CN202378023U - Visual alignment device - Google Patents

Visual alignment device Download PDF

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Publication number
CN202378023U
CN202378023U CN2011204598514U CN201120459851U CN202378023U CN 202378023 U CN202378023 U CN 202378023U CN 2011204598514 U CN2011204598514 U CN 2011204598514U CN 201120459851 U CN201120459851 U CN 201120459851U CN 202378023 U CN202378023 U CN 202378023U
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CN
China
Prior art keywords
groups
translation unit
platform
spinner member
rotation translation
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Expired - Fee Related
Application number
CN2011204598514U
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Chinese (zh)
Inventor
蔡益隆
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RENDER PRECISION CO Ltd
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RENDER PRECISION CO Ltd
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Priority to CN2011204598514U priority Critical patent/CN202378023U/en
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Publication of CN202378023U publication Critical patent/CN202378023U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a visual alignment device which comprises a fixed platform, four set of rotary translation units, three drive units and a measurement platform, each set of rotary translation unit is movably arranged on the fixed platform and comprise a bottom layer rotating element, a top layer rotating element which rotates along with the bottom layer rotating element or generates opposite rotation, and a translation element which rotates along with the top layer rotating element and provides a translation action, the three drive units are arranged on the fixed platform and respectively connected with three sets of the four sets of rotary translation units, so that two sets of rotary translation units are driven towards the direction of an X axis by two drive units, and a set of rotary translation unit is driven towards the direction of a Y axis by a drive unit, and the measurement platform is fixed on translation elements of the four sets of rotary translation units, and therefore, the measurement platform rotates and moves towards a predetermined direction by seperated or common drive of the bottom layer rotating elements, the top layer rotating elements or the translation elements of three sets of active rotary translation units and one set of passive rotary translation units when the three drive units act.

Description

The vision alignment device
Technical field
The relevant a kind of Moving Unit of the utility model accurately, stable accuracy and more reduce the number of the vision alignment device of cost, be applicable to gluing wire mark semiconductor technology or similar process structure.
Background technology
Because the development of high-tech industry, the required precision of various industrial machines, toolroom machine and measuring instrument is also increasingly high.And the carrier platform is one of topmost factor of above-mentioned each the facility precision of influence, and existing at present multiple carrier platform is used, and can be divided into tandem platform and parallel platform haply.
The tandem platform is present common carrier platform, and the platform of this form is to add one with one to add one ... mode assemble each drive system control single axial motion; The precision of assembling can directly influence the precision of platform, with tandem two degrees of freedom platform, because the carrier platform of this form is that X axle and Y axle are done assembling with 90 degree; But when assembling; Diaxon can't absolutely reach 90 degree, and this promptly is called as the X-Y axle error of perpendicularity, and reduces the facility precision.And parallel platform is controlled more than one axially-movable with a plurality of drive systems; Comprise translational motion and rotatablely move; Has multiaxis with moving characteristic; But because can't reaching on a large scale multiaxis, present measurement technology measures, and factor such as the parallel unit mechanism rigidity is more weak, so the precision of parallel platform is not as tandem platform height.
And in order to improve the disappearance of above-mentioned conventional tandem platform; So there is the patent of TaiWan, China Announcement Number: M319503 number " 4 wheel driven moves the contraposition alignment stage " to produce; Consist predominantly of the two group of first translation rotary unit that is installed on fixed platform, two group of second translation rotary unit; And the measurement platform that is fixed on these translation rotary units; Wherein, But utilize the driver element in these translation rotary units, the shift element and the rotary unit of two relative resilient displacements, when driver element is suitably moved, be able to through these first translation rotary units drive respectively, the second translation rotary unit drives respectively or the first translation rotary unit and second this measurement platform of translation rotary unit driven in common toward X axle or Y axial displacement or toward the predetermined direction rotation.
This TaiWan, China patent announcement numbering: the patent of M319503 number " 4 wheel driven moves the contraposition alignment stage "; Though can improve shortcomings such as traditional platform low precision, rigidity be weak; But each translation rotary unit must set a driver element; Except making the member increase, cost also promotes relatively, and is very undesirable.
The utility model people is because above-mentioned disappearance; Phase can provide a kind of Moving Unit accurately, stable accuracy and more reduce the number of the vision alignment device of cost; Be think of, the design team's system of grinding with great concentration, consumption is popular to be used to provide, and desires to grind the wound action machine of wound for the utility model.
The utility model content
The main purpose of the utility model, provide a kind of Moving Unit accurately, stable accuracy and more reduce the number of the vision alignment device of cost.
In order to reach above-mentioned purpose, the utility model vision alignment device comprises: a fixed platform; Four groups of rotation translation unit; Respectively be movably installed on the fixed platform; Four groups of rotation translation unit respectively have a bottom spinner member, and one with bottom spinner member rotation or produce counterrotating top layer spinner member, and one with the rotation of top layer spinner member and the shift element of phorogenesis is provided; Three driver elements; Be installed on the fixed platform; And respectively with four groups of rotation translation unit wherein three groups is connected, make two groups of rotation translation unit driven toward X (or Y) direction of principal axis by two driver elements, one group of rotation translation unit receives driver element toward the driving of Y (or X) direction of principal axis; And one measure platform, is fixed on the shift element of four groups of rotation translation unit; Whereby; When three driver element actions; The difference or the driven in common of bottom spinner member, top layer spinner member or shift element through three groups of active rotation translation unit and one group of passive type rotation translation unit, order measures platform toward the predetermined direction swing offset.
Aforesaid vision alignment device, fixed platform are provided with three protruding rails, and the bottom spinner member of three groups of said rotation translation unit bottom also is provided with the chute of the corresponding mutual fit of confession.
Aforesaid vision alignment device is provided with bearing between the bottom spinner member of four groups of rotation translation unit and the top layer spinner member.
Aforesaid vision alignment device, the shift element of four groups of rotation translation unit comprise both sides and are provided with between ball bearing, the ball bearing pedestal that folder is established a slide block.
Aforesaid vision alignment device, driver element are a servo motor.
Aforesaid vision alignment device, the bottom central of fixed platform are provided with the axial pneumatic cylinder of an adjustment Z.
The beneficial effect of the utility model is, by said structure, the utility model has not only improved shortcomings such as traditional alignment device low precision, rigidity be weak, and cost of manufacture also reduces relatively.Other characteristics of the utility model and specific embodiment can further be understood in the detailed description of following conjunction with figs..
Description of drawings
The three-dimensional appearance of Fig. 1 the utility model embodiment.
The element exploded view of Fig. 2 the utility model embodiment.
The element component of Fig. 3 the utility model rotation translation unit.
Fig. 4 the utility model measures the vertical view of platform towards the X-direction displacement action.
Fig. 5 the utility model measures the vertical view of platform towards the Y direction displacement action.
Fig. 6 the utility model measures the action sketch map of distal ends translation unit.
Fig. 7 the utility model fixed platform is towards the side view of Z-direction displacement.
[main element symbol description]
10 fixed platforms, 11 protruding rails
12 protruding rails, 13 protruding rails
20 rotation translation unit, 21 bottom spinner members
22 top layer spinner members, 23 shift element
231 slide blocks, 24 bases
241 corresponding chute 242 screws
30 driver elements, 31 screw rods
40 measure platform 50 pneumatic cylinders
The specific embodiment
Please join Fig. 1-3; The utility model vision alignment device; Comprise: a fixed platform 10; Which is provided with three protruding rails 11,12,13, wherein a prominent rail 12 is put for level and is established, other have the vertical front and back that are arranged in this protruding rail 12 two ends of two protruding rails 11,13 and protruding rail 12 position and two protruding rails 11,13 one-tenth be arranged parallel to each other; Four groups of rotation translation unit 20; Wherein two groups of rotation translation unit 20 are movable is incorporated into and is horizontally disposed with protruding rail 12 on the fixed platform 10; In addition 20 of two groups of rotation translation unit are movable respectively is installed on the vertical protruding rail 11,13 on the fixed platform 10; Four groups of rotation translation unit 20 respectively are provided with a bottom spinner member 21, with 21 rotations of bottom spinner member or produce counterrotating top layer spinner member 22, and one with 22 rotations of top layer spinner member and the shift element 23 of phorogenesis is provided; Three driver elements 30; Be installed on the side of fixed platform 10 3 protruding rails 11,12,13 respectively; And respectively with four groups the rotation translation unit 20 wherein three groups be connected; Make wherein two groups of rotation translation unit 20 driven toward X (or Y) direction of principal axis by two driver elements 30, and one group of rotation translation unit 20 is driven by driver element 30 toward Y (or X) direction of principal axis; And one measure platform 40, is fixed on the shift element 23 of four groups of rotation translation unit 20.
Four groups of rotation translation unit 20 structures are all identical, so with the one of which explanation, rotation translation unit 20 has one and is plane bottom spinner member 21; The center of bottom spinner member 21 is provided with the projection of a tool bearing, and the projection periphery also is provided with a plurality of combined holes, utilizes conjunction that bottom spinner member 21 is incorporated into a bottom and is provided with on the base 24 of corresponding chute 241; Protruding rail 11, one centers that base 24 is sleeved on fixed platform 10 through corresponding chute 241 activities are provided with the top layer spinner member 22 of a corresponding portion, close by the bearing projection axle of corresponding portion and bottom spinner member 21; Again; Top layer spinner member 22 is provided with several combined holes, utilizes conjunction to combine a shift element 23, and shift element 23 is provided with the pedestal of a central tool fluting; Two sides of slotting are provided with ball bearing, supply a slide block 231 movable settings; Four groups of rotation translation unit 20 are incorporated into 10 last times of fixed platform, and the direction of each top shift element 23 is two groups of identical formations in twos, and is vertical between two groups.
Again; Four groups of base 24 sides that rotate three groups of rotation translation unit 20 among the translation unit 20 are provided with a screw 242; For being provided with three driver elements 30, the driver element 30 of present embodiment is a servo motor, and the screw rod 31 of servo motor passes the screw 242 of base 24 sides; So can relend and help spiral shell to be located at the bottom spinner member 21 generation displacements that screw 242 interlocks on the screw rod 31 link to each other through the forward or reverse drive screw 31 of servo motor.
Please join Fig. 4 in addition; As measure platform 40 and desire to carry out the X-direction displacement; Start fixed platform 10 and be located at the driver element 30 of protruding rail 12 sides, make the screw 242 of the screw rod 31 drive bases 24 of driver element 30, the rotation translation unit 20 that is incorporated on the base 24 is driven toward the X-direction displacement; And two groups of driver elements 30 in addition of being located at protruding rail 11,13 sides this moment on the fixed platform 10 are failure to actuate, but the shift element 23 on the rotation translation unit 20 can be done relative resilient displacement adjustment; Moreover; Please join Fig. 5; As measure platform 40 and desire to carry out the Y direction displacement, then start two driver elements 30 that fixed platform 10 is located at protruding rail 11,13 sides, and make two driver elements 30 1 for just changeing, one being counter-rotating; Make two screws 242 of two screw rods, 31 drives, two bases 24 of two driver elements 30; Make to be incorporated into 20 each the quilt drive of the rotation of two on two bases 24 translation unit, be located at another group driver element 30 of protruding rail 12 sides this moment on the fixed platform 10 and be failure to actuate, but the shift element 23 of rotating on the translation unit 20 can be done relative resilient displacement adjustment toward the Y direction displacement; So can make measurement platform 40 integral body be able to smoothly past X axle or Y direction displacement, and can not produce the interference error of X axle and Y direction by the elastic displacement adjustment of shift element 23.
Again; Please join Fig. 6, when equivalent lining platform 40 desires are done the swing offset action of a predetermined angular, start the driver element 30 that fixed platform 10 is located at protruding rail 12 sides; Make the screw 242 of the screw rod 31 drive bases 24 of driver element 30; The rotation translation unit that is incorporated on the base 24 20 is driven toward the X-direction displacement, and starts fixed platform 10 and be located at two driver elements 30 of protruding rail 11,13 sides, and make two driver elements 30 1 for just change, one for reversing; Make two screws 242 of two screw rods, 31 drives, two bases 24 of two driver elements 30, make to be incorporated into the rotation of two on two bases 24 translation unit 20 separately by the past Y direction displacement of drive; Whereby; When 30 actions of three driver elements; The difference or the driven in common of bottom spinner member 21, top layer spinner member 22 or shift element 23 through three groups of active rotation translation unit 20 and one group of passive type rotation translation unit 20, order measures platform 40 toward the predetermined direction swing offsets.
In addition, the bottom of fixed platform 10 also can combine with a pneumatic cylinder 50, and is as shown in Figure 7, and order measures platform 40 except that the displacement rotation with X axle and Y direction, can have the adjustment of height up and down.
Just the above is merely the preferred embodiment of the utility model, when can not be in order to limiting the enforceable scope of the utility model, all in those skilled in the art variation and the modification that obviously can do, flesh and blood from the utility model all should be regarded as not being contrary to.

Claims (6)

1. a vision alignment device is characterized in that, comprises:
A fixed platform;
Four groups of rotation translation unit; All movable is installed on this fixed platform, these four groups rotation translation unit respectively have a bottom spinner member, one with the rotation of bottom spinner member or produce counterrotating top layer spinner member and one with the rotation of top layer spinner member and the shift element of phorogenesis is provided;
Three driver elements; Be installed on this fixed platform; And respectively with four groups of said rotation translation unit wherein three groups be connected; Wherein two groups of rotation translation unit can be moved toward X-direction by two drive unit drives, and another group rotation translation unit can be moved toward the Y direction vertical with the X axle by a drive unit drives; And
A measurement platform is fixed on the shift element of four groups of said rotation translation unit; The bottom spinner member of four groups of said rotation translation unit, top layer spinner member or shift element difference or driven in common measure platform toward the predetermined direction swing offset.
2. vision alignment device as claimed in claim 1 is characterized in that, said fixed platform is provided with three protruding rails, and the bottom spinner member of three groups of said rotation translation unit bottom also is provided with the chute of the corresponding mutual fit of confession.
3. vision alignment device as claimed in claim 1 is characterized in that, is provided with bearing between the bottom spinner member of four groups of said rotation translation unit and the top layer spinner member.
4. vision alignment device as claimed in claim 1 is characterized in that, the shift element of four groups of said rotation translation unit comprises both sides and is provided with between ball bearing, the ball bearing pedestal that folder is established a slide block.
5. vision alignment device as claimed in claim 1 is characterized in that, said driver element is a servo motor.
6. vision alignment device as claimed in claim 1 is characterized in that, the bottom central of said fixed platform is provided with an axial pneumatic cylinder of adjustment Z.
CN2011204598514U 2011-11-18 2011-11-18 Visual alignment device Expired - Fee Related CN202378023U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011204598514U CN202378023U (en) 2011-11-18 2011-11-18 Visual alignment device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011204598514U CN202378023U (en) 2011-11-18 2011-11-18 Visual alignment device

Publications (1)

Publication Number Publication Date
CN202378023U true CN202378023U (en) 2012-08-15

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Application Number Title Priority Date Filing Date
CN2011204598514U Expired - Fee Related CN202378023U (en) 2011-11-18 2011-11-18 Visual alignment device

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CN (1) CN202378023U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104007768A (en) * 2013-02-25 2014-08-27 全研科技有限公司 Origin regression method of four-axis coplanar alignment platform
CN106181909A (en) * 2014-12-10 2016-12-07 财团法人金属工业研究发展中心 Multi-shaft bearing device capable of adjusting angle
CN110027725A (en) * 2019-04-26 2019-07-19 扬州万方电子技术有限责任公司 A kind of translation rotation convergent movement device
CN111604867A (en) * 2020-05-21 2020-09-01 张营国 Four-axis coplanar correction platform and origin regression method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104007768A (en) * 2013-02-25 2014-08-27 全研科技有限公司 Origin regression method of four-axis coplanar alignment platform
CN104007768B (en) * 2013-02-25 2017-04-12 全研科技有限公司 Origin regression method of four-axis coplanar alignment platform
CN106181909A (en) * 2014-12-10 2016-12-07 财团法人金属工业研究发展中心 Multi-shaft bearing device capable of adjusting angle
CN106181909B (en) * 2014-12-10 2018-11-09 财团法人金属工业研究发展中心 Multi-shaft bearing device capable of adjusting angle
CN110027725A (en) * 2019-04-26 2019-07-19 扬州万方电子技术有限责任公司 A kind of translation rotation convergent movement device
CN111604867A (en) * 2020-05-21 2020-09-01 张营国 Four-axis coplanar correction platform and origin regression method
CN111604867B (en) * 2020-05-21 2023-06-23 张营国 Four-axis coplanar correction platform and origin regression method

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120815

Termination date: 20201118