JP2019134163A - Wire bonding device - Google Patents

Abstract

To automate work for attaching a new capillary to a wire bonding device.SOLUTION: A wire bonding device 1 includes: an ultrasonic horn 7 having a hole 7h for detachably holding a capillary 8; a capillary holding part 11 which detachably holds the capillary 8 to be inserted into the hole 7h; an actuator 13 which moves the capillary holding part 11 so that the capillary 8 held by the capillary holding part 11 is inserted into the hole 7h; and a capillary guide part 12 which guides the capillary 8 to the hole 7h in conjunction with movement of the capillary holding part 11 by the actuator 13.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a wire bonding apparatus.

  Patent document 1 discloses a wire bonding apparatus. The wire bonding apparatus has a capillary which is a bonding tool. The wire bonding apparatus connects a wire to an electrode by applying heat or ultrasonic vibration to the wire using the capillary.

JP 2018-6731 A

  In an electronic device manufacturing factory, a plurality of manufacturing apparatuses are operated in order to manufacture a large amount of electronic devices. As the number of manufacturing devices increases, the number of production can be increased. On the other hand, the manufacturing apparatus requires various maintenance operations. If it does so, a maintenance operation | work will be required for the number of manufacturing apparatuses. Therefore, the increase in the number of production and the maintenance work load are in a contradictory relationship. Therefore, if the maintenance work can be automatically performed without relying on the operator's hand, the load of the maintenance work can be reduced.

  The wire bonding apparatus has a capillary replacement operation as one of the maintenance operations described above. Therefore, in this technical field, it has been desired to automate the replacement operation of capillaries, specifically, to automate the operation of attaching a new capillary to a wire bonding apparatus with a used capillary removed.

  In view of the above background, an object of the present invention is to provide a wire bonding apparatus capable of automating the operation of attaching a new capillary to a wire bonding apparatus.

  A wire bonding apparatus according to an aspect of the present invention includes a capillary holding unit that detachably holds a capillary, and a capillary held in the capillary holding unit in a predetermined direction so that the capillary is inserted into a capillary holding hole of a bonding tool. An actuator for moving the capillary holding part along which the capillary is held, a capillary guide part that is disposed between the capillary holding part and the bonding tool and guides the capillary to the capillary holding hole as the capillary holding part moves, The capillary holding part has a capillary base part fixed to the actuator, and a flexible part that holds the position of the capillary relative to the capillary base part so as to be relatively displaceable.

  In this wire bonding apparatus, the capillary held in the capillary holding part is inserted into the capillary holding hole while being guided to the capillary guide part. Therefore, even if the capillary is displaced with respect to the capillary holding hole, the displacement is corrected by the capillary guide. Further, the capillary holding portion holds the capillary portion so that the position of the capillary can be displaced relative to the capillary base portion fixed to the actuator. As a result, in addition to the displacement of the capillary with respect to the capillary holding hole, the orientation of the capillary is changed so that the capillary follows the capillary guiding portion and the capillary holding hole even when the capillary guiding portion is displaced with respect to the capillary holding hole. Can be inserted. Therefore, a new capillary can be automatically attached to the wire bonding apparatus regardless of the operator's hand.

  In the wire bonding apparatus according to one aspect, the actuator includes a base portion, and a moving body that is disposed on the base portion, to which the capillary holding portion is attached, and moves the capillary holding portion. The base portion may be fixed. According to this configuration, the relative positional relationship between the capillary holding portion moved by the actuator and the capillary guide portion can be easily maintained. Therefore, the capillary can be securely attached to the bonding tool by the capillary guide.

  In the wire bonding apparatus according to one aspect, the flexible portion includes an elastic portion whose one end is fixed to the capillary base portion, and a restraining portion that is provided at the other end of the elastic portion and restrains the capillary. Also good. According to this configuration, the elastic portion can be elastically deformed on the basis of the capillary base portion. And the restraint part is provided in the other end part of the elastic part, and the restraint part restrains the capillary. Accordingly, the relative position of the capillary with respect to the capillary base portion can be displaced by the elastic portion. Therefore, the capillary can be more reliably attached to the bonding tool.

  In the wire bonding apparatus according to one aspect, the restraining portion may be in line contact with the tapered surface of the capillary. According to this configuration, the restraining portion can allow the inclination of the capillary to be held. Accordingly, since the posture of the capillary can be displaced more flexibly, the capillary can be more reliably attached to the bonding tool.

  In the wire bonding apparatus according to one aspect, the restraining portion may be a torus-shaped O-ring, and the elastic portion may be a coil spring. According to this configuration, the capillary holding unit can be configured with a simple configuration.

  In the wire bonding apparatus according to one aspect, the capillary holding portion includes a tube including an upper end opening edge as a restraining portion and a main body portion as an elastic portion, a cap for closing the lower end of the tube, and a lower end closed to the cap. The pipe has a higher rigidity than the tube, and a gap may be provided between the inner peripheral surface of the pipe and the outer peripheral surface of the tube. According to this configuration, the posture of the capillary can be displaced by the tube. Furthermore, since the pipe exists outside the tube, the displacement of the capillary can be kept within an allowable range by the pipe. Therefore, the capillary can be securely attached to the bonding tool.

  A bonding apparatus according to another aspect includes a capillary holding unit that detachably holds a capillary, and a capillary along a predetermined direction so that the capillary held by the capillary holding unit is inserted into a capillary holding hole of a bonding tool. An actuator that moves the capillary holding part that holds the capillary, and a capillary guide part that is disposed between the capillary holding part and the bonding tool and guides the capillary to the capillary holding hole as the capillary holding part moves. The capillary guide portion is provided with a guide hole for guiding the capillary to the capillary holding hole, and the capillary guide portion provides a force directed in a direction intersecting the axis of the guide hole to the capillary inserted into the guide hole. It has a biasing member.

  According to this configuration, the capillary is guided in a predetermined direction while being pressed against the wall surface of the capillary guide portion by the biasing member. As a result, the capillary can move in a stable state without being tilted, so that the capillary can be more reliably guided to the capillary holding hole of the bonding tool.

  In the bonding apparatus according to another aspect, the guide hole includes a first hole portion and a second hole portion arranged along the insertion direction of the capillary, and the first hole portion has a smaller diameter toward the insertion direction. The second hole may be arranged coaxially with the capillary holding hole and guide the capillary along the axis of the capillary holding hole. According to this configuration, the capillary can be more reliably guided to the capillary holding hole.

  In the bonding apparatus according to another aspect, the capillary guide portion includes a tapered portion in which the first hole portion is formed and a guide portion in which the second hole portion is formed, and the biasing member is provided in the guide portion. It may be done. According to this configuration, the capillary can be more reliably guided to the capillary holding hole.

  ADVANTAGE OF THE INVENTION According to this invention, the wire bonding apparatus which can automate the operation | work which attaches a novel capillary to a wire bonding apparatus is provided.

FIG. 1 is a perspective view showing a wire bonding apparatus according to an embodiment. FIG. 2 is an enlarged perspective view showing the capillary exchange part of the wire bonding apparatus shown in FIG. FIG. 3 is a perspective view showing a part of the capillary holding section in a cross-sectional view. FIG. 4 is a diagram for explaining the operation of the capillary holder. FIG. 5 is a perspective view showing a part of the capillary guide section in a cross-sectional view. FIG. 6 is a diagram showing a capillary guide function played by the capillary holding part and the capillary guide part. FIG. 7 is a diagram showing another guide function of the capillary played by the capillary holding part and the capillary guide part. FIG. 8 is a plan view showing the main part of the actuator included in the capillary exchange part shown in FIG. FIG. 9 is a diagram illustrating the operating principle of the actuator. FIG. 10 is a diagram illustrating specific control of the actuator. FIG. 11 is a diagram illustrating specific control of the actuator. FIG. 12 is a diagram illustrating main operations of the capillary exchange unit. FIG. 13 is a diagram showing the main operation of the capillary exchange unit following FIG. FIG. 14 is a diagram showing the main operation of the capillary exchange unit following FIG. FIG. 15 is a diagram showing the main operation of the capillary exchange unit following FIG. FIG. 16 is a perspective view showing a cross section of a capillary holding part according to a modification. FIG. 17 is a perspective view showing a capillary guide portion according to another modification. FIG. 18 is a front view of the capillary guide portion shown in FIG. FIG. 19 is a plan view of the capillary guide portion shown in FIG.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant description is omitted.

  A wire bonding apparatus 1 shown in FIG. 1 electrically connects, for example, an electrode such as a printed board and an electrode of a semiconductor element provided on the printed board using a thin metal wire. The wire bonding apparatus 1 provides heat, ultrasonic waves, or pressure to the wire to connect the wire to the electrode. The wire bonding apparatus 1 includes a base 2, a bonding unit 3 for the connection work, and a transport unit 4 that transports a printed circuit board or the like as a component to be processed to a bonding area.

  The bonding unit 3 includes a bonding tool 6, and an ultrasonic horn 7 is provided at the tip of the bonding tool 6. The tip of the ultrasonic horn 7 is detachably provided with a capillary 8 for supplying heat, ultrasonic waves or pressure to the wire.

  In the following description, the direction in which the ultrasonic horn 7 extends is the X axis, the direction in which the printed circuit board is conveyed by the conveyance unit 4 is the Y axis (second direction), and the direction in which the capillary 8 moves when performing the bonding operation. (Z-axis direction, first direction) is defined as the Z-axis.

  The capillary 8 is a component that requires periodic replacement. Therefore, the wire bonding apparatus 1 includes a capillary replacement unit 9 that automatically replaces the capillary 8 without an operator's operation.

  The capillary exchange unit 9 collects the capillary 8 attached to the ultrasonic horn 7 and attaches the capillary 8 to the ultrasonic horn 7. That is, the replacement work of the capillary 8 includes a work of collecting the capillary 8 and a work of mounting the capillary 8. This capillary 8 replacement operation is automatically performed when a preset condition is satisfied. For example, the condition may be the number of bonding operations. That is, every time a predetermined number of bonding operations are performed, the operation of replacing the capillary 8 may be performed.

  As shown in FIG. 2, the capillary exchange unit 9 includes a capillary holding unit 11, a capillary guide unit 12, and an actuator 13 as main components. Moreover, it has the jig | tool drive part 20 which drives the attachment / detachment jig | tool 15 and the attachment / detachment jig | tool 15 as an additional component.

<Capillary holding part>
The capillary holding unit 11 holds the capillary 8. The capillary holder 11 is attached to the actuator 13 via the holder 14. The capillary holder 11 has a cylindrical shape extending in the Z-axis direction. The lower end of the capillary holder 11 is held by a holder 14. The capillary 8 is detachably inserted into the upper end of the capillary holder 11.

  As shown in FIG. 3, the capillary holding part 11 includes, as main components, an upper socket 16, a coil spring 17 (elastic part), a lower socket 18 (capillary base part), and an O-ring 19 (restraining part). Have. The upper socket 16, the coil spring 17, and the lower socket 18 are disposed on a common axis. Specifically, the upper socket 16, the coil spring 17, and the lower socket 18 are arranged in this order from the top.

  The upper socket 16 has a substantially cylindrical shape and has a through hole 16h extending from the upper end surface 16a to the lower end surface 16b. Since the upper socket 16 holds the tapered surface 8 a of the capillary 8, the inner diameter of the through hole 16 h corresponds to the outer diameter of the tapered surface 8 a of the capillary 8. For example, the inner diameter of the through hole 16h is smaller than the outer diameter of the capillary body 8b. Further, a counterbore 16c for the O-ring 19 is provided on the upper end surface 16a side of the through hole 16h. The counterbore 16c has a dimension that can accommodate the O-ring 19. That is, the counterbore 16 c has a depth that is approximately the same as the height of the O-ring 19, and an inner diameter that is approximately the same as the outer diameter of the O-ring 19.

  The O-ring 19 has a so-called torus shape. The O-ring 19 is in direct contact with the tapered surface 8 a of the capillary 8. That is, the O-ring 19 holds the capillary 8 in the capillary holder 11. This holding is performed by an adhesive layer formed on the surface of the O-ring 19. The inner diameter of the O-ring 19 is approximately the same as the inner diameter of the through hole 16h, and the tapered surface 8a of the capillary 8 is inserted.

  Furthermore, since the upper socket 16 has a step 16d provided on the outer peripheral surface, the outer diameter differs between the upper end surface 16a side and the lower end surface 16b side. Specifically, the outer diameter on the lower end surface 16b side is slightly smaller than the outer diameter on the upper end surface 16a side. A coil spring 17 is fitted into the small diameter portion 16e on the lower end surface 16b side.

  The lower socket 18 has a substantially cylindrical shape. The lower socket 18 has an upper end surface 18 a facing a lower end surface 16 b of the upper socket 16. The lower socket 18 has the same outer shape as the upper socket 16. That is, the lower socket 18 is also provided with a step 18d on its outer peripheral surface. Contrary to the upper socket 16, the lower socket 18 has a small diameter portion 18 e on the upper end surface 18 a side. The coil spring 17 is also fitted into the small diameter portion 18e on the upper end surface 18a side. The large diameter portion 18 f on the lower end surface 18 b side of the lower socket 18 is sandwiched by the holder 14.

  The coil spring 17 is a compression spring. The upper end side of the coil spring 17 is fitted into the small diameter portion 16 e of the upper socket 16, and the lower end side thereof is inserted into the small diameter portion 18 e of the lower socket 18. The upper socket 16 and the coil spring 17 constitute the flexible portion 10. Therefore, the upper socket 16 and the lower socket 18 are connected by the coil spring 17. The coil spring 17 has elasticity in the direction of the axis 17A and the direction intersecting the axis 17A. As a result, the upper socket 16 can change its position relative to the lower socket 18.

  The capillary holding part 11 having the above configuration has a holding mode shown in FIG. Part (a) of FIG. 4 shows the capillary holding part 11 in the initial mode. Part (b) of FIG. 4 shows the capillary holding part 11 in the first modification. Part (c) of FIG. 4 shows the capillary holding part 11 in the second modification.

  As shown in part (a) of FIG. 4, in the capillary holding part 11 according to the first holding mode, the axes 16A and 18A of the upper socket 16 and the lower socket 18 overlap. Furthermore, the axis 8A of the capillary 8 also overlaps with the axes 16A and 18A.

  As shown in part (b) of FIG. 4, in the capillary holding part 11 according to the second holding mode, the axes 16A and 18A of the upper socket 16 and the lower socket 18 do not overlap. Specifically, the upper socket 16 moves in the X-axis and Y-axis directions with respect to the lower socket 18 that is held by the holder 14 and maintains its position. In this state, the axis 16 </ b> A of the upper socket 16 is parallel to the axis 18 </ b> A of the lower socket 18.

  As shown in part (c) of FIG. 4, in the capillary holding part 11 according to the third modification, the axes 16A and 18A of the upper socket 16 and the lower socket 18 overlap. That is, these configurations are the same as those in the first holding mode. On the other hand, the axis 8A of the capillary 8 is inclined with respect to the axis 16A of the upper socket 16. Since the O-ring 19 has a torus shape, the inner peripheral surface into which the tapered surface 8a of the capillary 8 is inserted is a curved surface. For example, the cross-sectional shape of the O-ring 19 in a cross section parallel to the Z axis is a circle. Then, when the state in which the tapered surface 8a is inserted into the O-ring 19 is viewed in cross section, the O-ring 19 and the tapered surface 8a are in contact with each other at the two contact portions C1 and C2. That is, the O-ring 19 and the capillary 8 are line contacts that come into contact with each other at an annular contact line CL (see FIG. 3). It is. According to such a contact state, the capillary 8 is allowed to tilt with respect to the axis 19 </ b> A of the O-ring 19.

<Capillary guide>
As shown in FIG. 2 again, the capillary guide portion 12 guides the capillary 8 when the capillary 8 is inserted into the hole 7 h (capillary holding hole) of the ultrasonic horn 7. The capillary guide 12 is provided in the actuator 13. Therefore, the relative position relationship between the capillary guide portion 12 and the components constituting the actuator 13 is preserved. The capillary guide portion 12 has a cantilever shape extending from the actuator 13 toward the ultrasonic horn 7.

  FIG. 5 is a perspective view of the main part of the capillary guide portion 12 as viewed in cross section. As shown in FIG. 5, the capillary guide portion 12 has a guide hole 12h provided at its free end. The guide hole 12 h receives the capillary body 8 b of the capillary 8 and guides the capillary 8 to the hole 7 h of the ultrasonic horn 7. The guide hole 12h is a through hole extending from the upper surface 12a to the lower surface 12b of the capillary guide portion 12. The guide hole 12h is also opened in the front end surface 12c of the capillary guide portion 12. That is, the guide hole 12h can receive the capillary 8 from the lower surface 12b and the front end surface 12c.

  The guide hole 12h includes a tapered hole portion 12t and a parallel hole portion 12p. The lower end of the tapered hole portion 12t opens to the lower surface 12b. The upper end of the parallel hole portion 12p opens in the upper surface 12a. The inner diameter of the tapered hole portion 12t on the lower surface 12b is larger than the inner diameter of the parallel hole portion 12p on the upper surface 12a. This inner diameter is larger than the outer diameter at the upper end of the capillary 8. That is, the guide hole 12h gradually decreases in inner diameter from the lower surface 12b toward the upper surface 12a, and takes the minimum value of the inner diameter at the position where the tapered hole portion 12t and the parallel hole portion 12p are connected. This inner diameter is substantially the same as the outer diameter at the upper end of the capillary 8. And in the parallel hole part 12p, the internal diameter is constant.

  FIG. 6 shows how the capillary 8 is guided by the capillary guide 12. 6A, the axis 7A of the hole 7h of the ultrasonic horn 7 and the axis 12A of the guide hole 12h of the capillary guide 12 overlap each other. On the other hand, the capillary 8 held by the capillary holding part 11 has its axis 8A shifted in parallel with the axes 7A and 12A in the X-axis direction.

  From the state shown in part (a) of FIG. 6, the capillary holding part 11 is moved in the Z-axis direction. Then, as shown in FIG. 6B, first, the upper end of the capillary 8 comes into contact with the wall surface of the tapered hole portion 12t. When the capillary holding part 11 is further moved upward, the capillary 8 moves along the wall surface. This movement includes a horizontal component (X-axis direction) in addition to an upward component (Z-axis direction). In the capillary holder 11, the upper socket 16 can be moved relative to the lower socket 18 by the coil spring 17. That is, when the lower socket 18 is moved upward, the upper socket 16 is also moved in the horizontal direction by the coil spring 17 while being moved upward.

  According to this movement, the axis 8A of the capillary 8 gradually approaches the axis 7A of the hole 7h. When the upper end of the capillary 8 reaches the parallel hole 12p, the axis 8A of the capillary 8 overlaps with the axis 7A of the hole 7h. Accordingly, the capillary 8 is inserted into the hole 7 h of the ultrasonic horn 7.

  In the example shown in part (a) of FIG. 6, the positional relationship between the ultrasonic horn 7 and the capillary guide part 12 is ideal. On the other hand, in the example shown in FIG. 7A, the axis 7 </ b> A of the hole 7 h of the ultrasonic horn 7 is inclined with respect to the axis 12 </ b> A of the capillary guide 12.

  The operation of inserting the capillary 8 in such a state will be described. As shown in FIG. 7B, the axis 8A of the capillary 8 is relatively inclined with respect to the axis 7A of the hole 7h. Therefore, since the upper end of the capillary 8 contacts the wall surface of the hole 7h, the capillary 8 cannot be further inserted into the hole 7h. Further, in order to pierce the capillary 8 into the hole 7h, it is necessary to make the axis 8A of the capillary 8 parallel to the axis 7A of the hole 7h and to overlap the axis 8A with the axis 7A.

  As described above, in the capillary holding part 11, the upper socket 16 can be displaced with respect to the lower socket 18, and the capillary 8 can be inclined with respect to the axis 16 </ b> A of the upper socket 16. According to these actions, as shown in part (c) of FIG. 7, as the capillary holding part 11 is raised, the axis 8A of the capillary 8 gradually approaches the axis 7A of the hole 7h, and finally the hole Can be inserted into 7h. That is, since the capillary holding part 11 holds the capillary 8 flexibly, the deviation between the capillary 8 and the capillary guide part 12 and the deviation between the capillary 8 and the hole 7 h of the ultrasonic horn 7 can be absorbed. . Therefore, according to the capillary holding part 11 and the capillary guide part 12, the capillary 8 can be securely attached.

<Actuator>
The actuator 13 moves the capillary 8 to be replaced or the new capillary 8 and holds the capillary 8 in a predetermined position and posture. The actuator 13 can reciprocate along the direction of a predetermined translation axis (Z axis). In the present embodiment, the translation axis is along the vertical direction (Z-axis). Therefore, the actuator 13 moves the capillary 8 up and down along the vertical direction. Furthermore, the actuator 13 can rotate around the rotation axis (X axis). In the present embodiment, the rotation axis is orthogonal to the vertical direction (Z axis). That is, the rotation axis is along the horizontal direction (X axis). Accordingly, the actuator 13 rotates the capillary 8 around the horizontal direction.

  The actuator 13 includes an actuator base 21 (base portion), a pair of linear motors 22A and 22B (first force generating portion and second force generating portion), a linear guide 24, a carriage 26 (moving body), and a control device. 27 (control unit, see FIG. 1 and the like).

  The actuator base 21 has a flat plate shape and has a main surface 21a. The normal direction of the main surface 21a is along the horizontal direction (X-axis direction). Linear motors 22A and 22B, a linear guide 24, and a carriage 26 are arranged on the main surface 21a.

  The linear motor 22A moves the carriage 26. The linear motor 22A is an ultrasonic motor based on a so-called impact drive system. The linear motor 22A includes a drive shaft 28A and an ultrasonic element 29A (ultrasonic wave generator). The drive shaft 28 </ b> A is a metal round bar and is arranged so that its axis is parallel to the main surface 21 a of the actuator base 21. Since the carriage 26 moves along the drive shaft 28A, the length of the drive shaft 28A determines the moving range of the carriage 26. The lower end of the drive shaft 28A is fixed to the ultrasonic element 29A. The upper end of the drive shaft 28 </ b> A is supported by a guide 31 protruding from the main surface 21 a of the actuator base 21. The upper end of the drive shaft 28 </ b> A may be fixed to the guide 31, or may be just in contact without being fixed. That is, the lower end of the drive shaft 28A is a fixed end, and the upper end is a fixed end or a free end.

  The ultrasonic element 29A provides ultrasonic vibration to the drive shaft 28A. Specifically, the drive shaft 28A provided with ultrasonic vibrations reciprocates slightly along the Z axis. For example, a piezoelectric element that is a piezoelectric element may be employed as the ultrasonic element 29A. The piezo element is deformed according to the applied voltage. Therefore, when a high frequency voltage is applied to the piezo element, the piezoelectric element is repeatedly deformed according to the frequency and the magnitude of the voltage to generate ultrasonic vibration. The ultrasonic element 29A is fixed to a guide 32 protruding from the actuator base 21.

  A control device 27 is electrically connected to the ultrasonic element 29 </ b> A and receives a drive voltage generated by the control device 27. The control device 27 controls the frequency and amplitude of the alternating voltage provided to the ultrasonic element 29A.

  The linear motor 22B has the same configuration as the linear motor 22A. The linear motor 22B is spaced apart in the direction of the Y axis that intersects the Z axis. That is, the drive shaft 28B of the linear motor 22B is parallel to the drive shaft 28A of the linear motor 22A. The upper end of the linear motor 22B is disposed at the same height as the upper end of the linear motor 22A. Similarly, the lower end of the linear motor 22B is disposed at the same height as the lower end of the linear motor 22A.

  The carriage 26 is a moving body that translates and rotates by the linear motors 22A and 22B. The carriage 26 has a disk shape and is stretched between the linear motors 22A and 22B. A linear guide 24 is provided between the actuator base 21 and the carriage 26 to guide the carriage 26 in the Z-axis direction. The carriage 26 is guided in the Z-axis direction by the linear guide 24. The linear guide 24 regulates the moving direction of the carriage 26 and does not generate a driving force in the Z-axis direction.

  The carriage 26 includes a front disk 33, a pressurized disk 34, and a rear disk 36. These disks have the same outer diameter and are stacked along a common axis. A shaft body 37 is sandwiched between the front disk 33 and the pressurized disk 34. The outer diameter of the shaft body 37 is smaller than the outer diameters of the front disk 33 and the pressurized disk 34. Therefore, a gap is formed between the outer peripheral portion of the front disk 33 and the outer peripheral portion of the pressurized disk 34. Similarly, the shaft body 38 is also sandwiched between the rear disk 36 and the pressurized disk 34. The outer diameter of the shaft body 37 is also smaller than the outer diameters of the rear disk 36 and the pressurized disk 34. Therefore, a gap is also formed between the outer peripheral portion of the rear disk 36 and the outer peripheral portion of the pressurizing disk 34.

  The rear disk 36 is connected to the table 24 a of the linear guide 24. Here, the rear disk 36 is rotatably connected to the table 24a. On the other hand, the pressurized disk 34 and the front disk 33 are mechanically fixed with respect to the rear disk 36, so that the pressurized disk 34 and the front disk 33 do not rotate with respect to the rear disk 36. Therefore, the entire carriage 26 including the front disk 33, the pressurizing disk 34 and the rear disk 36 can rotate with respect to the table 24 a of the linear guide 24.

  As shown in FIG. 8, the drive shafts 28 </ b> A and 28 </ b> B are sandwiched in the gap G <b> 1 between the pressurizing disk 34 and the rear disk 36. Specifically, the pair of drive shafts 28 </ b> A and 28 </ b> B are arranged so as to sandwich the center of gravity of the carriage 26. Furthermore, the drive shafts 28 </ b> A and 28 </ b> B are in contact with the back surface 34 b of the pressurizing disk 34 and the main surface 36 a of the rear disk 36. The drive shafts 28A and 28B do not contact the outer peripheral surface 38a of the shaft body 38. That is, the gap G <b> 1 is smaller than the outer diameter of the pressurizing disk 34 and the rear disk 36 and larger than the outer diameter of the shaft body 38. Further, the difference between the outer diameter of the shaft body 38 and the outer diameter of the rear disk 36 is larger than the outer diameters of the drive shafts 28A and 28B. Similarly, the difference between the outer diameter of the shaft body 37 and the outer diameter of the pressurizing disk 34 is larger than the outer diameters of the drive shafts 28A and 28B.

  Here, the gap G1 is slightly smaller than the outer diameter of the drive shafts 28A and 28B. Since a gap G2 is formed between the front disk 33 and the pressurization disk 34, when the drive shafts 28A and 28B are disposed between the pressurization disk 34 and the rear disk 36, the pressurization disk 34 is moved forward. Slightly bends to the disk 33 side. This deflection generates a force that presses the drive shafts 28 </ b> A and 28 </ b> B against the rear disk 36.

  Hereinafter, the operation principle of the actuator 13 will be described with reference to FIG. 9A, 9 </ b> B, and 9 </ b> C are diagrams for explaining the operation principle of the actuator 13. For convenience of explanation, in FIG. 9, one linear motor 22A and the carriage 26 are shown, and the other linear motor 22B and the like are not shown.

  FIG. 9A shows a mode in which the position of the carriage 26 is maintained. As described above, in the carriage 26, the drive shaft 28A is sandwiched between the pressurizing disk 34 and the rear disk 36, and the position of the carriage 26 is maintained by the pressurization by the sandwiching. More specifically, the position of the carriage 26 is maintained by a frictional resistance force in which the applied pressure is a vertical drag. At this time, the control device 27 does not provide a voltage to the ultrasonic element 29A (see voltage value zero, voltage E1). Alternatively, the control device 27 may provide a direct current having a predetermined voltage value to the ultrasonic element 29A.

  As described above, the position of the carriage 26 is maintained by the frictional resistance between the carriage 26 and the drive shaft 28A. Here, when the drive shaft 28A is moved, a mode in which the carriage 26 moves along with the drive shaft 28A and a mode in which the carriage 26 does not accompany the drive shaft 28A and continues to maintain its position due to its inertia can occur. These modes can be determined according to the speed at which the drive shaft 28A is moved, that is, the frequency of ultrasonic vibration. For example, when the frequency is relatively low (15 kHz to 30 kHz), the carriage 26 moves with the drive shaft 28A. For example, when the frequency is relatively high (100 kHz to 150 kHz), the carriage 26 maintains its position regardless of the drive shaft 28A.

  For example, as shown in part (b) of FIG. 9, when the drive shaft 28A is moved upward (in the positive direction), the carriage 26 is also accompanied by the movement of the drive shaft 28A. That is, the relative positional relationship between the drive shaft 28A and the carriage 26 does not change. Then, when the drive shaft 28A is moved downward (negative direction), the carriage 26 is not accompanied by the downward movement of the drive shaft 28A. That is, the relative positional relationship between the drive shaft 28A and the carriage 26 changes. When these operations are repeated, the carriage 26 gradually moves upward. That is, by making the cycle of the voltage for moving the drive shaft 28A upward (symbol E2a in the voltage E2) longer than the cycle of the voltage for moving the drive shaft 28A downward (symbol E2b in the voltage E2), the carriage 26 can be moved upward.

  Conversely, as shown in part (c) of FIG. 9, when the drive shaft 28A is moved downward, the carriage 26 is also accompanied by the movement of the drive shaft 28A. That is, the relative positional relationship between the drive shaft 28A and the carriage 26 does not change. When the drive shaft 28A is moved upward, the carriage 26 is not accompanied by the upward movement of the drive shaft 28A. That is, the relative positional relationship between the drive shaft 28A and the carriage 26 changes. When these operations are repeated, the carriage 26 gradually moves downward. That is, by reducing the cycle of the voltage that moves the drive shaft 28A upward (reference E3a in the voltage E3) to be shorter than the cycle of the voltage that moves the drive shaft 28A downward (reference E3b in the voltage E3), the carriage 26 can be moved downward.

  When moving the carriage 26 downward, in addition to the above control, the carriage 26 may not follow both the vertical movement of the drive shaft 28A. That is, apparently, the frictional resistance between the carriage 26 and the drive shaft 28A becomes smaller than the gravity acting on the carriage 26, and the carriage 26 appears to fall. In this aspect, gravity acting on the carriage 26 is used as a force for moving the carriage 26 downward.

  Next, a specific operation of the actuator 13 will be described with reference to FIGS. 10 and 11.

  Part (a) of FIG. 10 shows an operation for maintaining the position of the carriage 26. As described above, when the position of the carriage 26 is maintained, the control device 27 provides a constant voltage (see voltages E4 and E5 in part (a) of FIG. 10) to the ultrasonic elements 29A and 29B. To do.

  Part (b) of FIG. 10 shows the operation of moving the carriage 26 upward. At this time, the control device 27 causes the one ultrasonic element 29A to have an AC voltage in which the cycle of the voltage for moving the drive shaft 28A upward is longer than the cycle of the voltage for moving the drive shaft 28A downward (see FIG. 10 (see voltage E6 in part (b)). Similarly, the control device 27 applies an AC voltage (with the other ultrasonic element 29B having a voltage cycle for moving the drive shaft 28B upward longer than a voltage cycle for moving the drive shaft 28B downward) 10) (see voltage E7 in part (b) of FIG. 10). That is, the control device 27 provides the same AC voltage to both ultrasonic elements 29A and 26B. Then, the control device 27 matches the timing for moving the one drive shaft 28A upward with the timing for moving the other drive shaft 28B upward. That is, the control device 27 sets the phase of the voltage provided to one ultrasonic element 29A and the phase of the voltage provided to the other ultrasonic element 29A to have the same phase relationship. Then, the contact portion P1 where one drive shaft 28A is pressed against the pressurizing disk 34 and the rear disk 36, and the contact portion P2 where the other drive shaft 28B is pressed against the pressurization disk 34 and the rear disk 36 are: Move upward by the same distance. As a result, the contact portions P1 and P2 move upward while maintaining a parallel state. That is, the carriage 26 translates upward without rotating around the center of gravity.

  Part (c) of FIG. 10 shows an operation of moving the carriage 26 downward. At this time, the control device 27 causes the one ultrasonic element 29A to have an AC voltage in which the cycle of the voltage for moving the drive shaft 28A upward is shorter than the cycle of the voltage for moving the drive shaft 28A downward (see FIG. 10 (see voltage E8 in part (c)). Similarly, the control device 27 also applies the AC voltage (with the other ultrasonic element 29B having a voltage cycle for moving the drive shaft 28B upward shorter than a voltage cycle for moving the drive shaft 28B downward) The voltage E9 in the part (c) of FIG. 10 is provided. Then, the contact portion P1 where one drive shaft 28A is pressed against the pressurizing disk 34 and the rear disk 36, and the contact portion P2 where the other drive shaft 28B is pressed against the pressurization disk 34 and the rear disk 36 are: Move down the same distance. As a result, the contact portions P1 and P2 move upward while maintaining a parallel state. That is, the carriage 26 translates upward without rotating around the center of gravity.

  According to the above control, when the carriage 26 is moved downward, the frictional resistance acts between the carriage 26 and the drive shafts 28A and 28B, and the relative positions thereof do not change. Therefore, the carriage 26 does not rotate around the center of gravity. As a result, for example, even when a torque that rotates the carriage 26 is generated due to the posture of the capillary 8 held by the carriage 26, the carriage 26 is lowered while suppressing the rotation of the carriage 26. Can be moved in the direction.

  Note that the translation of moving the carriage 26 in the upward and downward directions can be realized by a single linear motor 22A. Since the actuator 13 according to the embodiment includes the two linear motors 22A and 22B, the driving force can be increased as compared with the configuration including the single linear motor 22A.

  FIG. 11A shows an operation of rotating the carriage 26 in the clockwise direction. At this time, the control device 27 causes the one ultrasonic element 29A to have an AC voltage in which the cycle of the voltage for moving the drive shaft 28A upward is shorter than the cycle of the voltage for moving the drive shaft 28A downward (see FIG. 11 (see the voltage E10 in part (a)). On the other hand, the control device 27 determines that the other ultrasonic element 29B has an AC voltage in which the cycle of the voltage for moving the drive shaft 28B upward is longer than the cycle of the voltage for moving the drive shaft 28B downward (see FIG. 11 (see the voltage E11 in part (a)). That is, the control device 27 makes the voltage provided to the ultrasonic element 29A and the voltage provided to the ultrasonic element 29B different from each other. Then, the control device 27 matches the timing for moving the one drive shaft 28A upward with the timing for moving the other drive shaft 28B downward. In other words, the control device 27 sets the phase of the voltage provided to one ultrasonic element 29A and the phase of the voltage provided to the other ultrasonic element 29B in an opposite phase relationship. Then, the contact portion P1 where one drive shaft 28A is pressed against the pressurizing disc 34 and the rear disc 36 moves downward, and the other drive shaft 28B is contacted with the pressurizing disc 34 and the rear disc 36. P2 moves upward. That is, the contact parts P1 and P2 move in opposite directions. If these movement amounts match, the contact portions P1 and P2 rotate clockwise while maintaining their positions in the Z-axis direction.

  FIG. 11B shows the operation of rotating the carriage 26 counterclockwise. At this time, the control device 27 causes the one ultrasonic element 29A to have an AC voltage in which the cycle of the voltage for moving the drive shaft 28A upward is longer than the cycle of the voltage for moving the drive shaft 28A downward (see FIG. 11 (b), see voltage E12). On the other hand, the control device 27 determines that the other ultrasonic element 29B has an AC voltage (in the figure) in which the cycle of the voltage for moving the drive shaft 28B upward is shorter than the cycle of the voltage for moving the drive shaft 28B downward. 11 (b), see voltage E13). Then, the contact portion P1 where one drive shaft 28A is pressed against the pressurization disk 34 and the rear disk 36 moves upward, and the other drive shaft 28B is contacted with the pressurization disk 34 and the rear disk 36. P2 moves downward. That is, the contact parts P1 and P2 move in opposite directions. If these movement amounts match, the contact portions P1 and P2 rotate counterclockwise while maintaining their positions in the Z-axis direction.

<Exchange operation>
Next, the capillary exchange operation performed by the capillary exchange unit 9 will be described.

  The (a) part of FIG. 12 shows the state immediately before exchanging the capillary 8U attached to the ultrasonic horn 7. The capillary exchange unit 9 includes a capillary stocker 39 and a capillary recovery unit 41 as additional components in addition to the capillary holding unit 11, the capillary guide unit 12, and the actuator 13. The capillary stocker 39 accommodates a plurality of replacement capillaries 8N. Moreover, the capillary collection | recovery part 41 accommodates the used capillary 8U.

  The state shown in part (a) of FIG. 12 is a state in which wire bonding work is performed by, for example, the capillary 8U attached to the ultrasonic horn 7. Therefore, the capillary exchange unit 9 may be retracted to a position that does not hinder the wire bonding operation.

  Part (b) of FIG. 12 shows the state of the first step in the exchange operation. First, the capillary exchange unit 9 rotates the carriage 26 clockwise by the control device 27. This rotation corresponds to the operation shown in part (a) of FIG. By this rotation, the capillary holder 11 that has been retracted to a position that does not hinder the wire bonding operation is positioned below the capillary 8U.

  FIG. 13A shows the state of the second step in the exchange operation. The capillary exchange unit 9 moves the carriage 26 upward by the control device 27. This movement corresponds to the operation shown in part (b) of FIG. By this movement, the capillary holder 11 holds the capillary 8U attached to the ultrasonic horn 7.

  Part (b) of FIG. 13 shows the state of the third step in the exchange operation. The capillary exchange unit 9 moves the carriage 26 downward by the control device 27. This movement corresponds to the operation shown in part (c) of FIG. By this movement, the capillary 8U held by the capillary holder 11 is removed from the ultrasonic horn 7.

  Part (a) of FIG. 14 shows the state of the fourth step in the exchange operation. The capillary exchange unit 9 causes the control device 27 to rotate the carriage 26 in the clockwise direction. This movement corresponds to the operation shown in part (a) of FIG. By this movement, the capillary 8U held in the capillary holder 11 is transported to the capillary recovery part 41 and recovered as a used capillary 8U.

  Part (b) of FIG. 14 shows the state of the fifth step in the exchange operation. The capillary exchange unit 9 rotates the carriage 26 counterclockwise by the control device 27. This movement corresponds to the operation shown in part (b) of FIG. By this movement, the capillary holding unit 11 holds the new capillary 8N for replacement.

  Part (a) of FIG. 15 shows the state of the sixth step in the exchange operation. The capillary exchange unit 9 causes the control device 27 to rotate the carriage 26 in the clockwise direction. This movement corresponds to the operation shown in part (a) of FIG. By this movement, the new capillary 8N held in the capillary holding part 11 is positioned below the hole 7h of the ultrasonic horn 7.

  Part (b) of FIG. 15 shows the state of the seventh step in the exchange operation. The capillary exchange unit 9 moves the carriage 26 upward by the control device 27. This movement corresponds to the operation shown in part (b) of FIG. By this movement, the new capillary 8N held in the capillary holder 11 is inserted into the hole 7h of the ultrasonic horn 7. In this insertion, due to the action of the capillary holding part 11 and the capillary guide part 12 shown in FIGS. 6 and 7, the capillary 8N and the capillary guide part 12 are displaced, and the capillary 8N and the ultrasonic horn 7 are perforated. Since the deviation from 7h is eliminated, it can be reliably mounted.

  Hereinafter, the effect of the actuator 13 and the wire bonding apparatus 1 which concern on embodiment is demonstrated.

  The actuator 13 includes a pair of linear motors 22A and 22B, and the force generated in each of the linear motors 22A and 22B is controlled by the control device 27. According to this configuration, the carriage 26 can be translated by matching the direction of the force generated in the pair of linear motors 22A and 22B. Furthermore, torques around the center of gravity are generated in the carriage 26 by reversing the directions of the forces generated in the linear motors 22A and 22B. As a result, the carriage 26 can be rotated around its center of gravity. As a result, the actuator 13 can perform a plurality of operations such as translation and rotation.

  That is, the actuator 13 according to the present embodiment can perform translation and rotation, but it is not necessary to prepare a drive mechanism for translation and a drive mechanism for rotation. Therefore, the size of the actuator 13 can be reduced as compared with the configuration in which each of the translation drive mechanism and the rotation drive mechanism is prepared.

  The wire bonding apparatus 1 includes a capillary exchange unit 9 including an actuator 13. The actuator 13 can perform two operations of translation and rotation. Accordingly, it is possible to suppress the increase in size of the capillary replacement unit 9 while providing the wire bonding apparatus 1 with the function of replacing the capillary 8. Therefore, it is possible to achieve both high functionality and downsizing of the wire bonding apparatus 1.

  Furthermore, in the wire bonding apparatus 1, the capillary 8 held by the capillary holding part 11 is inserted into the hole 7h while being guided to the capillary guide part 12. Therefore, even if the capillary 8 is displaced with respect to the hole 7h, the displacement is corrected by the capillary guide portion 12. Further, the capillary holding unit 11 holds the capillary 8 so that the position of the capillary 8 can be displaced relative to the lower socket 18 fixed to the actuator 13 by the flexible part 10 including the upper socket 16 and the coil spring 17. As a result, in addition to the displacement of the capillary 8 with respect to the hole 7h, even when the capillary guide portion 12 is displaced with respect to the hole 7h, the capillary 8 is positioned so as to follow the capillary guide portion 12 and the hole 7h. Can be inserted while changing. Therefore, the new capillary 8 can be automatically attached to the wire bonding apparatus 1 regardless of the operator's hand.

  As mentioned above, although embodiment of this invention was described, you may implement in various forms, without being limited to the said embodiment.

<Modification 1>
In the embodiment, as the first and second force generation units, the ultrasonic drive motor based on the impact drive method using the law of inertia is illustrated. However, the first and second force generation units are not limited to this configuration, and may be employed as the first and second force generation units as long as they can generate a force along a predetermined direction. For example, a linear guide using a ball screw may be employed as the first and second force generation units.

<Modification 2>
The capillary holding part only needs to be able to hold the capillary 8 in such a manner that the posture of the capillary 8 can be flexibly changed. Therefore, the configuration of the capillary holding unit is not limited, and the capillary holding unit 11A according to the modification shown in FIG. 16 may be employed.

  The capillary holding part 11A includes a metal pipe 42, a silicone resin tube 43, and a cap 44 as main components. The pipe 42 has a cylindrical shape and accommodates the tube 43 therein. One end of the pipe 42 and one end of the tube 43 are closed by a cap 44. The cap 44 is held by the holder 14. An upper end 43 a (upper end opening edge) of the tube 43 substantially coincides with the upper end 42 a of the pipe 42. Further, the outer diameter of the tube 43 is smaller than the inner diameter of the pipe 42. That is, a slight gap is formed between the outer peripheral surface of the tube 43 and the inner peripheral surface of the pipe 42. The tapered surface 8 a of the capillary 8 is held at the upper end 43 a of the tube 43.

  According to this capillary holding part 11A, the tube 43 has a predetermined flexibility. Therefore, the capillary holding portion 11 </ b> A can allow the posture of the capillary 8 to be changed by a gap formed between the outer peripheral surface of the tube 43 and the inner peripheral surface of the pipe 42. Specifically, eccentricity and inclination in a direction intersecting the axis 42A of the pipe 42 can be allowed.

  Here, when only the tube 43 is used, depending on the posture of the capillary 8, the rigidity of the tube 43 may be insufficient, and thus the capillary 8 may not be held. However, since the pipe 42 having higher rigidity than the tube 43 exists outside the tube 43, the displacement of the capillary 8 can be within an allowable range by the pipe 42 even when the rigidity of the tube 43 is insufficient. it can.

  Further, in a state where the capillary 8 is inserted into the tube 43, the contact state between the inner peripheral edge of the upper end 43a and the tapered surface 8a is a line contact. Accordingly, the capillary 8 can be tilted and held in the same manner as the capillary holding portion 11A according to the embodiment.

<Modification 3>
The capillary guide portion 12 guides the capillary 8 to the hole 7h of the ultrasonic horn 7 while bringing the capillary 8 into contact with the wall surface of the tapered hole portion 12t and the wall surface of the parallel hole portion 12p. As shown in FIG. 17, the tapered hole portion 12t and the parallel hole portion 12p have an opening 12e on the front end surface 12c. According to this shape, when the capillary 8 is moved upward, the capillary 8 is not supported forward (X-axis direction), so that the capillary 8 is opposite to the wall surface 12W (see FIG. 19). There is a possibility of leaning. Therefore, the capillary guide portion 12S according to the modified example prevents the capillary 8 from being tilted and allows the capillary 8 to be inserted into the hole 7h of the ultrasonic horn 7 more reliably.

  As shown in FIGS. 17, 18 and 19, the capillary guide portion 12S has a guide hole 12h for guiding the capillary 8 to the hole 7h. The guide hole 12h includes a tapered hole portion 12t (first hole portion) aligned along the insertion direction (Z-axis direction) of the capillary 8 and a parallel hole portion 12p (second hole portion). And the capillary guide part 12 contains the taper part 51 in which the taper hole part 12t was formed, and the parallel guide part 52 in which the parallel hole part 12p was formed.

  The tapered hole portion 12t is a mortar-shaped tapered hole whose diameter decreases in the insertion direction (Z-axis direction). The insertion direction here means a direction from the lower surface 12b toward the upper surface 12a. The parallel hole portion 12p is arranged coaxially with the hole 7h, and guides the capillary 8 along the axis 12A (see FIGS. 18 and 19) of the parallel hole portion 12p. The term “coaxial” here is not limited to the fact that the axis 12A of the parallel hole portion 12p and the axis 7A of the hole 7h are completely matched (overlapped). The term “coaxial” means the positional relationship between the axes in which the capillaries 8 can be inserted into the holes 7h from the parallel holes 12p, and the axes in the configuration in which the capillaries 8 can be inserted into the holes 7h from the parallel holes 12p. Deviation is allowed.

  The capillary guide portion 12S includes a pair of coil springs 53. The coil spring 53 provides a force toward the direction intersecting the axis 12A (in-plane direction of the XY plane) with respect to the capillary 8 inserted into the parallel hole 12p. The coil spring 53 is provided in the parallel guide portion 52. Specifically, it is inserted into a hole 52 h provided in the parallel guide portion 52. The coil spring 53 supports the capillary 8 located in the parallel guide portion 52.

  The coil spring 53 is arranged such that its axis L53 is parallel to the XY plane. The axis L53 of the coil spring 53 is in a twisted position with respect to the axis 12A. The point P12 of the wall surface 12W with which the capillary 8 can come into contact, the axis 12A of the parallel hole 12p, and the point P53 with which the coil spring 53 can come into contact with the capillary 8 have a diameter passing through the axis 12A of the parallel hole 12p. Arranged on the direction line 12K.

  The coil spring 53 has an elastic modulus capable of maintaining its shape in a state where no external force is applied (hereinafter referred to as “natural state”). Specifically, the coil spring 53 does not cause significant deflection in the vertical direction when the axis L53 is held so as to coincide with the horizontal direction. And if the external force which goes to the direction which cross | intersects the axis line L53 is added, the coil spring 53 will produce the reaction force opposite to the external force.

  As shown in FIG. 19, the capillary 8 is inserted into a region S surrounded by the wall surface 12 </ b> W of the parallel hole 12 p and the coil spring 53. The distance M1 between the coil spring 53 and the wall surface 12W is slightly smaller than the diameter of the capillary 8. Then, when the capillary 8 is inserted into the region S, the capillary 8 presses (forces F1) the coil spring 53 to the side opposite to the wall surface 12W (that is, the opening 12e side). In response to this force F1, the coil spring 53 generates a reaction force F2. The capillary 8 is pressed against the wall surface 12W by the reaction force F2.

  Accordingly, the outer peripheral surface 8t of the capillary 8 is in contact with the wall surface 12W in the parallel hole portion 12p. That is, in a state where the outer peripheral surface 8t of the capillary 8 is in contact with the wall surface 12W, the capillary 8 slides in the direction of the axis 12A. As a result, the capillary 8 can move in a stable state without being inclined with respect to the axis 12 </ b> A, so that the capillary 8 can be more reliably guided to the hole 7 h of the ultrasonic horn 7.

  The coil spring 53 as an urging member shown in FIGS. 17, 18, 19, etc. is an example, and the configuration of the urging member is not limited to the coil spring 53. The urging member may be appropriately employed as long as it can press the capillary 8 toward the wall surface 12W of the parallel hole 12p.

DESCRIPTION OF SYMBOLS 1 ... Wire bonding apparatus, 2 ... Base, 3 ... Bonding part, 4 ... Conveying part, 6 ... Bonding tool, 7 ... Ultrasonic horn, 7h ... Hole, 8 ... Capillary, 8a ... Tapered surface, 8b ... Capillary body, 9 ... Capillary exchange part, 11 ... Capillary holding part, 12, 12S ... Capillary guide part, 12h ... Guide hole, 12t ... Tapered hole part, 12p ... Parallel hole part, 13 ... Actuator, 14 ... Holder, 16 ... Upper socket, 16c ... countersink part, 16d ... step, 16e ... small diameter part, 16h ... through hole, 17 ... coil spring, 18 ... lower socket, 18d ... step, 18e ... small diameter part, 18f ... large diameter part, 19 ... O-ring, 21 ... Actuator base (base portion), 22A ... Linear motor (first force generating portion), 22B ... Linear motor (second force generating portion), 24 ... Linear guide, 6 ... carriage, 27 ... control device (control unit), 28A, 28B ... drive shaft, 29A, 29B ... ultrasonic element, 31, 32 ... guide, 33 ... front disc, 34 ... pressurized disc, 36 ... back disc, 37, 38 ... shaft body, 39 ... capillary stocker, 41 ... capillary recovery part, G1, G2 ... gap, P1, P2, C1, C2 ... contact part, 51 ... taper part, 52 ... parallel guide part, 53 ... coil spring .

Claims (9)

A capillary holder for detachably holding the capillary;
An actuator for moving the capillary holding part holding the capillary along a predetermined direction so that the capillary held in the capillary holding part is inserted into a capillary holding hole of a bonding tool;
A capillary guide portion disposed between the capillary holding portion and the bonding tool and guiding the capillary to the capillary holding hole as the capillary holding portion moves.
The said capillary holding part is a wire bonding apparatus which has a capillary base part fixed to the said actuator, and a flexible part which hold | maintains the position of the said capillary with respect to the said capillary base part so that a relative displacement is possible. The actuator is
A base part;
A movable body disposed on the base portion, to which the capillary holding portion is attached, and to move the capillary holding portion;
The wire bonding apparatus according to claim 1, wherein the capillary guide portion is fixed to the base portion. The flexible part is
An elastic part having one end fixed to the capillary base part;
The wire bonding apparatus according to claim 1, further comprising a restraining portion that is provided at the other end portion of the elastic portion and restrains the capillary.   The wire bonding apparatus according to claim 3, wherein the restraining portion is in line contact with a tapered surface of the capillary. The restraining portion is a torus-shaped O-ring,
The wire bonding apparatus according to claim 3 or 4, wherein the elastic portion is a coil spring. The capillary holder is
A tube including an upper end opening edge as the restraining portion and a main body portion as the elastic portion;
A cap for closing the lower end of the tube;
A lower end closed to the cap, and a cylindrical pipe that accommodates the tube,
The pipe is more rigid than the tube,
A gap is provided between the inner peripheral surface of the pipe and the outer peripheral surface of the tube.
The wire bonding apparatus according to claim 3. A capillary holder for detachably holding the capillary;
An actuator for moving the capillary holding part holding the capillary along a predetermined direction so that the capillary held in the capillary holding part is inserted into a capillary holding hole of a bonding tool;
A capillary guide portion disposed between the capillary holding portion and the bonding tool and guiding the capillary to the capillary holding hole as the capillary holding portion moves.
The capillary guide portion is provided with a guide hole for guiding the capillary to the capillary holding hole,
The said capillary guide part has a biasing member which provides the force which goes to the direction which cross | intersects the axis line of the said guide hole with respect to the said capillary inserted in the said guide hole. The guide hole includes a first hole portion aligned along the insertion direction of the capillary, and a second hole portion,
The first hole is a tapered hole having a diameter that decreases in the insertion direction;
The wire bonding apparatus according to claim 7, wherein the second hole portion is disposed coaxially with the capillary holding hole and guides the capillary along the axis of the capillary holding hole. The capillary guide part includes a tapered part in which the first hole part is formed, and a guide part in which the second hole part is formed,
The wire bonding apparatus according to claim 8, wherein the biasing member is provided in the guide portion.

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