WO2001026865A1

WO2001026865A1 - Horizontal articulated manipulator

Info

Publication number: WO2001026865A1
Application number: PCT/JP2000/007015
Authority: WO
Inventors: Tsuyoshi Tanoue; Kazuhiro Haniya; Shin-Ichi Kaido; Hiroyuki Arai
Original assignee: Kabushiki Kaisha Yaskawa Denki; Kabushiki Kaisha Yushin Seiki
Priority date: 1999-10-08
Filing date: 2000-10-06
Publication date: 2001-04-19
Also published as: TW486413B

Abstract

An articulated manipulator for driving first and second arms by the same motor with the attitude of the second arm not restricted, comprising a fixing base (1), a first reduction gear (9) fixed to the fixing base, a motor (10), a first arm (2) coupled to the output part of the first reduction gear (9), a first auxiliary link (7) turnably supported on the tip end of the first arm (2), a second reduction gear (17) fixed to the link (7), a power transmission means (16) for coupling the output shaft (11) of the motor (10) with the input part of the second reduction gear (17), a second arm (3) coupled with the output part of the second reduction gear (17), and a second auxiliary link (8) turnably supported at one end thereof on the tip end of the first auxiliary link (7) and turnably supported at the other end on the fixing base (1), the first arm (2), the first auxiliary link (7), the second auxiliary link (8) and the fixing base (1) constituting a parallelogram link mechanism.

Description

Specification

Technical field of horizontal articulated manipulator

The present invention relates to a multi-joint type manipulator, and more particularly to a horizontal multi-joint type manipulator that linearly moves between two points to convey articles. Background art

A variety of horizontal articulated manipulators have been proposed that move objects linearly between two points and convey articles in order to move materials and products into and out of manufacturing machines such as semiconductor manufacturing equipment, press machines, and resin molding machines. . FIG. 4 is a plan view showing an example of a conventional horizontal articulated type manifold. In the figure, 1 is a fixed base, 2 is a first arm, and the first arm 2 is driven to rotate in a horizontal plane by a first motor (not shown) built in the fixed base 1. Reference numeral 3 denotes a second arm, which is rotatably supported at the tip of the first arm 2 in a horizontal plane, and has a tip flange 4 at its tip. The tip flange 4 is a portion for attaching a mechanical hand or the like for gripping the article to be transported. One end of a first auxiliary link 5 is rotatably supported at an end of the second arm 3 opposite to the end flange 4, and the other end of the first auxiliary link 5 is rotatable at one end of a second auxiliary link 6. It is supported by. The other end of the second auxiliary link 6 is attached to the fixed base 1 coaxially with the first arm 2, and is driven to turn in a horizontal plane by a second motor (not shown) built in the fixed base 1. That is, the first arm 2, the second arm 3, the first auxiliary link 5, and the second auxiliary link 6 constitute a parallelogram link mechanism, and the second arm 3 is connected via the parallelogram link mechanism, It is driven by the second motor.

However, the conventional horizontal articulated manipulator has the following problems.

Despite being a manipulator that moves linearly between two points, that is, a manipulator with one degree of freedom, two motors are required, complicating control and increasing costs. Was a factor. In addition, the first arm 2 and the second arm 3 are both components of the parallelogram link mechanism, and the posture in which the first arm 2 and the second arm 3 are arranged in a straight line (the operation stroke of the distal flange 4 is maximized). In such a case, there is a problem that such a posture cannot be taken because the parallelogram link mechanism comes to the dead center. Disclosure of the invention

Accordingly, an object of the present invention is to provide an articulated manipulator that drives a first and a second arm with the same motor and has a wide operating range without any restriction on the posture of the second arm. And

In order to solve the above-mentioned problem, a first aspect of the present invention relates to a fixed base, a first reduction gear fixed to the fixed base, and an output shaft coupled to an input portion of the first reduction gear. A first arm coupled to an output portion of the first speed reducer and driven to rotate; a first auxiliary link rotatably supported at a tip of the first arm; A second reduction gear fixed to an auxiliary link; power transmission means for connecting an output shaft of the motor and an input of the second reduction gear; and a turn coupled to an output of the second reduction gear A second arm driven; and a second auxiliary link rotatably supported at one end at the tip of the first auxiliary link and rotatably supported at the other end by the fixed base. A parallelogram link using the first auxiliary link, the second auxiliary link, and the fixed base. It is those that make up the structure.

In a second aspect of the present invention, a third arm pivotally attached to a tip of the second arm, and a third auxiliary member rotatably supported at one end to the third arm and at the other end to the first auxiliary link. A second parallelogram link mechanism including the second arm, the third arm, the third auxiliary arm, and the first auxiliary link. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a plan view of a horizontal articulated manipulator showing a first embodiment of the present invention, P

-3-Fig. 2 is a side sectional view of the horizontal articulated manipulator in Fig. 1, Fig. 3 is a plan view of a horizontal articulated manipulator showing a second embodiment of the present invention, and Fig. 4 is a conventional horizontal articulated manipulator. It is a top view which shows an example of an articulated type manipulator. BEST MODE FOR CARRYING OUT THE INVENTION

FIG. 1 is a plan view of a horizontal articulated manipulator according to a first embodiment of the present invention. The external features of the horizontal articulated manipulator will be described with reference to FIG.

In the figure, reference numeral 1 denotes a fixed base, and the first arm 2 is attached to the fixed base 1 so as to be driven to rotate in a horizontal plane. Reference numeral 7 denotes a first auxiliary link, which is rotatably attached to the tip of the first arm 2 in a horizontal plane. Reference numeral 8 denotes a second auxiliary link, one end of which is rotatably attached to the first auxiliary link 7 and the other end of which is rotatably attached to the fixed base 1. The second arm 3 is attached so as to be driven to rotate with respect to the first auxiliary link 7.

In this way, the first arm 2, the first auxiliary link 7, the second auxiliary link 8, and the fixed base 1 form a parallelogram link mechanism. The first auxiliary link 7 keeps a fixed posture with respect to the fixed base 1 even when turning.

FIG. 2 is a side sectional view for explaining the internal structure of the horizontal articulated type manipure shown in FIG. The internal structure of the horizontal articulated manipulator will be described with reference to FIG.

In the figure, reference numeral 9 denotes a first reduction gear. The first reduction gear 9 is, for example, a known reduction gear such as a cycloid reduction gear or a harmonic reduction gear, and has a hollow hole through the input shaft at the center of rotation. Although not shown to avoid complicating the drawing, the upper part of the drawing is the output part of the first reduction gear 9, the lower part is the fixed part, and the input part is inside the hollow hole. .

The first reduction gear 9 has a fixed portion fixed to the fixed base 1 and attached thereto, and a motor 10 is fixed to the fixed portion. Output shaft 11 of motor 10 is the first deceleration It projects through the hollow hole of the machine 9 and over the first speed reducer 9. An input gear 12 is mounted in the middle of the output shaft 11 and meshes with a gear (not shown) of an input part of the first reduction gear 9 inside the hollow hole to reduce the power of the motor 10 by the first reduction gear. Aircraft 9 is reported. The first arm 2 is connected to the output section of the first reduction gear 9, and is driven to rotate by the motor 10 via the first reduction gear 9.

Reference numeral 13 denotes a driving pulley, which is attached to the output shaft 11 of the motor 10. Reference numeral 14 denotes a driven pulley attached to the driven shaft 15. The driven shaft 15 is mounted so as to be coaxial with the rotation axis of the first auxiliary link 7 with respect to the first arm 2, and freely rotates with respect to the first auxiliary link 7. A timing belt 16 is wound around the driving pulley 13 and the driven pulley 14 to transmit the rotation of the driving pulley 13 to the driven pulley 14. Evening belt 16 passes through the inside of the first arm 2 and cannot be seen from the outside.

Reference numeral 17 denotes a second speed reducer, which has the same features as the first speed reducer 9. The second reduction gear 17 has a fixed part fixed to the first auxiliary link 7 and has a second arm 3 coupled to the output part. An input gear 18 attached to the tip of the driven shaft 15 meshes with a gear (not shown) of the input section of the second reduction gear 17.

Thus, the driving pulley 13, the timing belt 16, the driven pulley 14, the driven shaft 15, and the input gear 18 are connected to the output shaft 11 of the motor 10 and the input section of the second reduction gear 17. To form a power transmission mechanism.

As described above, the first auxiliary link 7 keeps a fixed posture with respect to the fixed base 1 irrespective of the turning of the first arm 2, so that the first reduction gear 9, the second reduction gear 17 and the If the reduction ratio of the power transmission mechanism is properly selected, the rotation of the motor 10 causes the front flange 4 to move on a straight line. For example, when the first arm 2 and the second arm 3 have the same length, if the reduction ratio is set so that the rotation speeds of the first arm 2 and the second arm 3 are equal, the front flange 4 will be linear. To move.

FIG. 3 is a plan view of a horizontal articulated manipulator showing a second embodiment of the present invention. The features of this horizontal articulated manipulator will be described with reference to FIG. The structure from the fixed base 1 to the second auxiliary link 8 and the internal drive mechanism are described above. Since it is completely the same as the first embodiment, the description is omitted.

Reference numeral 21 denotes a third arm, which is attached to the distal end flange 4 of the second arm 3 so as to be pivotable in a horizontal plane. The third arm is a substantially L-shaped arm, and grips the workpiece W to be transferred between the long side and the short side of the L-shape. A suction chuck 22 is provided on the long side of the L-shape as a gripping mechanism for that purpose. The gripping mechanism is not limited to the suction chuck, but may be a mechanical hand or the like that holds the work W with claws. Reference numeral 23 denotes a third auxiliary link, one end of which is rotatably supported on the third arm 21 and the other end of which is freely rotatable in a horizontal plane on the second auxiliary link 7. Thus, the second parallelogram link mechanism is configured by the second arm 3, the third arm 21, the third auxiliary link 23, and the first auxiliary link 7. That is, the third arm 21 includes a parallelogram link mechanism including the first arm 2, the first auxiliary link 7, the second auxiliary link 8, and the fixed base 1, the second arm 3, the third arm 21 and the third arm 21. 3 Since it is connected to the second parallelogram link consisting of the auxiliary link 23 and the first auxiliary link 7, it is fixed to the fixed base 1 regardless of the movement of the first arm 2 and the second arm 3. Keep your posture. Therefore, the horizontal articulated manipulator according to the second embodiment can be moved on a straight line while keeping the posture of the work W constant.

The articulated manipulator of the present invention is not limited to a horizontal articulated manipulator, but can be applied to a vertical articulated manipulator.

In addition, the articulated manipulator of the present invention is not limited to handling applications, and it is needless to say that it can be applied to various applications such as painting, polishing, and inspection by replacing the suction chuck with another tool.

As described above, according to the present invention, the first and second arms can be driven by a single motor and the tip of the manipulator can be moved on a straight line. An articulated manipulator for transporting articles can be provided at low cost.

Also, since the second arm is independent of the parallelogram link mechanism, the second arm The rotation angle of the system can be selected independently of the dead point of the parallelogram linkage. Therefore, an articulated manipure with a wide operation range can be obtained. Industrial applicability

The present invention is used as a manufacturing technology for a horizontal articulated manipulator that moves a product linearly between two points and conveys an object in order to put materials and products into and out of a semiconductor manufacturing device, a press machine, or a resin molding machine. can do.

Claims

The scope of the claims

1. A fixed base, a first reduction gear fixed to the fixed base, a motor having an output shaft coupled to an input section of the first reduction gear, and a motor connected to an output section of the first reduction gear. A first arm that is swiveled together, a first auxiliary link rotatably supported at the tip of the first arm, a second reducer fixed to the first auxiliary link, and the motor Power transmission means for connecting the output shaft of the second reduction gear to the input part of the second reduction gear; a second arm coupled to the output part of the second reduction gear and driven to rotate; and a tip of the first auxiliary link A second auxiliary link having one end rotatably supported and the other end rotatably supported by the fixed base, the first arm, the first auxiliary link, the second auxiliary link, and the fixed Multi-joint type characterized in that a parallelogram link mechanism is constituted by the base Manipure overnight.

2. A third arm pivotally attached to a tip of the second arm, and a third auxiliary link rotatably supported at one end to the third arm and the other end to the first auxiliary link, respectively. 2. The multijoint according to claim 1, wherein the second arm, the third arm, the third auxiliary link, and the first auxiliary link form a second parallelogram link mechanism. Type manipulator.