JP2005341632A - Moving magnet type linear slider - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a moving magnet type linear slider in which high tact (frequency) driving is realized because there is no possibility of disconnecting a lead wire, productivity of machine is enhanced, and speed ripple is suppressed by enhancing the running precision of a linear motor. <P>SOLUTION: In a moving magnet type linear slider, the span central axis of two linear guides of a moving magnet type linear slider and the thrust central axis of an armature are aligned, and a relation of Lst≥Lmg is satisfied assuming Lst is a linear motor stroke determined by subtracting the total length Lmg of a magnet in the traveling direction from the total length La of the armature in the traveling direction. A movable table 15 is provided with a long portion 10 where a length substantially equal to the linear motor stroke Lst is formed at least partially in the traveling direction, and a scale section 17 of a linear scale is secured to the long portion 10. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a linear slider equipped with a moving magnet type linear motor driven by a field magnet (hereinafter referred to as a magnet) side when energized, and in particular, under the condition of linear stroke Lst> field magnet Lmg. The present invention relates to a movable table shape, linear guide rail dimensions, and stopper fixing positions for arranging sensor leads and motor leads on the fixed side.

A conventional moving magnet type linear slider having a relationship of linear stroke Lst> field magnet Lmg has fixed the scale head portion of the linear scale on the movable table side and the scale portion on the fixed base side (for example, Patent Document 1).
6A and 6B are diagrams showing a moving magnet type linear slider described in Patent Document 1, wherein FIG. 6A is a side view and FIG. 6B is a plan view.
In the figure, reference numeral 31 denotes a fixed base, to which a linear armature 32 and a guide rail 33a of a linear guide 33 are arranged and fixed in parallel so as to sandwich the armature 32.
A movable table 35 is fixed to the guide block 33b of the linear guide 33, and is fixed to the linear armature 32 via a gap.
In addition, a linear scale head portion 36 is fixed to the movable table 35, and a scale portion 37 that is paired with the head portion 36 is fixed to the fixed base 31.
As described above, the conventional moving magnet type linear slider has a structure in which the lead moves following the movable table 35 when the movable table 35 is driven because the head 36 side of the linear scale is fixed to the movable table 35.
When combined with the drive driver 44, the motor parameters are recorded in the internal memory of the drive driver 44.

Also, in the case of a conventional moving magnet type linear slider that has a coreless coil on a fixed base, a hall element is embedded in the wiring board that fixes the coreless coil, and the processing circuit for this is also in the wiring board. It was set as the structure which detects a magnetic pole by arrange | positioning to (for example, refer patent document 2).
7A and 7B are diagrams showing the moving magnet type linear slider described in Patent Document 2. FIG. 7A is a plan view, FIG. 7B is a plan view of a substrate portion, and FIG. 7C is a side of a permanent magnet unit fixed to a mover. FIG.
In the figure, 101 is a stator base, 102 is a mover, 103 is a linear guide, 112 is a coreless coil, 113 is an armature unit, and 114 is a base (substrate).
An armature unit 113 is attached and fixed to the stator 101 in a state where the coreless coil 112 is fixed as shown in FIG. A permanent magnet unit 121 is incorporated in the mover 102 and is slidably supported by a linear guide 103.
The substrate 114 has a built-in magnetic pole detection function.
Japanese Patent Laid-Open No. 06-054516 (FIG. 1) JP 2002-10617 (FIGS. 1 and 6)

As described above, in the moving magnet type linear slider described in Patent Document 1, since the head side of the linear scale is fixed to the movable table, the lead moves following this when the movable table is driven. Therefore, there is a risk that the lead wire may be disconnected during the table driving, and the high tact (frequency) driving cannot be performed.
Further, since the block span between the front and rear of the linear guide becomes narrow, there is a problem that the running accuracy of the linear motor is deteriorated and the speed ripple is increased.
In addition, the moving magnet type linear slider described in Patent Document 2 has a structure in which the magnetic pole detection function is built in the substrate, so that the signal processing unit is configured on the substrate without the coil. Thus, since this signal processing unit exists in the coil arrangement direction, the total length of the linear slider is increased. In such a short-stroke small actuator, there is a strong demand from the user to reduce the size, and the fact that there is a useless dimension with respect to thrust has lowered the commercial value.
In addition, since the signal line of the magnetic pole detection unit and the motor power line are taken from the coaxial cable, there is a problem that the risk of being affected by power noise is high.

The present invention has been made in view of such problems, and the first object of the present invention is that there is no fear of disconnection of the lead wire, and therefore, high tact (frequency) driving can be performed, and the productivity of the machine is improved. An object of the present invention is to provide a moving magnet type linear slider capable of improving the running accuracy of the linear motor and reducing the speed ripple.
A second object of the present invention is to provide a moving magnet type linear slider with improved noise resistance by shortening the dimension in the stroke direction and making the motor power line and the lead of the magnetic pole detector independent. It is in.

In order to solve the above problem, the present invention is configured as follows.
The moving magnet type linear slider according to the first aspect of the present invention includes an armature comprising a plurality of coils, two linear guides extending in parallel with the armature interposed therebetween, and the armature and the linear guide. A fixed base that fixes the guide rail, a plurality of magnets that are arranged to face the armature through a gap and have a size shorter than the thrust length of the armature, and fixed on the guide block of the linear guide And a moving table that lays the plurality of magnets spaced apart from each other in the advancing direction, a moving magnet type linear slider comprising: a center axis of a span of the two linear guides; Arranged and fixed so that the thrust central axis is on the same axis line, and the travel direction of the magnet from the overall travel direction La of the armature When the difference obtained by subtracting the length Lmg is defined as a linear motor stroke Lst, in the moving magnet type linear slider having a relationship of Lst ≧ Lmg, at least a part of the movable table has a length substantially equal to the linear motor stroke Lst. A long portion formed in the traveling direction is formed, and a scale portion of a linear scale is fixed to the long portion.
According to a second aspect of the present invention, there is provided an armature including a plurality of coils, two linear guides sandwiching the armature and extending in a traveling direction in parallel, the armature and the linear guide. A fixed base that fixes the guide rail, a plurality of magnets that are arranged to face the armature through a gap and have a size shorter than the thrust length of the armature, and fixed on the guide block of the linear guide And a moving table that lays the plurality of magnets spaced apart from each other in the advancing direction, a moving magnet type linear slider comprising: a center axis of a span of the two linear guides; Arranged and fixed so that the thrust central axis is on the same axis line, and the travel direction of the magnet from the overall travel direction La of the armature When the difference obtained by subtracting the length Lmg is defined as a linear motor stroke Lst, in the moving magnet type linear slider having a relationship of Lst ≧ Lmg, at least a part of the movable table has a length substantially equal to the linear motor stroke Lst. A long portion formed in the traveling direction is formed, and a magnetic pole detector magnet for detecting a relative position between the armature and the magnet is fixed to the long portion at the same pitch as the magnet. It is characterized by that.
According to a third aspect of the present invention, there is provided a moving magnet type linear slider, a plurality of armatures, two linear guides sandwiching the armatures and extending in a traveling direction in parallel, and the guide rails of the armature and the linear guides Fixed on the guide block of the linear guide, and a fixed base that fixes the armature, a plurality of magnets that are disposed to face the armature through a gap, and that have a length shorter than the thrust length of the armature. A moving magnet type linear slider comprising a movable table that lays a plurality of magnets at intervals in a traveling direction, the center axis of the span of the two linear guides, and the thrust center of the armature The shaft is arranged and fixed so as to be on the same axis, and the armature traveling direction total length La to the magnet traveling direction total length Lm In the moving magnet type linear slider having the relationship of Lst ≧ Lmg, where the difference obtained by subtracting is the linear motor stroke Lst, the movable table has a length substantially equal to the linear motor stroke Lst in the traveling direction. Two long portions are formed in a plan view on both sides with the movable table in between, and a linear scale scale portion is fixed to one long portion, and the other long portion is fixed to the other long portion. Is characterized in that a magnetic pole detector magnet of a magnetic pole detector for detecting a relative position between the armature and the magnet is fixed at the same pitch as the magnet.
According to a fourth aspect of the present invention, in the moving magnet type linear slider according to the third aspect, the length of the linear guide rail in the traveling direction Llg is the length of the movable table in the traveling direction Lt and the stroke of the linear motor is Lst. Then, Llg> Lt + Lst.
According to a fifth aspect of the present invention, in the moving magnet type linear slider according to the third aspect of the present invention, the stoppers that respectively contact the concave portions of the “E” -shaped structure are fixed to the fixed base at the forefront and rearmost ends in the traveling direction. It is characterized by that.
According to a sixth aspect of the present invention, in the moving magnet type linear slider according to the fifth aspect, a linear scale head that is paired with the scale portion is fixed to the fixed base side through a gap.
A seventh aspect of the present invention is the moving magnet type linear slider according to the sixth aspect of the present invention, wherein a hall element paired with the field magnet is fixed to the fixed base side through a gap.
The invention according to claim 8 is the moving magnet type linear slider according to claim 7, wherein the magnetic pole detection signal detected by the Hall element and the linear scale signal detected by the linear scale head are connected to the same serial converter. Both are converted to a serial signal and transmitted to the drive driver.
According to a ninth aspect of the present invention, in the moving magnet type linear slider according to the eighth aspect, the serial converter is incorporated in the linear scale head.
According to a tenth aspect of the present invention, in the moving magnet type linear slider according to the eighth or ninth aspect, a memory is provided in the linear scale head or the serial converter, and motor parameters of the linear motor are input to the memory. When the slider and the drive driver are connected, this motor parameter is also converted into a serial signal by the serial signal conversion circuit, and the signal is transmitted to the drive driver.
The eleventh aspect of the present invention is the moving magnet type linear slider according to any one of the first to tenth aspects, wherein the linear scale is of an absolute type system that detects an absolute position signal on the movable side of the linear motor. It is equipped with it.
A twelfth aspect of the present invention is the moving magnet type linear slider according to any one of the first to eleventh aspects, wherein the armature comprises a core that forms a magnetic circuit and a coil that winds the core. It is characterized by.

With the above configuration, the driving tact (frequency) of the movable table can be improved even under the condition of linear stroke Lst ≧ field magnet Lmg, and the running accuracy of the linear motor can be improved. Equipment productivity can be improved.
In addition, a magnetic pole detector that detects the relative position of the armature and the field magnet is arranged on the opposite side of the linear scale. The Hall element side is on the fixed base side, and the magnetic pole detector has the same pitch as the field magnet. By arranging and fixing the magnet on the movable table side, the stroke direction dimension is shortened, and the motor power line and the lead of the magnetic pole detector are made independent so that noise resistance can be improved.
In addition, by attaching the magnetic pole detector, the relative position between the linear armature and the field magnet can be detected immediately when the servo is turned on, and the setup can be simplified.
Furthermore, motor parameters are also serially transmitted, so that motor constant information, etc. is stored in advance in a linear slider, and motor parameter information is input to the driver side when connected to the drive driver. In this case, even if the drive driver is replaced with another, it can be immediately restored to the same state as before.
By making the signal output form of the linear scale an absolute signal, the origin return operation is not required when the power is turned on, and the origin return operation is suitable for applications such as a machine tool that affects the machining accuracy.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

1A and 1B are diagrams showing a moving magnet type linear slider according to the present invention, wherein FIG. 1A is a side view and FIG. 1B is a plan view.
In the figure, 11 is a fixed base, 12 is a linear armature, and 13 is a linear guide. When the linear armature 12 is disposed on the fixed base 11 so that the core gap surface thereof faces upward, and is fixed to the guide rail 13a of the linear guide 13 parallel to sandwich the linear armature 12, the center axis of the linear guide span The linear armature is arranged and fixed so that the thrust central axis is on the same axis.
The field magnet 14 is disposed and fixed on a movable table 15 fixed to the guide block 13 b of the linear guide 13.
At this time, when the length Lmg obtained by subtracting the total length in the traveling direction of the field magnet 14 from the total length La of the linear armature 12 is defined as the stroke Lst of the linear motor,
Lst ≧ Lmg
The length of the table shape is approximately equal to the linear stroke Lst, and the front and rear portions near the central axis are the portions excluding the linear guide block fixing portion space and the field magnet 14 mounting space. It has a deleted “E” shape. That is, the movable table 15 has a length that is substantially equal to the linear motor stroke Lst in the traveling direction at least at a part thereof (in the case of FIG. 1B, the upper and lower ends of the wave table 15). A portion (in the case of FIG. 1B, an upper and lower horizontal bar portion of “E” shape) 10 is formed, and a scale portion 17 of a linear scale is fixed to the long portion 10.
Further, the rail length Llg of the linear guide 13 is Lt as the table length in the moving direction of the mover and Lst as the stroke of the linear motor.
Llg> Lt + Lst
It has become.
Then, stoppers that abut against the concave portions are arranged at the front and rear sides and fixed to the fixed base 11, and the scale portion of the linear scale is fixed to one side surface of the letter E shape.
Further, the linear scale head 16 paired with this is fixed to the fixed base 11 side through a gap,
Linear stroke Lst ≧ Field magnet Lmg
Even under these conditions, the linear scale lead 19 and the motor lead 20 are arranged on the fixed side.
A stroke end stopper 18 that combines the stopper function and the conveyance handle function is fixed to the stator base 11 at the front and rear ends of the linear armature 12 so as to fit into the concave portion of the movable table 15 having the "E" shape. Has been.
The moving magnet type linear slider according to the first embodiment of the present invention is different from that described in Patent Document 1 in that linear stroke Lst ≧ field magnet Lmg
Even if the relationship becomes, the scale part of the linear scale is fixed to the movable table side, and the scale head side is fixed to the fixed base side. It is a point that the block span between front and rear is widened.

  As shown in FIG. 2, the signal detection operation of the moving magnet type linear slider according to the first embodiment of the present invention includes a linear scale signal, a magnetic pole signal, and a serial conversion circuit 22 in the linear scale head 16, as shown in FIG. The motor parameters stored in the memory IC 23 are converted into serial data and communicated to the drive driver for transmission. Large-capacity transmission is possible compared to conventional pulse transmission, so a high-speed, high-resolution linear drive system As a result, the minimum positioning resolution can be improved 10 times as compared with the conventional pulse train transmission.

3A and 3B are diagrams showing a moving magnet type linear slider according to a second embodiment of the present invention, wherein FIG. 3A is a side view and FIG. 3B is a plan view.
In the figure, the same reference numerals as those in FIG.
26 is a magnet for a magnetic pole detector, 27 is a magnetic pole detector head, and 28 is a magnetic pole detector lead. In this way, a magnetic pole detector system for detecting the relative position of the linear armature 12 and the field magnet 14 is arranged on the side opposite to the linear scale 17 of the slider, and the magnetic pole detection head 27 in which the Hall element is provided. The magnetic pole detector magnet 26 having the same pitch as the field magnet 14 is arranged on the movable table 15 side, and the magnetic pole detection signal is supplied to the linear scale signal via the magnetic pole detector lead 28. Are connected to the same serial converter 22 and both are converted into serial signals and connected to the drive driver 44 for transmission.

In this way, the "E" shaped movable table shape and the stopper shape that fits into this, the overlapping part can secure the fixed space of the scale part of the linear scale. The head part and the magnetic pole detection head can be arranged and fixed on the fixed base side, and the scale part and the magnet for the magnetic pole detector can be arranged and fixed on the movable table side.
In addition, the linear guide blocks can be arranged and fixed at the four corners of the "E" shaped movable table, so that the block span between the front and rear of the linear guide can be widened.

FIGS. 4A and 4B are diagrams showing a moving coil type linear slider according to a third embodiment of the present invention, in which FIG. 4A is a plan view and a three-side view, and FIG. 4B is a view of a permanent magnet unit fixed to a mover. It is a top view.
In the figure, 11 is a fixed base, 12 is a coreless armature, and 13 is a linear guide. 3 is different from FIG. 3 in that the armature is a cored armature in FIG. 3 but is a coreless armature.
Thus, when the coreless armature 12 is arranged on the fixed base 11 as shown in the figure, and the guide rail 13a of the linear guide 13 parallel to sandwich the coreless armature 12 is fixed to the fixed base 11, the central axis of the linear guide span, The linear armature is arranged and fixed so that the thrust central axis is on the same axis. The field magnet 14 is arranged and fixed on a movable table 15 fixed to the guide block 13 b of the linear guide 13.
The attachment of the linear scale has a structure in which the scale (detection) head 16 side is fixed to the fixed base 11 and the scale 17 side is fixed to the movable table 15 side. In addition, the stroke end stopper 18 is fixed to the stator base 11 at the front and rear ends of the linear armature 11.
A magnetic pole detector for detecting the relative position of the linear armature 12 and the field magnet 14 is arranged on the side opposite to the linear scale, and the magnetic pole detector head 27 provided with the Hall element is connected to the fixed base 11 side. The magnetic pole detector magnet 26 having the same pitch as the field magnet is arranged and fixed on the movable table 15 side. This magnetic pole detection signal is converted into a serial signal by the serial converter 22 together with the scale signal output from the linear scale head. Then, it is connected to the drive driver 24 and transmitted by communication.
In this way, by arranging the magnetic pole detector on the side of the linear slider, the stroke is not sacrificed as in the prior art, and it is compact and the moving magnet type linear that can make the stroke maximum as long as possible. It is a slider.
The moving coil type linear slider according to the third embodiment of the present invention is different from that described in Patent Document 2 in that the magnetic pole detector is separately provided.

  Since the operation of the serial converter 22 has been described with reference to FIG. 2, repeated explanation is omitted, but the conclusion is that the serial conversion circuit 22 in the linear scale head or a separate serial converter has the linear scale signal, The motor parameters stored in the memory IC 23 are serially converted and transmitted to the driver side by communication, enabling large capacity transmission compared to conventional pulse transmission. Therefore, a high-speed and high-resolution linear drive system is available. As a result, the minimum positioning resolution can be improved 10 times as compared with the conventional pulse train transmission.

FIG. 5 is a diagram showing a moving coil type linear slider according to a fourth embodiment of the present invention. This is an optional specification when used for the gravity axis, but a gravity compensation spring 30 is provided to prevent the fall when the power is off.
Thus, a compact gravity axis slider is realized by using the empty space for the arrangement of the gravity compensation spring.
Also, by providing the linear scale head with the motor parameter storage memory IC and serial conversion circuit, a high-speed and high-resolution linear drive system becomes possible. Even if it is replaced, it is possible to immediately return to the same state as before.

High tact (frequency) operation is possible by using a structure that does not use a member having a lead wire on the movable side. Therefore, it is required for high-speed response and is used as a bonder for semiconductor device manufacturing equipment with high drive duty. Applicable.
In addition, the structure in which the magnetic pole detector is provided without sacrificing the stroke as described above makes it possible to increase the ratio of the stroke length to the total length of the linear slider by 20% to 30% compared to the conventional technology, and to reduce the gravity. This linear slider can be applied to a gravitational axis drive application by using a structure in which a compensation spring can be provided.

It is a figure which shows the moving magnet type | mold linear slider which concerns on this invention, (a) is a side view, (b) is a top view. It is a figure which shows the structure of the linear scale head or serial converter which this invention employ | adopts. It is a figure which shows the moving magnet type | mold linear slider which concerns on 2nd Example of this invention, (a) is a side view, (b) is a top view. It is a figure which shows the moving coil type | mold linear slider which concerns on the 3rd Example of this invention, (a) is the top view and three views, (b) is a top view by the side of the permanent magnet unit fixed to the needle | mover. . It is a figure which shows the moving coil type | mold linear slider which concerns on the 4th Example of this invention. It is a figure which shows the moving magnet type | mold linear slider of patent document 1, (a) is a side view, (b) is a top view. It is a figure which shows the moving magnet type | mold linear slider of patent document 2, (a) is a top view, (b) is a top view of a board | substrate part, (c) is a top view by the side of the permanent magnet unit fixed to the needle | mover. It is.

Explanation of symbols

11: fixed base 12: linear armature 13: linear guide 13a: guide rail 13b: guide block 14: field magnet 15: movable table 16: linear scale head portion 17: scale portion 18: stopper 19: motor lead 20: linear Scale cable lead 22: Serial conversion circuit 23: Memory IC
24: Drive driver 25: Scale holder 26: Magnet for magnetic pole detector 27: Magnetic pole detector head 28: Magnetic pole detector lead 30: Spring for gravity compensation 31: Fixed base 32: Linear armature 33: Linear guide 33a: Guide rail 33b : Guide block 34: Field magnet 35: Movable table 36: Linear scale head part 37: Scale part 38: Stopper 39: Motor lead 40: Linear scale cable lead 44: Drive driver 45: Scale holder

Claims (12)

An armature comprising a plurality of coils, two linear guides extending in parallel with the armature interposed therebetween, a fixed base for fixing the armature and a guide rail of the linear guide, and the armature A plurality of magnets arranged opposite to each other through a gap and having a size shorter than the thrust length of the armature, and fixed on the guide block of the linear guide, and the plurality of magnets are moved away from each other. A moving magnet type linear slider having a movable table laid in a direction, and arranged so that a center axis of a span of the two linear guides and a thrust center axis of the armature are on the same axis The linear motor stroke Lst is a difference obtained by subtracting the total length Lmg of the magnet in the traveling direction from the total length La of the armature in the traveling direction. When, in the moving magnet type linear slider become Lst ≧ Lmg, relationship,
The movable table is formed with a long portion having a length substantially equal to the linear motor stroke Lst in the traveling direction at least at a part thereof, and the scale portion of the linear scale is fixed to the long portion. Moving magnet type linear slider characterized by that. An armature comprising a plurality of coils, two linear guides extending in parallel with the armature interposed therebetween, a fixed base for fixing the armature and a guide rail of the linear guide, and the armature A plurality of magnets arranged opposite to each other through a gap and having a size shorter than the thrust length of the armature, and fixed on the guide block of the linear guide, and the plurality of magnets are moved away from each other. A moving magnet type linear slider having a movable table laid in a direction, and arranged so that a center axis of a span of the two linear guides and a thrust center axis of the armature are on the same axis The linear motor stroke Lst is a difference obtained by subtracting the total length Lmg of the magnet in the traveling direction from the total length La of the armature in the traveling direction. When, in the moving magnet type linear slider become Lst ≧ Lmg, relationship,
The movable table is formed with a long portion having a length substantially equal to the linear motor stroke Lst in the advancing direction at least at a part thereof, and the long portion has a relative position between the armature and the magnet. A moving magnet type linear slider characterized in that a magnet for a magnetic pole detector of a magnetic pole detector for detecting a position is fixed at the same pitch as the magnet. A plurality of armatures; two linear guides extending in parallel with the armature sandwiched therebetween; a fixed base that fixes the armature and a guide rail of the linear guide; and the armature and the gap A plurality of magnets arranged opposite to each other and having a size shorter than the thrust length of the armature, and fixed on the guide block of the linear guide and spaced apart from each other in the traveling direction. A moving magnet type linear slider having a movable table to be laid, wherein the central axis of the span of the two linear guides and the thrust central axis of the armature are arranged and fixed on the same axis. When the difference obtained by subtracting the total length Lmg in the traveling direction of the magnet from the total length La in the traveling direction of the armature is a linear motor stroke Lst, st ≧ Lmg, in a moving magnet type linear slider to become of the relationship,
On the movable table, two long portions having a length approximately equal to the linear motor stroke Lst are formed in the traveling direction are formed in an “E” shape in plan view on both sides with the movable table sandwiched between the two portions. A scale part of a linear scale is fixed to one long part, and a magnetic pole detector magnet for detecting a relative position between the armature and the magnet is fixed to the other long part at the same pitch as the magnet. Moving magnet type linear slider characterized by being fixed. The length Llg of the linear guide rail in the traveling direction is Lt as the length of the movable table in the traveling direction, and Lst as the stroke of the linear motor.
Llg> Lt + Lst
The moving magnet type linear slider according to claim 3, wherein   4. The moving magnet type linear slider according to claim 3, wherein stoppers that respectively contact the concave portions of the "E" -shaped structure are fixed to the fixed base at the forefront and rearmost ends in the advancing direction.   6. The moving magnet type linear slider according to claim 5, wherein a linear scale head paired with the scale portion is fixed to the fixed base side through a gap.   7. The moving magnet type linear slider according to claim 6, wherein a Hall element paired with the field magnet is fixed to the fixed base side through a gap.   The magnetic pole detection signal detected by the Hall element and the linear scale signal detected by the linear scale head are connected to the same serial converter, and both are converted into a serial signal and transmitted to the drive driver. Item 8. A moving magnet type linear slider according to Item 7.   9. The moving magnet type linear slider according to claim 8, wherein the serial converter is incorporated in the linear scale head.   When the linear scale head or the serial converter is provided with a memory, the motor parameter of the linear motor is input to the memory, and the linear slider and the drive driver are connected, the motor parameter is also the serial signal conversion circuit. 10. The moving magnet type linear slider according to claim 8, wherein the moving magnet type linear slider is converted into a serial signal and transmitted to a drive driver.   11. The moving magnet type linear slider according to claim 1, wherein an absolute type system for detecting an absolute position signal on the movable side of the linear motor is mounted on the linear scale.   The moving magnet type linear slider according to any one of claims 1 to 11, wherein the armature includes a core that forms a magnetic circuit and a coil that winds the core.

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