KR20140087738A

KR20140087738A - Paste Dispenser

Info

Publication number: KR20140087738A
Application number: KR1020120158332A
Authority: KR
Inventors: 유재경
Original assignee: 주식회사 탑 엔지니어링
Priority date: 2012-12-31
Filing date: 2012-12-31
Publication date: 2014-07-09
Also published as: KR102033336B1

Abstract

According to the present invention, there is provided a method of manufacturing a semiconductor device, comprising a Y-axis table movable in the Y-axis direction, a stage rotatably mounted on the Y- And a stage restraining device for restraining the stage on the Y-axis table and preventing the stage from vibrating on the Y-axis table when the Y-axis table is moved.

Description

[0001] Paste Dispenser [

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dispenser for applying a paste on a substrate for sealing, adhesion or the like.

2. Description of the Related Art In recent years, lightweight, flat, and portable displays have been demanded. Instead of cathode ray tubes (CRT), liquid crystal displays (LCDs), plasma display panels (PDPs) A flat panel display (FPD) such as a field emission display (FED) and an organic light emitting diode (OLED) has attracted considerable attention.

Among such flat panel displays (FPDs), a liquid crystal display (LCD) is a liquid crystal display (LCD) in which data signals according to image information are individually supplied to liquid crystal cells arranged in a matrix form to adjust a light transmittance of liquid crystal cells Device. A manufacturing method of a liquid crystal panel applied to such a liquid crystal display will be described below.

A color filter and a common electrode are formed on an upper substrate, and a thin film transistor (TFT) and a pixel electrode are formed on a lower substrate facing the upper substrate. Next, an alignment film is applied to each of the substrates, and the alignment film is rubbed to provide a pre-tilt angle and alignment direction to the liquid crystal molecules in the liquid crystal layer to be formed therebetween. In order to maintain the gap between the substrates and to prevent the liquid crystal from leaking to the outside and to seal between the substrates, a paste pattern is formed by applying the paste to the one or both substrates in a predetermined pattern, And then proceeds to a process of forming a liquid crystal layer.

In the manufacturing method of the liquid crystal panel, a paste dispenser is used in the step of forming the paste pattern on the substrate.

1 is a plan view showing a general paste dispenser.

1, the paste dispenser includes a Y-axis table 12 movable in the Y-axis direction, a stage 13 rotatably mounted on the Y-axis table 12, a substrate 13 mounted on the stage 13, A plurality of head units 14 for applying a paste to the head unit 11, and a head unit support 15 for supporting the plurality of head units 14. [ The head unit support 15 is movable in the Y-axis direction, and the head unit 14 is mounted on the head unit support 15 so as to be movable in the X-axis direction and the Z-axis direction. This paste dispenser forms a paste pattern on the substrate 11 while changing the relative positions of the substrate 11 loaded on the stage 13 and the nozzles provided in the head units 14.

A process for forming a paste pattern on the substrate 11 is as follows.

And the substrate 11 is loaded on the stage 13 using the transfer device. Next, as shown in FIG. 2, the stage 13 is rotated by an angle (a) at which the substrate 11 is twisted so that the loaded substrate 11 coincides with the X axis direction and the Y axis direction, Align. Then, the head unit 14 is moved in the starting position and the Y-axis table 12 is moved to apply the paste to the substrate 11 while moving the substrate 11 together.

The paste dispenser thus operated rotatably supports the stage 13 between the Y-axis table 12 and the stage 13 and has a clearance between the organically coupled components for rotating the stage 13 Even if the Y-axis table 12 is moved to apply the paste, which is the next step, in the state where the stage 13 is completely stopped and the stage 13 is completely stopped, the Y-axis table 12 The substrate 11 and the head unit 14 are moved together by generating various small vibrations (including a minute phenomenon) in the stage 13 moved together with the substrate 11, There is a problem that defects are caused.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a paste dispenser capable of preventing defective paste application due to various vibrations occurring on a stage when a paste is applied onto a substrate.

The problems to be solved by the present invention are not limited to the above-mentioned problems, and other matters not mentioned can be clearly understood from the following description if those skilled in the art are familiar with the present invention.

According to an embodiment of the present invention, there is provided an information processing apparatus comprising: a Y-axis table movable in the Y-axis direction; A stage mounted on the Y-axis table and rotatable by a? -Axis driving device, on which a substrate is loaded; A head unit for applying a paste onto the substrate loaded on the stage; And a stage restraining device for restraining the stage or restricting the stage from vibrating on the Y-axis table when the Y-axis table moves by restraining the stage on the Y-axis table.

Axis driving device includes at least one stage guide provided between the Y-axis table and the stage and having a guide member composed of a stationary member and a moving member that are paired with each other to guide the rotational motion of the stage while performing relative movement, And the stage restraining device may be constituted by a clamp for clamping and unclamping the mating guide members of the stage guide to restraint or release the stage.

Specifically, the plurality of stage guides may be provided and disposed around the center of the stage. The guide member may include a first fixing member provided on the Y-axis table in one of an X-axis direction and a Y-axis direction, and a second fixing member provided on the Y- A first guide member composed of a moving member; A second fixing member provided to the first moving member in the other of the X-axis direction and the Y-axis direction, and a second fixing member which is movably coupled to the second fixing member along the second fixing member, 2 moving member. That is, it may be a combination of two guide members.

The clamp has a pressing member which is mounted on the moving member and moves together and is movable back and forth with respect to the fixing member at both sides with the fixing member interposed therebetween so as to press or release the pressing member according to the moving direction A clamp body; And an urging member driving unit for moving the both urging members.

When the stage restraining device is operated after aligning the substrate, the stage is restrained on the Y-axis table, and the stage is moved to the gap existing on the Y-axis table on the Y- It is expected that the reliability of the paste pattern process can be improved.

Particularly, when a paste is applied to form a round-shaped corner portion of a paste pattern, it is possible to suppress vibration and prevent poor paste application to the corner portion, thereby providing a good paste pattern.

1 is a plan view showing a general paste dispenser.
Fig. 2 is a schematic view showing a substrate aligning step by the paste dispenser shown in Fig. 1. Fig.
3 and 4 are a perspective view and a plan view of a paste dispenser according to a first embodiment of the present invention.
5 is a perspective view showing the stage periphery guide shown in FIG.
Fig. 6 is a perspective view showing the stage driving unit shown in Fig. 4. Fig.
7 is a cross-sectional view showing the stage restraining device shown in Fig. 5 and its operation state.
8 is a plan view showing a paste dispenser according to a second embodiment of the present invention.
9 is a sectional view showing the stage center guide shown in Fig. 8 and the stage restraining device applied thereto.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. For the sake of convenience, the size, line thickness, and the like of the components shown in the drawings referenced in the description of the present invention may be exaggerated somewhat. The terms used in the description of the present invention are defined in consideration of the functions of the present invention, and thus may vary depending on the user, the intention of the operator, customs, and the like. Therefore, the definition of this term should be based on the contents of this specification as a whole.

3 and 4 are a perspective view and a plan view showing a paste dispenser according to a first embodiment of the present invention.

3 and 4, the paste dispenser according to the first embodiment of the present invention includes a base frame 20, a Y-axis table 30, a stage 40, at least one head unit 50, And at least one head unit support (60). A stage 40 is disposed on the upper side of the Y-axis table 30 and a substrate 5 is provided on the stage 40 The staple is omitted.) On the loaded and loaded substrate, the paste is applied by the head unit 50 to form a paste pattern.

The Y-axis table 30 is installed on the base frame 20 so as to be linearly movable in the Y-axis direction by the table moving device 70. The stage 40 is rotatably mounted on the Y-axis table 30 by the? -Axis driving device 100 so as to be rotatable around the center thereof and is rotated about the center of the Y- Can be moved.

The head unit 50 has a syringe for filling the paste, and a nozzle for discharging the paste from the syringe to the substrate. The head unit supporter 60 for supporting the head unit 50 includes an X-axis frame arranged on the upper side of the stage 40 in the X-axis direction and a Z-axis frame extending downward from the both end portions of the X- Frame.

The head unit support frame 60 is mounted such that both Z-axis frames thereof are linearly movable in the Y-axis direction by the support frame moving device 80 to the base frame 20, respectively. The head unit 50 is installed in the X axis frame of the head unit support 60 so as to be linearly movable in the X axis direction and the Z axis direction by the head unit moving device 90 having the X axis driving unit and the Z axis driving unit Axis direction and the Z-axis direction, and can be moved in the Y-axis direction together with the head unit support table 60.

In order to improve the speed of the paste pattern forming process, the head units 50 are preferably arranged at regular intervals so as to be spaced apart from each other in the X-axis direction on the X-axis frame of the head unit support 60 when a plurality of them are provided. When a plurality of head unit support rods 60 are provided, it is preferable that the plurality of head unit support rods 60 are arranged so as to be spaced apart from each other in the Y-axis direction.

As the table moving device 70, a linear motor including a stator having permanent magnets arranged in a line and a mover having an electromagnet, which operates by electromagnetic interaction between the stator and the mover, may be applied. Of course, instead of such a linear motor, a linear motion mechanism which is widely used in general may be applied, such as a pneumatic or hydraulic cylinder, a mechanism constituted by a power transmission means for converting the rotary motion of a rotary motor into a linear motion, have.

In the case of the X-axis driving unit and the Z-axis driving unit of the support unit moving device 80 and the head unit moving device 90, various linear motion mechanisms such as a linear motor can be applied like the table moving device 70.

The θ-axis driving apparatus 100 is disposed between the Y-axis table 30 and the stage 40 to rotatably support the stage 40 and rotate the stage 40. The θ-axis driving apparatus 100 includes a stage base 110 installed on the Y-axis table 30 and supporting the center of the stage 40 so that the stage 40 can be rotated about an axis in the Z-axis direction, A plurality of stages arranged to be apart from each other along a circumferential direction about the center of the stage 40 around the stage pedestal 110 and to guide the rotational motion of the stage 40 while supporting peripheral portions of the stage 40; A peripheral guide 120, and a stage driving unit 130 for rotating the stage 40. [

The stage pedestal 110 may be a pedestal including a bearing. For example, it may be a lower fixed bearing mounted on the Y-axis table 30, an upper rotary bearing mounted on the stage 40, and a bearing composed of a bearing interposed between the fixed bearing and the rotary bearing. As another example, the Y-axis table 30 may be a pedestal having a shaft member having a lower portion rotatably mounted by a bearing and an upper portion fixed to the stage 40. [

5 is a perspective view showing a guide 120 around the stage.

The stage peripheral guides 120 may be provided at four corners of the stage 40 having a rectangular structure, and may be disposed at intervals of 90 degrees. Of course, the number or arrangement of the stage peripheral guides 120 may be appropriately changed for the purpose of more stably supporting the peripheral portion of the stage 40 or guiding the rotational motion of the stage 40 more accurately.

The stage peripheral guides 120 include guide members that mate with each other and make relative motion. 5, the stage peripheral guide 120 includes a first fixing member 122 mounted on the Y-axis table 30 and having a first linear guide surface, a second fixing member 122 fixed to the first fixing member 122, A second fixing member 126 mounted on the first moving member 124 and having a linear second guide surface, a second fixing member 126 (not shown) having a second linear guide surface, And a second moving member 128 mounted on the stage 40 so as to be linearly movable along the second guide surface. The first fixing member 122, the first moving member 124, the second fixing member 126, and the second moving member 128 constitute a guide member that mates with each other to perform a relative movement.

The first fixing member 122 has its first guide surface arranged in one of the X axis direction and the Y axis direction and the second fixing member 126 is arranged so that its second guide surface is perpendicular to the X axis direction Axis direction and the Y-axis direction. That is, when the first guide surfaces are arranged in the X-axis direction, the second guide surfaces are arranged in the Y-axis direction so that the first guide surfaces and the second guide surfaces are perpendicular to each other.

When the stage 40 is rotated at a predetermined angle, the first stage moving member 124 moves linearly along the first guide surface of the first stationary member 122 (for example, in the Y-axis direction) The second movable member 126 is moved in the same direction together with the first movable member 124 and the second movable member 128 is moved linearly along the second guide surface of the second fixed member 126 (X-axis direction), and guides the rotational motion of the stage 40.

The second fixing member 126 may be provided on the upper side of the first moving member 124 so as to be rotatable about a bearing or a central shaft so as to guide the rotational movement of the stage 40 more naturally. As shown in Fig.

6 is a perspective view showing the stage driving unit 130. Fig.

The stage driving unit 130 may be disposed on any one of the four sides of the stage 40 having a rectangular structure. The position of the stage driving unit 130 may be one side of the remaining one of the stage peripheral guides 120 provided on one of the three corners of the four corners of the stage 40.

6, the stage driving unit 130 includes a screw shaft 131 provided with a male threaded portion on the outer periphery thereof along its longitudinal direction, a screw shaft 131 mounted on the Y axis table 30 and having both ends of the screw shaft 131 rotated A driving motor 133 for providing a rotational force to the screw shaft 131, a first moving member 134 having a nut portion screwed to the screw shaft 131, A rotation member 135 rotatably coupled to the upper portion of the member 134 by a rotation means such as a bearing or a central shaft so as to be rotatable about the Z axis direction, a guide member 136 And a second shifting member 137 movably coupled to the guiding member 136 along the guiding surface of the guiding member 136.

Here, it is preferable that the screw shaft 131 is disposed so as to be parallel to the tangential direction with respect to the circumferential direction about the center of the stage 40. The screw shaft 131 may be of a type configured to have a general ball screw structure. The first movable member 134 of the stage driving unit 130 moves along the screw shaft 131 and the rotational member 135 of the stage driving unit 130, the guide member 136 and the second movable member 137 Transfers the linear motion of the first movable member 134 so that the stage 40 can be rotated, and transfers the linear motion to the stage 40. [ The guide member 136 is preferably disposed to intersect with the screw shaft 131.

When the screw shaft 131 is rotated by operating the driving motor 133, the first moving member 134 is moved along the screw shaft 131, The guide member 136 is rotated together with the rotary member 135 in the same direction and the second moving member 137 is moved along the guide surface of the guide member 136 to drive the stage 40 with a driving motor 133) to rotate the stage (40).

The substrate is loaded on the stage 40 and the stage 40 is rotated by a predetermined angle at which the substrate is misaligned so that the loaded substrate is aligned with the X axis direction and the Y axis direction, In the process of moving the Y-axis table 30 in the Y-axis direction together with the head unit 50 for applying the paste, the stage 40 is provided with a clearance (For example, clearance between the guide members 122 and 124 (126 and 128) constituting the substrate), and thus the paste may be improperly applied to the substrate.

Accordingly, the paste dispenser according to the first embodiment of the present invention restricts the stage 40 to the Y-axis table 30 after aligning the substrate, and moves the Y-axis table 30 in the Y- And a stage restraining device for preventing the stage 40 from generating micro-vibrations.

7 is a sectional view showing the stage restraining device.

5 and 7, the stage restraint device includes a first fixing member 122 and a first moving member 124 that are paired with each other and at least one of the plurality of stage peripheral guides 120, And a clamp 200 for clamping and unclamping the stage moving member 126 and the second moving member 128 to restrain or release the stage 40, respectively. Since the clamp 200 is applied to both the first fixing member 122 and the first moving member 124 and the second fixing member 126 and the second moving member 128 in the same manner, The first moving member 124 will be mainly described.

The clamp 200 includes a clamp body 220 having a pressing member 210 and a pressing member driving unit 230 for moving the pressing member 210. [

The clamp body 220 is movably mounted on the first movable member 124 together with the first movable member 124. [ A plurality of pressing members 210 are provided. The pressing member 210 is mounted on the clamp body 220 so as to be movable back and forth with respect to the first fixing member 122 on both sides with the first fixing member 122 interposed therebetween so that the first fixing member 122 122).

The pushing member driving unit 230 may be constituted by a pneumatic or hydraulic cylinder for moving the both pushing members 210, respectively. As the pushing member drive unit 230, a mechanism composed of a linear motor, a rotary motor, and a power transmission means for converting the rotational motion of the rotary motor into a linear motion and transmitting the same may be applied.

Such a clamp 200 operates the pressing member driving unit 230 so that the pressing members 210 are advanced with respect to the first fixing member 122 and the second fixing member 126, The both pressing members 210 press the first fixing member 122 and the second fixing member 126 from both sides, respectively. At this time, each of the clamps 200 is fixed to the first fixing member 122 and the second fixing member 126, whereby the first moving member 124, the first moving member 128, The stage 40 is constrained to the Y-axis table 30 while being restrained to the first fixing member 122 and the second fixing member 126, respectively. Of course, when the both pressing members 210 are moved backward with respect to the first fixing member 122 and the second fixing member 126, the restraint of the stage 40 is released (see Fig. 7 (A)).

Although not shown in the drawings, both pressing members 210 have frictional force with the first fixing member 122 and the second fixing member 126 at the end contacting with the first fixing member 122 and the second fixing member 126, An anti-slip material may be attached. The anti-slip material can be made of various materials that can increase the frictional force such as rubber.

8 is a plan view showing a paste dispenser according to a second embodiment of the present invention. 8, the paste dispenser according to the second embodiment of the present invention is similar to the paste dispenser according to the first embodiment except that the stage dispenser 100 has a stage center guide 140 and 150) is applied, and only the point at which the clamp 200 is applied to the stage center guide is different. This is explained as follows.

9 is a sectional view showing a clamp 200 applied to the stage center guide and the stage center guide shown in Fig.

The stage center guide is composed of an inner center guide 140 and an outer center guide 150 disposed on the outer side of the inner center guide 140 and rotatably supporting the center of the stage 40 together with the inner center guide 140 do.

The inner center guide 140 includes a fixed member 142 mounted on the Y-axis table 30 and having a circular ring-shaped guide surface, a movable member 142 movably coupled to the fixed member 142 along the guide surface of the fixed member 142 And a single or a plurality of moving members 144 mounted on the stage 40 in a state of being in a state of being mounted. The outer center guide 150 may be composed of a stationary member and a moving member, like the inner center guide 140. However, the outer center guide 150 has a plurality of fixing members, and the fixing member has an arc-shaped guide surface with the center of the stage 40 as the center.

The clamp 200 is applied to at least one of the inner center guide 140 and the outer center guide 150. Of course, it can be further applied to the stage periphery guide 120. Since the clamp 200 is applied to both the inner center guide 140 and the outer center guide 150, the clamp 200 will be mainly described with reference to the inner center guide 140.

The clamp body 220 is mounted on at least one of the moving members 144 of the inner center guide 140 and is moved with the moving member 144. The pressing member 210 is mounted on the clamp body 220 so as to be movable back and forth with respect to the fixing member 142 on both sides of the fixing member 142 of the inner center guide 140, Thereby pressing or releasing the pressure. The clamp body 220 is fixed to the fixing member 142 when the pressing member driving unit 230 is operated and the both pressing members 210 are advanced with respect to the fixing member 142 of the inner center guide 140 , The stage 40 is restrained to the Y-axis table 30 while the movable member 144 is restrained by the fixing member 142.

While the present invention has been described in connection with what is presently considered to be the most practical and preferred embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the invention.

5: substrate 20: base frame
30: Y-axis table 40: stage
50: head unit 100:? Axis driving device
110: Stage pedestal 120: Stage surrounding guide
122: first fixing member 124: first moving member
126: second fixing member 128: second moving member
130: stage driving unit 140, 150: stage center guide
200: clamp 210:
220: clamp body 230: pressing member driving unit

Claims

A Y-axis table movable in the Y-axis direction;
A stage mounted on the Y-axis table and rotatable by a? -Axis driving device, on which a substrate is loaded;
A head unit for applying a paste onto the substrate loaded on the stage;
And a stage restraint device for restraining the stage on the Y-axis table to prevent the stage from vibrating or releasing the constraint on the Y-axis table when the Y-axis table moves.

The method according to claim 1,
Axis driving device includes at least one stage guide provided between the Y-axis table and the stage and having a guide member composed of a stationary member and a moving member that are paired with each other to guide the rotational motion of the stage while performing relative movement, Including,
Wherein the stage restraining device comprises a clamp for clamping and unclamping the mating guide members of the stage guide to restraint or release the stage.

The clamp according to claim 2,
A clamping body mounted on the moving member and having a pressing member that moves together and is movable back and forth with respect to the fixing member at both sides with the fixing member interposed therebetween so as to press or release the pressing member according to the moving direction;
And a pushing member driving unit for moving the both pressing members.

The method according to claim 1,
Axis driving device includes a plurality of stage guides disposed around the center of the stage between the Y-axis table and the stage,
Wherein each of the plurality of stage guides includes a first fixing member provided on the Y-axis table in one of an X-axis direction and a Y-axis direction, a second fixing member provided on the Y-axis table so as to be movable along the first fixing member, A first guide member composed of a first moving member; A second fixing member provided on the first moving member in the other of the X-axis direction and the Y-axis direction, and a second fixing member provided on the stage in a state of being movably coupled to the second fixing member along the second fixing member, 2 moving member,
Wherein the stage restraining device comprises a clamp for clamping and unclamping at least one of the first and second guide members paired with each other among the plurality of stage guides to thereby restrain or unblock the stage.