JP7002148B2 - Actuators and wire bonding equipment - Google Patents

Description

The present disclosure relates to actuators and wire bonding devices.

Patent Document 1 discloses a wire bonding apparatus. The wire bonding apparatus has a capillary which is a bonding tool. The wire bonding apparatus connects the wire to the electrode by applying heat, ultrasonic vibration, or the like to the wire using the capillary.

Japanese Unexamined Patent Publication No. 2018-6731

A manufacturing device such as a wire bonding device disclosed in Patent Document 1 requires a plurality of moving mechanisms. For example, the operation of the manufacturing apparatus includes the movement of the part to be processed and the movement of the tool with respect to the part to be processed. Therefore, the manufacturing apparatus requires an actuator for realizing the movement mode required for each of the parts to be processed and the tool.

In the field of manufacturing equipment, higher functionality is being considered. With higher functionality, the required movement modes will increase. In addition, the required movement modes are complicated. As a result, it becomes necessary to prepare actuators for each movement mode, so that the number of actuators increases as the movement mode increases.

Therefore, in view of the above circumstances, the present disclosure describes an actuator and a wire bonding apparatus capable of a plurality of operations.

The actuator according to one embodiment of the present disclosure is a first force generating unit that generates a force toward a positive direction along a first direction and a force toward a negative direction opposite to the positive direction along the first direction. A second force generating section, which is arranged apart from the first force generating section in the second direction orthogonal to the first direction and generates a force toward the positive direction and a force toward the negative direction, and a second force generating section. A control unit that controls the direction and magnitude of the force generated by the 1st force generation unit and the 2nd force generation unit, and a moving body spanned to the 1st force generation unit and the 2nd force generation unit are provided and controlled. By matching the direction of the force generated by the first force generating portion with the direction of the force generated by the second force generating portion, the unit translates the moving body along the first direction and causes the first force. By making the direction of the force generated by the generating portion opposite to the direction of the force generated by the second force generating portion, the moving body is rotated around the center of gravity.

The actuator includes a first force generating section and a second force generating section. The force generated by each force generating unit is controlled by the control unit. According to this configuration, by matching the direction of the force of the first force generating portion with the direction of the force of the second force generating portion, the moving body can be moved along the first direction. Further, by reversing the direction of the force of the second force generating portion with respect to the direction of the force of the first force generating portion, the torque around the center of gravity can be provided to the moving body. As a result, the moving body can be rotated around the center of gravity. As a result, the actuator can provide the moving body with a plurality of movements of translation along the first direction and rotation around the center of gravity.

In the actuator, the first force generating portion and the second force generating portion may be arranged along the second direction with the center of gravity of the moving body interposed therebetween. According to this configuration, the moving body can be rotated efficiently.

In the above actuator, the first force generating section and the second force generating section are connected to the control section to form an ultrasonic wave generating section controlled by the control section and a contact section extending in the first direction and in contact with the moving body. In addition to having, it may have a drive shaft fixed to the ultrasonic wave generating portion and receiving ultrasonic vibration generated by the ultrasonic wave generating portion. The force generated by the first force generating portion and the second force generating portion may be a frictional force at the contact portion. The frictional force may be controlled by the frequency of the ultrasonic waves. According to this configuration, the configuration of the first force generating unit and the configuration of the second force generating unit can be simplified.

In the actuator, the table may have a main surface and a back surface. One of the main surface and the back surface may include a contact portion. According to this configuration, the first force generating section and the second force generating section can reliably provide the force to the moving body. As a result, the translation and rotation of the moving body can be reliably performed.

The wire bonding apparatus according to another aspect of the present disclosure includes a bonding tool for holding the capillary detachably, and a capillary replacement section for attaching or detaching the capillary to the bonding tool, wherein the capillary replacement section is the actuator described above. Has. This wire bonding device includes a capillary replacement unit equipped with the above actuator. This actuator can perform two movements, translation and rotation. Therefore, it is possible to suppress the increase in size of the capillary replacement portion while imparting the capillary replacement function to the wire bonding apparatus. Therefore, it is possible to achieve both high functionality and miniaturization of the wire bonding apparatus.

According to the present disclosure, actuators and wire bonding devices capable of a plurality of operations are described.

FIG. 1 is a perspective view showing a wire bonding apparatus according to an embodiment. FIG. 2 is an enlarged perspective view showing a capillary exchange portion included in the wire bonding apparatus shown in FIG. 1. FIG. 3 is a perspective view showing a part of the capillary holding portion in a cross-sectional view. FIG. 4 is a diagram illustrating the operation of the capillary holding portion. FIG. 5 is a perspective view showing a part of the capillary guide portion in a cross-sectional view. FIG. 6 is a diagram showing a guide function of the capillary played by the capillary holding portion and the capillary guide portion. FIG. 7 is a diagram showing another guide function of the capillary played by the capillary holding portion and the capillary guide portion. FIG. 8 is a plan view showing a main part of the actuator included in the capillary replacement part shown in FIG. FIG. 9 is a diagram illustrating the operating principle of the actuator. FIG. 10 is a diagram illustrating specific control of the actuator. FIG. 11 is a diagram illustrating specific control of the actuator. FIG. 12 is a diagram showing the main operation of the capillary replacement unit. FIG. 13 is a diagram showing the main operation of the capillary replacement unit following FIG. 12. FIG. 14 is a diagram showing the main operation of the capillary replacement unit following FIG. FIG. 15 is a diagram showing the main operation of the capillary replacement unit following FIG. FIG. 16 is a perspective view showing a cross section of the capillary holding portion according to the modified example.

Hereinafter, the actuator and the wire bonding apparatus of the present disclosure will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same elements are designated by the same reference numerals, and duplicate description is omitted.

The wire bonding apparatus 1 shown in FIG. 1 electrically connects, for example, an electrode provided on a printed circuit board or the like and an electrode of a conductor element attached to the printed circuit board using a metal wire having a small diameter. The wire bonding apparatus 1 provides heat, ultrasonic waves, or pressure to the wire in order to connect the wire to the electrode. The wire bonding apparatus 1 has a base 2, a bonding unit 3, and a transport unit 4. The bonding unit 3 performs the above connection work. The transport unit 4 transports a printed circuit board or the like, which is a component to be processed, to a bonding area.

The bonding portion 3 includes the bonding tool 6, and an ultrasonic horn 7 is provided at the tip of the bonding tool 6. A capillary 8 is detachably provided at the tip of the ultrasonic horn 7. The capillary 8 provides heat, ultrasonic waves or pressure to the wire.

In the following description, the direction in which the ultrasonic horn 7 extends is defined as the X axis. The direction in which the printed circuit board is conveyed by the conveying unit 4 is defined as the Y axis (second direction). The direction in which the capillary 8 moves when performing the bonding operation (Z-axis direction, first direction) is defined as the Z-axis.

The capillary 8 needs regular replacement. Therefore, the wire bonding device 1 has a capillary exchange unit 9. The capillary replacement unit 9 automatically replaces the capillary 8 without intervention by an operator.

The capillary replacement unit 9 collects the capillary 8 attached to the ultrasonic horn 7. Further, the capillary replacement unit 9 attaches the capillary 8 to the ultrasonic horn 7. The replacement work of the capillary 8 includes a work of collecting the capillary 8 and a work of mounting the capillary 8. The replacement work of the capillary 8 is automatically carried out when the preset conditions are satisfied. For example, the condition may be the number of bonding operations. That is, the work of replacing the capillary 8 may be performed every time the bonding work is performed a predetermined number of times.

As shown in FIG. 2, the capillary replacement section 9 has a capillary holding section 11, a capillary guide section 12, and an actuator 13 as main components. Further, as an additional component, the capillary exchange unit 9 has a attachment / detachment jig 15 and a jig drive unit 20 for driving the attachment / detachment jig 15.

<Capillary holding part>
The capillary holding portion 11 holds the capillary 8. The capillary holding portion 11 is attached to the actuator 13 via the holder 14. The shape of the capillary holding portion 11 is a cylinder extending in the direction of the Z axis. The lower end of the capillary holding portion 11 is held by the holder 14. A capillary 8 is detachably inserted into the upper end of the capillary holding portion 11.

As shown in FIG. 3, the capillary holding portion 11 has an upper socket 16, a coil spring 17 (elastic portion), a lower socket 18 (capillary base portion), and an O-ring 19 (restraint portion) as main components. , Have. The upper socket 16, the coil spring 17, and the lower socket 18 are arranged on a common axis. Specifically, the upper socket 16, the coil spring 17, and the lower socket 18 are arranged in this order from the top.

The shape of the upper socket 16 is substantially a cylinder. The upper socket 16 has a through hole 16h extending from the upper end surface 16a to the lower end surface 16b. The upper socket 16 holds the tapered surface 8a of the capillary 8. Therefore, the inner diameter of the through hole 16h corresponds to the outer diameter of the tapered surface 8a of the capillary 8. For example, the inner diameter of the through hole 16h is smaller than the outer diameter of the capillary main body 8b. A counterbore portion 16c for the O-ring 19 is provided on the upper end surface 16a side of the through hole 16h. The countersunk portion 16c has a size capable of accommodating the O-ring 19. The depth of the countersunk portion 16c is about the same as the height of the O-ring 19. The inner diameter of the countersunk portion 16c is about the same as the outer diameter of the O-ring 19.

The shape of the O-ring 19 is a so-called torus. The O-ring 19 comes into direct contact with the tapered surface 8a of the capillary 8. That is, the O-ring 19 of the capillary holding portion 11 holds the capillary 8. This retention is done by an adhesive layer formed on the surface of the O-ring 19. The inner diameter of the O-ring 19 is substantially the same as the inner diameter of the through hole 16h. The tapered surface 8a of the capillary 8 is inserted into the O-ring 19.

The upper socket 16 has a step 16d provided on the outer peripheral surface. Therefore, the outer diameter of the upper socket 16 on the upper end surface 16a side is different from the outer diameter of the upper socket 16 on the lower end surface 16b side. Specifically, the outer diameter on the lower end surface 16b side is slightly smaller than the outer diameter on the upper end surface 16a side. A coil spring 17 is fitted into the small diameter portion 16e on the lower end surface 16b side.

The shape of the lower socket 18 is substantially a cylinder. The upper end surface 18a of the lower socket 18 faces the lower end surface 16b of the upper socket 16. The outer shape of the lower socket 18 is the same as the outer shape of the upper socket 16. A step 18d is provided on the outer peripheral surface of the lower socket 18. Contrary to the upper socket 16, the upper end surface 18a side of the lower socket 18 is a small diameter portion 18e. A coil spring 17 is fitted into the small diameter portion 18e on the upper end surface 18a side. The large diameter portion 18f on the lower end surface 18b side of the lower socket 18 is sandwiched by the holder 14.

The coil spring 17 is a compression spring. The upper end side of the coil spring 17 is fitted into the small diameter portion 16e of the upper socket 16. The lower end side of the coil spring 17 is inserted into the small diameter portion 18e of the lower socket 18. The upper socket 16 and the coil spring 17 form a flexible portion 10. Therefore, the upper socket 16 and the lower socket 18 are connected by a coil spring 17. The coil spring 17 has elasticity along the direction of the axis 17A and elasticity along the direction intersecting the axis 17A. As a result, the upper socket 16 can change its position relative to the lower socket 18.

The capillary holding portion 11 having the above configuration has the holding mode shown in FIG. Part (a) in FIG. 4 shows the capillary holding part 11 in the initial mode. Part (b) of FIG. 4 shows the capillary holding part 11 in the first modification. Part (c) of FIG. 4 shows the capillary holding part 11 in the second modification.

As shown in the portion (a) of FIG. 4, in the capillary holding portion 11 according to the first holding mode, the axis 16A of the upper socket 16 overlaps with the axis 18A of the lower socket 18. Further, the axis 8A of the capillary 8 also overlaps with the axes 16A and 18A.

As shown in the portion (b) of FIG. 4, in the capillary holding portion 11 according to the second holding mode, the axis 16A of the upper socket 16 does not overlap with the axis 18A of the lower socket 18. Specifically, the lower socket 18 is held in the holder 14 and its position is maintained. With respect to such a lower socket 18, the upper socket 16 moves in the X-axis and Y-axis directions. The axis 16A of the upper socket 16 is parallel to the axis 18A of the lower socket 18.

As shown in the portion (c) of FIG. 4, in the capillary holding portion 11 according to the third modification, the axis 16A of the upper socket 16 overlaps with the axis 18A of the lower socket 18. That is, these configurations are the same as the first holding mode. On the other hand, the axis 8A of the capillary 8 is inclined with respect to the axis 16A of the upper socket 16. The O-ring 19 has the shape of a torus. Therefore, the inner peripheral surface into which the tapered surface 8a of the capillary 8 is inserted is a curved surface. For example, the cross-sectional shape of the O-ring 19 in the cross section parallel to the Z axis is circular. Looking at the cross-sectional view of the state in which the tapered surface 8a is inserted into the O-ring 19, the O-ring 19 and the tapered surface 8a come into contact with each other at the two contact portions C1 and C2. That is, the contact mode between the O-ring 19 and the capillary 8 is a line contact in which the annular contact line CL (see FIG. 3) makes contact. According to such a contact state, the inclination of the capillary 8 is allowed with respect to the axis 19A of the O-ring 19.

<Capillary information section>
As shown in FIG. 2 again, the capillary guide portion 12 guides the capillary 8 when the capillary 8 is inserted into the hole 7h (capillary holding hole) of the ultrasonic horn 7. The capillary guide portion 12 is provided in the actuator 13. Therefore, the relative positional relationship between the capillary guide portion 12 and the parts constituting the actuator 13 is preserved. The capillary guide portion 12 is a cantilever extending from the actuator 13 toward the ultrasonic horn 7.

FIG. 5 is a perspective view of the main portion of the capillary guide portion 12 in a cross-sectional view. As shown in FIG. 5, a guide hole 12h is provided at the free end of the capillary guide portion 12. The guide hole 12h receives the capillary main body 8b of the capillary 8. Then, the guide hole 12h guides the capillary 8 to the hole 7h of the ultrasonic horn 7. The guide hole 12h is a through hole. The guide hole 12h extends from the upper surface 12a to the lower surface 12b of the capillary guide portion 12. The guide hole 12h is also open to the front end surface 12c of the capillary guide portion 12. The guide hole 12h can receive the capillary 8 from the lower surface 12b and the front end surface 12c.

The guide hole 12h includes a tapered hole portion 12t and a parallel hole portion 12p. The lower end of the tapered hole portion 12t opens to the lower surface 12b. The upper end of the parallel hole portion 12p opens to the upper surface 12a. The inner diameter of the tapered hole portion 12t on the lower surface 12b is larger than the inner diameter of the parallel hole portion 12p on the upper surface 12a. This inner diameter is larger than the outer diameter at the upper end of the capillary 8. That is, the inner diameter of the guide hole 12h gradually decreases from the lower surface 12b toward the upper surface 12a. The inner diameter of the guide hole 12h is the minimum at the position where the tapered hole portion 12t and the parallel hole portion 12p are connected. This inner diameter is substantially the same as the outer diameter at the upper end of the capillary 8. The inner diameter of the parallel hole portion 12p is constant.

FIG. 6 shows how the capillary 8 is guided by the capillary guide unit 12. In the state shown in the part (a) of FIG. 6, the axis 7A of the hole 7h of the ultrasonic horn 7 overlaps with the axis 12A of the guide hole 12h of the capillary guide portion 12. On the other hand, the axis 8A of the capillary 8 held by the capillary holding portion 11 is displaced parallel to the axes 7A and 12A in the direction of the X axis.

From the state shown in the portion (a) of FIG. 6, the capillary holding portion 11 is moved in the direction of the Z axis. As shown in the portion (b) of FIG. 6, the upper end of the capillary 8 comes into contact with the wall surface of the tapered hole portion 12t. When the capillary holding portion 11 is moved upward, the capillary 8 moves along the wall surface. This movement includes a horizontal (X-axis direction) component in addition to an upward (Z-axis direction) component. In the capillary holding portion 11, the upper socket 16 moves with respect to the lower socket 18 by the coil spring 17. That is, when the lower socket 18 is moved upward, the upper socket 16 is moved in the horizontal direction by the coil spring 17 while moving in the upward direction.

According to this movement, the axis 8A of the capillary 8 gradually approaches the axis 7A of the hole 7h. Then, when the upper end of the capillary 8 reaches the parallel hole portion 12p, the axis 8A of the capillary 8 overlaps with the axis 7A of the hole 7h. Therefore, the capillary 8 is inserted into the hole 7h of the ultrasonic horn 7.

In the example shown in the part (a) of FIG. 6, the positional relationship between the ultrasonic horn 7 and the capillary guide portion 12 is in an ideal state. On the other hand, in the example shown in the portion (a) of FIG. 7, the axis 7A of the hole 7h of the ultrasonic horn 7 is tilted with respect to the axis 12A of the capillary guide portion 12.

The operation of inserting the capillary 8 in the state shown in the part (a) of FIG. 7 will be described. As shown in the portion (b) of FIG. 7, the axis 8A of the capillary 8 is relatively inclined with respect to the axis 7A of the hole 7h. In this state, the upper end of the capillary 8 comes into contact with the wall surface of the hole 7h. Therefore, the capillary 8 cannot be further inserted into the hole 7h. In order to insert the capillary 8 into the hole 7h, it is necessary to make the axis 8A of the capillary 8 parallel to the axis 7A of the hole 7h. Further, it is necessary to overlap the axis 8A with the axis 7A.

The capillary holding portion 11 allows the upper socket 16 to be displaced with respect to the lower socket 18. Further, the capillary 8 can be tilted with respect to the axis 16A of the upper socket 16. According to these actions, as shown in the portion (c) of FIG. 7, as the capillary holding portion 11 is raised, the axis 8A of the capillary 8 gradually approaches the axis 7A of the hole 7h. Finally, the capillary 8 can be inserted into the hole 7h. That is, the capillary holding portion 11 flexibly holds the capillary 8. As a result, the deviation between the capillary 8 and the capillary guide portion 12 can be absorbed. Further, it is possible to absorb the deviation between the capillary 8 and the hole 7h of the ultrasonic horn 7. Therefore, according to the capillary holding portion 11 and the capillary guide portion 12, the capillary 8 can be reliably attached to the ultrasonic horn 7.

<Actuator>
The actuator 13 moves the capillary 8 to be replaced and the new capillary 8. Further, the actuator 13 holds the capillary 8 in a predetermined position and posture. The actuator 13 reciprocates the capillary 8 along a predetermined translational axis (Z axis) direction. In this embodiment, the translational axis is along the vertical direction (Z axis). Therefore, the actuator 13 moves the capillary 8 upward and downward along the vertical direction. Further, the actuator 13 rotates the capillary 8 around a rotation axis (X-axis). In this embodiment, the rotation axis is orthogonal to the vertical direction (Z axis). That is, the rotation axis is along the horizontal direction (X axis). Therefore, the actuator 13 rotates the capillary 8 around the horizontal direction.

The actuator 13 includes an actuator base 21 (base portion), a pair of linear motors 22A and 22B (first force generating portion, second force generating portion), a linear guide 24, a carriage 26 (moving body), and a control device. 27 (control unit, see FIG. 1, etc.).

The shape of the actuator base 21 is a flat plate. The actuator base 21 has a main surface 21a. The normal direction of the main surface 21a is along the horizontal direction (direction of the X axis). The linear motors 22A and 22B, the linear guide 24 and the carriage 26 are arranged on the main surface 21a.

The linear motor 22A moves the carriage 26. The linear motor 22A is an ultrasonic motor based on a so-called impact drive method. The linear motor 22A includes a drive shaft 28A and an ultrasonic element 29A (ultrasonic generation unit). The drive shaft 28A is a metal round bar. The axis of the drive shaft 28A is parallel to the main surface 21a of the actuator base 21. The carriage 26 moves along the drive shaft 28A. Therefore, the length of the drive shaft 28A determines the range of movement of the carriage 26. The lower end of the drive shaft 28A is fixed to the ultrasonic element 29A. The upper end of the drive shaft 28A is supported by the guide 31. The guide 31 projects from the main surface 21a of the actuator base 21. The upper end of the drive shaft 28A may be fixed to the guide 31. Further, the upper end of the drive shaft 28A may come into contact with the guide 31. That is, the lower end of the drive shaft 28A is a fixed end. Further, the upper end of the drive shaft 28A is a fixed end or a free end.

The ultrasonic element 29A provides ultrasonic vibration to the drive shaft 28A. The drive shaft 28A provided with ultrasonic vibration vibrates slightly along the Z axis. As the ultrasonic element 29A, for example, a piezo element which is a piezoelectric element may be adopted. The piezo element deforms according to the applied voltage. Therefore, when a high frequency voltage is applied, the piezo element repeats deformation according to the frequency and the magnitude of the voltage. That is, the piezo element causes ultrasonic vibration. The ultrasonic element 29A is fixed to the guide 32 protruding from the actuator base 21.

A control device 27 is electrically connected to the ultrasonic element 29A. The ultrasonic element 29A receives the drive voltage generated by the control device 27. The control device 27 controls the frequency and amplitude of the AC voltage provided to the ultrasonic element 29A.

The configuration of the linear motor 22B as a single unit is the same as that of the linear motor 22A. The linear motor 22B is arranged away from the linear motor 22A in the direction of the Y axis intersecting the Z axis. The drive shaft 28B of the linear motor 22B is parallel to the drive shaft 28A of the linear motor 22A. The height of the upper end of the linear motor 22B is the same as the height of the upper end of the linear motor 22A. Similarly, the height of the lower end of the linear motor 22B is the same as the height of the lower end of the linear motor 22A.

The carriage 26 is a moving body. The moving body is translated and rotated by the linear motors 22A and 22B. The shape of the carriage 26 is a disk. The carriage 26 is laid between the linear motors 22A and 22B. A linear guide 24 that guides the carriage 26 in the Z-axis direction is provided between the actuator base 21 and the carriage 26. The carriage 26 is guided in the Z-axis direction by the linear guide 24. The linear guide 24 regulates the moving direction of the carriage 26. The linear guide 24 does not provide driving force in the Z-axis direction to the carriage 26.

The carriage 26 has a front disk 33, a pressurized disk 34, and a rear disk 36. The outer diameters of these disks are the same as each other. Further, these disks are laminated along a common axis. A shaft body 37 is sandwiched between the front disk 33 and the pressurized disk 34. The outer diameter of the shaft body 37 is smaller than the outer diameter of the front disk 33 and the pressurized disk 34. Therefore, a gap is formed between the outer peripheral portion of the front disk 33 and the outer peripheral portion of the pressurized disk 34. Similarly, the shaft body 38 is also sandwiched between the rear disk 36 and the pressurized disk 34. The outer diameter of the shaft body 37 is also smaller than the outer diameter of the rear disk 36 and the pressurized disk 34. Therefore, a gap is also formed between the outer peripheral portion of the rear disk 36 and the outer peripheral portion of the pressurized disk 34.

The rear disk 36 is connected to the table 24a of the linear guide 24. The rear disk 36 is rotatably connected to the table 24a. On the other hand, the pressurized disk 34 and the front disk 33 are mechanically fixed to the rear disk 36. Therefore, the pressurized disk 34 and the front disk 33 do not rotate with respect to the rear disk 36. Therefore, the entire carriage 26 including the front disk 33, the pressurized disk 34, and the rear disk 36 can rotate with respect to the table 24a of the linear guide 24.

As shown in FIG. 8, the drive shafts 28A and 28B are sandwiched in the gap G1 between the pressurization disk 34 and the rear disk 36. The pair of drive shafts 28A and 28B sandwich the center of gravity of the carriage 26. The drive shafts 28A and 28B come into contact with the back surface 34b of the pressurized disk 34 and the main surface 36a of the rear disk 36. The drive shafts 28A and 28B do not come into contact with the outer peripheral surface 38a of the shaft body 38. The outer diameter of the gap G1 is smaller than the outer diameter of the pressurized disk 34 and the outer diameter of the rear disk 36. Further, the outer diameter of the gap G1 is larger than the outer diameter of the shaft body 38. The difference between the outer diameter of the shaft body 38 and the outer diameter of the rear disk 36 is larger than the difference between the outer diameter of the drive shaft 28A and the outer diameter of the drive shaft 28B. Similarly, the difference between the outer diameter of the shaft body 37 and the outer diameter of the pressurized disk 34 is larger than the difference between the outer diameter of the drive shaft 28A and the outer diameter of the drive shaft 28B.

The gap G1 is slightly smaller than the outer diameter of the drive shaft 28A and the outer diameter of the drive shaft 28B. A gap G2 is formed between the front disk 33 and the pressurized disk 34. As a result, when the drive shafts 28A and 28B are arranged between the pressurized disk 34 and the rear disk 36, the pressurized disk 34 slightly bends toward the front disk 33. This deflection generates a force that presses the drive shaft 28A and the drive shaft 28B against the rear disk 36.

Hereinafter, the operating principle of the actuator 13 will be described with reference to FIG. 9. The part (a) of FIG. 9, the part (b) of FIG. 9, and the part (c) of FIG. 9 show the operating principle of the actuator 13. For convenience of explanation, FIG. 9 shows one linear motor 22A and the carriage 26, and the illustration of the other linear motor 22B and the like is omitted.

Part (a) of FIG. 9 shows an aspect of holding the position of the carriage 26. The drive shaft 28A of the carriage 26 is sandwiched between the pressurized disk 34 and the rear disk 36. The position of the carriage 26 is maintained by the pressurization resulting from this pinching. More specifically, the position of the carriage 26 is maintained by a frictional drag force with pressurization as the normal force. The control device 27 does not provide a voltage to the ultrasonic element 29A. That is, as shown by the voltage E1, the voltage value is zero. The control device 27 may provide the ultrasonic element 29A with a direct current having a predetermined voltage value.

The position of the carriage 26 is maintained by the frictional resistance with the drive shaft 28A. Here, as a mode for moving the drive shaft 28A, a first mode in which the carriage 26 moves with the drive shaft 28A and a second mode in which the carriage 26 does not accompany the drive shaft 28A and continues to maintain its position due to its inertia. There are embodiments. As the mode for moving the drive shaft 28A, the first mode or the second mode can be selected depending on the speed at which the drive shaft 28A is moved. The speed at which the drive shaft 28A is moved is related to the frequency of the ultrasonic vibration. Therefore, as the mode for moving the drive shaft 28A, the first mode or the second mode can be selected depending on the frequency of the ultrasonic vibration. For example, when the frequency of ultrasonic vibration is a relatively low frequency (15 kHz to 30 kHz), the carriage 26 moves with the drive shaft 28A. For example, when the frequency of ultrasonic vibration is a relatively high frequency (100 kHz to 150 kHz), the carriage 26 maintains its position regardless of the drive shaft 28A.

For example, as shown in the portion (b) of FIG. 9, when the drive shaft 28A is moved upward (positive direction), the carriage 26 is moved according to the movement of the drive shaft 28A. In this case, the relative positional relationship between the drive shaft 28A and the carriage 26 does not change. When the drive shaft 28A is moved downward (negative direction), the carriage 26 is not moved in response to the movement of the drive shaft 28A. In this case, the relative positional relationship between the drive shaft 28A and the carriage 26 changes. When these operations are repeated, the carriage 26 gradually moves upward. That is, the period of the voltage that moves the drive shaft 28A upward (reference numeral E2a in the voltage E2) is made longer than the period of the voltage that moves the drive shaft 28A downward (reference numeral E2b in the voltage E2). As a result, the carriage 26 moves upward.

On the contrary, as shown in the part (c) of FIG. 9, when the drive shaft 28A is moved downward, the carriage 26 is moved according to the movement of the drive shaft 28A. In this case, the relative positional relationship between the drive shaft 28A and the carriage 26 does not change. Then, when the drive shaft 28A is moved upward, the carriage 26 is not moved according to the movement of the drive shaft 28A. In this case, the relative positional relationship between the drive shaft 28A and the carriage 26 changes. When these operations are repeated, the carriage 26 gradually moves downward. That is, the period of the voltage that moves the drive shaft 28A upward (reference numeral E3a in the voltage E3) is shorter than the period of the voltage that moves the drive shaft 28A downward (reference numeral E3b in the voltage E3). As a result, the carriage 26 moves downward.

When moving the carriage 26 downward, in addition to the above control, the carriage 26 is prevented from moving in response to both the upward movement and the downward movement of the drive shaft 28A. May be good. That is, apparently, the frictional resistance force acting between the carriage 26 and the drive shaft 28A is smaller than the gravity acting on the carriage 26. As a result, the carriage 26 appears to fall. In this aspect, gravity acting on the carriage 26 is used as a force to move the carriage 26 downward.

Next, the specific operation of the actuator 13 will be described with reference to FIGS. 10 and 11.

Part (a) in FIG. 10 shows an operation of maintaining the position of the carriage 26. When maintaining the position of the carriage 26, the control device 27 provides a constant voltage (see voltages E4 and E5 in the portion (a) of FIG. 10) to each of the ultrasonic element 29A and the ultrasonic element 29B.

Part (b) of FIG. 10 shows an operation of moving the carriage 26 upward. At this time, the control device 27 provides one of the ultrasonic elements 29A with the AC voltage shown in the voltage E6 in the portion (b) of FIG. The period of the voltage that moves the drive shaft 28A upward is longer than the period of the voltage that moves the drive shaft 28A downward. Similarly, the control device 27 also provides the other ultrasonic element 29B with the alternating current shown in the voltage E7 in the portion (b) of FIG. The period of the voltage that moves the drive shaft 28B upward is longer than the period of the voltage that moves the drive shaft 28B downward. That is, the control device 27 provides the same AC voltage to the ultrasonic element 29A and the ultrasonic element 26B. The control device 27 matches the timing of moving one drive shaft 28A upward with the timing of moving the other drive shaft 28B upward. That is, the control device 27 has the phase of the voltage provided to one ultrasonic element 29A and the phase of the voltage provided to the other ultrasonic element 29A in the same phase relationship with each other. Therefore, the contact portion P1 and the contact portion P2 move upward by the same distance. Here, the contact portion P1 is a portion of one drive shaft 28A that is pressed by the pressurization disk 34 and the rear disk 36. Further, the contact portion P2 is a portion of the other drive shaft 28B that is pressed by the pressurization disk 34 and the rear disk 36. As a result, the contact portion P1 and the contact portion P2 move upward while maintaining the parallel state. That is, the carriage 26 translates upward without rotating around the center of gravity.

Part (c) of FIG. 10 shows an operation of moving the carriage 26 downward. At this time, the control device 27 provides one of the ultrasonic elements 29A with the alternating current shown by the voltage E8 in the portion (c) of FIG. The period of the voltage that moves the drive shaft 28A upward is shorter than the period of the voltage that moves the drive shaft 28A downward. Similarly, the control device 27 also provides the other ultrasonic element 29B with the AC voltage shown in the voltage E9 in the portion (c) of FIG. The period of the voltage that moves the drive shaft 28B upward is shorter than the period of the voltage that moves the drive shaft 28B downward. As a result, the contact portion P1 on one drive shaft 28A and the contact portion P2 on the other drive shaft 28B move downward by the same distance. As a result, the contact portion P1 and the contact portion P2 move downward while maintaining the parallel state. That is, the carriage 26 translates downward without rotating around the center of gravity.

According to the above control, when the carriage 26 is moved downward, a frictional resistance force acts between the carriage 26 and the drive shafts 28A and 28B. That is, the relative positions of the carriage 26 and the drive shafts 28A and 28B do not change. Therefore, the carriage 26 does not rotate around the center of gravity. For example, due to the posture of the capillary 8 held by the carriage 26, a torque that rotates the carriage 26 may be generated. Even in this case, the actuator 13 can move the carriage 26 downward while suppressing the rotation of the carriage 26.

The translation that moves the carriage 26 upward and downward can also be realized by one linear motor 22A. Since the actuator 13 according to the embodiment has two linear motors 22A and 22B, the propulsive force can be increased as compared with the configuration having one linear motor 22A.

Part (a) in FIG. 11 shows an operation of rotating the carriage 26 in the clockwise direction. At this time, the control device 27 provides one ultrasonic element 29A with the alternating current shown in the voltage E10 in the portion (a) of FIG. The period of the voltage that moves the drive shaft 28A upward is shorter than the period of the voltage that moves the drive shaft 28A downward. On the other hand, the control device 27 provides the other ultrasonic element 29B with the alternating current shown in the voltage E11 in the portion (a) of FIG. The period of the voltage that moves the drive shaft 28B upward is longer than the period of the voltage that moves the drive shaft 28B downward. That is, the voltage provided to the ultrasonic element 29A is different from the voltage provided to the ultrasonic element 29B. Then, the control device 27 matches the timing of moving one drive shaft 28A upward with the timing of moving the other drive shaft 28B downward. That is, the phase of the voltage provided to one ultrasonic element 29A is opposite to the phase of the voltage provided to the other ultrasonic element 29B. Then, the contact portion P1 of one drive shaft 28A moves downward, and the contact portion P2 of the other drive shaft 28B moves upward. The contact portion P1 and the contact portion P2 move in opposite directions to each other. If these movements match, the carriage 26 rotates clockwise while maintaining its position in the Z-axis direction.

Part (b) of FIG. 11 shows an operation of rotating the carriage 26 in the counterclockwise direction. At this time, the control device 27 provides one of the ultrasonic elements 29A with the AC voltage shown by the voltage E12 in the portion (b) of FIG. The period of the voltage that moves the drive shaft 28A upward is longer than the period of the voltage that moves the drive shaft 28A downward. On the other hand, the control device 27 provides the other ultrasonic element 29B with the AC voltage shown in reference to the voltage E13 in the portion (b) of FIG. The period of the voltage that moves the drive shaft 28B upward is shorter than the period of the voltage that moves the drive shaft 28B downward. Then, the contact portion P1 of one drive shaft 28A moves upward, and the contact portion P2 of the other drive shaft 28B moves downward. That is, the contact portions P1 and P2 move in opposite directions to each other. If these movements match, the carriage 26 rotates counterclockwise while maintaining its position in the Z-axis direction.

<Replacement operation>
Subsequently, the capillary exchange operation performed by the above-mentioned capillary exchange unit 9 will be described.

Part (a) of FIG. 12 shows a state immediately before replacing the capillary 8U attached to the ultrasonic horn 7. In addition to the capillary holding section 11, the capillary guide section 12, and the actuator 13, the capillary replacement section 9 has a capillary list car 39 and a capillary recovery section 41 as additional components. The capillary list car 39 accommodates a plurality of replacement capillaries 8N. The capillary collection unit 41 accommodates the used capillary 8U.

Part (a) of FIG. 12 shows, for example, a state in which the wire bonding work is performed by the capillary 8U attached to the ultrasonic horn 7. The capillary replacement unit 9 may be retracted to a position that does not interfere with the wire bonding work.

Part (b) of FIG. 12 shows the state of the first step in the exchange operation. The capillary replacement unit 9 rotates the carriage 26 clockwise by the control device 27. This rotation corresponds to the operation shown in the part (a) of FIG. Due to this rotation, the capillary holding portion 11 that has been retracted to a position that does not interfere with the wire bonding work is located below the capillary 8U.

Part (a) of FIG. 13 shows the state of the second step in the exchange operation. The capillary replacement unit 9 moves the carriage 26 upward by the control device 27. This movement corresponds to the operation shown in part (b) of FIG. By this movement, the capillary holding portion 11 holds the capillary 8U attached to the ultrasonic horn 7.

Part (b) of FIG. 13 shows the state of the third step in the exchange operation. The capillary replacement unit 9 moves the carriage 26 downward by the control device 27. This movement corresponds to the operation shown in part (c) of FIG. By this movement, the capillary 8U held by the capillary holding portion 11 is removed from the ultrasonic horn 7.

Part (a) of FIG. 14 shows the state of the fourth step in the exchange operation. The capillary replacement unit 9 rotates the carriage 26 clockwise by the control device 27. This movement corresponds to the operation shown in the part (a) of FIG. By this movement, the capillary 8U held by the capillary holding section 11 is conveyed to the capillary collecting section 41. As a result, the capillary 8U is collected as used.

Part (b) of FIG. 14 shows the state of the fifth step in the exchange operation. The capillary replacement unit 9 rotates the carriage 26 counterclockwise by the control device 27. This movement corresponds to the operation shown in part (b) of FIG. By this movement, the capillary holding portion 11 holds a new replacement capillary 8N.

Part (a) of FIG. 15 shows the state of the sixth step in the exchange operation. The capillary replacement unit 9 rotates the carriage 26 clockwise by the control device 27. This movement corresponds to the operation shown in the part (a) of FIG. Due to this movement, the new capillary 8N held by the capillary holding portion 11 is located below the hole 7h of the ultrasonic horn 7.

Part (b) of FIG. 15 shows the state of the seventh step in the exchange operation. The capillary replacement unit 9 moves the carriage 26 upward by the control device 27. This movement corresponds to the operation shown in part (b) of FIG. By this movement, the new capillary 8N held by the capillary holding portion 11 is inserted into the hole 7h of the ultrasonic horn 7. In this insertion, due to the action of the capillary holding portion 11 and the capillary guide portion 12 shown in FIGS. 6 and 7, the displacement between the capillary 8N and the capillary guide portion 12 and the holes 7h between the capillary 8N and the ultrasonic horn 7 The deviation from is eliminated. As a result, the capillary 8N can be reliably attached to the hole 7h.

Hereinafter, the operation and effect of the actuator 13 and the wire bonding device 1 according to the embodiment will be described.

The actuator 13 includes a pair of linear motors 22A and 22B. The force generated by each of the linear motors 22A and 22B is controlled by the control device 27. According to this configuration, the carriage 26 can be translated by matching the directions of the forces generated by the pair of linear motors 22A and 22B. Further, by making the directions of the forces generated by the linear motors 22A and 22B opposite to each other, the torque around the center of gravity can be provided to the carriage 26. As a result, the carriage 26 can be rotated around the center of gravity. Therefore, the actuator 13 can provide the carriage 26 with a plurality of movements of translation and rotation.

The actuator 13 according to the present disclosure can perform translation and rotation. Further, the actuator 13 does not need to prepare a drive mechanism only for translation and a drive mechanism only for rotation. Therefore, the actuator 13 can be downsized as compared with the configuration in which each of the translation drive mechanism and the rotation drive mechanism is prepared.

The wire bonding device 1 includes a capillary replacement unit 9 provided with an actuator 13. The actuator 13 can provide the carriage 26 with two movements, translation and rotation. Therefore, it is possible to impart the replacement function of the capillary 8 to the wire bonding apparatus 1 and suppress the increase in size of the capillary replacement portion 9. Therefore, it is possible to achieve both high functionality and miniaturization of the wire bonding apparatus 1.

In the wire bonding apparatus 1, the capillary 8 held by the capillary holding portion 11 is inserted into the hole 7h while being guided by the capillary guide portion 12. Therefore, even if the capillary 8 is displaced with respect to the hole 7h, the displacement is corrected by the capillary guide portion 12. In the capillary holding portion 11, the flexible portion 10 including the upper socket 16 and the coil spring 17 holds the position of the capillary 8 so as to be relatively displaceable with respect to the lower socket 18 fixed to the actuator 13. As a result, in addition to the displacement of the capillary 8 with respect to the hole 7h, even when the capillary guide portion 12 is displaced with respect to the hole 7h, the posture of the capillary 8 is such that the capillary 8 imitates the capillary guide portion 12 and the hole 7h. Can be inserted while changing. Therefore, the new capillary 8 can be automatically attached to the wire bonding device 1 without the help of an operator.

Although the embodiment of the present invention has been described above, the embodiment is not limited to the above embodiment and may be implemented in various forms.

<Modification 1>
In the present disclosure, as the first force generating section and the second force generating section, an ultrasonic drive motor based on an impact drive method using the law of inertia is exemplified. However, the first force generating section and the second force generating section are not limited to this configuration, and a mechanism capable of generating a force along a predetermined direction may be adopted as the first force generating section and the second force generating section. .. For example, a linear guide using a ball screw may be adopted as the first force generating section and the second force generating section.

<Modification 2>
The capillary holding portion may hold the capillary 8 in such a manner that the posture of the capillary 8 can be flexibly changed. Therefore, the configuration of the capillary holding portion is not limited to the above. FIG. 16 shows a capillary holding portion 11A according to a modified example.

The capillary holding portion 11A has a metal pipe 42, a silicone resin tube 43, and a cap 44 as main components. The shape of the pipe 42 is cylindrical. The pipe 42 houses the tube 43 inside the pipe 42. One end of the pipe 42 is closed by the cap 44. One end of the tube 43 is closed by the cap 44. The cap 44 is held by the holder 14. The upper end 43a (upper end opening edge) of the tube 43 substantially coincides with the upper end 42a of the pipe 42. The outer diameter of the tube 43 is smaller than the inner diameter of the pipe 42. That is, a slight gap is formed between the outer peripheral surface of the tube 43 and the inner peripheral surface of the pipe 42. The upper end 43a of the tube 43 holds the tapered surface 8a of the capillary 8.

The tube 43 of the capillary holding portion 11A has a predetermined flexibility. Therefore, the capillary holding portion 11A can allow the posture of the capillary 8 to be changed by the amount of the gap formed between the outer peripheral surface of the tube 43 and the inner peripheral surface of the pipe 42. Specifically, the capillary holding portion 11A can tolerate eccentricity and inclination in the direction intersecting the axis 42A of the pipe 42.

When the capillary holding portion 11A includes only the tube 43, the rigidity of the tube 43 is insufficient, so that the capillary 8 may not be held depending on the posture of the capillary 8. However, on the outside of the tube 43, there is a pipe 42 having a higher rigidity than the tube 43. Therefore, even if the rigidity of the tube 43 is insufficient, the displacement of the capillary 8 can be kept within an allowable range by the pipe 42.

In a state where the capillary 8 is inserted into the tube 43, the contact state between the inner peripheral edge of the upper end 43a and the tapered surface 8a is line contact. Therefore, similarly to the capillary holding portion 11A according to the present disclosure, the capillary 8 can be tilted and held.

1 ... Wire bonding device, 2 ... Base, 3 ... Bonding part, 4 ... Conveying part, 6 ... Bonding tool, 7 ... Ultrasonic horn, 7h ... Hole, 8 ... Capillary, 8a ... Tapered surface, 8b ... Capillary body, 9 ... Capillary replacement part, 11 ... Capillary holding part, 12 ... Capillary guide part, 12h ... Guide hole, 12t ... Tapered hole part, 12p ... Parallel hole part, 13 ... Actuator, 14 ... Holder, 16 ... Upper socket, 16c ... Seat Leading part, 16d ... Step, 16e ... Small diameter part, 16h ... Through hole, 17 ... Coil spring, 18 ... Lower socket, 18d ... Step, 18e ... Small diameter part, 18f ... Large diameter part, 19 ... Oring, 21 ... Actuator base (base part), 22A ... Linear motor (first force generating part), 22B ... Linear motor (second force generating part), 24 ... Linear guide, 26 ... Carriage, 27 ... Control device (control part), 28A , 28B ... Drive shaft, 29A, 29B ... Ultrasonic element, 31, 32 ... Guide, 33 ... Front disk, 34 ... Pressurized disk, 36 ... Rear disk, 37, 38 ... Shaft body, 39 ... Capillary actuator, 41 ... Capillary collection section, G1, G2 ... Gap, P1, P2, C1, C2 ... Contact section.

Claims (4)

A first force generating unit that generates a force in the positive direction along the first direction and a force in the negative direction opposite to the positive direction along the first direction.
A second force generating portion that is arranged apart from the first force generating portion in a second direction orthogonal to the first direction and generates a force toward the positive direction and a force toward the negative direction. ,
A control unit that controls the direction and magnitude of the force generated by the first force generating unit and the second force generating unit.
A moving body spanned with the first force generating section and the second force generating section is provided.
The control unit
By matching the direction of the force generated by the first force generating portion with the direction of the force generated by the second force generating portion, the moving body is translated along the first direction.
By making the direction of the force generated by the first force generating portion opposite to the direction of the force generated by the second force generating portion, the moving body is rotated around the center of gravity.
The first force generating section and the second force generating section are
An ultrasonic generator that is connected to the control unit and is controlled by the control unit,
An actuator having a contact portion extending in the first direction and coming into contact with the moving body, and a drive shaft fixed to the ultrasonic generating portion and receiving ultrasonic vibration generated by the ultrasonic generating portion. The actuator according to claim 1, wherein the first force generating section and the second force generating section are arranged along the second direction with the center of gravity of the moving body interposed therebetween. The moving body has a main surface and a back surface, and has a main surface and a back surface.
The actuator according to claim 1 or 2, wherein one of the main surface and the back surface includes a portion of the drive shaft that comes into contact with the contact portion . A bonding tool that holds the capillaries detachably and
A capillary replacement section for attaching or detaching the capillary to the bonding tool is provided.
The capillary exchange unit is a wire bonding apparatus having the actuator according to any one of claims 1 to 3 .

Images