JP2016121015A - Non-contact transport device and non-contact adsorption disk - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a non-contact adsorption disk which can finely control a non-contact adsorption state of a work-piece.SOLUTION: A non-contact transport device 30 which adsorbs and transports a thin plate-like work-piece in a non-contact state is equipped with first and second non-contact adsorption disks 32, 34. The non-contact adsorption disk is equipped with: a porous pad provided with plural vacuum holes which penetrate and extend in a thickness direction; and a holder which is connected to a rear face of the porous pad, on a surface of which a pressurized gas flow channel and plural island-like parts partitioned by the pressurized gas flow channel are formed, which is equipped with a continuous hole penetrating the island-like part in a thickness direction, and in which a top face of the island-like part is stuck to the rear face of the porous pad in the state the continuous hole is communicated with the vacuum hole when the holder is connected to the porous pad. A lattice-like pressurized gas flow channel 14 in the holder of an upstream side non-contact adsorption disk terminates in an end part width direction flow channel in which at least a portion in a region connected to a downstream side non-contact adsorption disk extends in a direction orthogonal to a transportation direction.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a non-contact conveyance device and a non-contact suction disk, and more specifically, a non-contact conveyance device that conveys a thin plate-like workpiece in a non-contact state, and adsorbs a thin plate-like workpiece in a non-contact state. It relates to a non-contact suction board.

  As a non-contact suction device that floats and handles a thin workpiece such as a semiconductor wafer, a glass substrate for FPD, etc., the floating stage of Cited Document 1 is known. In this levitation stage, the workpiece is floated on the porous plate and conveyed by simultaneously performing the floating of the workpiece with pressurized air and the non-contact adsorption of the workpiece by suction on the surface of the porous plate.

  Moreover, the non-contact suction disk of the cited reference 2 is known as another non-contact suction apparatus. This non-contact adsorption disk realizes non-contact adsorption on the surface of the porous plate by simultaneously ejecting pressurized air and sucking and holding the thin plate-like workpiece while floating on the porous plate.

  Since these non-contact suction devices and non-contact suction boards can be lifted and transported or held without damaging the thin plate-like workpiece, the thin plate-like workpiece such as the glass substrate for FPD is processed. This is an effective device.

JP 2007-27495 A Japanese Patent No. 5512052

  The floating stage (non-contact conveyance device) described in Patent Document 1 conveys a thin plate-like workpiece such as an LCD glass substrate, but has a short conveyance distance and is formed by a single porous plate. Yes. For this reason, when a thin plate workpiece is transported over a long distance using the above-described levitation stage or a thin plate workpiece having a large size is transported, a plurality of porous plates are continuously provided in the transport direction. Must be placed side by side.

  However, in such a configuration, when the workpiece is transferred from the upstream porous plate to the downstream porous plate, the tip of the workpiece is connected at the connection portion of the two porous plates arranged in the transport direction. May be displaced downward.

  Such downward displacement may cause problems such as deformation of the work itself, and the work being unable to smoothly transfer onto the downstream porous plate. In particular, such a problem is remarkable in a very thin workpiece having a thickness of less than 0.5 mm.

  Further, as described above, the non-contact suction disk described in Patent Document 2 holds a thin plate-like workpiece such as an LCD glass substrate while floating on a porous plate.

  However, the above-described non-contact suction disk cannot change the ejection pattern of pressurized air ejected from the surface of the porous plate. That is, it is not possible to locally change the state of the pressurized air ejected from the porous surface. For this reason, it was only possible to float the thin plate workpiece in the same state. Specifically, for example, the same thin plate-like workpiece could not be lifted and held in different shapes such as a flat plate shape, a convex shape, or a concave shape.

  That is, in a non-contact suction device such as a non-contact conveyance device or a non-contact suction board according to the prior art, the non-contact suction state of the workpiece cannot be finely controlled.

  The present invention has been made in view of the above points, and an object thereof is to provide a non-contact suction device such as a non-contact conveyance device and a non-contact suction disk that can finely control a non-contact suction state of a workpiece. And

  Specifically, the present invention has been made to solve the above-described problem, and has a structure in which a plurality of porous plates are continuously arranged in the transport direction, while the work is porous on the downstream side. It is an object of the present invention to provide a non-contact transfer device that can suppress the downward displacement of the tip portion of the workpiece when transferring to a plate.

  More specifically, another object of the present invention is to provide a non-contact suction disk that can locally change the jet state of pressurized air jetted from the surface of a porous pad.

According to the present invention,
A non-contact conveyance device that adsorbs and conveys a thin plate-like workpiece in a non-contact state,
Comprising first and second non-contact suction disks arranged along the transport direction;
Each of the first and second non-contact suction plates is
A rectangular porous pad in which a plurality of suction holes extending through in the thickness direction are arranged in a lattice pattern;
A rectangular holder connected to the back surface of the porous pad, the surface of which is a grid-like pressurized gas flow path, and a plurality of islands arranged in a grid shape partitioned by the pressurized gas flow path And a communication hole extending in the thickness direction through the island-shaped portion, and when connected to the porous pad, the island-shaped portion is A holder in which the top surface is in close contact with the back surface of the porous pad in a state where the communication hole communicates with the suction hole of the porous pad;
The grid-like pressurized gas flow path of the holder of the first non-contact suction disk disposed on the upstream side in the transport direction is in a connection region with the second non-contact suction disk disposed on the downstream side in the transport direction. , At least a portion terminates in an end width direction flow path arranged so as to extend in a direction orthogonal to the transport direction,
There is provided a non-contact conveyance device characterized by the above.

  According to such a configuration, the non-contact adsorption state of the workpiece can be finely controlled. More specifically, the pressurized gas flow path of the upstream non-contact suction plate has an end width direction flow arranged so as to extend in a direction orthogonal to the transport direction in the connection region with the downstream non-contact suction plate. It ends on the road. For this reason, when the thin plate-like workpiece is transferred from the first non-contact suction disk to the second non-contact suction disk, the porous pad in the connection region is connected from the end width direction flow path of the first non-contact suction disk. The workpiece is pushed upward by the high-pressure gas that is fed into the pores and ejected from the porous pad in the connection region, so that the height of the workpiece can be controlled appropriately.

According to another preferred embodiment of the invention,
The grid-like pressurized gas flow path of the holder of the second non-contact suction disk has an end arranged so that at least a part thereof extends in the transport direction in the connection region with the first non-contact suction disk It terminates in the part conveyance direction flow path.

  According to such a configuration, in the second non-contact suction disk, the amount of the pressurized gas ejected from the surface of the porous pad is the transport direction of the first non-contact suction disk in the most upstream portion in the transport direction. Since it becomes smaller than the amount of jet of pressurized gas in the most downstream part, it is controlled that the workpiece | work which transferred to the 2nd non-contact adsorption | suction board is lifted up too much.

According to another preferred embodiment of the invention,
The grid-like pressurized gas flow path of the holder of the first non-contact suction disk is arranged such that at least a part thereof extends in the transport direction in the connection region with the second non-contact suction disk. It terminates in the part conveyance direction flow path.

  According to such a configuration, in the first non-contact suction disk, the amount of the pressurized gas ejected from the surface of the porous pad is the transport direction of the second non-contact suction disk in the most downstream portion in the transport direction. Since the amount of the pressurized gas ejected in the most upstream portion is smaller, the tip of the workpiece that is transferred to the second non-contact suction disk is prevented from being lifted excessively.

According to another preferred embodiment of the invention,
The grid-like pressurized gas flow path of the holder of the second non-contact suction disk is arranged so that at least a part thereof extends perpendicular to the transport direction in the connection region with the first non-contact suction disk. It is terminated at the end width direction flow path.

According to another preferred embodiment of the invention,
The grid-like pressurized gas flow path of the holder of the first non-contact suction disk is arranged so that at least a part thereof extends perpendicular to the transport direction in the connection region with the second non-contact suction disk. It is terminated at the end width direction flow path.

According to another preferred embodiment of the invention,
The grid-like pressurized gas flow paths of the holders of the first and second non-contact suction cups are alternately arranged with portions that terminate in closed rectangular portions and portions that terminate in open rectangular portions. With
In the first and second non-contact adsorption plates, the rectangular portion of the one non-contact adsorption plate in which the pressurized gas flow path is opened is the rectangular shape in which the pressurized gas flow channel of the other non-contact adsorption plate is closed. It arrange | positions so that it may align in a conveyance direction to a part.

According to another preferred embodiment of the invention,
The holder of the first non-contact suction disk is provided with an independent pressurized gas channel separated from the pressurized gas channel.

According to another preferred embodiment of the invention,
The independent pressurized gas flow path of the first non-contact suction disk is provided on the side edge side of the terminal portion of the pressurized gas flow path in the connection region with the second non-contact suction disk.

  According to such a configuration, the flow rate and pressure of the pressurized air supplied to the independent pressurized gas channel can be set to values different from the flow rate and pressure of the pressurized gas supplied to the pressurized gas channel. Therefore, the flow rate of the pressurized gas ejected from the porous pad and the like can be independently controlled in the connection area with the second non-contact adsorption board.

According to the other preferable aspect of this invention The holder of the said 2nd non-contact adsorption | suction board is equipped with the independent pressurized gas flow path isolate | separated from the said pressurized gas flow path.

According to another preferred aspect of the present invention, the independent pressurized gas flow path of the second non-contact suction disk is connected to the first non-contact suction disk in the connection region with the terminal end of the pressurized gas flow path. It is provided on the side edge side.

  According to such a configuration, the flow rate and pressure of the pressurized air supplied to the independent pressurized gas channel can be set to values different from the flow rate and pressure of the pressurized gas supplied to the pressurized gas channel. Therefore, it becomes possible to independently control the flow rate of the pressurized gas ejected from the porous pad in the connection region with the first non-contact adsorption board.

According to the other preferable aspect of this invention The said porous pad is equipped with the independent suction hole used as the suction state different from the said suction hole.

According to another preferred embodiment of the invention,
The said independent suction hole is arrange | positioned in the connection area | region with the other non-contact suction disk of one non-contact suction disk.

According to another preferred embodiment of the invention,
The first and second non-contact suction disks are arranged in contact with each other.

According to another preferred embodiment of the invention,
The first and second non-contact suction disks are spaced apart.

  According to such a configuration, when transferring from the first non-contact suction disk to the second non-contact suction disk, the workpiece is pushed up with the tip upward, and then the first and second non-contact suction Since it is urged downward by its own weight in the gap formed between the boards, it is possible to transfer to the second non-contact suction board while maintaining the height position.

According to another aspect of the invention,
A non-contact suction disk that sucks a thin plate-like workpiece in a non-contact state,
A rectangular porous pad in which a plurality of suction holes extending through in the thickness direction are disposed;
A holder connected to the back surface of the porous pad, wherein a pressurized gas flow path and a plurality of island-like portions separated by the pressurized gas flow path are formed on the surface and aligned with the suction holes. Provided with a communication hole extending through the island-shaped portion in the thickness direction, and when connected to the porous pad, the island-shaped portion has the communication hole as a suction hole of the porous pad. A holder with a top surface in close contact with the back surface of the porous pad in communication,
The holder is further formed with an independent pressurized gas channel separated from the pressurized gas channel on the surface.
A non-contact suction disk is provided.

  According to such a configuration, the non-contact adsorption state of the workpiece can be finely controlled. Specifically, the pressure and / or flow rate of the pressurized air supplied in the pressurized gas channel and the pressure and / or flow rate of the pressurized air supplied to the independent pressurized gas channel are independently determined. can do. For this reason, it becomes possible to change the flow rate distribution of the pressurized air ejected from the surface of the porous pad. By changing the flow rate distribution, it is possible to hold a thin plate workpiece having the same shape in a flat plate shape, or hold it in a convex shape or a concave shape.

According to another preferred embodiment of the invention,
The independent pressurized gas flow path is disposed adjacent to an edge of the non-contact suction disk.

According to another preferred embodiment of the invention,
The porous pad includes independent suction holes that are in a suction state different from the suction holes.

According to another preferred embodiment of the invention,
A plurality of the independent pressurized gas flow paths are formed,
Each independently pressurized gas flow path is separated from each other.

  According to the other preferable aspect of this invention, the non-contact conveyance apparatus provided with the said non-contact suction disk is provided.

According to another preferred embodiment of the invention,
The non-contact suction discs arranged adjacent to each other are arranged so that the edges are adjacent to each other.

According to such a configuration,
Since the amount of pressurized air ejected from the surface of the porous pad can be controlled independently of other regions in the vicinity of the region where the non-contact suction disks are connected to each other, Variations in height, etc. that occur when transferring from one non-contact suction disk to the other non-contact suction disk adjacent thereto can be suppressed.

  ADVANTAGE OF THE INVENTION According to this invention, non-contact suction apparatuses, such as a non-contact conveyance apparatus and a non-contact suction board, which can finely control the non-contact suction state of a workpiece | work are provided.

  In addition, according to the present invention, when the workpiece is transferred to the porous plate on the downstream side, the downward displacement of the tip of the workpiece is reduced while the configuration in which a plurality of porous plates are continuously arranged in the conveyance direction is provided. A non-contact conveyance device that can be suppressed is provided.

  Furthermore, according to this invention, it aims at providing the non-contact adsorption | suction board which can change locally the ejection state of the pressurized air which ejects from the surface of a porous pad.

It is a disassembled perspective view of the non-contact suction disk used with the non-contact conveyance apparatus of preferable embodiment of this invention. It is typical sectional drawing for demonstrating the state of the adsorption | suction fixation (non-contact adsorption | suction) of the workpiece | work W by the non-contact adsorption | suction board of FIG. It is drawing which shows arrangement | positioning of the non-contact suction disk in the non-contact conveying apparatus of 1st Embodiment of this invention. It is drawing which shows arrangement | positioning of the non-contact suction disk in the non-contact conveying apparatus of the modification of 1st Embodiment. It is drawing which shows arrangement | positioning of the non-contact suction disk in the non-contact conveying apparatus of 2nd Embodiment of this invention. It is drawing which shows arrangement | positioning of the non-contact suction disk in the non-contact conveying apparatus of the modification of 2nd Embodiment. It is drawing which shows arrangement | positioning of the non-contact suction disk in the non-contact conveying apparatus of 3rd Embodiment of this invention. It is drawing which shows arrangement | positioning of the non-contact suction disk in the non-contact conveying apparatus of the modification of 3rd Embodiment. It is drawing which shows arrangement | positioning of the non-contact suction disk in the non-contact conveying apparatus of 4th Embodiment of this invention. It is drawing which shows arrangement | positioning of the non-contact suction disk in the non-contact conveying apparatus of the modification of 4th Embodiment. It is drawing which shows the example of arrangement | positioning of the non-contact suction disk in a non-contact conveying apparatus. It is drawing which shows the other example of arrangement | positioning of the non-contact suction board in a non-contact conveying apparatus. It is drawing which shows the other structural example of a non-contact conveying apparatus. It is drawing which shows the non-contact suction disk and arrangement | positioning in the non-contact conveying apparatus of 5th Embodiment of this invention. It is typical sectional drawing explaining the structure of the non-contact suction disk of 5th Embodiment. It is drawing which shows the modification of the non-contact suction disk in the non-contact conveying apparatus of 5th Embodiment of this invention. It is drawing which shows the other modification of the non-contact suction disk in the non-contact conveying apparatus of 5th Embodiment of this invention. It is drawing which shows the other modification of the non-contact suction disk in the non-contact conveying apparatus of 5th Embodiment of this invention. It is drawing which shows the other modification of the non-contact suction disk in the non-contact conveying apparatus of 5th Embodiment of this invention. It is a top view which shows the other non-contact suction disk of this invention. It is a top view which shows the other non-contact suction disk of this invention.

  Hereinafter, the structure of the non-contact suction disk used with the non-contact conveyance apparatus of preferable embodiment of this invention is demonstrated. FIG. 1 is an exploded perspective view of a non-contact suction disk used in a non-contact conveyance device according to a preferred embodiment of the present invention, and FIG. 2 is a suction and fixation (non-contact) of a workpiece W by the non-contact suction disk of FIG. It is typical sectional drawing for demonstrating the state of adsorption | suction.

  A non-contact suction disk used in a preferred embodiment of the present invention has a basic configuration similar to the non-contact suction disk described in International Publication WO2013 / 129599, and includes a semiconductor wafer, a glass substrate for FPD, and the like. It is suitable for non-contact adsorption of a thin plate-like workpiece, particularly a thin plate-like workpiece such as a glass plate for a liquid crystal display having a thickness of about 0.3 to 0.4 mm. It is also suitable for non-contact adsorption of extremely thin workpieces such as a glass plate having a thickness of about 0.1 mm and a film having a thickness of 0.05 mm.

  As shown in FIG. 1, the non-contact suction disk 1 holds a rectangular porous pad 2 having a non-contact suction area of a workpiece on the surface, and the porous pad 2 from the lower side (back side). A rectangular pad holder 4 and a rectangular base 6 connected to the back side of the holder 4 are provided.

The porous pad 2 is made of breathable porous carbon. The material of the porous pad 2 is not limited to breathable porous carbon, and other breathable porous materials such as porous SiC / porous alumina can also be used.
The permeation amount of the porous pad 2 is preferably about 0.4 to ² Nml / min / mm ² (when the thickness of the porous pad 2 is 5 mm and the pressure is 0.1 MPa).

  A plurality of suction holes 8 are formed in the porous pad 2. As shown in FIG. 1, the suction holes 8 are arranged in a lattice pattern over substantially the entire surface of the porous pad 2, that is, in a state of being arranged in the center of the grid. In the present embodiment, the interval between the suction holes 8 is set to about 25 mm.

  The suction hole 8 is formed to extend through each porous pad 2 in the thickness direction. In the present embodiment, the suction hole 8 has a small diameter portion 8a having a diameter of about 0.6 mm on the front surface side of the porous pad 2 and a large diameter portion having a diameter of about 4 mm on the back surface side of the porous pad 2. The small diameter portion 8 a and the large diameter portion 8 b are connected by a tapered portion that tapers toward the surface of the porous pad 2.

  With such a configuration, when the large-diameter portion 8b of the suction hole 8 is sucked under reduced pressure, air from the small-diameter portion 8a of the suction hole 8 opened to the surface side of the porous pad is sucked to form the suction hole 8 The surface area of the porous pad 2 is a non-contact adsorption / fixing area for non-contact adsorption / fixation of the workpiece.

  As described above, the pad holder 4 is a rectangular member that holds the porous pad 2 from the lower side (back side), and is formed of a metal material such as an aluminum alloy, for example. The pad holder 4 may be formed of a resin such as CFRP / PEEK.

  On the upper surface of the pad holder 4, a wall-like rising portion 12 is formed on the outer peripheral edge. The rising portion 12 is configured such that the inner dimension is slightly larger than the outer dimension of the porous pad 2 and the height is slightly lower than the thickness of the porous pad 2.

Therefore, when the porous pad 2 is disposed in the space (recessed portion) inside the rising portion 12 of the pad holder 4, the upper surface 2 a of the porous pad 2 is slightly more than the top surface of the rising portion 12 of the pad holder 4. It will be in the state arranged above.
The present invention may be configured without the rising portion 12.

Further, in the inner region of the upper surface (bottom surface of the concave portion) of the pad holder 4, a groove (pressurized gas flow path) 14 having a rectangular cross section (lattice-like grid shape) is formed, and the section is separated by the groove 14. These are island-shaped protrusions 16 having a substantially square cross section arranged in a square lattice pattern. The island-shaped protrusions 16 form a grid-like structure together with the grooves 14 arranged in a grid pattern (grid-like grid). The top surface of each protrusion 16 is flat, and a communication hole 18 that penetrates the pad holder 4 in the thickness direction is opened at the center.
In addition, the pressurized gas flow path comprised by the groove | channel 14 is connected integrally, and functions as one flow path as a whole.
In the present invention, the lattice mode is not limited to the square lattice in the above example. Furthermore, the cross-sectional shape of the island-shaped protrusions is not limited to a substantially square like the protrusions 16 and may be other rectangles, triangles, polygons, circles, and the like.

  The porous pad 2 and the pad holder 4 are bonded and fixed by an adhesive or the like in a state where the porous pad 2 is disposed in the space inside the rising portion 12 of the pad holder 4. In the configuration that does not include the rising portion 12, the porous pad 2 and the pad holder 4 are bonded and fixed by an adhesive or the like in a stacked state.

  When the porous pad 2 is disposed in the space inside the rising portion 12 of the pad holder 4, the protrusion 16 has a top surface at the opening end of the large diameter portion 8 b of the suction hole 8 on the back surface of the porous pad 2. It is comprised so that it may contact | abut to the surrounding area | region in an airtight state.

  As a result, when the porous pad 2 is fixed to the space inside the rising portion 12 of the pad holder 4 with an adhesive, the porous pad 2 is arranged in a lattice shape between the back surface of the porous pad 2 and the upper surface of the pad holder 4. A closed space (pressurized gas flow path) delimited by the groove 14 and the porous pad 2 covering the groove 14 is formed.

  The communication hole 18 has substantially the same diameter as the large diameter portion 8 b of the suction hole 8 of the porous pad 2, and the porous pad 2 is accommodated in a predetermined position in the space inside the rising portion 12 of the pad holder 4. In this case, the suction holes 8 formed in the porous pad 2 are arranged in the thickness direction.

  As a result, when the porous pad 2 is accommodated in the space inside the rising portion 12 of the pad holder 4, the suction hole 8 of the porous pad 2 and the communication hole 18 of the pad holder 4 are in fluid communication.

  The pad holder 4 is formed with a pressurized air inlet 20 for communicating the entire pressurized gas flow path formed by the groove 14 with the external space and introducing pressurized air into the pressurized gas flow path. ing.

  With such a configuration, when the pressurized air is introduced from the pressurized air inlet 20 in a state where the porous pad 2 is accommodated and fixed in the space inside the rising portion 12 of the pad holder 4, the introduced pressurized pressure is introduced. Air is supplied to the entire pressurized gas flow path, and the pressurized air penetrates into the pores of the porous pad 2 constituting the upper surface of the pressurized gas flow path, permeates through the porous pad 2 and is further porous. It will be ejected from the entire surface of the quality pad 2.

  At this time, in the surface portion of the porous pad 2 where the lattice-like grooves 14 (pressurized gas flow paths) are disposed below, there are more grooves 14 (pressurized gas flow paths) than the portions where the grooves 14 (pressurized gas flow paths) are not disposed below. Of pressurized air or high pressure of pressurized air is ejected.

  The base 6 is a rectangular member connected to the back side of the holder 4 and is formed of a metal material such as an aluminum alloy, for example. The base 6 can also be formed of a resin such as CFRP / PEEK.

  As shown in FIG. 1, the base 6 has substantially the same dimensions as the pad holder 4, and base grooves 22 having a rectangular cross section are formed in a lattice shape on a flat upper surface. Therefore, when the flat back surface of the pad holder 4 and the upper surface of the base 6 are joined, a lattice-shaped closed space is formed by the lattice-shaped base groove 22 and the back surface of the pad holder 4 covering the same. Become.

  The base groove 22 is arranged such that when the pad holder 4 and the base 6 are joined, the intersection of the lattice-like base groove 22 is aligned with the communication hole 18 formed in the pad holder 4 in the thickness direction. .

  With such a configuration, when the porous pad 2, the pad holder 4, and the base 6 are connected, the suction hole 8 of the porous pad 2 is connected to the base 6 and the pad holder via the communication hole 18 of the pad holder 4. 4 communicates with the intersection of the lattice-shaped closed space formed between the four.

  Further, a vacuum hole 24 that is a through hole for allowing the base groove 22 to communicate with a vacuum source outside the base 6 is formed on the outer periphery of the base 6.

With such a configuration, when vacuum suction is performed from the vacuum hole 24 in a state where the porous pad 2, the pad holder 4, and the base 6 are connected, the porous pad 2 is connected via the communication hole 18 of the pad holder 4. Suction is performed from each suction hole 8, and the work on the porous pad 2 can be sucked toward the porous pad 2.
Since each suction hole 8 communicates with the lattice-shaped closed space, the suction state of each suction hole is the same.

  The pad holder 4 and the base 6 are connected by a connecting tool such as a screw or a bolt. By forming a groove along the outer periphery of the upper surface of the base 6 and disposing an O-ring in the groove, the grid-like base groove 22 of the base 6 is closed, and the pad holder 4 and the base 6 are closed. Can be linked. Moreover, the structure which connects the pad holder 4 and the base 6 with an adhesive agent may be sufficient.

  When the non-contact suction disk having such a configuration is used, the compressed air is supplied from the pressurized air inlet 20 to the groove 14 and the porous pad 2 while the porous pad 2, the pad holder 4 and the base 6 are connected. The non-contact adsorption of the work to be adsorbed in a state where the work is floated on the porous pad 2 is performed by introducing into the pressurized gas flow path formed by the above and vacuum suction from the vacuum hole of the base 6 Can do.

  Next, non-contact adsorption will be described in detail with reference to FIG.

  As described above, when pressurized air is introduced from a compressed air source formed by the groove 14 of the pad holder 4 and the porous pad 2 and outside the pressurized gas flow path during use, the pressurized air becomes porous. It penetrates into the porous pad 2 through the pores of the pad 2 and is ejected from the surface 2a of the porous pad 2 as shown by an arrow P in FIG. The workpiece W floats up from the surface (suction surface) 2a of the pad 2 by the pressurized air ejected as shown by the arrow P in FIG.

  On the other hand, the workpiece W floating on the surface (suction surface) of the pad is sucked from each suction hole 8 of the porous pad 2 by the vacuum suction from the vacuum hole 24 of the base 6 performed simultaneously with the introduction of the pressurized air. , As indicated by arrow V. As a result, the workpiece W is fixed in a non-contact manner at a position away from the suction surface 2a where the buoyancy by the pressurized air and the suction force by the vacuum suction are balanced by a predetermined distance G.

  The interval between the suction holes 8 can be appropriately changed within a range of, for example, 25 to 8 mm. The narrower the interval, the better the adsorption accuracy. For example, if the interval is changed from 20 mm to 12 mm, the accuracy becomes 1.5 times.

  Further, the diameter of the small diameter portion 8a of the suction hole 8 can be appropriately changed within a range of, for example, 0.8 to 0.1 mm. The smaller the diameter, the better the adsorption accuracy. For example, if the diameter is changed from 0.6 mm to 0.3 mm, the accuracy becomes 1.5 times.

  Furthermore, the width of the groove (pressurized gas flow path) 14 having a rectangular cross section can be appropriately changed within a range of, for example, 8.0 to 1.0 mm. The smaller the width, the better the adsorption accuracy. For example, if the width is changed from 4.0 mm to 2.0 mm, the accuracy becomes 1.5 times.

  By changing the interval between the suction holes 8, the diameter of the small diameter portion 8 a of the suction hole 8, and the width of the pressurized gas flow path 14 to the above small values, the glass (workpiece) having a thickness of 0.1 mm is adsorbed and held. The variation of the predetermined distance G at this time was about 1/3 to 1/4, and the adsorption accuracy was increased. In addition, in the film having a thickness of 0.05 mm, the variation of the predetermined distance G when sucked and held was about 1/4 to 1/5.

  When the non-contact conveyance device of the present invention is configured using the non-contact suction disk having such a configuration, a robot hand or the like for moving the floated workpiece W along the suction surface 2a is added.

Next, the non-contact conveyance apparatus of the preferable aspect of this invention is demonstrated.
In the non-contact conveyance device of the present invention, a non-contact suction disk having a basic configuration like the non-contact suction disk 1 is arranged in the work conveyance direction to form a conveyance path, and a thin plate-like workpiece is placed on the conveyance path. The workpiece is floated and sucked, and the workpiece is transferred along the transfer path by a transfer means such as a robot hand.

FIG. 3 is a view showing the arrangement of the non-contact suction disk in the non-contact conveyance device 30 according to the first embodiment of the present invention. In addition, the direction shown by the arrow A in FIG.
In the non-contact conveyance device 30 of the first embodiment shown in FIG. 3, the first non-contact suction plate 32 on the upstream side in the conveyance direction and the second non-contact suction plate 34 on the downstream side in the conveyance direction include the conveyance direction. Are arranged in contact with each other.

  The first and second non-contact suction disks 32 and 34 have the same configuration as the non-contact suction disk 1 described above, and suction holes 8 are formed in a square lattice pattern in the uppermost porous pad 2. . Further, as indicated by a dotted line on the porous pad 2 (hereinafter, the same applies to the drawings of other embodiments), a grid-like pressurized gas flow path 14 is formed in the pad holder below the porous pad 2. Yes.

  In the present embodiment, the pressurized gas flow path 14 of the first and second non-contact suction disks 32, 34 is a contact portion (connection region) where the first and second non-contact suction disks 32, 34 contact each other. 2, the first and second non-contact suction disks 32, 34 are arranged so as to extend along the sides facing each other (that is, in the width direction that is a direction orthogonal to the transport direction). It terminates at 36.

  Further, in each of the first and second non-contact suction disks 32 and 34, the distance d1 between the suction holes 8 and 8 provided on the side closest to the contact portion is the first and second non-contact suction. It is set longer than the distance d2 between the suction holes in the panels 32 and 34.

  According to such a structure, the space | interval of the suction hole 8 in the connection part of the 1st and 2nd non-contact suction discs 32 and 34 is larger than the space | interval in another part, and also a grid | lattice-like pressurization Since the gas flow path 14 terminates in the end flow path 36 arranged so as to extend in the width direction, when transferring from the first non-contact transfer device 32 to the second non-contact transfer device 34, the workpiece, In particular, the tip of the workpiece will rise greatly.

  FIG. 4 is a view showing the arrangement of the non-contact suction disks 32 ′ and 34 ′ in the non-contact conveyance device 30 ′ according to the modification of the first embodiment. In addition, also in FIG. 4, the direction shown by arrow A is a workpiece conveyance direction.

4 includes a first non-contact suction disk 32 ′ on the upstream side in the transport direction and a second non-contact suction disk 34 ′ on the downstream side in the transport direction along the transport direction. The configuration is the same as that of the non-contact conveyance device 30 except that the arrangement is separated by a predetermined distance.
In this specification, the state of being arranged at a predetermined distance in the transport direction is also included in “connection”.

  Even in such a configuration, when transferring from the first non-contact transfer device 32 ′ to the second non-contact transfer device 34 ′, the workpiece, particularly the tip of the workpiece, rises greatly. For this reason, it is effective for a configuration in which a device such as a sensor is disposed below or below the gap at the boundary between the first non-contact conveyance device 32 'and the second non-contact conveyance device 34'.

FIG. 5 is a view showing the arrangement of the non-contact suction disk 40 in the non-contact conveyance device according to the second embodiment of the present invention. In addition, the direction shown by the arrow A in FIG.
In the non-contact conveyance device 40 of the second embodiment shown in FIG. 5, the first non-contact suction plate 42 on the upstream side in the conveyance direction and the second non-contact suction plate 44 on the downstream side in the conveyance direction include the conveyance direction. Are arranged in contact with each other.

  The first and second non-contact suction disks 42 and 44 have the same configuration as the non-contact suction disk 1 described above, and suction holes 8 are formed in a square lattice pattern in the uppermost porous pad 2. . Further, as indicated by a dotted line on the porous pad 2, a grid-like pressurized gas flow path 14 is formed in the pad holder below the porous pad 2.

  In the present embodiment, the pressurized gas flow path 14 of the first and second non-contact suction disks 42 and 44 is a contact portion (connection region) where the first and second non-contact suction disks 42 and 44 contact each other. In FIG. 5, it terminates in an end width direction channel 46 arranged to extend in the width direction.

  Furthermore, in the present embodiment, the width of the end channel 46 is set to be about 4 mm, which is narrower than other portions of the pressurized gas channel 14.

  FIG. 6 is a view showing the arrangement of the non-contact suction disks 42 ′ and 44 ′ in the non-contact conveyance device 40 ′ according to a modification of the second embodiment. In FIG. 6, the direction indicated by the arrow A is the workpiece conveyance direction.

  In the non-contact conveyance device 40 ′ shown in FIG. 6, the first non-contact suction disk 42 ′ on the upstream side in the conveyance direction and the second non-contact suction disk 44 ′ on the downstream side in the conveyance direction are along the conveyance direction. The configuration is the same as that of the non-contact conveyance device 40 except that the arrangement is separated by a predetermined distance.

  According to such a configuration, when the workpiece is transferred from the first non-contact suction disk 42 ′ to the second non-contact suction disk 44 ′, the tip of the work is pushed upward, and thereafter, the first and second Since it is urged downward by its own weight in the gap formed between the non-contact suction plates 42 'and 44', it is possible to transfer to the second non-contact suction plate 44 'while maintaining the height position. .

FIG. 7 is a view showing the arrangement of the non-contact suction disk 50 in the non-contact conveyance device according to the third embodiment of the present invention. In addition, the direction shown by the arrow A in FIG.
In the non-contact conveyance device 50 of the third embodiment shown in FIG. 7, the first non-contact suction plate 52 on the upstream side in the conveyance direction and the second non-contact suction plate 54 on the downstream side in the conveyance direction are in the conveyance direction. Are arranged in contact with each other.

  The first and second non-contact suction disks 52 and 54 have the same configuration as the non-contact suction disk 1 described above, and suction holes 8 are formed in a square lattice pattern in the uppermost porous pad 2. . Further, as indicated by a dotted line on the porous pad 2, a grid-like pressurized gas flow path 14 is formed in the pad holder below the porous pad 2.

  In the present embodiment, the grid-like pressurized gas flow path of the holder of the first non-contact suction plate 52 on the upstream side in the transport direction is a contact portion where the first and second non-contact suction plates 52 and 54 contact each other. In (connection area), it terminates in an end width direction flow path 56 arranged so as to extend in the width direction.

  Further, the grid-like pressurized gas flow path of the holder of the second non-contact suction disk 54 on the downstream side in the transport direction has a contact portion (connection region) where the first and second non-contact suction disks 52 and 54 contact each other. ) Is terminated by an end conveyance direction flow path 58 extending in the conveyance direction.

  Furthermore, when the first and second non-contact suction plates 52 and 54 are arranged in contact with each other in the state of FIG. 7, each of the first and second non-contact suction plates 52 and 54 is closest to the contact portion. The distance d3 between the suction holes 8, 8 provided on the side is set to be equal to the distance between adjacent suction holes in the first and second non-contact suction disks 52, 54.

  According to such a configuration, the suction holes 8 are provided at substantially equal pitches from the first non-contact suction board 52 to the second non-contact suction board 54, and the suction holes 8 and the pressurized gas in the width direction are provided. Since the flow paths are alternately arranged, the workpiece can be transferred from the first non-contact suction disk 52 to the second non-contact suction disk 54 while maintaining the height position.

  FIG. 8 is a view showing the arrangement of the non-contact suction disks 52 ′ and 54 ′ in the non-contact conveyance device 50 ′ according to the modification of the third embodiment. In addition, also in FIG. 7, the direction shown by the arrow A is a workpiece conveyance direction.

  In the non-contact conveyance device 50 ′ shown in FIG. 8, the first non-contact suction plate 52 ′ and the second non-contact suction plate 54 ′ are arranged at a predetermined distance along the conveyance direction. Except for this point, it has the same configuration as the non-contact transfer device 50 of FIG.

FIG. 9 is a view showing the arrangement of the non-contact suction disks 62 and 640 in the non-contact conveyance device 60 according to the fourth embodiment of the present invention. The direction indicated by the arrow A in FIG. 9 is the workpiece conveyance direction.
In the non-contact conveyance device 60 of the fourth embodiment shown in FIG. 9, the first non-contact suction disk 62 and the second non-contact suction disk 64 are arranged in contact along the conveyance direction. .

  The first and second non-contact suction disks 62 and 64 have the same configuration as the non-contact suction disk 1 described above, and suction holes 8 are formed in a square lattice pattern in the uppermost porous pad 2. . Further, as indicated by a dotted line on the porous pad 2, a grid-like pressurized gas flow path 14 is formed in the pad holder below the porous pad 2.

  In the present embodiment, in the first and second non-contact suction disks 62 and 64, the suction hole and the pressurized gas passage in the width direction are on one side in the width direction (that is, the direction orthogonal to the transport direction) (see FIG. 9 lower side) and the other side (upper side in FIG. 9) are arranged with a half-pitch shift in the transport direction.

  In this embodiment, the grid-like pressurized gas flow path of the holder of the first non-contact suction disk 62 has an end width extending in the width direction on one side in the width direction (the lower side in FIG. 9). It terminates in the direction flow path 66 and terminates in the end conveyance direction flow path 68 extending in the conveyance direction on the other side in the width direction (upper side in FIG. 9).

  That is, in this embodiment, the grid-like pressurized gas flow path of the holder of the first non-contact suction disk 62 terminates in a closed rectangular portion on one side in the width direction (lower side in FIG. 9). On the other side in the width direction (upper side in FIG. 9), it terminates with a rectangular portion that opens toward the downstream side in the transport direction.

  As a result, in the first non-contact adsorption board 62, the pressurized gas flow paths are arranged in a staggered manner.

  Further, in the present embodiment, the grid-like pressurized gas flow path of the holder of the second non-contact suction disk 64 has an end portion that extends in the carrying direction on one side in the width direction (the lower side in FIG. 9). It terminates in the direction flow path 68 and terminates in the end width direction flow path 66 extending in the width direction on the other side in the width direction (upper side in FIG. 9).

  That is, in the present embodiment, the grid-like pressurized gas flow path of the holder of the second non-contact suction disk 64 terminates at a closed rectangular portion on one side in the width direction (upper side in FIG. 9), On the other side in the width direction (the lower side in FIG. 9), it terminates at a rectangular portion opened toward the upstream side in the transport direction.

  As a result, even in the second non-contact suction disk 64, the pressurized gas flow paths are arranged in a staggered manner.

  Furthermore, in this embodiment, as shown in FIG. 9, the pressurized gas flow path in which the first non-contact suction disk 62 and the second non-contact suction disk 64 are arranged in a staggered manner is provided. They are arranged so as to have a relatively syntactic arrangement.

  That is, the closed rectangular portion of the pressurized gas flow path of the upstream first non-contact suction disk 62 is on the upstream side in the transport direction of the pressurized gas flow path of the downstream second non-contact suction disk 64. It arrange | positions so that it may align in the conveyance direction in the rectangular part opened toward the direction. And the rectangular part opened toward the conveyance direction downstream of the pressurized gas flow path of the upstream first non-contact suction disk 62 is the pressurized gas flow path of the second non-contact suction disk 64 on the downstream side. Are arranged so as to be aligned along the conveying direction.

  According to such a configuration, since the suction holes and the pressurized gas flow passages in the width direction are arranged at an equal pitch also in the connection part of the first and second non-contact suction disks 62 and 64, the workpiece is The first non-contact suction disk 62 can be transferred to the second non-contact suction disk 64 while the height position is maintained.

  FIG. 10 is a view showing the arrangement of the non-contact suction disks 62 ′ and 64 ′ in the non-contact conveyance device 60 ′ according to the modification of the fourth embodiment. In FIG. 10, the direction indicated by the arrow A is the workpiece conveyance direction.

  In the non-contact conveyance device 60 ′ shown in FIG. 10, the first non-contact suction disk 62 ′ on the upstream side in the conveyance direction and the second non-contact suction disk 64 ′ on the downstream side in the conveyance direction are along the conveyance direction. The configuration is the same as that of the non-contact conveyance device 60 except that the arrangement is separated by a predetermined distance.

  Even in such a configuration, the suction holes and the pressurized gas flow passages in the width direction can be arranged at equal pitches in the connection portions of the first and second non-contact suction disks 62 ′ and 64 ′. Thus, the work can be transferred from the first non-contact suction disk 62 ′ to the second non-contact suction disk 64 ′ while maintaining the height position.

  FIG. 11 and FIG. 12 are drawings showing another arrangement example of the non-contact suction disk in the non-contact conveyance device.

  In the non-contact conveyance device 70 of FIG. 11, the non-contact suction plates are oriented so that the long sides are along the workpiece conveyance direction, and are arranged in 8 rows and 2 columns. In this configuration, the rows of non-contact suction boards are separated from each other, and the relationship of the pressurized gas flow paths in the transport direction is the same as that in the embodiment of FIG.

  In the non-contact conveyance device 80 of FIG. 12, the non-contact suction plates are oriented so that the short sides are along the workpiece conveyance direction, and are arranged in 2 rows and 4 columns. In this configuration, the rows of non-contact suction boards are separated from each other, and the arrangement of the pressurized gas flow paths is the same as that in the embodiment of FIG.

  The non-contact conveyance devices 70 and 80 shown in FIGS. 11 and 12 include a plurality of floating devices 90 disposed on the upstream and downstream sides of the non-contact suction plate. The levitation device 90 is, for example, a system that levitates a workpiece with pressurized air ejected from a porous plate.

  In the non-contact conveyance devices 70 and 80, each non-contact suction disk is arranged in a predetermined state by being connected and fixed in a bowl shape on a plurality of bars or fixed on a large substrate.

  In these non-contact conveyance devices 70 and 80, the other non-contact suction disk arranged in contact with the width direction side of a certain non-contact suction disk is a side edge ( In the contact region on the side, the pressurized gas flow path terminates with a groove (width direction groove) extending in a direction (W direction) perpendicular to the longitudinal direction of the non-contact suction disk. This configuration will be described with reference to FIG.

  The configuration shown in FIG. 13 is the first and second additional non-contact suction on the side of each non-contact suction disk 62 ′, 64 ′ constituting the non-contact transport device 60 ′ of FIG. The boards 62 ″ and 64 ″ are arranged in contact with each other.

In the first additional non-contact suction disk 62 ″, 64 ″ arranged in contact with the non-contact suction disks 62 ′, 64 ′, the contact area on one side, that is, the contact area with the non-contact suction disks 62 ′, 64 ′. The pressurized fluid groove (pressurized gas flow path) 14 terminates in a groove (width direction groove) 66 ″ extending in a direction (W direction) orthogonal to the conveying direction.
Further, in the contact area on the other side of the first additional non-contact suction disk 62 ", 64", that is, the contact area with the second additional non-contact suction disk 62 ", 64", the pressurized fluid groove (pressurization) 14) terminates in a groove 68 "extending in the transport direction.

Furthermore, in the second additional non-contact suction disk 62 ", 64" arranged in contact with the other side of the first additional non-contact suction disk 62 ", 64", the contact area on one side, ie the first In a contact area with the additional non-contact suction disks 62 ″, 64 ″, the pressurized fluid groove (pressurized gas flow path) 14 extends in a direction (W direction) perpendicular to the conveying direction (width direction groove) 66. ”.
Further, on the other side of the second additional non-contact suction disks 62 ″, 64 ″, the pressurized fluid groove 14 terminates with a groove 68 ″ extending in the transport direction.

  In this configuration, the width direction (W direction) interval d4 of the suction holes 8 between adjacent non-contact suction plates is substantially equal to the width direction (W direction) interval d5 of the suction holes 8 in the same non-contact suction plate. Is set to

  That is, the suction hole 8 on the first additional non-contact suction disk 62 ″ side of the non-contact suction disk 62 ′ and the first additional non-contact suction disk 62 ″ arranged in contact with the non-contact suction disk 62 ′. The width direction (W direction) distance d4 between the suction holes 8 on the non-contact suction disk 62 ′ side is the width direction (W direction) distance d5 between the suction holes 8 in each non-contact suction disk 62 ′ 62 ″. It is comprised so that it may become substantially equal.

  Further, the d4 and d5 that are equal to each other are configured to be equal to the longitudinal distance d6 of the adjacent suction holes 8 in the non-contact suction disk.

Next, the non-contact conveyance apparatus 90 of the 5th embodiment of this invention is demonstrated.
FIG. 14 is a view showing the arrangement of the non-contact suction disks 92 and 94 in the non-contact conveyance device 90 according to the fifth embodiment of the present invention. In addition, the direction shown by the arrow A in FIG.
In the non-contact conveyance device 90 of the fifth embodiment shown in FIG. 14, the first non-contact suction plate 92 and the second non-contact suction plate 94 are separated by a predetermined distance along the transfer direction. It is arranged.

  The first and second non-contact suction plates 92 and 94 have the same basic configuration as the non-contact suction plate 1 described above. In the pad holder 4 below the porous pad 2, a grid-like pressurized gas flow path 14 is formed on the porous pad 2 as indicated by a dotted line. Moreover, the 1st and 2nd non-contact suction discs 92 and 94 are provided with the several suction hole 8 formed in the porous pad similarly to the non-contact suction disc 1 mentioned above.

The difference from the above-described non-contact suction disk 1 is that the first and second non-contact suction disks 92 and 94 are added to the pressurized gas flow path 14 and are separated from the pressurized gas flow path 14 independently. The pressure gas flow path 96 is provided, and an independent suction hole 98 that is in a suction state different from the suction hole 8 is provided.
Hereinafter, this point will be described in detail.

  As described above, in the first and second non-contact suction plates 92 and 94 used in the non-contact conveyance device of the fifth embodiment, the independent pressurized gas flow path 96 is the other non-contact suction plate 94, In the edge part on the side connected to 92, it is formed so as to extend perpendicular to the transport direction A. Specifically, in each of the first and second non-contact suction plates 92 and 94, each independent pressurized gas flow channel 96 is connected to the other non-contact suction plates 94 and 92 in the connection region with the other non-contact suction plates 94 and 92. Is provided on the end (tip) side of the terminal portion.

  As shown in FIG. 15, each independent pressurized gas flow path 96 is separated from the groove 14 in the pad holder 4, that is, the independent air supply groove 96 formed so as not to communicate with the pressurized gas flow path 14. (In FIG. 15, the non-contact suction disk 92 is omitted in order to clearly show the independent air supply groove 96). As a result, a pressurized fluid having a flow rate and pressure different from those of the pressurized gas channel 14 can be supplied to the independent pressurized gas channel 96.

  Further, in the first and second non-contact suction plates 92 and 94 used in the non-contact conveyance device of the fifth embodiment, the intake holes arranged on the side connected to the other non-contact suction plates 94 and 92 However, it is configured as an independent suction hole 98 that is in a suction state different from the other suction holes 8. Specifically, in the first and second non-contact suction disks 92, 94, the suction holes located on the other non-contact suction disks 94, 92 side (tip side) are configured as independent suction holes 98. .

  As shown in FIG. 15, each independent suction hole 98 communicates with a suction groove 100 different from the base 22 of the base 6 with which each suction hole 8 communicates. (In FIG. 15, with respect to the non-contact suction board 94, other configurations are omitted to clearly show the independent suction holes 98 and the suction grooves 100). As a result, the independent suction hole 98 can be in a suction state different from the other suction holes 8.

  According to such a configuration, it is possible to realize a suction state different from the other areas in the connection area of the two non-contact suction disks 92 and 94 arranged in series in the transport direction. For this reason, by adjusting the pressurized gas supply state to the pressurized gas channel 14 and the independent pressurized gas channel 96 and the suction state from the suction hole 8 and the independent suction hole 98 as appropriate, two non-contacts are made. It is possible to smoothly transfer the thin plate workpiece between the suction disks 92 and 94.

  In the non-contact suction plates 92 and 94 used in the non-contact conveyance device of the fifth embodiment, the edge on the side where the independent pressurized gas flow path 96 is connected to the other non-contact suction plates 94 and 92. In FIG. 2, the film is formed so as to extend perpendicular to the conveyance direction A. However, the configuration of the independent pressurized gas channel 96 of the non-contact suction disk used in the non-contact conveyance device of the present invention is not limited to this.

For example, as shown in FIG. 16, a configuration in which an independent pressurized gas flow path 102 is provided so as to extend over the entire periphery of the non-contact suction plate, and as shown in FIG. A configuration in which the independently pressurized gas flow path 104 is provided so as to extend along both side edges of each other is also possible.
In the configuration of FIG. 17, buoyancy at both side edges of the workpiece can be controlled independently. For this reason, by making the buoyancy of both side edges of the workpiece relatively small or large, the workpiece can be held in a non-contact state by being convex or concave in a direction orthogonal to the conveying direction.

  Further, as shown in FIG. 18, a configuration in which an independent pressurized gas flow path 106 is provided so as to extend in the longitudinal direction at the center in the width direction of the non-contact suction disk, as shown in FIG. A configuration in which a rectangular independent pressurized gas flow path 108 is provided in the center in the width direction of the front end side region of the non-contact adsorption board may be used.

  In the configuration of FIG. 18, the buoyancy at the center in the width direction of the workpiece can be controlled independently. For this reason, by making the buoyancy in the central part in the width direction of the workpiece relatively large or small, the workpiece can be held in a non-contact state in a convex or concave shape in a direction orthogonal to the transport direction.

  Further, the configuration shown in FIG. 17 and the configuration shown in FIG. 18 are combined, and an independent pressurized gas flow path extending along both side edges of the non-contact suction disk, and an independent pressurized gas flow extending in the longitudinal direction at the center in the width direction. A non-contact suction board provided with a path may be used.

  These independent pressurized gas channels 102, 104, 106, 108 are also separated from the groove 14 in the pad holder 4, that is, do not communicate with the pressurized gas channel 14, as in the independent pressurized gas channel 100. It is comprised by the independent air supply groove | channel formed in the state.

  Further, in the embodiment shown in FIGS. 16 to 19, it is preferable that the suction holes arranged around the independent pressurized gas flow path be the independent suction holes.

  According to such a configuration, it is possible to realize a suction state different from other regions in the region where the independent pressurized gas flow path and the independent suction hole are formed.

  The non-contact suction disk used in the non-contact conveyance device of each embodiment of the present invention and its modification can be used alone as a non-contact suction disk for holding a workpiece in a non-contact state. is there.

Next, a non-contact suction disk according to another aspect of the present invention will be described.
FIG. 20 is a schematic plan view showing a non-contact suction disk 120 according to another embodiment of the present invention. The non-contact suction disk 120 shown in FIG. 20 has a circular outer shape, but has a basic configuration similar to that of the non-contact suction disk 1, and includes a porous pad 122, a pad holder, and a base 6. Yes. The non-contact suction disk 120 also non-contact-sucks a thin plate-like workpiece in the same manner as the non-contact suction disk 1 described above.

  Also in the non-contact suction disk 120, a suction hole 124 similar to the suction hole 8 of the non-contact suction disk 1 is formed in the porous pad 122. Further, a pressurized gas channel 126 similar to the pressurized gas channel 14 of the non-contact adsorption board 1 is provided. In the non-contact suction disk 120, the pressurized gas flow passage 126 is integrally composed of an annular shape and a radial portion as indicated by a dotted line on the porous pad.

  In the non-contact suction disk 120, an annular independent pressurized gas channel 128 separated from the pressurized gas channel 126 is provided at the peripheral edge of the pad holder. The independent pressurized gas flow path 128 is not in communication with the pressurized gas flow path 126, and is similar to the pressurized gas flow path 126 of the fifth embodiment. Are configured to be able to supply pressurized gases having different flow rates and pressures.

  As a result, when a non-contact suction disk 120 holds and holds a circular workpiece, the suction is relatively increased or weakened only at the outer edge portion of the workpiece to hold the workpiece in a convex or concave shape in a non-contact manner. It becomes possible.

  In the non-contact suction disk 120, all the suction holes 124 are in the same suction state, but a configuration may be adopted in which some of the suction holes are independent suction holes as in the fifth embodiment.

FIG. 21 is a view showing a non-contact suction disk 130 as a modification of the non-contact suction disk 120 according to another aspect of the present invention.
The non-contact suction disk 130 shown in FIG. 21 is different from the non-contact suction disk 120 in that the pressurized gas flow path 126 formed integrally with the first pressurized gas flow path 132 in the center portion and the diameter. It differs from the non-contact adsorption | suction board | plate 120 at the point which isolate | separated into the 2nd pressurized gas flow path 134 of a direction intermediate part, and can supply the pressurized gas of a different flow volume and pressure to each.
That is, in the non-contact suction disk 120, the first pressurized gas channel 132 at the center, the second pressurized gas channel 134 at the radial intermediate portion, and the independent pressurized gas flow at the radially outer portion. Three systems of pressurized gas passages of the passage 128 are provided independently of each other.

  Further, the suction holes are also in the independent suction state of the first suction hole 136 at the center, the second suction hole 138 at the radial intermediate part, and the third suction hole 140 at the radially outer part, respectively. It is configured as follows.

  According to such a configuration, the suction holding state of the workpiece can be optimized by appropriately adjusting the pressurized gas supply state to each pressurized gas channel and the suction state from each suction hole.

  Without being limited to the above-described embodiment of the present invention, various changes and modifications can be made within the scope of the technical idea described in the claims.

  In the above embodiment, pressurized air is used as the pressurized fluid, but instead of pressurized air, other pressurized fluids such as water, oil, nitrogen gas, argon gas, etc. are used. Also good.

1: Non-contact suction board 8: Suction hole 14: Pressurized gas flow path 30: Non-contact conveyance device 32: First non-contact suction board 34: Second non-contact suction board 36: End width direction flow path 58 : End conveyance direction flow path

Claims (20)

A non-contact conveyance device that adsorbs and conveys a thin plate-like workpiece in a non-contact state,
Comprising first and second non-contact suction disks arranged along the transport direction;
Each of the first and second non-contact suction plates is
A rectangular porous pad in which a plurality of suction holes extending through in the thickness direction are arranged in a lattice pattern;
A rectangular holder connected to the back surface of the porous pad, the surface of which is a grid-like pressurized gas flow path, and a plurality of islands arranged in a grid shape partitioned by the pressurized gas flow path And a communication hole extending in the thickness direction through the island-shaped portion, and when connected to the porous pad, the island-shaped portion is A holder in which the top surface is in close contact with the back surface of the porous pad in a state where the communication hole communicates with the suction hole of the porous pad;
The grid-like pressurized gas flow path of the holder of the first non-contact suction disk disposed on the upstream side in the transport direction is in a connection region with the second non-contact suction disk disposed on the downstream side in the transport direction. , At least a portion terminates in an end width direction flow path arranged so as to extend in a direction orthogonal to the transport direction,
A non-contact conveyance device characterized by that. The grid-like pressurized gas flow path of the holder of the second non-contact suction disk has an end arranged so that at least a part thereof extends in the transport direction in the connection region with the first non-contact suction disk Is terminated in the part transport direction flow path,
The non-contact transport apparatus according to claim 1. The grid-like pressurized gas flow path of the holder of the first non-contact suction disk is arranged such that at least a part thereof extends in the transport direction in the connection region with the second non-contact suction disk. Is terminated in the part transport direction flow path,
The non-contact conveyance apparatus of Claim 1 or 2. The grid-like pressurized gas flow path of the holder of the second non-contact suction disk is arranged so that at least a part thereof extends perpendicular to the transport direction in the connection region with the first non-contact suction disk. Terminated in the end width direction flow path,
The non-contact conveyance apparatus of any one of Claim 1 thru | or 3. The grid-like pressurized gas flow path of the holder of the first non-contact suction disk is arranged so that at least a part thereof extends perpendicular to the transport direction in the connection region with the second non-contact suction disk. Terminated in the end width direction flow path,
The non-contact conveyance apparatus of any one of Claim 1 thru | or 4. The grid-like pressurized gas flow paths of the holders of the first and second non-contact suction cups are alternately arranged, terminating at closed rectangular portions, and terminating at open rectangular portions. With
In the first and second non-contact adsorption plates, the rectangular portion of the one non-contact adsorption plate in which the pressurized gas flow path is opened is the rectangular shape in which the pressurized gas flow channel of the other non-contact adsorption plate is closed. Arranged to align with the conveying direction in the part,
The non-contact transport apparatus according to claim 1. The holder of the first non-contact suction disk includes an independent pressurized gas channel separated from the pressurized gas channel,
The non-contact conveyance apparatus of any one of Claim 1 thru | or 6. The independent pressurized gas flow path of the first non-contact suction disk is provided on the side edge side of the terminal portion of the pressurized gas flow path in the connection region with the second non-contact suction disk.
The non-contact conveyance apparatus of Claim 7. The holder of the second non-contact suction disk includes an independent pressurized gas channel separated from the pressurized gas channel,
The non-contact conveyance apparatus of any one of Claim 1 thru | or 8. The independent pressurized gas flow path of the second non-contact suction disk is provided on the side edge side of the terminal portion of the pressurized gas flow path in the connection region with the first non-contact suction disk.
The non-contact conveyance apparatus of any one of Claim 1 thru | or 9. The porous pad has an independent suction hole that is in a suction state different from the suction hole,
The non-contact conveyance apparatus of any one of Claim 1 thru | or 10. The independent suction hole is disposed in a connection region of one non-contact suction disk with the other non-contact suction disk,
The non-contact conveyance apparatus of Claim 11. The first and second non-contact suction cups are arranged in contact with each other;
The non-contact conveyance apparatus of any one of Claim 1 thru | or 12. The first and second non-contact suction disks are spaced apart,
The non-contact conveyance apparatus of any one of Claim 1 thru | or 12. A non-contact suction disk that sucks a thin plate-like workpiece in a non-contact state,
A rectangular porous pad in which a plurality of suction holes extending through in the thickness direction are disposed;
A holder connected to the back surface of the porous pad, wherein a pressurized gas flow path and a plurality of island-like portions separated by the pressurized gas flow path are formed on the surface and aligned with the suction holes. Provided with a communication hole extending through the island-shaped portion in the thickness direction, and when connected to the porous pad, the island-shaped portion has the communication hole as a suction hole of the porous pad. A holder with a top surface in close contact with the back surface of the porous pad in communication,
The holder is further formed with an independent pressurized gas channel separated from the pressurized gas channel on the surface.
A non-contact suction board characterized by that. The independent pressurized gas flow path is disposed adjacent to an edge of the non-contact suction disk;
The non-contact suction disk according to claim 15. The porous pad has an independent suction hole that is in a suction state different from the suction hole,
The non-contact suction disk according to claim 15 or 16. A plurality of the independent pressurized gas flow paths are formed,
Each independently pressurized gas flow path is separated from each other,
The non-contact suction disk according to any one of claims 15 to 17. A non-contact suction disk according to any one of claims 15 to 18 is provided.
A non-contact conveyance device characterized by that. The non-contact suction discs arranged adjacent to each other are arranged so that the edges are adjacent to each other,
The non-contact conveyance apparatus of Claim 19.

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