KR101806147B1 - A system for exchanging capillary automatically - Google Patents

A system for exchanging capillary automatically Download PDF

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Publication number
KR101806147B1
KR101806147B1 KR1020150171753A KR20150171753A KR101806147B1 KR 101806147 B1 KR101806147 B1 KR 101806147B1 KR 1020150171753 A KR1020150171753 A KR 1020150171753A KR 20150171753 A KR20150171753 A KR 20150171753A KR 101806147 B1 KR101806147 B1 KR 101806147B1
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South Korea
Prior art keywords
capillary
clamping
loader
unit
air supply
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KR1020150171753A
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Korean (ko)
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KR20170032145A (en
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연근영
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연근영
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144—Gold (Au) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301—Capillary
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301—Capillary
    • H01L2224/78308—Removable capillary
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A clamping loader installed on the system main body and having a loader clamping portion for clamping the capillary at a front end; a capillary supply and recovery unit for supplying and recovering the capillary by air pressure with a clamping loader; And a capillary releasing device for unclamping the capillary from the capillary.

Description

A SYSTEM FOR EXCHANGING CAPILLARY AUTOMATICALLY}

The present invention relates to a capillary automatic replacement system capable of automatically replacing a capillary.

A wire bond process is one of the processes for fabricating a semiconductor package. A semiconductor chip and a substrate are connected by a gold wire so that electrical signals can flow Refers to a process in which a semiconductor has electrical characteristics.

The capillary used in the wire bonding process is a tool used to directly bond the gold wire and to make a wire loop. As an example of a sewing machine used for making clothes, a capillary that acts like a needle is a gold wire that corresponds to a thread.

The capillary is a consumable item that has a limit on usage and needs to be replaced in accordance with the usage limit. In the conventional capillary replacement process, when the capillary usage limit value is inputted to the wire bond equipment and the usage limit value is reached, the wire bond equipment generates an alarm and calls the operator. Thereafter, the operator initializes the amount of capillary used in the warning wire bond equipment, removes the fixing screw fixing the capillary, and mounts the new capillary. That is, the conventional capillary replacement is performed manually Which is a substantial part of the process.

Actually, in the actual semiconductor packaging process field, the number of the wire bond equipment reaches hundreds because of the characteristic of the wire bond process. Therefore, it is necessary to replace the capillaries of the various equipment in the wire bond process. In addition, since the fixing screw for fixing the capillary is removed and reinstalled, it takes a lot of time, which leads to a lot of time and cost loss in the capillary replacement process.

Korean Patent No. 10-1352586

SUMMARY OF THE INVENTION It is an object of the present invention to provide a system capable of automatically and automatically replacing a capillary.

According to an aspect of the present invention, there is provided a capillary automatic replacement system comprising: a clamping loader installed on a system body and having a loader clamping part for clamping a capillary at a tip end; A capillary supply and recovery unit for supplying and recovering the capillary by the air pressure with the clamping loader; And a capillary releasing device for unclamping the clamped capillary of the clamping loader.

Here, the capillary releasing device may include a release pin for changing the loader clamping portion to a release position when the capillary releasing device is pivoted while being inserted into a release pin engaging portion formed adjacent to the loader clamping portion of the clamping loader; An x-axis driving unit installed in an apparatus frame installed on an upper portion of the system body, for driving the releasing pin toward and away from the clamping loader in the x-axis; A y-axis driving unit installed in the x-axis driving unit for driving the releasing pin in the y-axis direction so as to be inserted into and separated from the releasing pin engaging portion; A rotation bar having one end rotatably connected to the y-axis drive unit; A pin support bar rotatably connected to the other end of the rotation bar and coupled to the release pin; And a spring connecting the pin support bar and the rotation bar.

The capillary supply and recovery unit may further include: a capillary transfer tube connected to a lower portion of the clamping loader; A capillary loading and unloading unit for moving the capillary to be supplied to the capillary transfer tube and collecting the capillary collected through the capillary transfer tube recovered from the clamping loader; An air supply and suction unit for providing discharge pressure and suction pressure to the capillary transfer tube; And a drive unit for connecting and disconnecting the capillary transfer tube and the air supply and suction unit from each other based on the capillary loading and unloading unit.

The clamping loading and unloading unit may include a capillary loading and unloading jig rotatably installed in a support housing fixed to a vertical frame installed in the system body, A jig rotation driving unit for rotationally driving the capillary loading and unloading jig; A plurality of capillary mounts installed at regular intervals along the circumferential direction on an upper portion of the capillary loading and unloading jig and having capillaries to be fed and capillaries to be collected; And a lower contact member located at a lower portion of the capillary loading and unloading jig corresponding to the capillary mounting portion and communicating with the capillary mounting portion, And the air supply and suction unit is capable of contacting and separating from the lower tight contact member.

The capillary conveying pipe may include a fixing pipe supported by a supporting bar provided on the system body and corresponding to a lower portion of the clamping unit of the clamping loader, A movable tube supported by the drive unit and driven to move toward and away from the capillary mount; And a connection pipe connecting between the fixed pipe and the movable pipe.

The air supply and suction unit may include an air supply nozzle installed in contact with and spaced from the lower close contact member in the support housing; A vacuum pump for supplying and sucking vacuum pressure to the air supply nozzle; And an air supply pipe connecting the air supply nozzle and the vacuum pump.

The driving unit may further include: a first movable member movably installed in the vertical frame to move the capillary transfer tube in contact with and spaced from the capillary mounting portion; A second movable member having the vertical frame movably installed to move the air supply nozzle in close contact with and away from the lower contact member; A connecting member connecting the first and second movable members; And an actuator installed in the vertical frame to reciprocate the first and second movable members.

According to the capillary automatic replacement system of the present invention, since the capillary is supplied or recovered by using the air pressure, the capillary can be supplied and recovered in a clamped state, It is possible to reduce the risk of malfunction due to the occurrence of an error or interruption of the operation.

Further, the releasing device of the present invention is advantageous in that the system is simple, miniaturized, and lightweight because the releasing device of the present invention is made by simple configuration and operation.

1 is a schematic plan view showing a capillary automatic replacement system according to an embodiment of the present invention.
FIGS. 2 to 12 are views for explaining a process of automatically replacing the capillary using the capillary automatic replacement system shown in FIG. 1. FIG.
13 is a partially enlarged view for explaining an enlarged view of the clamping loader shown in Fig.
14 and 15 are front views for explaining the operation of the capillary supplying and collecting unit.
16 is a left side view of the capillary feeding and collecting unit shown in Fig.
17 and 18 are schematic plan views for explaining the operation of the capillary feeding and collecting unit shown in Fig.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a capillary automatic exchange system according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 to 18, the capillary automatic replacement system according to the embodiment of the present invention includes a loader clamping unit 21 installed on the system body 100 to clamp the capillary 10 at the tip thereof, A capillary feeding and collecting unit 110, and a capillary releasing device 200. The clamping loader 20,

The system body 100 is provided with a loader mounting portion (not shown) in which the clamping loader 20 is detachably supported. The clamping loader 20 is mounted on the loader mounting portion. The clamping loader 20 is provided at its tip with a clamping portion 21 for clamping the outer periphery of the capillary 10 at the tip thereof. 13, the clamping unit 21 is a clamping unit. The clamping unit 21 compresses the capillary 10 while being clamped by the capillary 10 and is restored by an elastic force. The clamping unit 21 clamps the capillary 10, A re-mounting portion 21a, and a releasing pin engaging portion 21b formed to communicate with the capillary mounting portion 21a and having a predetermined space. When the release pin 201 having the noncircular cross-sectional structure of the unclamping device 200 is inserted into the release pin engagement portion 21b and then rotated about 90 degrees around the release pin 201, The capillary 10 in the clamping state can be released as the capillary mounting portion 21a is forcibly opened. Therefore, the used capillary 10 can be separated from the clamping portion 21, and a new capillary can be inserted into the capillary mounting portion 21a.

The capillary supply and recovery unit 110 is for withdrawing and recovering the capillary 10 mounted on the clamping loader 20 and supplying the new capillary 10. The capillary supply and recovery unit 110 includes a capillary transfer pipe 111 connected to the lower portion of the clamping loader 20 and a capillary transfer pipe 111 connected to the inlet of the capillary transfer pipe 111 A capillary loading and unloading section 114 for moving the capillary and collecting the capillary collected by the capillary transfer tube 111 and collecting the capillary collected by the capillary transfer tube 111, The capillary transfer tube 111 and the air supply and suction part 115 are connected to each other by the air supply and suction part 115 which provides pressure and suction pressure and the capillary loading and unloading part 114, And a driving unit 117 for connecting and disconnecting the driving unit 117 and the driving unit 117.

The capillary transfer tube 111 includes a fixed tube 111a supported by a support bar 112 installed in the system body 100 and a movable tube 111b and a fixed tube 111a provided in the drive unit 117. [ And a connection pipe 111c connecting the movable pipe 111b. The connecting pipe 111c may include a flexible hose, and the movable pipe 111b and the fixed pipe 111a may be metal pipes. The lower end of the movable pipe 111b may be coupled with a contact member 111d that is in close contact with the capillary mounting portion 114c provided in the capillary loading and unloading jig 114a described later. The contact member 111d is preferably made of a soft material such as rubber or silicone and has a tubular shape. Therefore, by driving the drive unit 117, the movable pipe 111b is brought into close contact with the capillary mounting portion 114c to prevent the air pressure from leaking to the outside, thereby preventing the pressure loss, It can be normally transported by using the air pressure.

The capillary loading and unloading unit 114 is installed at a lower portion of the movable tube 111b and is rotatably installed in a support housing 103 fixed to the vertical frame 101 coupled to the system body 100 A capillary loading and unloading jig 114a, and a jig rotation driving unit 114b for rotationally driving the capillary loading and unloading jig 114a.

   The capillary loading and unloading jig 114a is formed in a disk shape, and a rotation drive part 114b, that is, a drive motor is connected to the center part and is rotationally driven by a drive motor. The capillary loading and unloading jig 114a is provided with a capillary mounting portion 114c on which the capillary 10 is mounted. The capillary mounting portion 114c is preferably formed of a soft material and is arranged at regular intervals in an arc shape with respect to the center of the capillary loading and unloading jig 114a. In addition, the capillary mounting portion 114c is configured to communicate with the lower contact member 114d, which is coupled to the lower portion through the capillary loading and unloading jig 114a. The lower contact member 114d is also made of a soft material and can penetrate up and down to transmit the air pressure to the capillary mount 114c.

Therefore, as shown in Figs. 14 and 16, the movable pipe 111b located at the upper portion of the capillary loading and unloading jig 114a is lowered by the driving of the driving unit 117, And the vacuum (air pressure) pressure provided by the air supply and suction unit 115 is supplied to the capillary transfer tube 114a without any leakage when the end of the air supply nozzle 115a is brought into close contact with the lower contact member 114d. (111). Therefore, at the time of vacuum suction operation of the air supply and suction unit 115, the capillary 10 supported by the clamping unit 21 is recovered by the suction pressure of the used capillary 10, (114c). Conversely, when the air pressure is supplied from the air supply and suction unit 115, a new capillary 10 mounted on the capillary mount 114c is supplied through the capillary transfer tube 111 to the clamping unit 21).

The air supply and suction unit 115 includes an air supply nozzle 115a installed in the support housing 103 so as to be in contact with and spaced from the lower mounting unit 114d and an air supply nozzle 115a, A vacuum pump 115b for supplying and sucking air and an air supply pipe 115c for connecting the air supply nozzle 115a and the vacuum pump 115b.

The air supply nozzle 115a has a metal pipe structure and a soft contact member is coupled to the end of the air supply nozzle 115a so as to be in close contact with the lower contact member 114d to prevent leakage of air pressure. The air nozzle 115a is installed vertically movably in the support housing 103 and can be moved up and down by the drive unit 117. [ For example, the air supply nozzle 115a may be configured so that the interference pin 115d is connected to the driving unit 117 to interfere with the upward movement, and the downward movement is moved by the load.

One end of the air supply pipe 115c is connected to the lower end of the air supply nozzle 115a and the other end of the air supply pipe 115c is connected to the vacuum pump 115b.

The vacuum pump 115c provides vacuum pressure during operation to recover the capillary, or to provide air pressure to supply the capillary.

The driving unit 117 is for connecting or disconnecting the capillary transfer tube 111 and the air supply tube 115 so as to communicate with each other via the capillary loading and unloading jig 114a. The drive unit 117 includes a first movable member 117a for moving the capillary transfer tube 111, a second movable member 117b for moving the air supply pipe 115, And a connecting member 117c and an actuator 117d for connecting the members 117a and 117b.

The first movable member 117a is vertically movable on the vertical frame 101. The movable tube 111b is supported at one end and the actuator 117d and the connecting member 117c are connected to the other end . To this end, a clamper may be provided at one end of the first movable member 117a so as to clamp and fix or separate movable pipes 111b of various sizes. An actuator 117d is connected to the other end of the first movable member 117a and can be moved up and down.

The second movable member 117b is rotatably connected to the vertical frame 101 and has one end extended to selectively interfere with the interference pin 115d connected to the air supply nozzle 115a installed in the support housing 103 And the connecting member 117c is connected to the other end so as to be able to move simultaneously with the first movable member 117a.

The connecting member 117c is connected to the first and second movable members 117a so as to be interlocked with each other. The connecting member 117c may be formed of one or a plurality of parts and is connectable and detachable by bolt and nut fastening members, The connecting posture of the second movable member 117b can be adjusted.

The actuator 117d is fixed to the vertical frame 101 and is driven to move the first movable member 117a upward and downward during driving so that the first and second movable members 117a and 117b are simultaneously interlocked do. In other words, if the first movable member 117a is possible, the second movable member 117b is pivoted so that the one end thereof rises and pushes up the interference pin 115d. Accordingly, the fixing pipe 111b and the air supply nozzle 115a are connected and separated from each other so as to communicate with each other with the jig 114a interposed therebetween.

According to the capillary supplying and collecting unit 110 having the above-described configuration, as shown in FIG. 14, in a state in which the movable pipe 111b and the air supply nozzle 115a are closely attached to the jig 114a, The capillary 10 to be recovered in the clamping portion 21 is sucked through the capillary transfer tube 111 by the suction force so that the capillary 10a of the jig 114a, Mounted on the mounting portion 114c and recovered.

When the actuator 117d is driven in this state and the first and second movable members 117a and 117b are separated from each other as shown in Fig. 15, the capillary 10, which is located in the movable tube 111b, And is spaced apart from the movable pipe 111b while being exposed to the mounting portion 114c. And is separated from the jig 114a by the air supply nozzle 115a.

In this state, when the drive motor 114b is driven to rotate the jig 114a from the state of Fig. 17 to the state of Fig. 18 by a predetermined angle, the new capillary The lid 10 is located at the supply and recovery positions (located at the lower portion of the movable tube), and the recovered capillary is displaced from the supply and recovery positions. Then, the capillary collected in the jig 114a can be unloaded from the jig 114a and recovered by the unillustrated collecting means (the robot or the worker collects the work). A new capillary is loaded and supplied to the recovered empty seat (capillary mounting part).

When the new capillary 10 is positioned at the supply and recovery positions as described above and the first and the first movable members 117a and 117b approach the actuator 117d by driving the actuator 117d, The air supply nozzle 115a is brought into tight contact with the lower portion of the jig 114a to communicate with the movable pipe 111d. In this state, when the air pressure is supplied from the vacuum pump 115b, the air pressure is transmitted to the capillary 10 mounted on the capillary mounting portion 114c of the jig 114a, To the clamping portion 21 via the clamping portion 21.

In the capillary loading and unloading unit 100 having the above-described configuration, the capillary transfer tube 111 is positioned at a position directly under the capillary mounting portion 21a of the clamping loader 20 . Accordingly, the capillary transferred by the high-pressure air through the capillary transfer tube 111 is precisely positioned and controlled by the capillary mounting portion 21a. Even if the capillary is not supplied, And can enter the re-mounting portion 21a and be coupled. Therefore, compared to mounting the capillary through a mechanical operation of an actuator or the like in the prior art, the mounting error can be prevented, and tolerance in designing and assembling can be taken in a margin, thereby facilitating the manufacturing process.

The capillary releasing device 200 includes an x-axis driving unit 210 installed in a main frame 201 mounted on an upper portion of the system body 100, a y-axis driving unit 210 installed in an x- A pin support bar 240 rotatably connected to the other end of the pivot bar 230, a pivot support bar 240 rotatably connected to the other end of the pivot support bar 230, A release pin 260 coupled to an end of the bar 240 and a spring 250 connecting the pin support bar 240 and the rotation bar 230.

The x-axis driving unit 210 includes an x-axis driving motor 211 installed in the main frame 201 and an x-axis movable block 213 reciprocating in the x-axis direction by the x-axis driving motor 211 Respectively.

The y-axis drive unit 220 includes a rotation block 221 rotatably installed on the x-axis movable block 213, a y-axis drive motor 223 installed on the rotation block 221, And a y-axis movable block 225 reciprocating in the y-axis direction by the y-axis movable block 223. The pivot block 221 is installed between the home position and the operating position so as to be changeable in posture.

The y-axis driving motor 223 is installed in the pivot block 221 to reciprocate the y-axis movable block 225 when driven. One end of the rotation bar 230 is rotatably connected to a connection bar 225a extending from the y-axis movable block 225. [

One end of the rotation bar 230 is rotatably connected to the connection bar 225a and the other end thereof is rotatably connected to the pin support bar 240. [ The release pin 260 is installed at one end of the pin support bar 240. The spring 250 connects the other end of the pin support bar 240 and the rotation bar 230 to provide an elastic force in a direction in which the pin support bar 240 is expanded in a folded state.

According to the capillary automatic replacement system of the present invention having the above-described configuration, the rotation block 221 is rotated to be positioned at the initial position as shown in FIG. 1, that is, at the initial position, . When the release device 200 is driven in this state, the x-axis movable block 213, that is, the y-axis drive unit 220 is moved in the x-axis direction, that is, the clamping loader 20, . The rotation bar 230 and the pin support bar 240 are lowered by driving the y-axis drive unit 220 so that the release pin 260 is positioned at a position lower than the clamping loader 20.

In this state, the release pin 260 is further moved by x-axis driving to be positioned at the corresponding lower portion of the release pin engagement portion of the clamping loader 20 as shown in FIG. In this state, the y-axis driving unit 220 is driven to move the release pin 260 as shown in Figs. 5 and 13 (a) and insert it into the release pin engagement portion. When the x-axis driving unit 210 is driven and further moved in the x-axis direction in this state, as shown in Figs. 6 and 7, the pin supporting bar 240 is pivoted and pivoted by the pivoting bar 230, The posture of the pin 250 changes as shown in FIG. 13 (b) so that the capillary engaging portion 21a is opened.

8, the capillary 10, which has been coupled to the capillary engaging portion 21a by driving the capillary supplying and collecting unit 110, And separated and recovered.

Then, the new capillary 10 is again supplied from the capillary supply and recovery unit 110 to the capillary engagement portion 21a of the clamping loader 20 by using air pressure again. At this time, even if the capillary 10 supplied by the air does not exactly coincide with the transfer tube 111 and the capillary engaging portion 21a, the air pressure causes the capillary 10 to perform a minute tremble motion The capillary engagement portion 21a can naturally enter and engage with the capillary engagement portion 21a (see FIG. 9).

After the new capillary 10 is mounted, the y-axis driving unit 220 is driven by driving the x-axis driving unit 210 such that the releasing pin 250 is in the state shown in Fig. 13 (a) (See Fig. 10).

Then, as shown in FIG. 11, the y-axis driving unit 220 is driven to lower the release pin 250 to separate it from the release pin engaging portion 21b. Then, as shown in FIG. 12, When the x-axis driving unit 210 is driven to move the release pin 260 away from the lower portion of the clamping loader 20, the capillary replacement operation is completed.

According to the capillary automatic replacement system of the present invention having the above-described configuration, the capillary can be supplied or recovered using the air pressure. In this case, the capillary supplied or recovered by the air pressure is not precisely controlled in position, compared with the case where the capillary is conventionally loaded and unloaded by a mechanical clamper to be supplied and recovered, It can enter the capillary mounting portion 21a by the shaking motion and be coupled or recovered.

Therefore, it is possible to solve the malfunction, the failure, and the pause operation of the apparatus due to the mechanical operation error during the operation of the system, so that the reliability of the product can be improved and the workability can be improved.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. Those skilled in the art will readily appreciate that many modifications and variations of the present invention are possible without departing from the spirit and scope of the appended claims.

10. Capillary 20 .. Clamping Loader
100 .. System body 110 .. Capillary supply and recovery unit
200 .. Capillary release device 210 ..x axis drive unit
220 ..y shaft driving unit 230 .. rotation bar
240 .. pin support bar 250 .. spring
260 .. Release pin

Claims (7)

A clamping loader installed on the system main body and having a loader clamping part for clamping the capillary at a tip thereof;
A capillary supply and recovery unit for supplying and recovering the capillary by the air pressure with the clamping loader; And
And a capillary releasing device for unclamping the clamped capillary of the clamping loader,
The capillary supply and recovery unit includes:
A capillary transfer pipe connected to a lower portion of the clamping loader;
A capillary loading and unloading unit for moving the capillary to be supplied to the capillary transfer tube and collecting the capillary collected through the capillary transfer tube recovered from the clamping loader;
An air supply and suction unit for providing discharge pressure and suction pressure to the capillary transfer tube;
And a drive unit for connecting and disconnecting the capillary transfer tube and the air supply and suction unit to each other based on the capillary loading and unloading unit. The apparatus of claim 1, wherein the capillary releasing device comprises:
A release pin for changing the loader clamping portion to a release posture when it is pivoted while being inserted into a release pin engagement portion formed adjacent to the loader clamping portion of the clamping loader;
An x-axis driving unit installed on an apparatus frame installed on an upper portion of the system body, for driving the releasing pin toward and away from the clamping loader in the x-axis;
A y-axis driving unit installed in the x-axis driving unit for driving the releasing pin in the y-axis direction so as to be inserted into and separated from the releasing pin engaging portion;
A rotation bar having one end rotatably connected to the y-axis drive unit;
A pin support bar rotatably connected to the other end of the rotation bar and coupled to the release pin; And
And a spring connecting the pin support bar and the pivot bar. delete The capillary loading and unloading unit according to claim 1 or 2,
A capillary loading and unloading jig rotatably installed in a support housing fixed to a vertical frame installed in the system body;
A jig rotation driving unit for rotationally driving the capillary loading and unloading jig;
A plurality of capillary mounts installed at regular intervals along the circumferential direction on an upper portion of the capillary loading and unloading jig and having capillaries to be fed and capillaries to be collected; And
And a lower contact member located at a lower portion of the capillary loading and unloading jig corresponding to the capillary mounting portion and communicating with the capillary mounting portion,
The capillary transfer tube being accessible and spaced to receive a capillary mounted on the capillary mount,
Wherein the air supply and suction portions are in contact with and spaced from the lower contact member. 5. The capillary tube according to claim 4,
A fixing pipe supported on a support bar installed in the system body and corresponding to a lower portion of a clamping portion of the clamping loader;
A movable tube supported by the drive unit and driven to move toward and away from the capillary mount; And
And a connection pipe connecting the fixed pipe and the movable pipe. The air conditioner according to claim 4,
An air supply nozzle installed in the support housing so as to be in contact with and spaced from the lower close contact member;
A vacuum pump for supplying and sucking vacuum pressure to the air supply nozzle; And
And an air supply pipe connecting the air supply nozzle and the vacuum pump. 7. The apparatus according to claim 6,
A first movable member movably installed on the vertical frame so as to move the capillary transfer tube in contact with and spaced from the capillary mount;
A second movable member having the vertical frame movably installed to move the air supply nozzle in close contact with and away from the lower contact member;
A connecting member connecting the first and second movable members; And
And an actuator installed in the vertical frame to reciprocate the first and second movable members.
KR1020150171753A 2015-09-14 2015-12-03 A system for exchanging capillary automatically KR101806147B1 (en)

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KR102338722B1 (en) * 2017-04-05 2021-12-15 삼성전자주식회사 Method for exchanging capillary
KR102451574B1 (en) * 2018-01-30 2022-10-06 가부시키가이샤 신가와 Wire bonding device
JP7321492B2 (en) * 2018-01-30 2023-08-07 株式会社新川 wire bonding equipment

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