JP6949455B2 - Non-contact transfer device and non-contact suction plate - Google Patents

Description

The present invention relates to a non-contact transfer device and a non-contact suction plate. More specifically, the non-contact transfer device for transporting a thin plate-shaped work in a non-contact state and a non-contact transfer device for sucking a thin plate-shaped work in a non-contact state. Regarding non-contact suction plate.

The levitation stage of Cited Document 1 is known as a non-contact adsorption device for levitation and handling thin workpieces such as semiconductor wafers and glass substrates for FPDs. In this levitation stage, the work is floated and conveyed on the porous plate by simultaneously floating the work by pressurized air and non-contact adsorption of the work by suction on the surface of the porous plate.

Further, as another non-contact suction device, the non-contact suction board of Cited Document 2 is known. This non-contact adsorption plate realizes non-contact adsorption in which pressurized air is simultaneously ejected and sucked on the surface of the porous plate to float and hold the thin plate-shaped work on the porous plate.

Since these non-contact suction devices and non-contact suction machines can float, transport, or hold the thin plate-shaped work without damaging the thin plate-shaped work, the thin plate-shaped work such as a glass substrate for FPD can be processed. It is an effective device when doing so.

Japanese Unexamined Patent Publication No. 2007-27495 Patent No. 5512052

The levitation stage (non-contact transfer device) described in Patent Document 1 transports a thin plate-shaped work such as a glass substrate for an LCD, but the transport distance is short and it is formed of a single porous plate. There is. Therefore, when the thin plate-shaped work is transported over a long distance or the thin plate-shaped work having a large size is transported by using the levitation stage as described above, a plurality of porous plates are continuously transferred in the transport direction. Must be placed side by side.

However, in such a configuration, when the work is transferred from the porous plate on the upstream side to the porous plate on the downstream side, the tip of the work is a connecting portion of two porous plates arranged side by side in the transport direction. Was sometimes displaced downward.

Due to such downward displacement, problems such as deformation of the work itself and difficulty in smoothly transferring the work onto the porous plate on the downstream side may occur. In particular, such a problem is remarkable in an extremely thin work having a thickness of less than 0.5 mm.

Further, as described above, the non-contact suction plate described in Patent Document 2 holds a thin plate-shaped work such as a glass substrate for LCD while floating on a porous plate.

However, the above-mentioned non-contact suction plate cannot change the ejection pattern of the pressurized air ejected from the surface of the porous plate. That is, it is not possible to locally change the ejection state of the pressurized air ejected from the porous surface. Therefore, the thin plate-shaped work could only be floated in the same state. Specifically, for example, the same thin plate-shaped work could not be floated and held in different shapes such as a flat plate shape, a convex shape, or a concave shape.

That is, the non-contact suction device such as the conventional non-contact transfer device and the non-contact suction board cannot finely control the non-contact suction state of the work.

The present invention has been made in view of these points, and an object of the present invention is to provide a non-contact suction device such as a non-contact transfer device and a non-contact suction board capable of finely controlling the non-contact suction state of a work. And.

More specifically, the present invention has been made to solve the above-mentioned problems, and the work is porous on the downstream side while having a configuration in which a plurality of porous plates are continuously arranged in the transport direction. An object of the present invention is to provide a non-contact transfer device capable of suppressing downward displacement of a tip portion of a work when transferring to a plate.

More specifically, it is an object of the present invention to provide a non-contact suction plate capable of locally changing the ejection state of the pressurized air ejected from the surface of the porous pad.

According to the present invention
A non-contact transport device that sucks and transports thin plate-shaped workpieces in a non-contact state.
The first and second non-contact suction plates arranged along the transport direction are provided.
Each of the first and second non-contact suction plates
A rectangular porous pad in which a plurality of suction holes extending in the thickness direction are arranged in a grid pattern,
A rectangular holder connected to the back surface of the porous pad, which has a grid-like pressurized gas flow path on the front surface and a plurality of islands arranged in a grid pattern separated by the pressurized gas flow path. When a portion is formed, the island-shaped portion is provided corresponding to the suction hole and has a communication hole extending through the island-shaped portion in the thickness direction, and is connected to the porous pad, the island-shaped portion becomes the said. It is provided with a holder whose top surface is in close contact with the back surface of the porous pad in a state where the communication hole communicates with the suction hole of the porous pad.
The lattice-shaped pressurized gas flow path of the holder of the first non-contact adsorption plate arranged on the upstream side in the transport direction is in the connection region with the second non-contact adsorption plate arranged on the downstream side in the transport direction. , At least a part is terminated by an end width direction flow path arranged so as to extend in a direction orthogonal to the transport direction.
A non-contact transfer device is provided.

According to such a configuration, the non-contact suction state of the work can be finely controlled. Specifically, the pressurized gas flow path of the non-contact suction plate on the upstream side is an end width direction flow arranged so as to extend in a direction orthogonal to the transport direction in the connection region with the non-contact suction plate on the downstream side. It ends at the road. Therefore, when the thin plate-shaped work is transferred from the first non-contact suction plate to the second non-contact suction plate, the porous pad in the connection region from the end width direction flow path of the first non-contact suction plate The height of the work can be appropriately controlled by being pushed upward by the high-pressure gas that is sent into the pores and ejected from the porous pad in the connection region.

According to another preferred embodiment of the present invention
The lattice-shaped pressurized gas flow path of the holder of the second non-contact suction plate is an end arranged so that at least a part thereof extends in the transport direction in the connection region with the first non-contact suction plate. It is terminated by the flow path in the transport direction.

According to such a configuration, in the second non-contact suction plate, the amount of pressurized gas ejected from the surface of the porous pad at the portion on the most upstream side in the transport direction is the transport direction of the first non-contact suction plate. Since it is less than the amount of the pressurized gas ejected in the most downstream portion, it is suppressed that the work transferred to the second non-contact adsorption plate is excessively lifted upward.

According to another preferred embodiment of the present invention
The lattice-shaped pressurized gas flow path of the holder of the first non-contact suction plate is an end arranged so that at least a part thereof extends in the transport direction in the connection region with the second non-contact suction plate. It is terminated by the flow path in the transport direction.

According to such a configuration, in the first non-contact suction plate, the amount of pressurized gas ejected from the surface of the porous pad at the most downstream portion in the transport direction is the transport direction of the second non-contact suction plate. Since it is less than the amount of the pressurized gas ejected in the most upstream portion, it is suppressed that the tip of the work transferred to the second non-contact adsorption plate is excessively lifted upward.

According to another preferred embodiment of the present invention
The lattice-shaped pressurized gas flow path of the holder of the second non-contact suction plate is arranged so that at least a part thereof extends orthogonally to the transport direction in the connection region with the first non-contact suction plate. It is terminated by the end width direction flow path.

According to another preferred embodiment of the present invention
The lattice-shaped pressurized gas flow path of the holder of the first non-contact suction plate is arranged so that at least a part thereof extends orthogonally to the transport direction in the connection region with the second non-contact suction plate. It is terminated by the end width direction flow path.

According to another preferred embodiment of the present invention
The grid-like pressurized gas flow paths of the holders of the first and second non-contact suction plates are alternately arranged with a closed rectangular portion and an open rectangular portion. With
In the first and second non-contact suction discs, the open rectangular portion of the pressurized gas flow path of one non-contact suction disc is a closed rectangle of the pressurized gas flow path of the other non-contact suction disc. The portions are arranged so as to be aligned along the transport direction.

According to another preferred embodiment of the present invention
The holder of the first non-contact suction plate includes an independent pressurized gas flow path separated from the pressurized gas flow path.

According to another preferred embodiment of the present invention
The independent pressurized gas flow path of the first non-contact suction board is provided on the side edge side of the terminal portion of the pressurized gas flow path in the connection region with the second non-contact suction board.

According to such a configuration, the flow rate, pressure, etc. of the pressurized air supplied to the independent pressurized gas flow path can be set to a value different from the flow rate, pressure, etc. of the pressurized gas supplied to the pressurized gas flow path. Since this is possible, it is possible to independently control the flow rate of the pressurized gas ejected from the porous pad in the connection region with the second non-contact suction plate.

According to another preferred embodiment of the present invention, the holder of the second non-contact suction plate includes an independent pressurized gas flow path separated from the pressurized gas flow path.

According to another preferred embodiment of the present invention, the independent pressurized gas flow path of the second non-contact suction plate is a terminal portion of the pressurized gas flow path in the connection region with the first non-contact suction plate. It is provided on the side edge side of.

According to such a configuration, the flow rate, pressure, etc. of the pressurized air supplied to the independent pressurized gas flow path can be set to a value different from the flow rate, pressure, etc. of the pressurized gas supplied to the pressurized gas flow path. Since this is possible, it is possible to independently control the flow rate of the pressurized gas ejected from the porous pad in the connection region with the first non-contact suction plate.

According to another preferred embodiment of the present invention, the porous pad has an independent suction hole that is in a suction state different from that of the suction hole.

According to another preferred embodiment of the present invention
The independent suction holes are arranged in the connection region of one non-contact suction plate with the other non-contact suction plate.

According to another preferred embodiment of the present invention
The first and second non-contact suction plates are arranged in contact with each other.

According to another preferred embodiment of the present invention
The first and second non-contact suction plates are arranged apart from each other.

According to such a configuration, when transferring from the first non-contact suction plate to the second non-contact suction plate, the tip of the work is pushed upward, and then the first and second non-contact suction plates are sucked. Since it is urged downward by its own weight in the gap formed between the boards, it is possible to transfer to the second non-contact suction board while maintaining the height position.

According to another aspect of the invention
A non-contact suction board that sucks thin plate-shaped workpieces in a non-contact state.
A rectangular porous pad with multiple suction holes extending through the thickness direction,
A holder connected to the back surface of the porous pad, on which a pressurized gas flow path and a plurality of island-shaped portions separated by the pressurized gas flow path are formed and aligned with the suction holes. The island-shaped portion is provided with a communication hole extending through the island-shaped portion in the thickness direction, and when connected to the porous pad, the island-shaped portion has the communication hole in the suction hole of the porous pad. It is provided with a holder whose top surface is in close contact with the back surface of the porous pad in a state of communication.
The holder is further formed with an independent pressurized gas flow path separated from the pressurized gas flow path on the surface.
A non-contact suction board is provided.

According to such a configuration, the non-contact suction state of the work can be finely controlled. Specifically, the pressure and / or flow rate of the pressurized air supplied in the pressurized gas flow path and the pressure and / or flow rate of the pressurized air supplied to the independent pressurized gas flow path are independently determined. can do. Therefore, it is possible to change the flow rate distribution of the pressurized air ejected from the surface of the porous pad. By changing the flow rate distribution, it becomes possible to hold a thin plate work having the same shape in a flat plate shape, or to hold it in a convex shape or a concave shape.

According to another preferred embodiment of the present invention
The independent pressurized gas flow path is arranged adjacent to the edge of the non-contact suction plate.

According to another preferred embodiment of the present invention
The porous pad has an independent suction hole that is in a suction state different from that of the suction hole.

According to another preferred embodiment of the present invention
A plurality of independent pressurized gas flow paths are formed.
The independent pressurized gas channels are separated from each other.

According to another preferred embodiment of the present invention, there is provided a non-contact transfer device including the non-contact suction plate.

According to another preferred embodiment of the present invention
The non-contact suction plates arranged adjacent to each other are arranged so that the edges thereof are adjacent to each other.

According to such a configuration
Since the amount of pressurized air ejected from the surface of the porous pad can be controlled independently of other regions in the vicinity of the region where the non-contact suction plates are connected to each other, the workpiece being conveyed can be controlled. It is possible to suppress fluctuations in height and the like that occur when transferring from one non-contact suction plate to the other non-contact suction plate adjacent to the non-contact suction plate.

According to the present invention, there is provided a non-contact suction device such as a non-contact transfer device and a non-contact suction board that can finely control the non-contact suction state of a work.

Further, according to the present invention, while having a configuration in which a plurality of porous plates are continuously arranged in the transport direction, when the work is transferred to the porous plate on the downstream side, the tip portion of the work is displaced downward. A non-contact transfer device that can be suppressed is provided.

Furthermore, according to the present invention, it is an object of the present invention to provide a non-contact suction plate capable of locally changing the ejection state of the pressurized air ejected from the surface of the porous pad.

It is an exploded perspective view of the non-contact suction disk used in the non-contact transfer device of the preferable embodiment of this invention. It is a schematic cross-sectional view for demonstrating the state of suction fixing (non-contact suction) of a work W by the non-contact suction board of FIG. It is a figure which shows the arrangement of the non-contact suction disk in the non-contact transfer apparatus of 1st Embodiment of this invention. It is a figure which shows the arrangement of the non-contact suction disk in the non-contact transfer apparatus of the modification of 1st Embodiment. It is a figure which shows the arrangement of the non-contact suction disk in the non-contact transfer apparatus of the 2nd Embodiment of this invention. It is a figure which shows the arrangement of the non-contact suction disk in the non-contact transfer apparatus of the modification of 2nd Embodiment. It is a figure which shows the arrangement of the non-contact suction disk in the non-contact transfer apparatus of the 3rd Embodiment of this invention. It is a figure which shows the arrangement of the non-contact suction disk in the non-contact transfer apparatus of the modification of 3rd Embodiment. It is a figure which shows the arrangement of the non-contact suction disk in the non-contact transfer apparatus of 4th Embodiment of this invention. It is a figure which shows the arrangement of the non-contact suction disk in the non-contact transfer apparatus of the modification of 4th Embodiment. It is a figure which shows the arrangement example of the non-contact suction disk in a non-contact transfer device. It is a figure which shows the other arrangement example of the non-contact suction disk in a non-contact transfer device. It is a figure which shows the other structural example of the non-contact transfer apparatus. It is a figure which shows the non-contact suction disk in the non-contact transfer apparatus of the 5th Embodiment of this invention, and its arrangement. It is a schematic cross-sectional view explaining the structure of the non-contact suction disk of 5th Embodiment. It is a figure which shows the modification of the non-contact suction disk in the non-contact transfer apparatus of 5th Embodiment of this invention. It is a figure which shows the other modification of the non-contact suction disk in the non-contact transfer apparatus of 5th Embodiment of this invention. It is a figure which shows the other modification of the non-contact suction disk in the non-contact transfer apparatus of 5th Embodiment of this invention. It is a figure which shows the other modification of the non-contact suction disk in the non-contact transfer apparatus of 5th Embodiment of this invention. It is a top view which shows the other non-contact suction disk of this invention. It is a top view which shows the other non-contact suction disk of this invention.

Hereinafter, the configuration of the non-contact suction plate used in the non-contact transfer device according to the preferred embodiment of the present invention will be described. FIG. 1 is an exploded perspective view of a non-contact suction plate used in the non-contact transfer device according to a preferred embodiment of the present invention, and FIG. 2 is a suction fixing (non-contact) of a work W by the non-contact suction plate of FIG. It is a schematic cross-sectional view for demonstrating the state of adsorption).

The non-contact suction plate used in a preferred embodiment of the present invention has a basic configuration similar to that of the non-contact suction plate described in International Publication WO2013 / 129599, and has a semiconductor wafer, a glass base material for FPD, and the like. It is suitable for non-contact suction of thin plate-shaped workpieces, particularly thin plate-shaped workpieces having a thickness of about 0.3 to 0.4 mm, such as glass plates for liquid crystal displays. It is also suitable for non-contact adsorption of extremely thin workpieces such as a glass plate having a thickness of about 0.1 mm and a film having a thickness of 0.05 mm.

As shown in FIG. 1, the non-contact suction plate 1 holds a rectangular porous pad 2 having a non-contact suction region of the work on the surface and the porous pad 2 from the lower side (back side). It includes a rectangular pad holder 4 and a rectangular base 6 connected to the back side of the holder 4.

The porous pad 2 is made of breathable porous carbon. The material of the porous pad 2 is not limited to the breathable porous carbon, and other breathable porous materials such as porous SiC and porous alumina can also be used.
The permeation amount of the ^{porous pad 2 is preferably about 0.4 to 2} Nml / min / mm 2 (when the thickness of the porous pad 2 is 5 mm and the pressure is 0.1 MPa).

A plurality of suction holes 8 are formed in the porous pad 2. As shown in FIG. 1, the suction holes 8 are arranged in a state (square grid pattern) arranged in the center of the grid over substantially the entire surface of the porous pad 2. In the present embodiment, the distance between the suction holes 8 is set to about 25 mm.

The suction hole 8 is formed so as to extend through each of the porous pads 2 in the thickness direction. In the present embodiment, the suction hole 8 has a small diameter portion 8a having a diameter of about 0.6 mm on the front surface side of the porous pad 2, and a large diameter portion having a diameter of about 4 mm on the back surface side of the porous pad 2. The small diameter portion 8a and the large diameter portion 8b are connected by a tapered portion that tapers toward the surface of the porous pad 2.

With such a configuration, when the large-diameter portion 8b of the suction hole 8 is sucked under reduced pressure, air is sucked from the small-diameter portion 8a of the suction hole 8 opened on the surface side of the porous pad, and the suction hole 8 is formed. The surface region of the porous pad 2 is a non-contact suction fixing region for performing non-contact suction fixing of the work.

As described above, the pad holder 4 is a rectangular member that holds the porous pad 2 from the lower side (back side), and is made of a metal material such as an aluminum alloy, for example. The pad holder 4 may be formed of a resin such as CFRP / PEEK.

On the upper surface of the pad holder 4, a wall-shaped rising portion 12 is formed on the outer peripheral edge. The rising portion 12 is configured such that the inner dimension is slightly larger than the outer dimension of the porous pad 2 and the height is slightly lower than the thickness of the porous pad 2.

Therefore, when the porous pad 2 is arranged in the space (recess) inside the rising portion 12 of the pad holder 4, the upper surface 2a of the porous pad 2 is slightly larger than the top surface of the rising portion 12 of the pad holder 4. It will be in a state of being placed above.
The present invention may have a configuration that does not include the rising portion 12.

Further, in the inner region of the upper surface (bottom surface of the recess) of the pad holder 4, a groove (pressurized gas flow path) 14 having a rectangular cross section is formed in a grid pattern (a grid pattern), and the portion is separated by the groove 14. Is an island-shaped protrusion 16 having a substantially square cross section arranged in a square grid pattern. The island-shaped protrusions 16 form a grid-like structure together with the grooves 14 arranged in a grid pattern (grid-like pattern). The top surface of each protrusion 16 is flat, and a communication hole 18 that penetrates the pad holder 4 in the thickness direction is opened in the center.
The pressurized gas flow path formed by the groove 14 communicates integrally and functions as one flow path as a whole.
Further, in the present invention, the aspect of the lattice is not limited to the square lattice of the above example. Further, the cross-sectional shape of the island-shaped protrusion is not limited to a substantially square shape such as the protrusion 16, and may be another rectangle, triangle, polygon, circle, or the like.

The porous pad 2 and the pad holder 4 are joined and fixed by an adhesive or the like in a state where the porous pad 2 is arranged in the space inside the rising portion 12 of the pad holder 4. In the configuration without the rising portion 12, the porous pad 2 and the pad holder 4 are joined and fixed by an adhesive or the like in a laminated state.

When the porous pad 2 is arranged in the space inside the rising portion 12 of the pad holder 4, the protruding portion 16 has a top surface of the open end of the large diameter portion 8b of the suction hole 8 on the back surface of the porous pad 2. It is configured to contact the surrounding area in an airtight state.

As a result, when the porous pad 2 is fixed to the space inside the rising portion 12 of the pad holder 4 with an adhesive, it is arranged in a grid pattern between the back surface of the porous pad 2 and the upper surface of the pad holder 4. A closed space (pressurized gas flow path) separated by a groove 14 and a porous pad 2 covering the groove 14 is formed.

The communication hole 18 has substantially the same diameter as the large diameter portion 8b of the suction hole 8 of the porous pad 2, and the porous pad 2 is housed at a predetermined position in the space inside the rising portion 12 of the pad holder 4. At that time, it is configured to be aligned with each suction hole 8 formed in the porous pad 2 in the thickness direction.

As a result, when the porous pad 2 is accommodated in the space inside the rising portion 12 of the pad holder 4, the suction hole 8 of the porous pad 2 and the communication hole 18 of the pad holder 4 communicate with each other by fluid.

The pad holder 4 is formed with a pressurized air inlet 20 for communicating the entire pressurized gas flow path formed by the groove 14 with the external space and introducing pressurized air into the pressurized gas flow path. ing.

With such a configuration, when the pressurized air is introduced from the pressurized air inlet 20 in a state where the porous pad 2 is accommodated in the space inside the rising portion 12 of the pad holder 4 and fixed by adhesion, the introduced pressurization is performed. Air is supplied to the entire pressurized gas flow path, and the pressurized air penetrates into the pores of the porous pad 2 constituting the upper surface of the pressurized gas flow path, permeates the porous pad 2, and is further porous. It will be ejected from the entire surface of the quality pad 2.

At this time, the surface portion of the porous pad 2 in which the grid-like groove 14 (pressurized gas flow path) is arranged below is larger than the portion in which the groove 14 (pressurized gas flow path) is not arranged below. Amount of pressurized air or high pressure pressurized air is ejected.

The base 6 is a rectangular member connected to the back side of the holder 4, and is made of a metal material such as an aluminum alloy, for example. The base 6 can also be formed of a resin such as CFRP / PEEK.

As shown in FIG. 1, the base 6 has substantially the same dimensions as the pad holder 4, and the base grooves 22 having a rectangular cross section are formed in a grid pattern on a flat upper surface. Therefore, when the flat back surface of the pad holder 4 and the upper surface of the base 6 are joined, a grid-like closed space is formed by the grid-like base groove 22 and the back surface of the pad holder 4 covering the grid-like base groove 22. Become.

The base groove 22 is arranged so that when the pad holder 4 and the base 6 are joined, the intersections of the grid-like base grooves 22 are aligned with the communication holes 18 formed in the pad holder 4 in the thickness direction. ..

With such a configuration, when the porous pad 2, the pad holder 4, and the base 6 are connected, the suction hole 8 of the porous pad 2 passes through the communication hole 18 of the pad holder 4, and the base 6 and the pad holder are connected. It communicates with the intersection of the grid-like closed spaces formed between 4.

Further, a vacuum hole 24, which is a through hole for communicating the base groove 22 with the vacuum source outside the base 6, is formed on the outer periphery of the base 6.

With such a configuration, when vacuum suction is performed from the vacuum hole 24 in a state where the porous pad 2 is connected to the pad holder 4 and the base 6, the porous pad 2 is connected to the porous pad 2 through the communication hole 18 of the pad holder 4. Suction is performed from each suction hole 8, and the work on the porous pad 2 can be sucked toward the porous pad 2.
Since each suction hole 8 communicates with the lattice-shaped closed space, the suction state of each suction hole is the same.

The pad holder 4 and the base 6 are connected by a connecting tool such as a screw or a bolt. A groove is formed along the outer circumference of the upper surface of the base 6, and an O-ring is arranged in the groove so that the grid-like base groove 22 of the base 6 is closed, and the pad holder 4 and the base 6 are closed. Can be concatenated with. Further, the pad holder 4 and the base 6 may be connected by an adhesive.

At the time of use, the non-contact suction plate having such a configuration allows pressurized air to flow from the pressurized air inlet 20 to the groove 14 and the porous pad 2 in a state where the porous pad 2, the pad holder 4 and the base 6 are connected. By introducing the work into the pressurized gas flow path formed by the above and performing vacuum suction from the vacuum hole of the base 6, non-contact suction of the work to be sucked while the work is floated on the porous pad 2 is performed. Can be done.

Next, the non-contact adsorption will be described in detail with reference to FIG.

As described above, when the pressurized air is introduced from the compressed air source formed by the groove 14 of the pad holder 4 and the porous pad 2 and outside the pressurized gas flow path during use, the pressurized air becomes porous. It penetrates into the porous pad 2 through the pores of the pad 2 and ejects from the surface 2a of the porous pad 2 as shown by an arrow P in FIG. The work W floats from the surface (adsorption surface) 2a of the pad 2 by the pressurized air ejected as shown by the arrow P in FIG.

On the other hand, the work W floating on the surface (adsorption surface) of the pad due to the vacuum suction from the vacuum hole 24 of the base 6 performed at the same time as the introduction of the pressurized air is moved from each suction hole 8 of the porous pad 2. , As shown by the arrow V. As a result, the work W is non-contact suction-fixed at a position separated by a predetermined distance G upward from the suction surface 2a in which the buoyancy force of the pressurized air and the suction force of the vacuum suction are balanced.

The distance between the suction holes 8 can be appropriately changed, for example, in the range of 25 to 8 mm. The narrower the interval, the better the adsorption accuracy. For example, if the interval is changed from 20 mm to 12 mm, the accuracy becomes 1.5 times.

Further, the diameter of the small diameter portion 8a of the suction hole 8 can be appropriately changed in the range of, for example, 0.8 to 0.1 mm. The smaller the diameter, the better the adsorption accuracy. For example, changing the diameter from 0.6 mm to 0.3 mm increases the accuracy by 1.5 times.

Further, the width of the groove (pressurized gas flow path) 14 having a rectangular cross section can be appropriately changed in the range of, for example, 8.0 to 1.0 mm. The smaller the width, the better the suction accuracy. For example, if the width is changed from 4.0 mm to 2.0 mm, the accuracy becomes 1.5 times.

By changing the distance between the suction holes 8, the diameter of the small diameter portion 8a of the suction holes 8, and the width of the pressurized gas flow path 14 to the above-mentioned small values, the suction and holding of glass (work) having a thickness of 0.1 mm can be maintained. The variation of the predetermined distance G at that time was reduced to about 1/3 to 1/4, and the adsorption accuracy was improved. Further, in the film having a thickness of 0.05 mm, the variation of the predetermined distance G when adsorbed and held was about 1/4 to 1/5.

When the non-contact transfer device of the present invention is configured by using the non-contact suction plate having such a configuration, a robot hand or the like for moving the floated work W along the suction surface 2a is added.

Next, a non-contact transfer device according to a preferred embodiment of the present invention will be described.
In the non-contact transfer device of the present invention, a transfer path is formed by arranging non-contact suction machines having a basic configuration such as the non-contact suction board 1 in the work transfer direction, and a thin plate-shaped work is formed on the transfer path. The work is floated and sucked, and the work is transported along the transport path by a transport means such as a robot hand.

FIG. 3 is a drawing showing the arrangement of the non-contact suction plate in the non-contact transfer device 30 according to the first embodiment of the present invention. The direction indicated by the arrow A in FIG. 3 is the work transfer direction.
In the non-contact transfer device 30 of the first embodiment shown in FIG. 3, the first non-contact suction plate 32 on the upstream side in the transfer direction and the second non-contact suction plate 34 on the downstream side in the transfer direction are in the transfer direction. They are arranged in contact with each other.

The first and second non-contact suction discs 32 and 34 have the same configuration as the non-contact suction disc 1 described above, and the uppermost porous pad 2 is formed with suction holes 8 in a square lattice pattern. .. Further, as shown by a dotted line on the porous pad 2 (hereinafter, the same applies to the drawings of other embodiments), a grid-like pressurized gas flow path 14 is formed in the pad holder below the porous pad 2. There is.

In the present embodiment, the pressurized gas flow path 14 of the first and second non-contact suction plates 32 and 34 is a contact portion (connection region) in which the first and second non-contact suction plates 32 and 34 are in contact with each other. In the end width direction flow path arranged so that the first and second non-contact suction plates 32, 34 extend along the sides facing each other (that is, in the width direction which is the direction orthogonal to the transport direction). It ends at 36.

Further, in each of the first and second non-contact suction plates 32 and 34, the distance d1 between the suction holes 8 and 8 provided on the side closest to the contact portion is the first and second non-contact suction. The distance between the suction holes on the boards 32 and 34 is set longer than d2.

According to such a configuration, the distance between the suction holes 8 at the connection portion of the first and second non-contact suction plates 32 and 34 is larger than the distance between the other parts, and further, a grid-like pressurization is performed. Since the gas flow path 14 is terminated by an end flow path 36 arranged so as to extend in the width direction, when transferring from the first non-contact transfer device 32 to the second non-contact transfer device 34, the work, In particular, the tip of the work will rise significantly.

FIG. 4 is a drawing showing the arrangement of the non-contact suction plates 32'and 34'in the non-contact transfer device 30'of the modified example of the first embodiment. Also in FIG. 4, the direction indicated by the arrow A is the work transfer direction.

In the non-contact transfer device 30'shown in FIG. 4, the first non-contact suction plate 32'on the upstream side in the transfer direction and the second non-contact suction plate 34'on the downstream side in the transfer direction are arranged along the transfer direction. It has the same configuration as the non-contact transfer device 30 except that the devices are arranged apart by a predetermined distance.
In the present specification, the state of being arranged at a predetermined distance in the transport direction is also included in the “connection”.

Even in such a configuration, when the first non-contact transfer device 32'is transferred to the second non-contact transfer device 34', the work, particularly the tip of the work, is greatly raised. Therefore, it is effective in a configuration in which a device such as a sensor is arranged in a gap or below the gap at the boundary between the first non-contact transfer device 32'and the second non-contact transfer device 34'.

FIG. 5 is a drawing showing the arrangement of the non-contact suction plate 40 in the non-contact transfer device according to the second embodiment of the present invention. The direction indicated by the arrow A in FIG. 5 is the work transfer direction.
In the non-contact transfer device 40 of the second embodiment shown in FIG. 5, the first non-contact suction plate 42 on the upstream side in the transfer direction and the second non-contact suction plate 44 on the downstream side in the transfer direction are in the transfer direction. They are arranged in contact with each other.

The first and second non-contact suction discs 42 and 44 have the same configuration as the non-contact suction disc 1 described above, and the uppermost porous pad 2 is formed with suction holes 8 in a square lattice pattern. .. Further, as shown by a dotted line on the porous pad 2, a grid-like pressurized gas flow path 14 is formed in the pad holder below the porous pad 2.

In the present embodiment, the pressurized gas flow path 14 of the first and second non-contact suction plates 42 and 44 is a contact portion (connection region) in which the first and second non-contact suction plates 42 and 44 are in contact with each other. Is terminated by an end width direction flow path 46 arranged so as to extend in the width direction.

Further, in the present embodiment, the width of the end flow path 46 is set to about 4 mm, which is narrower than the other parts of the pressurized gas flow path 14.

FIG. 6 is a drawing showing the arrangement of the non-contact suction plates 42'and 44'in the non-contact transfer device 40'of the modified example of the second embodiment. Also in FIG. 6, the direction indicated by the arrow A is the work transfer direction.

In the non-contact transfer device 40'shown in FIG. 6, the first non-contact suction plate 42'on the upstream side in the transfer direction and the second non-contact suction plate 44'on the downstream side in the transfer direction are arranged along the transfer direction. It has the same configuration as the non-contact transfer device 40 except that the devices are arranged apart by a predetermined distance.

According to such a configuration, when transferring from the first non-contact suction plate 42'to the second non-contact suction plate 44', the tip of the work is pushed upward, and then the first and second contacts are used. Since it is urged downward by its own weight in the gap formed between the non-contact suction plates 42'and 44', it is possible to transfer to the second non-contact suction plate 44' while maintaining the height position. ..

FIG. 7 is a drawing showing the arrangement of the non-contact suction plate 50 in the non-contact transfer device according to the third embodiment of the present invention. The direction indicated by the arrow A in FIG. 7 is the work transfer direction.
In the non-contact transfer device 50 of the third embodiment shown in FIG. 7, the first non-contact suction plate 52 on the upstream side in the transfer direction and the second non-contact suction plate 54 on the downstream side in the transfer direction are in the transfer direction. They are arranged in contact with each other.

The first and second non-contact suction discs 52 and 54 have the same configuration as the non-contact suction disc 1 described above, and the uppermost porous pad 2 is formed with suction holes 8 in a square lattice pattern. .. Further, as shown by a dotted line on the porous pad 2, a grid-like pressurized gas flow path 14 is formed in the pad holder below the porous pad 2.

In the present embodiment, the grid-like pressurized gas flow path of the holder of the first non-contact adsorption plate 52 on the upstream side in the transport direction is a contact portion where the first and second non-contact adsorption plates 52 and 54 are in contact with each other. In the (connection area), it is terminated by an end width direction flow path 56 arranged so as to extend in the width direction.

Further, the grid-like pressurized gas flow path of the holder of the second non-contact adsorption plate 54 on the downstream side in the transport direction is a contact portion (connection region) in which the first and second non-contact adsorption plates 52 and 54 are in contact with each other. ), It is terminated by an end transport direction flow path 58 extending in the transport direction.

Further, in the first and second non-contact suction plates 52 and 54, when they are contact-arranged in the state of FIG. 7, they are closest to the contact portion in each of the first and second non-contact suction plates 52 and 54. The distance d3 between the suction holes 8 and 8 provided on the side is set to be equal to the distance between the adjacent suction holes in the first and second non-contact suction plates 52 and 54.

According to such a configuration, the suction holes 8 are provided at substantially equal pitches from the first non-contact suction plate 52 to the second non-contact suction plate 54, and the suction holes 8 and the pressurized gas in the width direction are provided. Since the flow paths are arranged alternately, the work can be transferred from the first non-contact suction plate 52 to the second non-contact suction plate 54 while maintaining the height position.

FIG. 8 is a drawing showing the arrangement of the non-contact suction plates 52'and 54'in the non-contact transfer device 50'of the modified example of the third embodiment. Also in FIG. 7, the direction indicated by the arrow A is the work transfer direction.

In the non-contact transfer device 50'shown in FIG. 8, the first non-contact suction board 52'and the second non-contact suction board 54'are arranged so as to be separated by a predetermined distance along the transfer direction. It has the same configuration as the non-contact transfer device 50 shown in FIG.

FIG. 9 is a drawing showing the arrangement of the non-contact suction plates 62 and 640 in the non-contact transfer device 60 according to the fourth embodiment of the present invention. The direction indicated by the arrow A in FIG. 9 is the work transfer direction.
In the non-contact transfer device 60 of the fourth embodiment shown in FIG. 9, the first non-contact suction plate 62 and the second non-contact suction plate 64 are arranged in contact with each other along the transfer direction. ..

The first and second non-contact suction discs 62 and 64 have the same configuration as the non-contact suction disc 1 described above, and the uppermost porous pad 2 is formed with suction holes 8 in a square lattice pattern. .. Further, as shown by a dotted line on the porous pad 2, a grid-like pressurized gas flow path 14 is formed in the pad holder below the porous pad 2.

In the present embodiment, in the first and second non-contact suction plates 62 and 64, the suction hole and the pressurized gas passage in the width direction are on one side in the width direction (that is, the direction orthogonal to the transport direction) (FIG. The lower side of 9 and the other side (upper side of FIG. 9) are arranged with a half pitch deviation in the transport direction.

Then, in the present embodiment, the grid-like pressurized gas flow path of the holder of the first non-contact suction plate 62 has an end width extending in the width direction on one side in the width direction (lower side in FIG. 9). It is terminated by the directional flow path 66, and on the other side in the width direction (upper side of FIG. 9), it is terminated by the end transport direction flow path 68 extending in the transport direction.

That is, in the present embodiment, the grid-like pressurized gas flow path of the holder of the first non-contact suction plate 62 is terminated at a closed rectangular portion on one side in the width direction (lower side in FIG. 9). On the other side in the width direction (upper side in FIG. 9), it is terminated by a rectangular portion that opens toward the downstream side in the transport direction.

As a result, in the first non-contact suction plate 62, the pressurized gas flow paths are arranged in a staggered manner.

Further, in the present embodiment, the grid-like pressurized gas flow path of the holder of the second non-contact suction plate 64 extends at the end in the transport direction on one side in the width direction (lower side in FIG. 9). It is terminated by the directional flow path 68, and on the other side in the width direction (upper side of FIG. 9), it is terminated by the end width direction flow path 66 extending in the width direction.

That is, in the present embodiment, the grid-like pressurized gas flow path of the holder of the second non-contact suction plate 64 is terminated at a closed rectangular portion on one side in the width direction (upper side of FIG. 9). On the other side in the width direction (lower side in FIG. 9), the end is a rectangular portion that opens toward the upstream side in the transport direction.

As a result, even in the second non-contact suction plate 64, the pressurized gas flow paths are arranged in a staggered pattern.

Further, in the present embodiment, as shown in FIG. 9, the first non-contact suction plate 62 and the second non-contact suction plate 64 have a pressurized gas flow path arranged in a staggered pattern. They are arranged so that they are in a relatively contradictory arrangement.

That is, the closed rectangular portion of the pressurized gas flow path of the first non-contact adsorption board 62 on the upstream side is on the upstream side of the pressurized gas flow path of the second non-contact adsorption board 64 on the downstream side in the transport direction. It is arranged so as to be aligned along the transport direction in the rectangular portion that is open toward the end. Then, the rectangular portion opened toward the downstream side in the transport direction of the pressurized gas flow path of the first non-contact adsorption board 62 on the upstream side is the pressurized gas flow path of the second non-contact adsorption board 64 on the downstream side. It is arranged so as to be aligned along the transport direction in the closed rectangular portion of the.

According to such a configuration, the suction holes and the pressurized gas flow path in the width direction are arranged at equal pitches at the connection portions of the first and second non-contact suction plates 62 and 64, so that the work can be made. It is possible to transfer from the first non-contact suction plate 62 to the second non-contact suction plate 64 while maintaining the height position.

FIG. 10 is a drawing showing the arrangement of the non-contact suction plates 62'and 64'in the non-contact transfer device 60'of the modified example of the fourth embodiment. Also in FIG. 10, the direction indicated by the arrow A is the work transfer direction.

In the non-contact transfer device 60'shown in FIG. 10, the first non-contact suction plate 62'on the upstream side in the transfer direction and the second non-contact suction plate 64'on the downstream side in the transfer direction are arranged along the transfer direction. It has the same configuration as the non-contact transfer device 60, except that the devices are arranged apart by a predetermined distance.

Even in such a configuration, the suction holes and the pressurized gas flow path in the width direction can be arranged at equal pitches at the connection portions of the first and second non-contact suction plates 62'and 64'. As a result, the work can be transferred from the first non-contact suction plate 62'to the second non-contact suction plate 64' while maintaining the height position.

11 and 12 are drawings showing other arrangement examples of the non-contact suction plate in the non-contact transfer device.

In the non-contact transfer device 70 of FIG. 11, the non-contact suction plates are oriented so that the long sides are aligned with the transfer direction of the work, and are arranged in 8 rows and 2 columns. In this configuration, the rows of the non-contact suction plates are separated from each other, and the relationship between the pressurized gas flow paths in the transport direction is the same as that in the aspect of FIG.

In the non-contact transfer device 80 of FIG. 12, the non-contact suction plates are oriented so that the short sides are aligned with the transfer direction of the work, and are arranged in 2 rows and 4 columns. In this configuration, the rows of the non-contact suction plates are separated from each other, and the arrangement of the pressurized gas flow paths is the same as that of the aspect of FIG.

The non-contact transfer devices 70 and 80 shown in FIGS. 11 and 12 include a plurality of levitation devices 90 arranged upstream and downstream of the non-contact suction plate. The levitation device 90 is, for example, a type in which a work is levitated by pressurized air ejected from a porous plate.

In the non-contact transfer devices 70 and 80, the non-contact suction plates are arranged in a predetermined state by being connected and fixed in a raft shape on a plurality of bars or fixed on a large substrate.

In these non-contact transfer devices 70 and 80, the other non-contact suction plates arranged in contact with each other in the width direction side of a certain non-contact suction plate are side edges located on the side of a certain non-contact suction plate. In the lateral contact region), the pressurized gas flow path is terminated by a groove (width direction groove) extending in a direction (W direction) orthogonal to the longitudinal direction of the non-contact adsorption plate. This configuration will be described by taking FIG. 13 as an example.

The configuration shown in FIG. 13 is for the first and second additional non-contact suctions on the sides of the non-contact suction plates 62'and 64' constituting the non-contact transfer device 60'of FIG. 10, respectively. The boards 62 "and 64" are arranged in contact with each other.

In the first additional non-contact suction plates 62 ", 64" arranged in contact with the non-contact suction plates 62', 64', in the contact region on one side, that is, the contact region with the non-contact suction plates 62', 64'. , The pressurized fluid groove (pressurized gas flow path) 14 is terminated by a groove (width direction groove) 66 "extending in a direction (W direction) orthogonal to the transport direction.
Further, in the contact region on the other side of the first additional non-contact suction plates 62 ", 64", that is, in the contact region with the second additional non-contact suction plates 62 ", 64", the pressurized fluid groove (pressurization). The gas flow path) 14 is terminated by a groove 68 ”extending in the transport direction.

Further, in the second additional non-contact suction discs 62 ", 64" which are contact-arranged on the other side of the first additional non-contact suction discs 62 ", 64", the contact region on one side, that is, the first In the contact region with the additional non-contact suction plates 62 ", 64", the pressurized fluid groove (pressurized gas flow path) 14 extends in the direction (W direction) orthogonal to the transport direction (width direction groove) 66. It ends with ".
Further, on the other side of the second additional non-contact suction plates 62 ", 64", the pressurized fluid groove 14 is terminated by a groove 68 "extending in the transport direction.

In this configuration, the width direction (W direction) spacing d4 of the suction holes 8 between adjacent non-contact suction discs is substantially equal to the width direction (W direction) spacing d5 of the suction holes 8 in the same non-contact suction disc. Is set to.

That is, the suction holes 8 on the side of the first additional non-contact suction plate 62'of the non-contact suction plate 62'and the first additional non-contact suction plate 62'arranged in contact with the non-contact suction plate 62'. The width direction (W direction) distance d4 between the suction holes 8 on the non-contact suction plate 62'side is the width direction (W direction) distance d5 between the suction holes 8 in each non-contact suction plate 62'62 ". It is configured to be approximately equal to.

Further, the d4 and d5 that are equal to each other are configured to be equal to the longitudinal distance d6 of the adjacent suction holes 8 in the non-contact suction plate.

Next, the non-contact transfer device 90 according to the fifth embodiment of the present invention will be described.
FIG. 14 is a drawing showing the arrangement of the non-contact suction plates 92 and 94 in the non-contact transfer device 90 according to the fifth embodiment of the present invention. The direction indicated by the arrow A in FIG. 14 is the work transfer direction.
In the non-contact transfer device 90 of the fifth embodiment shown in FIG. 14, the first non-contact suction board 92 and the second non-contact suction board 94 are separated by a predetermined distance along the transfer direction. It is arranged.

The first and second non-contact suction discs 92 and 94 have the same basic configuration as the non-contact suction disc 1 described above. In the pad holder 4 below the porous pad 2, a grid-like pressurized gas flow path 14 is formed on the porous pad 2 as shown by a dotted line. Further, the first and second non-contact suction discs 92 and 94 include a plurality of suction holes 8 formed in the porous pad, similarly to the non-contact suction disc 1 described above.

The difference from the non-contact suction board 1 described above is that the first and second non-contact suction boards 92 and 94 are added to the pressurized gas flow path 14 and are separated from the pressurized gas flow path 14. It is provided with a pressure gas flow path 96 and an independent suction hole 98 that is in a suction state different from that of the suction hole 8.
This point will be described in detail below.

As described above, in the first and second non-contact adsorption plates 92 and 94 used in the non-contact transfer device of the fifth embodiment, the independent pressurized gas flow path 96 is the other non-contact adsorption plate 94, At the edge on the side connected to 92, it is formed so as to extend orthogonally to the transport direction A. Specifically, in the first and second non-contact suction plates 92, 94, each independent pressurized gas flow path 96 is a pressurized gas flow path 14 in the connection region with the other non-contact suction plates 94, 92. It is provided on the end (tip) side of the end of the.

As shown in FIG. 15, each independent pressurized gas flow path 96 is formed in the pad holder 4 so as to be separated from the groove 14, that is, not to communicate with the pressurized gas flow path 14. (In FIG. 15, for the non-contact suction plate 92, other configurations are omitted in order to clearly show the independent air supply groove 96). As a result, the independent pressurized gas flow path 96 can be supplied with a pressurized fluid having a flow rate and pressure different from that of the pressurized gas flow path 14.

Further, in the first and second non-contact suction plates 92 and 94 used in the non-contact transfer device of the fifth embodiment, the intake holes arranged on the side connected to the other non-contact suction plates 94 and 92. However, it is configured as an independent suction hole 98 that is in a suction state different from that of the other suction holes 8. Specifically, in the first and second non-contact suction plates 92, 94, the suction holes located on the most other non-contact suction plates 94, 92 side (tip side) are configured as independent suction holes 98. ..

As shown in FIG. 15, each independent suction hole 98 communicates with a suction groove 100 different from the base 22 of the base 6 with which each suction hole 8 communicates. (In FIG. 15, for the non-contact suction plate 94, other configurations are omitted in order to clearly show the independent suction hole 98 and the suction groove 100). As a result, the independent suction hole 98 can be in a different suction state from the other suction holes 8.

According to such a configuration, in the connection region of the two non-contact suction plates 92 and 94 arranged in series in the transport direction, it is possible to realize a suction state different from the other regions. Therefore, by appropriately adjusting the pressurized gas supply state to the pressurized gas flow path 14 and the independent pressurized gas flow path 96, and the suction state from the suction hole 8 and the independent suction hole 98, the two sheets are not in contact with each other. It is possible to smoothly transfer the thin plate-shaped work between the suction plates 92 and 94.

In the non-contact adsorption plates 92 and 94 used in the non-contact transfer device of the fifth embodiment, the edge of the side where the independent pressurized gas flow path 96 is connected to the other non-contact adsorption plates 94 and 92. Was formed so as to extend perpendicular to the transport direction A. However, the configuration of the independent pressurized gas flow path 96 of the non-contact suction plate used in the non-contact transfer device of the present invention is not limited to this.

For example, as shown in FIG. 16, a configuration in which an independent pressurized gas flow path 102 is provided so as to extend over the entire peripheral edge of the non-contact adsorption plate, and a non-contact adsorption plate as shown in FIG. The independent pressurized gas flow path 104 may be provided so as to extend along both side edges of the.
In the configuration of FIG. 17, the buoyancy at both side edges of the work can be controlled independently. Therefore, by making the buoyancy of both side edges of the work relatively small or large, the work can be made convex or concave in the direction orthogonal to the transport direction, and can be sucked and held in a non-contact state.

Further, as shown in FIG. 18, a configuration in which an independent pressurized gas flow path 106 is provided so as to extend in the longitudinal direction at the center in the width direction of the non-contact adsorption plate, as shown in FIG. A rectangular independent pressurized gas flow path 108 may be provided in the center of the tip side region of the non-contact suction plate in the width direction.

In the configuration of FIG. 18, the buoyancy at the center of the work in the width direction can be controlled independently. Therefore, by making the buoyancy in the central portion of the work in the width direction relatively large or small, the work can be made convex or concave in the direction orthogonal to the transport direction and can be sucked and held in a non-contact state.

Further, by combining the configuration shown in FIG. 17 and the configuration shown in FIG. 18, an independent pressurized gas flow path extending along both side edges of the non-contact adsorption plate and an independent pressurized gas flow extending in the center in the width direction in the longitudinal direction. A non-contact suction plate provided with a road may be used.

Similar to the independent pressurized gas flow path 100, these independent pressurized gas flow paths 102, 104, 106, and 108 are also separated from the groove 14 in the pad holder 4, that is, they do not communicate with the pressurized gas flow path 14. It is composed of independent air supply grooves formed in a state.

Further, in the embodiment shown in FIGS. 16 to 19, it is preferable that the suction holes arranged around the independent pressurized gas flow path are the independent suction holes.

According to such a configuration, in the region where the independent pressurized gas flow path and the independent suction hole are formed, it is possible to realize a suction state different from other regions.

The non-contact suction plate used in each of the above-described embodiments of the present invention and its modified non-contact transfer device can be used alone as a non-contact suction plate for holding a work in a non-contact state. be.

Next, the non-contact suction plate of another aspect of the present invention will be described.
FIG. 20 is a schematic plan view showing the non-contact suction plate 120 of another aspect of the present invention. The non-contact suction plate 120 shown in FIG. 20 has a circular outer shape, but has the same basic configuration as the non-contact suction plate 1, and includes a porous pad 122, a pad holder, and a base 6. There is. The non-contact suction plate 120 also non-contactly adsorbs a thin plate-shaped work like the above-mentioned non-contact suction plate 1, but is used alone as a thin plate-shaped work suction holding device.

Also in the non-contact suction plate 120, the porous pad 122 is formed with a suction hole 124 similar to the suction hole 8 of the non-contact suction plate 1. Further, a pressurized gas flow path 126 similar to the pressurized gas flow path 14 of the non-contact suction plate 1 is provided. In the non-contact suction plate 120, the pressurized gas flow path 126 is integrally composed of an annular and radial portions as shown by a dotted line on the porous pad.

In the non-contact suction plate 120, an annular independent pressurized gas flow path 128 separated from the pressurized gas flow path 126 is provided on the peripheral edge of the pad holder. Like the independent pressurized gas flow path 96 of the fifth embodiment, the independent pressurized gas flow path 128 does not communicate with the pressurized gas flow path 126, but with the pressurized gas supplied to the pressurized gas flow path 126. Is configured to be able to supply pressurized gases with different flow rates, pressures, etc.

As a result, when the non-contact suction plate 120 sucks and holds the circular work, the work is sucked and held in a convex or concave shape by relatively strengthening or weakening the suction only at the outer edge of the work. Things can be done.

In the non-contact suction plate 120, the suction holes 124 are all in the same suction state, but a part of the suction holes may be an independent suction hole as in the fifth embodiment.

FIG. 21 is a drawing showing a non-contact suction plate 130 as a modification of the non-contact suction plate 120 of the other aspect of the present invention.
The non-contact suction plate 130 shown in FIG. 21 has a diameter of the pressurized gas flow path 126 integrally configured in the non-contact suction plate 120 with the first pressurized gas flow path 132 at the center. It differs from the non-contact suction plate 120 in that it is separated into a second pressurized gas flow path 134 in the middle portion in the direction, and pressurized gas having a different flow rate and pressure can be supplied to each.
That is, in the non-contact suction plate 120, the first pressurized gas flow path 132 in the central portion, the second pressurized gas flow path 134 in the radial intermediate portion, and the independent pressurized gas flow in the radial outer portion. The three pressurized gas flow paths of the path 128 are independently provided.

Further, as for the suction holes, the first suction hole 136 in the central portion, the second suction hole 138 in the radial intermediate portion, and the third suction hole 140 in the radial outer portion are respectively in an independent suction state. It is configured as follows.

According to such a configuration, the suction holding state of the work can be optimized by appropriately adjusting the pressurized gas supply state to each pressurized gas flow path and the suction state from each suction hole.

Not limited to the above-described embodiment of the present invention, various modifications and modifications can be made within the scope of the technical idea described in the claims.

In the above embodiment, pressurized air was used as the pressurized fluid, but instead of the pressurized air, another pressurized fluid such as water, oil, nitrogen gas, argon gas or the like was used. Is also good.

1: Non-contact adsorption board 8: Suction hole 14: Pressurized gas flow path 30: Non-contact transfer device 32: First non-contact suction board 34: Second non-contact suction board 36: End width direction flow path 58 : End transport direction flow path

Claims (5)

A non-contact transport device that sucks and transports thin plate-shaped workpieces in a non-contact state.
The first and second non-contact suction plates arranged along the transport direction are provided.
Each of the first and second non-contact suction plates
A rectangular porous pad in which multiple suction holes extending in the thickness direction are arranged in a staggered pattern, and
It is a rectangular holder connected to the back surface of the porous pad, and has a grid-like pressurized gas flow path on the front surface and a plurality of islands arranged in a staggered pattern separated by the pressurized gas flow path. When a portion is formed, the island-shaped portion is provided corresponding to the suction hole and has a communication hole extending through the island-shaped portion in the thickness direction, and is connected to the porous pad, the island-shaped portion becomes the said. It is provided with a holder whose top surface is in close contact with the back surface of the porous pad in a state where the communication hole communicates with the suction hole of the porous pad.
The lattice-shaped pressurized gas flow path includes a transport direction flow path arranged so as to extend in the transport direction and a width direction flow path arranged so as to extend in a direction orthogonal to the transport direction. The widthwise flow path is a pressurized gas flow path that is arranged with a half pitch deviation in the transport direction in a region adjacent to the transport direction flow path.
The grid-like pressurized gas flow path of the holder of the first non-contact adsorption plate arranged on the upstream side in the transport direction is in the connection region with the second non-contact adsorption plate arranged on the downstream side in the transport direction. , At least a part is terminated by the end width direction flow path,
The grid-like pressurized gas flow paths of the holders of the first and second non-contact suction plates are alternately arranged, and a portion terminating at a rectangular portion closed by the end width direction flow path and the portion described above. A portion terminating at the rectangular portion open in the transport direction is provided in the connection region of the first and second non-contact suction plates.
In the first and second non-contact suction discs, the open rectangular portion of the pressurized gas flow path of one non-contact suction disc is a closed rectangle of the pressurized gas flow path of the other non-contact suction disc. Arranged so that the parts are aligned along the transport direction,
A non-contact transfer device characterized by the fact that. The porous pad has an independent suction hole that is in a suction state different from that of the suction hole.
The non-contact transfer device according to claim 1. The independent suction hole is arranged in the connection region of one non-contact suction plate with the other non-contact suction plate.
The non-contact transfer device according to claim 2. The first and second non-contact suction plates are arranged in contact with each other.
The non-contact transfer device according to any one of claims 1 to 3. The first and second non-contact suction plates are arranged apart from each other.
The non-contact transfer device according to any one of claims 1 to 4.

Images