TWI665146B - Non-contact transferring device and non-contact suction plate - Google Patents

Abstract

The present invention provides a non-contact transfer device capable of finely controlling a non-contact suction state of a workpiece, and a non-contact suction device such as a non-contact suction plate.

According to the present invention, it is possible to provide a non-contact conveying device that sucks and transports a thin plate-shaped workpiece in a non-contact state, and the non-contact conveying device includes first and second non-contact suctions arranged along a conveying direction. The first and second non-contact suction pads each include a rectangular porous pad having a plurality of suction holes extending in a thickness direction and arranged in a grid pattern, and a rectangular holder and a porous pad. The back side is connected, and a grid-shaped pressurized gas flow path is formed on the surface, and a plurality of island-shaped portions arranged in a grid shape are divided by the pressurized gas flow path. When the communication hole extending from the shape part is connected to the porous pad, the top surface of the island-shaped part is closely contacted with the back surface of the porous pad in a state where the communication hole communicates with the suction hole of the porous pad, and is arranged upstream of the conveying direction. The grid-like pressurized gas flow path of the holder of the first non-contact chuck on the side is connected to at least a part of the connection area with the second non-contact chuck on the downstream side of the conveying direction. Arranged in the conveying direction toward the The wide flow path at the end portion extending in the orthogonal direction is terminated.

Description

Non-contact transfer device and non-contact chuck

The present invention relates to a non-contact conveying device and a non-contact chuck, and more particularly, to a non-contact conveying device for conveying a thin-plate-like workpiece in a non-contact state, and a Touch the chuck.

As a non-contact chuck device for suspending and processing a thin workpiece such as a semiconductor wafer and a glass substrate for FPD, a levitation table cited in Document 1 is known. The suspension table is used for suspending a workpiece by pressurized air and non-contact suction by sucking the workpiece at the same time on the surface of the porous plate, thereby suspending the workpiece on the porous plate and transferring it.

In addition, as another non-contact chuck device, a non-contact chuck disk cited in Document 2 is known. The non-contact chuck is a non-contact chuck in which a thin plate-like workpiece is suspended and held on a porous plate while pressurized air is sprayed and sucked on the surface of the porous plate simultaneously.

These non-contact chuck devices and non-contact chucks are effective for processing thin plate-shaped workpieces, such as glass substrates for FPD, because they can be transported or held without damaging the thin plate-shaped workpiece. Device.

[Prior technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2007-27495

[Patent Document 2] Japanese Patent No. 5512052

The levitation table (non-contact transfer device) described in the above-mentioned Patent Document 1 is used to transfer a thin plate-shaped workpiece such as a glass substrate for LCD, but the transfer distance is short and it is formed of a single porous plate. Therefore, when a thin plate-like workpiece is transported over a long distance using a suspension table as described above, or a large-sized thin plate-like workpiece is transferred, a plurality of porous plates must be continuously arranged in parallel in the transfer direction.

However, in this structure, when the workpiece is transferred from the upstream porous plate to the downstream porous plate, the front end of the workpiece may be directed downward at the connection portion of the two porous plates arranged side by side in the conveying direction. Case of displacement.

Due to such a downward displacement, there is a problem that the workpiece itself is deformed so that the workpiece cannot be smoothly transferred to the porous plate on the downstream side. This problem is particularly significant in ultra-thin workpieces with a thickness of less than 0.5 mm.

In addition, as described above, the non-contact chuck disk described in Patent Document 2 has a thin plate-shaped workpiece such as a glass substrate for LCD on a porous plate. Suspend and keep.

However, the above-mentioned non-contact chuck cannot change the ejection form of the pressurized air ejected from the surface of the porous plate. That is, the ejection state of the pressurized air ejected from the surface of the porous plate cannot be locally changed. Therefore, only thin plate-like workpieces can be suspended in the same state. Specifically, for example, the same thin plate-like workpiece cannot be suspended and held in different shapes such as a flat plate shape, a convex shape, or a concave shape.

That is, the non-contact suction device of the conventional technology, such as a non-contact transfer device and a non-contact suction tray, cannot finely control the non-contact suction state of a workpiece.

The present invention has been made in view of such problems, and an object thereof is to provide a non-contact conveying device capable of finely controlling a non-contact suction state of a workpiece, and a non-contact suction device such as a non-contact suction plate.

Specifically, the present invention has been made in order to solve the above problems, and an object thereof is to provide a non-contact conveying device having a structure in which a plurality of porous plates are continuously arranged in a conveying direction, and a porous plate having a workpiece facing the downstream side. During the transfer, downward movement of the front end of the workpiece can be suppressed.

Specifically, another object of the present invention is to provide a non-contact chuck which can locally change the state of the pressurized air ejected from the surface of the porous pad.

According to the present invention, it is possible to provide a non-contact conveying device that sucks and transports a thin-plate-like workpiece in a non-contact state. The non-contact transfer device includes first and second non-contact chucks arranged along the transfer direction, and the first and second non-contact chucks each include a rectangular porous pad arranged in a grid pattern. A plurality of suction holes extending through the thickness direction; and a rectangular holder connected to the back surface of the porous pad, a grid-shaped pressurized gas flow path is formed on the surface, and the pressurized gas flow path is divided by the pressurized gas flow path. A plurality of island-shaped portions arranged in a grid shape, and provided with corresponding communication holes provided in correspondence with the suction holes and extending through the island-shaped portions in a thickness direction, and connected to the porous pad by the communication holes and In a state where the suction holes of the porous pad are communicated, the top surface of the island-shaped portion is in close contact with the back surface of the porous pad, and the grid of the holder of the first non-contact suction pad arranged on the upstream side in the conveying direction is grid-like The pressurized gas flow path is connected to the second non-contact chuck disposed at the downstream side of the conveying direction, and at least a part of the pressurizing gas flow path is arranged to be orthogonal to the conveying direction. Extending in the width direction of the terminal end portion of the flow passage.

According to this structure, the non-contact suction state of the work can be finely controlled. In detail, the pressurized gas flow path of the non-contact chuck on the upstream side is an end portion arranged to extend in a direction orthogonal to the conveyance direction in the connection area with the non-contact chuck on the downstream side. The wide flow path is the end. Therefore, when a thin plate-shaped workpiece is transferred from the first non-contact chuck to the second non-contact chuck, the porous part can be fed into the connection area through a wide flow path from the end of the first non-contact chuck. Pores The high-pressure gas sprayed from the porous pad is pushed upward to appropriately control the height of the workpiece.

According to another preferred aspect of the present invention, at least a part of the grid-shaped pressurized gas flow path of the holder of the second non-contact chuck is connected to the first non-contact chuck. The end conveyance direction flow path arrange | positioned so that it may extend toward the said conveyance direction is a terminal.

According to this structure, the ejection amount of the pressurized gas from the surface of the porous pad in the portion of the second non-contact chuck on the most upstream side in the conveying direction is lower than the portion of the first non-contact chuck in the conveyance direction. Since the amount of the pressurized gas to be ejected is small, it is possible to prevent the workpiece transferred to the second non-contact chuck from being excessively lifted upward.

According to another preferred aspect of the present invention, at least a part of the grid-shaped pressurized gas flow path of the holder of the first non-contact chuck is in a connection area with the second non-contact chuck. The end conveyance direction flow path arrange | positioned so that it may extend toward the said conveyance direction is a terminal.

According to this structure, the ejection amount of the pressurized gas from the surface of the porous pad in the portion of the first non-contact chuck on the most downstream side in the conveying direction is higher than that in the portion of the second non-contact chuck in the conveyance direction. Since the amount of the pressurized gas to be ejected is small, the tip of the workpiece transferred to the second non-contact chuck can be prevented from being excessively lifted upward.

According to another preferred aspect of the present invention, the grid-like pressurized gas of the holder of the second non-contact chuck is described above. The flow path is at the end of at least a part of the connection region with the first non-contact chuck which is arranged at an end wide direction flow path which extends orthogonally to the conveying direction.

According to another preferred aspect of the present invention, at least a part of the grid-shaped pressurized gas flow path of the holder of the first non-contact chuck is in a connection area with the second non-contact chuck. A terminal wide-direction flow path arranged so as to extend orthogonal to the conveying direction is terminated.

According to another preferred aspect of the present invention, the grid-shaped pressurized gas flow paths of the holders of the first and second non-contact chucks are provided with a closed rectangular portion as an end portion and an open portion The rectangular portion is the terminal portion. The first and second non-contact chucks are arranged as one open rectangular portion of the pressurized gas flow path of one non-contact chuck, along the transport direction, relative to the other. The closed rectangular portions of the pressurized gas flow path of one non-contact chuck are aligned in a regular manner.

According to another preferred aspect of the present invention, the holder of the first non-contact chuck is provided with an independent pressurized gas flow path separated from the pressurized gas flow path.

According to another preferred aspect of the present invention, the independent pressurized gas flow path of the first non-contact chuck is provided in the connection area with the second non-contact suction disc, and is provided in the pressurized gas flow path. The side edge side of the terminal part.

According to this structure, supply to independent pressurized gas can be made The flow rate, pressure, and the like of the pressurized air in the body flow path are different from the flow rate and pressure of the pressurized gas supplied to the pressurized gas flow path. Therefore, it can be independent in the connection area with the second non-contact chuck. The flow rate of the pressurized gas discharged from the porous pad is controlled.

According to another preferred aspect of the present invention, the holder of the second non-contact chuck is provided with an independent pressurized gas flow path separate from the pressurized gas flow path.

According to another preferred aspect of the present invention, the independent pressurized gas flow path of the second non-contact chuck is provided in the connection area with the first non-contact suction disc, and is provided in the pressurized gas flow path. The side edge side of the terminal part.

According to this structure, the flow rate and pressure of the pressurized air supplied to the independent pressurized gas flow path can be made different from the flow rate and pressure of the pressurized gas supplied to the pressurized gas flow path. 1 In the connection area of the non-contact chuck, the flow rate and the like of the pressurized gas discharged from the porous pad can be independently controlled.

According to another preferred aspect of the present invention, the porous pad is provided with an independent suction hole formed in a suction state different from the suction hole.

According to another preferred aspect of the present invention, the independent suction hole is disposed in a connection region between one non-contact chuck and the other non-contact chuck.

According to another preferred aspect of the present invention, the first and second non-contact chucks are disposed in contact with each other.

According to another preferred aspect of the present invention, the first and second non-contact chucks are arranged to be separated from each other.

According to this structure, when moving from the first non-contact chuck to the second non-contact chuck, the leading end of the workpiece is pushed upward, and then formed between the first and second non-contact chucks. The gap is pushed downward due to its own weight, so it can be transferred to the second non-contact suction plate while maintaining the height position.

According to another preferred aspect of the present invention, a non-contact chuck can be provided for absorbing a thin plate-shaped workpiece in a non-contact state. The non-contact chuck is provided with a rectangular porous pad arranged at a thickness of A plurality of suction holes extending in a direction; and a retainer connected to the back surface of the porous pad, a pressurized gas flow path formed on the surface, and a plurality of island-shaped portions divided by the pressurized gas flow path, and The communication holes are arranged in a regular manner with respect to the suction holes and extend through the island-like portion in the thickness direction. When connected to the porous pad, the communication holes communicate with the suction holes of the porous pad to connect the suction holes to the suction holes of the porous pad. The top surface of the island-shaped portion is in close contact with the back surface of the porous pad, and the retainer is formed with an independent pressurized gas flow path separated from the pressurized gas flow path on the surface.

According to this structure, the non-contact suction state of the work can be finely controlled. Specifically, the pressure and / or flow rate of the pressurized air supplied in the pressurized gas flow path can be made independent of the pressure and / or flow rate of the pressurized air supplied to the independent pressurized gas flow path. Therefore, the flow rate distribution of the pressurized air sprayed from the surface of the porous pad can be changed. With this change in traffic distribution, It can be held in a flat plate shape, or a thin plate workpiece with the same shape in a convex shape or a concave shape.

According to another preferred aspect of the present invention, the independent pressurized gas flow path is arranged adjacent to an edge portion of the non-contact absorbing disk.

According to another preferred aspect of the present invention, the porous pad is provided with an independent suction hole formed in a suction state different from the suction hole.

According to another preferred aspect of the present invention, the aforementioned independent pressurized gas flow paths are formed in a plurality, and each of the independent pressurized gas flow paths is separated from each other.

According to another preferred aspect of the present invention, a non-contact conveying device including the above-mentioned non-contact chuck can be provided.

According to another preferred aspect of the present invention, the non-contact chucks arranged adjacently are arranged so that the edges are adjacent to each other.

According to this structure, the amount of pressurized air sprayed from the surface of the porous pad can be controlled independently of other areas in the vicinity of the area where the non-contact chucks are connected to each other. Therefore, non-contact of the workpiece during transportation can be suppressed Changes in height, etc., that occur when the chuck is transferred to a non-contact chuck adjacent to the other side.

According to the present invention, it is possible to provide a non-contact conveying device and a non-contact suction disc capable of finely controlling a non-contact suction state of a workpiece. And other non-contact sorption devices.

Furthermore, according to the present invention, it is possible to provide a non-contact conveyance structure having a structure in which a plurality of porous plates are continuously arranged in the conveying direction, and a downward displacement of a front end portion of a workpiece can be suppressed when a workpiece is moved to the downstream porous plate Device.

Furthermore, according to the present invention, it is possible to provide a non-contact chuck capable of locally changing the state of ejection of the pressurized air ejected from the surface of the porous pad.

1‧‧‧ non-contact chuck

2‧‧‧ porous pad

2a‧‧‧upper surface

4‧‧‧ pad holder

6‧‧‧ base

8‧‧‧ suction hole

8a‧‧‧ Trail

8b‧‧‧large diameter section

12‧‧‧ Stand

14‧‧‧ Pressurized gas flow path (groove)

16‧‧‧ island-shaped protrusion

18‧‧‧ communication hole

20‧‧‧Pressurized air inlet

22‧‧‧ base groove

24‧‧‧Vacuum hole

30, 30 ’‧‧‧ non-contact transfer device

32, 32’‧‧‧‧The first non-contact chuck

34, 34’‧‧‧ 2nd non-contact chuck

36‧‧‧End wide flow path

40, 40 ’‧‧‧ non-contact transfer device

42, 42’‧‧‧‧The first non-contact chuck

44, 44 ’‧‧‧ 2nd non-contact chuck

46, 46’‧‧‧ end wide flow path

50, 50 ’‧‧‧ non-contact transfer device

52、52’‧‧‧‧The first non-contact chuck

54, 54 ’‧‧‧ 2nd non-contact chuck

56, 56’‧‧‧ end wide flow path

58, 58’‧‧‧ end part direction flow path

60, 60 ’, 60” ‧‧‧ non-contact transfer device

62, 62 ’‧‧‧ the first non-contact chuck

62 ”, 64” ‧‧‧ additional non-contact chucks

64, 64 ’‧‧‧ 2nd non-contact chuck

66, 66 ’, 66” ‧‧‧ end wide direction flow path

68, 68 ’, 68” ‧‧‧ end-portal direction flow path

70, 80, 90‧‧‧ non-contact transfer device (suspending device)

92‧‧‧The first non-contact chuck

94‧‧‧ 2nd non-contact chuck

96‧‧‧ Independent pressurized gas flow path

98‧‧‧ Independent suction hole

100‧‧‧ Attraction groove

102‧‧‧ Independent pressurized gas flow path

104‧‧‧ Independent pressurized gas flow path

106‧‧‧ Independent pressurized gas flow path

108‧‧‧ Independent pressurized gas flow path

120‧‧‧ non-contact chuck

122‧‧‧Porous pad

124‧‧‧ suction hole

126‧‧‧Pressurized gas flow path (groove)

128‧‧‧ independent pressurized gas flow path

130‧‧‧ Non-contact suction cup

132‧‧‧The first pressurized gas flow path

134‧‧‧Second pressurized gas flow path

136‧‧‧1st suction hole

138‧‧‧Second suction hole

140‧‧‧3rd suction hole

FIG. 1 is an exploded perspective view of a non-contact chuck used in a non-contact transfer device according to a preferred embodiment of the present invention.

FIG. 2 is a schematic cross-sectional view for explaining a state in which the workpiece W is suction-fixed (non-contact-sucked) using the non-contact suction plate of FIG. 1.

Fig. 3 is a diagram showing the arrangement of a non-contact chuck in the non-contact transfer device according to the first embodiment of the present invention.

Fig. 4 is a diagram showing the arrangement of a non-contact chuck in a non-contact transfer device according to a modification of the first embodiment.

Fig. 5 is a diagram showing the arrangement of a non-contact chuck in a non-contact transfer device according to a second embodiment of the present invention.

Fig. 6 is a diagram showing the arrangement of a non-contact chuck in a non-contact transfer device according to a modification of the second embodiment.

Fig. 7 is a diagram showing the arrangement of a non-contact chuck in a non-contact transfer device according to a third embodiment of the present invention.

Fig. 8 is a diagram showing the arrangement of a non-contact chuck in a non-contact transfer device according to a modification of the third embodiment.

Fig. 9 is a view showing the arrangement of a non-contact chuck in a non-contact transfer device according to a fourth embodiment of the present invention.

Fig. 10 is a diagram showing the arrangement of a non-contact chuck in a non-contact transfer device according to a modification of the fourth embodiment.

Fig. 11 is a diagram showing an example of the arrangement of a non-contact chuck in a non-contact transfer device.

Fig. 12 is a view showing another arrangement example of the non-contact chuck in the non-contact transfer device.

FIG. 13 is a diagram showing another configuration example of the non-contact transfer device.

Fig. 14 is a diagram showing a non-contact chuck and its arrangement in a non-contact transfer device according to a fifth embodiment of the present invention.

Fig. 15 is a schematic cross-sectional view for explaining the structure of a non-contact chuck according to a fifth embodiment.

Fig. 16 is a diagram showing a modification of the non-contact chuck in the non-contact transfer device according to the fifth embodiment of the present invention.

Fig. 17 is a view showing another modified example of the non-contact chuck in the non-contact transfer device according to the fifth embodiment of the present invention.

Fig. 18 is a view showing another modification of the non-contact chuck in the non-contact transfer device according to the fifth embodiment of the present invention.

Fig. 19 is a view showing another modified example of the non-contact chuck in the non-contact transfer device according to the fifth embodiment of the present invention.

Fig. 20 is a plan view showing another non-contact chuck of the present invention.

Fig. 21 is a plan view showing another non-contact chuck of the present invention.

The structure of a non-contact chuck used in a non-contact transfer device according to a preferred embodiment of the present invention will be described below. FIG. 1 is an exploded perspective view of a non-contact chuck used in a non-contact transfer device according to a preferred embodiment of the present invention, and FIG. 2 is a diagram for explaining suction of a workpiece W using the non-contact chuck of FIG. 1. It is a schematic cross-sectional view of the state of being held (non-contacted).

The non-contact chuck used in the preferred embodiment of the present invention has a basic structure similar to the non-contact chuck described in International Publication No. WO2013 / 129599, and is suitable for semiconductor wafers and glass substrates for FPD. And other thin plate-like workpieces, especially thin plate-like workpieces such as glass plates for liquid crystal displays having a thickness of about 0.3 to 0.4 mm, are non-contacted. It is also suitable for non-contact suction of ultra-thin workpieces such as glass plates with a thickness of about 0.1mm and films with a thickness of 0.05mm.

As shown in FIG. 1, the non-contact chuck 1 includes a rectangular porous pad 2 having a non-contact absorbing area of a workpiece on the surface, and a porous pad is held from the lower side (back side) of the porous pad 2. 2 rectangular pad holder 4; and a rectangular base 6 connected to the back side of the pad holder 4.

The porous pad 2 is made of air-permeable porous carbon. The material of the porous pad 2 is not limited to air-permeable porous carbon, and other air-permeable porous materials, such as porous silicon carbide and porous alumina, may also be used.

The permeation amount of the porous pad 2 is preferably about 0.4 to 2 Nml / min / mm ² (when the thickness of the porous pad 2 is 5 mm and the pressure is 0.1 MPa).

A plurality of suction holes 8 are formed in the porous pad 2. As shown in FIG. 1, the suction holes 8 are arranged substantially in a grid pattern throughout the porous pad 2, that is, they are arranged in a state of being arranged in the center of the square eyes of the go board. In this embodiment, the interval between the suction holes 8 is set to about 25 mm.

The suction holes 8 are formed so as to extend through the porous pads 2 in the thickness direction. In this embodiment, the suction hole 8 is a small-diameter portion 8a having a diameter of about 0.6 mm on the surface side of the porous pad 2 and a large-diameter portion having a diameter of about 4 mm on the back side of the porous pad 2. The small-diameter portion 8a and the large-diameter portion 8b are connected by forming a tapered tip with a tapered tip toward the surface of the porous pad 2.

With this structure, when the large-diameter portion 8b of the suction hole 8 is suction-reduced under reduced pressure, air from the small-diameter portion 8a of the suction hole 8 opened on the surface side of the porous pad is suctioned, and the suction hole 8 is formed. The surface area of the porous pad 2 becomes a non-contact suction-fixation area for non-contact suction-fixation of the workpiece.

As described above, the pad holder 4 is a rectangular member that holds the porous pad 2 from the lower side (back side), and is formed of a metal material such as an aluminum alloy. The pad holder 4 may be formed of a resin such as reinforced carbon fiber, polyetheretherketone (CFRP, PEEK).

A wall-shaped rising portion 12 is formed on the outer surface of the pad holder 4. The rising portion 12 is configured such that the size of the inner edge is slightly larger than the size of the outer edge of the porous pad 2 and the height is slightly lower than the thickness of the porous pad 2.

Therefore, the porous pad 2 is arranged in a standing position of the pad holder 4. When the space (recessed portion) inside the raised portion 12 is formed, the upper surface 2 a of the porous pad 2 is arranged slightly above the top surface of the raised portion 12 of the pad holder 4.

In addition, the present invention may have a structure without the rising portion 12.

Further, grooves (pressurized gas flow paths) 14 having a rectangular cross section are formed in a grid (a square shape of a go board) in the inner area of the upper surface (bottom surface of the recessed portion) of the pad holder 4 and divided by the grooves 14. The portions are arranged in the form of a square lattice and the island-shaped protrusions 16 having a substantially square cross section. The island-shaped protrusions 16 form a square-eye structure of the go board together with the grooves 14 arranged in a grid shape (the square-eye shape of the go board). The top surface of each protrusion 16 is flat, and a communication hole 18 is formed in the center and penetrates the pad holder 4 in the thickness direction.

In addition, the pressurized gas flow path system formed by the grooves 14 communicates integrally and functions as a single flow path as a whole.

In addition, the lattice pattern in the present invention is not limited to the square lattice of the above example. In addition, the cross-sectional shape of the island-shaped protrusion is not limited to a substantially square shape such as the protrusion 16, and may be other rectangles, triangles, polygons, circles, or the like.

The porous pad 2 and the pad holder 4 are joined and fixed with an adhesive or the like in a state where the porous pad 2 is disposed in a space inside the rising portion 12 of the pad holder 4. When the structure without the rising portion 12 is provided, the porous pad 2 and the pad holder 4 are laminated and bonded and fixed with an adhesive or the like.

When the protruding portion 16 is located in the space inside the rising portion 12 of the pad holder 4 of the porous pad 2, the top surface is configured to be airtight. The state abuts on the area around the open end of the large-diameter portion 8b of the suction hole 8 on the back surface of the porous pad 2.

As a result, when the porous pad 2 is fixed in the space inside the rising portion 12 of the pad holder 4 with an adhesive, a grid is arranged between the back surface of the porous pad 2 and the upper surface of the pad holder 4. A closed space (pressurized gas flow path) defined by the groove 14 in the shape of a groove and the porous pad 2 covering the groove 14.

The communication hole 18 has a diameter substantially the same as that of the large-diameter portion 8 b of the suction hole 8 of the porous pad 2 when the porous pad 2 is accommodated in a predetermined position in a space inside the rising portion 12 of the pad holder 4. It is configured to be aligned in the thickness direction with each suction hole 8 formed in the porous pad 2.

As a result, when the porous pad 2 is accommodated in the space inside the rising portion 12 of the pad holder 4, the suction hole 8 of the porous pad 2 and the communication hole 18 of the pad holder 4 are in fluid communication.

The pad holder 4 is formed with a pressurized air inlet 20 for communicating the entire pressurized gas flow path formed by the groove 14 with an external space, and for introducing pressurized air into the pressurized gas flow path.

With this structure, when the porous pad 2 is housed in a space inside the rising portion 12 of the pad holder 4 and then fixed, when the pressurized air is introduced from the pressurized air inlet 20, Pressurized air, that is, pressurized air supplied to the entire pressurized gas flow path, enters the pores of the porous pad 2 forming the upper surface of the pressurized gas flow path, passes through the porous pad 2 and passes from the surface of the porous pad 2 All squirting.

At this time, a grid-like groove 14 (pressurized) is arranged below (Gas flow path) The surface portion of the porous pad 2 may have a larger amount of pressurized air or a higher pressure than the portion where the groove 14 (pressurized gas flow path) is not disposed below. .

The base 6 is a rectangular member connected to the back side of the pad holder 4 and is formed of a metal material such as an aluminum alloy. The base 6 may be formed of a resin such as CFRP · PEEK.

As shown in FIG. 1, the base 6 has approximately the same size as the pad holder 4, and a flat base surface has a rectangular base groove 22 formed in a rectangular cross section. Therefore, when the flat back surface of the pad holder 4 is joined to the upper surface of the base 6, a grid-shaped locking space is formed by the grid-shaped base groove 22 and the back surface of the pad holder 4 covering the groove.

The base groove 22 is arranged such that when the pad holder 4 and the base 6 are joined, the intersection of the grid-shaped base groove 22 and the communication hole 18 formed in the pad holder 4 are aligned in the thickness direction.

With this structure, when the porous pad 2 is connected to the pad holder 4 and the base 6, the suction hole 8 of the porous pad 2 passes through the communication hole 18 of the pad holder 4 and is formed in the base 6 and the pad. The intersections of the grid-shaped lock spaces between the holders 4 communicate with each other.

A vacuum hole 24 is formed in the periphery of the susceptor 6 as a through hole for communicating the susceptor groove 22 with a vacuum source outside the susceptor 6.

With this structure, when the porous pad 2, the pad holder 4, and the base 6 are connected, vacuum suction is performed from the vacuum hole 24 through the communication hole 18 of the pad holder 4 from the porous pad 2. Each suction hole 8 sucks the workpiece on the porous pad 2 toward the porous pad 2.

In addition, since each suction hole 8 communicates with a grid-shaped closed space, the suction state of each suction hole is the same.

The pad holder 4 and the base 6 are connected by a connection tool such as a screw or a bolt. By forming a groove along the outer periphery of the upper surface of the base 6 and arranging an O-ring in the groove, the grid-shaped base groove 22 of the base 6 can be locked to the pad holder 4 and the base. Block 6 link. It is also possible to adopt a structure in which the pad holder 4 and the base 6 are connected by an adhesive.

When a non-contact chuck having such a structure is used, the porous pad 2, the pad holder 4, and the base 6 are connected, and the pressurized air is introduced from the pressurized air inlet 20 into the grooves 14 and The pressurized gas flow path formed by the porous pad 2 and vacuum suction are performed from the vacuum holes of the base 6, thereby enabling non-contacting of the workpiece to be sucked while the workpiece is suspended on the porous pad 2. Suck.

Next, non-contact adsorption will be described in detail based on FIG. 2.

As described above, during use, when pressurized air is introduced from a compressed air source outside the pressurized gas flow path formed by the grooves 14 of the pad holder 4 and the porous pad 2, the pressurized air passes through the porous pad 2. The pores enter the porous pad 2 and are ejected from the upper surface 2 a of the porous pad 2 as indicated by an arrow P in FIG. 2. As indicated by an arrow P in FIG. 2, the workpiece W is suspended from the upper surface (suction surface) 2 a of the pad 2 by the ejected pressurized air.

On the other hand, by the vacuum suction from the vacuum hole 24 of the base 6 simultaneously with the introduction of the pressurized air, the workpieces W suspended on the surface (suction surface) of the pad are attracted from each of the porous pads 2. Hole 8 as arrow V Shown attracted. As a result, the workpiece W is fixed to a position away from the suction surface 2a upward by a predetermined distance G from the suction surface 2a in which the buoyancy generated by the pressurized air and the attractive force generated by the vacuum suction are balanced.

The interval of the suction holes 8 can be appropriately changed in a range of, for example, 25 to 8 mm. The smaller the interval, the higher the pickup accuracy. For example, when the interval is changed from 20mm to 12mm, the accuracy becomes 1.5 times.

The diameter of the small-diameter portion 8a of the suction hole 8 can be appropriately changed in a range of, for example, 0.8 to 0.1 mm. The smaller the diameter, the more accurate the pick-up accuracy. For example, if the diameter is changed from 0.6 mm to 0.3 mm, the accuracy will be 1.5 times.

The width of the groove (pressurized gas flow path) 14 having a rectangular cross section can be appropriately changed in a range of, for example, 8.0 to 1.0 mm. The smaller the width, the more accurate the pick-up accuracy. For example, if you change the width from 4.0mm to 2.0mm, the accuracy will be 1.5 times.

By changing the interval between the suction holes 8, the diameter of the small-diameter portion 8 a of the suction holes 8, and the width of the pressurized gas flow path 14 to the smaller values described above, the glass (workpiece) with a thickness of 0.1 mm is held by suction. The difference in the predetermined distance G becomes about 1/3 to 1/4, which improves the adsorption accuracy. Moreover, if it is a thin film having a thickness of 0.05 mm, the difference in the predetermined distance G at the time of suction holding becomes about 1/4 to 1/5.

When the non-contact suction device of the present invention is configured using the non-contact suction plate having such a structure, a robot arm or the like for moving the suspended workpiece W along the suction surface 2a can be added.

Next, a non-contact for a preferred aspect of the present invention The transport device will be described.

In the non-contact conveying device of the present invention, a non-contact suction plate having a basic structure such as the non-contact suction plate 1 is arranged in a workpiece conveying direction to form a conveying path, and a thin plate-like workpiece is formed on the conveying path. Suspend and suck, and transport the workpiece along the transport path using transport means such as a robot arm.

FIG. 3 is a diagram showing the arrangement of the non-contact chuck in the non-contact transfer device 30 according to the first embodiment of the present invention. The direction shown by the arrow A in FIG. 3 is the workpiece conveyance direction.

In the non-contact transfer device 30 of the first embodiment shown in FIG. 3, the first non-contact suction tray 32 upstream of the transfer direction and the second non-contact downstream of the transfer direction are arranged in a contact state along the transfer direction. Contact the suction plate 34.

The first and second non-contact suction pads 32 and 34 have the same structure as the non-contact suction pad 1 described above, and suction holes 8 are formed in the uppermost porous pad 2 in a square grid shape. In addition, as shown by a dotted line on the porous pad 2 (the same applies to the drawings of other embodiments hereinafter), a grid-shaped pressurized gas flow path 14 is formed in the pad holder below the porous pad 2.

In this embodiment, the pressurized gas flow path 14 of the first and second non-contact chucks 32 and 34 is in a contact portion (connection area) where the first and second non-contact chucks 32 and 34 contact each other. The end wide direction flow path 36 is arranged to extend along the sides (that is, the width direction of the direction orthogonal to the conveying direction) of the first and second non-contact suction pads 32 and 34 facing each other.

In addition, in each of the first and second non-contact suction pads 32 and 34, the distance d1 between the suction holes 8, 8 provided on the side closest to the contact portion is set to be longer than the first and second non-contact suction pads. The distance d2 between the suction holes in the suction pads 32 and 34 is longer.

According to this structure, the interval between the suction holes 8 in the connection portion between the first and second non-contact suction pads 32 and 34 is larger than the interval between the other portions, and the grid-shaped pressurized gas flow path 14 is arranged. The end flow path 36 extending in the wide direction is the end. Therefore, when moving from the first non-contact chuck 32 to the second non-contact chuck 34, the workpiece, especially the front end of the workpiece, largely floats.

Fig. 4 is a view showing the arrangement of the non-contact suction pads 32 'and 34' in the non-contact transfer device 30 'according to a modification of the first embodiment. In addition, in FIG. 4, a direction indicated by an arrow A is also a workpiece conveyance direction.

The non-contact transfer device 30 'shown in FIG. 4 is separated from the first non-contact suction plate 32' on the upstream side in the transfer direction and the second non-contact suction plate 34 'on the downstream side in the transfer direction by a predetermined distance along the transfer direction. Other than the arrangement, it has the same structure as the non-contact transfer device 30.

In addition, in the present specification, a state in which they are arranged apart from each other by a predetermined distance in the conveying direction is also included in a “connected” aspect.

In this structure, when moving from the first non-contact chuck 32 'to the second non-contact chuck 34', the workpiece, especially the leading end of the workpiece, also largely floats. Therefore, it can be effectively applied to the structure of a device or the like in which a sensor or the like is arranged at or below the gap between the first non-contact chuck 32 'and the second non-contact chuck 34'.

Fig. 5 is a diagram showing the arrangement of a non-contact chuck in a non-contact transfer device 40 according to a second embodiment of the present invention. The direction indicated by the arrow A in FIG. 5 is the workpiece conveyance direction.

In the non-contact conveying device 40 of the second embodiment shown in FIG. 5, the first non-contact suction plate 42 on the upstream side in the conveying direction and the second non-contact suction plate 44 on the downstream side in the conveying direction are along the conveying direction. Arranged in contact.

The first and second non-contact chucks 42 and 44 have the same structure as the non-contact chuck 1 described above, and suction holes 8 are formed in the uppermost porous pad 2 in a square grid shape. In addition, as shown by a dotted line on the porous pad 2, a grid-like pressurized gas flow path 14 is formed in the pad holder below the porous pad 2.

In this embodiment, the pressurized gas flow path 14 of the first and second non-contact chucks 42 and 44 is in a contact portion (connection area) where the first and second non-contact chucks 42 and 44 are in contact with each other. A terminal wide direction flow path 46 arranged to extend in the wide direction is used as a terminal.

In addition, in this embodiment, the width of the end flow path 46 is set to about 4 mm, which is narrower than other parts of the pressurized gas flow path 14.

Fig. 6 is a view showing the arrangement of the non-contact suction plates 42 'and 44' in the non-contact transfer device 40 'according to a modification of the second embodiment. In addition, in FIG. 6, a direction indicated by an arrow A is also a workpiece conveyance direction.

The non-contact transfer device 40 'shown in FIG. 6 is apart from the first non-contact suction plate 42' on the upstream side in the transfer direction and the second non-contact suction plate 44 'on the downstream side in the transfer direction. Other than the arrangement, it has the same structure as the non-contact transfer device 40.

According to this structure, when moving from the first non-contact chuck 42 'to the second non-contact chuck 44', the tip of the workpiece is lifted upward, and then formed on the first and second non-contact chucks. The gap between the suction pads 42 ′ and 44 ′ is pushed downward due to its own weight, so it can be transferred to the second non-contact suction pad 44 ′ while maintaining the height position.

Fig. 7 is a diagram showing the arrangement of a non-contact chuck in a non-contact transfer device 50 according to a third embodiment of the present invention. The direction indicated by the arrow A in FIG. 7 is the workpiece conveyance direction.

In the non-contact transfer device 50 according to the third embodiment shown in FIG. 7, the first non-contact suction tray 52 on the upstream side in the transfer direction and the second non-contact suction tray 54 on the downstream side in the transfer direction follow the transfer direction. The contact states are arranged.

The first and second non-contact chucks 52 and 54 have the same structure as the non-contact chuck 1 described above, and suction holes 8 are formed in the uppermost porous pad 2 in a square grid shape. In addition, as shown by a dotted line on the porous pad 2, a grid-like pressurized gas flow path 14 is formed in the pad holder below the porous pad 2.

In the present embodiment, the grid-shaped pressurized gas flow path of the holder of the first non-contact chuck 52 on the upstream side in the conveying direction is at the contact portion where the first and second non-contact chucks 52 and 54 contact each other. In the (connection region), the end wide direction flow path 56 arranged so as to extend in the wide direction is terminated.

In addition, the grid-like pressurized gas flow path of the holder of the second non-contact chuck 54 on the downstream side in the conveying direction is at a contact portion (connection between the first and second non-contact chucks 52 and 54 that is in contact with each other) In the area), the end conveyance direction flow path 58 extending in the conveyance direction is terminated.

When the first and second non-contact chucks 52 and 54 are arranged in contact with each other in the state shown in FIG. The distance d3 between the suction holes 8 and 8 on the side is set to be equal to the distance between the suction holes adjacent in the first and second non-contact suction plates 52 and 54.

According to this structure, the suction holes 8 are provided at substantially equal intervals from the first non-contact suction plate 52 to the second non-contact suction plate 54, and the suction holes 8 are alternately arranged with a wide-direction pressurized gas flow path. Therefore, the workpiece can be transferred from the first non-contact chuck 52 to the second non-contact chuck 54 while maintaining the height position.

Fig. 8 is a view showing the arrangement of the non-contact chucks 52 'and 54' in the non-contact transfer device 50 'according to a modification of the third embodiment. In addition, in FIG. 8, a direction indicated by an arrow A is also a workpiece conveyance direction.

The non-contact transfer device 50 'shown in FIG. 8 includes the first non-contact suction plate 52' and the second non-contact suction plate 54 'arranged along the conveyance direction by a predetermined distance, and is equipped with the non-contact transfer device 50' shown in FIG. The non-contact transfer device 50 has the same structure.

Fig. 9 is a diagram showing the arrangement of the non-contact chucks 62 and 64 in the non-contact transfer device 60 according to the fourth embodiment of the present invention. The direction shown by the arrow A in FIG. 9 is the workpiece conveyance direction.

In the non-contact transfer device 60 according to the fourth embodiment shown in FIG. 9, the first non-contact suction plate 62 and the second non-contact suction plate 64 are arranged in a contact state along the transfer direction.

The first and second non-contact chucks 62, 64 are provided above The non-contact chuck 1 has the same structure, and suction holes 8 are formed in the uppermost porous pad 2 in a square grid shape. In addition, as shown by a dotted line on the porous pad 2, a grid-like pressurized gas flow path 14 is formed in the pad holder below the porous pad 2.

In this embodiment, in the first and second non-contact suction pads 62 and 64, the suction hole and the wide-direction pressurized gas flow path are on one side of the wide direction (that is, a direction orthogonal to the conveying direction) ( The lower side in FIG. 9) and the other side (upper side in FIG. 9) are arranged so as to be shifted by a half pitch in the conveying direction.

Furthermore, in this embodiment, the grid-shaped pressurized gas flow path of the pad holder of the first non-contact suction pad 62 is on one side (lower side in FIG. 9) extending in the width direction. The partial width direction flow path 66 is a terminal, and the other side (upper side in FIG. 9) of the width direction is terminated by an end conveyance direction flow path 68 extending in the conveyance direction.

That is, in this embodiment, the grid-shaped pressurized gas flow path of the pad holder of the first non-contact suction pad 62 is on one side in the wide direction (the lower side in FIG. 9) with a closed rectangular portion as The terminal is terminated on the other side in the wide direction (upper side in FIG. 9) with a rectangular portion opened toward the downstream side in the conveying direction.

As a result, in the first non-contact suction pad 62, the pressurized gas flow paths are arranged in a staggered manner.

Furthermore, in this embodiment, the grid-shaped pressurized gas flow path of the holder of the second non-contact chuck 64 is on one side (lower side in FIG. 9) extending in the transport direction in the width direction. The flow direction 68 in the partial conveying direction is the end, and the other side in the wide direction (the upper side in FIG. 9) is in the wide direction. The extended end wide direction flow path 66 is a terminal.

That is, in this embodiment, the grid-shaped pressurized gas flow path of the pad holder of the second non-contact suction pad 64 is on one side in the wide direction (upper side in FIG. 9) with the closed rectangular portion as an end. The other side in the wide direction (lower side in Fig. 9) is terminated by a rectangular portion that is open toward the upstream side in the conveying direction.

As a result, in the second non-contact suction pad 64, the pressurized gas flow paths are also arranged in a staggered manner.

Furthermore, in the present embodiment, the first non-contact chuck disc 62 and the second non-contact chuck disc 64 are arranged so as to be relatively complementary to each other as shown in FIG. arrangement.

That is, the closed rectangular portion of the pressurized gas flow path of the first non-contact chuck disc 62 on the upstream side is along the conveying direction, and the pressurized gas flow path of the second non-contact chuck disc 64 on the downstream side The rectangular portions that are open toward the upstream side in the conveying direction are neatly arranged. Further, the rectangular portion of the pressurized gas flow path of the first non-contact chuck disc 62 on the upstream side that is open toward the downstream side of the conveyance direction is pressed along the transport direction to press the second non-contact chuck disc 64 on the downstream side. The closed rectangular sections of the gas flow path are arranged neatly.

According to this structure, in the connection portion of the first and second non-contact suction pads 62 and 64, the suction holes and the pressurized gas flow path in the wide direction are arranged at equal intervals, so that the workpiece can be maintained at a high position. In the state, the first non-contact chuck 62 is transferred to the second non-contact chuck 64.

Fig. 10 is a diagram showing the arrangement of the non-contact suction pads 62 'and 64' in the non-contact transfer device 60 'according to a modification of the fourth embodiment. In addition, in FIG. 10, the direction shown by the arrow A is also the workpiece conveyance direction.

The non-contact transfer device 60 'shown in FIG. 10 is separated from the first non-contact suction plate 62' on the upstream side in the transfer direction and the second non-contact suction plate 64 'on the downstream side in the transfer direction by a predetermined distance along the transfer direction. Other than the arrangement, it has the same structure as the non-contact transfer device 60.

In this structure, the suction holes and the wide-direction pressurized gas flow paths can be arranged at equal intervals in the connection portions of the first and second non-contact suction pads 62 'and 64', so that the workpiece can be maintained In the state of the height position, it is transferred from the first non-contact chuck 62 'to the second non-contact chuck 64'.

11 and 12 are diagrams showing other arrangement examples of the non-contact chuck in the non-contact transfer device.

The non-contact conveying device 70 of FIG. 11 arranges the long sides of the non-contact chucks along the conveying direction of the work, and arranges them in eight rows and two columns. In this structure, the rows of the non-contact chucks are separated from each other, and the relationship of the flow path of the pressurized gas in the conveying direction is the same as that shown in FIG. 4.

The non-contact conveying device 80 of FIG. 12 arranges the short sides of the non-contact chucks along the conveying direction of the work, and arranges them in two rows and four columns. In this structure, the rows of the non-contact chucks are separated from each other, and the arrangement of the pressurized gas flow paths is the same as that shown in FIG. 4.

The non-contact transfer devices 70 and 80 shown in FIGS. 11 and 12 include a plurality of levitation devices 90 arranged above and below the non-contact chuck. The suspension device 90 has a structure that suspends a workpiece by pressurized air sprayed from a porous plate, for example.

In the non-contact transfer devices 70 and 80, the non-contact suction pads are arranged in a predetermined state by being fixed in a raft shape to a plurality of poles or fixed to a large substrate.

Among these non-contact transfer devices 70 and 80, other non-contact suction pads arranged in a contact state on the lateral side of some of the non-contact suction pads are attached to the side edges on the side of some non-contact suction pads. (The contact area on the lateral side), the pressurized gas flow path ends in a groove (wide groove) extending in a direction (W direction) orthogonal to the long-side direction of the non-contact chuck. This structure will be described using FIG. 13 as an example.

The structure shown in FIG. 13 includes sides of the non-contact suction plates 62 ′ and 64 ′ constituting the non-contact conveying device 60 ′ of FIG. 10, and the first and second additional non-contacts are arranged in a contact state. Structure for contact chucks 62 ", 64".

The first additional non-contact chucks 62 ", 64" disposed in contact with the non-contact chucks 62 ', 64' are in contact with the non-contact chucks 62 ', 64' on one side. In the region, the pressurized fluid groove (pressurized gas flow path) 14 terminates in a groove (wide-direction groove) 66 ″ extending in a direction (W direction) orthogonal to the conveying direction.

In addition, in the contact area on the other side of the first additional non-contact suction pads 62 ", 64", that is, the contact area with the second additional non-contact suction pads 62 ", 64", the pressurized fluid groove (Pressurized gas flow path) 14 terminates in a groove 68 "extending in the conveying direction.

Furthermore, the second additional non-contact chucks 62 ", 64" arranged on the other side of the first additional non-contact chucks 62 ", 64", In the contact area with one side, that is, the contact area with the first additional non-contact suction pads 62 ", 64", the pressurized fluid groove (pressurized gas flow path) 14 is oriented orthogonally to the conveying direction The groove (wide groove) 66 "extending in the direction (W direction) is the terminal.

On the other side of the second non-contact suction pads 62 "and 64", the pressurized fluid groove 14 is terminated with a groove 68 "extending in the conveying direction.

In this structure, the width (W direction) interval d4 of the suction holes 8 between adjacent non-contact suction plates is set to be approximately d5 from the width (W direction) of the suction holes 8 in the same non-contact suction plate. equal.

In other words, the first additional non-contact suction plate 62 ′ side suction hole 8 of the non-contact suction plate 62 ′ is in contact with the first additional non-contact suction plate 62 ″ arranged on the non-contact suction plate 62 ′. The wide direction (W direction) interval d4 between the suction holes 8 on the non-contact suction pad 62 'side is configured to be the wide direction (W direction) between the suction holes 8 in each of the non-contact suction pads 62', 62 ". The interval d5 is approximately equal.

Furthermore, the above-mentioned d4 and d5 which are equal to each other are also configured to be equal to the longitudinal direction interval d6 of the suction holes 8 adjacent to each other in the non-contact suction pad.

Next, a non-contact transfer device 90 according to a fifth embodiment of the present invention will be described.

FIG. 14 is a diagram showing the arrangement of the non-contact chucks 92 and 94 in the non-contact transfer device 90 according to the fifth embodiment of the present invention. The direction shown by the arrow A in FIG. 14 is the workpiece conveyance direction.

Non-contact transfer device 90 according to the fifth embodiment shown in FIG. 14 Here, the first non-contact chuck disc 92 and the second non-contact chuck disc 94 are arranged in a state of being separated by a predetermined distance along the conveyance direction.

The first and second non-contact chucks 92 and 94 have the same basic structure as the non-contact chuck 1 described above. The pad holder 4 below the porous pad 2 is formed with a grid-shaped pressurized gas flow path 14 as shown by a dotted line on the porous pad 2, and the first and second non-contact suction pads 92 and 94 are formed. Similar to the non-contact chuck 1 described above, a plurality of suction holes 8 formed in a porous pad are provided.

The difference from the above-mentioned non-contact chuck 1 is that the first and second non-contact chucks 92 and 94 are provided with separate pressurized gas flow path 14 in addition to the pressurized gas flow path 14. The pressurized gas flow path 96; and an independent suction hole 98 formed to form a suction state different from the suction hole 8.

These points are explained in detail below.

As described above, among the first and second non-contact chucks 92 and 94 used in the non-contact transfer device of the fifth embodiment, the independent pressurized gas flow path 96 is in contact with the other non-contact chuck 94 The edge part on the side of connection of 92 and 92 is formed so as to extend orthogonally to the conveyance direction A. Specifically, in the first and second non-contact chucks 92 and 94, each of the independent pressurized gas flow paths 96 is provided in a connection area with other non-contact chucks 94 and 92, and the pressurized gas flows The end (front end) side of the terminal portion of the path 14.

Each of the independent pressurized gas flow paths 96 is separated from the groove 14 as shown in FIG. 15, that is, the independent gas supply grooves 96 formed in the pad holder 4 in a state where they are not in communication with the pressurized gas flow path 14. Composition (Figure 15 (In order to clearly show the independent air supply groove 96, other structures in the non-contact suction plate 92 are omitted). As a result, a separate pressurized gas flow path 96 can be supplied with a pressurized fluid having a flow rate and a pressure different from those of the pressurized gas flow path 14.

In addition, among the first and second non-contact suction pads 92 and 94 used in the non-contact transfer device of the fifth embodiment, the suction is arranged on the side connected to the other non-contact suction pads 94 and 92. The hole is configured as an independent suction hole 98 different from the suction state of the other suction holes 8. Specifically, among the first and second non-contact suction pads 92 and 94, the suction holes located closest to the other non-contact suction pads 94 and 92 (front end side) are configured as independent suction holes 98.

Each of the independent suction holes 98 communicates with a suction groove 100 different from the base groove 22 of the base 6 to which each suction hole 8 communicates, as shown in FIG. 15 (in FIG. 15, in order to clearly show the independent suction holes 98. Attract the groove 100, and omit other structures in the non-contact chuck 94.). As a result, the independent suction hole 98 can be set to a suction state different from the other suction holes 8.

According to this structure, a suction state different from the other regions can be achieved in the connection region between the two non-contact suction pads 92 and 94 arranged in series in the conveying direction. Therefore, by appropriately adjusting the supply state of the pressurized gas to the pressurized gas flow path 14 and the independent pressurized gas flow path 96, and the suction states of the suction holes 8 and the independent suction holes 98, it is possible to smoothly perform the two non-contacts. Transfer of thin-plate-like workpieces between the chucks 92 and 94 and the like.

In the non-contact suction pads 92 and 94 used in the non-contact transfer device of the fifth embodiment, the independent pressurized gas flow path 96 is located on the edge of the side connected to the other non-contact suction pads 94 and 92. The part is formed to extend orthogonally to the conveying direction A. However, the non-contact transfer device of the present invention The structure of the independent pressurized gas flow path 96 of the non-contact chuck used is not limited to this.

For example, as shown in FIG. 16, a structure in which an independent pressurized gas flow path 102 is provided so as to extend over the entire periphery of the non-contact chuck, or as shown in FIG. 17, The structure of the pressurized gas flow path 104 is provided so as to extend on both sides of the contact pad.

In the structure of FIG. 17, the buoyancy of both side edges of the workpiece can be controlled independently. Therefore, by relatively reducing or increasing the buoyancy on both sides of the workpiece, the workpiece can be formed into a convex or concave shape in a direction orthogonal to the conveying direction, and can be held in a non-contact state by suction.

Furthermore, as shown in FIG. 18, a structure in which an independent pressurized gas flow path 106 is provided so as to extend in the long-side direction at the center of the wide direction of the non-contact suction pad, or as shown in FIG. 19 As shown in the figure, a rectangular independent pressurized gas flow path 108 is provided at the center in the wide direction of the front-end region of the non-contact chuck.

In the structure of FIG. 18, the buoyancy of the center portion in the width direction of the workpiece can be independently controlled. Therefore, by relatively increasing or reducing the buoyancy of the central portion in the width direction of the workpiece, the workpiece can be formed in a convex or concave shape in a direction orthogonal to the conveying direction, and can be held in a non-contact state by suction.

Furthermore, the structure shown in FIG. 17 and the structure shown in FIG. 18 may be combined to provide: independent pressurized gas flow paths extending along both side edges of the non-contact suction pad; Non-contact suction pad with independent pressurized gas flow path extending in the long side direction.

These independent pressurized gas flow paths 102, 104, 106, 108 Similarly to the independent pressurized gas flow path 100, the pad holder 4 is configured by an independent gas supply groove formed in a state separated from the groove 14, that is, not in communication with the pressurized gas flow path 14.

In the embodiment shown in Figs. 16 to 19, it is preferable that the suction holes arranged around the independent pressurized gas flow path are independent suction holes.

According to this structure, in a region where an independent pressurized gas flow path and an independent suction hole are formed, a suction state different from other regions can be achieved.

The non-contact chuck used in the non-contact transfer device of each of the embodiments of the present invention and its modification may be used alone as a non-contact chuck for holding a workpiece in a non-contact state.

Next, other non-contact chucks of the present invention will be described.

Fig. 20 is a schematic plan view showing a non-contact chuck 120 according to another aspect of the present invention. The outer shape of the non-contact chuck 120 shown in FIG. 20 is circular, but has the same basic structure as the non-contact chuck 1 described above, and includes a porous pad 122, a pad holder, and a base 6. The non-contact chuck 120 sucks a thin-plate-shaped workpiece in a non-contact manner in the same manner as the non-contact chuck 1 described above, but is used alone as a thin-plate-shaped workpiece suction holding device.

The non-contact suction pad 120 also has a suction hole 124 formed in the porous pad 122 similarly to the suction hole 8 of the non-contact suction pad 1. In addition, the same pressurized gas as the pressurized gas flow path 14 of the non-contact chuck 1 is provided. Flow path 126. In addition, in the non-contact chuck 120, as shown by a dotted line on the porous pad, the pressurized gas flow path 126 is integrally formed of a ring-shaped and radial portion.

The non-contact suction pad 120 is provided with a ring-shaped independent pressurized gas flow path 128 that is separated from the pressurized gas flow path 126 at a peripheral portion of the pad holder. The independent pressurized gas flow path 128 is similar to the independent pressurized gas flow path 96 of the fifth embodiment in that it does not communicate with the pressurized gas flow path 126 and is configured to be capable of supplying a pressure different from that supplied to the pressurized gas flow path 126. Pressurized gas such as the flow rate and pressure of the gas.

As a result, by using the non-contact suction plate 120 to hold and hold a round workpiece, it is only possible to relatively strengthen or weaken the attraction of the outer edge of the workpiece, and to hold and hold the workpiece in a convex or concave shape in a non-contact manner. .

In the non-contact chuck 120, the suction holes 124 all form the same suction state. However, as in the fifth embodiment, a part of the suction holes may be used as a structure of independent suction holes.

FIG. 21 is a diagram showing a non-contact chuck 130 of a modified example of the non-contact chuck 120 in another aspect of the present invention.

The non-contact chuck 130 shown in FIG. 21 is different from the non-contact chuck 120 in that the pressurized gas flow path 126 integrally formed in the non-contact chuck 120 is divided into the first part of the central part. The pressurized gas flow path 132 and the second pressurized gas flow path 134 in the radial middle portion can be respectively supplied with pressurized gas having different flow rates and pressures.

In addition, the suction hole is also configured as a first suction hole 136 at the center portion, a second suction hole 138 at the radial middle portion, and a radially outer portion. Each of the third suction holes 140 is in an independent suction state.

According to this structure, the suction holding state of the workpiece can be optimized by appropriately adjusting the supply state of the pressurized gas to each of the pressurized gas flow paths and the suction state from each suction hole.

It is not limited to the aforementioned embodiment of the present invention, and various changes and modifications can be made within the scope of the technical idea described in the scope of patent application.

In addition, in the above embodiment, pressurized air is used as the pressurized fluid, but other fluids that are pressurized, such as water, oil, nitrogen, argon, etc. may be used instead of pressurized air.

Claims (20)

A non-contact conveying device that sucks and transports a thin plate-like workpiece in a non-contact state. The non-contact conveying device includes first and second non-contact chucks arranged along the conveying direction. The second non-contact suction pads each include a rectangular porous pad in which a plurality of suction holes extending in a thickness direction are arranged in a grid pattern, and a rectangular holder is connected to the back surface of the porous pad, and A grid-shaped pressurized gas flow path is formed on the surface, and a plurality of island-shaped portions arranged in a grid shape divided by the pressurized gas flow path are provided in correspondence with the suction holes and penetrate the islands in a thickness direction. When the communication hole extending in the shape portion is connected to the porous pad, the top surface of the island-shaped portion is in close contact with the back surface of the porous pad in a state where the communication hole communicates with the suction hole of the porous pad. The grid-like pressurized gas flow path of the holder of the first non-contact chuck disposed upstream of the conveying direction is connected to the second non-contact suction duct arranged on the downstream side of the conveying direction. Width direction end portion of the connecting area contact disc sorbent, at least a portion arranged in the conveyance direction toward the perpendicular to the flow passage extending in the terminal. The non-contact transfer device according to item 1 of the scope of patent application, wherein the grid-shaped pressurized gas flow path of the holder of the second non-contact chuck is connected to the first non-contact chuck. At least a part of the area is terminated by an end-portion-direction flow path arranged to extend toward the aforementioned transport direction. The non-contact transfer device according to item 1 of the scope of patent application, wherein the grid-shaped pressurized gas flow path of the holder of the first non-contact chuck is connected to the second non-contact chuck. At least a part of the area is terminated by an end-portion-direction flow path arranged to extend toward the aforementioned transport direction. The non-contact transfer device according to item 1 of the scope of patent application, wherein the grid-shaped pressurized gas flow path of the holder of the second non-contact chuck is connected to the first non-contact chuck. At least a part of the area is terminated by an end-wide flow path that is arranged to extend orthogonally to the conveying direction. The non-contact transfer device according to item 1 of the scope of patent application, wherein the grid-shaped pressurized gas flow path of the holder of the first non-contact chuck is connected to the second non-contact chuck. At least a part of the area is terminated by an end-wide flow path that is arranged to extend orthogonally to the conveying direction. The non-contact conveying device according to item 1 of the scope of the patent application, wherein the grid-shaped pressurized gas flow path of the holders of the first and second non-contact chucks includes: a rectangular shape that is arranged alternately with a lock The portion is a terminal portion, and the open rectangular portion is a terminal portion. The first and second non-contact absorbing disks are arranged as one open rectangular portion of the pressurized gas flow path of one non-contact absorbing disk. Along the conveying direction, the closed rectangular portions of the pressurized gas flow path with respect to the other non-contact chuck are neatly arranged. The non-contact transfer device according to any one of claims 1 to 6, wherein the holder of the first non-contact chuck is provided with an independent pressurized gas flow separate from the pressurized gas flow path. road. The non-contact transfer device according to item 7 of the scope of patent application, wherein the independent pressurized gas flow path of the first non-contact chuck is located in a connection area with the second non-contact chuck, and is provided in The side edge side of the terminal portion of the pressurized gas flow path. The non-contact transfer device according to any one of claims 1 to 6, wherein the holder of the second non-contact chuck is provided with an independent pressurized gas flow separate from the pressurized gas flow path. road. The non-contact transfer device according to item 9 of the scope of patent application, wherein the independent pressurized gas flow path of the second non-contact chuck is located in a connection area with the first non-contact chuck, and is provided in The side edge side of the terminal portion of the pressurized gas flow path. The non-contact conveying device according to any one of claims 1 to 6, wherein the porous pad is provided with an independent suction hole formed in a suction state different from the suction hole. The non-contact conveying device according to item 11 of the scope of patent application, wherein the independent suction hole is arranged in a connection area between one non-contact chuck and the other non-contact chuck. The non-contact transfer device according to any one of claims 1 to 6, in which the aforementioned first and second non-contact chucks are arranged in contact with each other. The non-contact conveying device according to any one of claims 1 to 6, wherein the first and second non-contact chucks are disposed separately from each other. A non-contact chuck for absorbing a thin plate-like workpiece in a non-contact state. The non-contact chuck includes a rectangular porous pad, and a plurality of suction holes extending through the thickness pad. The device is connected to the back surface of the porous pad, and a pressurized gas flow path and a plurality of island-shaped portions divided by the pressurized gas flow path are formed on the surface. The communication hole extending through the island-like portion in the thickness direction and connected to the porous pad is in a state where the communication hole communicates with the suction hole of the porous pad, and the top surface of the island-like portion is in close contact with the porous hole. On the back surface of the mass pad, the retainer further has an independent pressurized gas flow path formed on the surface and separated from the pressurized gas flow path. The non-contact chuck according to item 15 of the scope of the patent application, wherein the independent pressurized gas flow path is arranged adjacent to an edge of the non-contact chuck. The non-contact chuck according to item 15 or 16 of the scope of patent application, wherein the porous pad is provided with an independent suction hole formed in a suction state different from the suction hole. The non-contact chuck according to item 15 or 16 of the scope of the patent application, wherein the independent pressurized gas flow paths are formed in a plurality, and each of the independent pressurized gas flow paths is separated from each other. A non-contact conveying device, which is characterized by having a non-contact chuck as described in item 15 or 16 of the scope of patent application. A non-contact conveying device is characterized by having a plurality of non-contact chucks as described in item 16 of the patent application range, wherein the non-contact chucks arranged adjacently are arranged so that the edges are adjacent to each other.