CN102530554A - Processing apparatus - Google Patents
Processing apparatus Download PDFInfo
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- CN102530554A CN102530554A CN2011103399787A CN201110339978A CN102530554A CN 102530554 A CN102530554 A CN 102530554A CN 2011103399787 A CN2011103399787 A CN 2011103399787A CN 201110339978 A CN201110339978 A CN 201110339978A CN 102530554 A CN102530554 A CN 102530554A
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Abstract
Provided is a processing apparatus capable of preventing the sorption fault between a substrate and a sucker. The processing apparatus comprises a processing portion used for carrying out regulated treatment over the substrate of the to-be-processed object, and a conveying bench used for carrying and conveying the substrate. The processing apparatus is characterized in that: the conveying bench comprises a supporting member which comprises an upper surface which has a end portion located at a position closer to the downside of the plumb than the central portion when being observed in the substrate-conveying direction and is used for directly/indirectly supporting the substrate configured to the upper side of the upper surface, a maintaining member which is used for maintaining the substrate in a moving manner capable of parallelly extending along the conveying direction, and a drive portion used for making the maintaining member move along the conveying shaft. The supporting height of the supporting substrate of the supporting member is equal to the keeping height of the maintaining substrate of the maintaining member in the processing portion setting area of the processing portion. The supporting height of the supporting substrate of the supporting member is lower than the keeping height in the area except for the processing portion setting area.
Description
Technical field
The present invention relates to a kind of processing equipment that for example glass basal plates of flat panel display, semiconductor substrate, printed circuit board (PCB) etc. are checked, handled of being used for.
Background technology
In recent years, in the manufacturing of glass substrate, semiconductor substrate, printed circuit board (PCB) (below be called substrate) etc., have and be used for substrate such as is checked at the processing equipment of handling.Processing equipment has and is used for substrate is checked the handling part of processing and is used for from outside to the handling part conveying substrate or from the delivery section of handling part to outside conveying substrate.
Delivery section comprises: float and use plate, it is being used for having a plurality of airports on the conveyor surface of conveying substrate, and is used for through making substrate floating from this airport blow out air; And sucker, it is used to adsorb substrate, and can move along throughput direction.Delivery section utilizes the sucker that floats the substrate that floats with plate to move through making to have adsorbed, and carries out the conveying of substrate.
But, produce deflection etc. if be transported to the substrate of handling part, might cause that then the processing accuracy to substrate of processing equipment reduces, surface that therefore at least need substrate in handling part is set to smooth.The flatness of the substrate conveyor surface of this processing equipment adjustment handling part and delivery section, and the height of the binding in the connecting part between adjustment handling part and the delivery section is so that it becomes smooth.
As above-mentioned processing equipment, disclose in inspection portion floating with plate (horizontal float member) and making the technology (for example with reference to patent documentation 1) of the surface flatness raising of the substrate in the handling part of configuration and throughput direction vertical direction.In this processing equipment, utilize sucker to keep utilizing and float the lower surface of the substrate that floats with plate, thereby carry out the conveying of substrate.
Patent documentation
Patent documentation 1: TOHKEMY 2009-256029 communique
But; Patent documentation 1 disclosed processing equipment has following problem: owing to critically define the flatness of the conveyor surface that is used for conveying substrate; Therefore if in conveying, produce small vibration etc., then the adsorbed state between sucker and the substrate is disengaged, and causes producing the absorption error.
Summary of the invention
The present invention In view of the foregoing makes, and its purpose is to provide a kind of processing equipment that can prevent the error of the absorption between substrate and the sucker.
In order to address the above problem and to achieve the goal, processing equipment of the present invention comprises: handling part, and it is used for the substrate as process object is implemented predetermined process; And transport platform, it is used for carrying puts aforesaid substrate and carries this substrate; It is characterized in that; Above-mentioned transport platform comprises: support unit; It has, and the end is positioned at than the upper surface of central portion by the position below the vertical when watching along the throughput direction of carrying aforesaid substrate, and is used for supporting directly or indirectly the aforesaid substrate of the top that is configured in this upper surface; Retaining member, it is used for keeping aforesaid substrate with the mode that the conveying axis that can the edge extends abreast with above-mentioned throughput direction moves; And drive division, it is used to make above-mentioned retaining member to move along above-mentioned conveying axis; The support height of above-mentioned support unit supporting aforesaid substrate keeps the maintenance of aforesaid substrate highly identical with above-mentioned retaining member in being provided with the handling part setting area of above-mentioned handling part, and the support height of above-mentioned support unit supporting aforesaid substrate is lower than above-mentioned maintenance height in the zone beyond the above-mentioned handling part setting area.
About processing equipment of the present invention; Through transport platform is set obliquely; And on even keel configuration is used to conveying axis that sucker is moved; Make the adsorption plane formation difference of height that is used to adsorb substrate of formed conveyor surface of transport platform and sucker, make substrate apply bigger deadweight, therefore can play the effect of the absorption error that prevents between substrate and the sucker sucker.
Description of drawings
Fig. 1 is the birds-eye view of the structure of flat-panel monitor (FPD) testing fixture that schematically shows embodiment 1 of the present invention.
Fig. 2 is the lateral plan of structure that schematically shows the FPD testing fixture of embodiment 1 of the present invention.
Fig. 3 is the scheme drawing that schematically shows transport platform shown in Figure 2.
Fig. 4 is the cutaway view of the A-A section of expression FPD testing fixture shown in Figure 1.
Fig. 5 is the cutaway view of variation 1 of the FPD testing fixture of expression embodiment 1 of the present invention.
Fig. 6 is the cutaway view of variation 2 of the FPD testing fixture of expression embodiment 1 of the present invention.
Fig. 7 is the cutaway view of variation 3 of the FPD testing fixture of expression embodiment 1 of the present invention.
Fig. 8 is the cutaway view of variation 4 of the FPD testing fixture of expression embodiment 1 of the present invention.
Fig. 9 is the cutaway view of variation 4 of the FPD testing fixture of expression embodiment 1 of the present invention.
Figure 10 is the cutaway view of structure of main portion of variation 4 of the FPD testing fixture of expression embodiment 1 of the present invention.
Figure 11 is the cutaway view of variation 5 of the FPD testing fixture of expression embodiment 1 of the present invention.
Figure 12 is the birds-eye view of structure that schematically shows the FPD testing fixture of embodiment 2 of the present invention.
Figure 13 is the cutaway view of the B-B section of expression FPD testing fixture shown in Figure 12.
Figure 14 is the cutaway view of variation of the FPD testing fixture of expression embodiment 2 of the present invention.
The specific embodiment
Below, the embodiment that is used for embodiment of the present invention at length is described in conjunction with accompanying drawing.In addition, the invention is not restricted to following embodiment.In addition, in following explanation, each figure of institute's reference just roughly expresses shape, size and position relation with the degree that can understand content of the present invention.That is, the invention is not restricted to illustrative shape, size and position relation in each figure.
(embodiment 1)
The processing equipment of embodiment 1 of the present invention at first, at length is described with reference to accompanying drawing.In addition, in following explanation, be that example describes with the testing fixture of substrate.Testing fixture both can be in line style, also can be offline model.
Fig. 1 is the birds-eye view of schematic configuration of flat-panel monitor (FPD) testing fixture of expression this embodiment 1.Fig. 2 is the lateral plan of structure that schematically shows the FPD testing fixture of this embodiment 1.As shown in Figure 1, FPD testing fixture 1 comprises: gantry objective table 10, and it is used to keep inspection unit 100 (handling part), and this inspection unit 100 is used to detect the defective of rectangular substrate W; And transport platform 12,20,21, it is used for conveying substrate W.
Gantry objective table 10 and transport platform 12,20,21 for example are fixed in, and Fig. 1,2 representes on such pallet 11.Pallet 11 is by for example the marble of bulk, the higher member of vibration strengths such as framework that steel combine being constituted.In addition, at pallet 11 with the shock absorption mechanism 13 that setting for example is made up of spring, liquid damper etc. between the face (for example floor) is set.Prevent the vibration of transport platform 12,20,21 and inspection unit 100 thus further.
In addition,, can keep comprising the zone of the center-of-gravity position of the substrate W that is imported into transport platform, carry thereby can carry out stable substrate through driver train 30 being arranged at the central authorities of the Width of transport platform.In addition, as long as wounded substrate W does not carry on ground, then the equipping position of driver train 30 can be position arbitrarily, also can be provided with a plurality of driver trains 30.
Fig. 3 is the scheme drawing that schematically shows transport platform shown in Figure 2.As shown in Figure 3, the height (upper surface) of the vertical of transport platform 20,21 is along with the step-down away from the end of transport platform 12 sides.The height of transport platform 20,21 utilizes the supporting of screw for example and is fixed.In addition, because therefore transport platform 20,21 when adjusting the height of transport platform 20,21, is also considered because the caused deflection of deadweight of transport platform 20,21 respectively by supporting member 22,23 supportings of cantilever beam shape.In addition, as long as can conveying substrate W, then also can set transport platform so that the height of the upper surface of the top transport platform 20,21 parallel with horizontal surface is lower than the mode of the upper surface of transport platform 12.
Here, the L3 with respect to the horizontal plane of the face L2 of the upper end through free roller along the maximum height difference d1 of vertical for number mm～tens of mm about, be more preferably about 2mm～3mm.In addition, the adsorption plane that is used to adsorb substrate W of sucker 34 utilizes the driving of drive division 32 and on horizontal surface L3, moves.
In addition, also can on transport platform 20,21, drive division be set, and be arranged to and to change the bevelled angle according to kind, the character of substrate etc.This drive division can be enumerated and use air cylinder, electro-motor etc.
In addition, the also replaceable one-tenth of inspection unit 100: for example be used for reparation unit, the image unit that is used to observe, preserve image that defect part to substrate W carries out that laser radiation reparation, coating are revised etc., be used for implementing other processing units of processing of the measuring units such as dimensional measurement, film thickness measuring, color measuring etc. of distribution etc. in the position of regulation.That is, processing unit comprises inspection unit, repairs unit, image unit, exposing unit, measuring unit etc.In addition, the FPD testing fixture of this embodiment also comprises above-mentioned processing unit and substrate is carried out the structure that each is handled being used for carrying on the platform put substrate W.
In addition, as long as just can form inner space (dust free room), so be preferred because FPD testing fixture 1 comprises the shell that is used to surround inspection space PR1 and conveying space TR1, TR2.This dust free room is the space that all is sealed the pipeline of input port, delivery port and bottom except substrate.Shell has the FFU that is used for sending into to the inner space clean air (below be called pure air) above the inspection unit 100.
FFU is used to see off and has removed the for example pure air of dust such as particulate.Its result particularly makes near inspection unit 100 reaching check that line L1 periphery (inspection space PR1) becomes the state of the less cleaning of dust.In addition, when near the air that inspection unit 100, reaches the concentrated cleaning of seeing off of inspection line L1 periphery forms katabatic drainage (down flow) in dust free room after, discharge from exhausr port.
Fig. 4 is the cutaway view of the A-A section of expression FPD testing fixture shown in Figure 1.In the position shown in the cutaway view of Fig. 4; Because the face (support height) that passes through in the upper end of the free roller 201 of each tabular component 20A～20F of transport platform is used to than sucker 34 that to adsorb the height (keeping height) of adsorption plane of substrate W low; Therefore; Than free roller 201, the weight of substrate W is applied on the sucker 34 significantly.Therefore, can utilize sucker 34 absorption substrate W more reliably.
As above-mentioned embodiment 1; Through transport platform is set obliquely; And on even keel configuration is used to conveying axis that sucker is moved; Make the adsorption plane that is used to adsorb substrate of face and sucker of the upper end of the free roller through transport platform form difference of height, make substrate apply bigger deadweight, thereby can make sucker adsorb substrate more reliably sucker.Can prevent the absorption error between substrate and the sucker thus.
In addition, about inspection space PR1, because the face of the upper end of the free roller 121 through transport platform 12 is maintained level, particularly substrate W forms horizontal surface on the plane at inspection line L1 place, so can keep substrate W and check etc. with horizontal state.
(variation)
Fig. 5 is the cutaway view of variation 1 of the FPD testing fixture of expression this embodiment 1.Fig. 5 is corresponding with cutaway view shown in Figure 4.About FPD testing fixture 1a, the degree of dip of the upper end side of free roller 202a～202d of the tabular component 20A of outer edge side, 20B, 20E, 20F is along with becoming big step by step near the outer edge side of the Width of transport platform.In addition, the height of the upper end of free roller 202a～202d is along with near outer edge side and step-down, and the face of the upper end through free roller 202a～202d is arcuation (dome shape).Utilize the structure of above-mentioned variation 1, can further increase the power of substrate W, therefore can realize more failure-free absorption to the vertical below that sucker 34 applies.
Fig. 6 is the cutaway view of variation 2 of the FPD testing fixture of expression this embodiment 1.Fig. 6 is corresponding with cutaway view shown in Figure 4.About FPD testing fixture 1b, the diameter of the free roller 203 of the tabular component 20A of outer edge side, 20B, 20E, 20F is greater than the diameter of the free roller 201 that is arranged at inboard tabular component 20C, 20D.Thus because the face of the upper end through each free roller 201,203 is different, so substrate W produce between tabular component 20C, the 20D towards below deflection.Thereby, the adsorption plane of sucker 34 is applied the load that deflection brought of substrate W, can realize more stable absorption.In addition, also can use the free roller of same diameter and dispose with inboard different mode at outer edge side with the height of the upper end of free roller.
Fig. 7 is the cutaway view of variation 3 of the FPD testing fixture of expression this embodiment 1.Fig. 7 is corresponding with cutaway view shown in Figure 4.About FPD testing fixture 1c, be equipped with between the free roller 201 of tabular component 20C, 20D of driver train 30 apart from d2 (interval of supporting member) greater than the distance between the free roller 201 of the tabular component 20A that is not equipped with driver train 30,20B, 20E, 20F.Thus, substrate W produces deflection between tabular component 20C, 20D.At this moment, the adsorption plane of sucker 34 is applied the load that deflection brought of substrate W, can under the situation that labyrinth is not set, realize more failure-free absorption.In addition, supporting member is made up of tabular component and free roller.Can change the interval of supporting member here, according to the thickness of employed substrate etc.For example, because the bigger situation of thickness of substrate is difficult to deflection than the less situation of the thickness of substrate, therefore enlarge at interval.At this moment because the thickness of substrate also changes according to the difference of Fabrication procedure, therefore preferably change over its operation in the corresponding interval of thickness of substrate.
Fig. 8, Fig. 9 are the cutaway views of variation 4 of the FPD testing fixture of expression this embodiment 1.Figure 10 is the cutaway view of structure of main portion of variation 4 of the FPD testing fixture of expression this embodiment 1.Like Fig. 8, shown in 9, about FPD testing fixture 1d, driver train 30 comprises and links and be used to lift component 35 that sucker 34 is moved up and down with drive division 32.Lift component 35 has the lifting unit 35a that is used to support sucker 34 and can goes up and down to drive.Fig. 8 is the cutaway view (corresponding diagram 4) in the transport platform 20,21 (conveying space TR1, TR2).As shown in Figure 8, the adsorption plane of sucker 34 utilizes the rising of lifting unit 35a and is higher than the face through the upper end of free roller 201.Thus, because substrate W can apply bigger contact load to sucker 34, therefore can realize more failure-free absorption.
In addition, Fig. 9 is the cutaway view of the direction vertical with throughput direction in the transport platform 12 (inspection space PR1).In the inspection space, utilize lifting unit 35a to adjust, so that the adsorption plane of sucker 34 becomes the height below the free at least roller 201 formed conveyor surfaces.Thus, the mode that can when checking, not produce distortion such as deflection with the face of substrate W is checked.
In addition, sucker 34 and lifting unit 35a are arranged to dismantled and assembled, shown in figure 10, and when lifting unit 35a had descended, sucker 34 was kept the state of absorption substrate W.In this case, need not synchronously sucker 34 to be carried out the control of pump etc., only utilize the control of lifting unit 35a just can realize with lifting unit 35a.In addition, sucker 34 is an one with lifting unit 35a, and sucker 34 is broken away from from substrate W with the decline interlock of lifting unit 35a.At this moment, though the lifting unit self-priming disk detachment of a sucker side, owing to utilize another sucker absorption substrate W, so substrate W keeps the state that is supported on the transport platform.
Figure 11 is the cutaway view of variation 5 of the FPD testing fixture of expression this embodiment 1.FPD testing fixture 1e shown in Figure 11 is corresponding with cutaway view shown in Figure 4, comprises 2 driver train 30A, 30B, and this driver train 30A, 30B have conveying axis 31A, 31B, drive division 32A, 32B and sucker 34A, 34B respectively.Here, each driver train 30A, 30B are configured in the position with respect to centre line L 4 symmetries of the Width of transport platform 20 respectively.Thus, substrate W can be supported on sucker 34 with uniform deflection, and the adsorption plane of sucker 34 is applied the load that deflection brought by substrate W, thereby can realize more failure-free absorption.
(embodiment 2)
Figure 12 is the birds-eye view of structure that schematically shows the FPD testing fixture 2 of embodiment 2 of the present invention.Figure 13 is the cutaway view of the B-B section of expression FPD testing fixture 2 shown in Figure 12.In embodiment 2, utilize air as support unit to make to carry and place the substrate W that floats transport platform 40～42 to float, thereby to eliminate with the friction of substrate W and to prevent that the mode of the damage that is caused by friction of substrate from carrying.In addition, identical with embodiment 1, set zone such as the inspection unit of gantry objective table 10 grades is inspection space PR2, and the zone beyond the inspection space PR2 is conveying space TR3, TR4.In addition, to the structure mark identical Reference numeral identical with the structure shown in Fig. 1 etc.
For example, shown in figure 13, float transport platform 41 and have to float and be arranged in the structure that the curtain shape forms with plate 41A～41F edge direction vertical with throughput direction D.In floating, be provided for being used to plate 41A～41F from the air of air supply unit 50 supply with and above vertical a plurality of holes 411 that blow out of blow out air.In addition, in floating transport platform 40,42, respectively float with plate and also have the hole of blowing out 401,421.
In addition, the central authorities at the Width that floats transport platform 40～42 are provided with above-mentioned driver train 30.Identical with embodiment 1; Localization method as substrate W; Can enumerate the method for using lift pin and detent mechanism etc., this lift pin is used to support the substrate W that is imported on the transport platform 41 and substrate W is carried place transport platform 41, this detent mechanism to be used to make and carry the substrate W location that places transport platform 41.In addition, float transport platform 40 and be supported on shock absorption mechanism shown in Figure 2 13.
In Figure 13; Owing to the height of adsorption plane that is used to adsorb substrate W that is lower than sucker 34 from the substrate supporting height that floats the substrate W that floats down with the effect that blows out the air that hole 411 blows out of plate 41A～41F that is bearing in that floats transport platform 41, the weight of the substrate W that therefore applies to the adsorption plane of sucker 34 becomes big.Therefore, can utilize sucker 34 absorption substrate W more reliably.
As above-mentioned embodiment 2; Through transport platform is set obliquely; And on even keel configuration is used to conveying axis that sucker is moved; Make the adsorption plane formation difference of height that is used to adsorb substrate of formed conveyor surface of transport platform and sucker, make substrate apply bigger deadweight, thereby can make sucker more stably adsorb substrate sucker.
In addition; About inspection space PR2; Because floating the upper surface that respectively floats with plate of transport platform 40 is provided with the mode of keeping level; The substrate W that utilizes air and float is maintained level, and particularly substrate W forms horizontal surface on the plane at inspection line L5 place, so can keep substrate W and check etc. with horizontal state.
(variation)
Figure 14 is the cutaway view of variation of the FPD testing fixture of expression this embodiment 2.Figure 14 is corresponding with cutaway view shown in Figure 13.About FPD testing fixture 2a, on the Width of transport platform 41 in the inner part float the upper surface that floats that is lower than outer edge side with the upper surface of plate 41C, 41D with plate 41A, 41B, 41E, 41F.Because the pressure from floating the air that blows out with plate 41A～41F equates, therefore utilize float the substrate W that floats with plate generation between tabular component 41C, the 41D towards below deflection.Thus, the adsorption plane of sucker 34 is applied the load that deflection brought of substrate W, can realize more stable absorption.
In addition, desire obtains the effect identical with the variation of embodiment 11, can float with plate according to each to change the pressure that blows out the air that hole 411,421 blows out that oneself floats transport platform 41,42.For example, through the pressure that blows out the air that the hole blows out that floats with plate from outer edge side is lower than from the inboard pressure that floats the air that blows out with plate, the deflection that can produce the substrate W of that kind as shown in Figure 5.In addition, variation 3 that kind as shown in Figure 7 also go for floating with plate adjustment with respect to other and float the structure with the interval between plate 41C, the 41D.
As stated, processing equipment of the present invention carry keeping reliably the inspection object the substrate this point be useful.
Description of reference numerals
1,1a～1e, 2, FDP testing fixture; 10, gantry objective table; 11, pallet; 12,20,21, transport platform; 13, shock absorption mechanism; 20A～20F, tabular component; 22,23,33, supporting member; 30,30A, 30B, driver train; 31,31A, 31B, conveying axis; 32,32A, 32B, drive division; 34,34A, 34B, sucker; 35, lift component; 35a, lifting unit; 40～42, float transport platform; 41A～41F, float and use plate; 100, inspection unit; 101, microscope; 121,201,202a～202d, 203,211, free roller; L1, L5, inspection line; PR1, PR2, inspection space; TR1～TR4, conveying space; W, substrate.
Claims (8)
1. processing equipment, it comprises: handling part, it is used for the substrate as process object is implemented predetermined process; And transport platform, it is used for carrying puts aforesaid substrate and carries this substrate; It is characterized in that,
Above-mentioned transport platform comprises:
Support unit, it has, and the end is positioned at than the upper surface of central portion by the position below the vertical when watching along the throughput direction of carrying aforesaid substrate, and is used for supporting directly or indirectly the aforesaid substrate of the top that is configured in this upper surface;
Retaining member, it is used for keeping aforesaid substrate with the mode that the conveying axis that can the edge extends abreast with above-mentioned throughput direction moves; And
Drive division, it is used to make above-mentioned retaining member to move along above-mentioned conveying axis;
The support height of above-mentioned support unit supporting aforesaid substrate keeps the maintenance of aforesaid substrate highly identical with above-mentioned retaining member in being provided with the handling part setting area of above-mentioned handling part, and the support height of above-mentioned support unit supporting aforesaid substrate is lower than above-mentioned maintenance height in the zone beyond the above-mentioned handling part setting area.
2. processing equipment according to claim 1 is characterized in that,
Above-mentioned drive division is arranged at the central authorities of the Width of above-mentioned transport platform,
The height of the supporting aforesaid substrate of above-mentioned support unit is that the height of supporting aforesaid substrate of outer edge side of above-mentioned Width is different with the height of the supporting aforesaid substrate of the inboard of above-mentioned Width at least.
3. processing equipment according to claim 2 is characterized in that,
Above-mentioned support unit is lower than the height of above-mentioned support unit at above-mentioned inboard supporting aforesaid substrate at the height of above-mentioned outer edge side supporting aforesaid substrate.
4. processing equipment according to claim 2 is characterized in that,
Above-mentioned support unit is higher than the height of above-mentioned support unit at above-mentioned inboard supporting aforesaid substrate at the height of above-mentioned outer edge side supporting aforesaid substrate.
5. processing equipment according to claim 1 is characterized in that,
The above-mentioned support unit edge direction vertical with above-mentioned throughput direction is arranged with a plurality of supporting members that extend along above-mentioned throughput direction,
In between a part of crack during above-mentioned drive division is provided between the crack between the adjacent above-mentioned supporting member,
Set interval between the above-mentioned supporting member of above-mentioned drive division greater than the interval between the above-mentioned supporting member that does not set above-mentioned drive division.
6. processing equipment according to claim 1 is characterized in that,
Above-mentioned support unit has can be to a plurality of free roller of above-mentioned throughput direction rotation.
7. processing equipment according to claim 1 is characterized in that,
Above-mentioned support unit has a plurality of holes that blow out, these are a plurality of blow out the hole be used to be used to from the air of air supply unit supply with and towards the top of above-mentioned transport platform blow out air.
8. processing equipment according to claim 1 is characterized in that,
Above-mentioned drive division is provided with a plurality of,
Each drive division is provided in the position with respect to the line of centers symmetry of the Width of above-mentioned transport platform.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010245367A JP2012099611A (en) | 2010-11-01 | 2010-11-01 | Processing device |
| JP2010-245367 | 2010-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102530554A true CN102530554A (en) | 2012-07-04 |
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ID=46338832
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011103399787A Pending CN102530554A (en) | 2010-11-01 | 2011-11-01 | Processing apparatus |
| CN 201120426711 Expired - Fee Related CN202307839U (en) | 2010-11-01 | 2011-11-01 | Processing device |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120426711 Expired - Fee Related CN202307839U (en) | 2010-11-01 | 2011-11-01 | Processing device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2012099611A (en) |
| CN (2) | CN102530554A (en) |
| TW (1) | TW201227866A (en) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09208078A (en) * | 1996-01-31 | 1997-08-12 | Sharp Corp | Carrying device for sheet |
| JP2004352427A (en) * | 2003-05-29 | 2004-12-16 | Dainippon Printing Co Ltd | Transport device |
| JP4349528B2 (en) * | 2005-01-25 | 2009-10-21 | 大日本印刷株式会社 | Substrate transport device, substrate control method, color filter manufacturing method, electronic circuit manufacturing method |
| JP4652351B2 (en) * | 2007-02-02 | 2011-03-16 | 大日本印刷株式会社 | Substrate support apparatus and substrate support method |
-
2010
- 2010-11-01 JP JP2010245367A patent/JP2012099611A/en active Pending
-
2011
- 2011-10-27 TW TW100139103A patent/TW201227866A/en unknown
- 2011-11-01 CN CN2011103399787A patent/CN102530554A/en active Pending
- 2011-11-01 CN CN 201120426711 patent/CN202307839U/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
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| TW201227866A (en) | 2012-07-01 |
| JP2012099611A (en) | 2012-05-24 |
| CN202307839U (en) | 2012-07-04 |
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Application publication date: 20120704 |