacent moving axially toward negative, and taking cornerwise quadrant angle as rotation center, then, impose clockwise angle rotation, until arbitrary drive unit 21,31 is subject to 44,54 detectings of negative pole limit sensor, described controller 7 stops drive unit 21,31, completes the axial involution of clockwise θ; So, complete the recurrence work origin action of four described axle coplines to bit platform.
Step 5: as shown in Fig. 8 ~ Figure 11, if judge while producing counterclockwise angular error, repeating step 1 ~ 3, controller 7 drives past negative the moving axially of two drive units 41,51 adjacent and right angle setting away from the drive unit 21,31 of step 4, and taking cornerwise quadrant angle as rotation center, then, impose counterclockwise angle rotation, until arbitrary drive unit 41,51 is subject to 24,34 detectings of negative pole limit sensor, described controller 7 stops drive unit 41,51, completes the axial involution of counterclockwise θ; So, complete the recurrence work origin action of four described axle coplines to bit platform.
As shown in figure 12, the present invention more comprises an initial point involution step, step 6: when after completing steps 4 or 5, two drive units 21,41 that X axis described in controller 7 drives be arranged in parallel are toward just moving axially, until arbitrary drive unit 21,41 is subject to 23,43 detectings of initial point sensor, described controller 7 stops two drive units 21,41 of X axis; Then two drive units 31,51 that the Y-axis described in driving be arranged in parallel are toward just moving axially, until arbitrary drive unit 31,51 is subject to 33,53 detectings of initial point sensor, described controller 7 stops two drive units 31,51 of Y-axis; And wantonly three initial point sensors, 23,33,43, the 53 generation reactions of controller 7 judgement complete initial point involution step.
So, when no matter four axle coplines produce the compound side-play amount of X, Y and θ to the measuring table 6 of bit platform, can be all to return initial point by above-mentioned controlling party, and can not cause the stuck situation of machinery to occur.
More than explanation is just illustrative for the purpose of the present invention; and nonrestrictive, those of ordinary skill in the art understand, in the case of not departing from the spirit and scope that claim limits; can make many amendments, variation or equivalence, but within all will falling into protection scope of the present invention.
Claims (2)
1. an axle copline is to the former point methods of the recurrence of bit platform, by the quadrant angle of a stationary platform, one translation rotary unit is respectively set, on each described translation rotary unit at all quadrants angle, a measuring table is set jointly, each described translation rotary unit is also driven by drive unit, and described drive unit is provided with initial point, positive and negative limit sensor with the displacement path of rectangle and is used for the controller of manipulation; It is characterized in that, the step of the former point methods of described recurrence includes:
Step 1: controller drives two drive units that be arranged in parallel along X axis to move axially toward negative, until arbitrary drive unit is detected by negative pole limit sensor, described controller stops two drive units of X axis, and the negative pole limit sensor of record detecting;
Step 2: controller drives two drive units that be arranged in parallel along Y-axis to move axially toward negative, until arbitrary drive unit is detected by negative pole limit sensor, described controller stops two drive units of Y-axis, and the negative pole limit sensor of record detecting;
Step 3: controller carries out logical combination according to the negative pole limit sensor of X-axis and Y-axis, measuring table angular deflection direction and angle that judgement is described, the involution program of carrying out clockwise or counterclockwise angle rotation to control described measuring table;
Step 4: controller drives two drive units adjacent and right angle setting to move axially toward negative, and taking cornerwise quadrant angle as rotation center, then, impose clockwise angle rotation, until arbitrary drive unit is detected by negative pole limit sensor, described controller stops drive unit, completes the axial involution of clockwise θ;
Step 5: controller drives away from two drive units adjacent and right angle setting of the drive unit of step 4 and moves axially toward negative, and taking cornerwise quadrant angle as rotation center, then, impose counterclockwise angle rotation, until arbitrary drive unit is detected by negative pole limit sensor, described controller stops drive unit, completes the axial involution of counterclockwise θ;
So, complete four described axle coplines the work origin of bit platform is returned to action.
2. four axle coplines as claimed in claim 1 are to the former point methods of the recurrence of bit platform, it is characterized in that: also include an initial point involution step, this step includes controller and drives described two drive units that be arranged in parallel along X axis toward just moving axially, until arbitrary drive unit is detected by initial point sensor, described controller stops two drive units of X axis; Then drive described two drive units that be arranged in parallel along Y-axis toward just moving axially, until arbitrary drive unit is detected by initial point sensor, described controller stops two drive units of Y-axis; And wantonly three the initial point sensors generation of controller judgement reaction completes initial point involution step.
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| CN201310058708.8A CN104007768B (en) | 2013-02-25 | 2013-02-25 | Origin regression method of four-axis coplanar alignment platform |
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| CN201310058708.8A CN104007768B (en) | 2013-02-25 | 2013-02-25 | Origin regression method of four-axis coplanar alignment platform |
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| CN104007768B CN104007768B (en) | 2017-04-12 |
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Cited By (7)
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| CN105159327A (en) * | 2015-07-31 | 2015-12-16 | 营口金辰机械股份有限公司 | Simple method and device of automation equipment for returning to original point |
| CN106736847A (en) * | 2017-01-04 | 2017-05-31 | 昆山工研院新型平板显示技术中心有限公司 | To the error compensating method of bit platform |
| CN108711450A (en) * | 2018-05-18 | 2018-10-26 | 苏州吉成智能科技有限公司 | Equipment calibration method in intelligent drugstore |
| CN110027725A (en) * | 2019-04-26 | 2019-07-19 | 扬州万方电子技术有限责任公司 | A kind of translation rotation convergent movement device |
| CN111604867A (en) * | 2020-05-21 | 2020-09-01 | 张营国 | Four-axis coplanar correction platform and origin regression method |
| CN113377110A (en) * | 2021-06-24 | 2021-09-10 | 筑友智造智能科技有限公司 | Aligning platform recovery method and device |
| CN113670230A (en) * | 2020-05-15 | 2021-11-19 | 全研科技有限公司 | XXY alignment platform inspection method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105159327A (en) * | 2015-07-31 | 2015-12-16 | 营口金辰机械股份有限公司 | Simple method and device of automation equipment for returning to original point |
| CN105159327B (en) * | 2015-07-31 | 2017-11-17 | 营口金辰机械股份有限公司 | A kind of simple Aligning control device of automation equipment |
| CN106736847A (en) * | 2017-01-04 | 2017-05-31 | 昆山工研院新型平板显示技术中心有限公司 | To the error compensating method of bit platform |
| CN106736847B (en) * | 2017-01-04 | 2019-03-15 | 昆山工研院新型平板显示技术中心有限公司 | To the error compensating method of bit platform |
| CN108711450A (en) * | 2018-05-18 | 2018-10-26 | 苏州吉成智能科技有限公司 | Equipment calibration method in intelligent drugstore |
| CN110027725A (en) * | 2019-04-26 | 2019-07-19 | 扬州万方电子技术有限责任公司 | A kind of translation rotation convergent movement device |
| CN113670230A (en) * | 2020-05-15 | 2021-11-19 | 全研科技有限公司 | XXY alignment platform inspection method |
| CN111604867A (en) * | 2020-05-21 | 2020-09-01 | 张营国 | Four-axis coplanar correction platform and origin regression method |
| CN113377110A (en) * | 2021-06-24 | 2021-09-10 | 筑友智造智能科技有限公司 | Aligning platform recovery method and device |
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