JPH054178A - Driving device - Google Patents

Driving device

Info

Publication number
JPH054178A
JPH054178A JP1659791A JP1659791A JPH054178A JP H054178 A JPH054178 A JP H054178A JP 1659791 A JP1659791 A JP 1659791A JP 1659791 A JP1659791 A JP 1659791A JP H054178 A JPH054178 A JP H054178A
Authority
JP
Japan
Prior art keywords
arm
attached
end portion
table
output module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1659791A
Other languages
Japanese (ja)
Other versions
JP2969981B2 (en
Inventor
Ryoji Ishibashi
Toru Ishigame
徹 石亀
良治 石橋
Original Assignee
Yokogawa Electric Corp
横河電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp, 横河電機株式会社 filed Critical Yokogawa Electric Corp
Priority to JP1659791A priority Critical patent/JP2969981B2/en
Publication of JPH054178A publication Critical patent/JPH054178A/en
Application granted granted Critical
Publication of JP2969981B2 publication Critical patent/JP2969981B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To provide a driving device operable with high speed and simple in structure. CONSTITUTION:The driver comprises a first arm 16 and a second arm 29 which are rotatably provided on the same axis, a two-axis output module 1 for driving each of the first and second arms 16, 29, a third arm 41 having a base end portion rotatably mounted to a fore end of the first arm 16, a fourth arm 42 having a base end portion rotatably mounted to a fore end portion of the second arm 29 and a fore end portion rotatably mounted to a fore end portion of the third arm 41, a theta axis motor 43 mounted to the fore end portion of the third arm 41, and a table 44 mounted to an output shaft of the theta axis motor 43.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a driving device suitable for driving an XY table, a tool and the like incorporated in an automation line.

[0002]

2. Description of the Related Art Most of conventional driving devices for XY tables, for example, use a type in which a table guided by two linear guides in the X and Y directions that are orthogonal to each other is driven by a ball screw or the like.

Further, when the XY table having the above structure is incorporated in, for example, an automated board manufacturing line, a conveyor for transferring boards and the like interferes with the XY table, so that a step is provided between the table surface and the conveyor surface. A table transfer mechanism (a mechanism having a lift function and a horizontal transfer function) is provided on the table.

[0004]

However, the above-mentioned configuration of X
In driving the Y table, the absolute accuracy depends on the assembling accuracy of the X-direction linear guide and the Y-direction linear guide, and the feed accuracy of the ball screw or the like, and there is a problem that calibration is difficult.

There is also a problem that the moving range of the table is limited by the sizes of the X-direction linear guide and the Y-direction linear guide.

Further, a transfer mechanism to the conveyor is required on the table, but since this transfer mechanism also needs a lift function, there is a problem that the mechanism becomes complicated.

Further, in general, the moving speed of the ball screw is low (1 to 1.5 m / sec), it cannot be moved at high speed, and the ball screw is not easily available, and there is a problem that it takes a delivery time.

The present invention has been made in view of the above problems, and a first object of the present invention is to provide a driving device which has a high speed and a simple structure.

Another object of the present invention is to provide a drive device which can be easily calibrated and has a wide operating range.

Still another object of the present invention is to provide a biaxial output module which is small in size, has easy internal wiring, and has no restrictions on mounting.

[0011]

According to a first aspect of the invention for solving the above-mentioned problems, the first invention is provided so as to be rotatable coaxially with each other.
Arm and a second arm, a biaxial output module for driving each of the first and second arms, and a third end having a proximal end rotatably attached to a distal end of the first arm.
On the base side, and a fourth arm having a proximal end rotatably attached to the distal end of the second arm and a distal end rotatably attached to the distal end of the third arm. The Y-direction guide rail provided in the y-direction and this Y-direction guide rail
A sub table slidably engaged with the direction guide rail and an X direction guide rail provided on the sub table in the x direction are provided. Is slidably engaged with, and the tip ends of the third and fourth arms are rotatably attached.

According to a second aspect of the present invention, a first arm and a second arm which are coaxially rotatably provided, and a biaxial output module which drives the first and second arms, respectively, are provided. A third arm having a proximal end rotatably attached to the distal end of the first arm, and a proximal end rotatably attached to the distal end of the second arm, the distal end being The third arm includes a fourth arm rotatably attached to the tip of the third arm and a θ-axis motor attached to the tip of the third arm. It is attached to the output shaft of a shaft motor.

Further, in the invention of claim 3, the biaxial output module in the invention of claim 1 or 2 is rotatably disposed in a flange attached to the base side and a center hole of the flange. A shaft to which the second arm is attached is provided at one end, and is provided on one side through the flange, the stator is attached to the flange side, the rotor is attached to the casing, and the first arm is attached to the casing. A first motor,
The second motor is provided on the other side through the flange, the stator is attached to the flange side, the rotor is attached to the casing, and the casing includes a second motor to which the other end of the shaft is attached. is there.

[0014]

In the drive device of the present invention, when the first arm and the second arm are respectively driven by the biaxial output module, the third and fourth arms are also driven, and the sub table is in the Y direction. Guided by the guide rail, it moves in the Y direction, and driven objects such as tools and tables are guided by the X direction guide table and move in the X direction.

In the drive apparatus of the invention of claim 2, the first
When the second arm and the second arm are respectively driven by the biaxial output module, the third and fourth arms are also driven,
The driven object is driven in the XY directions. When the θ-axis motor is driven, the driven object rotates about the θ-axis.

In the drive unit of the invention of claim 3, the biaxial output module of the drive unit of the invention of claim 1 or 2,
When the first motor is driven, the rotational force of the rotor of the first motor is transmitted to the first arm via the casing.

When the second motor is driven, the rotational force of the rotor of the second motor is transmitted to the second arm via the casing and the shaft.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described with reference to the drawings. 1 is a configuration diagram illustrating a first embodiment of the present invention, FIG. 2 is a sectional configuration diagram of a biaxial output module in FIG. 1, FIG. 3 is a diagram illustrating control of an XY table shown in FIG. 1, and FIG.
1 is a configuration diagram when the XY table shown in FIG. 1 is installed in a production line, and FIG. 5 is a configuration diagram illustrating a second embodiment of the present invention.

First, the first aspect of the present invention will be described with reference to FIGS.
An example will be described. First, the biaxial output module 1 will be described with reference to FIG. The biaxial output module 1 is composed of a first motor (DD motor) 2 and a second motor (DD motor) 3. Then, the first motor 2
The first flange 4 which is the base of the above and the second flange 5 which is the base of the second motor 3 are arranged so as to face each other.

On the other hand, the base 6 is provided with a hole 6a for mounting the biaxial output module 1. This hole 6
The biaxial output module 1 is set in a, and the first flange 4 and the second flange 5 are attached to the base 6 in the vicinity of the peripheral edge of the hole 6a using bolts 7 and nuts 8.

Next, the first motor 2 will be described. A sleeve 10 is attached to the first flange 4 with a bolt 9. A lower end portion of a casing 12 is rotatably attached to the sleeve 10 via a bearing 11, and a stator 12 is attached to an upper portion of the sleeve 10.
Is attached. On the inner peripheral surface of the casing 12,
A rotor 14 that rotates with respect to the stator 13 is attached. A first arm 16 is attached to the upper end of the casing 12 using a bolt 15.

Next, the second motor 3 will be described. A sleeve 18 is attached to the second flange 5 with a bolt 17. An upper end of a casing 20 is rotatably attached to the sleeve 18 via a bearing 19, and a stator 21 is attached to a lower portion of the sleeve 18.
Is attached. On the inner peripheral surface of the casing 20,
A rotor 22 that rotates with respect to the stator 21 is attached. A joint 24 is attached to the lower end of the rotor 22 using a bolt 23. The lower end of this joint 24 is attached using a bolt 26 to a collar 25a formed at the lower end of a hollow shaft 25 extending from the lower end of the second motor 3 to the upper end of the first motor 2. Has been.

The upper end surface of the shaft 25 is attached to a joint 28 on the disk using bolts 27. Further, a second arm 29 is attached to the joint 28 with a bolt 30. On the other hand, a sleeve 32 is attached to the first arm 16 using a bolt 31. A second arm 29 is rotatably attached to the sleeve 32 via a bearing 33. In this embodiment, the first arm 16 and the second arm 16
The arm 29 is set to have the same length.

Next, the structure of the driving apparatus of this embodiment will be described with reference to FIG. The base end of the third arm 41 is rotatably attached to the tip of the first arm 16. Further, the fourth arm 4 is attached to the tip of the second arm 29.
Two base ends are rotatably mounted. And
The tip ends of the third arm 41 and the fourth arm 42 are rotatably attached to each other.
The second arm 29, the third arm 41 and the fourth arm 42 form a so-called pantograph mechanism.
In addition, in the present embodiment, the third arm 41 and the fourth arm 42 are set to have the same length.

A θ-axis motor (θ-axis; axis perpendicular to the XY plane) 43 is provided at the tip of the third arm 41. A table (XY table) 44 is attached to the output shaft of the θ-axis motor 43.

Next, the operation of the above configuration will be described. When a current is passed through the first motor 2 of the biaxial output module 1, the rotor 14 rotates with respect to the stator 13. This rotor 1
Rotation of the first arm 16 through the casing 12.
Is transmitted to the first arm 16 to rotate.

Similarly, when an electric current is applied to the second motor 3 of the biaxial output module 1, the rotor 22 rotates with respect to the stator 21, and the rotation of the rotor 22 causes the rotation of the casing 2.
0, the joint 24, the shaft 25, and the joint 28, and is transmitted to the second arm 29.
Rotates coaxially with the first arm 16.

The first arm 16 and the second arm 29
The rotation of and allows the table 44 to assume various positions as shown by the alternate long and short dash line in FIG.

In the present embodiment, control is performed so that the table 44 is parallel to the X axis (does not rotate in any state) regardless of the position of the table 44 or during movement. Is going.

This control is performed as follows.
As shown in FIG. 3, the angle formed by the first arm 16 and the second arm 29;
(Θ1−θ2) Direction of bisector of angle formed by first arm 16 and second arm 29 θ3; θ3 = (θ1−θ2) / 2 Here, the table 44 rotates at any position. To prevent this, the angle θ between the bisector of the angle formed by the first arm 16 and the second arm 29 and the table is θ.
The control is performed so that 4 becomes (90 ° -θ3).

However, in this embodiment, since the θ-axis motor 43 is mounted on the third arm 41, the direction ψ of the third arm 41 needs to be added to θ4.

Then, θ3 (f (θ1, θ2)) is calculated and the rotation angle of the table 44 is controlled. Or
A gyro is provided on the table 44, and feedback is performed between the gyro and the biaxial output module 1. Furthermore, the rotation angle of the table 44 can be controlled by properly analyzing the results of both and outputting them.

Next, with reference to FIG. 4, a description will be given of the case where the drive unit of this embodiment is installed in a substrate production line. In the figure, a biaxial output module 1 is arranged between a first belt conveyor 51 and a second belt conveyor 52. A transfer belt conveyor 53 is provided on the table 44 as a transfer device.

With the above-mentioned structure, the substrate (workpiece) conveyed by the first belt conveyor 51 is transferred to the table 44.
It is drawn in by the upper transfer belt conveyor 53 and set on the transfer belt conveyor 53. When this setting is completed, the biaxial output module 1 is driven and the table 44 is moved to the work area W. Here, a work such as soldering is performed on the substrate, and the substrate is moved again between the first belt conveyor 51 and the second belt conveyor 52. At this time, the θ-axis motor 43 is driven to drive the table 4
Invert 4 180 °. Then, the transfer belt conveyor 53 is used to transfer the substrate to the second belt conveyor 52, and a series of operations is completed.

According to the above construction, the drive device of this embodiment can be mounted simply by mounting the biaxial output module 1 on the base 6 using the bolts 7. The substrate (workpiece) on the table 44 can be accessed from both upper and lower sides. Table 44
Since the upper transfer mechanism does not need a lift function, the structure is simple. Since the size of the work area W plus the conveyor section is substantially the outer shape of the device, it is compact. Further, not only the operating area as the XY table but also the operating area within the radius of the longest arm can be used as a table type material handling device.

Further, since the ball screw is not used to drive the table 44, the moving speed can be increased. Further, the two-axis output module 1 and the θ-axis motor 43
The XY table can be easily calibrated by controlling the.

Furthermore, the two-axis output module 1 of this embodiment
Has the following features as compared with the conventional general-purpose actuator module (robot).

Considering a scalar type robot, for example, a robot in which the driving source of the second arm is provided at the tip of the rotating first arm, this scalar type robot is the first type.
Since the drive source of the arm must also rotate the drive source of the second arm, the drive source of the first arm is large, but the two-axis output module 1 of this embodiment does not require the drive source. It can be small. Also, since the scalar type robot has a drive source on the movable part, it is necessary to pay attention to the wiring, but the two-axis output module 1 of this embodiment is used.
Since the movable part has no drive source, wiring is easy and multiple rotations are possible. Further, wiring can be performed through the hollow portion of the shaft 25.

Considering a horizontal articulated robot, for example, a robot in which the motor shafts are opposed to each other and the arm extends between two motors, the arm extends beyond the two motors. Therefore, there are restrictions on the application, but the biaxial output module 1 of the present embodiment does not have such restrictions.

Next, a second embodiment of the present invention will be described with reference to FIG. In this embodiment, the same parts as those in the first embodiment are designated by the same reference numerals, and their description will be omitted. A Y-direction guide rail 61 is provided on the base 6 in the y-direction, and a sub-table 62 is slidably engaged with the Y-direction guide rail 61. On the sub table 62, x
X-direction guide rail 63 is provided in the direction of the table 6
4 is slidably engaged with the X-direction guide table 63. The tip ends of the third and fourth arms 41, 42 are rotatably attached to the table 64.

Also in the above configuration, the biaxial output module 1 need only be attached to the base 6 by using the bolts 7, so that the attachment is simple. Further, since the ball screw is not used to drive the table 63, the moving speed can be increased.

The present invention is not limited to the above embodiment. In the above embodiment, the description has been given of the case where the driven object of the drive device is the table (XY table), but the driven object may be a tool or the like.

[0043]

As described above, according to the first aspect of the invention, since the ball screw is not used, the calibration is simple and the driving speed is high without depending on the feed accuracy of the ball screw. Can be realized.

Further, in the invention of claim 2, since the linear guide and the ball screw are not used, the calibration is easy and the driving speed does not depend on the assembly accuracy of the linear guide or the feed accuracy of the ball screw. Can realize a high-speed drive device. Further, the moving range is not limited by the size of the linear guide, and the operating range is wide. Further, since the θ-axis motor is provided, when the XY table is driven, the transfer mechanism is not provided on the table, and the mechanism can be simplified.

Further, according to the third aspect of the invention, it is possible to realize a biaxial output module which is small in size, has easy internal wiring, and has no restrictions on mounting.

[Brief description of drawings]

FIG. 1 is a configuration diagram illustrating a first embodiment of the present invention.

FIG. 2 is a cross-sectional configuration diagram of the biaxial output module in FIG.

FIG. 3 is a diagram illustrating control of an XY table shown in FIG.

FIG. 4 is a configuration diagram when the XY table shown in FIG. 1 is installed in a production line.

FIG. 5 is a configuration diagram illustrating a second embodiment of the present invention.

[Explanation of symbols]

1 2 axis output module 2 First motor 3 Second motor 4 First flange 5 Second flange 6 base 12,20 casing 13,22 rotor 14,21 Stator 16 First Arm 25 shaft 29 Second Arm 41 Third Arm 42 Fourth Arm 43 θ-axis motor 44 tables 61 Y-axis direction guide rail 62 subtable 63 X-direction guide rail 64 tables

Claims (3)

[Claims]
1. A first rotatably provided coaxially with each other.
An arm (16) and a second arm (29), a biaxial output module (1) for driving each of the first and second arms (16, 29), and a first arm (16). A third arm (41) having a proximal end rotatably attached to the distal end portion, and a proximal end portion rotatably attached to the distal end portion of the second arm (29), the distal end portion being the third 4 rotatably attached to the tip of the arm (41) of the
Arm (42) and Y provided on the base side in the y direction
Direction guide rail (61) and sub-table (62) slidably engaged with the Y direction guide rail (61)
And an X-direction guide rail (63) provided on the sub-table (62) in the x-direction so that driven objects such as tools and tables can slide on the X-direction guide rail (63). To the third and fourth arms (41,
42) A drive device in which a tip portion of 42) is rotatably attached.
2. A first rotatably provided coaxially with each other.
An arm (16) and a second arm (29), a biaxial output module (1) for driving each of the first and second arms (16, 29), and a first arm (16). A third arm (41) having a proximal end rotatably attached to the distal end portion, and a proximal end portion rotatably attached to the distal end portion of the second arm (29), the distal end portion being the third 4 rotatably attached to the tip of the arm (41) of the
Arm (42) and a θ-axis motor (43) attached to the tip of the third arm (41), and a driven object such as a tool or a table is the θ-axis motor (43). A drive device characterized by being attached to an output shaft.
3. The biaxial output module (1) is rotatably disposed in a flange (4,5) attached to the base (6) side and a central hole of the flange (4,5).
The shaft (25) to which the second arm (29) is attached is provided at one end thereof, and the stator (13) is provided on one side via the flanges (4, 5), and the stator (13) is on the flange (4,5) side. , The rotor (14) is attached to the casing (12), and the first arm (16) is attached to the casing (12) via the first motor (2) and the flanges (4, 5). And the stator (21) is provided on the other side, and the flange (4,
5) side, the rotor (22) is attached to the casing (20), and the casing (20) includes a second motor (3) to which the other end of the shaft (25) is attached. The drive device according to claim 1 or 2.
JP1659791A 1991-02-07 1991-02-07 Two-axis output module and driving device using the same Expired - Fee Related JP2969981B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1659791A JP2969981B2 (en) 1991-02-07 1991-02-07 Two-axis output module and driving device using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1659791A JP2969981B2 (en) 1991-02-07 1991-02-07 Two-axis output module and driving device using the same

Publications (2)

Publication Number Publication Date
JPH054178A true JPH054178A (en) 1993-01-14
JP2969981B2 JP2969981B2 (en) 1999-11-02

Family

ID=11920702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1659791A Expired - Fee Related JP2969981B2 (en) 1991-02-07 1991-02-07 Two-axis output module and driving device using the same

Country Status (1)

Country Link
JP (1) JP2969981B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9057429B2 (en) 2011-05-16 2015-06-16 Harmonic Drive Systems Inc. Concentric multi-axis actuator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9057429B2 (en) 2011-05-16 2015-06-16 Harmonic Drive Systems Inc. Concentric multi-axis actuator

Also Published As

Publication number Publication date
JP2969981B2 (en) 1999-11-02

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