JP2016033422A - Work-piece levitation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a work-piece levitation device for performing a high precise adjustment of a levitation amount of the work-piece by reducing influence applied between air pressure near upper part of air supply opening and air pressure near upper part of air discharging opening.SOLUTION: This invention relates to a work-piece levitation device 100 for adjusting an amount of gas for levitating a work-piece W through a gas metering mechanism A while being present between a base surface 111 of the work-piece levitating device 100 and the work-piece W. The base surface 111 comprises a plurality of air supply ports 111b for feeding gas between the base surface 111 and the work-piece W, a plurality of air discharging ports 111c for removing gas from between the base surface 111 and the work-piece W, and a groove part 111a arranged among the air supply ports 111b and the air discharging ports 111c.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a work levitating apparatus for levitating a plate-like work such as a glass substrate or a liquid crystal display from a base surface and supporting it in a non-contact manner.

2. Description of the Related Art Conventionally, there is known a workpiece floating device that adjusts the amount of gas that is interposed between a base surface of a workpiece floating device and a workpiece to float the workpiece via a gas throttle mechanism (see, for example, Patent Document 1). .
Here, the work levitation device is used, for example, in an inspection process of a color filter of a liquid crystal glass or a TFT (Thin Film Transistor) array. In the inspection process of the color filter of the liquid crystal glass or the TFT array, a liquid crystal display Measurement and image recognition are performed using a high-precision CCD (Change Coupled Devices) camera with a shallow depth of focus in order to cope with high definition, and the accuracy of the floating amount of the workpiece by the workpiece floating device is required. .

A conventional workpiece levitation apparatus includes a base, an air supply port (floating pad) disposed on the base surface, and an exhaust port (suction pad) disposed on the base surface.
Among these, it was comprised so that a workpiece | work might be floated by giving a floating force to a workpiece | work by sending gas between a base surface and a workpiece | work from an air supply port.
Further, by sucking the gas between the base surface and the workpiece through the other exhaust port, the suction force having a magnitude smaller than the levitation force is applied to the workpiece.
And it was going to improve the precision of the floating level in the non-contact support state of a workpiece | work by cooperation with a floating force and a suction force.

JP 2006-135083 A

  However, since the conventional workpiece levitation apparatus described above has a flat structure on the base surface between the air supply port and the exhaust port on the base surface, the air pressure and the exhaust in the vicinity of the upper side of the air supply port. There is a problem that it is difficult to cope with high-precision adjustment of the flying height of the workpiece because of the large influence on the air pressure near the upper part of the mouth.

  Therefore, the present invention solves the problems of the prior art as described above, that is, the object of the present invention is to provide the air pressure in the vicinity above the air supply port and the air pressure in the vicinity near the exhaust port. An object of the present invention is to provide a workpiece levitation device that reduces the influence and adjusts the gas flow rate with high accuracy by a gas throttle mechanism attached to each of an air supply port and an exhaust port, thereby adjusting the flying height of the workpiece with high accuracy.

The invention according to claim 1 is a work levitation apparatus that adjusts a gas amount of a gas that is interposed between a base surface of the work levitation apparatus and the work and causes the work to float through a gas throttle mechanism.
A plurality of air supply ports through which the base surface sends gas between the base surface and the workpiece; a plurality of exhaust ports for removing gas from between the base surface and the workpiece; and an air supply port on the base surface By having a plurality of grooves disposed between the exhaust ports, the above-described problems are solved.

  In the invention according to claim 2, in addition to the configuration of the workpiece floating device according to claim 1, the groove has a hole through which the gas passes to the atmosphere, and the hole has the base surface. Is provided so as to penetrate to the opposite side, thereby further solving the aforementioned problems.

  In the invention according to claim 3, in addition to the configuration of the workpiece floating device according to claim 2, the groove portion is arranged to intersect on the base surface, and the hole portion is The problem described above is further solved by being disposed at the intersections of the grooves.

  In addition to the configuration of the work levitation device according to any one of claims 1 to 3, the invention according to claim 4 includes a gas throttle mechanism attached to each of the air supply port and the exhaust port. A porous film for reducing the amount of gas, a first flat ventilation member laminated on the porous film, and a second flat ventilation member laminated on the porous film. Therefore, the above-described problems are further solved.

  The invention according to claim 5 further solves the above-described problems by the fact that the porous film is made of polypropylene resin in addition to the configuration of the workpiece floating apparatus described in claim 4.

  In the invention according to claim 6, in addition to the configuration of the workpiece floating apparatus described in claim 4 or claim 5, the first flat plate-shaped ventilation member and the second flat plate-shaped ventilation member are made of a nonwoven fabric. The above-mentioned problem is further solved.

  According to the seventh aspect of the present invention, in addition to the configuration of the workpiece floating apparatus according to any one of the first to sixth aspects, the air supply port and the exhaust port are alternately arranged on the base surface. And the grooves are provided in a lattice shape on the base surface, thereby further solving the above-described problems.

  According to the eighth aspect of the present invention, in addition to the configuration of the workpiece floating apparatus according to any one of the first to seventh aspects, the air supply port and the exhaust port are provided on the base surface. The rows in the predetermined direction composed of the air supply ports and the exhaust ports are alternately displaced by a half pitch with respect to the rows adjacent to the rows, and the grooves are regular on the base surface. By providing the honeycomb shape in which the squares are arranged, the above-described problems are further solved.

  The workpiece floating device of the present invention can not only float the workpiece by adjusting the gas amount of the gas interposed between the base surface of the workpiece floating device and the workpiece through the gas throttle mechanism, The following unique effects can be achieved.

According to the workpiece levitation device of the first aspect of the present invention, the base surface removes the gas from between the plurality of air supply ports for sending gas between the base surface and the workpiece and between the base surface and the workpiece. And a plurality of grooves disposed between the air supply port and the exhaust port on the base surface, so that the air is fed between the base surface and the workpiece in the vicinity of the air supply port. Since at least a part of the generated gas escapes to the groove and at least a part of the gas sucked from between the base surface and the workpiece in the vicinity of the exhaust port becomes a gas from the groove, the air pressure in the vicinity of the upper part of the air supply port It is possible to adjust the flying height of the workpiece with high accuracy by reducing the influence of the air pressure and the pressure in the vicinity of the exhaust port on each other.
In other words, the flying height of the workpiece can be accurately adjusted by making the air pressure in the vicinity of the upper portion of the air supply port and the air pressure in the vicinity of the upper portion of the exhaust port independent.

According to the workpiece floating apparatus of the invention of claim 2, in addition to the effect of the invention of claim 1, the groove portion has a hole portion for allowing gas to pass to the atmosphere, and the hole portion is formed on the base surface. Since the distance to the atmosphere is constant regardless of the position of the hole in the groove, the air pressure in the vicinity of the upper part of the air supply port near the center of the base surface And the atmospheric pressure in the vicinity of the upper side of the exhaust port can be reduced more effectively to reduce the difference between the condition near the center of the base surface and the condition on the end side of the base surface.
Furthermore, when the pressure in the groove is high, the gas escapes from the groove to the hole. On the other hand, when the pressure in the groove is low, the gas enters from the hole to the groove, so that the pressure in the groove can be stabilized.

  According to the workpiece floating device of the invention of claim 3, in addition to the effect of the invention of claim 2, the groove portion is disposed so as to intersect on the base surface, and the hole portion is the groove portion. Since the airflow directed to the intersection of the groove portion does not flow from this intersection to the other groove portion, the air pressure in the groove portion can be stabilized.

  According to the work levitation device of the invention according to claim 4, in addition to the effect exerted by the invention according to any one of claims 1 to 3, the gas throttle attached to each of the air supply port and the exhaust port The mechanism is composed of a porous film for reducing the amount of gas, a first flat plate ventilation member laminated on the porous film, and a second flat plate ventilation member laminated on the porous film. As a result, the variation in the distribution of holes in the porous film is small, so the gas flow rate can be adjusted with high accuracy by the gas throttle mechanism attached to each of the air supply port and the exhaust port. The flying height of the workpiece can be adjusted with high accuracy.

According to the workpiece floating device of the invention of claim 5, in addition to the effect of the invention of claim 4, the porous film is made of polypropylene resin, so that the porous film is made of polypropylene resin. Thus, since the porous film is a chemical product, the variation in physical properties can be reduced as compared with the porous metal member.
Furthermore, since the strength is high and the specific gravity is the smallest among the general-purpose resins, it is possible to supply a lightweight work levitation unit for a work levitation apparatus having excellent durability.

  In addition to the effects of the invention according to claim 4 or claim 5, the invention according to claim 6 has versatility and the fact that the first flat plate-shaped ventilation member and the second flat plate-shaped ventilation member are made of nonwoven fabric. Since it has air permeability and a certain level of strength, the shape of the porous film can be stabilized with a versatile material.

  According to the seventh aspect of the present invention, in addition to the configuration of the workpiece floating apparatus according to any one of the first to sixth aspects, the air supply port and the exhaust port are alternately arranged on the base surface. Since the grooves are provided in a grid pattern on the base surface, the density of the air supply port, the exhaust port, and the groove portion is uniform on the base surface. The flying height of the workpiece can be adjusted accurately and stably.

  In the invention according to claim 8, in addition to the effect of the invention according to any one of claims 1 to 7, the air supply port and the exhaust port are alternately arranged in a predetermined direction on the base surface. The row in the predetermined direction consisting of the air supply port and the exhaust port is shifted by a half pitch with respect to the row adjacent to this row, and the groove portion is provided in a honeycomb shape in which regular hexagons are arranged on the base surface. As a result, the density of the air supply port and the exhaust port is increased as compared with the configuration in which the groove portions are in a lattice shape, so that the floating amount of the workpiece can be adjusted more accurately and accurately as a whole.

The perspective view which shows the workpiece | work floating apparatus which is 1st Example of this invention. The top view of the workpiece | work floating apparatus which is 1st Example of this invention. The principal part expansion partial cross-section perspective view of the ventilation | gas_flowing unit of the workpiece | work floating apparatus looked at 3-3 of FIG. Sectional drawing of the workpiece | work floating apparatus seen in 4-4 of FIG. The principal part enlarged plan view and sectional drawing of the base which are 1st Examples of this invention. The top view which shows a part of workpiece | work floating apparatus which is 2nd Example of this invention.

  The present invention relates to a workpiece levitation apparatus that adjusts the amount of gas that is interposed between a base surface of a workpiece levitation device and the workpiece to float the workpiece via a gas throttle mechanism, and the base surface is A plurality of air supply ports for sending gas to and from the workpiece, a plurality of exhaust ports for removing gas from between the base surface and the workpiece, and an air supply port and an exhaust port on the base surface. A gas throttle mechanism attached to each of the air supply port and the exhaust port and reducing the influence of the air pressure in the vicinity of the air supply port and the air pressure in the vicinity of the exhaust port. As long as the flow rate of the workpiece is adjusted with high accuracy to adjust the flying height of the workpiece with high accuracy, any specific embodiment may be used.

  For example, a compressor that supplies gas between the base surface and the workpiece via a gas throttle mechanism and a vacuum pump that sucks gas from between the base surface and the workpiece are configured separately from the workpiece floating device. Alternatively, they may be integrated.

Below, the workpiece floating apparatus 100 which is 1st Example of this invention is demonstrated based on FIG. 1 thru | or FIG.
Here, FIG. 1 is a perspective view showing a workpiece floating apparatus 100 according to the first embodiment of the present invention, and FIG. 2 is a plan view of the workpiece floating apparatus 100 according to the first embodiment of the present invention. FIG. 3 is an enlarged partial cross-sectional perspective view of a main part of the ventilation unit 120 of the workpiece floating apparatus 100 viewed from 3-3 in FIG. 2, and FIG. 4 is a workpiece floating apparatus 100 viewed from 4-4 in FIG. FIG. 5A is an enlarged plan view of the main part of the base 110 according to the first embodiment of the present invention, and FIG. 5B is a schematic view of 5B-5B shown in FIG. 5A. It is the principal part expanded sectional view of the base 110 looked at.

  As shown in FIGS. 1 to 5, the workpiece levitation apparatus 100 according to the first embodiment of the present invention is configured to reduce the amount of gas interposed between the base surface 111 of the workpiece levitation apparatus 100 and the workpiece W. It is configured to adjust via A.

Furthermore, the base surface 111 includes a plurality of air supply ports 111b that send gas between the base surface 111 and the workpiece W, a plurality of exhaust ports 111c that remove gas from between the base surface 111 and the workpiece W, and a base A groove 111 a is provided between the air supply port 111 b and the exhaust port 111 c on the surface 111, and the groove 111 a extends to the end 111 d of the base surface 111.
Thereby, at least a part of the gas sent between the base surface 111 and the workpiece W in the vicinity of the air supply port 111b escapes to the groove portion 111a and from between the base surface 111 and the workpiece W in the vicinity of the exhaust port 111c. At least a part of the sucked gas becomes gas from the groove 111a.

  Specifically, the workpiece levitation apparatus 100 includes a base 110 and a plurality of ventilation units 120 having a gas throttle mechanism A, and the base is connected via an air supply port 111b to which the ventilation unit 120 is attached by a compressor or the like (not shown). A gas is supplied between the surface 111 and the workpiece W, and similarly, the gas is exhausted from between the base surface 111 and the workpiece W through an exhaust port 111c to which a ventilation unit 120 is attached by a vacuum pump (not shown). It is provided as follows.

On the base 110, there is a mass partitioned by the grooves 111a provided in a lattice shape, and the plurality of ventilation units 120 are placed one by one on the ventilation holes 112 formed in the mass partitioned by the grooves 111a. For example, the supply gas throttling mechanism AS and the exhaust gas throttling mechanism AE are alternately arranged.
That is, the air supply port 111b and the exhaust port 111c are configured alternately.

Here, as shown in FIG. 3, the gas throttle mechanism A of the ventilation unit 120 has a porous film 121 that throttles and adjusts the amount of gas, and a first flat plate-shaped ventilation member 122 laminated on the porous film 121. And a second flat plate ventilation member 123 laminated under the porous film 121, and the porous film 121 is sandwiched between the first flat plate ventilation member 122 and the second flat plate ventilation member 123. Yes.
As a result, the porous film 121 is supported by at least one of the first flat plate-shaped ventilation member 122 and the second flat plate-shaped ventilation member 123, and the shape of the porous film 121 is stabilized both in the case of air supply and in the case of exhaust. .
That is, in the case of air supply, the porous film 121 is supported by the first flat plate-shaped ventilation member 122, and in the case of exhaust, the porous film 121 is supported by the second flat plate-shaped ventilation member 123. The shape is stable.
The single ventilation unit 120 can be used for both supply and exhaust.

In addition, in a present Example, there exists an advantage that the consumption flow rate of gas becomes small by using the porous film 121 compared with the structure which supplies and exhausts gas from a simple hole.
For reference, the porous film 121 of this example has a thickness of 38 μm, a tensile strength (MD) of 8 N / cm, a tensile strength (CD) of 8 N / cm, a tensile elongation (MD) of 280%, and a tensile elongation (CD) of 260. %, Air permeability is 210 sec / 100 cc, moisture permeability is 12,000 g / square m · 24 hr, and water pressure resistance is 98 kPa or more (1.0 kg / square cm or more).
In this embodiment, the porous film 121 is made of polypropylene resin.
Thereby, since the porous film 121 is a chemical product, the physical property variation can be reduced as compared with the porous metal member.
Furthermore, since the strength is high and the specific gravity is the smallest among the general-purpose resins, a lightweight gas throttling mechanism A having excellent durability can be supplied.
Moreover, the 1st flat ventilation member 122 and the 2nd flat ventilation member 123 consist of a nonwoven fabric.
Thereby, since it has versatility and air permeability and has a certain level of strength, the shape of the porous film 121 can be stabilized with a versatile material.

Further, the ventilation unit 120 includes an upper casing 124 and a lower casing 125. As an example, the ventilation unit 120 is attached to the base 110 by filling the V-shaped groove 124c with an adhesive.
Thereby, since the adhesive adhered to the base 110 side and solidified is engaged with the V-shaped groove 124c, the ventilation unit 120 can be firmly fixed to the base 110.

  Further, since the ventilation unit 120 is attached to the base 110 from above, the upper surface of the first flat plate ventilation member 122 that forms the upper surface of the ventilation unit 120 and the base surface 111 are configured to have substantially the same height. be able to.

Subsequently, the operation of the workpiece floating apparatus 100 according to the embodiment of the present invention will be described.
As shown in FIG. 4, in the gas supply throttle mechanism AS, the gas Sa is sent from the lower side to the upper side, and is further sent between the base surface 111 and the workpiece W.
In the vicinity of the upper portion of the air supply port 111b, the atmospheric pressure increases, and thus a levitation force that causes the workpiece W to float is generated.
At this time, since the variation in the distribution of the holes in the porous film 121 is small, the gas flow rate can be adjusted with high accuracy by each of the air supply gas throttle mechanisms AS.
Furthermore, since the variation in the air supply amount between the air supply gas throttle mechanisms AS is reduced, the levitation force can be adjusted with high accuracy in the entire workpiece levitation apparatus 100.

In the other exhaust gas throttle mechanism AE, the gas Ea is sucked from between the base surface 111 and the workpiece W by suction by an action of a vacuum pump (not shown), and further sucked downward from above.
Then, in the vicinity of the upper portion of the exhaust port 111c, the atmospheric pressure is lowered, so that a suction force for sucking the workpiece W is generated.
Needless to say, the suction force is smaller than the levitation force.
At this time, as in the case of the gas throttle mechanism AS for supply air, since the variation in the distribution of the holes in the porous film 121 is small, the gas flow rate can be adjusted with high accuracy. Since the variation in the exhaust amount between the AEs is reduced, the suction force can be adjusted with high accuracy.

In the present embodiment, a groove 111a is disposed between the air supply port 111b and the exhaust port 111c on the base surface 111, and the groove 111a extends to the end 111d of the base 110. .
For example, when the pressure in the vicinity of the upper side of the air supply port 111b is significantly higher than the pressure in the vicinity of the upper side of the exhaust port 111c, the gas in the vicinity of the upper side of the air supply port 111b does not flow to the vicinity of the upper side of the exhaust port 111c. It flows into 111a and is discharged to the atmosphere on the end 111d side of the base 110 through the groove 111a.

  In other words, by providing the groove 111a, depending on the conditions, the air pressure near the air supply port 111b is not affected by the air pressure near the air supply port 111b on the air pressure near the air supply port 111c. It is possible to independently adjust the atmospheric pressure in the vicinity of the upper side of 111c.

Furthermore, in this embodiment, as shown in FIGS. 5A and 5B, the groove 111a has a hole 111e through which gas can pass to the atmosphere, and the hole 111e is connected to the base surface 111. It is provided penetrating to the opposite side.
As a result, the distance to the atmosphere is constant regardless of the position of the hole 111e in the groove 111a.
Further, when the pressure of the groove 111a is high, gas escapes from the groove 111a to the hole 111e, while when the pressure of the groove 111a is low, gas enters the groove 111a from the hole 111e.

Moreover, the groove part 111a is arrange | positioned so that it may cross | intersect on the base surface 111, and the hole part 111e is arrange | positioned in the location where the groove part 111a crossed.
Thereby, when the airflow toward the intersection of the groove 111a does not flow from the intersection to the other groove 111a, it flows into the hole 111e.

Further, the air supply ports 111b and the exhaust ports 111c are alternately arranged on the base surface 111, and the groove portions 111a are provided on the base surface 111 in a lattice shape.
Thereby, the density of the air supply port 111b, the exhaust port 111c, and the groove part 111a becomes uniform on the base surface 111, respectively.

  As described above, the floating force and suction force acting on the workpiece W can be adjusted with high accuracy to improve the support balance of the workpiece W, so that the workpiece W can be supported with high accuracy at a desired flying level. The degree of flatness can be increased by reducing the deflection of the workpiece W.

In this embodiment, the ventilation unit 120 having the porous film 121 is disposed in the air supply port 111b and the exhaust port 111c. However, a groove 111a is provided between the air supply port 111b and the exhaust port 111c on the base surface 111. It is only necessary that the gas is ejected from the hole as the one air supply port 111b without having the porous film 121, and the gas from the other hole as the exhaust port 111c adjacent to the hole as the air supply port 111b. A so-called point supply / exhaust type configuration may be used.
Further, in the present invention, the porous film 121 is used. However, instead of the porous film 121, a porous metal may be used, and the air supply port 111b and the exhaust port 111c may be configured with this porous metal.

  In the workpiece levitation apparatus 100 according to the first embodiment of the present invention thus obtained, the base surface 111 includes a plurality of air supply ports 111b for sending gas between the base surface 111 and the workpiece W, and the base surface. 111 and a plurality of exhaust ports 111c for removing gas from between the workpiece W and a groove portion 111a disposed between the air supply port 111b and the exhaust port 111c on the base surface 111, and the groove portion 111a. However, by extending to the end portion 111d of the base surface 111, the influence of the atmospheric pressure near the upper side of the air supply port 111b and the atmospheric pressure near the upper side of the exhaust port 111c is reduced, and the flying height of the workpiece W is reduced. Can be adjusted with high accuracy.

  Furthermore, the groove 111a has a hole 111e that allows gas to pass through to the atmosphere, and the hole 111e is provided so as to penetrate to the opposite side of the base surface 111, so that particularly in the vicinity of the center of the base surface 111. The air pressure in the vicinity of the upper air supply port 111b and the air pressure in the vicinity of the upper air outlet 111c are more effectively reduced by reducing the effect of the condition near the center of the base surface 111 and the end of the base surface 111. The difference from this condition can be reduced, and the atmospheric pressure in the groove 111a can be stabilized.

  In addition, the groove 111a is disposed so as to intersect on the base surface 111, and the hole 111e is disposed at a position where the groove 111a intersects, so that the pressure of the groove 111a can be stabilized. it can.

  Further, the air supply ports 111b and the exhaust ports 111c are alternately arranged on the base surface 111, and the grooves 111a are provided in a lattice shape on the base surface 111, so that the whole is stable. Thus, the flying height of the workpiece W can be adjusted with high accuracy.

Subsequently, a workpiece floating apparatus 200 according to a second embodiment of the present invention will be described with reference to FIG.
Here, FIG. 6 is a plan view showing a part of the workpiece floating apparatus 200 according to the second embodiment of the present invention.

  The workpiece floating apparatus 200 of the second embodiment is obtained by changing the arrangement of the air supply ports 111b and the exhaust ports 111c on the base surface 111 of the workpiece floating apparatus 100 of the first embodiment and changing the shape of the groove 111a. Since many elements are common to the workpiece floating apparatus 100 of the first embodiment, detailed description of the common matters is omitted, and only the reference numerals of the 200 series in which the last two digits are common are attached.

  In the workpiece floating apparatus 200 according to the second embodiment of the present invention, as shown in FIG. 6, the base surface 211 of the base 210 sends gas between the base surface 211 and the workpiece W (see FIGS. 1 and 4). A plurality of air supply ports 211b, a plurality of exhaust ports 211c for removing gas from between the base surface 211 and the workpiece W, and an air supply port 211b and an exhaust port 211c on the base surface 211 are disposed. A groove 211a, and the groove 211a extends to the end 211d of the base surface 211.

Further, the air supply port 211b and the exhaust port 211c are alternately arranged in a predetermined direction on the base surface 211, and a column in a predetermined direction composed of the air supply port 211b and the exhaust port 211c is adjacent to this column. And a groove 211 a is provided in a honeycomb shape in which regular hexagons are arranged on the base surface 211.
Thereby, the density of the air supply port 211b and the exhaust port 211c increases compared with the structure which the groove part 111a shown in FIG. 2 is a grid | lattice form.
Note that an air supply gas throttle mechanism AS and a ventilation unit 220 are disposed at the air supply port 211b, and an exhaust gas throttle mechanism AE and a ventilation unit 220 are disposed at the exhaust port 211c.

  In the work levitation apparatus 200 according to the second embodiment of the present invention thus obtained, the air supply port 211b and the exhaust port 211c are alternately arranged in a predetermined direction on the base surface 211, and the air supply port The row in a predetermined direction composed of 211b and the exhaust port 211c is shifted by a half pitch with respect to the row adjacent to this row, and the groove portion 211a is provided in a honeycomb shape in which regular hexagons are arranged on the base surface 211. As a result, the floating amount of the workpiece W can be adjusted more accurately and more accurately than the configuration in which the groove 111a shown in FIG.

100, 200 ... Work floating device 110, 210 ... Base 111, 211 ... Base surface 111a, 211a ... Groove 111b, 211b ... Air supply port 111c, 211c ... Exhaust port 111d, 211d ・ ・ ・ End 111e ・ ・ ・ Hole 112 ・ ・ ・ Ventilation holes 120, 220 ・ ・ ・ Ventilation unit 121 ・ ・ ・ Porous film 122 ・ ・ ・ First flat plate ventilation member 123 ・ ・ ・ Second flat plate -Shaped ventilation member 124 ... upper casing 124c ... cross-sectional V-shaped groove 125 ... lower casing A ... gas throttling mechanism AE ... exhaust gas throttling mechanism AS ... supply gas throttling mechanism Ea ... Gas (exhaust)
Sa ... Gas (supply air)
W ・ ・ ・ Workpiece

Claims (8)

In the workpiece levitation device that adjusts the gas amount of the gas that levitates the workpiece by interposing between the base surface of the workpiece levitation device and the workpiece via the gas throttle mechanism,
A plurality of air supply ports through which the base surface sends gas between the base surface and the workpiece; a plurality of exhaust ports for removing gas from between the base surface and the workpiece; and an air supply port on the base surface A workpiece floating device having a plurality of grooves disposed between the exhaust port. The groove has a hole through which the gas passes to the atmosphere;
The workpiece floating apparatus according to claim 1, wherein the hole portion is provided so as to penetrate to a side opposite to the base surface.   The workpiece floating device according to claim 2, wherein the groove portion is disposed so as to intersect on the base surface, and the hole portion is disposed at a position where the groove portion intersects. .   A gas throttle mechanism attached to each of the air supply port and the exhaust port includes a porous film that throttles and adjusts the amount of gas, a first flat plate-shaped ventilation member laminated on the porous film, and the porous film. The workpiece floating apparatus according to any one of claims 1 to 3, wherein the workpiece floating apparatus is configured by a second flat plate-shaped ventilation member laminated below.   The workpiece floating apparatus according to claim 4, wherein the porous film is made of polypropylene resin.   The workpiece floating device according to claim 4 or 5, wherein the first flat plate-shaped ventilation member and the second flat plate-shaped ventilation member are made of nonwoven fabric.   The air supply port and the exhaust port are alternately arranged on the base surface, and the groove portions are provided in a lattice shape on the base surface. Item 7. The workpiece floating device according to any one of Items 6 above. The air supply ports and the exhaust ports are alternately arranged in a predetermined direction on the base surface, and a column in the predetermined direction composed of the air supply ports and the exhaust ports is half of the column adjacent to the column. The workpiece floating device according to any one of claims 1 to 7, wherein the workpiece is provided with a honeycomb shape in which regular hexagons are arranged on the base surface while the pitch is shifted. .

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