CN106736847B - To the error compensating method of bit platform - Google Patents
To the error compensating method of bit platform Download PDFInfo
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- CN106736847B CN106736847B CN201710004806.1A CN201710004806A CN106736847B CN 106736847 B CN106736847 B CN 106736847B CN 201710004806 A CN201710004806 A CN 201710004806A CN 106736847 B CN106736847 B CN 106736847B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
- B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
- B23Q15/14—Control or regulation of the orientation of the tool with respect to the work
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Abstract
The present invention relates to the error compensating methods of a kind of pair of bit platform.The above-mentioned error compensating method to bit platform obtains the data for compensation in testing procedure, and the data and preset strokes obtained in compensation process according to testing procedure compensate stroke, to improve the precision to bit platform.Specifically, according to the difference of the difference and n1 of Δ Xn and Δ Xm and m1, linear changing relation between available first direction machining error and stroke, for compensating first direction machining error.Similarly, according to the difference of the difference and n2 of Δ Yn and Δ Ym and m2, linear changing relation between available second direction machining error and stroke, for compensating second direction machining error.Δ X, Δ Y are the average value of hysterisis error, can be used for compensating hysterisis error when platform reverse movement.The above method compensates for mismachining tolerance and hysterisis error in platform moving process, therefore improves the precision to bit platform.
Description
Technical field
The present invention relates to the technical fields of machinery contraposition, more particularly to the error compensating method of a kind of pair of bit platform.
Background technique
In the process of production and processing, when being aligned using tradition to bit platform, the precision of bit platform can not be expired sometimes
The needs of sufficient high precision processing.UVW platform be it is a kind of can be realized X, Y, θ three-axis moving in plane to bit platform, with
For UVW platform, if the factory precision of UVW platform is ± 0.004mm, the required precision of production and processing is ± 0.002mm, at this time
The UVW platform is unable to satisfy required precision.
Summary of the invention
Based on this, it is necessary in view of the above technical problems, provide a kind of mistake to bit platform that can be improved machining accuracy
Poor compensation method.
The error compensating method of a kind of pair of bit platform, including testing procedure and compensation process；
The testing procedure, includes the following steps:
When platform moves in a first direction, repeatedly measurement stroke is m1, stroke is n1 and stroke is the number between m1 and n1
Measurement error when value；
Calculate the average value Δ of the measurement error when stroke is m1, stroke is n1 and stroke is the numerical value between m1 and n1
X；Calculate the average value Δ Xn of the measurement error when stroke is m1；Calculate the average value Δ of the measurement error when stroke is n1
Xm；
For platform when second direction is mobile, repeatedly measurement stroke is m2, stroke is n2 and stroke is the number between m2 and n2
Measurement error when value；And
Calculate the average value Δ of the measurement error when stroke is m2, stroke is n2 and stroke is the numerical value between m2 and n2
Y；Calculate the average value Δ Yn of the measurement error when stroke is m2；Calculate the average value Δ of the measurement error when stroke is n2
Ym；
The compensation process, includes the following steps:
The movement of platform is decomposed into along moving for the first direction and moving along the second direction；
If platform moves preset strokes X1 along the forward direction of the first direction, stroke x1 ' is compensated, wherein x1 '=(Δ
Xm-ΔXn)/(n1-m1)*X1；
If platform compensates stroke x2 ', wherein x2 '=(Δ along the reverse movement preset strokes X2 of the first direction
Xm-ΔXn)/(n1-m1)*X2+ΔX；
If platform moves preset strokes Y1 along the forward direction of the second direction, stroke y1 ' is compensated, wherein y1 '=(Δ
Ym-ΔYn)/(n1-m1)*Y1；
If platform compensates stroke y2 ', wherein y2 '=(Δ along the reverse movement preset strokes Y2 of the second direction
Ym-ΔYn)/(n1-m1)*Y2+ΔY。
It is one or more that the stroke, which is the quantity of the numerical value between m1 and n1, in one of the embodiments,；It is described
Stroke is that the quantity of the numerical value between m2 and n2 is one or more.
It is (n1+m1)/2 that the stroke, which is the numerical value between m1 and n1, in one of the embodiments,；The stroke is m2
Numerical value between n2 is (n2+m2)/2.
In one of the embodiments, when the platform moves in a first direction, repeatedly measurement stroke is m1, stroke is
In the step of measurement error when numerical value between m1 and n1 of n1 and stroke, measurement error is measured by image controller.
In one of the embodiments, in the platform when second direction is mobile, repeatedly measurement stroke is m2, stroke is
In the step of measurement error when numerical value between m2 and n2 of n2 and stroke, measurement error is measured by image controller.
In one of the embodiments, with the mobile component of moving platform for the screw rod that is arranged along the first direction and along institute
State the screw rod of second direction setting.
If in one of the embodiments, the screw rod lead of platform first direction be 2a, m1 0.5a, n1 1.5a,
Numerical value between m1 and n1 is a；A is positive number.
If in one of the embodiments, the screw rod lead of platform second direction be 2b, m2 0.5b, n2 1.5b,
Numerical value between m2 and n2 is b；B is positive number.
In one of the embodiments, in the testing procedure, the pendulous frequency of the measurement error of each stroke is 10
To 30 times.
In one of the embodiments, it is characterized in that, the movement of platform is decomposed into two along institute if platform rotates
State first direction movement and moving along the second direction, compensate stroke respectively.
The above-mentioned error compensating method to bit platform obtains the data for compensation in testing procedure, in compensation process root
The data and preset strokes obtained according to testing procedure compensate stroke, to improve the precision to bit platform.Specifically, root
According to the difference and n1 of Δ Xn and Δ Xm and the difference of m1, between available first direction machining error and stroke
Linear changing relation, for compensating first direction machining error.Similarly, according to the difference of Δ Yn and Δ Ym, and
The difference of n2 and m2, the linear changing relation between available second direction machining error and stroke, for mending
Repay second direction machining error.Δ X, Δ Y are the average value of hysterisis error, be can be used for compensating when platform moves backward
Hysterisis error.The above method compensates for mismachining tolerance and hysterisis error in platform moving process, therefore improves to bit platform
Precision.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
The attached drawing of other embodiments is obtained according to these attached drawings.
Fig. 1 is the perspective view in an embodiment to bit platform；
Fig. 2 is the schematic diagram moved along first direction shown in Fig. 1 to bit platform；
Fig. 3 is the schematic diagram moved in a second direction shown in Fig. 2 to bit platform；
Fig. 4 is the rotary state schematic diagram shown in Fig. 2 to bit platform；
Fig. 5 is in an embodiment to the flow chart of the error compensating method of bit platform；
Fig. 6 is measurement error number when moving in a first direction shown in Fig. 5 to the platform of the error compensating method of bit platform
According to table.
Specific embodiment
To facilitate the understanding of the present invention, the error compensating method to bit platform is carried out below with reference to relevant drawings more complete
The description in face.The preferred embodiment to the error compensating method of bit platform is given in attached drawing.But the error of bit platform is mended
Compensation method can be realized in many different forms, however it is not limited to embodiment described herein.On the contrary, providing these realities
The purpose for applying example is to keep the disclosure to the error compensating method to bit platform more thorough and comprehensive.
Unless otherwise defined, all technical and scientific terms used herein and belong to technical field of the invention
The normally understood meaning of technical staff is identical.Herein in the art used in the description of the error compensating method to bit platform
Language, which is only for the purpose of describing specific embodiments, is not intended to limit the present invention.Term " and or " used herein
Including any and all combinations of one or more related listed items.
As shown in Figure 1 and Figure 2, it can be applied to traditional pair to the error compensating method of bit platform in an embodiment
Bit platform, to improve the aligning accuracy to bit platform, by taking UVW platform 100 as an example, UVW platform 100 includes platform 110 and pushes
Platform 110 mobile first direction screw rod 120 and second direction screw rod 130, first direction screw rod 120 can push platform 110
It is moved along first direction, arrow direction shown in Fig. 2 is first direction.Referring also to Fig. 3, second direction screw rod 130 can
Platform 110 is pushed to move in a second direction, arrow direction shown in Fig. 3 is second direction.First direction and second direction one
As be vertical process.In one embodiment, wherein the quantity of first direction screw rod 120 is two, referring also to Fig. 4, two the
When one direction screw rod, 120 stroke difference, platform 110 can be pushed to rotate, arrow direction shown in Fig. 4 is direction of rotation.
Referring also to Fig. 5, the present embodiment include: to the error compensating method of bit platform
S100, testing procedure.And
S200, compensation process；
The data for compensation are obtained in step S100, in step S200 according to the obtained data of step S100 and default row
Journey compensates stroke, to improve the precision to bit platform.Specifically, step S100 includes the following steps:
When platform 110 moves in a first direction, repeatedly measurement stroke is m1, stroke is n1 and stroke is between m1 and n1
Measurement error when numerical value；In one embodiment, measurement error, such as CCD (Charge- can be measured by image controller
Coupled Device, charge coupled cell).
Calculate the average value Δ of the measurement error when stroke is m1, stroke is n1 and stroke is the numerical value between m1 and n1
X；Δ X is the average value of hysterisis error, can be used for compensating hysterisis error when platform 110 moves backward.
Calculate the average value Δ Xn of the measurement error when stroke is m1；Calculate the flat of the measurement error when stroke is n1
Mean value Δ Xm；According to the difference of the difference and n1 of Δ Xn and Δ Xm and m1, available first direction machining error with
Linear changing relation between stroke, for compensating first direction machining error.
For platform 110 when second direction is mobile, repeatedly measurement stroke is m2, stroke is n2 and stroke is between m2 and n2
Measurement error when numerical value；In one embodiment, measurement error, such as CCD (Charge- can be measured by image controller
Coupled Device, charge coupled cell).
Calculate the average value Δ of the measurement error when stroke is m2, stroke is n2 and stroke is the numerical value between m2 and n2
Y；Δ Y is the average value of hysterisis error, can be used for compensating hysterisis error when platform 110 moves backward.
Calculate the average value Δ Yn of the measurement error when stroke is m2；Calculate the flat of the measurement error when stroke is n2
Mean value Δ Ym；According to the difference of the difference and n2 of Δ Yn and Δ Ym and m2, available second direction machining error with
Linear changing relation between stroke, for compensating second direction machining error.
It is understood that when acquiring data, platform 110 in a first direction the measurement error mobile with second direction and
Relevant calculation, sequence is in no particular order.
In one embodiment, it is one or more that stroke, which is the quantity of the numerical value between m1 and n1,；Stroke be m2 and n2 it
Between numerical value quantity be one or more.Quantity facilitates calculating less, and the more accuracys of quantity are high.In the present embodiment, above-mentioned number
The quantity of value is one, specifically, it is (n1+m1)/2 that stroke, which is numerical value between m1 and n1,；Stroke is between m2 and n2
Numerical value is (n2+m2)/2.Meanwhile referring to Fig. 6, by taking first direction as an example, n1 1500um, m1 500um, between m1 and n1
Numerical value is 1000um.
If the screw rod lead of 110 first direction of platform is 2a in one of the embodiments, m1 0.5a, n1 are
Numerical value between 1.5a, m1 and n1 is a；A is positive number.Similarly, if the screw rod lead of 110 second direction of platform is 2b, m2 is
0.5b, n2 1.5b, the numerical value between m2 and n2 are b；B is positive number.For example, the screw rod lead of first direction screw rod 120 is
2000um, then m1 is 500um, n1 1500um.The reasonable selection for testing stroke, can be improved the accuracy of measurement, Jin Erti
The precision of high error supplement.In one embodiment, in testing procedure, the pendulous frequency of the measurement error of each stroke be 10 to
30 times.
Referring back to Fig. 6, Fig. 6 is measurement error tables of data when platform 110 moves in a first direction, and stroke m1 is 500um,
Stroke is 1000um and stroke n1 is 1500um, measures 18 measurement errors, the average value of above-mentioned 3*18 measurement error respectively
Δ X is 2.29um.The average value Δ Xn of measurement error when stroke m1 is 500um is 2.02, reality when stroke n1 is 1500um
The average value Δ Xm for surveying error is 2.62.
Step S200 includes the following steps:
The movement of platform 110 is decomposed into along moving for first direction and moving in a second direction；
If platform 110 moves preset strokes X1 along the forward direction of first direction, stroke x1 ' is compensated, wherein x1 '=(Δ Xm-
ΔXn)/(n1-m1)*X1；
By taking embodiment shown in fig. 6 as an example, if preset strokes X1 is 1600um, direction is forward direction, then x1 '=(Δ Xm-
Δ Xn)/(n1-m1) * X1=(2.62-2.02)/(1500-500) * 1600=0.96, that is, compensation stroke is 0.96um.Due to
Positive movement will not have hysterisis error, and there is no need to compensate hysterisis error Δ X.
If platform 110 compensates stroke x2 ' along the reverse movement preset strokes X2 of first direction, wherein x2 '=(Δ Xm-
ΔXn)/(n1-m1)*X2+ΔX；
By taking embodiment shown in fig. 6 as an example, if preset strokes X2 is 1600um, direction is reversed, then x2 '=(Δ Xm-
Δ Xn)/(n1-m1) * X2+ Δ X=(2.62-2.02)/(1500-500) * 1600+2.29=3.25, that is, compensating stroke is
3.25um。
If the mobile preset strokes Y1 of the forward direction of platform 110 in a second direction, compensates stroke y1 ', wherein y1 '=(Δ Ym-
ΔYn)/(n1-m1)*Y1；
If the reverse movement preset strokes Y2 of platform 110 in a second direction, compensates stroke y2 ', wherein y2 '=(Δ Ym-
ΔYn)/(n1-m1)*Y2+ΔY。
If the moving direction of platform 110 is only first direction or second direction, only need to carry out stroke in the direction
Compensation.I.e. by the movement of platform 110 be decomposed into along first direction move and in a second direction when moving, one of direction
Stroke be 0, it is only necessary to another direction carry out stroke compensation.If being decomposed into the movement of platform 110 along first direction
Movement and when in a second direction mobile, the stroke of both direction is not 0, then each comfortable all directions carry out stroke compensation.
In one embodiment, if platform 110 rotates, the rotation of platform 110 can be decomposed into two along first direction
Movement and a movement in a second direction, compensate stroke respectively.Referring back to Fig. 4, two 120 strokes of first direction screw rod are not
Together, then the compensation stroke of two first direction screw rods 120 is calculated separately, is compensated respectively, to improve according to step S200
The aligning accuracy of platform 110.
The error compensating method to bit platform of the present embodiment, utilizes the linear changing relation between mismachining tolerance and stroke
Mismachining tolerance is compensated, in reverse movement while compensating hysterisis error using the average value of the hysterisis error measured, therefore improve
To the precision of bit platform.Factory precision shown in FIG. 1 to bit platform is ± 0.004mm, measures through experiment, utilizes this implementation
Example the error compensating method of bit platform is improved after, aligning accuracy can be optimized to ± 0.002mm.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that coming for those of ordinary skill in the art
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to protection of the invention
Range.Therefore, the scope of protection of the patent of the invention shall be subject to the appended claims.
Claims (10)
1. the error compensating method of a kind of pair of bit platform, which is characterized in that including testing procedure and compensation process；
The testing procedure, includes the following steps:
When platform moves in a first direction, when repeatedly measurement stroke is m1, stroke is n1 and stroke is the numerical value between m1 and n1
Measurement error；
Calculate the average value Δ X of the measurement error when stroke is m1, stroke is n1 and stroke is the numerical value between m1 and n1；Meter
Calculate the average value Δ Xn of the measurement error when stroke is m1；Calculate the average value Δ Xm of the measurement error when stroke is n1；
Platform is when second direction is mobile, when repeatedly measurement stroke is m2, stroke is n2 and stroke is the numerical value between m2 and n2
Measurement error；And
Calculate the average value Δ Y of the measurement error when stroke is m2, stroke is n2 and stroke is the numerical value between m2 and n2；Meter
Calculate the average value Δ Yn of the measurement error when stroke is m2；Calculate the average value Δ Ym of the measurement error when stroke is n2；
The compensation process, includes the following steps:
The movement of platform is decomposed into along moving for the first direction and moving along the second direction；
If platform moves preset strokes X1 along the forward direction of the first direction, stroke x1 ' is compensated, wherein x1 '=(Δ Xm- Δ
Xn)/(n1-m1)*X1；
If platform compensates stroke x2 ' along the reverse movement preset strokes X2 of the first direction, wherein x2 '=(Δ Xm- Δ
Xn)/(n1-m1)*X2+ΔX；
If platform moves preset strokes Y1 along the forward direction of the second direction, stroke y1 ' is compensated, wherein y1 '=(Δ Ym- Δ
Yn)/(n1-m1)*Y1；
If platform compensates stroke y2 ' along the reverse movement preset strokes Y2 of the second direction, wherein y2 '=(Δ Ym- Δ
Yn)/(n1-m1)*Y2+ΔY。
2. the error compensating method according to claim 1 to bit platform, which is characterized in that the stroke be m1 and n1 it
Between numerical value quantity be one or more；The stroke is that the quantity of the numerical value between m2 and n2 is one or more.
3. the error compensating method according to claim 1 to bit platform, which is characterized in that the stroke be m1 and n1 it
Between numerical value be (n1+m1)/2；The stroke is that the numerical value between m2 and n2 is (n2+m2)/2.
4. the error compensating method according to claim 1 to bit platform, which is characterized in that in the platform in first party
To it is mobile when, repeatedly measure stroke be m1, measurement error when stroke is n1 and stroke is the numerical value between m1 and n1 the step of
In, measurement error is measured by image controller.
5. the error compensating method according to claim 1 to bit platform, which is characterized in that in the platform in second party
To it is mobile when, repeatedly measure stroke be m2, measurement error when stroke is n2 and stroke is the numerical value between m2 and n2 the step of
In, measurement error is measured by image controller.
6. the error compensating method according to claim 1 to bit platform, which is characterized in that with the mobile component of moving platform
For the screw rod being arranged along the first direction and along the screw rod of second direction setting.
7. the error compensating method according to claim 6 to bit platform, which is characterized in that if the spiral shell of platform first direction
Bar lead is 2a, then m1 is 0.5a, n1 1.5a, and the numerical value between m1 and n1 is a；A is positive number.
8. the error compensating method according to claim 6 to bit platform, which is characterized in that if the spiral shell of platform second direction
Bar lead is 2b, then m2 is 0.5b, n2 1.5b, and the numerical value between m2 and n2 is b；B is positive number.
9. the error compensating method according to claim 1 to bit platform, which is characterized in that in the testing procedure,
The pendulous frequency of the measurement error of each stroke is 10 to 30 times.
10. the error compensating method according to any one of claims 1 to 9 to bit platform, which is characterized in that if platform turns
It is dynamic, then the rotation of platform is decomposed into two movements and moving along the second direction along the first direction, point
It Bu Chang not stroke.
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| CN112731866B (en) * | 2020-12-24 | 2022-03-22 | 苏州维嘉科技股份有限公司 | Multi-axis machining system, machining method and device thereof, and computer-readable storage medium |
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| CN101058156A (en) * | 2006-04-18 | 2007-10-24 | 上海富安工厂自动化有限公司 | Compensation method for situation precision of numerical control shaft |
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Effective date of registration: 20201209 Address after: No.146 Tianying Road, high tech Zone, Chengdu, Sichuan Province Patentee after: Chengdu CHENXIAN photoelectric Co.,Ltd. Address before: No. 188, CHENFENG Road, Kunshan high tech Zone, Kunshan City, Suzhou City, Jiangsu Province Patentee before: Kunshan New Flat Panel Display Technology Center Co.,Ltd. Patentee before: KunShan Go-Visionox Opto-Electronics Co.,Ltd. |
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