TW201937620A - Wire bonding device - Google Patents

Abstract

A wire bonding device 1 is equipped with: an ultrasonic horn 7 having a hole 7h for detachably holding a capillary 8; a capillary holding part 11 for detachably holding the capillary 8 to be inserted into the hole 7h; an actuator 13 for moving the capillary holding part 11 in a manner such that the capillary 8 held by the capillary holding part 11 is inserted into the hole 7h; and a capillary guide part 12 for guiding the capillary 8 into the hole 7h as the actuator 13 moves the capillary holding part 11.

Description

Wire bonding device

The present invention relates to a wire bonding device.

Patent Document 1 discloses a wire bonding apparatus. The wire bonding device has a capillary as a bonding tool. The wire bonding apparatus connects the wire to the electrode by applying heat or ultrasonic vibration or the like to the wire by using the wire.
[Prior Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2018-6731

[Problems to be solved by the invention]

In a manufacturing plant of an electronic device, a plurality of manufacturing apparatuses are operated in order to manufacture a large number of electronic devices. If the number of manufacturing devices is increased, the number of productions can be increased. On the other hand, the manufacturing apparatus requires various maintenance operations. Thus, the number of maintenance operations required to manufacture the device is required. Therefore, the increase in the number of productions is in a relationship with the load of maintenance operations. Therefore, if the maintenance work can be automatically performed without depending on the operator's hand, the load of the maintenance work can be reduced.

The wire bonding apparatus has a welding pin replacement operation as one of the maintenance operations. Therefore, in this technical field, automation of the replacement work of the welding pin is desired, and specifically, it is desirable to automate the operation of attaching the new welding pin to the wire bonding apparatus in a state where the used welding pin is removed.

In view of the above background, it is an object of the present invention to provide an automated wire bonding apparatus that can realize the operation of mounting a new welding pin to a wire bonding apparatus.
[Means for solving the problem]

A wire bonding apparatus according to an aspect of the present invention includes: a welding pin holding portion that detachably holds a welding pin; and an actuator for inserting a welding pin held by the welding pin holding portion into a welding pin holding hole of the bonding tool In the embodiment, the welding pin holding portion holding the welding pin is moved in a predetermined direction; and the welding pin guiding portion is disposed between the welding pin holding portion and the bonding tool, and guides the welding pin with the movement of the welding pin holding portion The soldering pin holding portion has a solder pin base portion fixed to the actuator and a flexible portion that is held so that the position of the solder pin relative to the solder pin base portion can be relatively displaced.

In the wire bonding apparatus, the welding pin held by the welding pin holding portion is inserted into the welding pin holding hole while being guided by the welding pin guide. Therefore, even if the welding pin is displaced with respect to the welding pin holding hole, the offset is corrected by the welding pin guide. Further, in the welding pin holding portion, the flexible portion holds the position of the welding pin so as to be relatively displaceable with respect to the base portion of the welding pin fixed to the actuator. As a result, even if the welding pin guiding portion is displaced with respect to the welding pin holding hole except for the offset of the welding pin with respect to the welding pin holding hole, the welding pin can follow the welding pin guiding portion and the welding pin can be held. The hole is inserted while the posture of the welding pin is changed. Therefore, the new welding pin can be automatically attached to the wire bonding device without depending on the operator's hand.

In another aspect of the wire bonding apparatus, the actuator may include: a base portion; and a moving body disposed on the base portion, the solder pin holding portion is attached to move the solder pin holding portion, and the solder pin guiding portion is fixed to Base bottom. According to this configuration, the relative positional relationship between the needle holding portion and the needle guiding portion that are moved by the actuator can be easily maintained. Therefore, the welding pin can be reliably attached to the bonding tool by the welding pin guide.

In the wire bonding apparatus of one aspect, the flexible portion may have an elastic portion, one end portion of which is fixed to the base portion of the welding pin, and a regulating portion provided at the other end portion of the elastic portion to restrict the welding pin. According to this configuration, the elastic portion can be elastically deformed based on the base of the welding pin. Further, a restriction portion is provided at the other end portion of the elastic portion, and the restriction portion restricts the welding needle. Therefore, the relative position of the welding pin with respect to the base portion of the welding pin can be displaced by the elastic portion. Therefore, the welding pin can be mounted to the bonding tool more reliably.

In the wire bonding apparatus of one form, the restricting portion may be in line contact with the tapered surface of the welding pin. According to this configuration, the restricting portion can allow the inclination of the held welding needle. Therefore, the posture of the welding pin can be displaced more flexibly, so that the welding pin can be further reliably attached to the bonding tool.

In the wire bonding device of one form, the regulating portion may be a torus-shaped O-ring, and the elastic portion may be a coil spring. According to this configuration, the welding pin holding portion can be configured by a simple configuration.

In another aspect of the wire bonding apparatus, the welding pin holding portion may have a hose including an upper end opening edge as a restricting portion and a body portion as an elastic portion; a cover to close the lower end of the hose; and a tubular pipe The lower end is closed by a cover, and the hose is accommodated, and the rigidity of the pipe is higher than that of the hose, and a gap is provided between the inner circumferential surface of the pipe and the outer circumferential surface of the hose. According to this configuration, the posture of the welding needle can be displaced by the hose. Further, since the pipe exists on the outer side of the hose, the displacement of the welding pin can be restricted to the allowable range by the pipe. Therefore, the welding pin can be reliably mounted to the bonding tool.

Another aspect of the bonding apparatus includes: a solder pin holding portion that detachably holds the solder pin; and an actuator that allows the solder pin held by the solder pin holding portion to be inserted into the solder pin holding hole of the bonding tool to maintain The welding pin holding portion of the welding needle moves in a predetermined direction; and the welding pin guiding portion is disposed between the welding pin holding portion and the bonding tool, and guides the welding pin to the welding pin holding hole along with the movement of the welding pin holding portion. The welding pin guiding portion is provided with a guiding hole for guiding the welding pin to the welding pin holding hole, and the welding pin guiding portion has a biasing member that provides the welding pin inserted into the guiding hole to face the axis of the guiding hole The direction of the force.

According to this configuration, the welding pin is guided by the biasing member against the wall surface of the welding pin guide portion while being guided in a predetermined direction. As a result, the welding pin can be moved in a stable state without being inclined, so that the welding pin can be reliably guided to the needle holding hole of the bonding tool.

In another aspect of the engagement device, the guide hole may include a first hole portion and a second hole portion which are arranged along the insertion direction of the welding pin, and the first hole portion is a tapered hole whose diameter decreases toward the insertion direction. The two hole portions are disposed coaxially with the welding pin holding holes to guide the welding pins along the axis of the welding pin holding holes. According to this configuration, the welding pin can be more reliably guided to the needle holding hole.

In another aspect of the bonding apparatus, the welding lead guiding portion may include a tapered portion in which the first hole portion is formed and a guiding portion in which the second hole portion is formed, and the biasing member is provided on the guiding portion. According to this configuration, the welding pin can be more reliably guided to the needle holding hole.
[Effects of the Invention]

According to the present invention, there is provided an automated wire bonding apparatus that can realize an operation of mounting a new welding pin to a wire bonding apparatus.

Hereinafter, the mode for carrying out the invention will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same components are denoted by the same reference numerals, and the repeated description is omitted.

The wire bonding apparatus 1 shown in FIG. 1 electrically connects an electrode such as a printed circuit board to an electrode of a semiconductor element provided on the printed circuit board, for example, using a metal wire having a small diameter. The wire bonding device 1 supplies heat, ultrasonic waves or pressure to the wire to connect the wire to the electrode. The wire bonding apparatus 1 has a base 2, a joint portion 3 for performing the connection work, and a conveyance portion 4 that conveys a printed circuit board or the like as a workpiece to the joint region.

The joint portion 3 includes a bonding tool 6, and an ultrasonic horn 7 is provided at the front end of the bonding tool 6. At the front end of the ultrasonic horn 7, a soldering pin 8 for supplying heat, ultrasonic waves or pressure to the wire is detachably provided.

In the following description, the direction in which the ultrasonic horn 7 is extended is referred to as an X-axis, and the direction in which the transport substrate is transported by the transport unit 4 is the Y-axis (second direction), and the direction in which the solder pins 8 are moved during the bonding operation ( The Z-axis direction, the first direction) is set to the Z-axis.

The welding pin 8 is a part that needs to be replaced periodically. Therefore, the wire bonding apparatus 1 has the welding pin replacement portion 9 that automatically replaces the welding pin 8 without the operation of the operator.

The welding pin replacement portion 9 collects the welding pin 8 attached to the ultrasonic horn 7, and mounts the welding pin 8 to the ultrasonic horn 7. That is, the replacement work of the welding pin 8 includes the operation of collecting the welding pin 8 and the work of mounting the welding pin 8. The replacement operation of the welding needle 8 is automatically performed when the predetermined condition is satisfied. For example, this condition can also be set as the number of joining operations. In other words, the work of replacing the welding pins 8 can be performed every time a predetermined number of joining operations are performed.

As shown in FIG. 2, the welding pin replacement portion 9 has a welding pin holding portion 11, a welding pin guiding portion 12, and an actuator 13 as main constituent members. Further, the jig driving unit 20 having the attaching and detaching jig 15 and the drive attaching and detaching jig 15 is an additional component.

<Welding Needle Holder>
The welding pin holding portion 11 holds the welding pin 8. The welding pin holding portion 11 is attached to the actuator 13 via the holder 14 . The welding pin holding portion 11 has a cylindrical shape extending in the Z-axis direction. The lower end of the needle holding portion 11 is held by the holder 14. The welding pin 8 is detachably inserted into the upper end of the welding pin holding portion 11.

As shown in FIG. 3, the welding pin holding portion 11 has an upper socket 16, a coil spring 17 (elastic portion), a lower socket 18 (solder base portion), and an O-ring 19 (restriction portion) as main components. The upper socket 16, the coil spring 17, and the lower socket 18 are disposed on a common axis. Specifically, the socket 16, the coil spring 17, and the lower socket 18 are arranged in this order from top to bottom.

The upper socket 16 has a substantially cylindrical shape and has a through hole 16h that reaches the lower end surface 16b from the upper end surface 16a. Since the upper socket 16 holds the tapered surface 8a of the welding pin 8, the inner diameter of the through hole 16h corresponds to the outer diameter of the tapered surface 8a of the welding pin 8. For example, the inner diameter of the through hole 16h is smaller than the outer diameter of the needle body 8b. Further, a counterbore portion 16c for the O-ring 19 is provided on the upper end surface 16a side of the through hole 16h. The counterbore portion 16c has a size that can accommodate the O-ring 19. That is, the depth of the counterbore portion 16c is the same as the height of the O-ring 19, and the inner diameter thereof is the same as the outer diameter of the O-ring 19.

The O-ring 19 has a so-called annular shape. The O-ring 19 is in direct contact with the tapered surface 8a of the welding pin 8. That is, in the welding pin holding portion 11, the O-ring 19 holds the welding pin 8. This retention is achieved by an adhesive layer formed on the surface of the O-ring 19. The inner diameter of the O-ring 19 is set to be substantially the same as the inner diameter of the through hole 16h, and the tapered surface 8a of the welding pin 8 is inserted.

Further, since the upper socket 16 has the step 16d provided on the outer peripheral surface, the outer diameter is different from the upper end surface 16a side and the lower end surface 16b side. Specifically, the outer diameter on the lower end surface 16b side is slightly smaller than the outer diameter on the upper end surface 16a side. A coil spring 17 is fitted to the small diameter portion 16e on the lower end surface 16b side.

The lower socket 18 has a substantially cylindrical shape. The upper end surface 18a of the lower socket 18 faces the lower end surface 16b of the upper socket 16. The lower socket 18 has the same outer shape as the upper socket 16. That is, the lower socket 18 is also provided with a step 18d on its outer peripheral surface. In contrast to the upper socket 16, the lower socket 18 has the upper end surface 18a side as the small diameter portion 18e. A coil spring 17 is also fitted to the small diameter portion 18e on the upper end surface 18a side. The large diameter portion 18f on the lower end surface 18b side of the lower socket 18 is held by the holder 14.

The coil spring 17 is a compression spring. The coil spring 17 is fitted to the small-diameter portion 16e of the upper socket 16 and its lower end side to the small-diameter portion 18e of the lower socket 18. The upper socket 16 and the coil spring 17 constitute a flexible portion 10. Therefore, the upper socket 16 and the lower socket 18 are coupled by the coil spring 17. Further, the coil spring 17 has elasticity in the direction of the axis 17A and the direction crossing the axis 17A. As a result, the upper socket 16 can change the relative position with respect to the lower socket 18.

The welding pin holding portion 11 having the above configuration has the holding state shown in the portions of Fig. 4 (a) to Fig. 4 (c). Part (a) of Fig. 4 shows the welding pin holding portion 11 in an initial state. Part (b) of Fig. 4 shows the welding pin holding portion 11 of the first modification. The part (c) of Fig. 4 shows the welding pin holding portion 11 of the second modification.

As shown in part (a) of Fig. 4, in the solder pin holding portion 11 of the first holding state, the axes 16A, 18A of the upper socket 16 and the lower socket 18 are overlapped. Further, the axis 8A of the welding pin 8 also coincides with the axes 16A, 18A.

As shown in part (b) of Fig. 4, in the solder pin holding portion 11 of the second holding state, the axes 16A, 18A of the upper socket 16 and the lower socket 18 do not overlap. Specifically, the upper socket 16 moves in the direction of the X-axis and the Y-axis with respect to the lower socket 18 held at the holder 14 and maintained at its position. In this state, the axis 16A of the upper socket 16 is parallel with respect to the axis 18A of the lower socket 18.

As shown in part (c) of Fig. 4, in the solder pin holding portion 11 of the third modification, the axes 16A and 18A of the upper socket 16 and the lower socket 18 are overlapped. That is, the composition is the same as the first holding aspect. On the other hand, the axis 8A of the welding pin 8 is inclined with respect to the axis 16A of the upper socket 16. Since the O-ring 19 has a circular shape, the inner circumferential surface on which the tapered surface 8a of the welding pin 8 is inserted is a curved surface. For example, the cross-sectional shape of the O-ring 19 in the cross section parallel to the Z-axis is circular. Then, when the tapered surface 8a is inserted into the O-ring 19, the O-ring 19 and the tapered surface 8a are in contact with the two contact portions C1 and C2. That is, the O-ring 19 and the welding pin 8 are in contact with the line in contact with the annular contact line CL (see FIG. 3). . According to this contact state, the welding pin 8 is allowed to incline with respect to the axis 19A of the O-ring 19.

<welding needle guide>
As shown in FIG. 2 again, the welding pin guide portion 12 guides the welding pin 8 when the welding pin 8 is inserted into the hole 7h (the welding pin holding hole) of the ultrasonic horn 7. The welding pin guide portion 12 is provided in the actuator 13. Therefore, the welding needle guide portion 12 maintains a relative positional relationship with the components constituting the actuator 13. The welding pin guide portion 12 has a single-arm shape extending from the actuator 13 to the ultrasonic horn 7.

FIG. 5 is a perspective view showing a principal part of the welding pin guide portion 12. As shown in Fig. 5, the welding pin guide portion 12 has a guide hole 12h provided at a free end portion thereof. The guide hole 12h receives the needle body 8b of the welding pin 8, and guides the welding pin 8 to the hole 7h of the ultrasonic horn 7. The guide hole 12h is a through hole that reaches the lower surface 12b from the upper surface 12a of the welding needle guide portion 12. Further, the guide hole 12h is also opened at the front end surface 12c of the welding pin guide portion 12. That is, the guide hole 12h can receive the welding pin 8 from the lower surface 12b and the front end surface 12c.

The guide hole 12h includes a tapered hole portion 12t and a parallel hole portion 12p. The lower end of the tapered hole portion 12t is open to the lower surface 12b. The upper end of the parallel hole portion 12p is open to the upper surface 12a. The inner diameter of the tapered hole portion 12t in the lower surface 12b is larger than the inner diameter of the parallel hole portion 12p in the upper surface 12a. This inner diameter is larger than the outer diameter of the upper end of the welding pin 8. That is, the inner diameter of the guide hole 12h gradually decreases from the lower surface 12b to the upper surface 12a, and the position at which the tapered hole portion 12t and the parallel hole portion 12p are coupled becomes the minimum value of the inner diameter. This inner diameter is substantially the same as the outer diameter of the upper end of the welding pin 8. Further, in the parallel hole portion 12p, the inner diameter thereof is constant.

Parts (a) and (b) of Fig. 6 show a state in which the welding pin 8 is guided by the welding pin guide portion 12. In the state shown in the portion of Fig. 6 (a), the axis 7A of the hole 7h of the ultrasonic horn 7 coincides with the axis 12A of the guide hole 12h of the pin guide portion 12. On the other hand, the axis 8A of the welding pin 8 held by the welding pin holding portion 11 is displaced in parallel in the X-axis direction with respect to the axes 7A and 12A.

The welding pin holding portion 11 is moved in the Z-axis direction from the state shown in the portion of Fig. 6 (a). Then, as shown in part (b) of Fig. 6, first, the upper end of the welding pin 8 contacts the wall surface of the tapered hole portion 12t. When the needle holding portion 11 is further moved upward, the welding needle 8 moves along the wall surface. This movement includes components in the horizontal direction (X-axis direction) in addition to the components in the upward direction (Z-axis direction). The welding pin holding portion 11 can move the upper socket 16 relative to the lower socket 18 by the coil spring 17. That is, when the lower socket 18 is moved upward, the upper socket 16 moves upward while moving in the horizontal direction by the coil spring 17.

According to this movement, the axis 8A of the welding pin 8 gradually approaches the axis 7A of the hole 7h. Further, when the upper end of the welding pin 8 reaches the parallel hole portion 12p, the axis 8A of the welding pin 8 coincides with the axis 7A of the hole 7h. Therefore, the welding pin 8 is inserted into the hole 7h of the ultrasonic horn 7.

In the example shown in part (a) of Fig. 6, the positional relationship between the ultrasonic horn 7 and the needle guiding portion 12 is an ideal state. On the other hand, in the example shown in Fig. 7 (a), the axis 7A of the hole 7h of the ultrasonic horn 7 is inclined with respect to the axis 12A of the welding pin guide portion 12.

The operation of inserting the welding pin 8 in this state will be described. As shown in part (b) of Fig. 7, the axis 8A of the welding pin 8 is relatively inclined with respect to the axis 7A of the hole 7h. Therefore, the upper end of the welding pin 8 is in contact with the wall surface of the hole 7h, so that the welding pin 8 cannot be inserted more into the hole 7h. In order to further insert the welding pin 8 into the hole 7h, it is necessary to make the axis 8A of the welding pin 8 parallel with respect to the axis 7A of the hole 7h, and to make the axis 8A coincide with the axis 7A.

As described above, in the welding pin holding portion 11, the upper socket 16 can be displaced with respect to the lower socket 18, and the welding pin 8 can be inclined with respect to the axis 16A of the upper socket 16. According to these effects, as shown in part (c) of Fig. 7, as the needle holding portion 11 is raised, the axis 8A of the welding pin 8 can gradually approach the axis 7A of the hole 7h, and finally inserted into the hole 7h. In other words, since the welding pin holding portion 11 flexibly holds the welding pin 8, the offset of the welding pin 8 and the welding pin guiding portion 12 and the deviation of the welding pin 8 from the hole 7h of the ultrasonic horn 7 can be absorbed. Therefore, the welding pin 8 can be reliably mounted according to the welding pin holding portion 11 and the welding pin guiding portion 12.

<actuator>
The actuator 13 moves the welding pin 8 or the new welding pin 8 to be replaced, and holds the welding pin 8 at a predetermined position and posture. The actuator 13 can perform a reciprocating movement along a predetermined parallel axis (Z-axis) direction. In the present embodiment, the parallel axis is along the vertical direction (Z axis). Therefore, the actuator 13 moves the welding pin 8 up and down in the vertical direction. Further, the actuator 13 can perform rotation about the rotation axis (X axis). In the present embodiment, the rotation axis is orthogonal to the vertical direction (Z axis). That is, the rotation axis is along the horizontal direction (X axis). Therefore, the actuator 13 rotates the welding pin 8 in the horizontal direction.

The actuator 13 has an actuator base 21 (base portion), a pair of linear motors 22A, 22B (first force generating portion, second force generating portion), a linear guide 24, a carriage 26 (moving body), and control Device 27 (control unit, see Fig. 1 and the like).

The actuator base 21 has a flat shape and has a main surface 21a. The normal direction of the main surface 21a is along the horizontal direction (X-axis direction). Linear motors 22A and 22B, a linear guide 24, and a carriage 26 are disposed on the main surface 21a.

The linear motor 22A moves the carriage 26. The linear motor 22A is an ultrasonic motor based on the principle of an so-called impact drive method. The linear motor 22A has a drive shaft 28A and an ultrasonic element 29A (ultrasonic generation unit). The drive shaft 28A is a metal round bar, and its axis is disposed in parallel with respect to the main surface 21a of the actuator base 21. The carriage 26 moves along the drive shaft 28A, so the length of the drive shaft 28A determines the range of movement of the carriage 26. The lower end of the drive shaft 28A is fixed to the ultrasonic element 29A. The upper end of the drive shaft 28A is supported by a guide portion 31 that protrudes from the main surface 21a of the actuator base 21. The upper end of the drive shaft 28A can be fixed with respect to the guide portion 31, or can be contacted only and not fixed. That is, the lower end of the drive shaft 28A is a fixed end, and the upper end is a fixed end or a free end.

Ultrasonic vibration is supplied to the drive shaft 28A by the ultrasonic element 29A. Specifically, the drive shaft 28A provided with ultrasonic vibration slightly moves back and forth along the Z axis. The ultrasonic element 29A can also be, for example, a piezo element as a piezoelectric element. The piezoelectric element is deformed in accordance with the applied voltage. Therefore, when a piezoelectric element is given a high-frequency voltage, it is repeatedly deformed according to the frequency and the magnitude of the voltage, and ultrasonic vibration is generated. The ultrasonic element 29A is fixed to the guide 32 that protrudes from the actuator base 21.

A control device 27 is electrically connected to the ultrasonic element 29A, and is subjected to a driving voltage generated by the control device 27. The control device 27 controls the frequency and amplitude of the alternating voltage supplied to the ultrasonic element 29A.

The single motor of the linear motor 22B has the same configuration as the linear motor 22A. The linear motor 22B is disposed apart from each other in the Y-axis direction crossing the Z-axis. That is, the drive shaft 28B of the linear motor 22B is parallel with respect to the drive shaft 28A of the linear motor 22A. Further, the upper end of the linear motor 22B is disposed at the same height as the upper end of the linear motor 22A. Similarly, the lower end of the linear motor 22B is disposed at the same height as the lower end of the linear motor 22A.

The carriage 26 is a moving body that is translated and rotated by the linear motors 22A, 22B. The carriage 26 has a disk shape and is disposed between the linear motors 22A and 22B. Between the actuator base 21 and the carriage 26, a linear guide 24 for guiding the carriage 26 in the Z-axis direction is provided. The carriage 26 is guided by the linear guide 24 in the Z-axis direction. Further, the linear guide 24 restricts the moving direction of the carriage 26, and does not generate a driving force in the Z-axis direction.

The carriage 26 has a front disc 33, a pressure disc 34 and a rear disc 36. The disks have the same outer diameter as each other and are stacked along a common axis. A shaft body 37 is sandwiched between the front disc 33 and the pressure disc 34. The outer diameter of the shaft body 37 is smaller than the outer diameters of the front disc 33 and the pressure disc 34. Therefore, a gap is formed between the outer peripheral portion of the front disk 33 and the outer peripheral portion of the pressure disk 34. Similarly, a shaft body 38 is sandwiched between the rear disc 36 and the pressure disc 34. The outer diameter of the shaft body 37 is also smaller than the outer diameters of the rear disc 36 and the pressure disc 34. Therefore, a gap is also formed between the outer peripheral portion of the rear disk 36 and the outer peripheral portion of the pressure disk 34.

The rear disc 36 is coupled to the platform 24a of the linear guide 24. Here, the rear disc 36 is rotatably coupled with respect to the platform 24a. On the other hand, since the pressurizing disc 34 and the front disc 33 are mechanically fixed to the rear disc 36, the pressurizing disc 34 and the front disc 33 do not rotate with respect to the rear disc 36. Accordingly, the carriage 26 including the front disc 33, the pressure disc 34, and the rear disc 36 is generally rotatable relative to the platform 24a of the linear guide 24.

As shown in FIG. 8, the drive shafts 28A and 28B are interposed in the gap G1 between the pressurizing disc 34 and the rear disc 36. Specifically, the pair of drive shafts 28A and 28B are disposed to sandwich the center of gravity of the carriage 26 . Further, the drive shafts 28A and 28B are in contact with the back surface 34b of the pressure disk 34 and the main surface 36a of the rear disk 36. Further, the drive shafts 28A, 28B are not in contact with the outer peripheral surface 38a of the shaft body 38. That is, the gap G1 is smaller than the outer diameters of the pressurizing disc 34 and the rear disc 36, and larger than the outer diameter of the shaft body 38. Further, the difference between the outer diameter of the shaft body 38 and the outer diameter of the rear disc 36 is larger than the outer diameters of the drive shafts 28A, 28B. Similarly, the difference between the outer diameter of the shaft body 37 and the outer diameter of the pressure disc 34 is larger than the outer diameters of the drive shafts 28A, 28B.

Here, the interval of the gap G1 is slightly smaller than the outer diameters of the drive shafts 28A, 28B. Since the gap G2 is formed between the front disc 33 and the pressurizing disc 34, when the drive shafts 28A and 28B are disposed between the pressurizing disc 34 and the rear disc 36, the pressurizing disc 34 is slightly forward. The disc 33 is deflected sideways. This deflection produces a force that presses the drive shafts 28A, 28B against the rear disc 36.

Hereinafter, the principle of operation of the actuator 13 will be described with reference to FIGS. 9(a) to 9(c). Parts (a), 9 (b), and 9 (c) are diagrams for explaining the principle of operation of the actuator 13. For convenience of explanation, one of the linear motor 22A and the carriage 26 is shown in the parts of Fig. 9 (a) to Fig. 9 (c), and the other linear motor 22B and the like are omitted.

The portion of Fig. 9(a) shows the state in which the position of the carriage 26 is held. As described above, in the carriage 26, the drive shaft 28A is interposed between the pressurizing disc 34 and the rear disc 36, and the position of the carriage 26 is maintained by the pressurization by the sandwiching. More specifically, the carriage 26 maintains its position by frictional resistance with a vertical resistance of pressurization. At this time, the control device 27 does not supply the voltage (voltage value zero, reference voltage E1) to the ultrasonic element 29A. Alternatively, the control device 27 may supply the ultrasonic element 29A with a direct current having a predetermined voltage value.

As described above, the carriage 26 maintains its position by frictional resistance with the drive shaft 28A. Here, when the drive shaft 28A is moved, it is possible to cause the carriage 26 to move along with the drive shaft 28A and the carriage 26 to maintain the position by the inertia without the drive shaft 28A. With regard to these aspects, it is possible to determine which aspect to be based on the speed at which the drive shaft 28A is moved, that is, the frequency of the ultrasonic vibration. For example, at a relatively low frequency (15 kHz to 30 kHz), the carriage 26 moves with the drive shaft 28A. For example, at a relatively high frequency (100 kHz to 150 kHz), the carriage 26 does not maintain the position with the drive shaft 28A.

For example, as shown in part (b) of Fig. 9, when the drive shaft 28A is moved upward (positive direction), the carriage 26 is also accompanied by the movement of the drive shaft 28A. That is, the relative positional relationship between the drive shaft 28A and the carriage 26 does not change. Further, when the drive shaft 28A is moved downward (negative direction), the carriage 26 is not moved downward with the drive shaft 28A. That is, the relative positional relationship between the drive shaft 28A and the carriage 26 changes. When these actions are repeated, the carriage 26 gradually moves upward. That is, the period of the voltage (the symbol E2a in the voltage E2) for moving the drive shaft 28A upward is longer than the period of the voltage for moving the drive shaft 28A downward (the symbol E2b in the voltage E2), so that the carriage 26 can be made upward. mobile.

On the contrary, as shown in part (c) of Fig. 9, when the drive shaft 28A is moved downward, the carriage 26 is also accompanied by the movement of the drive shaft 28A. That is, the relative positional relationship between the drive shaft 28A and the carriage 26 does not change. Further, when the drive shaft 28A is moved upward, the carriage 26 is prevented from moving upward with respect to the drive shaft 28A. That is, the relative positional relationship between the drive shaft 28A and the carriage 26 changes. When these actions are repeated, the carriage 26 gradually moves downward. That is, the period of the voltage (the symbol E3a in the voltage E3) that moves the drive shaft 28A upward is shorter than the period of the voltage (the symbol E3b in the voltage E3) that causes the drive shaft 28A to move downward, so that the carriage 26 can be moved toward Move below.

Further, in the case where the carriage 26 is moved downward, the carriage 26 may not follow both the vertical movement of the drive shaft 28A in addition to the above control. That is, on the surface, the frictional resistance between the carriage 26 and the drive shaft 28A is smaller than the gravity acting on the carriage 26, and it appears that the carriage 26 is dropped. In this aspect, as the force for moving the carriage 26 downward, the gravity acting on the carriage 26 is utilized.

On the other hand, the specific operation of the actuator 13 will be described with reference to FIGS. 10(a) to 10(c) and FIGS. 11(a) and 11(b).

The part of Fig. 10 (a) shows the operation of maintaining the position of the carriage 26. As described above, when the position of the carriage 26 is maintained, the control device 27 supplies a constant voltage to each of the ultrasonic elements 29A and 29B (refer to voltages E4 and E5 in the portion (a) of Fig. 10).

Part (b) of Fig. 10 shows an operation of moving the carriage 26 upward. At this time, the control device 27 supplies, to one of the ultrasonic elements 29A, an AC voltage having a period in which the voltage of the drive shaft 28A is moved upward is longer than a period in which the drive shaft 28A is moved downward (refer to the portion in FIG. 10(b)). Voltage E6). Similarly, the control device 27 also supplies, to the other ultrasonic element 29B, an AC voltage having a period in which the voltage of the drive shaft 28B is moved upward is longer than a period in which the drive shaft 28B is moved downward (refer to FIG. 10(b)). Voltage E7). That is, the control device 27 supplies the same alternating voltage to the two ultrasonic elements 29A, 26B. Moreover, the control device 27 causes the timing at which one of the drive shafts 28A to move upward coincides with the timing at which the other drive shaft 28B is moved upward. That is, the control device 27 sets the phase of the voltage supplied to one of the ultrasonic elements 29A and the phase of the voltage supplied to the other ultrasonic element 29A to the same phase relationship with each other. Then, the contact portion P1 that presses one of the drive shafts 28A against the pressurizing disc 34 and the rear disc 36 is the same as the contact portion P2 that presses the other drive shaft 28B against the pressurizing disc 34 and the rear disc 36. The distance gradually moves upwards. As a result, the contact portions P1 and P2 move in the parallel state and move upward. That is, the carriage 26 does not rotate about the center of gravity but translates upward.

Part (c) of Fig. 10 shows an operation of moving the carriage 26 downward. At this time, the control device 27 supplies, to one of the ultrasonic elements 29A, an AC voltage having a period in which the voltage of the drive shaft 28A is moved upward is shorter than a period in which the drive shaft 28A is moved downward (refer to FIG. 10(c) Voltage E8). Similarly, the control device 27 supplies the other ultrasonic element 29B with an alternating current voltage having a period in which the voltage of the drive shaft 28B is moved upward is shorter than a period in which the drive shaft 28B is moved downward (refer to FIG. 10(c)). The voltage in E9). Then, the contact portion P1 that presses one of the drive shafts 28A against the pressurizing disc 34 and the rear disc 36 is the same as the contact portion P2 that presses the other drive shaft 28B against the pressurizing disc 34 and the rear disc 36. The distance gradually moves downward. As a result, the contact portions P1 and P2 move in the parallel state and move upward. That is, the carriage 26 does not rotate about the center of gravity but translates upward.

According to the above control, when the carriage 26 is moved downward, the frictional resistance acts between the carriage 26 and the drive shafts 28A and 28B, and the relative positions of the carriages do not change. Therefore, the carriage 26 also does not rotate about the center of gravity. As a result, for example, even when the torque of the carriage 26 is rotated by the posture of the welding pin 8 held by the carriage 26, the rotation of the carriage 26 can be suppressed, and the carriage 26 can be moved downward. .

Furthermore, the translation of the carriage 26 up and down can also be achieved by a linear motor 22A. The actuator 13 of the embodiment has two linear motors 22A and 22B, so that the propulsive force can be improved as compared with the configuration having one linear motor 22A.

Part (a) of Fig. 11 shows an operation of rotating the carriage 26 in the clockwise direction. At this time, the control device 27 supplies, to one of the ultrasonic elements 29A, an AC voltage having a period in which the voltage of the drive shaft 28A is moved upward is shorter than a period in which the drive shaft 28A is moved downward (refer to FIG. 11(a) Voltage E10). On the other hand, the control device 27 supplies the other ultrasonic element 29B with an alternating current voltage having a period in which the voltage of the drive shaft 28B is moved upward is longer than a period in which the drive shaft 28B is moved downward (refer to FIG. 11(a)). Voltage E11). That is, the control device 27 makes the voltage supplied to the ultrasonic element 29A different from the voltage supplied to the ultrasonic element 29B. Moreover, the control device 27 causes the timing at which one of the drive shafts 28A to move upward coincides with the timing at which the other drive shaft 28B moves downward. That is, the control device 27 sets the phase of the voltage supplied to one of the ultrasonic elements 29A and the phase of the voltage supplied to the other ultrasonic element 29B to each other in an opposite phase relationship. Then, one of the drive shafts 28A is pressed against the contact portion P1 of the pressurizing disc 34 and the rear disc 36, and the other drive shaft 28B is pressed against the contact portion P2 of the pressurizing disc 34 and the rear disc 36. Move up. That is, the contact portions P1, P2 move in opposite directions from each other. When the amount of movement of the contact portions coincides, the contact portions P1 and P2 maintain the position in the Z-axis direction and rotate in the clockwise direction.

Part (b) of Fig. 11 shows an operation of rotating the carriage 26 in the counterclockwise direction. At this time, the control device 27 supplies, to one of the ultrasonic elements 29A, an AC voltage having a period in which the voltage of the drive shaft 28A is moved upward is longer than a period in which the drive shaft 28A is moved downward (refer to the portion in FIG. 11(b)). Voltage E12 is referred to). On the other hand, the control device 27 supplies, to the other ultrasonic element 29B, an AC voltage having a period in which the voltage of the drive shaft 28B is moved upward is shorter than a period in which the drive shaft 28B is moved downward (refer to FIG. 11(b)). Voltage E13). Then, one of the drive shafts 28A is pressed against the contact portion P1 of the pressurizing disc 34 and the rear disc 36, and the other drive shaft 28B is pressed against the contact portion P2 of the pressurizing disc 34 and the rear disc 36. Move down. That is, the contact portions P1, P2 move in opposite directions from each other. When the amount of movement of the contact portions coincides, the contact portions P1 and P2 maintain the position in the Z-axis direction and rotate in the counterclockwise direction.

<replacement action>
Next, the welding pin replacement operation by the welding pin replacement unit 9 will be described.

Fig. 12 (a) shows a state immediately before the welding pin 8U attached to the ultrasonic horn 7 is replaced. The welding pin replacement portion 9 has, in addition to the welding pin holding portion 11, the welding pin guiding portion 12, and the actuator 13, a pin stock stock 39 and a pin collecting portion 41 as additional components. The welding pin storage portion 39 accommodates a plurality of replacement welding pins 8N. Further, the welding pin collecting portion 41 houses the used welding pin 8U.

The state shown in part (a) of FIG. 12 is a state in which the wire bonding work is performed by the welding pin 8U attached to the ultrasonic horn 7, for example. Therefore, the welding pin replacement portion 9 can also be retracted to a position that does not interfere with the wire bonding work.

Part (b) of Fig. 12 shows the state of the first step in the replacement operation. First, the welding pin replacing portion 9 rotates the carriage 26 in the clockwise direction by the control device 27. This rotation corresponds to the operation shown in the portion of Fig. 11(a). By this rotation, the needle holding portion 11 that is originally retracted to a position that does not interfere with the wire bonding work is positioned below the welding pin 8U.

Fig. 13 (a) shows the state of the second step in the replacement operation. The welding pin replacing portion 9 moves the carriage 26 upward by the control device 27. This movement corresponds to the action shown in part (b) of Fig. 10 . By this movement, the welding pin holding portion 11 holds the welding pin 8U attached to the ultrasonic horn 7.

Part (b) of Fig. 13 shows the state of the third step in the replacement operation. The welding pin replacing portion 9 moves the carriage 26 downward by the control device 27. This movement corresponds to the action shown in part (c) of Fig. 10 . By this movement, the welding pin 8U held by the welding pin holding portion 11 is removed from the ultrasonic horn 7.

Fig. 14 (a) shows the state of the fourth step in the replacement operation. The welding pin replacing portion 9 rotates the carriage 26 in the clockwise direction by the control device 27. This movement corresponds to the operation shown in part (a) of Fig. 11 . By this movement, the welding pin 8U held by the welding pin holding portion 11 is conveyed to the welding pin collecting portion 41, and is collected as the used welding pin 8U.

Part (b) of Fig. 14 shows the state of the fifth step in the replacement operation. The welding pin replacing portion 9 rotates the carriage 26 in the counterclockwise direction by the control device 27. This movement corresponds to the operation shown in part (b) of Fig. 11 . By this movement, the welding pin holding portion 11 holds the new welding pin 8N for replacement.

Fig. 15 (a) shows the state of the sixth step in the replacement operation. The welding pin replacing portion 9 rotates the carriage 26 in the clockwise direction by the control device 27. This movement corresponds to the operation shown in part (a) of Fig. 11 . By this movement, the new welding pin 8N held by the welding pin holding portion 11 is positioned below the hole 7h of the ultrasonic horn 7.

Part (b) of Fig. 15 shows the state of the seventh step in the replacement operation. The welding pin replacing portion 9 moves the carriage 26 upward by the control device 27. This movement corresponds to the action shown in part (b) of Fig. 10 . By this movement, the new welding pin 8N held by the welding pin holding portion 11 is inserted into the hole 7h of the ultrasonic horn 7. In this insertion, the roles of the soldering pin holding portion 11 and the soldering pin guiding portion 12 shown in FIG. 6(a) and FIG. 6(b) and FIGS. 7(a) to 7(c) are shown. The offset of the welding pin 8N and the welding pin guide 12 and the offset of the welding pin 8N and the hole 7h of the ultrasonic horn 7 are eliminated, so that it can be reliably mounted.

Hereinafter, the operation and effect of the actuator 13 and the wire bonding apparatus 1 of the embodiment will be described.

The actuator 13 is provided with a pair of linear motors 22A, 22B, and the force generated in each of the linear motors 22A, 22B is controlled by the control device 27. According to this configuration, the carriage 26 can be translated by matching the directions of the forces generated in the pair of linear motors 22A and 22B. Further, by causing the directions of the forces generated in the linear motors 22A and 22B to reverse each other, the carriage 26 generates a torque around the center of gravity. As a result, the carriage 26 can be rotated about its center of gravity. As a result, the actuator 13 can perform a plurality of operations such as translation and rotation.

That is, the actuator 13 of the present embodiment can perform translation and rotation without separately preparing a drive mechanism for only translation and a drive mechanism for rotating only. Therefore, the size of the actuator 13 can be reduced as compared with the configuration in which the translation drive mechanism and the rotation drive mechanism are separately prepared.

The wire bonding apparatus 1 includes a welding pin replacement portion 9 including an actuator 13. The actuator 13 can perform both translation and rotation. Therefore, the wire bonding apparatus 1 can be provided with the replacement function of the welding pin 8, and the size of the welding pin replacement portion 9 can be suppressed from increasing. Therefore, it is possible to achieve both high functionality and miniaturization of the wire bonding apparatus 1.

Further, in the wire bonding apparatus 1, the welding pin 8 held by the welding pin holding portion 11 is inserted into the hole 7h while being guided by the welding pin guiding portion 12. Therefore, even if the welding pin 8 is displaced with respect to the hole 7h, the offset is corrected by the welding pin guide 12. Further, in the welding pin holding portion 11, the flexible portion 10 including the upper socket 16 and the coil spring 17 is held at a position where the welding pin 8 can be relatively displaced with respect to the lower socket 18 fixed to the actuator 13. As a result, even when the welding pin guiding portion 12 is displaced with respect to the hole 7h except for the offset of the welding pin 8 with respect to the hole 7h, the welding pin 8 can follow the welding pin guiding portion 12 and the hole 7h. In the manner, the posture of the welding pin 8 is changed while being inserted. Therefore, the new welding pin 8 can be automatically attached to the wire bonding apparatus 1 without depending on the operator's hand.

Although the embodiments of the present invention have been described above, the present invention is not limited to the embodiments and can be implemented in various forms.

<Modification 1>
In the embodiment, as the first force generating portion and the second force generating portion, an ultrasonic drive motor based on the principle of the inertia law using the impact drive method is exemplified. However, the first force generating portion and the second force generating portion are not limited to this configuration, and may be used as the first force generating portion and the second force generating portion as long as a force in a predetermined direction can be generated. For example, as the first force generating portion and the second force generating portion, a linear guide using a ball screw may be employed.

<Modification 2>
The welding pin holding portion can be held in a state in which the posture of the welding pin 8 can be flexibly changed. Therefore, the welding pin holding portion 11A of the modified example shown in Fig. 16 can be used without being limited to the configuration of the welding pin holding portion.

The welding pin holding portion 11A has a metal pipe 42, a hose 43 made of silicone resin, and a lid 44 as main components. The duct 42 has a tubular shape and houses a hose 43 therein. One end of the duct 42 and one end of the hose 43 are closed by a cover 44. The cover 44 is held by the holder 14. The upper end 43a (upper end opening edge) of the hose 43 substantially coincides with the upper end 42a of the duct 42. In addition, the outer diameter of the hose 43 is smaller than the inner diameter of the duct 42. That is, a slight gap is formed between the outer circumferential surface of the hose 43 and the inner circumferential surface of the duct 42. Further, the tapered surface 8a of the welding pin 8 is held at the upper end 43a of the hose 43.

According to the welding pin holding portion 11A, the hose 43 has a predetermined flexibility. Therefore, the welding pin holding portion 11A can allow the posture of the welding pin 8 to be changed to such an extent that it is formed in the gap between the outer circumferential surface of the hose 43 and the inner circumferential surface of the duct 42. Specifically, eccentricity and inclination in a direction crossing the axis 42A of the duct 42 can be tolerated.

Here, in the case of only the hose 43, the rigidity of the hose 43 may be insufficient due to the difference in the posture of the welding pin 8, and the welding pin 8 may not be held. However, on the outer side of the hose 43, there is a duct 42 having a higher rigidity than the hose 43, so that even when the rigidity of the hose 43 is insufficient, the displacement of the welding pin 8 can be restricted to the allowable range by the duct 42. .

Further, in a state in which the welding pin 8 is inserted into the hose 43, the contact state between the inner peripheral edge of the upper end 43a and the tapered surface 8a is in line contact. Therefore, similarly to the welding pin holding portion 11A of the embodiment, the welding pin 8 can be held obliquely.

<Modification 3>
The welding pin guide portion 12 guides the welding pin 8 to the hole 7h of the ultrasonic horn 7 while bringing the welding pin 8 into contact with the wall surface of the tapered hole portion 12t and the wall surface of the parallel hole portion 12p. As shown in FIG. 17, the tapered hole portion 12t and the parallel hole portion 12p have an opening portion 12e on the front end surface 12c. According to this shape, when the welding needle 8 is gradually moved upward, the welding pin 8 is not supported in the front (X-axis direction), and therefore the welding pin 8 may be inclined to the opposite side with respect to the wall surface 12W (see FIG. 19). Therefore, the welding pin guiding portion 12S of the modified example can prevent the occurrence of the inclination of the welding pin 8, and can reliably insert the welding pin 8 into the hole 7h of the ultrasonic horn 7.

As shown in FIGS. 17, 18, and 19, the welding pin guide portion 12S has a guide hole 12h for guiding the welding pin 8 to the hole 7h. The guide hole 12h includes a tapered hole portion 12t (first hole portion) and a parallel hole portion 12p (second hole portion) which are arranged along the insertion direction (Z-axis direction) of the welding pin 8. Further, the welding pin guide portion 12 includes a tapered portion 51 in which the tapered hole portion 12t is formed, and a parallel guide portion 52 in which the parallel hole portion 12p is formed.

The tapered hole portion 12t is a mortar-shaped tapered hole whose diameter is smaller toward the insertion direction (Z-axis direction). The insertion direction here refers to the direction from the lower surface 12b toward the upper surface 12a. Further, the parallel hole portion 12p is disposed coaxially with the hole 7h, and guides the welding pin 8 along the axis 12A of the parallel hole portion 12p (see FIGS. 18 and 19). Here, "coaxial" is not limited to the axis 12A of the parallel hole portion 12p and the axis 7A of the hole 7h completely coincide (coincident). The term "coaxial" means a positional relationship in which the welding pin 8 can be inserted from the parallel hole portion 12p to the axis of the hole 7h, and the axis which can insert the welding pin 8 from the parallel hole portion 12p into the hole 7h is biased from each other. shift.

Then, the welding pin guide portion 12S has a pair of coil springs 53. The coil spring 53 supplies a force to the welding pin 8 inserted into the parallel hole portion 12p in a direction (in-plane direction of the XY plane) that intersects the axis 12A. The coil spring 53 is provided in the parallel guide portion 52. Specifically, it is inserted into the hole 52h provided in the parallel guide portion 52. The coil spring 53 supports the solder pins 8 located at the parallel guides 52.

The coil spring 53 is disposed such that its axis L53 is parallel to the XY plane. Further, the axis L53 of the coil spring 53 is located at a twisted position with respect to the axis 12A. A point P12 of the wall surface 12W at which the welding pin 8 can abut, an axis 12A of the parallel hole portion 12p, and a point P53 of the coil spring 53 which can abut against the welding pin 8 are disposed in a radial line passing through the axis 12A of the parallel hole portion 12p. On 12K.

The coil spring 53 has a spring constant that maintains its shape in a state in which no external force acts (hereinafter referred to as "natural state"). Specifically, when the coil spring 53 is held such that its axis L53 coincides with the horizontal direction, no significant deflection occurs in the vertical direction. Further, when the coil spring 53 receives an external force in a direction crossing the axis L53, a reaction force that is opposite to the external force is generated.

As shown in FIG. 19, the soldering pin 8 is inserted in the region S surrounded by the wall surface 12W of the parallel hole portion 12p and the coil spring 53. The distance M1 between the coil spring 53 and the wall surface 12W is slightly smaller than the diameter of the welding pin 8. Then, when the welding pin 8 is inserted into the region S, the welding pin 8 presses the coil spring 53 toward the side opposite to the wall surface 12W (that is, on the side of the opening portion 12e) (force F1). The coil spring 53 generates a reaction force F2 for the force F1. The welding pin 8 is pressed against the wall surface 12W by the reaction force F2.

Therefore, in the parallel hole portion 12p, the outer peripheral surface 8t of the welding pin 8 is in contact with the wall surface 12W. In other words, in a state where the outer circumferential surface 8t of the welding pin 8 is in contact with the wall surface 12W, the welding pin 8 gradually slides in the direction of the axis 12A. As a result, the welding pin 8 can be moved in a stable state without being inclined with respect to the axis 12A, so that the welding pin 8 can be further reliably guided to the hole 7h of the ultrasonic horn 7.

Further, the coil spring 53 as the biasing member shown in FIG. 17, FIG. 18, FIG. 19, and the like is an example, and the configuration of the biasing member is not limited to the coil spring 53. The urging member can be suitably used as long as it can press the welding pin 8 toward the wall surface 12W of the parallel hole portion 12p.

1‧‧‧Wire bonding device

2‧‧‧Base

3‧‧‧ joints

4‧‧‧Transportation Department

6‧‧‧ Bonding tools

7‧‧‧Supersonic welding head

7A, 8A, 12A, 16A, 17A, 18A, 19A, 42A, L53‧‧

7h, 52h‧‧‧ holes 8, 8N, 8U‧‧‧ solder pins

8a‧‧‧ Cone

8b‧‧‧ soldering needle body

8t, 38a‧‧‧ outer perimeter

9‧‧‧weld replacement unit

11, 11A‧‧‧ soldering needle holding department

12, 12S‧‧‧ soldering needle guide

12a‧‧‧Upper surface

12b‧‧‧ lower surface

12c‧‧‧ front face

12e‧‧‧ openings

12h‧‧‧ Guide hole

12t‧‧‧ taper hole (first hole)

12p‧‧‧ parallel hole (second hole)

12K‧‧‧ radial line

12W‧‧‧ wall

13‧‧‧Actuator

14‧‧‧Retainer

15‧‧‧Loading and unloading fixture

16‧‧‧Upper socket

16a, 18a‧‧‧ upper end

16b, 18b‧‧‧ lower end

16c‧‧‧ countersunk hole

16d, 18d‧‧ ‧ step

16e, 18e‧‧‧ Small diameter department

16h‧‧‧through hole

17‧‧‧ coil spring (elastic part)

18‧‧‧Lower socket (solder base)

18f‧‧‧The Large Diameter Department

19‧‧‧O-ring (restriction)

20‧‧‧Clamp drive department

21‧‧‧Actuator base (base)

21a, 36a‧‧‧ main faces

22A‧‧‧Linear motor (first force generation unit)

22B‧‧‧Linear motor (second force generating unit)

24‧‧‧Linear guides

24a‧‧‧ platform

26‧‧‧Carriage (mobile body)

27‧‧‧Control device (control department)

28A, 28B‧‧‧ drive shaft

29A, 29B‧‧‧ Ultrasonic components

31, 32‧‧‧ Guides

33‧‧‧ front disc

34‧‧‧ Pressurized disc

34b‧‧‧Back

36‧‧‧ rear disc

37, 38‧‧‧ shaft body

39‧‧‧weld needle storage

41‧‧‧weld needle recycling department

42‧‧‧ Pipes

42a, 43a‧‧‧ upper end

43‧‧‧Hose

44‧‧‧ Cover

51‧‧‧ Cone

52‧‧‧Parallel Guide

53‧‧‧ coil spring

C1, C2, P1, P2‧‧‧ contact

CL‧‧‧contact line

E1, E2, E3, E4, E5, E6, E7, E8, E9, E10, E11, E12, E13‧‧‧ voltage

E2a, E2b, E3a, E3b‧‧‧ symbols

G1, G2‧‧‧ gap

F1‧‧‧ force

F2‧‧‧ reaction

M1‧‧‧ distance

P12, P53‧‧ points

S‧‧‧ area

Fig. 1 is a perspective view showing a wire bonding apparatus according to an embodiment.

Fig. 2 is an enlarged perspective view showing a welding pin replacement unit provided in the wire bonding apparatus shown in Fig. 1;

3 is a perspective view showing a part of the welding pin holding portion in a cross-sectional view.

4(a) to 4(c) are views for explaining the operation of the welding pin holding portion.

Fig. 5 is a perspective view showing a part of the welding lead guide portion in a cross-sectional view.

Part (a) of FIG. 6 and part (b) of FIG. 6 are diagrams showing the guiding function of the welding pin by the welding pin holding portion and the welding pin guiding portion.

Parts (a) to (c) of FIG. 7 are views showing another guiding function of the welding pins that are exerted by the welding pin holding portion and the welding pin guiding portion.

Fig. 8 is a plan view showing a main part of an actuator included in the welding pin replacement unit shown in Fig. 2;

Parts (a) to (c) of Fig. 9 are diagrams for explaining the principle of operation of the actuator.

Parts (a) to 10 (c) of Fig. 10 are diagrams for explaining specific control of the actuator.

Parts (a) and (b) of Fig. 11 are diagrams for explaining specific control of the actuator.

Parts (a) and (b) of Fig. 12 are views showing main operations of the welding pin replacement unit.

Parts (a) and (b) of Fig. 13 are diagrams showing main operations of the pin replacement unit following the portions of Fig. 12 (a) and Fig. 12 (b). Parts (a) and (b) of Fig. 14 are diagrams showing main operations of the pin replacement unit following the portions of Fig. 13 (a) and Fig. 13 (b). Parts (a) and (b) of Fig. 15 are diagrams showing main operations of the pin replacement unit following the portions of Fig. 14 (a) and Fig. 14 (b).

Fig. 16 is a perspective view showing a cross section of a welding pin holding portion according to a modification.

Fig. 17 is a perspective view showing a welding lead guide portion of another modification.

Fig. 18 is a front elevational view of the welding pin guide portion shown in Fig. 17;

Fig. 19 is a plan view showing the welding pin guide portion shown in Fig. 17;

Claims (9)

A wire bonding device comprising: a soldering pin holding portion capable of detachably holding the solder pin; An actuator for inserting the welding pin held by the welding pin holding portion into a welding pin holding hole of a bonding tool such that the welding pin holding portion holding the welding pin is along a predetermined direction Mobile; and a solder pin guiding portion is disposed between the solder pin holding portion and the bonding tool, and guides the solder pin to the solder pin holding hole in accordance with movement of the solder pin holding portion. The welding pin holding portion has a welding pin base portion fixed to the actuator, and a flexible portion that is held so that the position of the welding pin relative to the welding pin base portion can be relatively displaced. The wire bonding device according to claim 1, wherein The actuator has: Base bottom; and a moving body disposed on the base portion, the solder pin holding portion being mounted, and the solder pin holding portion being moved The welding pin guide is fixed to the base portion. The wire bonding device according to claim 1 or 2, wherein The flexible portion has: An elastic portion, one end portion being fixed to the base portion of the welding pin; and The restricting portion is provided at the other end of the elastic portion to restrict the welding pin. The wire bonding device according to claim 3, wherein The restricting portion is in line contact with the tapered surface of the welding pin. The wire bonding device according to claim 3 or 4, wherein The restricting portion is an annular O-ring, The elastic portion is a coil spring. The wire bonding device according to claim 3, wherein The welding pin holding portion has: a hose comprising an upper end opening edge as the restricting portion and a body portion as the elastic portion; a cover that closes the lower end of the hose; and a tubular pipe, the lower end is closed by the cover, and the hose is received The duct is stiffer than the hose, A gap is provided between the inner circumferential surface of the duct and the outer circumferential surface of the hose. A wire bonding device comprising: a soldering pin holding portion capable of detachably holding the solder pin; An actuator for inserting the welding pin held by the welding pin holding portion into a welding pin holding hole of a bonding tool such that the welding pin holding portion holding the welding pin is along a predetermined direction Mobile; and a solder pin guiding portion is disposed between the solder pin holding portion and the bonding tool, and guides the solder pin to the solder pin holding hole in accordance with movement of the solder pin holding portion. Providing a guiding hole for guiding the welding pin to the welding pin holding hole in the welding pin guiding portion; The welding pin guide portion has a biasing member that supplies a force in a direction intersecting an axis of the guiding hole to the welding pin inserted into the guiding hole. The wire bonding device according to claim 7, wherein The guiding hole includes a first hole portion and a second hole portion which are arranged along the insertion direction of the welding pin, The first hole portion is a tapered hole whose diameter is smaller toward the insertion direction, The second hole portion is disposed coaxially with the solder pin holding hole to guide the solder pin along an axis of the solder pin holding hole. The wire bonding device according to claim 8, wherein The welding pin guiding portion includes a tapered portion in which the first hole portion is formed and a guiding portion in which the second hole portion is formed. The urging member is provided at the guide portion.