JP2005218202A - Actuator and bonding apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To make it possible to move at high speed to an arbitrary position in an actuator and a bonding apparatus. <P>SOLUTION: In a rotor 16 in which a bonding head, etc., is mounted, straight driven shafts 40, 42 disposed at both the side faces of the rotor 16 are connected between them using metal belts 22, 24, 26, 28. The driven shafts 40, 42 are respectively driven straightly by linear motors, and a combination movement of the driven shafts 40, 42 is transmitted to the rotor 16 through the metal belts 22, 24, 26, 28. The rotor 16 can also move straightly by Y in alignment with a Y-axis by the magnitude in the direction going straight by y<SB>1</SB>, y<SB>2</SB>along the Y-axes of one set of the driven shafts 42, 40, can also rotate by θ around a Z-axis, and, moreover, can also move in combination of the straight Y and the rotation θ. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an actuator and a bonding apparatus, and more particularly to an actuator that moves an object to an arbitrary position and a bonding apparatus that includes a moving mechanism that moves a bonding portion that performs a bonding operation to an arbitrary position.

  A bonding apparatus such as a wire bonder or a die bonder performs a bonding operation by moving a bonding tool attached to the tip of a bonding head to an arbitrary position in a plane. Many of these bonding apparatuses drive an X table that can move only in the X direction and a so-called XY table in which a Y table that can move only in the Y direction is stacked, as shown in Patent Document 1. A drive source is provided. Here, the bonding head unit is mounted on the XY table, and the XY table is driven by a drive source, whereby the bonding tool can be moved to an arbitrary position on the XY plane.

  Patent Document 2 discloses a technique for positioning a capillary mounted on a rotary beam by moving a slide straight with a linear motor and rotating a rotary beam (rotating beam) on the slide with a second linear motor. Has been.

JP 2002-329772 A US Pat. No. 6,460,751B1

  The demand for high-speed bonding devices is increasing, and for this purpose, it is desirable to position the bonding head at an arbitrary position at high speed.

  In the prior art, a drive source for each degree of freedom is used for movement with two degrees of freedom in a plane. For example, in the case of the XY table method, a drive source for the X table and a drive source for the Y table are provided. Even in the case of the slide + rotation method of Patent Document 2, the slide drive linear motor and the first drive for rotation drive are provided. 2 linear motors are provided. Therefore, for example, when performing a straight movement in the X direction, the Y table drive source or the rotation drive source does not contribute to the thrust in the X direction at all. In addition, when the Y table drive source is mounted on the X table or the rotary drive source is mounted on the slide, it acts in the direction of decreasing the acceleration in the X direction.

  Thus, in the prior art, each drive source is not always efficiently used for the entire movement of moving to an arbitrary position at high speed in order to provide the drive source for each degree of freedom. The presence of the source may work to reduce the acceleration in the other drive.

  An object of the present invention is to solve the problems of the prior art and provide an actuator and a bonding apparatus that can move to an arbitrary position at a higher speed.

  In order to achieve the above object, an actuator according to the present invention includes a rotating body that can linearly move and rotate along a predetermined rectilinear axis, and a pair of left and right motors that are arranged on both sides of the rotating body and are movable along the rectilinear axis. A linear drive member, a drive unit that drives each of the set of left and right linear drive members, and a transmission unit that connects the left and right linear drive members and the rotating body, and transmits the combined motion of the left and right linear drive members to the rotary body. And

  In addition, the bonding apparatus according to the present invention includes a bonding head that performs bonding to a bonding target, and includes a rotating body that can linearly move and rotate along a predetermined rectilinear axis, and a rotating body that is disposed on both sides of the rotating body along the rectilinear axis. A pair of left and right rectilinear members that can move, a drive unit that drives each pair of left and right rectilinear members, a left and right rectilinear member and a rotating body are connected, and the combined motion of the left and right rectilinear members is transmitted to the rotating body. And a section.

  In addition, the transmission unit includes a left front connecting member that connects the front part along the straight axis of the left moving member and the left side surface of the rotating body, and a rear part along the straight axis of the left moving member and the left side surface of the rotating body. A left rear connecting member for connecting the right moving member, a right front connecting member for connecting the front portion along the straight axis of the right moving member and the right side surface of the rotating body, and a rear portion along the straight shaft of the right moving member for rotation. It is preferable to include a right rear connection member that connects the right side surface of the body.

  The transmission unit is a set of front-rear U-shaped winding members that are U-shaped along the side surface of the rotating body, and whose central portion is fixed to the rotating body, and each end portion is a straight traveling of the left rectilinear member. A front U-shaped winding member fixed to a front part along the axis and a front part along the straight axis of the right rectilinear member, and a rear part and a right rectilinear member whose ends are along the straight axis of the left rectilinear member It is preferable that the rear U-shaped winding member fixed to the rear part along the straight axis of each is included.

  Further, the transmission portion is a set of left and right alpha winding members that are alpha-wound along the side surface of the rotating body and whose central portion is fixed to the rotating body, and each end portion is along the rectilinear axis of the left rectilinear member. A left alpha winding member fixed to the front part and the rear part, respectively, and a right alpha winding member each end part fixed to the front part and the rear part along the rectilinear axis of the right rectilinear member. Is preferred.

  Moreover, it is preferable that a transmission part is comprised with a some belt. Moreover, it is preferable that a transmission part is comprised with a some wire.

  In the rotating body, it is preferable that the distance between both side portions that receive the combined motion of the right and left rectilinear members does not change due to the rotation of the rotating body. Moreover, it is preferable that the part where the distance between the both side parts of a rotary body does not change with rotation is a part of a circle. Moreover, it is preferable that the part where the distance between the both side parts of a rotary body does not change with rotation is a part of two fan shape which faces a common figure rotation axis.

  Moreover, it is preferable that a rotary body is guided by the right-and-left rectilinear member. Moreover, it is preferable that at least one of the left-right rectilinear member and the rotating body is supported by a fluid pressure support mechanism. The drive unit is preferably a set of left and right linear motors.

  According to at least one of the above-described configurations, a pair of left and right rectilinear members movable along the rectilinear axis are disposed on both sides of the rotating body, the left and right rectilinear members and the rotating body are connected by a transmission unit, and one set is configured by a drive unit Each of the left and right rectilinear members is driven straight. In such a configuration, the transmission unit transmits the combined motion of the left and right rectilinear members to the rotating body. For example, when the left rectilinear member and the right rectilinear member move rectilinearly by the same amount of movement in opposite directions, the rectilinear motion is canceled in the rotating body, and only the rotational motion is performed. Further, when the left rectilinear member and the right rectilinear member linearly move in the same direction by the same amount of movement, the rotational motion is canceled in the rotating body, and only the linear motion is performed. When the amount of rectilinear movement of the left rectilinear member differs from the amount of rectilinear movement of the right rectilinear member, a combined motion of rectilinear movement and rotation is performed in the rotating body.

  In this way, the rotating body can be moved to an arbitrary position by controlling the drive of the right and left rectilinear members. Therefore, the two drive sources for driving the right and left rectilinear members respectively supply thrust or torque for the motion of the rotating body together. In other words, when one side of the two drive sources is working, the other side is idle or does not become a load on the other side, and can be a more efficient drive source for the entire movement, The rotating body or the bonding head mounted thereon can be moved to an arbitrary position at a higher speed.

  Further, according to at least one of the above configurations, the transmission unit uses a winding member along the side surface of the rotating body. As the winding member, use two that are wound around the rotating body and use alpha winding, two that use U-shaped winding, use four parts, the side of the rotating body and the front and rear of the left and right rectilinear members Can be used. A belt or a wire can be used as the winding member. For example, by fixing the winding member in a tensioned state, the combined motion of the left and right rectilinear members can be reliably transmitted to the rotating body with a simple structure.

  Further, due to at least one of the above configurations, the distance between both side portions of the rotating body does not change. Specifically, a shape including two sectors facing each other with a common figure rotation axis can be used. If each sector has the same radius, it is equal to a portion of a circle. In addition, it is possible to use a part of a so-called uniform width graphic having the same width when viewed from any direction.

  Further, the rotating body is guided by the left-right rectilinear member by at least one of the above-described configurations. Therefore, a special guide mechanism is not required and the configuration is simple. Moreover, at least one of the left-right rectilinear member and the rotating body is supported by the fluid pressure support mechanism by at least one of the above-described configurations. Thereby, the load of movement of the right-and-left rectilinear member and the rotating body can be reduced, and higher-speed movement can be performed. In addition, the left / right rectilinear member is driven by one set of linear motors by at least one of the above-described configurations. Each linear motor can use the same thing, and can reduce the kind of component.

  As described above, according to the actuator and the bonding apparatus according to the present invention, it is possible to move to an arbitrary position at a higher speed.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Hereinafter, the bonding apparatus will be described as a wire bonder, but may be a bonding apparatus such as a die bonder or a face down bonder.

  FIG. 1 is a partial view of the wire bonder 8 and particularly shows a portion of a moving mechanism that moves the bonding head portion 10 to an arbitrary position. The moving mechanism of the wire bonder 8 drives the bonding head unit 10 through the bonding head unit 10, the stage 12 and the side guide unit 14 for guiding the movement of the bonding head unit 10, and a plurality of metal belts 22 and the like. A set of drive shafts 40, 42 and a set of linear motors 50, 52 that drive the drive shafts 40, 42 in a straight line are configured. Here, the elements other than the periphery of the bonding head unit 10 will be described first, and then the elements around the bonding head unit 10 will be described in detail.

  The pair of drive shafts 40 and 42 is a pair of identically-shaped plates arranged so as to sandwich the rotating body 16 of the bonding head unit 10 to be described later in parallel from both sides, so to speak, left and right sandwiching the rotating body 16 from the left and right. It is a rectilinear member. As will be described later, a metal belt 22 or the like as a transmission portion between the drive shafts 40 and 42 is attached to the surface facing the rotary body 16 on the front end side of the drive shafts 40 and 42. The rear end sides of the drive shafts 40 and 42 are connected to linear motors 50 and 52 as drive sources, respectively.

  The back surface of the pair of drive shafts 40, 42 facing the rotating body 16 is guided to the rising wall surface of the stage 12 and the side surface of the side guide portion 14, respectively. The rising wall surface of the stage 12 and the side surface of the side guide portion 14 facing the stage 12 are arranged in parallel with each other. In particular, the rising wall surface of the stage 12 is arranged in parallel with the linear axes of the linear motors 50 and 52. The side guide portion 14 is pressed in the + X-axis direction of FIG. 1 with an appropriate pressure by a biasing means (not shown), thereby causing the drive shaft 42, the rotating body 16, and the drive shaft 40 to follow the rising wall surface of the stage 12. And move. An appropriate spring or the like can be used as the biasing means.

  Further, a fluid pressure support mechanism such as an air bearing is provided between the rising surface of the stage 12 and the surface of the drive shaft 40 facing this, and between the side surface of the side guide portion 14 and the surface of the drive shaft 42 facing this. It is good also as what provides. As the fluid pressure support mechanism, for example, air blowing and vacuum suction can be performed between the rising surface of the stage 12 or the side surface of the side guide portion 14 and the side surfaces of the drive shafts 40 and 42.

  One set of linear motors 50 and 52 is a drive source of the same performance that drives the drive shafts 40 and 42 straightly, respectively, and constitutes a drive unit of the bonding head unit 10 as a whole. As the linear motors 50 and 52, a general linear motor using a coil and a permanent magnet can be used.

  Next, the periphery of the bonding head unit 10 will be described. The bonding head unit 10 includes a rotating body 16 provided with a wide groove on the upper side of a cylindrical member, a bonding tool 18 for positioning work mounted in the wide groove, a positioning camera 20, and the like. . It is preferable that the center of gravity of the entire bonding head unit 10 on which the bonding tool 18 and the like are mounted coincide with the cylindrical rotation center axis of the rotating body 16 as much as possible.

  The bottom surface of the rotating body 16 is processed to be flat, and a fluid pressure support mechanism such as an air bearing is provided between the flat surface of the stage 12. As the fluid pressure support mechanism, for example, air blowing and vacuum suction can be performed between the upper surface of the stage 12 and the bottom surface of the rotating body 16. Thereby, the bonding head unit 10 moves straight and rotates along the Y axis shown in FIG. 1 and moves to an arbitrary position in the XY plane as described later while being supported by the fluid pressure on the plane of the stage 12. Can do.

  The rotating body 16 has a part of a side surface cut out by a wide groove at the top, a partially cylindrical shape with a notch at the top, and a full cylindrical shape at the bottom, and the side surface and the drive shafts 40 and 42. Are connected by three metal belts. The state of the three metal belts 22a, 22b, and 24 connecting the drive shaft 40 and the rotating body 16 is shown in FIG. The two metal belts 22a and 22b among the three metal belts are fixed at one end to the front portion of the surface of the drive shaft 40 facing the rotating body 16, that is, the front end side in the -Y direction shown in FIG. Each other end is fixed to a side surface of the rotating body 16. One end of the other metal belt 24 is fixed to the rear portion of the surface of the drive shaft 40 facing the rotating body 16, that is, the rear portion in the + Y direction from the front portion, and the other end is fixed to the side surface of the rotating body 16. In addition, the connection by the metal belt between the rotary body 16 and another drive shaft 42 is performed similarly.

  These metal belts 22a, 22b, 24 include a side surface of the rotating body 16 and a drive shaft so that the two metal belts 22a, 22b and another metal belt 24 intersect each other when viewed from the Z-axis direction in FIG. It is connected between the faces facing the 40 rotating bodies 16. The point of intersection is where the rotating body 16 and the drive shaft 40 are in contact with each other. That is, each metal belt 22a, 22b, 24 is wound along the side surface of the rotating body 16 from the position fixed to the rotating body 16, and extends straight in the tangential direction of the side surface of the rotating body 16 at the intersecting position. 40 is fixed.

  The fixing between the metal belts 22a, 22b, 24 and the rotating body 16 and the drive shaft 40 can be performed, for example, by spot welding or pinning. This fixing is preferably performed so that the metal belts 22a, 22b, and 24 are attached with tension without loosening. As the material of the metal belts 22a, 22b, and 24, a metal that can withstand repeated bending accompanying repeated forward and reverse rotation of the rotating body 16 is selected. For example, a thin plate of a material having a good bending and bending characteristic called Swedish steel can be used.

  The two metal belts 22a and 22b may be a single metal belt. Further, instead of connecting the rotating body 16 and the drive shafts 40 and 42 with a total of six or four short metal belts, a set of metal belts, that is, two metal belts are used. It can also be done. FIG. 3 is a plan view showing three methods side by side with respect to a connection method between the rotating body 16 and the drive shafts 40 and 42. FIG. 3A uses the six or four metal belts 22, 24, 26, 28 described in FIGS. 1 and 2. Here, the metal belts 22 and 26 are indicated by solid lines, and the state of fixing pins for fixing the rotating body 16 and the drive shafts 40 and 42 (not shown) is also shown. Further, since the metal belts 24 and 28 are the same as the metal belts 22 and 26, only the outline is shown by broken lines.

  FIG. 3B uses so-called alpha winding belts 30 and 32. Here, the alpha winding is a winding method in which a single turn is wound along the side surface of the rotating body 16 and intersected at the end of the one turn, and each end is extended in a direction tangential to the side surface of the rotating body 16 in opposite directions. When you look at this in the figure, it looks like the shape of α. In FIG. 3B, one alpha winding belt 30 is shown by a solid line, and the state of a fixing pin for fixing to the rotating body 16 and drive shafts 40 and 42 not shown is also shown. Since the other alpha winding belt 32 is the same, only the outline is shown by a broken line.

  FIG. 3C uses metal belts 34 and 36 which can be said to be U-shaped windings. This winding method is a winding method in which a half-turn is wound along the side surface of the rotating body 16 and each end is extended in a direction opposite to each other in a tangential direction of the side surface of the rotating body 16, and this is seen in a plan view. It looks like a U shape. In FIG. 3 (c), one U-shaped metal belt 30 is shown by a solid line, and the state of a fixing pin for fixing to the rotating body 16 and drive shafts 40 and 42 (not shown) is also shown. Further, since the other U-shaped metal belt 32 is the same, only the outline is shown by a broken line. Of course, a combination of an alpha winding and a short metal belt, and a combination of a U-shaped winding and a short metal belt are also possible.

FIG. 4 shows the drive shaft 40 when the rotating body 16 is connected to the drive shafts 40 and 42 which are a set of linear members by using metal belts 22, 24, 26 and 28 having appropriate tension. It is a figure explaining a mode that 42 combination exercise | movement is transmitted to the rotary body 16. FIG. Depending on the direction and magnitude of the linear movements y ₁ and y ₂ along the Y axis of the pair of drive shafts 42 and 40, the rotator 16 performs the linear movement Y along the Y axis and the rotation θ around the Z axis. Perform a combined move. FIG. 4 shows five examples of linear movements y ₁ and y ₂ of the drive shafts 42 and 40.

The first example is when y ₁ = y ₂ = + a, that is, when the drive shaft 40 and the drive shaft 42 move straight in the same direction by the same displacement amount. At this time, the rotating body 16 is not rotated, and is linearly moved by + a along the Y axis. The second example is a case where y ₁ = y ₂ = −a, that is, a case where the drive shaft 40 and the drive shaft 42 move straight in the opposite direction to the first example by the same displacement amount. Also at this time, the rotating body 16 is not rotated, and is moved straight along the Y axis by −a. Thus, by moving the drive shaft 40 and the drive shaft 42 straight in the same direction by the same displacement amount, the same displacement amount is moved in the same direction as the movement of the drive shafts 40 and 42 without rotating the rotating body 16. You can move forward and backward.

The third example is a case where y ₁ = + b and y ₂ = −b, that is, the drive shaft 40 and the drive shaft 42 move straight in the opposite directions by the same displacement amount as absolute values. At this time, the rotating body 16 does not travel straight, but rotates around the Z axis by (+ b / r) radians. r is the radius of the rotating body 16. The fourth example is a case where y ₁ = −b and y ₂ = + b, that is, a case where the moving directions of the drive shaft 40 and the drive shaft 42 are changed with respect to the third example. Also at this time, the rotating body 16 does not travel straight, but rotates around the Z axis by (−b / r) radians. In this way, the drive shaft 40 and the drive shaft 42 are moved straight in the opposite directions by the same displacement amount, so that the rotating body 16 does not move straight and is rotated forward by an angle corresponding to the movement amount of the drive shafts 40 and 42. Can be reversed.

The fifth example is a case where y ₁ = + a and y ₂ = + b, that is, the drive shaft 40 and the drive shaft 42 move straightly with different displacement amounts in the same direction. The motion of the rotator 16 in this case performs straight travel according to the average of the amounts of movement of both and rotation according to the difference between the amounts of movement of the two divided by two. Even when the drive shaft 40 and the drive shaft 42 move straight in opposite directions with different displacements in absolute values, the rotator 16 performs a motion that combines straight travel and rotation.

  As described above, the pair of drive shafts 40 and 42 are driven straightly and the combined motion is transmitted to the rotating body 16 by the metal belts 22, 24, 26 and 28, so that the rotating body 16 is moved along the Y axis. Further, it is possible to perform a movement combining the straight advance Y and the rotation θ around the Z axis.

The operation of the moving mechanism of the bonding head unit 10 in the wire bonder 8 having such a configuration will be described. In order to perform wire bonding work in the wire bonder 8, a predetermined bonding program is started. Then, according to a program procedure, for example, a substrate on which a chip is die-bonded is supplied and held at a predetermined position. Next, the position of the bonding pad of the chip to be bonded is detected using means such as the positioning camera 20, and the tip of the bonding tool 18 is positioned at that position. At the time of this positioning, a moving mechanism of the bonding head unit 10 is used. Specifically, based on the data detected by the positioning camera 20 and the like, a moving amount (ΔX, ΔY) as to which position the bonding tool 18 should be moved from the initial position is obtained, and the rotating body corresponding to the moving amount A straight traveling amount Y and a rotational amount θ of 16 are obtained. Based on the relationship described with reference to FIG. 4, the linear movement amount y _{1 of} the drive shaft 40 and the linear movement amount y ₂ of the drive shaft 42 that are necessary for the movement of the linear amount Y and the rotational amount θ are calculated. An appropriate conversion program can be used for these calculations.

FIG. 5 shows a state of the locus 60 of the tip of the bonding tool 18 when the drive shaft 40 and the drive shaft 42 are each moved in an appropriate straight line. In FIG. 5, when the drive shaft 40 and the drive shaft 42 move straight as indicated by thin arrows, the combined motion is transmitted to the rotating body 16 by the metal belts 22, 24, 26, and 28, and the relationship described in FIG. Accordingly, the rotating body 16 performs linear movement and rotational movement indicated by an outline arrow. As a result, the tip of the bonding tool 18 moves in the XY plane along a locus 60 that combines a straight line and an arc. This trajectory is based on the positional relationship between the radius r of the rotator 16 and the tip of the bonding tool 18 with respect to the rotation center of the rotator 16, and the like, and the movement amount y ₁ of the drive shaft 40 and the movement amount y _{2 of the} drive shaft 42. Can be related to.

In this way, if the movement amount (ΔX, ΔY) of the bonding tool 18 is related to the straight movement amount (y ₁ , y ₂ ) of the drive shafts 42, 40, and this is an appropriate program, (ΔX , ΔY) to give the required (y ₁ , y ₂ ). Based on the obtained linearly moving amounts (y ₁ , y ₂ ) of the drive shafts 42, 40, drive conditions such as drive currents of the linear motors 50, 52 are determined.

If the linear motors 50 and 52 are driven in accordance with the drive conditions thus obtained, the drive shaft 42 moves y ₁ and the drive shaft 40 moves y ₂ . Then, the rotating body 16 performs predetermined linear Y and rotation θ by the metal belts 22, 24, 26, and 28. At this time, if the center of gravity of the entire bonding head unit 10 is configured to substantially coincide with the center of rotation of the rotator 16, the driving force transmitted from the drive shafts 40 and 42 is efficiently transmitted to the center of gravity of the entire bonding head unit 10. be able to. In this way, the driving force of the two linear motors 50 and 52 is received together, and the tip of the bonding tool 18 moves by (ΔX, ΔY) efficiently and at high speed, and moves to a desired position.

  In the above description, the rotating body 16 has been described as having a cylindrical shape, that is, a circular cross-sectional shape. In the rotator 16, the distance between the both side portions that receive the transmission of the combined motion of the drive shafts 40 and 42 may not be changed by the rotation of the rotator 16. For example, the portion is a circular part, The portion may be any shape. In addition, examples of the distance between both side portions that do not change due to the rotation include a shape including two sectors facing each other with a common figure rotation axis. If each sector has the same radius, it is equal to a portion of a circle. In addition, it is possible to use a part of a so-called uniform width graphic having the same width when viewed from any direction. FIG. 6 shows an example of such a figure. FIG. 6A is a circle. FIG. 6 (c) shows two sectors facing each other with a common figure rotation axis, and FIG. 6 (b) shows a substantially rice ball-shaped figure in which the sector-shaped figure rotation axis is arranged on another sector.

  In the above description, the metal belt is described as transmitting the combined motion of the drive shafts 40 and 42 to the rotating body 16, but a metal wire may be used.

  Further, in the above description, general linear motors 50 and 52 are described as drive sources, and these are shown in FIG. 1 as being attached to a frame (not shown) of the wire bonder 8. Can also be used. The non-reactive drive source means that the drive shafts 40 and 42 not only move with respect to the frame of the wire bonder 8, but also the main body portions of the linear motors 50 and 52 can move with respect to the frame to release the reaction force. To do. Thereby, it is possible to prevent unnecessary vibration from being generated in the gantry and to move the bonding head unit 10 with higher accuracy and at higher speed.

  In the embodiment of FIG. 1, the drive shafts 40 and 42 are extended from the linear motors 50 and 52, but linear motors can be directly arranged on both sides of the bonding head unit 10. FIG. 7 is a diagram showing a moving mechanism portion of the bonding head portion 10 of the wire bonder 108 having such a configuration. Since the configuration of the bonding head unit 10 is the same as that of FIG. 1, detailed description thereof is omitted. Magnet portions 140 and 142 are disposed on the left and right sides of the bonding head portion 10, and coil portions 150 and 152 are disposed on both outer sides thereof. In the figure, the magnetic parts 140 and 142 do not appear hidden, but the magnet parts 140 and 142 and the rotating body 16 are connected by a plurality of metal belts or metal wires described with reference to FIGS. . With this structure, the magnet portions 140 and 142 and the coil portions 150 and 152 can be brought close to each other, and driving efficiency can be improved. Further, the positional accuracy in the left-right direction in the bonding head unit 10 can be improved. In order to efficiently dissipate heat generated from the coil, a magnetic force may be guided using a core, and the coil may be disposed at a position where heat dissipation is easy.

  In the above description, the actuator portion that drives the rotating body so as to be linearly movable and rotatable along a predetermined straight axis is used in the bonding apparatus. However, the actuator portion is used in a moving device and a positioning device other than the bonding device. Also good.

It is a fragmentary view of the wire bonder in embodiment concerning this invention, and is a figure which shows the part of the moving mechanism which moves a bonding head part especially. In embodiment which concerns on this invention, it is a figure which shows the mode of the metal belt which connects between a drive shaft and a rotary body. In embodiment which concerns on this invention, it is a top view which shows the example of the connection method between a rotary body and a drive shaft. In embodiment which concerns on this invention, it is a figure explaining a mode that the combined motion of one set of rectilinear drive shaft is transmitted to a rotary body via a metal belt. In embodiment which concerns on this invention, it is a figure which shows the mode of the locus | trajectory of the front-end | tip of a bonding tool. It is a figure which shows the example of a uniform width figure. It is a partial view of the wire bonder in other embodiment, and is a figure showing the part of the moving mechanism which moves a bonding head part especially.

Explanation of symbols

  8,108 Wire bonder, 10 Bonding head, 12 Stage, 14 Side guide, 16 Rotating body, 18 Bonding tool, 20 Camera, 22, 22a, 22b, 24, 26, 28, 30, 32, 34, 36 Metal Belt, 40, 42 (straight) drive shaft, 50, 52 linear motor, 60 bonding tool tip locus, 140, 142 magnet part, 150, 152 coil part.

Claims (13)

A rotating body that can move straight and rotate along a predetermined straight axis;
A set of left and right rectilinear members arranged on both sides of the rotating body and movable respectively along a rectilinear axis;
A drive unit for driving each of the pair of right and left rectilinear members;
A transmission unit that connects the left and right rectilinear member and the rotating body, and transmits the combined motion of the left and right rectilinear member to the rotating body;
An actuator comprising: A rotating body that includes a bonding head for bonding to a bonding target, and that can move linearly and rotate along a predetermined linear axis;
A set of left and right rectilinear members arranged on both sides of the rotating body and movable respectively along a rectilinear axis;
A drive unit for driving each of the pair of right and left rectilinear members;
A transmission unit that connects the left and right rectilinear member and the rotating body, and transmits the combined motion of the left and right rectilinear member to the rotating body;
A bonding apparatus comprising: The bonding apparatus according to claim 2,
The transmission part
A left front connecting member that connects the front portion along the straight axis of the left moving member and the left side surface of the rotating body;
A left rear connecting member that connects the rear part along the straight axis of the left moving member and the left side surface of the rotating body;
A right front connecting member that connects the front portion along the straight axis of the right moving member and the right side surface of the rotating body;
A right rear connecting member that connects the rear part along the straight axis of the right moving member and the right side surface of the rotating body;
A bonding apparatus comprising: The bonding apparatus according to claim 2,
The transmission unit is a set of front and rear U-shaped winding members that are U-shaped along the side surface of the rotating body and whose central portion is fixed to the rotating body, and each end portion is a straight axis of the left rectilinear member. Forward U-shaped winding member fixed to the front part along the straight axis of the right rectilinear member and the front U-shaped winding member respectively fixed to the front part of the right rectilinear member A bonding apparatus comprising a rear U-shaped winding member fixed to a rear portion along the axis. The bonding apparatus according to claim 2,
The transmission portion is a set of left and right alpha winding members that are alpha-wrapped along the side surface of the rotating body and whose central portion is fixed to the rotating body, and each end portion is a front side along the rectilinear axis of the left rectilinear member A left alpha winding member fixed to each of the front and rear portions, and a right alpha winding member fixed to each of the front and rear portions along the straight axis of the right rectilinear member. Bonding equipment. The bonding apparatus according to any one of claims 3 to 5,
The transmission device is constituted by a plurality of belts. The bonding apparatus according to any one of claims 3 to 5,
The transmission device is constituted by a plurality of wires. The bonding apparatus according to claim 2,
The bonding apparatus according to claim 1, wherein the distance between the two side portions that receive the combined movement of the right and left rectilinear members is not changed by the rotation of the rotating body. The bonding apparatus according to claim 8, wherein
The bonding apparatus characterized in that a portion where the distance between both side portions of the rotating body does not change due to rotation is a circular part. The bonding apparatus according to claim 8, wherein
The bonding apparatus characterized in that a portion where the distance between both side portions of the rotating body does not change by rotation is a part of two fan shapes facing each other with a common figure rotation axis. The bonding apparatus according to any one of claims 3 to 5,
A rotating device is guided by a left and right rectilinear member. The bonding apparatus according to claim 1,
At least one of the left-right rectilinear member and the rotating body is supported by a fluid pressure support mechanism. The bonding apparatus according to claim 2,
The driving unit is a pair of left and right linear motors.

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