JP2023126562A - Wire bonding device - Google Patents

Abstract

To automate work for attaching a new capillary to a wire bonding device.SOLUTION: A wire bonding device 1 includes: an ultrasonic horn 7 having a hole 7h for detachably holding a capillary 8; a capillary holding part 11 which detachably holds the capillary 8 to be inserted into the hole 7h; an actuator 13 which moves the capillary holding part 11 so that the capillary 8 held by the capillary holding part 11 is inserted into the hole 7h; and a capillary guide part 12 which guides the capillary 8 to the hole 7h in conjunction with movement of the capillary holding part 11 by the actuator 13.SELECTED DRAWING: Figure 3

Description

The present invention relates to a wire bonding device.

Patent Document 1 discloses a wire bonding device. The wire bonding device has a capillary that is a bonding tool. A wire bonding device connects a wire to an electrode by applying heat, ultrasonic vibration, or the like to the wire using the capillary.

JP 2018-6731 Publication

In an electronic device manufacturing factory, multiple manufacturing devices are operated in order to manufacture a large amount of electronic devices. Increasing the number of manufacturing equipment can increase production numbers. On the other hand, manufacturing equipment requires various maintenance operations. In this case, maintenance work will be required for the number of manufacturing devices. Therefore, the increase in production volume and the burden of maintenance work are in a contradictory relationship. Therefore, if maintenance work can be performed automatically without manual intervention by an operator, it is possible to reduce the burden of maintenance work.

The wire bonding apparatus has a capillary replacement operation as one of the above-mentioned maintenance operations. Therefore, in this technical field, there has been a desire to automate the process of replacing capillaries, and specifically, to automate the process of attaching a new capillary to a wire bonding device after removing a used capillary.

In view of the above background, an object of the present invention is to provide a wire bonding device that can automate the work of attaching a novel capillary to the wire bonding device.

A wire bonding apparatus according to an embodiment of the present invention includes a capillary holding part that removably holds a capillary, and a capillary held in the capillary holding part in a predetermined direction so that the capillary is inserted into a capillary holding hole of a bonding tool. an actuator that moves a capillary holding part holding a capillary along the capillary; a capillary guide part that is disposed between the capillary holding part and the bonding tool and guides the capillary to the capillary holding hole as the capillary holding part moves; The capillary holding part includes a capillary base part fixed to the actuator, and a flexible part holding the capillary in a position movable relative to the capillary base part.

In this wire bonding device, a capillary held by a capillary holding part is inserted into a capillary holding hole while being guided by a capillary guide part. Therefore, even if the capillary is misaligned with respect to the capillary holding hole, the misalignment is corrected by the capillary guide section. Further, in the capillary holding part, the flexible part holds the capillary so that the position of the capillary can be displaced relative to the capillary base part fixed to the actuator. As a result, in addition to misalignment of the capillary with respect to the capillary holding hole, even when the capillary guide is misaligned with the capillary holding hole, the posture of the capillary is changed so that the capillary follows the capillary guide and the capillary holding hole. It can be inserted while Therefore, a new capillary can be automatically attached to the wire bonding device without the operator's intervention.

In the wire bonding device according to one embodiment, the actuator includes a base portion, a moving body that is disposed on the base portion, has a capillary holding portion attached thereto, and moves the capillary holding portion, and the capillary guide portion has a movable body that moves the capillary holding portion. , may be fixed to the base part. According to this configuration, the relative positional relationship between the capillary holding section and the capillary guide section that are moved by the actuator can be easily maintained. Therefore, the capillary can be reliably attached to the bonding tool by the capillary guide.

In the wire bonding device according to one embodiment, the flexible part includes an elastic part having one end fixed to the capillary base part, and a restraining part provided at the other end of the elastic part to restrain the capillary. Good too. According to this configuration, the elastic portion can be elastically deformed based on the capillary base portion. A restraint part is provided at the other end of the elastic part, and the restraint part restrains the capillary. Therefore, the relative position of the capillary with respect to the capillary base can be displaced by the elastic part. Therefore, the capillary can be attached to the bonding tool more reliably.

In one embodiment of the wire bonding device, the restraining portion may be in line contact with the tapered surface of the capillary. According to this configuration, the restraint part can allow the capillary to be held to be tilted. Therefore, since the posture of the capillary can be changed more flexibly, the capillary can be attached to the bonding tool more reliably.

In the wire bonding device according to one embodiment, the restraint part may be a torus-shaped O-ring, and the elastic part may be a coil spring. According to this configuration, the capillary holding section can be configured with a simple configuration.

In the wire bonding device according to one embodiment, the capillary holding section includes a tube including an upper opening edge as a restraining section, a main body section as an elastic section, a cap that closes the lower end of the tube, and a cap that closes the lower end of the tube. and a cylindrical pipe that accommodates the tube, the pipe having higher rigidity than the tube, and a gap may be provided between the inner circumferential surface of the pipe and the outer circumferential surface of the tube. According to this configuration, it is possible to change the posture of the capillary using the tube. Furthermore, since the pipe exists outside the tube, the displacement of the capillary can be kept within a permissible range by the pipe. Therefore, the capillary can be reliably attached to the bonding tool.

A bonding device according to another embodiment includes a capillary holding part that removably holds a capillary, and a capillary holding part that holds a capillary in a predetermined direction so that the capillary held by the capillary holding part is inserted into a capillary holding hole of a bonding tool. an actuator for moving a capillary holding part holding a capillary holding part, and a capillary guide part disposed between the capillary holding part and the bonding tool to guide the capillary to the capillary holding hole as the capillary holding part moves, The capillary guide section is provided with a guide hole that guides the capillary to the capillary holding hole, and the capillary guide section provides a force directed in a direction intersecting the axis of the guide hole to the capillary inserted into the guide hole. It has a biasing member.

According to this configuration, the capillary is guided in a predetermined direction while being pressed against the wall surface of the capillary guide part by the biasing member. As a result, the capillary can be moved in a stable state without tilting, so that the capillary can be more reliably guided to the capillary holding hole of the bonding tool.

In a bonding device according to another embodiment, the guide hole includes a first hole and a second hole that are lined up along the insertion direction of the capillary, and the first hole has a smaller diameter toward the insertion direction. The second hole portion may be arranged coaxially with the capillary holding hole to guide the capillary along the axis of the capillary holding hole. According to this configuration, the capillary can be guided to the capillary holding hole more reliably.

In another embodiment of the bonding device, the capillary guide section includes a tapered section in which the first hole is formed and a guide section in which the second hole is formed, and the biasing member is provided in the guide section. It may be. According to this configuration, the capillary can be guided to the capillary holding hole more reliably.

According to the present invention, a wire bonding device is provided that can automate the work of attaching a novel capillary to the wire bonding device.

FIG. 1 is a perspective view showing a wire bonding apparatus according to an embodiment. FIG. 2 is an enlarged perspective view of a capillary exchange section included in the wire bonding apparatus shown in FIG. 1. FIG. FIG. 3 is a perspective view showing a part of the capillary holding part in cross section. FIG. 4 is a diagram illustrating the operation of the capillary holding section. FIG. 5 is a perspective view showing a part of the capillary guide section in cross section. FIG. 6 is a diagram showing the capillary guiding function performed by the capillary holding section and the capillary guiding section. FIG. 7 is a diagram showing another capillary guide function performed by the capillary holding section and the capillary guide section. FIG. 8 is a plan view showing essential parts of an actuator included in the capillary exchange section shown in FIG. 2. FIG. FIG. 9 is a diagram illustrating the principle of operation of the actuator. FIG. 10 is a diagram illustrating specific control of the actuator. FIG. 11 is a diagram illustrating specific control of the actuator. FIG. 12 is a diagram showing the main operations of the capillary exchange section. FIG. 13 is a diagram showing the main operations of the capillary exchange section following FIG. 12. FIG. 14 is a diagram showing the main operations of the capillary exchange section following FIG. 13. FIG. 15 is a diagram showing the main operations of the capillary exchange section following FIG. 14. FIG. 16 is a perspective view showing a cross section of a capillary holding part according to a modified example. FIG. 17 is a perspective view showing a capillary guide section according to another modification. FIG. 18 is a front view of the capillary guide shown in FIG. 17. FIG. 19 is a plan view of the capillary guide shown in FIG. 17.

Hereinafter, embodiments for carrying out the present invention will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant description will be omitted.

The wire bonding apparatus 1 shown in FIG. 1 electrically connects, for example, an electrode of a printed circuit board and an electrode of a semiconductor element provided on the printed circuit board using a thin metal wire. The wire bonding device 1 connects the wire to an electrode by applying heat, ultrasound, or pressure to the wire. The wire bonding apparatus 1 includes a base 2, a bonding section 3 for the above-mentioned connection work, and a transport section 4 for transporting a printed circuit board or the like, which is a component to be processed, to a bonding area.

The bonding section 3 includes a bonding tool 6, and an ultrasonic horn 7 is provided at the tip of the bonding tool 6. At the tip of the ultrasonic horn 7, a capillary 8 for applying heat, ultrasonic waves, or pressure to the wire is removably installed.

In the following description, the direction in which the ultrasonic horn 7 extends is the X axis, the direction in which the printed circuit board is transported by the transport unit 4 is the Y axis (second direction), and the direction in which the capillary 8 moves when performing the bonding operation. (Z-axis direction, first direction) is defined as the Z-axis.

The capillary 8 is a component that requires regular replacement. Therefore, the wire bonding apparatus 1 includes a capillary exchange section 9 that automatically exchanges the capillary 8 without any operation by an operator.

The capillary exchange section 9 collects the capillary 8 attached to the ultrasonic horn 7 and attaches the capillary 8 to the ultrasonic horn 7. In other words, the work of replacing the capillary 8 includes the work of recovering the capillary 8 and the work of installing the capillary 8. This replacement of the capillary 8 is automatically performed when preset conditions are met. For example, the condition may be the number of bonding operations. That is, the capillary 8 may be replaced every time a predetermined number of bonding operations are performed.

As shown in FIG. 2, the capillary exchange section 9 includes a capillary holding section 11, a capillary guide section 12, and an actuator 13 as main components. Further, as an additional component, it has an attachment/detachment jig 15 and a jig driving section 20 that drives the attachment/detachment jig 15.

<Capillary holding part>
The capillary holding section 11 holds the capillary 8. Capillary holding section 11 is attached to actuator 13 via holder 14 . The capillary holding portion 11 has a cylindrical shape extending in the Z-axis direction. The lower end of the capillary holding part 11 is held by a holder 14. The capillary 8 is removably inserted into the upper end of the capillary holding part 11.

As shown in FIG. 3, the capillary holding part 11 includes an upper socket 16, a coil spring 17 (elastic part), a lower socket 18 (capillary base part), and an O-ring 19 (restriction part) as main components. , has. The upper socket 16, coil spring 17, and lower socket 18 are arranged on a common axis. Specifically, the upper socket 16, the coil spring 17, and the lower socket 18 are arranged in this order from the top.

The upper socket 16 has a substantially cylindrical shape and has a through hole 16h extending from an upper end surface 16a to a lower end surface 16b. Since the upper socket 16 holds the tapered surface 8a of the capillary 8, the inner diameter of the through hole 16h corresponds to the outer diameter of the tapered surface 8a of the capillary 8. For example, the inner diameter of the through hole 16h is smaller than the outer diameter of the capillary body 8b. Further, a counterbore portion 16c for the O-ring 19 is provided on the upper end surface 16a side of the through hole 16h. The counterbore portion 16c has a size that can accommodate the O-ring 19. That is, the depth of the counterbore portion 16c is approximately the same as the height of the O-ring 19, and the inner diameter thereof is approximately the same as the outer diameter of the O-ring 19.

The O-ring 19 has a so-called toroidal shape. The O-ring 19 is in direct contact with the tapered surface 8a of the capillary 8. That is, in the capillary holding portion 11, the O-ring 19 holds the capillary 8. This retention is achieved by an adhesive layer formed on the surface of the O-ring 19. The inner diameter of the O-ring 19 is approximately the same as the inner diameter of the through hole 16h, into which the tapered surface 8a of the capillary 8 is inserted.

Further, since the upper socket 16 has a step 16d provided on the outer circumferential surface, the outer diameter differs between the upper end surface 16a side and the lower end surface 16b side. Specifically, the outer diameter on the lower end surface 16b side is slightly smaller than the outer diameter on the upper end surface 16a side. A coil spring 17 is fitted into the narrow diameter portion 16e on the lower end surface 16b side.

The lower socket 18 has a substantially cylindrical shape. The upper end surface 18a of the lower socket 18 faces the lower end surface 16b of the upper socket 16. The lower socket 18 has the same external shape as the upper socket 16. That is, the lower socket 18 is also provided with a step 18d on its outer peripheral surface. Contrary to the upper socket 16, the lower socket 18 has a narrow diameter portion 18e on the upper end surface 18a side. The coil spring 17 is also fitted into the narrow diameter portion 18e on the side of the upper end surface 18a. A large diameter portion 18f on the lower end surface 18b side of the lower socket 18 is held by the holder 14.

The coil spring 17 is a compression spring. The upper end of the coil spring 17 is fitted into the narrow diameter portion 16e of the upper socket 16, and the lower end thereof is inserted into the narrow diameter portion 18e of the lower socket 18. The upper socket 16 and the coil spring 17 constitute the flexible section 10. Therefore, the upper socket 16 and the lower socket 18 are connected by the coil spring 17. The coil spring 17 has elasticity in the direction of the axis 17A and in the direction crossing the axis 17A. As a result, the upper socket 16 can change its position relative to the lower socket 18.

The capillary holding section 11 having the above configuration has a holding mode shown in FIG. 4. Part (a) of FIG. 4 shows the capillary holding part 11 in its initial state. Part (b) of FIG. 4 shows the capillary holding part 11 in a first modified form. Part (c) of FIG. 4 shows the capillary holding part 11 in a second modified form.

As shown in part (a) of FIG. 4, in the capillary holding part 11 according to the first holding mode, the axes 16A and 18A of the upper socket 16 and the lower socket 18 overlap. Furthermore, the axis 8A of the capillary 8 also overlaps with the axes 16A and 18A.

As shown in part (b) of FIG. 4, in the capillary holding part 11 according to the second holding mode, the axes 16A and 18A of the upper socket 16 and the lower socket 18 do not overlap. Specifically, the upper socket 16 moves in the X-axis and Y-axis directions with respect to the lower socket 18, which is held by the holder 14 and whose position is maintained. In this state, the axis 16A of the upper socket 16 is parallel to the axis 18A of the lower socket 18.

As shown in part (c) of FIG. 4, in the capillary holding part 11 according to the third modification, the axes 16A and 18A of the upper socket 16 and the lower socket 18 overlap. That is, these configurations are the same as the first holding mode. On the other hand, the axis 8A of the capillary 8 is inclined with respect to the axis 16A of the upper socket 16. Since the O-ring 19 has a torus shape, the inner peripheral surface into which the tapered surface 8a of the capillary 8 is inserted is a curved surface. For example, the cross-sectional shape of the O-ring 19 in a cross section parallel to the Z-axis is circular. Then, when the tapered surface 8a is inserted into the O-ring 19 in a cross-sectional view, the O-ring 19 and the tapered surface 8a come into contact with each other at two contact portions C1 and C2. In other words, the O-ring 19 and the capillary 8 are in line contact at the annular contact line CL (see FIG. 3). is. According to such a contact state, inclination of the capillary 8 with respect to the axis 19A of the O-ring 19 is allowed.

<Capillary guide section>
As shown in FIG. 2 again, the capillary guide section 12 guides the capillary 8 when the capillary 8 is inserted into the hole 7h (capillary holding hole) of the ultrasonic horn 7. The capillary guide section 12 is provided on the actuator 13. Therefore, the relative positional relationship of the capillary guide section 12 with the parts constituting the actuator 13 is preserved. The capillary guide portion 12 has a cantilever shape extending from the actuator 13 toward the ultrasonic horn 7 .

FIG. 5 is a cross-sectional perspective view of the main portion of the capillary guide section 12. As shown in FIG. 5, the capillary guide section 12 has a guide hole 12h provided at its free end. The guide hole 12h receives the capillary body 8b of the capillary 8 and guides the capillary 8 to the hole 7h of the ultrasonic horn 7. The guide hole 12h is a through hole extending from the upper surface 12a of the capillary guide portion 12 to the lower surface 12b. Note that the guide hole 12h also opens in the front end surface 12c of the capillary guide portion 12. That is, the guide hole 12h can receive the capillary 8 from the lower surface 12b and the front end surface 12c.

The guide hole 12h includes a tapered hole portion 12t and a parallel hole portion 12p. The lower end of the tapered hole portion 12t opens to the lower surface 12b. The upper end of the parallel hole portion 12p opens to the upper surface 12a. The inner diameter of the tapered hole 12t on the lower surface 12b is larger than the inner diameter of the parallel hole 12p on the upper surface 12a. This inner diameter is larger than the outer diameter at the upper end of the capillary 8. That is, the guide hole 12h has an inner diameter that gradually decreases from the lower surface 12b toward the upper surface 12a, and reaches its minimum value at the position where the tapered hole portion 12t and the parallel hole portion 12p are connected. This inner diameter is approximately the same as the outer diameter at the upper end of the capillary 8. The parallel hole portion 12p has a constant inner diameter.

FIG. 6 shows how the capillary 8 is guided by the capillary guide section 12. In the state shown in part (a) of FIG. 6, the axis 7A of the hole 7h of the ultrasonic horn 7 and the axis 12A of the guide hole 12h of the capillary guide section 12 overlap. On the other hand, the axis 8A of the capillary 8 held by the capillary holder 11 is offset from the axes 7A and 12A in parallel to the X-axis direction.

From the state shown in part (a) of FIG. 6, the capillary holding part 11 is moved in the direction of the Z-axis. Then, as shown in part (b) of FIG. 6, the upper end of the capillary 8 first comes into contact with the wall surface of the tapered hole 12t. When the capillary holder 11 is further moved upward, the capillary 8 moves along the wall surface. This movement includes a horizontal component (X-axis direction) in addition to an upward component (Z-axis direction). In the capillary holding part 11, the upper socket 16 can be moved relative to the lower socket 18 by the coil spring 17. That is, when the lower socket 18 is moved upward, the upper socket 16 is also moved horizontally by the coil spring 17 while moving upward.

According to this movement, the axis 8A of the capillary 8 gradually approaches the axis 7A of the hole 7h. When the upper end of the capillary 8 reaches the parallel hole portion 12p, the axis 8A of the capillary 8 overlaps the axis 7A of the hole 7h. Therefore, the capillary 8 is inserted into the hole 7h of the ultrasonic horn 7.

In the example shown in part (a) of FIG. 6, the positional relationship between the ultrasonic horn 7 and the capillary guide section 12 is in an ideal state. On the other hand, in the example shown in part (a) of FIG. 7, the axis 7A of the hole 7h of the ultrasonic horn 7 is inclined with respect to the axis 12A of the capillary guide portion 12.

The operation of inserting the capillary 8 in such a state will be explained. As shown in part (b) of FIG. 7, the axis 8A of the capillary 8 is inclined relative to the axis 7A of the hole 7h. Therefore, since the upper end of the capillary 8 comes into contact with the wall surface of the hole 7h, the capillary 8 cannot be inserted into the hole 7h any further. Furthermore, in order to insert the capillary 8 into the hole 7h, it is necessary to make the axis 8A of the capillary 8 parallel to the axis 7A of the hole 7h, and to make the axis 8A overlap with the axis 7A.

As described above, in the capillary holding part 11, the upper socket 16 can be displaced with respect to the lower socket 18, and furthermore, the capillary 8 can be tilted with respect to the axis 16A of the upper socket 16. According to these actions, as shown in part (c) of FIG. 7, as the capillary holding part 11 is raised, the axis 8A of the capillary 8 gradually approaches the axis 7A of the hole 7h, and finally It can be inserted in 7 hours. In other words, since the capillary holding part 11 flexibly holds the capillary 8, it is possible to absorb the misalignment between the capillary 8 and the capillary guide part 12, and the misalignment between the capillary 8 and the hole 7h of the ultrasonic horn 7. . Therefore, according to the capillary holding part 11 and the capillary guide part 12, the capillary 8 can be reliably attached.

<Actuator>
The actuator 13 moves the capillary 8 to be replaced or a new capillary 8, and holds the capillary 8 at a predetermined position and posture. The actuator 13 is capable of reciprocating movement along a predetermined translation axis (Z-axis). In this embodiment, the translation axis is along the vertical direction (Z-axis). Therefore, the actuator 13 moves the capillary 8 up and down along the vertical direction. Furthermore, the actuator 13 can rotate around a rotation axis (X-axis). In this embodiment, the rotation axis is perpendicular to the vertical direction (Z-axis). That is, the rotation axis is along the horizontal direction (X-axis). Therefore, the actuator 13 rotates the capillary 8 about the horizontal direction.

The actuator 13 includes an actuator base 21 (base part), a pair of linear motors 22A and 22B (first force generating part, second force generating part), a linear guide 24, a carriage 26 (moving body), and a control device. 27 (control unit, see FIG. 1, etc.).

The actuator base 21 has a flat plate shape and has a main surface 21a. The normal direction of the main surface 21a is along the horizontal direction (X-axis direction). Linear motors 22A, 22B, a linear guide 24, and a carriage 26 are arranged on the main surface 21a.

The linear motor 22A moves the carriage 26. The linear motor 22A is an ultrasonic motor based on a so-called impact drive system. The linear motor 22A includes a drive shaft 28A and an ultrasonic element 29A (ultrasonic generator). The drive shaft 28A is a round metal bar, and is arranged so that its axis is parallel to the main surface 21a of the actuator base 21. Since the carriage 26 moves along this drive shaft 28A, the length of the drive shaft 28A determines the range of movement of the carriage 26. The lower end of the drive shaft 28A is fixed to the ultrasonic element 29A. The upper end of the drive shaft 28A is supported by a guide 31 protruding from the main surface 21a of the actuator base 21. The upper end of the drive shaft 28A may be fixed to the guide 31, or may not be fixed and may just be in contact with the guide 31. That is, the drive shaft 28A has a lower end as a fixed end, and an upper end as a fixed end or a free end.

The ultrasonic element 29A provides ultrasonic vibration to the drive shaft 28A. Specifically, the drive shaft 28A provided with ultrasonic vibration reciprocates slightly along the Z-axis. For example, a piezo element, which is a piezoelectric element, may be used as the ultrasonic element 29A. Piezo elements deform in response to applied voltage. Therefore, when a high-frequency voltage is applied to the piezo element, the piezo element repeatedly deforms depending on the frequency and magnitude of the voltage, producing ultrasonic vibrations. The ultrasonic element 29A is fixed to a guide 32 protruding from the actuator base 21.

A control device 27 is electrically connected to the ultrasonic element 29A, and receives a drive voltage generated by the control device 27. The control device 27 controls the frequency and amplitude of the alternating current voltage provided to the ultrasonic element 29A.

The linear motor 22B has the same structure as the linear motor 22A. The linear motors 22B are spaced apart in the direction of the Y-axis intersecting the Z-axis. That is, the drive shaft 28B of the linear motor 22B is parallel to the drive shaft 28A of the linear motor 22A. Further, the upper end of the linear motor 22B is arranged at the same height as the upper end of the linear motor 22A. Similarly, the lower end of linear motor 22B is arranged at the same height as the lower end of linear motor 22A.

The carriage 26 is a moving body that is translated and rotated by linear motors 22A and 22B. The carriage 26 has a disk shape and is spanned between the linear motors 22A and 22B. A linear guide 24 is provided between the actuator base 21 and the carriage 26 to guide the carriage 26 in the Z-axis direction. The carriage 26 is guided in the Z-axis direction by this linear guide 24. Note that the linear guide 24 restricts the moving direction of the carriage 26, and does not generate a driving force in the Z-axis direction.

The carriage 26 includes a front disc 33, a pressurized disc 34, and a rear disc 36. These discs have the same outer diameter and are stacked along a common axis. A shaft body 37 is sandwiched between the front disk 33 and the pressurized disk 34. The outer diameter of this shaft body 37 is smaller than the outer diameters of the front disc 33 and the pressurized disc 34. Therefore, a gap is formed between the outer periphery of the front disk 33 and the outer periphery of the pressurized disk 34. Similarly, a shaft body 38 is also sandwiched between the rear disc 36 and the pressurized disc 34. The outer diameter of this shaft body 37 is also smaller than the outer diameters of the rear disc 36 and the pressurized disc 34. Therefore, a gap is also formed between the outer periphery of the rear disk 36 and the outer periphery of the pressurized disk 34.

The rear disk 36 is connected to the table 24a of the linear guide 24. Here, the rear disc 36 is rotatably connected to the table 24a. On the other hand, since the pressurized disk 34 and the front disk 33 are mechanically fixed to the rear disk 36, the pressurized disk 34 and the front disk 33 do not rotate relative to the rear disk 36. Therefore, the entire carriage 26 including the front disc 33, pressurized disc 34, and rear disc 36 is rotatable with respect to the table 24a of the linear guide 24.

As shown in FIG. 8, the drive shafts 28A and 28B are sandwiched between the gap G1 between the pressurized disk 34 and the rear disk 36. As shown in FIG. Specifically, the pair of drive shafts 28A and 28B are arranged to sandwich the center of gravity of the carriage 26. Further, the drive shafts 28A and 28B contact the back surface 34b of the pressurized disk 34 and the main surface 36a of the rear disk 36. Note that the drive shafts 28A and 28B do not contact the outer peripheral surface 38a of the shaft body 38. That is, the gap G1 is smaller than the outer diameters of the pressurized disk 34 and the rear disk 36, and larger than the outer diameter of the shaft body 38. Further, the difference between the outer diameter of the shaft body 38 and the outer diameter of the rear disc 36 is larger than the outer diameter of the drive shafts 28A and 28B. Similarly, the difference between the outer diameter of the shaft body 37 and the outer diameter of the pressurized disk 34 is larger than the outer diameter of the drive shafts 28A and 28B.

Here, the interval between the gaps G1 is slightly smaller than the outer diameters of the drive shafts 28A and 28B. Since a gap G2 is formed between the front disc 33 and the pressurized disc 34, when the drive shafts 28A and 28B are arranged between the pressurized disc 34 and the rear disc 36, the pressurized disc 34 is moved forward. It bends slightly toward the disk 33 side. This deflection generates a force that presses the drive shafts 28A, 28B against the rear disc 36.

The operating principle of the actuator 13 will be described below with reference to FIG. Parts (a), (b), and (c) of FIG. 9 are diagrams illustrating the operating principle of the actuator 13. For convenience of explanation, one linear motor 22A and carriage 26 are shown in FIG. 9, and illustration of the other linear motor 22B, etc. is omitted.

Part (a) of FIG. 9 shows a mode in which the position of the carriage 26 is maintained. As described above, in the carriage 26, the drive shaft 28A is sandwiched between the pressure disc 34 and the rear disc 36, and the position of the carriage 26 is maintained by the pressurization caused by the sandwiching. More specifically, the carriage 26 is maintained in its position by a frictional resistance force using pressurization as a normal force. At this time, the control device 27 does not provide voltage to the ultrasonic element 29A (voltage value zero, see voltage E1). Alternatively, the control device 27 may provide the ultrasonic element 29A with a direct current having a predetermined voltage value.

As described above, the carriage 26 maintains its position by the frictional resistance between it and the drive shaft 28A. Here, when moving the drive shaft 28A, there may be a mode in which the carriage 26 moves along with the drive shaft 28A, or a mode in which the carriage 26 continues to maintain its position due to its inertia without moving along with the drive shaft 28A. These modes can be determined by the speed at which the drive shaft 28A is moved, that is, the frequency of the ultrasonic vibration. For example, when the frequency is relatively low (15 kHz to 30 kHz), the carriage 26 moves along with the drive shaft 28A. For example, at relatively high frequencies (100 kHz to 150 kHz), carriage 26 maintains its position without following drive shaft 28A.

For example, as shown in part (b) of FIG. 9, when the drive shaft 28A is moved upward (positive direction), the carriage 26 is also moved along with the movement of the drive shaft 28A. In other words, the relative positional relationship between the drive shaft 28A and the carriage 26 does not change. Then, when the drive shaft 28A is moved downward (negative direction), the carriage 26 is not accompanied by the downward movement of the drive shaft 28A. In other words, the relative positional relationship between the drive shaft 28A and the carriage 26 changes. By repeating these operations, the carriage 26 gradually moves upward. In other words, by making the cycle of the voltage that moves the drive shaft 28A upward (sign E2a in voltage E2) longer than the cycle of the voltage that moves the drive shaft 28A downward (sign E2b in voltage E2), the carriage 26 can be moved upwards.

Conversely, as shown in part (c) of FIG. 9, when the drive shaft 28A is moved downward, the carriage 26 is also moved along with the movement of the drive shaft 28A. In other words, the relative positional relationship between the drive shaft 28A and the carriage 26 does not change. When the drive shaft 28A is moved upward, the carriage 26 is not moved upwardly by the drive shaft 28A. In other words, the relative positional relationship between the drive shaft 28A and the carriage 26 changes. By repeating these operations, the carriage 26 gradually moves downward. In other words, the carriage 26 can be moved downward.

Note that when moving the carriage 26 downward, in addition to the above control, the carriage 26 may be configured not to follow both the vertical movement of the drive shaft 28A. That is, it appears that the frictional resistance between the carriage 26 and the drive shaft 28A becomes smaller than the gravity acting on the carriage 26, and the carriage 26 appears to fall. In this embodiment, gravity acting on the carriage 26 is used as a force for moving the carriage 26 downward.

Next, specific operations of the actuator 13 will be described with reference to FIGS. 10 and 11.

Part (a) of FIG. 10 shows the operation of maintaining the position of the carriage 26. As described above, when maintaining the position of the carriage 26, the control device 27 provides a constant voltage (see voltages E4 and E5 in part (a) of FIG. 10) to the respective ultrasonic elements 29A and 29B. do.

Part (b) of FIG. 10 shows the operation of moving the carriage 26 upward. At this time, the control device 27 applies an alternating current voltage (see FIG. (see voltage E6 in part (b) of 10). Similarly, the control device 27 applies an AC voltage ( (See voltage E7 in part (b) of FIG. 10). That is, the control device 27 provides the same AC voltage to both ultrasonic elements 29A, 26B. Then, the control device 27 matches the timing at which one drive shaft 28A is moved upward and the timing at which the other drive shaft 28B is moved upward. That is, the control device 27 sets the phase of the voltage provided to one ultrasonic element 29A and the phase of the voltage provided to the other ultrasonic element 29A to be in phase with each other. Then, the contact portion P1 where one drive shaft 28A is pressed against the pressurized disk 34 and the rear disk 36, and the contact portion P2 where the other drive shaft 28B is pressed against the pressurized disk 34 and the rear disk 36 are as follows. It moves upward by the same distance. As a result, the contact portions P1 and P2 move upward while maintaining their parallel state. In other words, the carriage 26 translates upward without rotating around the center of gravity.

Part (c) of FIG. 10 shows the operation of moving the carriage 26 downward. At this time, the control device 27 applies an alternating current voltage (see FIG. (see voltage E8 in part (c) of 10). Similarly, the control device 27 applies an AC voltage ( (See voltage E9 in part (c) of FIG. 10). Then, the contact portion P1 where one drive shaft 28A is pressed against the pressurized disk 34 and the rear disk 36, and the contact portion P2 where the other drive shaft 28B is pressed against the pressurized disk 34 and the rear disk 36 are as follows. It moves downward the same distance. As a result, the contact portions P1 and P2 move upward while maintaining their parallel state. In other words, the carriage 26 translates upward without rotating around the center of gravity.

According to the above control, when the carriage 26 is moved downward, a frictional resistance force acts between the carriage 26 and the drive shafts 28A, 28B, and their relative positions do not change. Therefore, the carriage 26 does not rotate around the center of gravity. As a result, even if, for example, a torque that rotates the carriage 26 is generated due to the attitude of the capillary 8 held by the carriage 26, the carriage 26 can be lowered while suppressing the rotation of the carriage 26. can be moved in the direction.

Incidentally, the translation for moving the carriage 26 upward and downward can also be realized by using only one linear motor 22A. Since the actuator 13 according to the embodiment has two linear motors 22A and 22B, it is possible to increase the propulsive force more than a configuration having one linear motor 22A.

Part (a) of FIG. 11 shows the operation of rotating the carriage 26 clockwise. At this time, the control device 27 applies an alternating current voltage (see FIG. 11 (see voltage E10 in part (a)). On the other hand, the control device 27 supplies the other ultrasonic element 29B with an alternating current voltage (Fig. 11 (see voltage E11 in part (a)). That is, the control device 27 makes the voltage provided to the ultrasonic element 29A and the voltage provided to the ultrasonic element 29B different from each other. Then, the control device 27 matches the timing of moving one drive shaft 28A upward and the timing of moving the other drive shaft 28B downward. That is, the control device 27 sets the phase of the voltage provided to one ultrasonic element 29A and the phase of the voltage provided to the other ultrasonic element 29B to be in opposite phases to each other. Then, the contact portion P1 where one drive shaft 28A is pressed against the pressurized disk 34 and the rear disk 36 moves downward, and the contact portion P1 where the other drive shaft 28B is pressed against the pressurized disk 34 and the rear disk 36. P2 moves upward. That is, the contact portions P1 and P2 move in opposite directions. If these moving amounts match, the contact parts P1 and P2 rotate clockwise while maintaining their positions in the Z-axis direction.

Part (b) of FIG. 11 shows the operation of rotating the carriage 26 counterclockwise. At this time, the control device 27 applies an alternating current voltage (see FIG. (see voltage E12 in part (b) of 11). On the other hand, the control device 27 supplies the other ultrasonic element 29B with an alternating current voltage (Fig. (see voltage E13 in part (b) of 11). Then, the contact portion P1 where one drive shaft 28A is pressed against the pressurized disk 34 and the rear disk 36 moves upward, and the contact portion P1 where the other drive shaft 28B is pressed against the pressurized disk 34 and the rear disk 36. P2 moves downward. That is, the contact portions P1 and P2 move in opposite directions. If these moving amounts match, the contact parts P1 and P2 rotate counterclockwise while maintaining their positions in the Z-axis direction.

<Replacement operation>
Next, a description will be given of the capillary exchange operation performed by the capillary exchange section 9 described above.

Part (a) of FIG. 12 shows the state immediately before the capillary 8U attached to the ultrasonic horn 7 is replaced. In addition to the capillary holding section 11, capillary guide section 12, and actuator 13 described above, the capillary exchange section 9 includes a capillary stocker 39 and a capillary recovery section 41 as additional components. The capillary stocker 39 accommodates a plurality of replacement capillaries 8N. Further, the capillary recovery section 41 accommodates the used capillary 8U.

The state shown in part (a) of FIG. 12 is, for example, a state in which wire bonding work is being performed by the capillary 8U attached to the ultrasonic horn 7. Therefore, the capillary exchange section 9 may be retracted to a position where it does not interfere with the wire bonding work.

Part (b) of FIG. 12 shows the state of the first step in the exchange operation. First, the capillary exchange section 9 rotates the carriage 26 clockwise using the control device 27 . This rotation corresponds to the operation shown in part (a) of FIG. Due to this rotation, the capillary holding portion 11, which had been retracted to a position where it does not interfere with the wire bonding work, is positioned below the capillary 8U.

Part (a) of FIG. 13 shows the state of the second step in the exchange operation. The capillary exchange section 9 moves the carriage 26 upward by the control device 27. This movement corresponds to the operation shown in part (b) of FIG. Due to this movement, the capillary holding section 11 holds the capillary 8U attached to the ultrasonic horn 7.

Part (b) of FIG. 13 shows the state of the third step in the exchange operation. The capillary exchange section 9 moves the carriage 26 downward by the control device 27. This movement corresponds to the operation shown in part (c) of FIG. By this movement, the capillary 8U held by the capillary holding part 11 is removed from the ultrasonic horn 7.

Part (a) of FIG. 14 shows the state of the fourth step in the exchange operation. The capillary exchange section 9 causes the carriage 26 to rotate clockwise by the control device 27. This movement corresponds to the operation shown in part (a) of FIG. By this movement, the capillary 8U held by the capillary holding section 11 is conveyed to the capillary recovery section 41 and recovered as a used capillary 8U.

Part (b) of FIG. 14 shows the state of the fifth step in the exchange operation. The capillary exchange section 9 rotates the carriage 26 counterclockwise by the control device 27. This movement corresponds to the operation shown in part (b) of FIG. Due to this movement, the capillary holding section 11 holds a new capillary 8N for replacement.

Part (a) of FIG. 15 shows the state of the sixth step in the exchange operation. The capillary exchange section 9 causes the carriage 26 to rotate clockwise by the control device 27. This movement corresponds to the operation shown in part (a) of FIG. Due to this movement, the new capillary 8N held by the capillary holding part 11 is located below the hole 7h of the ultrasonic horn 7.

Part (b) of FIG. 15 shows the state of the seventh step in the exchange operation. The capillary exchange section 9 moves the carriage 26 upward by the control device 27. This movement corresponds to the operation shown in part (b) of FIG. By this movement, the new capillary 8N held by the capillary holding part 11 is inserted into the hole 7h of the ultrasonic horn 7. In this insertion, due to the actions of the capillary holding part 11 and the capillary guide part 12 shown in FIGS. Since the deviation from 7h is eliminated, it can be installed reliably.

Hereinafter, the effects of the actuator 13 and wire bonding device 1 according to the embodiment will be explained.

The actuator 13 includes a pair of linear motors 22A and 22B, and the force generated in each of the linear motors 22A and 22B is controlled by a control device 27. According to this configuration, the carriage 26 can be translated by matching the directions of the forces generated in the pair of linear motors 22A and 22B. Furthermore, by making the directions of the forces generated in the linear motors 22A and 22B opposite to each other, a torque is generated in the carriage 26 around the center of gravity. As a result, the carriage 26 can be rotated around its center of gravity. As a result, the actuator 13 is capable of multiple translational and rotational movements.

That is, although the actuator 13 according to the present embodiment is capable of translation and rotation, it is not necessary to prepare a drive mechanism only for translation and a drive mechanism only for rotation. Therefore, the size of the actuator 13 can be reduced compared to a configuration in which a translational drive mechanism and a rotational drive mechanism are each provided.

The wire bonding apparatus 1 includes a capillary exchange section 9 equipped with an actuator 13. This actuator 13 can perform two operations: translation and rotation. Therefore, it is possible to provide the wire bonding apparatus 1 with the function of replacing the capillary 8 while suppressing the capillary replacement section 9 from increasing in size. Therefore, the wire bonding device 1 can be made both highly functional and compact.

Furthermore, in the wire bonding apparatus 1, the capillary 8 held by the capillary holding part 11 is inserted into the hole 7h while being guided by the capillary guide part 12. Therefore, even if the capillary 8 is misaligned with respect to the hole 7h, the misalignment is corrected by the capillary guide section 12. Further, in the capillary holding section 11 , the flexible section 10 including the upper socket 16 and the coil spring 17 holds the capillary 8 so as to be movable relative to the lower socket 18 fixed to the actuator 13 . As a result, even when the capillary guide 12 is misaligned with the hole 7h in addition to the misalignment of the capillary 8 with the hole 7h, the posture of the capillary 8 is adjusted so that the capillary 8 follows the capillary guide 12 and the hole 7h. It can be inserted while changing. Therefore, a new capillary 8 can be automatically attached to the wire bonding apparatus 1 without the operator's intervention.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments and may be implemented in various forms.

<Modification 1>
In the embodiment, an ultrasonic drive motor based on an impact drive method using the law of inertia is exemplified as the first and second force generating units. However, the first and second force generating sections are not limited to this configuration, and may be adopted as the first and second force generating sections as long as they can generate a force along a predetermined direction. For example, a linear guide using a ball screw may be employed as the first and second force generating sections.

<Modification 2>
The capillary holder only needs to be able to hold the capillary 8 in a manner that allows the posture of the capillary 8 to be changed flexibly. Therefore, the structure of the capillary holding section is not limited to the above, and a capillary holding section 11A according to the modification shown in FIG. 16 may be adopted.

The capillary holding part 11A has a metal pipe 42, a silicone resin tube 43, and a cap 44 as main components. The pipe 42 has a cylindrical shape and accommodates the tube 43 therein. One end of the pipe 42 and one end of the tube 43 are closed by a cap 44. This cap 44 is held by the holder 14. The upper end 43a (upper end opening edge) of the tube 43 substantially coincides with the upper end 42a of the pipe 42. Further, the outer diameter of the tube 43 is smaller than the inner diameter of the pipe 42. That is, a slight gap is formed between the outer peripheral surface of the tube 43 and the inner peripheral surface of the pipe 42. The tapered surface 8a of the capillary 8 is held at the upper end 43a of the tube 43.

According to this capillary holding portion 11A, the tube 43 has a predetermined flexibility. Therefore, the capillary holding portion 11A can allow the capillary 8 to change its posture by the amount of the gap formed between the outer circumferential surface of the tube 43 and the inner circumferential surface of the pipe 42. Specifically, eccentricity and inclination in the direction intersecting the axis 42A of the pipe 42 can be tolerated.

Here, in the case of only the tube 43, the rigidity of the tube 43 may be insufficient depending on the posture of the capillary 8, so there may be a case where the capillary 8 cannot be held. However, since the pipe 42, which is more rigid than the tube 43, exists outside the tube 43, even if the tube 43 lacks rigidity, the displacement of the capillary 8 can be kept within an allowable range by the pipe 42. can.

Further, when the capillary 8 is inserted into the tube 43, the inner peripheral edge of the upper end 43a and the tapered surface 8a are in line contact. Therefore, similarly to the capillary holding section 11A according to the embodiment, the capillary 8 can also be held at an angle.

<Modification 3>
The capillary guide section 12 guides the capillary 8 to the hole 7h of the ultrasonic horn 7 while bringing the capillary 8 into contact with the wall surface of the tapered hole section 12t and the wall surface of the parallel hole section 12p. The tapered hole portion 12t and the parallel hole portion 12p have an opening 12e on the front end surface 12c, as shown in FIG. 17. According to this shape, when the capillary 8 is moved upward, the capillary 8 is not supported forward (in the There is a possibility that it will lean towards. Therefore, the capillary guide section 12S according to the modified example prevents the capillary 8 from being tilted and allows the capillary 8 to be inserted into the hole 7h of the ultrasonic horn 7 more reliably.

As shown in FIGS. 17, 18, and 19, the capillary guide portion 12S has a guide hole 12h that guides the capillary 8 to the hole 7h. The guide hole 12h includes a tapered hole portion 12t (first hole portion) and a parallel hole portion 12p (second hole portion) arranged along the insertion direction of the capillary 8 (Z-axis direction). The capillary guide section 12 includes a tapered section 51 in which a tapered hole section 12t is formed, and a parallel guide section 52 in which a parallel hole section 12p is formed.

The tapered hole portion 12t is a mortar-shaped taper hole whose diameter decreases toward the insertion direction (Z-axis direction). The insertion direction here refers to the direction from the lower surface 12b toward the upper surface 12a. Further, the parallel hole 12p is arranged coaxially with the hole 7h, and guides the capillary 8 along the axis 12A (see FIGS. 18 and 19) of the parallel hole 12p. "Coaxial" here is not limited to the fact that the axis 12A of the parallel hole portion 12p and the axis 7A of the hole 7h completely coincide (overlap). “Coaxial” refers to the positional relationship of the axes that allows the capillary 8 to be inserted from the parallel hole portion 12p to the hole 7h, and refers to the positional relationship between the axes that allows the capillary 8 to be inserted from the parallel hole portion 12p to the hole 7h. Misalignment is allowed.

The capillary guide portion 12S includes a pair of coil springs 53. The coil spring 53 provides a force toward the capillary 8 inserted into the parallel hole 12p in a direction intersecting the axis 12A (in-plane direction of the XY plane). This coil spring 53 is provided in the parallel guide section 52. Specifically, it is inserted into a hole 52h provided in the parallel guide portion 52. The coil spring 53 supports the capillary 8 located on the parallel guide portion 52.

The coil spring 53 is arranged so that its axis L53 is parallel to the XY plane. Further, the axis L53 of the coil spring 53 is in a twisted position with respect to the axis 12A. A point P12 on the wall surface 12W where the capillary 8 can come into contact, the axis 12A of the parallel hole 12p, and a point P53 on the coil spring 53 where the capillary 8 can come into contact are diameters passing through the axis 12A of the parallel hole 12p. It is arranged on the direction line 12K.

The coil spring 53 has an elastic modulus that allows it to maintain its shape in a state where no external force is applied (hereinafter referred to as a "natural state"). Specifically, when the coil spring 53 is held so that its axis L53 coincides with the horizontal direction, no significant deflection occurs in the vertical direction. When an external force is applied to the coil spring 53 in a direction intersecting the axis L53, the coil spring 53 generates a reaction force in the opposite direction to the external force.

As shown in FIG. 19, the capillary 8 is inserted into a region S surrounded by the wall surface 12W of the parallel hole 12p and the coil spring 53. The distance M1 between the coil spring 53 and the wall surface 12W is slightly smaller than the diameter of the capillary 8. Then, when the capillary 8 is inserted into the region S, the capillary 8 presses (force F1) the coil spring 53 to the side opposite to the wall surface 12W (that is, to the opening 12e side). In response to this force F1, the coil spring 53 generates a reaction force F2. This reaction force F2 forces the capillary 8 against the wall surface 12W.

Therefore, in the parallel hole portion 12p, the outer peripheral surface 8t of the capillary 8 contacts the wall surface 12W. That is, in a state where the outer peripheral surface 8t of the capillary 8 is in contact with the wall surface 12W, the capillary 8 slides in the direction of the axis 12A. As a result, the capillary 8 can move in a stable state without being tilted with respect to the axis 12A, so that the capillary 8 can be guided to the hole 7h of the ultrasonic horn 7 more reliably.

Note that the coil spring 53 as a biasing member shown in FIGS. 17, 18, 19, etc. is an example, and the configuration of the biasing member is not limited to the coil spring 53. The biasing member may be appropriately employed as long as it can press the capillary 8 toward the wall surface 12W of the parallel hole 12p.

DESCRIPTION OF SYMBOLS 1... Wire bonding device, 2... Base, 3... Bonding part, 4... Conveyance part, 6... Bonding tool, 7... Ultrasonic horn, 7h... Hole, 8... Capillary, 8a... Tapered surface, 8b... Capillary body, 9 ...Capillary replacement part, 11...Capillary holding part, 12, 12S...Capillary guide part, 12h...Guide hole, 12t...Tapered hole part, 12p...Parallel hole part, 13...Actuator, 14...Holder, 16...Upper socket, 16c ... Counterbore part, 16d... Step, 16e... Small diameter part, 16h... Through hole, 17... Coil spring, 18... Lower socket, 18d... Step, 18e... Small diameter part, 18f... Large diameter part, 19... O-ring, 21... Actuator base (base part), 22A... Linear motor (first force generating part), 22B... Linear motor (second force generating part), 24... Linear guide, 26... Carriage, 27... Control device (control part) , 28A, 28B... Drive shaft, 29A, 29B... Ultrasonic element, 31, 32... Guide, 33... Front disk, 34... Pressurized disk, 36... Rear disk, 37, 38... Shaft body, 39... Capillary stocker, 41... Capillary recovery part, G1, G2... Gap, P1, P2, C1, C2... Contact part, 51... Taper part, 52... Parallel guide part, 53... Coil spring.

Claims (3)

a capillary holding part that removably holds the capillary;
an actuator that moves the capillary holding part that holds the capillary along a predetermined direction so that the capillary held by the capillary holding part is inserted into a capillary holding hole of a bonding tool;
a capillary guide part disposed between the capillary holding part and the bonding tool and guiding the capillary to the capillary holding hole as the capillary holding part moves;
The capillary holding part is
a cap attached to the actuator;
a cylindrical tube having an upper opening edge capable of holding the capillary and having a lower end closed by the cap;
a cylindrical pipe that accommodates the tube;
the pipe is more rigid than the tube;
A wire bonding device, wherein a gap is provided between an inner circumferential surface of the pipe and an outer circumferential surface of the tube. The actuator is
The base part and
a moving body disposed on the base portion, to which the capillary holding portion is attached, and for moving the capillary holding portion;
The wire bonding apparatus according to claim 1, wherein the capillary guide part is fixed to the base part. 3. The wire bonding apparatus according to claim 1, wherein the upper opening edge of the tube is in line contact with the tapered surface of the capillary.

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