CN101211669A - 3 freedom degree high precision positioning movement device and positioning method - Google Patents
3 freedom degree high precision positioning movement device and positioning method Download PDFInfo
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- CN101211669A CN101211669A CNA2007101729362A CN200710172936A CN101211669A CN 101211669 A CN101211669 A CN 101211669A CN A2007101729362 A CNA2007101729362 A CN A2007101729362A CN 200710172936 A CN200710172936 A CN 200710172936A CN 101211669 A CN101211669 A CN 101211669A
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Abstract
The invention relates to a three-degrees-of-freedom high accuracy positioning motion bench device and a positioning method. The motion bench device comprises a motion bench, and further comprises a horizontal leading screw motor, a first vertical leading screw motor, a second vertical leading screw motor and Home position sensors which are arranged correspondingly. The positioning method of the motion bench device executes the coordinate zero position search positioning for the motion bench device by adopting the three-degrees-of-freedom coordinates calibration method of horizontal direction, vertical direction and rotation angle. The positioning method provided by the invention can realize the high accuracy of the level of micron and microradian during the repeated positioning, wherein the three-degrees-of-freedom directions have no positioning dead zone in the positioning process. At the same time, the positioning method provided by the invention is simple, reasonable and of lower implementing cost.
Description
Technical field
The present invention relates to a kind of 3 freedom degree high precision positioning movement device and localization method, refer in particular to the high precision zero-bit searching method that the motion platform is carried out Three Degree Of Freedom by the coordinate system scaling method.
Background technology
At present traditional carries out Three Degree Of Freedom (horizontal direction to worktable, vertical direction, and swing) in the method for precision positioning,, generally uses null pick-up is installed in the motor movement stroke one section because there is the dead band of making zero of location, and near its extreme position, simultaneously, by mechanical hook-up, make motor be in one side of null pick-up, complex structure, and for extreme position make zero the location effect unsatisfactory.
In addition, owing to only just accomplished two the physical axis Y1 and the Y2 that form logic axle Rz are found its zero-bit respectively for the location of anglec of rotation logic axle Rz in the present localization method, rather than find zero-bit simultaneously, because the condition difference that at every turn makes zero generally can produce different results; So, cause bigger error easily for the location on this degree of freedom, bearing accuracy is not high.
For example Chinese patent discloses a kind of three-degree-of-freedom precision-positioning workbench No. 03260236.7, it has mainly illustrated the structural design of this precise positioning work table, method to precision positioning does not relate to any new technical characterictic, still depend on traditional method, so make the resetting of this worktable not to be effectively guaranteed, and, three degree of freedom (the horizontal direction of the motion platform that the device of this precise positioning work table that this patent is put down in writing can be adjusted, vertical direction, and swing) scope less.
For example Chinese patent also discloses a kind of precisely locating platform No. 200420046154.6 again, what introduced in this patent is the physical construction and the method for designing of locating platform, and for the method for precision positioning, do not make clearer and more definite explanation yet, so the localization method of this precisely locating platform still also is to use traditional method, it is not high to have bearing accuracy, and the time there are shortcomings such as dead band in the location.
Summary of the invention
Fundamental purpose of the present invention is to provide a kind of 3 freedom degree high precision positioning movement device and localization method, it carries out zero-bit search location by the coordinate system scaling method to the motion table apparatus, can reach the bearing accuracy height, all there is not the dead band in the three degree of freedom direction in position fixing process, and simple, the lower-cost effect of localization method.
For reaching above-mentioned purpose, the invention provides a kind of 3 freedom degree high precision positioning movement device, it comprises motion platform, and characteristics are also to comprise in addition:
The horizontal screw lead motor, it is provided with along the motion platform horizontal direction, and is connected with the motion platform vertical side; Be provided with along this horizontal screw lead motor that correspondence is provided with horizontal Home position (reference position) sensor on the direction;
The first down-feed screw motor, it is provided with along the motion platform vertical direction, and is connected with the motion platform horizontal side; Be provided with along this first down-feed screw motor that correspondence is provided with the first vertical Home position transducer on the direction;
The second down-feed screw motor, it is provided with along the motion platform vertical direction, is connected with the motion platform horizontal side, and is located at interval at the homonymy of motion platform with the first down-feed screw motor; Be provided with along this second down-feed screw motor that correspondence is provided with the second vertical Home position transducer on the direction.
Described horizontal screw lead motor is provided with the level code device of measuring its residing horizontal direction coordinate position, and its measured value is in order to determine motion table apparatus current location in the horizontal direction.
The described first down-feed screw motor is provided with the first vertical scrambler of measuring its residing vertical direction coordinate position, the described second down-feed screw motor is provided with the second vertical scrambler of measuring its residing vertical direction coordinate position, its measured value is in order to definite motion table apparatus current location in vertical direction, and the current anglec of rotation of motion table apparatus.
Described horizontal Home position transducer, the vertical Home position transducer with second of the first vertical Home position transducer is the optoelectronic switch sensor.
In addition, the present invention also provides a kind of above-mentioned motion table apparatus is carried out the high-accuracy localization method of Three Degree Of Freedom, in the method definition: when scrambler set on each motor of motion table apparatus all is in the position of corresponding Home position transducer, the motion table apparatus promptly is in the coordinate zero-bit, and at this moment, the Three Degree Of Freedom direction coordinate of this motion table apparatus is (x, y, Rz=0,0,0), wherein, x represents the horizontal direction coordinate figure, and y represents the vertical direction coordinate figure, and Rz represents the anglec of rotation;
Described method specifically comprises following steps:
Scrambler on step 3.1, the first down-feed screw motor that measures according to step 1 and the scrambler on the second down-feed screw motor are with respect to the position relation of each self-corresponding Home position transducer, vertical direction to motion platform is carried out the adjustment of corresponding position, and determines that adjusted 2 vertical scrambler current locations are the localization criteria position;
Step 3.2, utilize the rotation amount that in the Home position of the search first vertical scrambler and the Home position process of searching for the second vertical scrambler, obtains with respect to zero-bit, the anglec of rotation of motion table apparatus is adjusted to zero degree, promptly the scrambler on 2 down-feed screw motors is in same surface level, and identical with respect to the position relation of Home sensor separately respectively;
Step 3.3, the vertical direction of motion table apparatus is carried out coordinate search zero location, move in the vertical direction motion platform, arrive the position of vertical Home position transducer separately simultaneously up to 2 vertical scramblers, and demarcate the vertical Home position of motion table apparatus;
In the step 1, the position relation of described motion table apparatus on the three degree of freedom direction comprises following situation:
In the horizontal direction, the level code device on the horizontal screw lead motor is positioned at the left side of horizontal Home position transducer;
In the horizontal direction, the level code device on the horizontal screw lead motor is positioned at the right side of horizontal Home position transducer;
In vertical direction, the scrambler on the first down-feed screw motor and the scrambler on the second down-feed screw motor all are positioned at the homonymy of corresponding Home position transducer; Be the upside that described 2 vertical scramblers all are positioned at corresponding Home position transducer, perhaps these 2 vertical scramblers all are positioned at the downside of corresponding Home position transducer;
In vertical direction, the scrambler on the first down-feed screw motor and the scrambler on the second down-feed screw motor lay respectively at the both sides of corresponding Home position transducer; It is the upside that the described first vertical scrambler is positioned at the first vertical Home position transducer, and the second vertical scrambler is positioned at the downside of the second vertical Home position transducer, perhaps this first vertical scrambler is positioned at the downside of the first vertical Home position transducer, and the second vertical scrambler is positioned at the upside of the second vertical Home position transducer.
In the step 2, the horizontal direction of motion table apparatus is carried out coordinate search zero location, the process of demarcating horizontal Home position is specially:
When the level code device was positioned at the left side of horizontal Home position transducer, the motion platform that moves right arrived the position of horizontal Home position transducer until the level code device, and demarcated the horizontal Home position of motion table apparatus;
When the level code device is positioned at the right side of horizontal Home position transducer, be moved to the left motion platform, arrive the position of horizontal Home position transducer until the level code device, and demarcate the horizontal Home position of motion table apparatus.
In the described step 3.1, specifically comprise following steps:
Step 3.1.1, judge whether scrambler and the scrambler on the second down-feed screw motor on the first down-feed screw motor are positioned at the homonymy of corresponding Home position transducer, if, execution in step 3.1.2 then, if lay respectively at both sides, direct execution in step 3.1.3 then;
Step 3.1.2, motion platform is moved in the vertical direction a position that arrives its corresponding Home position transducer earlier in the first vertical scrambler or the second vertical scrambler; Continue execution in step 3.1.3 again;
Step 3.1.3, the residing vertical direction coordinate position of current 2 vertical scramblers is defined as the localization criteria position.
In the described step 3.2, specifically comprise following steps:
Step 3.2.1, according to the localization criteria position of among the step 3.1.3 2 vertical scramblers being determined, with identical speed 2 vertical scramblers court Home position transducers are separately carried out the position adjustment simultaneously, the table apparatus that rotatablely moves reaches the Home position up to the first vertical scrambler to be stopped, and the record current location is with respect to the rotation amount Rz1 of coordinate zero-bit;
Step 3.2.2,2 vertical encoder positions of motion table apparatus are back to the localization criteria position of determining among the step 3.1.3;
Step 3.2.3, while are carried out the position adjustment with identical speed with 2 vertical scramblers court Home position transducers separately, the table apparatus that rotatablely moves reaches the Home position up to the second vertical scrambler to be stopped, and the record current location is with respect to the rotation amount Rz of coordinate zero-bit
2
Step 3.2.4, calculating rotation amount Δ Rz=|Rz
1-Rz
2|/2;
Step 3.2.5, for the coordinate position of current 2 the vertical scramblers that obtain among the step 3.2.3, according to the opposite direction of rotating among the step 3.2.3,, the anglec of rotation of motion table apparatus is adjusted to zero degree with the angle of motion table apparatus along current location rotation Δ Rz.
In the described step 3.3, the vertical direction of motion table apparatus is carried out coordinate search zero location, the process of demarcating vertical Home position is specially:
When 2 vertical scramblers are positioned at the upside of vertical Home position transducer, move down motion platform, arrive the position of each self-corresponding vertical Home position transducer simultaneously until 2 vertical scramblers, and demarcate the vertical Home position of motion table apparatus;
When 2 vertical scramblers were positioned at the downside of vertical Home position transducer, the motion platform that moves up arrived the position of each self-corresponding vertical Home position transducer simultaneously until 2 vertical scramblers, and demarcated the vertical Home position of motion table apparatus.
3 freedom degree high precision positioning movement device provided by the invention and localization method carry out zero-bit search location by the coordinate system scaling method to the motion table apparatus, have the following advantages:
1, this method can be carried out the several times resetting, the bearing accuracy height, and the bearing accuracy of motion table apparatus level and vertical direction can reach micron order, and the anglec of rotation bearing accuracy of motion table apparatus can reach the microradian level.
2, this method positioning step advantages of simple, the motion table apparatus of utilization matching Design makes when it is in any coordinate position, can both finally search the zero-bit calibration smoothly, does not have the dead band, location, more eliminates the dead band without any other utility appliance.
3, in the motion table apparatus that this method is used, all adopt the optoelectronic switch sensor, cost is low, and versatility is good.
Description of drawings
Fig. 1 is that the motor encoder on the horizontal direction concerns synoptic diagram with respect to a kind of position of its Home position among the present invention;
Fig. 2 is that the motor encoder on the horizontal direction concerns synoptic diagram with respect to the another kind of position of its Home position among the present invention;
Fig. 3 is that 2 motor encoders on the vertical direction are in separately that a kind of position of Home position homonymy concerns synoptic diagram together among the present invention;
Fig. 4 is that 2 motor encoders on the vertical direction are in separately that the another kind of position of Home position homonymy concerns synoptic diagram together among the present invention;
Fig. 5 is that 2 motor encoders on the vertical direction are in respectively separately that a kind of position of both sides, Home position concerns synoptic diagram among the present invention;
Fig. 6 is that 2 motor encoders on the vertical direction are in respectively separately that the another kind of position of both sides, Home position concerns synoptic diagram among the present invention;
Fig. 7 is the synoptic diagram that the motor encoder on the horizontal direction is in its Home sensing station among the present invention;
Fig. 8 is the synoptic diagram that the motor encoder of one of them on the vertical direction is in its Home sensing station among the present invention;
Fig. 9 is the another kind of synoptic diagram that the motor encoder of one of them on the vertical direction is in its Home sensing station among the present invention;
Figure 10 is that 2 motor encoders on the rotation vertical direction arrive the synoptic diagram of its Home sensing station until one of them among the present invention;
Figure 11 is that 2 motor encoders on the rotation vertical direction arrive the another kind of synoptic diagram of its Home sensing station until one of them among the present invention;
Figure 12 is a kind of synoptic diagram that 2 motor encoders on the rotation vertical direction arrive its Home sensing station among the present invention until another scrambler;
Figure 13 is the another kind of synoptic diagram that 2 motor encoders on the rotation vertical direction arrive its Home sensing station among the present invention until another scrambler;
Figure 14 is that 2 motor encoders on the rotation vertical direction are zero synoptic diagram until the anglec of rotation among the present invention;
Figure 15 is that 2 motor encoders on the vertical direction all are in the synoptic diagram of Home sensing station separately among the present invention;
Figure 16 is the structural representation of 3 freedom degree high precision positioning movement device provided by the invention.
Embodiment
Below in conjunction with Fig. 1～Figure 16, describe several better embodiment of the present invention in detail:
As shown in figure 16, it comprises motion platform 73 freedom degree high precision positioning movement device provided by the invention, and characteristics are also to comprise in addition:
Horizontal screw lead motor 4, it is provided with along motion platform 7 horizontal X directions, and is connected with the vertical side of motion platform 7; Be provided with along this horizontal screw lead motor 4 that correspondence is provided with horizontal Home position transducer 1 on the direction;
The first down-feed screw motor 5, it is provided with along motion platform 7 vertical Y directions, and is connected with the horizontal side of motion platform 7; Be provided with along this first down-feed screw motor 5 that correspondence is provided with the first vertical Home position transducer 2 on the direction;
The second down-feed screw motor 6, it is provided with along motion platform 7 vertical Y directions, is connected with the horizontal side of motion platform 7, and is located at interval at the homonymy of motion platform 7 with the first down-feed screw motor 5; Be provided with along this second down-feed screw motor 6 that correspondence is provided with the second vertical Home position transducer 3 on the direction.
Described horizontal screw lead motor 4 is provided with the level code device 41 of measuring its residing horizontal X direction coordinate position, and its measured value is in order to determine the current location x of motion table apparatus on the horizontal X direction.
The described first down-feed screw motor 5 is provided with the first vertical scrambler 51 of measuring its residing vertical Y direction coordinate position, the described second down-feed screw motor 6 is provided with the second vertical scrambler 61 of measuring its residing vertical Y direction coordinate position, its measured value is in order to the definite current location y of motion table apparatus on the vertical Y direction, and the current anglec of rotation Rz of motion table apparatus.
The vertical Home position transducer 3 with second of described horizontal Home position transducer 1, the first vertical Home position transducer 2 is the optoelectronic switch sensor.
In addition, the present invention also provides a kind of above-mentioned motion table apparatus is carried out the high-accuracy localization method of Three Degree Of Freedom, in the method definition: when scrambler set on each motor of motion table apparatus all is in the position of corresponding Home position transducer, the motion table apparatus promptly is in the coordinate zero-bit, and at this moment, the Three Degree Of Freedom direction coordinate of this motion table apparatus is (x, y, Rz=0,0,0), wherein, x represents the horizontal direction coordinate figure, and y represents the vertical direction coordinate figure, and Rz represents the anglec of rotation;
Described method specifically comprises following steps:
As shown in Figure 2, on the horizontal X direction, the level code device 41 on the horizontal screw lead motor 4 is positioned at the left side of horizontal Home position transducer 1;
As shown in Figure 1, on the horizontal X direction, the level code device 41 on the horizontal screw lead motor 4 is positioned at the right side of horizontal Home position transducer 1;
As shown in Figure 3 and Figure 4, on the vertical Y direction, the scrambler 51 on the first down-feed screw motor 5 all is positioned at corresponding Home position transducer 2 and 3 homonymy with scrambler 61 on the second down-feed screw motor 6; Be that described 2 vertical scramblers 51 and 61 all are positioned at corresponding Home position transducer 2 and 3 upside (shown in Figure 3), perhaps these 2 vertical scramblers 51 and 61 all are positioned at corresponding Home position transducer 2 and 3 downside (shown in Figure 4);
As shown in Figure 5 and Figure 6, on the vertical Y direction, the scrambler 51 on the first down-feed screw motor 5 lays respectively at corresponding Home position transducer 2 and 3 both sides with scrambler 61 on the second down-feed screw motor 6; It is the upside that the described first vertical scrambler 51 is positioned at the first vertical Home position transducer 2, and the second vertical scrambler 61 is positioned at the downside (shown in Figure 5) of the second vertical Home position transducer 3, perhaps this first vertical scrambler 51 is positioned at the downside of the first vertical Home position transducer 2, and the second vertical scrambler 61 is positioned at the upside (shown in Figure 6) of the second vertical Home position transducer 3.
As shown in Figure 2, when level code device 41 is positioned at the left side of horizontal Home position transducer 1, the motion platform 7 that moves right arrives the position (as shown in Figure 7) of horizontal Home position transducer 1 until level code 41 devices, and demarcates the horizontal Home position of motion table apparatus;
As shown in Figure 1, when level code device 41 is positioned at the right side of horizontal Home position transducer 1, be moved to the left motion platform 7, arrive the position (as shown in Figure 7) of horizontal Home position transducer 1, and demarcate the horizontal Home position of motion table apparatus until level code device 41.
Step 3.1.1, judge whether the scrambler 51 on the first down-feed screw motor 5 is positioned at corresponding Home position transducer 2 and 3 homonymy with scrambler 61 on the second down-feed screw motor 6, (if being) as Fig. 3 or position relation shown in Figure 4, execution in step 3.1.2 then, if lay respectively at both sides (being), then direct execution in step 3.1.3 as Fig. 5 or position relation shown in Figure 6;
Step 3.1.2, motion platform 7 is moved in the vertical direction, a position that arrives its corresponding Home position transducer earlier in the first vertical scrambler 51 or the second vertical scrambler 61 is as Fig. 8 or shown in Figure 9; Continue execution in step 3.1.3 again;
Step 3.1.3, current 2 vertical scramblers 51 and 61 residing vertical Y direction coordinate positions are defined as the localization criteria position;
Step 3.2, utilize the rotation amount Rz that in the Home position of the search first vertical scrambler 51 and the Home position process of searching for the second vertical scrambler 61, obtains with respect to zero-bit, the anglec of rotation of motion table apparatus is adjusted to zero degree, promptly the scrambler 51 and 61 on 2 down-feed screw motors is in same surface level, and identical with respect to the position relation of Home sensor separately respectively;
Step 3.2.1, according to the localization criteria positions of among the step 3.1.3 2 vertical scramblers 51 and 61 being determined, with identical speed 2 vertical scramblers 51 and 61 court's Home position transducers 2 and 3 are separately carried out the position adjustment simultaneously, the table apparatus that rotatablely moves reaches the Home position up to the first vertical scrambler 51 to be stopped, and the record current location is with respect to the rotation amount Rz of coordinate zero-bit
1
As shown in figure 10, the first vertical scrambler 51 is drawn close to Home position in the bottom, and the second vertical scrambler 61 is then drawn close to the Home position that is in its top, and the table apparatus that rotatablely moves reaches the Home position up to the first vertical scrambler 51 to be stopped;
As shown in figure 11, the first vertical scrambler 51 is drawn close to the Home position that is in its top, and the second vertical scrambler 61 is then drawn close to Home position in the bottom, and the table apparatus that rotatablely moves reaches the Home position up to the first vertical scrambler 51 to be stopped;
Step 3.2.2,2 vertical scramblers 51 of motion table apparatus and 61 position are back to the localization criteria position of determining among the step 3.1.3;
Step 3.2.3, while are carried out the position adjustment with identical speed with 2 vertical scramblers 51 and 61 court's Home position sensing 2 and 3 devices separately, the table apparatus that rotatablely moves reaches the Home position up to the second vertical scrambler 61 to be stopped, and the record current location is with respect to the rotation amount Rz of coordinate zero-bit
2
As shown in figure 12, the first vertical scrambler 51 is drawn close to Home position in the bottom, and the second vertical scrambler 61 is then drawn close to the Home position that is in its top, and the table apparatus that rotatablely moves reaches the Home position up to the second vertical scrambler 61 to be stopped;
As shown in figure 13, the first vertical scrambler 51 is drawn close to the Home position that is in its top, and the second vertical scrambler 61 is then drawn close to Home position in the bottom, and the table apparatus that rotatablely moves reaches the Home position up to the second vertical scrambler 61 to be stopped;
Step 3.2.4, calculating rotation amount Δ Rz=|Rz
1-Rz
2|/2;
Step 3.2.5, as shown in figure 14, for current 2 vertical scramblers 51 that obtain among the step 3.2.3 and 61 coordinate position, according to the opposite direction of rotating among the step 3.2.3,, the anglec of rotation Rz of motion table apparatus is adjusted to zero degree with the angle of motion table apparatus along current location rotation Δ Rz;
Step 3.3, the vertical Y direction of motion table apparatus is carried out coordinate search zero location, along vertical Y direction moving movement platform 7, arrive the position (as shown in figure 15) of vertical separately Home position transducer 2 and 3 up to 2 vertical scramblers 51 simultaneously with 61, and demarcate the vertical Home position of motion table apparatus; Its process is specially:
When 2 vertical scramblers 51 when 61 are positioned at the upside of vertical Home position transducer 2 and 3, move down motion platform 7, arrive the position of each self-corresponding vertical Home position transducer 2 and 3 simultaneously until 2 vertical scramblers 51 and 61, and demarcate the vertical Home position of motion table apparatus;
When 2 vertical scramblers 51 when 61 are positioned at the downside of vertical Home position transducer 2 and 3, motion platform 7 moves up, arrive the position of each self-corresponding vertical Home position transducer 2 and 3 simultaneously until 2 vertical scramblers 51 and 61, and demarcate the vertical Home position of motion table apparatus.
Below, localization method proposed by the invention is described more intuitively by 2 specific embodiments.
In present embodiment 1, at first the coordinate position with the motor encoder 41 on the horizontal X direction of motion table apparatus is adjusted to as shown in Figure 1,2 motor encoders 51 of its vertical Y direction and 61 coordinate position are adjusted to as shown in Figure 3, start 3 motors subsequently, carry out servocontrol; The process of this motion table apparatus of concrete location is as follows:
Then, because this moment, the first vertical scrambler 51 was positioned at its Home position, then directly write down the rotation amount Rz of current location with respect to the coordinate zero-bit
1With identical speed 2 vertical scramblers 51 and 61 are rotated the position adjustment again, as shown in figure 13, make the second vertical scrambler 61 draw close to Home position in the bottom, and make the first vertical scrambler 51 be moved upward, the table apparatus that so rotatablely moves reaches its Home position up to the second vertical scrambler 61, and the record current location is with respect to the rotation amount Rz of coordinate zero-bit
2Calculate rotation amount Δ Rz=|Rz
1-Rz
2|/2; Subsequently, as shown in figure 14, according to the opposite direction of aforementioned rotation, with the angle of motion table apparatus along current location rotation Δ Rz, Rz adjusts to zero degree with its anglec of rotation;
Next, since this moment 2 vertical scramblers 51 with 61 upsides that all are positioned at vertical Home position transducer 2 and 3, then move down motion platform 7, arrive the position (as shown in figure 15) of each self-corresponding vertical Home position transducer 2 and 3 simultaneously until 2 vertical scramblers 51 and 61, and demarcate the vertical Home position of motion table apparatus.
In the present embodiment 1, by the detection of external sensor, the level of final motion table apparatus and the bearing accuracy of vertical direction can reach 1um, and the anglec of rotation bearing accuracy of motion table apparatus can reach 10urad.
In present embodiment 2, at first the coordinate position with the motor encoder 41 on the horizontal X direction of motion table apparatus is adjusted to as shown in Figure 2,2 motor encoders 51 of its vertical Y direction and 61 coordinate position are adjusted to as shown in Figure 5, start 3 motors subsequently, carry out servocontrol; The process of this motion table apparatus of concrete location is as follows:
Then, with identical speed 2 vertical scramblers 51 and 61 are rotated the position adjustment, as Fig. 5 and shown in Figure 10, make the first vertical scrambler 51 draw close to Home position in the bottom, and make the second vertical scrambler 61 draw close to the Home position that is in its top, the table apparatus that so rotatablely moves reaches its Home position up to the first vertical scrambler 51, and the record current location is with respect to the rotation amount Rz1 of coordinate zero-bit; Then the position of 2 vertical scramblers 51 of motion table apparatus and 61 is back to localization criteria position as shown in Figure 5; With identical speed 2 vertical scramblers 51 and 61 are rotated the position adjustment again, as shown in figure 12, make the first vertical scrambler 51 draw close to Home position in the bottom, and make the second vertical scrambler 61 draw close to the Home position that is in its top, the table apparatus that so rotatablely moves reaches its Home position up to the second vertical scrambler 61, and the record current location is with respect to the rotation amount Rz of coordinate zero-bit
2Calculate rotation amount Δ Rz=|Rz
1-Rz
2|/2; Subsequently, according to the opposite direction of aforementioned rotation, with the angle of motion table apparatus along current location rotation Δ Rz, Rz adjusts to zero degree with its anglec of rotation;
Next, since this moment 2 vertical scramblers 51 with 61 downsides that all are positioned at vertical Home position transducer 2 and 3, motion platform 7 then moves up, arrive the position (as shown in figure 15) of each self-corresponding vertical Home position transducer 2 and 3 simultaneously until 2 vertical scramblers 51 and 61, and demarcate the vertical Home position of motion table apparatus.
In the present embodiment 2, by the detection of external sensor, the level of final motion table apparatus and the bearing accuracy of vertical direction can reach 1um, and the anglec of rotation bearing accuracy of motion table apparatus can reach 10urad.
In sum, 3 freedom degree high precision positioning movement device provided by the invention and localization method carry out zero-bit search location by the coordinate system scaling method to the sports platform device, have the following advantages:
1, this method can be carried out the several times resetting, positioning accuracy height, sports platform device horizontal and vertical side To positioning accuracy can reach micron order, and the anglec of rotation positioning accuracy of sports platform device can reach microradian Level.
2, this method positioning step advantages of simple is used the sports platform device of coupling design, appoints so that it is in During what coordinate position, can both finally search smoothly the zero-bit calibration, not have the dead band, location, more need not be any Other auxiliary equipment is come deadband eliminating.
3, in the sports platform device that this method is used, all adopt the optoelectronic switch sensor, cost is low, and is logical Good with property.
Claims (10)
1. a 3 freedom degree high precision positioning movement device comprises motion platform (7), it is characterized in that, also comprises:
Horizontal screw lead motor (4), it is along motion platform (7) horizontal direction setting, and is connected with the vertical side of motion platform (7); Be provided with along this horizontal screw lead motor (4) that correspondence is provided with horizontal Home position transducer (1) on the direction;
The first down-feed screw motor (5), it is along motion platform (7) vertical direction setting, and is connected with the horizontal side of motion platform (7); Be provided with along this first down-feed screw motor (5) that correspondence is provided with the first vertical Home position transducer (2) on the direction;
The second down-feed screw motor (6), it is connected with the horizontal side of motion platform (7) along motion platform (7) vertical direction setting, and is located at interval at the homonymy of motion platform (7) with the first down-feed screw motor (5); Be provided with along this second down-feed screw motor (6) that correspondence is provided with the second vertical Home position transducer (3) on the direction.
2. 3 freedom degree high precision positioning movement device as claimed in claim 1 is characterized in that,
Described horizontal screw lead motor (4) is provided with the level code device (41) of measuring its residing horizontal direction coordinate position, and its measured value is determined motion table apparatus current location in the horizontal direction;
The described first down-feed screw motor (5) is provided with the first vertical scrambler (51) of measuring its residing vertical direction coordinate position, the described second down-feed screw motor (6) is provided with the second vertical scrambler (61) of measuring its residing vertical direction coordinate position, its measured value is determined motion table apparatus current location in vertical direction, and the current anglec of rotation of motion table apparatus.
3. 3 freedom degree high precision positioning movement device as claimed in claim 1, it is characterized in that, described horizontal Home position transducer (1), the first vertical Home position transducer with second of vertical Home position transducer (2) (3) is the optoelectronic switch sensor.
4. one kind is carried out the high-accuracy localization method of Three Degree Of Freedom to motion table apparatus as claimed in claim 1, it is characterized in that, when scrambler set on each motor of this motion table apparatus all is in the position of corresponding Home position transducer, the motion table apparatus promptly is in the coordinate zero-bit, and at this moment, the Three Degree Of Freedom direction coordinate of this motion table apparatus is (x, y, Rz=0,0,0), wherein, x represents the horizontal direction coordinate figure, and y represents the vertical direction coordinate figure, and Rz represents the anglec of rotation;
This method specifically comprises following steps:
Step 1, measure the relative position relation of scrambler on current each spindle motor Home position transducer corresponding with it, with judge the motion table apparatus in the horizontal direction with vertical direction on the coordinate position relation;
Step 2, the horizontal direction of motion table apparatus is carried out coordinate search zero location, according to the position of the level code device (41) on the horizontal screw lead motor (4) that records in the step 1 with respect to horizontal Home sensor (1), along continuous straight runs moving movement platform (7), arrive the position of horizontal Home position transducer (1) up to level code device (41), and demarcate the horizontal Home position of motion table apparatus;
Step 3, the vertical direction of motion table apparatus is carried out coordinate search zero location, arrive the position of corresponding Home position transducer and the vertical Home position of demarcation motion table apparatus simultaneously up to the first vertical scrambler of vertical scrambler (51) (61) with second;
Step 4, according to step 2 and step 3, this moment, the scrambler on each spindle motor all was in the position of corresponding Home position transducer, so the current coordinate position of demarcation motion table apparatus is a zero-bit, i.e. (x, y, Rz=0,0,0);
Step 5, repeated several times execution in step 1～step 4 repeat high precision zero-bit search location, finish zero location of searching of motion table apparatus.
5. as claimed in claim 4 the motion table apparatus is carried out the high-accuracy localization method of Three Degree Of Freedom, it is characterized in that, in the step 1, the position relation of described motion table apparatus on the three degree of freedom direction comprises following situation:
In the horizontal direction, the level code device (41) on the horizontal screw lead motor (4) is positioned at the left side of horizontal Home position transducer (1);
In the horizontal direction, the level code device (41) on the horizontal screw lead motor (4) is positioned at the right side of horizontal Home position transducer (1);
In vertical direction, the scrambler (51) on the first down-feed screw motor (5) and the scrambler (61) on the second down-feed screw motor (6) all are positioned at the homonymy of corresponding Home position transducer; Be the upside that described 2 vertical scramblers all are positioned at corresponding Home position transducer, perhaps these 2 vertical scramblers all are positioned at the downside of corresponding Home position transducer;
In vertical direction, the scrambler (51) on the first down-feed screw motor (5) and the scrambler (61) on the second down-feed screw motor (6) lay respectively at the both sides of corresponding Home position transducer; It is the upside that the described first vertical scrambler (51) is positioned at the first vertical Home position transducer (2), and the second vertical scrambler (61) is positioned at the downside of the second vertical Home position transducer (3), perhaps this first vertical scrambler (51) is positioned at the downside of the first vertical Home position transducer (2), and the second vertical scrambler (61) is positioned at the upside of the second vertical Home position transducer (3).
6. as claimed in claim 4 the motion table apparatus is carried out the high-accuracy localization method of Three Degree Of Freedom, it is characterized in that, in the step 2, the horizontal direction of motion table apparatus is carried out coordinate search zero location, the process of demarcating horizontal Home position is specially:
When level code device (41) was positioned at the left side of horizontal Home position transducer (1), the motion platform that moves right (7) arrived the position of horizontal Home position transducer (1) until level code (41) device, and demarcated the horizontal Home position of motion table apparatus;
When level code device (41) is positioned at the right side of horizontal Home position transducer (1), be moved to the left motion platform (7), arrive the position of horizontal Home position transducer (1) until level code device (41), and demarcate the horizontal Home position of motion table apparatus.
7. as claimed in claim 4 the motion table apparatus is carried out the high-accuracy localization method of Three Degree Of Freedom, it is characterized in that, in the described step 3, specifically comprise following steps:
Scrambler (61) on scrambler (51) on step 3.1, the first down-feed screw motor (5) that measures according to step 1 and the second down-feed screw motor (6) is with respect to the position relation of each self-corresponding Home position transducer, vertical direction to motion platform (7) is carried out the adjustment of corresponding position, and determines that the current location of adjusted 2 vertical scramblers is the localization criteria position;
The rotation amount that step 3.2, utilization obtain in the Home position process of the Home position of searching for the first vertical scrambler (51) and the search second vertical scrambler (61) with respect to zero-bit, the anglec of rotation of motion table apparatus is adjusted to zero degree, promptly the scrambler on 2 down-feed screw motors is in same surface level, and identical with respect to the position relation of Home sensor separately respectively;
Step 3.3, the vertical direction of motion table apparatus is carried out coordinate search zero location, move in the vertical direction motion platform (7), arrive the position of vertical Home position transducer separately simultaneously up to 2 vertical scramblers, and demarcate the vertical Home position of motion table apparatus.
8. as claimed in claim 7 the motion table apparatus is carried out the high-accuracy localization method of Three Degree Of Freedom, it is characterized in that, in the described step 3.1, specifically comprise following steps:
Step 3.1.1, judge whether scrambler (51) and the scrambler (61) on the second down-feed screw motor (6) on the first down-feed screw motor (5) are positioned at the homonymy of corresponding Home position transducer, if, execution in step 3.1.2 then, if lay respectively at both sides, direct execution in step 3.1.3 then;
Step 3.1.2, motion platform (7) is moved in the vertical direction a position that arrives its corresponding Home position transducer earlier in the first vertical scrambler (51) or the second vertical scrambler (61); Continue execution in step 3.1.3 again;
Step 3.1.3, the residing vertical direction coordinate position of current 2 vertical scramblers is defined as the localization criteria position.
9. as claimed in claim 7 the motion table apparatus is carried out the high-accuracy localization method of Three Degree Of Freedom, it is characterized in that, in the described step 3.2, specifically comprise following steps:
Step 3.2.1, according to the localization criteria position of among the step 3.1.3 2 vertical scramblers being determined, with identical speed 2 vertical scramblers court Home position transducers are separately carried out the position adjustment simultaneously, the table apparatus that rotatablely moves reaches the Home position up to the first vertical scrambler (51) to be stopped, and the record current location is with respect to the rotation amount Rz1 of coordinate zero-bit;
Step 3.2.2, the position of 2 vertical scramblers of motion table apparatus is back to the localization criteria position of determining among the step 3.1.3;
Step 3.2.3, while are carried out the position adjustment with identical speed with 2 vertical scramblers court Home position transducers separately, the table apparatus that rotatablely moves reaches the Home position up to the second vertical scrambler (61) to be stopped, and the record current location is with respect to the rotation amount Rz of coordinate zero-bit
2
Step 3.2.4, calculating rotation amount Δ Rz=|Rz
1-Rz
2|/2;
Step 3.2.5, for the coordinate position of current 2 the vertical scramblers that obtain among the step 3.2.3, according to the opposite direction of rotating among the step 3.2.3, with the angle of motion table apparatus, the anglec of rotation Rz of motion table apparatus is adjusted to zero degree along current location rotation Δ Rz.
10. as claimed in claim 7 the motion table apparatus is carried out the high-accuracy localization method of Three Degree Of Freedom, it is characterized in that, in the described step 3.3, the vertical direction of motion table apparatus is carried out coordinate search zero location, the process of demarcating vertical Home position is specially:
When 2 vertical scramblers are positioned at the upside of vertical Home position transducer, move down motion platform (7), arrive the position of each self-corresponding vertical Home position transducer simultaneously until 2 vertical scramblers, and demarcate the vertical Home position of motion table apparatus;
When 2 vertical scramblers were positioned at the downside of vertical Home position transducer, the motion platform that moves up (7) arrived the position of each self-corresponding vertical Home position transducer simultaneously until 2 vertical scramblers, and demarcated the vertical Home position of motion table apparatus.
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| CN103252764A (en) * | 2013-05-16 | 2013-08-21 | 浙江吉利汽车研究院有限公司杭州分公司 | Space docking platform |
| CN103900478A (en) * | 2012-12-28 | 2014-07-02 | 上海微电子装备有限公司 | Plane motion measuring device and method |
| CN104007768A (en) * | 2013-02-25 | 2014-08-27 | 全研科技有限公司 | Origin regression method of four-axis coplanar alignment platform |
| CN106515903A (en) * | 2016-12-12 | 2017-03-22 | 上海汇聚自动化科技有限公司 | Omni-directional mobile vehicle capable of adjusting goods postures accurately |
| CN107553429A (en) * | 2017-09-05 | 2018-01-09 | 武汉华星光电技术有限公司 | Positioning mechanism |
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| CN103900478A (en) * | 2012-12-28 | 2014-07-02 | 上海微电子装备有限公司 | Plane motion measuring device and method |
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| CN104007768A (en) * | 2013-02-25 | 2014-08-27 | 全研科技有限公司 | Origin regression method of four-axis coplanar alignment platform |
| CN104007768B (en) * | 2013-02-25 | 2017-04-12 | 全研科技有限公司 | Origin regression method of four-axis coplanar alignment platform |
| CN103252764A (en) * | 2013-05-16 | 2013-08-21 | 浙江吉利汽车研究院有限公司杭州分公司 | Space docking platform |
| CN103252764B (en) * | 2013-05-16 | 2015-09-02 | 浙江吉利汽车研究院有限公司杭州分公司 | Space articulation platform |
| CN106515903A (en) * | 2016-12-12 | 2017-03-22 | 上海汇聚自动化科技有限公司 | Omni-directional mobile vehicle capable of adjusting goods postures accurately |
| CN107553429A (en) * | 2017-09-05 | 2018-01-09 | 武汉华星光电技术有限公司 | Positioning mechanism |
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| CN100578675C (en) | 2010-01-06 |
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Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |