JP7321492B2 - wire bonding equipment - Google Patents

Description

The present invention relates to wire bonding equipment.

Patent Literature 1 discloses a wire bonding apparatus. A wire bonding apparatus has a capillary, which is a bonding tool. A wire bonding apparatus connects a wire to an electrode by applying heat, ultrasonic vibration, or the like to the wire using the capillary.

JP 2018-6731 A

In an electronic device manufacturing factory, a plurality of manufacturing apparatuses are operated to manufacture a large number of electronic devices. Increasing the number of manufacturing equipment can increase production numbers. On the other hand, manufacturing equipment requires various maintenance operations. As a result, maintenance work is required for the number of manufacturing apparatuses. Therefore, the increase in production volume and the load of maintenance work are in conflict with each other. Therefore, if maintenance work can be performed automatically without manual intervention by workers, the load of maintenance work can be reduced.

The wire bonding apparatus has capillary replacement work as one of the above maintenance work. Therefore, in the technical field, there is a demand for automation of capillary replacement work, specifically automation of work for attaching a new capillary to a wire bonding apparatus after the used capillary has been removed.

SUMMARY OF THE INVENTION In view of the above background, an object of the present invention is to provide a wire bonding apparatus capable of automating the work of attaching a novel capillary to the wire bonding apparatus.

A wire bonding apparatus according to one aspect of the present invention includes a capillary holding portion that detachably holds a capillary, and a wire bonding device that extends in a predetermined direction so that the capillary held by the capillary holding portion is inserted into a capillary holding hole of a bonding tool. an actuator for moving a capillary holding part holding a capillary along a capillary guide; a capillary guide part disposed between the capillary holding part and the bonding tool for guiding the capillary to the capillary holding hole as the capillary holding part moves; and the capillary holding portion has a capillary base portion fixed to the actuator and a flexible portion holding the position of the capillary relative to the capillary base portion so as to be relatively displaceable.

In this wire bonding apparatus, the capillary held by the capillary holding portion is inserted into the capillary holding hole while being guided by the capillary guide portion. Therefore, even if the capillary is misaligned with respect to the capillary holding hole, the misalignment is corrected by the capillary guide portion. Furthermore, the capillary holding section holds the position of the capillary relatively displaceably with respect to the capillary base section fixed to the actuator. As a result, in addition to the displacement of the capillary with respect to the capillary holding hole, even when the capillary guide part is displaced with respect to the capillary holding hole, the posture of the capillary is changed so that the capillary follows the capillary guide part and the capillary holding hole. It can be inserted while Therefore, the new capillary can be automatically attached to the wire bonding apparatus without manual intervention by the operator.

In the wire bonding apparatus according to one aspect, the actuator has a base portion and a moving body arranged on the base portion, to which the capillary holding portion is attached, for moving the capillary holding portion, and the capillary guide portion is , may be fixed to the base. With this configuration, it is possible to easily maintain the relative positional relationship between the capillary holding portion and the capillary guide portion that are moved by the actuator. Therefore, the capillary can be reliably attached to the bonding tool by the capillary guide.

In the wire bonding apparatus according to one aspect, the flexible section has an elastic section with one end fixed to the capillary base section, and a restraining section provided at the other end of the elastic section for restraining the capillary. good too. According to this configuration, the elastic portion can be elastically deformed on the basis of the capillary base portion. A restraining portion is provided at the other end of the elastic portion, and the restraining portion restrains the capillary. Therefore, the relative position of the capillary with respect to the capillary base portion can be displaced by the elastic portion. Therefore, the capillary can be attached to the bonding tool more reliably.

In the wire bonding apparatus according to one aspect, the restraining portion may be in line contact with the tapered surface of the capillary. According to this configuration, the restraint section can allow the inclination of the capillary to be held. Therefore, the posture of the capillary can be changed more flexibly, so that the capillary can be more reliably attached to the bonding tool.

In the wire bonding apparatus according to one aspect, the restraining portion may be a torus-shaped O-ring, and the elastic portion may be a coil spring. According to this configuration, the capillary holding portion can be configured with a simple configuration.

In the wire bonding apparatus according to one aspect, the capillary holding section includes a tube including an upper opening edge as a restraining section and a body section as an elastic section, a cap closing the lower end of the tube, and a lower end closed by the cap. and a cylindrical pipe that houses the tube, the pipe having higher rigidity than the tube, and a gap may be provided between the inner peripheral surface of the pipe and the outer peripheral surface of the tube. According to this configuration, it is possible to change the attitude of the capillary by means of the tube. Furthermore, since the pipe exists outside the tube, the displacement of the capillary can be kept within the allowable range by the pipe. Therefore, the capillary can be reliably attached to the bonding tool.

A bonding apparatus according to another aspect includes a capillary holding portion that detachably holds a capillary, and a capillary held by the capillary holding portion along a predetermined direction such that the capillary is inserted into a capillary holding hole of a bonding tool. and a capillary guide disposed between the capillary holder and the bonding tool for guiding the capillary to the capillary holding hole as the capillary holder moves, The capillary guide part is provided with a guide hole for guiding the capillary to the capillary holding hole, and the capillary guide part provides a force in a direction intersecting the axis of the guide hole to the capillary inserted into the guide hole. It has a biasing member.

According to this configuration, the capillary is guided in a predetermined direction while being pressed against the wall surface of the capillary guide portion by the biasing member. As a result, the capillary can move in a stable state without tilting, so that the capillary can be more reliably guided to the capillary holding hole of the bonding tool.

In the bonding device according to another aspect, the guide hole includes a first hole and a second hole arranged along the insertion direction of the capillary, and the first hole has a smaller diameter in the insertion direction. The second hole may be arranged coaxially with the capillary holding hole and guide the capillary along the axis of the capillary holding hole. With this configuration, the capillary can be more reliably guided to the capillary holding hole.

In the bonding apparatus according to another aspect, the capillary guide portion includes a tapered portion formed with the first hole and a guide portion formed with the second hole, and the biasing member is provided in the guide portion. may have been With this configuration, the capillary can be more reliably guided to the capillary holding hole.

ADVANTAGE OF THE INVENTION According to this invention, the wire bonding apparatus which can automate the work which attaches a novel capillary to a wire bonding apparatus is provided.

1 is a perspective view showing a wire bonding apparatus according to an embodiment; FIG. FIG. 2 is an enlarged perspective view of a capillary replacement part of the wire bonding apparatus shown in FIG. FIG. 3 is a perspective view showing a cross section of a part of the capillary holder. FIG. 4 is a diagram for explaining the operation of the capillary holder. FIG. 5 is a perspective view showing a cross section of a part of the capillary guide. FIG. 6 is a diagram showing a capillary guide function performed by a capillary holding portion and a capillary guide portion. FIG. 7 is a diagram showing another capillary guide function performed by the capillary holding portion and the capillary guide portion. 8 is a plan view showing a main part of an actuator included in the capillary replacement part shown in FIG. 2. FIG. FIG. 9 is a diagram for explaining the operating principle of the actuator. FIG. 10 is a diagram for explaining specific control of the actuator. FIG. 11 is a diagram for explaining specific control of the actuator. FIG. 12 is a diagram showing main operations of the capillary exchange unit. FIG. 13 is a diagram showing the main operations of the capillary exchange section following FIG. FIG. 14 is a diagram showing the main operations of the capillary exchange section following FIG. 13; FIG. 15 is a diagram showing the main operations of the capillary exchange unit following FIG. 14; FIG. 16 is a perspective view showing a cross section of a capillary holding portion according to a modification. FIG. 17 is a perspective view showing a capillary guide according to another modification. 18 is a front view of the capillary guide shown in FIG. 17. FIG. 19 is a plan view of the capillary guide shown in FIG. 17. FIG.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments for carrying out the present invention will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and overlapping descriptions are omitted.

A wire bonding apparatus 1 shown in FIG. 1 electrically connects, for example, an electrode of a printed circuit board and an electrode of a semiconductor element provided on the printed circuit board using a thin metal wire. The wire bonding apparatus 1 applies heat, ultrasonic waves or pressure to the wire to connect the wire to the electrode. The wire bonding apparatus 1 has a base 2, a bonding section 3 for the connection work, and a transport section 4 for transporting a printed circuit board, which is a component to be processed, to a bonding area.

The bonding section 3 includes a bonding tool 6 , and an ultrasonic horn 7 is provided at the tip of the bonding tool 6 . At the tip of this ultrasonic horn 7, a capillary 8 for applying heat, ultrasonic waves or pressure to the wire is detachably provided.

In the following description, the direction in which the ultrasonic horn 7 extends is defined as the X-axis, the direction in which the printed circuit board is transported by the transport section 4 is defined as the Y-axis (second direction), and the direction in which the capillary 8 moves during the bonding operation. (Z-axis direction, first direction) is defined as the Z-axis.

The capillary 8 is a component that requires periodic replacement. Therefore, the wire bonding apparatus 1 has a capillary exchange section 9 that automatically exchanges the capillary 8 without intervention by the operator.

The capillary exchange unit 9 recovers the capillary 8 attached to the ultrasonic horn 7 and attaches the capillary 8 to the ultrasonic horn 7 . That is, the work of exchanging the capillary 8 includes the work of recovering the capillary 8 and the work of mounting the capillary 8 . This replacement work of the capillary 8 is automatically carried out when preset conditions are satisfied. For example, the condition may be the number of bonding operations. That is, each time the bonding work is performed a predetermined number of times, the work of exchanging the capillary 8 may be performed.

As shown in FIG. 2, the capillary exchange section 9 has a capillary holding section 11, a capillary guide section 12, and an actuator 13 as main components. Moreover, as an additional component, it has an attachment/detachment jig 15 and a jig driving section 20 for driving the attachment/detachment jig 15 .

<Capillary holding part>
The capillary holding part 11 holds the capillary 8 . The capillary holding part 11 is attached to the actuator 13 via the holder 14 . The capillary holding portion 11 has a columnar shape extending in the Z-axis direction. A lower end of the capillary holding portion 11 is held by a holder 14 . A capillary 8 is detachably inserted into the upper end of the capillary holding portion 11 .

As shown in FIG. 3, the capillary holding portion 11 includes, as main components, an upper socket 16, a coil spring 17 (elastic portion), a lower socket 18 (capillary base portion), and an O-ring 19 (restraining portion). , has The upper socket 16, coil spring 17 and lower socket 18 are arranged on a common axis. Specifically, the upper socket 16, the coil spring 17, and the lower socket 18 are arranged in this order from the top.

The upper socket 16 has a substantially cylindrical shape and has a through hole 16h extending from the upper end surface 16a to the lower end surface 16b. Since the upper socket 16 holds the tapered surface 8 a of the capillary 8 , the inner diameter of the through hole 16 h corresponds to the outer diameter of the tapered surface 8 a of the capillary 8 . For example, the inner diameter of the through hole 16h is smaller than the outer diameter of the capillary body 8b. A counterbore 16c for the O-ring 19 is provided on the upper end surface 16a side of the through hole 16h. The counterbore portion 16c has a dimension that allows the O-ring 19 to be accommodated therein. That is, the counterbore 16 c has a depth approximately equal to the height of the O-ring 19 and an inner diameter approximately equal to the outer diameter of the O-ring 19 .

The O-ring 19 has a so-called torus shape. The O-ring 19 is in direct contact with the tapered surface 8a of the capillary 8. That is, the O-ring 19 holds the capillary 8 in the capillary holding portion 11 . This holding is made by an adhesive layer formed on the surface of the O-ring 19 . The inner diameter of the O-ring 19 is approximately the same as the inner diameter of the through hole 16h, and the tapered surface 8a of the capillary 8 is inserted therein.

Furthermore, since the upper socket 16 has a step 16d provided on the outer peripheral surface, the outer diameters of the upper end surface 16a side and the lower end surface 16b side are different. Specifically, the outer diameter on the lower end surface 16b side is slightly smaller than the outer diameter on the upper end surface 16a side. A coil spring 17 is fitted in the small diameter portion 16e on the side of the lower end surface 16b.

The lower socket 18 has a substantially cylindrical shape. The lower socket 18 faces the lower end surface 16b of the upper socket 16 at its upper end surface 18a. The lower socket 18 has the same outer shape as the upper socket 16 . That is, the lower socket 18 is also provided with a step 18d on its outer peripheral surface. Contrary to the upper socket 16, the lower socket 18 has a small diameter portion 18e on the side of the upper end surface 18a. A coil spring 17 is also fitted in the small diameter portion 18e on the upper end surface 18a side. A large-diameter portion 18 f of the lower socket 18 on the lower end surface 18 b side is held by the holder 14 .

Coil spring 17 is a compression spring. The upper end of the coil spring 17 is fitted into the small diameter portion 16 e of the upper socket 16 , and the lower end of the coil spring 17 is inserted into the small diameter portion 18 e of the lower socket 18 . The upper socket 16 and coil spring 17 constitute the flexible portion 10 . Therefore, the upper socket 16 and the lower socket 18 are connected by the coil spring 17 . The coil spring 17 has elasticity in the direction of the axis 17A and the direction crossing the axis 17A. As a result, the upper socket 16 can change its position relative to the lower socket 18 .

The capillary holding part 11 having the above configuration has a holding mode shown in FIG. Part (a) of FIG. 4 shows the capillary holding part 11 in the initial mode. Part (b) of FIG. 4 shows the capillary holding portion 11 in the first modification. Part (c) of FIG. 4 shows the capillary holding part 11 in the second modification.

As shown in part (a) of FIG. 4, in the capillary holding portion 11 according to the first holding mode, the axes 16A and 18A of the upper socket 16 and the lower socket 18 overlap. Furthermore, the axis 8A of the capillary 8 also overlaps with the axes 16A and 18A.

As shown in part (b) of FIG. 4, in the capillary holding portion 11 according to the second holding mode, the axes 16A and 18A of the upper socket 16 and the lower socket 18 do not overlap. Specifically, the upper socket 16 moves in the X-axis and Y-axis directions with respect to the lower socket 18 held by the holder 14 and maintaining its position. In this state, the axis 16A of the upper socket 16 is parallel to the axis 18A of the lower socket 18.

As shown in part (c) of FIG. 4, in the capillary holding part 11 according to the third modification, the axes 16A and 18A of the upper socket 16 and the lower socket 18 overlap. That is, these configurations are the same as in the first holding mode. On the other hand, the axis 8A of the capillary 8 is inclined with respect to the axis 16A of the upper socket 16. As shown in FIG. Since the O-ring 19 has a torus shape, the inner peripheral surface into which the tapered surface 8a of the capillary 8 is inserted is a curved surface. For example, the cross-sectional shape of the O-ring 19 in a cross section parallel to the Z-axis is circular. Then, when the tapered surface 8a is inserted into the O-ring 19 in a cross-sectional view, the O-ring 19 and the tapered surface 8a come into contact with each other at two contact portions C1 and C2. That is, the O-ring 19 and the capillary 8 are in line contact at the annular contact line CL (see FIG. 3). is. According to such a contact state, inclination of the capillary 8 with respect to the axis 19A of the O-ring 19 is allowed.

<Capillary Guide>
As shown in FIG. 2 again, the capillary guide portion 12 guides the capillary 8 when the capillary 8 is inserted into the hole 7h (capillary holding hole) of the ultrasonic horn 7 . The capillary guide portion 12 is provided on the actuator 13 . Therefore, the relative positional relationship between the capillary guide portion 12 and the parts constituting the actuator 13 is preserved. The capillary guide portion 12 has a cantilever shape extending from the actuator 13 toward the ultrasonic horn 7 .

FIG. 5 is a cross-sectional perspective view of the main portion of the capillary guide portion 12. As shown in FIG. As shown in FIG. 5, the capillary guide portion 12 has a guide hole 12h provided at its free end. The guide hole 12 h receives the capillary body 8 b of the capillary 8 and guides the capillary 8 to the hole 7 h of the ultrasonic horn 7 . The guide hole 12h is a through hole extending from the upper surface 12a of the capillary guide portion 12 to the lower surface 12b. The guide hole 12h is also opened to the front end surface 12c of the capillary guide portion 12. As shown in FIG. That is, the guide hole 12h can receive the capillary 8 from the lower surface 12b and the front end surface 12c.

The guide hole 12h includes a tapered hole portion 12t and a parallel hole portion 12p. The tapered hole portion 12t has its lower end opened to the lower surface 12b. The parallel hole portion 12p opens at its upper end to the upper surface 12a. The inner diameter of the tapered hole portion 12t on the lower surface 12b is larger than the inner diameter of the parallel hole portion 12p on the upper surface 12a. This inner diameter is greater than the outer diameter at the upper end of capillary 8 . That is, the inner diameter of the guide hole 12h gradually decreases from the lower surface 12b toward the upper surface 12a, and the inner diameter reaches its minimum value at the position where the tapered hole portion 12t and the parallel hole portion 12p are connected. This inner diameter is approximately the same as the outer diameter at the upper end of the capillary 8 . The inner diameter of the parallel hole portion 12p is constant.

FIG. 6 shows how the capillary 8 is guided by the capillary guide portion 12 . In the state shown in part (a) of FIG. 6, the axis 7A of the hole 7h of the ultrasonic horn 7 and the axis 12A of the guide hole 12h of the capillary guide portion 12 overlap. On the other hand, the axis 8A of the capillary 8 held by the capillary holding portion 11 is deviated parallel to the X-axis direction with respect to the axes 7A and 12A.

From the state shown in part (a) of FIG. 6, the capillary holder 11 is moved in the Z-axis direction. Then, as shown in part (b) of FIG. 6, first, the upper end of the capillary 8 comes into contact with the wall surface of the tapered hole portion 12t. When the capillary holding portion 11 is further moved upward, the capillary 8 moves along the wall surface. This movement includes a horizontal component (X-axis direction) in addition to an upward component (Z-axis direction). The upper socket 16 of the capillary holding part 11 can move with respect to the lower socket 18 by means of the coil spring 17 . That is, when the lower socket 18 is moved upward, the upper socket 16 is also moved horizontally by the coil spring 17 while moving upward.

According to this movement, the axis 8A of the capillary 8 gradually approaches the axis 7A of the hole 7h. When the upper end of the capillary 8 reaches the parallel hole portion 12p, the axis 8A of the capillary 8 overlaps the axis 7A of the hole 7h. Accordingly, the capillary 8 is inserted into the hole 7h of the ultrasonic horn 7. As shown in FIG.

In the example shown in part (a) of FIG. 6, the positional relationship between the ultrasonic horn 7 and the capillary guide portion 12 is ideal. On the other hand, in the example shown in part (a) of FIG.

The operation of inserting the capillary 8 in such a state will be described. As shown in part (b) of FIG. 7, the axis 8A of the capillary 8 is relatively inclined with respect to the axis 7A of the hole 7h. Therefore, since the upper end of the capillary 8 contacts the wall surface of the hole 7h, the capillary 8 cannot be inserted into the hole 7h any further. Furthermore, in order to insert the capillary 8 into the hole 7h, it is necessary to make the axis 8A of the capillary 8 parallel to the axis 7A of the hole 7h and overlap the axis 7A with the axis 8A.

As described above, the capillary holder 11 allows the upper socket 16 to be displaced with respect to the lower socket 18, and further allows the capillary 8 to be tilted with respect to the axis 16A of the upper socket 16. FIG. According to these actions, as shown in part (c) of FIG. 7, as the capillary holding portion 11 is raised, the axis 8A of the capillary 8 gradually approaches the axis 7A of the hole 7h, and finally 7h can be stabbed. In other words, since the capillary holding portion 11 flexibly holds the capillary 8, the displacement between the capillary 8 and the capillary guide portion 12 and the displacement between the capillary 8 and the hole 7h of the ultrasonic horn 7 can be absorbed. . Therefore, with the capillary holding portion 11 and the capillary guide portion 12, the capillary 8 can be securely mounted.

<Actuator>
The actuator 13 moves the capillary 8 to be replaced or the new capillary 8 and holds the capillary 8 at a predetermined position and orientation. The actuator 13 is capable of reciprocating movement along a predetermined translational axis (Z-axis). In this embodiment, the translational axis is along the vertical direction (Z-axis). Therefore, the actuator 13 moves the capillary 8 up and down in the vertical direction. Further, the actuator 13 is rotatable around the rotation axis (X-axis). In this embodiment, the rotation axis is orthogonal to the vertical direction (Z-axis). That is, the axis of rotation is along the horizontal direction (X-axis). Actuator 13 thus rotates capillary 8 around the horizontal direction.

The actuator 13 includes an actuator base 21 (base portion), a pair of linear motors 22A and 22B (first force generating portion and second force generating portion), a linear guide 24, a carriage 26 (moving body), and a control device. 27 (control unit, see FIG. 1, etc.).

The actuator base 21 has a flat plate shape and has a main surface 21a. The normal direction of the main surface 21a is along the horizontal direction (X-axis direction). Linear motors 22A and 22B, a linear guide 24 and a carriage 26 are arranged on the main surface 21a.

A linear motor 22A moves the carriage 26 . The linear motor 22A is an ultrasonic motor based on the so-called impact drive system. The linear motor 22A has a drive shaft 28A and an ultrasonic element 29A (ultrasonic generator). The drive shaft 28A is a metal round bar and is arranged so that its axis is parallel to the main surface 21a of the actuator base 21 . Since the carriage 26 moves along this drive shaft 28A, the length of the drive shaft 28A determines the range of movement of the carriage 26. As shown in FIG. The lower end of drive shaft 28A is fixed to ultrasonic element 29A. The upper end of the drive shaft 28A is supported by a guide 31 projecting from the main surface 21a of the actuator base 21. As shown in FIG. The upper end of the drive shaft 28A may be fixed to the guide 31, or may be in contact without being fixed. That is, the drive shaft 28A has a fixed lower end and a fixed or free upper end.

The ultrasonic element 29A provides ultrasonic vibrations to the drive shaft 28A. Specifically, the drive shaft 28A provided with ultrasonic vibration reciprocates slightly along the Z-axis. The ultrasonic element 29A may employ, for example, a piezo element that is a piezoelectric element. A piezo element deforms in response to an applied voltage. Therefore, when a high-frequency voltage is applied to the piezoelectric element, the piezoelectric element repeatedly deforms in accordance with the frequency and magnitude of the voltage, thereby generating ultrasonic vibrations. The ultrasonic element 29A is fixed to a guide 32 projecting from the actuator base 21. As shown in FIG.

A control device 27 is electrically connected to the ultrasonic element 29A and receives a drive voltage generated by the control device 27 . The control device 27 controls the frequency and amplitude of the AC voltage provided to the ultrasonic element 29A.

The linear motor 22B has the same structure as the linear motor 22A. The linear motors 22B are spaced apart in the direction of the Y-axis that intersects the Z-axis. That is, the drive shaft 28B of the linear motor 22B is parallel to the drive shaft 28A of the linear motor 22A. Also, the upper end of the linear motor 22B is arranged at the same height as the upper end of the linear motor 22A. Similarly, the lower end of the linear motor 22B is arranged at the same height as the lower end of the linear motor 22A.

The carriage 26 is a moving body that is translated and rotated by linear motors 22A and 22B. The carriage 26 has a disc shape and is spanned between the linear motors 22A and 22B. A linear guide 24 is provided between the actuator base 21 and the carriage 26 to guide the carriage 26 in the Z-axis direction. The carriage 26 is guided in the Z-axis direction by this linear guide 24 . The linear guide 24 regulates the moving direction of the carriage 26 and does not generate a driving force in the Z-axis direction.

The carriage 26 has a front disc 33 , a pressure disc 34 and a rear disc 36 . These discs have the same outer diameter and are stacked along a common axis. A shaft 37 is sandwiched between the front disk 33 and the pressure disk 34 . The outer diameter of this shaft 37 is smaller than the outer diameters of the front disk 33 and the pressure disk 34 . Therefore, a gap is formed between the outer peripheral portion of the front disc 33 and the outer peripheral portion of the pressure disc 34 . Similarly, a shaft 38 is sandwiched between the rear disc 36 and the pressure disc 34 as well. The outer diameter of this shaft 37 is also smaller than the outer diameters of the rear disk 36 and the pressure disk 34 . Therefore, a gap is also formed between the outer peripheral portion of the rear disc 36 and the outer peripheral portion of the pressure disc 34 .

The rear disk 36 is connected to the table 24a of the linear guide 24. As shown in FIG. Here, the rear disc 36 is rotatably connected to the table 24a. On the other hand, since the pressure disk 34 and the front disk 33 are mechanically fixed to the rear disk 36 , the pressure disk 34 and the front disk 33 do not rotate with respect to the rear disk 36 . Therefore, the entire carriage 26 including the front disc 33 , pressure disc 34 and rear disc 36 is rotatable with respect to the table 24 a of the linear guide 24 .

As shown in FIG. 8, drive shafts 28A and 28B are sandwiched in a gap G1 between the pressure disk 34 and the rear disk 36. As shown in FIG. Specifically, the pair of drive shafts 28A and 28B are arranged so as to sandwich the center of gravity of the carriage 26 . Furthermore, the drive shafts 28A, 28B contact the back surface 34b of the pressurization disk 34 and the main surface 36a of the rear disk 36. As shown in FIG. The drive shafts 28A and 28B do not contact the outer peripheral surface 38a of the shaft body 38. As shown in FIG. That is, the gap G1 is smaller than the outer diameters of the pressure disk 34 and the rear disk 36 and larger than the outer diameter of the shaft body 38 . Also, the difference between the outer diameter of the shaft body 38 and the outer diameter of the rear disk 36 is larger than the outer diameters of the drive shafts 28A and 28B. Similarly, the difference between the outer diameter of the shaft body 37 and the outer diameter of the pressure disk 34 is larger than the outer diameters of the drive shafts 28A, 28B.

Here, the gap G1 is slightly smaller than the outer diameters of the drive shafts 28A and 28B. Since a gap G2 is formed between the front disk 33 and the pressure disk 34, when the drive shafts 28A and 28B are arranged between the pressure disk 34 and the rear disk 36, the pressure disk 34 is positioned forward. It bends slightly toward the disk 33 side. This deflection produces a force that presses the drive shafts 28A, 28B against the rear disc 36. As shown in FIG.

The operating principle of the actuator 13 will be described below with reference to FIG. Parts (a), (b) and (c) of FIG. 9 are diagrams for explaining the principle of operation of the actuator 13 . For convenience of explanation, FIG. 9 shows the linear motor 22A and the carriage 26, and omits the illustration of the other linear motor 22B and the like.

Part (a) of FIG. 9 shows a mode of holding the position of the carriage 26 . As described above, in the carriage 26, the drive shaft 28A is sandwiched between the pressurizing disk 34 and the rear disk 36, and the position of the carriage 26 is maintained by pressurization due to the sandwiching. More specifically, the position of the carriage 26 is maintained by a frictional resistance force with the pressurization as a normal force. At this time, the control device 27 does not provide voltage to the ultrasonic element 29A (voltage value zero, see voltage E1). Alternatively, the controller 27 may provide a DC current having a predetermined voltage value to the ultrasonic element 29A.

As described above, the carriage 26 maintains its position due to the frictional resistance between the carriage 26 and the drive shaft 28A. Here, when the drive shaft 28A is moved, there may occur a mode in which the carriage 26 moves with the drive shaft 28A and a mode in which the carriage 26 continues to maintain its position by its inertia without accompanying the drive shaft 28A. These modes can be determined by the speed at which the drive shaft 28A is moved, that is, the frequency of the ultrasonic vibration. For example, at relatively low frequencies (15 kHz-30 kHz), carriage 26 moves with drive shaft 28A. For example, at relatively high frequencies (100 kHz-150 kHz), carriage 26 does not follow drive shaft 28A and maintains its position.

For example, as shown in part (b) of FIG. 9, when the drive shaft 28A is moved upward (positive direction), the carriage 26 is also caused to accompany the movement of the drive shaft 28A. That is, the relative positional relationship between the drive shaft 28A and the carriage 26 does not change. When the drive shaft 28A is moved downward (negative direction), the carriage 26 is not moved along with the downward movement of the drive shaft 28A. That is, the relative positional relationship between the drive shaft 28A and the carriage 26 changes. By repeating these operations, the carriage 26 gradually moves upward. That is, by setting the cycle of the voltage (symbol E2a in voltage E2) that moves the drive shaft 28A upward longer than the cycle of the voltage (symbol E2b in voltage E2) that moves the drive shaft 28A downward, the carriage 26 can be moved upwards.

Conversely, as shown in part (c) of FIG. 9, when the drive shaft 28A is moved downward, the carriage 26 is also caused to accompany the movement of the drive shaft 28A. That is, the relative positional relationship between the drive shaft 28A and the carriage 26 does not change. When the drive shaft 28A is moved upward, the carriage 26 is not moved along with the upward movement of the drive shaft 28A. That is, the relative positional relationship between the drive shaft 28A and the carriage 26 changes. By repeating these operations, the carriage 26 gradually moves downward. That is, by setting the cycle of the voltage (symbol E3a in voltage E3) that moves the drive shaft 28A upward to be shorter than the cycle of the voltage (symbol E3b in voltage E3) that moves the drive shaft 28A downward, the carriage 26 can be moved downwards.

When the carriage 26 is moved downward, in addition to the above control, the carriage 26 may not follow both the vertical movement of the drive shaft 28A. That is, apparently, the frictional resistance between the carriage 26 and the drive shaft 28A becomes smaller than the gravitational force acting on the carriage 26, and the carriage 26 appears to fall. In this embodiment, gravity acting on the carriage 26 is used as the force for moving the carriage 26 downward.

Next, specific operations of the actuator 13 will be described with reference to FIGS. 10 and 11. FIG.

Part (a) of FIG. 10 shows the operation of maintaining the position of the carriage 26 . As described above, when maintaining the position of the carriage 26, the controller 27 provides constant voltages (see voltages E4 and E5 in part (a) of FIG. 10) to the respective ultrasonic elements 29A and 29B. do.

Part (b) of FIG. 10 shows the operation of moving the carriage 26 upward. At this time, the control device 27 supplies the one ultrasonic element 29A with an alternating voltage (Fig. voltage E6 in part (b) of 10). Similarly, the control device 27 supplies the other ultrasonic element 29B with an AC voltage whose cycle of the voltage for moving the drive shaft 28B upward is longer than the cycle of the voltage for moving the drive shaft 28B downward ( (see voltage E7 in part (b) of FIG. 10). That is, the controller 27 provides the same AC voltage to both ultrasonic elements 29A, 26B. Then, the control device 27 matches the timing of moving one drive shaft 28A upward with the timing of moving the other drive shaft 28B upward. That is, the control device 27 sets the phase of the voltage provided to one ultrasonic element 29A and the phase of the voltage provided to the other ultrasonic element 29A to be in phase with each other. Then, the contact portion P1 where one drive shaft 28A is pressed against the pressure disc 34 and the rear disc 36, and the contact portion P2 where the other drive shaft 28B is pressed against the pressure disc 34 and the rear disc 36 are: Move up the same distance. As a result, the contact portions P1 and P2 move upward while maintaining their parallel state. That is, the carriage 26 translates upward without rotating about its center of gravity.

Part (c) of FIG. 10 shows the operation of moving the carriage 26 downward. At this time, the control device 27 supplies the one ultrasonic element 29A with an alternating voltage (Fig. voltage E8 in part (c) of 10). Similarly, the control device 27 supplies the other ultrasonic element 29B with an AC voltage whose cycle of the voltage for moving the drive shaft 28B upward is shorter than the cycle of the voltage for moving the drive shaft 28B downward ( (see voltage E9 in part (c) of FIG. 10). Then, the contact portion P1 where one drive shaft 28A is pressed against the pressure disc 34 and the rear disc 36, and the contact portion P2 where the other drive shaft 28B is pressed against the pressure disc 34 and the rear disc 36 are: Move down the same distance. As a result, the contact portions P1 and P2 move upward while maintaining their parallel state. That is, the carriage 26 translates upward without rotating about its center of gravity.

According to the above control, when the carriage 26 is moved downward, frictional resistance acts between the carriage 26 and the drive shafts 28A and 28B, and their relative positions do not change. Therefore, the carriage 26 does not rotate around the center of gravity. As a result, for example, even when torque is generated to rotate the carriage 26 due to the posture of the capillary 8 held by the carriage 26, the rotation of the carriage 26 is suppressed and the carriage 26 is lowered. can be moved in any direction.

Note that the translation for moving the carriage 26 in the upward and downward directions can also be realized with one linear motor 22A. Since the actuator 13 according to the embodiment has two linear motors 22A and 22B, it is possible to increase the propulsive force more than the configuration having one linear motor 22A.

Part (a) of FIG. 11 shows the operation of rotating the carriage 26 clockwise. At this time, the control device 27 supplies the one ultrasonic element 29A with an alternating voltage (Fig. (see voltage E10 in part (a) of 11). On the other hand, the control device 27 supplies the other ultrasonic element 29B with an AC voltage (Fig. (see voltage E11 in part (a) of 11). That is, the control device 27 makes the voltage provided to the ultrasonic element 29A and the voltage provided to the ultrasonic element 29B different from each other. Then, the control device 27 matches the timing of moving one drive shaft 28A upward with the timing of moving the other drive shaft 28B downward. In other words, the control device 27 sets the phase of the voltage provided to the one ultrasonic element 29A and the phase of the voltage provided to the other ultrasonic element 29B to be opposite to each other. Then, the contact portion P1 where one drive shaft 28A is pressed against the pressure disk 34 and the rear disk 36 moves downward, and the contact portion P1 where the other drive shaft 28B is pressed against the pressure disk 34 and the rear disk 36. P2 moves upward. That is, the contact portions P1 and P2 move in opposite directions. If these movement amounts match, the contact portions P1 and P2 rotate clockwise while maintaining their positions in the Z-axis direction.

Part (b) of FIG. 11 shows the operation of rotating the carriage 26 counterclockwise. At this time, the control device 27 supplies the one ultrasonic element 29A with an alternating voltage (Fig. voltage E12 in part (b) of 11). On the other hand, the control device 27 supplies the other ultrasonic element 29B with an AC voltage (Fig. voltage E13 in part (b) of 11). Then, the contact portion P1 where one of the drive shafts 28A is pressed against the pressure disc 34 and the rear disc 36 moves upward, and the contact portion P1 where the other drive shaft 28B is pressed against the pressure disc 34 and the rear disc 36. P2 moves downward. That is, the contact portions P1 and P2 move in opposite directions. If these movement amounts match, the contact portions P1 and P2 rotate counterclockwise while maintaining their positions in the Z-axis direction.

<Replacement operation>
Next, the capillary exchange operation performed by the capillary exchange section 9 will be described.

Part (a) of FIG. 12 shows the state immediately before the capillary 8U attached to the ultrasonic horn 7 is replaced. In addition to the capillary holding section 11, the capillary guide section 12, and the actuator 13, the capillary replacement section 9 has a capillary stocker 39 and a capillary recovery section 41 as additional components. The capillary stocker 39 accommodates a plurality of capillaries 8N for replacement. Also, the capillary recovery unit 41 accommodates the used capillaries 8U.

The state shown in part (a) of FIG. 12 is, for example, a state in which the capillary 8U attached to the ultrasonic horn 7 is performing wire bonding. Therefore, the capillary exchange section 9 may be retracted to a position that does not interfere with the wire bonding operation.

Part (b) of FIG. 12 shows the state of the first step in the replacement operation. First, the capillary exchange unit 9 rotates the carriage 26 clockwise by the control device 27 . This rotation corresponds to the operation shown in part (a) of FIG. Due to this rotation, the capillary holding portion 11, which has been retracted to a position that does not interfere with the wire bonding operation, is positioned below the capillary 8U.

Part (a) of FIG. 13 shows the state of the second step in the replacement operation. The capillary exchange unit 9 causes the carriage 26 to move upward by the control device 27 . This movement corresponds to the operation shown in part (b) of FIG. By this movement, the capillary holding part 11 holds the capillary 8U attached to the ultrasonic horn 7. As shown in FIG.

Part (b) of FIG. 13 shows the state of the third step in the replacement operation. The capillary exchange unit 9 moves the carriage 26 downward by the control device 27 . This movement corresponds to the operation shown in part (c) of FIG. By this movement, the capillary 8U held by the capillary holding portion 11 is removed from the ultrasonic horn 7. As shown in FIG.

Part (a) of FIG. 14 shows the state of the fourth step in the replacement operation. The capillary exchange unit 9 rotates the carriage 26 clockwise by the control device 27 . This movement corresponds to the operation shown in part (a) of FIG. By this movement, the capillary 8U held by the capillary holding section 11 is transported to the capillary recovery section 41 and recovered as the used capillary 8U.

Part (b) of FIG. 14 shows the state of the fifth step in the replacement operation. The capillary exchange unit 9 rotates the carriage 26 counterclockwise by the control device 27 . This movement corresponds to the operation shown in part (b) of FIG. By this movement, the capillary holding part 11 holds a new capillary 8N for replacement.

Part (a) of FIG. 15 shows the state of the sixth step in the replacement operation. The capillary exchange unit 9 rotates the carriage 26 clockwise by the control device 27 . This movement corresponds to the operation shown in part (a) of FIG. Due to this movement, the new capillary 8N held by the capillary holding portion 11 is positioned below the hole 7h of the ultrasonic horn 7. FIG.

Part (b) of FIG. 15 shows the state of the seventh step in the replacement operation. The capillary exchange unit 9 causes the carriage 26 to move upward by the control device 27 . This movement corresponds to the operation shown in part (b) of FIG. Due to this movement, the new capillary 8N held by the capillary holding portion 11 is inserted into the hole 7h of the ultrasonic horn 7. As shown in FIG. 6 and 7, the displacement between the capillary 8N and the capillary guide portion 12 and the hole between the capillary 8N and the ultrasonic horn 7 Since the deviation from 7h is eliminated, it can be securely attached.

The effects of the actuator 13 and the wire bonding apparatus 1 according to the embodiment will be described below.

The actuator 13 has a pair of linear motors 22A, 22B, and the force generated in each linear motor 22A, 22B is controlled by a controller 27. As shown in FIG. According to this configuration, the carriage 26 can be translated by matching the directions of the forces generated by the pair of linear motors 22A and 22B. Furthermore, by reversing the directions of the forces generated by the linear motors 22A and 22B, the carriage 26 generates torque around the center of gravity. As a result, the carriage 26 can be rotated about its center of gravity. As a result, the actuator 13 is capable of multiple motions of translation and rotation.

In other words, although the actuator 13 according to this embodiment can perform translation and rotation, it is not necessary to prepare a drive mechanism only for translation and a drive mechanism only for rotation. Therefore, the size of the actuator 13 can be reduced compared to a configuration in which a translation drive mechanism and a rotation drive mechanism are separately provided.

The wire bonding apparatus 1 has a capillary exchange section 9 with an actuator 13 . This actuator 13 can perform two movements, translation and rotation. Therefore, it is possible to suppress the enlargement of the capillary replacement part 9 while providing the wire bonding apparatus 1 with the function of replacing the capillary 8 . Therefore, it is possible to achieve both high functionality and miniaturization of the wire bonding apparatus 1 .

Further, in the wire bonding apparatus 1, the capillary 8 held by the capillary holding portion 11 is guided by the capillary guide portion 12 and inserted into the hole 7h. Therefore, even if the capillary 8 is misaligned with respect to the hole 7h, the misalignment is corrected by the capillary guide portion 12. FIG. Further, in the capillary holding portion 11 , the flexible portion 10 including the upper socket 16 and the coil spring 17 holds the position of the capillary 8 relative to the lower socket 18 fixed to the actuator 13 so as to be relatively displaceable. As a result, in addition to the displacement of the capillary 8 with respect to the hole 7h, even when the capillary guide portion 12 is displaced with respect to the hole 7h, the posture of the capillary 8 is adjusted so that the capillary 8 follows the capillary guide portion 12 and the hole 7h. can be inserted while changing Therefore, the new capillary 8 can be automatically attached to the wire bonding apparatus 1 without relying on the operator's hand.

Although the embodiments of the present invention have been described above, the present invention may be implemented in various forms without being limited to the above embodiments.

<Modification 1>
In the embodiment, as the first and second force generators, an ultrasonic drive motor based on an impact drive system using the law of inertia is exemplified. However, the first and second force generators are not limited to this configuration, and any one capable of generating a force along a predetermined direction may be employed as the first and second force generators. For example, a linear guide using a ball screw may be employed as the first and second force generators.

<Modification 2>
The capillary holding section should be able to hold the capillary 8 in such a manner that the attitude thereof can be flexibly changed. Therefore, the configuration of the capillary holding portion is not limited to that described above, and a capillary holding portion 11A according to the modification shown in FIG. 16 may be employed.

The capillary holding portion 11A has a metal pipe 42, a silicone resin tube 43, and a cap 44 as main components. The pipe 42 has a cylindrical shape and accommodates the tube 43 therein. One end of the pipe 42 and one end of the tube 43 are closed by a cap 44 . This cap 44 is held by the holder 14 . The upper end 43 a (upper end opening edge) of the tube 43 substantially coincides with the upper end 42 a of the pipe 42 . Also, the outer diameter of the tube 43 is smaller than the inner diameter of the pipe 42 . That is, a slight gap is formed between the outer peripheral surface of the tube 43 and the inner peripheral surface of the pipe 42 . The tapered surface 8a of the capillary 8 is held at the upper end 43a of the tube 43. As shown in FIG.

According to this capillary holding portion 11A, the tube 43 has a predetermined flexibility. Therefore, the capillary holding portion 11A can allow the posture of the capillary 8 to be changed by the amount of the gap formed between the outer peripheral surface of the tube 43 and the inner peripheral surface of the pipe 42 . Specifically, eccentricity and inclination in the direction intersecting the axis 42A of the pipe 42 can be allowed.

Here, when only the tube 43 is used, the rigidity of the tube 43 may be insufficient depending on the posture of the capillary 8, so that the capillary 8 may not be held. However, since the pipe 42 having higher rigidity than the tube 43 exists outside the tube 43, even if the rigidity of the tube 43 is insufficient, the displacement of the capillary 8 can be kept within the allowable range by the pipe 42. can.

Furthermore, when the capillary 8 is inserted into the tube 43, the contact state between the inner peripheral edge of the upper end 43a and the tapered surface 8a is line contact. Therefore, the capillary 8 can be tilted and held in the same manner as the capillary holding portion 11A according to the embodiment.

<Modification 3>
The capillary guide portion 12 guides the capillary 8 to the hole 7h of the ultrasonic horn 7 while bringing the capillary 8 into contact with the wall surface of the tapered hole portion 12t and the wall surface of the parallel hole portion 12p. As shown in FIG. 17, the tapered hole portion 12t and the parallel hole portion 12p have an opening 12e on the front end surface 12c. According to this shape, when the capillary 8 is moved upward, the capillary 8 is not supported forward (in the X-axis direction), so the capillary 8 is positioned on the opposite side of the wall surface 12W (see FIG. 19). may tilt to Therefore, the capillary guide portion 12S according to the modification prevents the capillary 8 from being tilted, and enables the capillary 8 to be inserted into the hole 7h of the ultrasonic horn 7 more reliably.

As shown in FIGS. 17, 18 and 19, the capillary guide portion 12S has a guide hole 12h that guides the capillary 8 to the hole 7h. The guide hole 12h includes a tapered hole portion 12t (first hole portion) arranged along the insertion direction (Z-axis direction) of the capillary 8 and a parallel hole portion 12p (second hole portion). The capillary guide portion 12 includes a tapered portion 51 in which a tapered hole portion 12t is formed, and a parallel guide portion 52 in which a parallel hole portion 12p is formed.

The tapered hole portion 12t is a mortar-shaped tapered hole whose diameter decreases in the insertion direction (Z-axis direction). The insertion direction here refers to the direction from the lower surface 12b toward the upper surface 12a. The parallel hole portion 12p is arranged coaxially with the hole 7h and guides the capillary 8 along the axis 12A (see FIGS. 18 and 19) of the parallel hole portion 12p. The term "coaxial" as used herein is not limited to the fact that the axis 12A of the parallel hole portion 12p and the axis 7A of the hole 7h completely match (overlap). The term "coaxial" means the positional relationship of the axes that allow the capillary 8 to be inserted from the parallel hole 12p to the hole 7h. Deviations are allowed.

The capillary guide portion 12S has a pair of coil springs 53. As shown in FIG. The coil spring 53 provides force in a direction intersecting with the axis 12A (an in-plane direction of the XY plane) to the capillary 8 inserted into the parallel hole 12p. This coil spring 53 is provided in the parallel guide portion 52 . Specifically, it is inserted into a hole 52 h provided in the parallel guide portion 52 . A coil spring 53 supports the capillary 8 located in the parallel guide portion 52 .

The coil spring 53 is arranged such that its axis L53 is parallel to the XY plane. Also, the axis L53 of the coil spring 53 is at a twisted position with respect to the axis 12A. A point P12 on the wall surface 12W at which the capillary 8 can contact, an axis 12A of the parallel hole 12p, and a point P53 in the coil spring 53 at which the capillary 8 can contact are defined by a diameter passing through the axis 12A of the parallel hole 12p. It is arranged on the direction line 12K.

The coil spring 53 has an elastic modulus capable of maintaining its shape in a state where no external force acts (hereinafter referred to as "natural state"). Specifically, when the coil spring 53 is held so that its axis L53 coincides with the horizontal direction, no significant deflection occurs in the vertical direction. When an external force directed in a direction intersecting with the axis L53 is applied to the coil spring 53, the coil spring 53 generates a reaction force in a direction opposite to the external force.

As shown in FIG. 19, the capillary 8 is inserted into a region S surrounded by the wall surface 12W of the parallel hole 12p and the coil spring 53. As shown in FIG. A distance M1 between the coil spring 53 and the wall surface 12W is slightly smaller than the diameter of the capillary 8. Then, when the capillary 8 is inserted into the region S, the capillary 8 presses (force F1) the coil spring 53 to the side opposite to the wall surface 12W (that is, to the side of the opening 12e). The coil spring 53 generates a reaction force F2 against this force F1. This reaction force F2 presses the capillary 8 against the wall surface 12W.

Therefore, in the parallel hole portion 12p, the outer peripheral surface 8t of the capillary 8 contacts the wall surface 12W. That is, the capillary 8 slides in the direction of the axis 12A while the outer peripheral surface 8t of the capillary 8 is in contact with the wall surface 12W. As a result, the capillary 8 can move in a stable state without being tilted with respect to the axis 12A, so that the capillary 8 can be led to the hole 7h of the ultrasonic horn 7 more reliably.

It should be noted that the coil spring 53 as the biasing member shown in FIGS. The urging member may be appropriately employed as long as it can press the capillary 8 toward the wall surface 12W of the parallel hole 12p.

REFERENCE SIGNS LIST 1 wire bonding device 2 base 3 bonding unit 4 conveying unit 6 bonding tool 7 ultrasonic horn 7h hole 8 capillary 8a tapered surface 8b capillary body 9 11 Capillary holding portion 12, 12S Capillary guide portion 12h Guide hole 12t Tapered hole 12p Parallel hole 13 Actuator 14 Holder 16 Upper socket 16c Counterbored portion 16d Step 16e Small diameter portion 16h Through hole 17 Coil spring 18 Lower socket 18d Step 18e Small diameter portion 18f Large diameter portion 19 O-ring 21... Actuator base (base part), 22A... Linear motor (first force generating part), 22B... Linear motor (second force generating part), 24... Linear guide, 26... Carriage, 27... Control device (control part) , 28A, 28B... drive shaft, 29A, 29B... ultrasonic element, 31, 32... guide, 33... front disc, 34... pressurized disc, 36... rear disc, 37, 38... shaft, 39... capillary holder, 41... Capillary collection part, G1, G2... Gap, P1, P2, C1, C2... Contact part, 51... Taper part, 52... Parallel guide part, 53... Coil spring.

Claims (8)

a capillary holding part that detachably holds the capillary;
an actuator for moving the capillary holding part holding the capillary along a predetermined direction so that the capillary held by the capillary holding part is inserted into the capillary holding hole of the bonding tool;
a capillary guide part disposed between the capillary holding part and the bonding tool and guiding the capillary to the capillary holding hole as the capillary holding part moves;
The capillary holding portion has a capillary base portion fixed to the actuator, and a flexible portion holding the position of the capillary with respect to the capillary base portion so as to be relatively displaceable ,
The flexible portion is
an elastic portion having one end fixed to the capillary base;
a restraining portion provided at the other end of the elastic portion and restraining the capillary. The actuator is
a base;
a moving body arranged on the base portion, to which the capillary holding portion is attached, and which moves the capillary holding portion;
2. The wire bonding apparatus according to claim 1, wherein said capillary guide is fixed to said base. 3. The wire bonding apparatus according to claim 2 , wherein said restraining portion is in line contact with the tapered surface of said capillary. The restraint part is a torus-shaped O-ring,
4. The wire bonding apparatus according to claim 2 , wherein said elastic portion is a coil spring. The capillary holding part is
a tube including an upper opening edge as the restraining portion and a body portion as the elastic portion;
a cap closing the lower end of the tube;
a cylindrical pipe whose lower end is closed by the cap and which accommodates the tube;
the pipe is stiffer than the tube,
A gap is provided between the inner peripheral surface of the pipe and the outer peripheral surface of the tube.
A wire bonding apparatus according to claim 2 . a capillary holding part that detachably holds the capillary;
an actuator for moving the capillary holding part holding the capillary along a predetermined direction so that the capillary held by the capillary holding part is inserted into the capillary holding hole of the bonding tool;
a capillary guide part disposed between the capillary holding part and the bonding tool and guiding the capillary to the capillary holding hole as the capillary holding part moves;
The capillary guide portion is provided with a guide hole for guiding the capillary to the capillary holding hole,
The wire bonding apparatus according to claim 1, wherein the capillary guide section has a biasing member that applies a force in a direction intersecting the axis of the guide hole to the capillary inserted into the guide hole. the guide hole includes a first hole and a second hole arranged along the insertion direction of the capillary,
The first hole is a tapered hole whose diameter decreases in the insertion direction,
7. The wire bonding apparatus according to claim 6 , wherein said second hole is arranged coaxially with said capillary holding hole and guides said capillary along the axis of said capillary holding hole. The capillary guide portion includes a tapered portion formed with the first hole and a guide portion formed with the second hole,
8. The wire bonding apparatus according to claim 7 , wherein said biasing member is provided on said guide portion.

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