CN219590209U - Middle road direct-irradiation type edge three-side detection optical system and edge three-side detection device - Google Patents

Middle road direct-irradiation type edge three-side detection optical system and edge three-side detection device Download PDF

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CN219590209U
CN219590209U CN202320055796.5U CN202320055796U CN219590209U CN 219590209 U CN219590209 U CN 219590209U CN 202320055796 U CN202320055796 U CN 202320055796U CN 219590209 U CN219590209 U CN 219590209U
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light
edge
optical path
deflection surface
path
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请求不公布姓名
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Suzhou Gaoshi Semiconductor Technology Co ltd
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Suzhou Gaoshi Semiconductor Technology Co ltd
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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Abstract

The embodiment of the utility model discloses a middle road direct-irradiation type edge three-surface detection optical system and an edge three-surface detection device, wherein the optical system comprises: the optical system is used for detecting defects of edge parts of a product to be detected, the product to be detected is provided with a first surface, a second surface and a side surface which are opposite to each other, the first surface and the second surface are respectively provided with a first edge surface and a second edge surface at respective circumferential edges, and the side surface is connected between the first edge surface and the second edge surface, and is characterized in that the optical system comprises: the optical paths of the first optical path, the second optical path and the third optical path are equal, and the second optical path is a straight line. According to the utility model, only one optical system is used, so that on one hand, the synchronous surface defect detection of three surfaces of the edge area of the product can be finished under the condition of ensuring imaging definition, and on the other hand, the size of the whole machine can be reduced, thereby facilitating the installation, debugging and detection.

Description

Middle road direct-irradiation type edge three-side detection optical system and edge three-side detection device
Technical Field
The utility model relates to the field of surface defect detection, in particular to a middle road direct-irradiation type edge three-face detection optical system and an edge three-face detection device.
Background
The edge areas of products such as liquid crystal panels, wafers, optical glass and the like need to be detected to ensure the overall quality, wherein the edge areas of the products comprise edge surfaces and upper and lower surfaces connected with the edge surfaces.
When inspecting the edge areas of products such as a liquid crystal panel, a wafer, and an optical glass, it is generally required to separately inspect whether the three surfaces have surface defects, and since the three surfaces are in different orientations and are not on the same plane, even facing away from each other, the simplest method is to separately image the three surfaces by using 3 imaging systems, which results in a very complex overall visual structure and requires a large space, and in addition, more computers are required to process the images, which is expensive in equipment and wastes more computation power. Thus, the problem of how to clearly image these three surfaces simultaneously using only one optical system has been a pain spot to be solved in the industry.
In addition, in the prior art, only surface defect detection can be performed on two edge surfaces at the same time, so that the requirement of performing surface defect detection on three surfaces of an edge area of a liquid crystal panel, a wafer, optical glass and other products at the same time still cannot be met, and if defect detection is performed on three edge surfaces at the same time, at least three light paths need to be introduced, so that an optical system tends to become more complex, and finally the whole machine is huge, which is unfavorable for installation, debugging and detection.
In view of this, it is necessary to develop a direct-injection type edge three-side detection optical system and an edge three-side detection device for solving the problems: how to use only one optical system can finish the synchronous surface defect detection of three surfaces of the edge area of products such as a liquid crystal panel, a wafer, optical glass and the like under the condition of ensuring imaging definition, and can reduce the size of the whole machine so as to facilitate the installation, debugging and detection.
Disclosure of Invention
The embodiment of the utility model provides a middle road direct-irradiation type edge three-face detection optical system and an edge three-face detection device, which are used for solving the problems: how to use only one optical system can ensure the imaging definition on one hand
And under the condition of definition, three surfaces of the edge area of the liquid crystal panel, the wafer, the optical glass and other products are synchronously detected 5, and on the other hand, the size of the whole machine can be reduced, so that the installation, the debugging and the detection are convenient.
In order to solve the technical problems, the embodiment of the utility model discloses the following technical scheme:
on one hand, a middle road direct projection type edge three-side detection optical system is provided for a product to be detected
The product to be tested has a first surface, a second surface 0 surface and a side surface facing away from each other, the first surface and the second surface having a first edge surface and a second edge surface at respective peripheral edges, respectively, the side surface being connected between the first edge surface and the second edge surface, the optical system comprising:
the first light path comprises a first upper deflection surface, a second upper deflection surface and a third upper deflection surface, and first light rays from the first edge surface are projected to a focusing plane after being deflected by the first upper deflection surface, the second upper deflection surface and the third upper deflection surface 5 in sequence;
the second light path comprises a first lower deflection surface, a second lower deflection surface and a third lower deflection surface, and second light rays from the second edge surface are projected to the focusing plane after being deflected by the first lower deflection surface, the second lower deflection surface and the third lower deflection surface in sequence;
The third light path comprises a first light-transmitting surface and a second light-transmitting surface which are opposite to each other, and 0 third light from the side surface is projected to the focusing plane after being transmitted by the first light-transmitting surface and the second light-transmitting surface in sequence;
wherein, define:
the optical path of the first light is a first optical path T 1 ；
The second lightThe optical path of the line is the second optical path T 2 ；
The optical path of the third light is a third optical path T 3 The method comprises the steps of carrying out a first treatment on the surface of the Then: 5 the first optical path T 1 A second optical path T 2 Third optical path T 3 The optical paths of the three are equal; the second light path is linear.
In addition to or in lieu of one or more of the features disclosed above, the optical system has an object plane, a first direction, and a second direction; the first direction is perpendicular to the object placing plane, and the second direction is perpendicular to the first direction; the object placing plane passes through the center of the product to be tested, so that the distance between the first edge surface and the object placing plane is equal to the distance between the second edge surface and the object placing plane.
In addition to or in lieu of one or more of the features disclosed above, the first upper deflection surface is configured to deflect the first light ray from the first direction to the second direction;
The second upper deflection surface is configured to deflect the first light from the second direction to the first direction;
the third upper deflection surface is configured to deflect the first light from the first direction to the second direction.
In addition to or in lieu of one or more of the features disclosed above, the first lower deflection surface is configured to deflect the second light ray from the first direction to the second direction;
the second lower deflection surface is configured to deflect the second light from the second direction to the first direction;
the third lower deflection surface is configured to deflect the second light from the first direction to the second direction.
In addition to or in lieu of one or more of the features disclosed above, the optical system also has an optical axis parallel to the second direction, the optical axis lying in the object plane; wherein the second light-transmitting surface, the first light-transmitting surface and the product to be tested are sequentially arranged along the optical axis,
wherein the first light-transmitting surface and the second light-transmitting surface are configured to: the third light sequentially penetrates through the first light-transmitting surface and the second light-transmitting surface along the direction of the optical axis and finally is projected to the focusing plane.
In addition to or in lieu of one or more of the features disclosed above, the device further comprises a first light source and a second light source, wherein the light emitted by the first light source and the second light source irradiates on the peripheral edge of the product to be tested to form a lighting area, a part of the lighting area is opposite to the first light-transmitting surface in the direction of the optical axis, and a part of the lighting area is opposite to the first upper deflection surface or the first lower deflection surface in the first direction.
In addition to, or in lieu of, one or more features disclosed above, a definition is made of:
the distance from the first edge surface to the first upper deflection surface along the first direction of the first light ray is h 1 ；
The distance from the first upper deflection surface to the second upper deflection surface along the second direction of the first light ray is h 2 ；
The distance from the second upper deflection surface to the third upper deflection surface along the first direction of the first light ray is h 3 ；
The distance from the third upper deflection surface to the focusing plane along the second direction of the first light ray is h 4 The method comprises the steps of carrying out a first treatment on the surface of the Then:
the first optical path T 1 Length of T 1 ＝h 1 +h 2 +h 3 +h 4 。
In addition to, or in lieu of, one or more features disclosed above, a definition is made of:
The distance from the second edge surface to the first lower deflection surface along the first direction of the second light ray is h 5 ；
The second light rays start from the first lower deflection surface to the second lower deflection surface along the second directionThe distance of the rotating surface is h 6 ；
The distance from the second lower deflection surface to the third lower deflection surface along the first direction is h 7 ；
The distance from the third lower deflection surface to the focusing plane along the second direction of the second light ray is h 8 The method comprises the steps of carrying out a first treatment on the surface of the Then:
the first optical path T 2 Length of T 2 ＝h 5 +h 6 +h 7 +h 8 。
In addition to or in lieu of one or more of the features disclosed above, the third optical path includes a medium light transmission member made of a transparent material that maintains a positional relationship between the first light-transmitting surface and the second light-transmitting surface as: allowing transmitted light from the first light-transmitting surface to reach the second light-transmitting surface in the direction of the optical axis; the intermediate light transmission member includes a first surface and a second surface opposite to each other in a direction of the optical axis, the first surface and the second surface being configured as the first light-transmitting surface and the second light-transmitting surface, respectively; definition:
The dimension of the medium light transmission component in the direction of the optical axis is t;
the refractive index of the medium light transmission component is n; then there are:
the third optical path T 3 The length of (2) is: t (T) 3 ＝h 2 +h 4 -t+n.t, or, T 3 ＝h 6 +h 8 -t+n·t；
Wherein T is 1 ＝T 2 ＝T 3 。
In addition to or in lieu of one or more of the features disclosed above, the first optical path includes a first upper transport, a second upper transport, and a third upper transport;
the first upper transmission part, the second upper transmission part and the third upper transmission part are respectively a 1 st prism, a 2 nd prism and a 3 rd prism, the 1 st prism, the 2 nd prism and the 3 rd prism are respectively provided with a 1 st separation surface, a 2 nd separation surface and a 3 rd separation surface, and the 1 st separation surface, the 2 nd separation surface and the 3 rd separation surface are respectively formed into the first upper deflection surface, the second upper deflection surface and the third upper deflection surface.
In addition to or in lieu of one or more of the features disclosed above, the second optical path includes a first lower transport, a second lower transport, and a third lower transport;
the first lower transmission part, the second lower transmission part and the third lower transmission part are respectively a 4 th prism, a 5 th prism and a 6 th prism, the 4 th prism, the 5 th prism and the 6 th prism are respectively provided with a 4 th separation surface, a 5 th separation surface and a 6 th separation surface, and the 4 th separation surface, the 5 th separation surface and the 6 th separation surface are respectively formed into the first lower deflection surface, the second lower deflection surface and the third lower deflection surface.
On the other hand, further disclosed is an edge three-face detection device comprising a holding mechanism and the middle-path direct-irradiation type edge three-face detection optical system as described in any one of the above, wherein the holding mechanism is used for holding the first optical path, the second optical path and the third optical path in a preset positional relationship so that the first optical path L 1 Second optical path L 2 Third optical path L 3 The optical paths of the three are equal; the second optical path is held in a straight line by the holding mechanism.
One of the above technical solutions has the following advantages or beneficial effects: on the one hand, the optical paths are deflected, so that the optical paths of the three optical paths are equal, three surfaces of the edge area of a product to be detected can be imaged clearly at the same time, and on the other hand, the second optical path is designed into a straight line, so that the prism required by the second optical path is reduced, the size of the whole machine is reduced, and the installation, the debugging and the detection are convenient.
Drawings
The technical solution and other advantageous effects of the present utility model will be made apparent by the following detailed description of the specific embodiments of the present utility model with reference to the accompanying drawings.
FIG. 1 is a front view of a first optical system provided in accordance with an embodiment of the present utility model, showing the specific orientation of the optical paths in elevation;
FIG. 2 is a top view of a first optical system according to an embodiment of the present utility model, showing the specific orientation of each optical path in a top view;
FIG. 3 is a perspective view of a first edge three-sided detection device provided in accordance with an embodiment of the present utility model;
FIG. 4 is a top view of a first edge three-sided detection device provided in accordance with an embodiment of the present utility model;
FIG. 5 is a front view of a first edge three-sided detection device provided in accordance with an embodiment of the present utility model;
FIG. 6 is a front view of a second optical system provided in accordance with an embodiment of the present utility model, showing the specific orientation of the optical paths in elevation;
fig. 7 is a front view of a middle light transmission member of a second optical system according to an embodiment of the present utility model, showing the dimensions of the middle light transmission member in the second direction of each optical path.
Detailed Description
The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.
When inspecting the edge areas of products such as a liquid crystal panel, a wafer, and an optical glass, it is generally required to separately inspect whether the three surfaces have surface defects, and since the three surfaces are in different orientations and are not on the same plane, even facing away from each other, the simplest method is to separately image the three surfaces by using 3 imaging systems, which results in a very complex overall visual structure and requires a large space, and in addition, more computers are required to process the images, which is expensive in equipment and wastes more computation power. Thus, the problem of how to clearly image these three surfaces simultaneously using only one imaging system has been a pain spot to be addressed in the industry.
In addition, in the prior art, only two of the three surfaces can be simultaneously detected, so that the requirement of synchronously detecting the surface defects of the three surfaces of the edge area of the liquid crystal panel, the wafer, the optical glass and other products still cannot be met. For example, liao Ting et al propose a number of devices and methods that can detect different surfaces of a grain simultaneously (CN 110849886A; CN110927175A; CN111044524A; CN110987964A; CN111157535A; CN111089840A;
CN111366541a; CN111487198A; CN111595860 a). However, the above patent is mainly used for inspecting the die, and only two surfaces can be inspected at the same time, so the requirement of inspecting three surfaces of the edge of the liquid crystal panel, the wafer, etc. at the same time still cannot be satisfied.
In order to solve the problem of how to realize simultaneous clear imaging of three surfaces of an edge area of a product to be tested, an embodiment of the present utility model provides a middle path direct-injection type edge three-side detection optical system 1, wherein fig. 1 and fig. 2 show a front view and a top view of the optical system 1, and the two figures respectively show specific directions of each optical path under corresponding viewing angles; fig. 3 to 5 show a perspective view, a top view and a front view, respectively, of the application of the optical system 1 in an edge three-face detection device.
Referring to fig. 1 and 2, an optical system 1 for detecting defects in an edge portion of a product 5 to be tested, the product 5 to be tested has a first surface 51, a second surface 52 and a side surface 53 facing away from each other, the first surface 51 and the second surface 52 have a first edge surface 511 and a second edge surface 521 at respective peripheral edges, respectively, the side surface 53 is connected between the first edge surface 511 and the second edge surface 521, and the optical system 1 includes:
A first optical path 11 having a first receiving end and a first emitting end, the first receiving end being positioned to receive the first light from the first edge surface 511 and transmit the first light to the first emitting end;
a second optical path 12 having a second receiving end and a second exiting end, the second receiving end being positioned to receive the second light from the second edge face 521 and to transmit the second light to the second exiting end; and
a third light path 13 having a third receiving end and a third emitting end, the third receiving end being positioned to receive the third light from the side surface 53 and transmit the third light to the third emitting end;
wherein, the first exit end, the second exit end and the third exit end terminate at a collection plane S, defining:
the optical path between the first receiving end and the first emitting end is a first optical path L 1 ；
The optical path between the second receiving end and the second emitting end is a second optical path L 2 ；
The optical path between the third receiving end and the third emitting end is a third optical path L 3 The method comprises the steps of carrying out a first treatment on the surface of the Then:
first optical path L 1 Second optical path L 2 Third optical path L 3 The optical paths of the three are equal.
In the following and throughout the specification, the term "optical path" is understood to mean the distance traveled by light in vacuo at the same time. Under the condition that the propagation time is the same or the phase change is the same, the path of light propagating in the medium is converted into the corresponding path of light propagating in vacuum. Numerically, the optical path is equal to the refractive index of the medium times the path traveled by the light in the medium. In the embodiment shown in fig. 1 and 2, the light propagates in the same medium as air, and the influence of the refractive index of air can be ignored, so that the first optical path L 1 Second optical path L 2 Third optical path L 3 The three optical paths are equal and refer to the first lightThe propagation paths of the second light ray and the third light ray in the propagation medium of air are equal.
The "first", "second", and "third" of the first optical path 11, the second optical path 12, and the third optical path 13 are only for the purpose of being able to distinguish between different optical paths in the optical system 1, and are not limiting to the number or order of the optical paths. For example, the first optical path 11 corresponds to receiving and deflecting a first light ray of the first edge face 511, and correspondingly, the second optical path 12 corresponds to receiving and deflecting a second light ray of the second edge face 521; for another example, the first optical path 11 corresponds to receiving and deflecting the second light of the second edge face 521, and the second optical path 12 corresponds to receiving and deflecting the first light of the first edge face 511.
The first, second and third emitting ends terminate at a collecting plane S means that the first, second and third light rays all irradiate on the same collecting plane S.
According to the optical system 1, the optical paths of the three optical paths are equal due to the fact that the optical paths are respectively deflected in the three directions, and finally, only one imaging system is used, so that surface defect detection can be synchronously performed on three surfaces of the edge areas of products such as a liquid crystal panel, a wafer and optical glass under the condition of guaranteeing imaging definition, and clear collection can be performed on imaged images without using a large depth-of-field lens, the overall size of the system is reduced, the system structure is simplified, and the construction cost of expensive equipment is reduced.
Referring again to fig. 1 and 2, the optical system 1 has an object plane P, a first direction Z, and a second direction X; the first direction Z is vertical to the object placing plane P, and the second direction X is vertical to the first direction Z; the placement plane P passes through the center 54 of the product 5 to be tested, so that the distance from the first edge surface 511 to the placement plane P is equal to the distance from the second edge surface 521 to the placement plane P. The arrangement is such that the receiving ends of the first, second and third optical paths 11, 12 and 13 are aligned with the first, second and side surfaces 511, 521 and 53, respectively.
In the embodiment of the present utility model, the first optical path 11 includes a first upper deflecting surface 1111, a second upper deflecting surface 1121, and a third upper deflecting surface 1131, and the first upper deflecting surface 1111, the second upper deflecting surface 1121, and the third upper deflecting surface 1131 are sequentially arranged along the transmission path of the first light;
wherein the first upper deflecting surface 1111 is configured to deflect the first light from the first direction Z to the second direction X;
the second upper deflecting surface 1121 is configured to deflect the first light from the second direction X to the first direction Z;
the third upper deflecting surface 1131 is configured to deflect the first light ray from the first direction Z to the second direction X.
In a preferred embodiment, the first upper deflecting surface 1111 and the second upper deflecting surface 1121 form an angle of 135 ° and an angle of 45 ° with respect to the second direction X, respectively, and the third upper deflecting surface 1131 forms an angle of 45 ° with respect to the second direction X.
In an embodiment of the utility model, a definition is made:
the first light ray starts from the first edge surface 511 to the first upper deflection surface 1111 along the first direction Z with a distance L 1 ；
The first light ray starts from the first upper deflection surface 1111 to the second upper deflection surface 1121 along the second direction X with a distance l 2 ；
The first light ray starts from the second upper deflection surface 1121 to the third upper deflection surface 1131 along the first direction Z with a distance l 3 ；
The first light ray starts from the third upper deflection surface 1131 to the acquisition plane S along the second direction X by a distance l 4 The method comprises the steps of carrying out a first treatment on the surface of the Then:
first optical path L 1 Length of L 1 ＝l 1 +l 2 +l 3 +l 4 。
In the embodiment of the present utility model, the second optical path 12 includes a first lower deflection surface 1211, a second lower deflection surface 1221, and a third lower deflection surface 1231, and the first lower deflection surface 1211, the second lower deflection surface 1221, and the third lower deflection surface 1231 are sequentially arranged along the transmission path of the second light;
wherein the first lower deflection surface 1211 is configured to deflect the second light ray from the first direction Z to the second direction X;
the second lower deflection surface 1221 is configured to deflect the second light ray from the second direction X to the first direction Z;
The third lower deflecting surface 1231 is configured to deflect the second light ray from the first direction Z to the second direction X.
In the preferred embodiment, the first and second lower deflection surfaces 1211 and 1221 are angled at 45 ° and 135 ° respectively with respect to the second direction X, and the third lower deflection surface 1231 is angled at 135 ° with respect to the second direction X
And an included angle.
In an embodiment of the utility model, a definition is made:
the second light ray starts from the second edge surface 521 to the first lower deflection surface 1211 along the first direction Z with a distance L 5 ；
The second light ray starts from the first lower deflection surface 1211 to the second lower deflection surface 1221 along the second direction X by a distance l 6 ；
The second light ray starts from the second lower deflection surface 1221 to the third lower deflection surface 1231 along the first direction Z by a distance l 7 ；
The second light ray starts from the third lower deflection surface 1231 to the acquisition plane S along the second direction X with a distance l 8 The method comprises the steps of carrying out a first treatment on the surface of the Then:
second optical path L 2 Length of L 2 ＝l 5 +l 6 +l 7 +l 8 。
In the embodiment of the present utility model, the third optical path 13 includes a first middle deflecting surface 1311, a second middle deflecting surface 1321, a third middle deflecting surface 1331, and a fourth middle deflecting surface 1341, and the first middle deflecting surface 1311, the second middle deflecting surface 1321, the third middle deflecting surface 1331, and the fourth middle deflecting surface 1341 are sequentially arranged along the transmission path of the third light ray; the optical system 1 further has a third direction Y, and the first direction Z, the second direction X, and the third direction Y are perpendicular to each other;
Wherein the first middle deflecting surface 1311 is configured to deflect the third light ray from the second direction X to the third direction Y;
the second middle deflecting surface 1321 is configured to deflect the third light ray from the third direction Y to the second direction X;
the third middle deflecting surface 1331 is configured to deflect a third light ray from the second direction X to the third direction Y;
the fourth middle deflecting surface 1341 is configured to deflect the third light ray from the third direction Y to the second direction X.
In a preferred embodiment, the first middle deflecting surface 1311 and the fourth middle deflecting surface 1341 form an angle of 135 ° and an angle of 45 ° with respect to the second direction X, respectively, and the second middle deflecting surface 1321 and the third middle deflecting surface 1331 form an angle of 135 ° and an angle of 45 ° with respect to the third direction Y, respectively.
In an embodiment of the utility model, a definition is made:
the third ray of light is directed from the side surface 53 to the first middle deflection surface 1311 along the second direction X by a distance s 1 ；
The third light ray is directed from the first intermediate deflection surface 1311 to the second intermediate deflection surface 1321 along the third direction Y by a distance s 2 ；
The third light ray is directed from the second middle deflecting surface 1321 to the third middle deflecting surface 1331 along the second direction X by a distance s 3 ；
The third light ray starts from the third middle deflection surface 1331 to the fourth middle deflection surface 1341 along the third direction Y and has a distance s 4 ；
The third light ray is directed along the third direction Y from the third mid-deflection surface 1331 to the collection plane S by a distance S 5 The method comprises the steps of carrying out a first treatment on the surface of the Then:
first optical path L 3 Length of L 3 ＝s 1 +s 2 +s 3 +s 4 +s 5 。
In a preferred embodiment, L 1 ＝L 2 ＝L 3 The method comprises the following steps: l (L) 1 +l 2 +l 3 +l 4 ＝l 5 +l 6 +l 7 +
l 8 ＝s 1 +s 2 +s 3 +s 4 +s 5 Wherein the first optical path 11 and the second optical path 12 are mirror images of each other about the object plane P such that: l (L) 1 ＝l 5 ；l 2 ＝l 6 ；l 3 ＝l 7 ；l 4 ＝l 8 ＝s 5 ；s 2 ＝s 4 . Wherein s is 1 、l 2 And l 6 ，l 1 And l 3 ，l 5 And l 7 ，l 4 、l 8 、s 5 Sum s 3 All have the corresponding size of deflection surface, so when L 1 Or L 2 After the determination, only s is needed to be adjusted 2 Or s 4 The preparation method is finished; or, when L 3 After the determination, only adjust l 1 And l 3 L 5 And l 7 And (3) obtaining the product.
Referring to fig. 1 and 2 again, in the embodiment of the utility model, the optical system 1 further has an optical axis T parallel to the second direction X, and the optical axis T is located in the object placement plane P; the fourth middle deflecting surface 1341, the first middle deflecting surface 1311 and the product 5 to be measured are sequentially arranged along the optical axis T, and the second middle deflecting surface 1321 and the third middle deflecting surface 1331 are respectively opposite to the first middle deflecting surface 1311 and the fourth middle deflecting surface 1341 in the third direction Y.
In order to make the image display of the edge area clearer, in the embodiment of the present utility model, the optical system 1 further includes a first light source 14 and a second light source 15, where the light emitted by the first light source 14 and the second light source 15 irradiates the peripheral edge of the product 5 to be measured to form a lighting area M, and a part of the lighting area M is opposite to the first middle deflection surface 1311 in the direction of the optical axis T, and a part of the lighting area M is opposite to the first upper deflection surface 1111 or the first lower deflection surface 1211 in the first direction Z.
In order to maintain the above-mentioned deflection surface in a predetermined positional relationship, in the embodiment of the present utility model, the first optical path 11 includes a first upper transmission portion, a second upper transmission portion, and a third upper transmission portion;
the first upper transfer section, the second upper transfer section, and the third upper transfer section are respectively a 1 st prism 111, a 2 nd prism 112, and a 3 rd prism 113, and the 1 st prism 111, the 2 nd prism 112, and the 3 rd prism 113 respectively have a 1 st separation surface, a 2 nd separation surface, and a 3 rd separation surface, and the 1 st separation surface, the 2 nd separation surface, and the 3 rd separation surface are respectively configured as a first upper deflection surface 1111, a second upper deflection surface 1121, and a third upper deflection surface 1131.
In the embodiment of the present utility model, the second optical path 12 includes a first lower transmission portion, a second lower transmission portion, and a third lower transmission portion;
the first lower transmitting portion, the second lower transmitting portion, and the third lower transmitting portion are a 4 th prism 121, a 5 th prism 122, and a 6 th prism 123, respectively, and the 4 th prism 121, the 5 th prism 122, and the 6 th prism 123 have a 4 th separating surface, a 5 th separating surface, and a 6 th separating surface, respectively, and the 4 th separating surface, the 5 th separating surface, and the 6 th separating surface are configured as a first lower deflection surface 1211, a second lower deflection surface 1221, and a third lower deflection surface 1231, respectively.
In the embodiment of the present utility model, the third optical path 13 includes a first middle transmission section, a second middle transmission section, a third middle transmission section, and a fourth middle transmission section;
the first middle transfer section, the second middle transfer section, the third middle transfer section, and the fourth middle transfer section are respectively a 7 th prism 131, an 8 th prism 132, a 9 th prism 133, and a 10 th prism 134, and the 7 th prism 131, the 8 th prism 132, the 9 th prism 133, and the 10 th prism 134 respectively have a 7 th separation surface, an 8 th separation surface, a 9 th separation surface, and a 10 th separation surface, and the 7 th separation surface, the 8 th separation surface, the 9 th separation surface, and the 10 th separation surface are respectively configured as a first middle deflection surface 1311, a second middle deflection surface 1321, a third middle deflection surface 1331, and a fourth middle deflection surface 1341.
In another embodiment of the present utility model, the first optical path 11 includes a first upper transmission portion and a second upper transmission portion;
the first upper transmission part is a 1 st dove prism, the second upper transmission part is an 11 th prism, the 1 st dove prism is provided with a 1 st dove plane and a 2 nd dove plane which are opposite to each other, the 1 st dove plane and the 2 nd dove plane respectively form an included angle of 135 degrees and an included angle of 45 degrees with the second direction X, the 1 st dove plane is formed into a first upper deflection surface 1111, the 2 nd dove plane is formed into a second upper deflection surface 1121, the 11 th prism is provided with an 11 th separation surface, and the 11 th separation surface is formed into a third upper deflection surface 1131; or alternatively, the process may be performed,
The first upper transfer section is a 12 th prism, the second upper transfer section is a 1 st prism, the 12 th prism has a 12 th separation surface, the 12 th separation surface is configured as a first upper deflection surface 1111, the 1 st prism has a 13 th separation surface and a 14 th separation surface parallel to each other, and the 13 th separation surface and the 14 th separation surface are configured as a second upper deflection surface 1121 and a third upper deflection surface 1131, respectively.
In yet another embodiment of the present utility model, the third optical path 13 includes a fifth middle transmission portion and a sixth middle transmission portion;
the fifth middle transmission portion and the sixth middle transmission portion are respectively a 2 nd diamond prism and a 3 rd diamond prism, the 2 nd diamond prism has a 15 th separation surface and a 16 th separation surface which are parallel to each other, the 3 rd diamond prism has a 17 th separation surface and a 18 th separation surface which are parallel to each other, the 15 th separation surface and the 16 th separation surface are respectively configured as a first middle deflection surface 1311 and a second middle deflection surface 1321, and the 17 th separation surface and the 18 th separation surface are respectively configured as a third middle deflection surface 1331 and a fourth middle deflection surface 1341.
The embodiment of the present utility model further provides an edge three-face detection device, as shown in fig. 3 to 5, the edge three-face detection device includes an optical system 1 and a holding mechanism 2, the optical system 1 is used for detecting defects on edge portions of a product 5 to be detected, the product 5 to be detected has a first surface 51, a second surface 52 and a side surface 53 facing away from each other, the first surface 51 and the second surface 52 have a first edge face 511 and a second edge face 521 at respective circumferential edges, the side surface 53 is connected between the first edge face 511 and the second edge face 521, specifically, referring to fig. 1 and 2, the optical system 1 includes:
A first optical path 11 having a first receiving end and a first emitting end, the first receiving end being positioned to receive the first light from the first edge surface 511 and transmit the first light to the first emitting end;
a second optical path 12 having a second receiving end and a second exiting end, the second receiving end being positioned to receive the second light from the second edge face 521 and to transmit the second light to the second exiting end; and
a third light path 13 having a third receiving end and a third emitting end, the third receiving end being positioned to receive the third light from the side surface 53 and transmit the third light to the third emitting end;
wherein, the first exit end, the second exit end and the third exit end terminate at a collection plane S, defining:
the optical path between the first receiving end and the first emitting end is a first optical path L 1 ；
The optical path between the second receiving end and the second emitting end is a second optical path L 2 ；
The optical path between the third receiving end and the third emitting end is a third optical path L 3 The method comprises the steps of carrying out a first treatment on the surface of the The holding mechanism 2 is used to hold the first optical path 11, the second optical path 12, and the third optical path 13 in a predetermined positional relationship such that the first optical path L 1 Second optical path L 2 Third optical path L 3 The optical paths of the three are equal.
According to the edge three-face detection device, the three optical paths are deflected in the three directions respectively, so that the optical paths of the three optical paths are equal, and finally, only one imaging system is used, so that the three surfaces of the edge area of a liquid crystal panel, a wafer, optical glass and other products can be synchronously subjected to surface defect detection under the condition of ensuring imaging definition, and the imaged images can be clearly collected without adopting a large depth-of-field lens, so that the whole volume of the system is reduced, the system structure is simplified, and the construction cost of expensive equipment is reduced.
In the embodiment of the utility model, the optical system 1 has an object placement plane P, a first direction Z, a second direction X, and a third direction Y; the first direction Z is perpendicular to the object placing plane P, and the first direction Z, the second direction X and the third direction Y are perpendicular to each other; the placement plane P passes through the center 54 of the product 5 to be tested, so that the distance from the first edge surface 511 to the placement plane P is equal to the distance from the second edge surface 521 to the placement plane P.
In the embodiment of the present utility model, the first optical path 11 includes a first upper deflecting surface 1111, a second upper deflecting surface 1121, and a third upper deflecting surface 1131, and the first upper deflecting surface 1111, the second upper deflecting surface 1121, and the third upper deflecting surface 1131 are sequentially arranged along the transmission path of the first light;
the second optical path 12 includes a first lower deflection surface 1211, a second lower deflection surface 1221, and a third lower deflection surface 1231, the first lower deflection surface 1211, the second lower deflection surface 1221, and the third lower deflection surface 1231 being sequentially arranged along the transmission path of the second light ray;
the third optical path 13 includes a first intermediate deflection surface 1311, a second intermediate deflection surface 1321, a third intermediate deflection surface 1331, and a fourth intermediate deflection surface 1341, the first intermediate deflection surface 1311, the second intermediate deflection surface 1321, the third intermediate deflection surface 1331, and the fourth intermediate deflection surface 1341 being arranged in order along the transmission path of the third light ray;
The holding mechanism 2 includes:
a middle mounting plate 23;
an upper mounting plate 21 and a lower mounting plate 22 arranged on both sides of the middle mounting plate 23 in the first direction Z;
wherein the third upper deflection surface 1131, the third lower deflection surface 1231, the first middle deflection surface 1311, and the fourth middle deflection surface 1341 are mounted to the middle mounting plate 23; the first upper deflecting surface 1111 and the second upper deflecting surface 1121 are mounted to the upper mounting plate 21; the first lower deflection surface 1211 and the second lower deflection surface 1221 are mounted to the lower mounting plate 22; the first upper deflection surface 1111, the second upper deflection surface 1121, the third upper deflection surface 1131, the first lower deflection surface 1211, the second lower deflection surface 1221, the third lower deflection surface 1231, the first middle deflection surface 1311, the second middle deflection surface 1321, the third middle deflection surface 1331, and the fourth middle deflection surface 1341 are arranged on the same side with respect to the middle mounting plate 23; at least two of the upper mounting plate 21, the lower mounting plate 22 and the middle mounting plate 23 are combined into a unitary structure, or at least two of the upper mounting plate 21, the lower mounting plate 22 and the middle mounting plate 23 are independently divided into separate structures.
Wherein the holding mechanism 2 is used for mixing:
the positional relationship among the first upper deflection surface 1111, the second upper deflection surface 1121, and the third upper deflection surface 1131 is maintained to be a preset positional relationship;
The positional relationship among the first lower deflection surface 1211, the second lower deflection surface 1221, and the third lower deflection surface 1231 is maintained at a predetermined positional relationship;
the positional relationship among the first intermediate deflection surface 1311, the second intermediate deflection surface 1321, the third intermediate deflection surface 1331, and the fourth intermediate deflection surface 1341 is maintained at a predetermined positional relationship.
To when L 3 After determination, in order toConvenient to adjust 1 And l 3 L 5 And l 7 The holding mechanism 2 further comprises a translation assembly 25, and the upper mounting plate 21 and/or the lower mounting plate 22 and the middle mounting plate 23 form a translation split structure through the translation assembly 25; the translation assembly 25 comprises a translation adjusting piece 253, a translation guide rail 251 fixedly arranged and a sliding block 252 in sliding connection with the translation guide rail 251;
wherein, the translation guide rail 251 extends along the first direction Z, the upper mounting plate 21 or the lower mounting plate 22 is fixedly connected with the slide block 252, and the translation adjusting member 253 is in transmission connection with the slide block 252. The distance between the upper mounting plate 21 or the lower mounting plate 22 and the middle mounting plate 23 can be adjusted by adjusting the translation adjusting member 253, thereby adjusting 1 、l 3 、l 5 L 7 Preferably, the translation adjusting member 253 is a screw, which is screwed with the slider 252, and the distance between the upper mounting plate 21 or the lower mounting plate 22 and the middle mounting plate 23 can be adjusted by screwing or unscrewing a knob on the screw.
In order to make the image display of the edge area clearer, in the embodiment of the present utility model, the optical system 1 further includes the first light source 14 and the second light source 15, the holding mechanism 2 further includes the light source mounting assembly 24, and the first light source 14 and the second light source 15 are mounted to the middle mounting plate 23 through the light source mounting assembly 24, so that the light emitted from the first light source 14 and the second light source 15 irradiates the outer peripheral edge of the product 5 to be measured to form a lighting area M, and a part of the lighting area M is opposite to the first middle deflection surface 1311 in the direction of the optical axis T, and a part of the lighting area M is opposite to the first upper deflection surface 1111 or the second upper deflection surface 1121 in the first direction Z.
In order to enable stable installation and easy adjustment of the light source to accommodate different sizes of products 5 to be tested, the light source installation assembly 24 comprises:
a mounting bracket 241 fixedly connected to the middle mounting plate 23; and
the mounting column 242 is fixedly connected with the mounting frame 241, and the mounting column 242 extends along the first direction Z;
wherein the first light source 14 and the second light source 15 are rotatably and adjustably connected to the mounting post 242.
Still another embodiment of the present utility model further discloses a mid-path direct-irradiation type edge three-face detection optical system 7, referring to fig. 6 and 7, the optical system 7 is used for defect detection of an edge portion of a product 8 to be detected, the product 8 to be detected has a first surface 81, a second surface 82 and a side surface 83 facing away from each other, the first surface 81 and the second surface 82 have a first edge face 811 and a second edge face 821 at respective peripheral edges, respectively, the side surface 83 is connected between the first edge face 811 and the second edge face 821, and the optical system 7 includes:
The first light path 71 includes a first upper deflecting surface 7111, a second upper deflecting surface 7121 and a third upper deflecting surface 7131, and the first light from the first edge surface 811 is projected to a focusing plane O after being deflected by the first upper deflecting surface 7111, the second upper deflecting surface 7121 and the third upper deflecting surface 7131 in sequence;
the second light path 72 includes a first lower deflecting surface 7211, a second lower deflecting surface 7221 and a third lower deflecting surface 7231, and the second light from the second edge surface 821 is projected to the focusing plane O after being deflected by the first lower deflecting surface 7211, the second lower deflecting surface 7221 and the third lower deflecting surface 7231 in order;
the third light path 73 includes a first light-transmitting surface 731 and a second light-transmitting surface 732 opposite to each other, and the third light from the side surface 83 is projected to the focusing plane O after being sequentially transmitted through the first light-transmitting surface 731 and the second light-transmitting surface 732;
wherein, define:
the optical path of the first light is a first optical path T 1 ；
The optical path of the second light is a second optical path T 2 ；
The optical path of the third light ray is a third optical path T 3 The method comprises the steps of carrying out a first treatment on the surface of the Then:
first optical path T 1 A second optical path T 2 Third optical path T 3 The optical paths of the three are equal; the second light path is linear.
According to the optical system 7, the optical paths of the three optical paths are equal by deflecting the related optical paths in three directions, so that the three surfaces of the edge areas of the products such as the liquid crystal panel, the wafer and the optical glass can be synchronously detected by using only one imaging system under the condition of ensuring the imaging definition, and the imaged images can be clearly collected without adopting a large depth-of-field lens, thereby reducing the overall volume of the system, simplifying the system structure and reducing the construction cost of expensive equipment.
Referring again to fig. 6 and 7, the optical system 1 has an object placement plane R, a first direction Y, and a second direction X; the first direction Y is perpendicular to the object placing plane R, and the second direction X is perpendicular to the first direction Y; the object placing plane R passes through the center of the product 8 to be tested, so that the distance from the first edge surface 811 to the object placing plane R is equal to the distance from the second edge surface 821 to the object placing plane R. The arrangement is such that the receiving ends of the first, second and third optical paths 71, 72, 73 are aligned with the first, second and side surfaces 811, 821, 83, respectively.
In an embodiment of the present utility model, the first upper deflection surface 8111 is configured to deflect the first light from a first direction Y to a second direction X;
the second upper deflection surface 8121 is configured to deflect the first light from the second direction X to the first direction Y;
the third upper deflection surface 8131 is configured to deflect the first light from the first direction Y to the second direction X.
In an embodiment of the utility model, the first lower deflection surface 8211 is configured to deflect the second light ray from the first direction Y to the second direction X;
the second lower deflecting surface 8221 is configured to deflect the second light ray from the second direction X to the first direction Y;
the third lower deflecting surface 8231 is configured to deflect the second light ray from the first direction Y to the second direction X.
In the embodiment of the present utility model, the optical system 7 further has an optical axis Q parallel to the second direction X, and the optical axis Q is located in the object placement plane R; wherein the second light-transmitting surface 732, the first light-transmitting surface 731 and the product 8 to be tested are sequentially arranged along the optical axis Q,
wherein the first light-transmitting surface 731 and the second light-transmitting surface 732 are configured to: the third light sequentially passes through the first light-transmitting surface 731 and the second light-transmitting surface 732 along the direction of the optical axis Q, and finally is projected onto the focusing plane O.
In the embodiment of the present utility model, the first light source 74 and the second light source 75 are further included, and the light emitted by the first light source 74 and the second light source 75 irradiates on the outer peripheral edge of the product 8 to be measured to form a lighting area N, where a part of the lighting area N is opposite to the first light-transmitting surface 731 in the direction of the optical axis Q, and a part of the lighting area N is opposite to the first upper deflecting surface 7111 or the first lower deflecting surface 7211 in the first direction Y.
In an embodiment of the utility model, a definition is made:
the first ray of light starts from the first edge surface 811 to the first upper deflecting surface 7111 along the first direction Y by a distance h 1 ；
The first light ray starts from the first upper deflection surface 7111 to the second upper deflection surface 7121 along the second direction X by a distance h 2 ；
The first light ray starts from the second upper deflecting surface 7121 to the third upper deflecting surface 7131 along the first direction Y by a distance h 3 ；
The first ray of light starts from the third upper deflecting surface 7131 along the second direction X to the focal plane O by a distance h 4 The method comprises the steps of carrying out a first treatment on the surface of the Then:
first optical path T 1 Length of T 1 ＝h 1 +h 2 +h 3 +h 4 。
In an embodiment of the utility model, a definition is made:
the second light ray starts from the second edge surface 821 to the first lower deflection surface 7211 along the first direction Y with a distance h 5 ；
The second light ray starts from the first lower deflection surface 7211 to the second lower deflection surface 7221 along the second direction X with a distance h 6 ；
The distance h from the second lower deflection surface 7221 to the third lower deflection surface 7231 along the first direction Y of the second light ray 7 ；
The second light ray is directed from the third lower deflection surface 7231 to the focusing plane O along the second direction X by a distance h 8 The method comprises the steps of carrying out a first treatment on the surface of the Then:
first optical path T 2 Length of T 2 ＝h 5 +h 6 +h 7 +h 8 。
In the embodiment of the present utility model, the third optical path 73 includes a middle light transmission member made of a transparent material, which maintains the positional relationship between the first light-transmitting surface 731 and the second light-transmitting surface 732 as: allowing the transmitted light from the first light-transmitting surface 731 to reach the second light-transmitting surface 732 in the direction of the optical axis Q; the medium light transmission member includes first and second surfaces facing each other in the direction of the optical axis Q, the first and second surfaces being configured as first and second light-transmitting surfaces 731 and 732, respectively; definition:
The dimension of the medium light transmission member in the direction of the optical axis Q is t;
the refractive index of the medium light transmission component is n; then there are:
third optical path T 3 The length of (2) is: t (T) 3 ＝h 2 +h 4 -t+n.t, or, T 3 ＝h 6 +h 8 -t+n·t；
Wherein T is 1 ＝T 2 ＝T 3 。
In the embodiment of the present utility model, the first optical path 71 includes a first upper transmission part, a second upper transmission part, and a third upper transmission part;
the first upper transfer section, the second upper transfer section, and the third upper transfer section are a 1 st prism 711, a 2 nd prism 712, and a 3 rd prism 713, respectively, and the 1 st prism 711, the 2 nd prism 712, and the 3 rd prism 713 have a 1 st separation surface, a 2 nd separation surface, and a 3 rd separation surface, respectively, and the 1 st separation surface, the 2 nd separation surface, and the 3 rd separation surface are configured as a first upper deflection surface 7111, a second upper deflection surface 7121, and a third upper deflection surface 7131, respectively.
In the embodiment of the present utility model, the second optical path 72 includes a first lower transmission part 721, a second lower transmission part 722, and a third lower transmission part 723;
the first lower transfer portion 721, the second lower transfer portion 722, and the third lower transfer portion 723 are a 4 th prism, a 5 th prism, and a 6 th prism, respectively, and the 4 th prism, the 5 th prism, and the 6 th prism have a 4 th separation surface, a 5 th separation surface, and a 6 th separation surface, respectively, and the 4 th separation surface, the 5 th separation surface, and the 6 th separation surface are configured as a first lower deflection surface 7211, a second lower deflection surface 7221, and a third lower deflection surface 7231, respectively.
The above describes in detail a middle road direct-irradiation type edge three-face detection optical system and an edge three-face detection device provided by the embodiment of the present utility model, and specific examples are applied to describe the principle and implementation of the present utility model, and the description of the above embodiment is only used to help understand the technical scheme and core idea of the present utility model; those of ordinary skill in the art will appreciate that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the utility model.

Claims (12)

1. A mid-way direct-irradiation type edge three-face detection optical system for detecting defects in an edge portion of a product to be detected, the product to be detected having a first surface, a second surface, and a side surface facing away from each other, the first surface and the second surface having a first edge face and a second edge face at respective peripheral edges, respectively, the side surface being connected between the first edge face and the second edge face, the optical system comprising:
The first light path comprises a first upper deflection surface, a second upper deflection surface and a third upper deflection surface, and first light rays from the first edge surface are projected to a focusing plane after being deflected by the first upper deflection surface, the second upper deflection surface and the third upper deflection surface in sequence;
the second light path comprises a first lower deflection surface, a second lower deflection surface and a third lower deflection surface, and second light rays from the second edge surface are projected to the focusing plane after being deflected by the first lower deflection surface, the second lower deflection surface and the third lower deflection surface in sequence;
the third light path comprises a first light-transmitting surface and a second light-transmitting surface which are opposite to each other, and third light rays from the side surface are projected to the focusing plane after being transmitted by the first light-transmitting surface and the second light-transmitting surface in sequence;
wherein, define:
the optical path of the first light is a first optical path T 1 ；
The optical path of the second light is a second optical path T 2 ；
The optical path of the third light is a third optical path T 3 The method comprises the steps of carrying out a first treatment on the surface of the Then:
the first optical path T 1 A second optical path T 2 Third optical path T 3 The optical paths of the three are equal; the second light path is linear.
2. The direct-mode edge-trihedral detection optical system of claim 1, wherein the optical system has an object plane, a first direction, and a second direction; the first direction is perpendicular to the object placing plane, and the second direction is perpendicular to the first direction; the object placing plane passes through the center of the product to be tested, so that the distance between the first edge surface and the object placing plane is equal to the distance between the second edge surface and the object placing plane.
3. The mid-road direct edge three detection optical system of claim 2, wherein the first upper deflection surface is configured to deflect the first light ray from the first direction to the second direction;
the second upper deflection surface is configured to deflect the first light from the second direction to the first direction;
the third upper deflection surface is configured to deflect the first light from the first direction to the second direction.
4. A direct-mode edge-trihedral detection optical system as claimed in claim 3, wherein said first lower deflection surface is configured to deflect said second light ray from said first direction to said second direction;
the second lower deflection surface is configured to deflect the second light from the second direction to the first direction;
the third lower deflection surface is configured to deflect the second light from the first direction to the second direction.
5. A direct-entry edge-trihedral detection optical system as claimed in claim 4, further having an optical axis parallel to said second direction, said optical axis lying in said object-placement plane; wherein the second light-transmitting surface, the first light-transmitting surface and the product to be tested are sequentially arranged along the optical axis,
Wherein the first light-transmitting surface and the second light-transmitting surface are configured to: the third light sequentially penetrates through the first light-transmitting surface and the second light-transmitting surface along the direction of the optical axis and finally is projected to the focusing plane.
6. The direct-mode edge three-face detection optical system of claim 5, further comprising a first light source and a second light source, wherein light emitted from the first light source and the second light source irradiates on an outer peripheral edge of the product to be detected to form a lighting area, a part of the lighting area is opposite to the first light-transmitting surface in the direction of the optical axis, and a part of the lighting area is opposite to the first upper deflection surface or the first lower deflection surface in the first direction.
7. The direct-in-path edge three-sided detection optical system of claim 5, defining:
the distance from the first edge surface to the first upper deflection surface along the first direction of the first light ray is h 1 ；
The distance from the first upper deflection surface to the second upper deflection surface along the second direction of the first light ray is h 2 ；
The distance from the second upper deflection surface to the third upper deflection surface along the first direction of the first light ray is h 3 ；
The first light ray is directed from the second directionThe distance from the third upper deflection surface to the focusing plane is h 4 The method comprises the steps of carrying out a first treatment on the surface of the Then:
the first optical path T 1 Length of T 1 ＝h 1 +h 2 +h 3 +h 4 。
8. The direct-in-path edge three-sided detection optical system of claim 7, defining:
the distance from the second edge surface to the first lower deflection surface along the first direction of the second light ray is h 5 ；
The distance from the first lower deflection surface to the second lower deflection surface along the second direction of the second light ray is h 6 ；
The distance from the second lower deflection surface to the third lower deflection surface along the first direction is h 7 ；
The distance from the third lower deflection surface to the focusing plane along the second direction of the second light ray is h 8 The method comprises the steps of carrying out a first treatment on the surface of the Then:
the first optical path T 2 Length of T 2 ＝h 5 +h 6 +h 7 +h 8 。
9. The medium-path direct-projection type edge three-face detection optical system according to claim 8, wherein the third optical path includes a medium light transmission member made of a transparent material, the medium light transmission member maintaining a positional relationship between the first light-transmitting face and the second light-transmitting face as: allowing transmitted light from the first light-transmitting surface to reach the second light-transmitting surface in the direction of the optical axis; the intermediate light transmission member includes a first surface and a second surface opposite to each other in a direction of the optical axis, the first surface and the second surface being configured as the first light-transmitting surface and the second light-transmitting surface, respectively; definition:
The dimension of the medium light transmission component in the direction of the optical axis is t;
the refractive index of the medium light transmission component is n; then there are:
the third optical path T 3 The length of (2) is: t (T) 3 ＝h 2 +h 4 -t+n.t, or, T 3 ＝h 6 +h 8 -t+n·t；
Wherein T is 1 ＝T 2 ＝T 3 。
10. The medium-path direct-projection type edge three-face detection optical system according to claim 1, wherein the first optical path includes a first upper transmission section, a second upper transmission section, and a third upper transmission section;
the first upper transmission part, the second upper transmission part and the third upper transmission part are respectively a 1 st prism, a 2 nd prism and a 3 rd prism, the 1 st prism, the 2 nd prism and the 3 rd prism are respectively provided with a 1 st separation surface, a 2 nd separation surface and a 3 rd separation surface, and the 1 st separation surface, the 2 nd separation surface and the 3 rd separation surface are respectively formed into the first upper deflection surface, the second upper deflection surface and the third upper deflection surface.
11. The medium-path direct-projection type edge three-face detection optical system according to claim 1, wherein the second optical path includes a first lower transmission portion, a second lower transmission portion, and a third lower transmission portion;
the first lower transmission part, the second lower transmission part and the third lower transmission part are respectively a 4 th prism, a 5 th prism and a 6 th prism, the 4 th prism, the 5 th prism and the 6 th prism are respectively provided with a 4 th separation surface, a 5 th separation surface and a 6 th separation surface, and the 4 th separation surface, the 5 th separation surface and the 6 th separation surface are respectively formed into the first lower deflection surface, the second lower deflection surface and the third lower deflection surface.
12. An edge three-face detection device comprising a holding mechanism and a middle-path direct-irradiation type edge three-face detection optical system according to any one of claims 1 to 11, wherein the holding mechanism is configured to hold the first optical path, the second optical path, and the third optical path in a predetermined positional relationship such that the first optical path, the second optical path, and the third optical path are in the same orderFirst optical path L 1 Second optical path L 2 Third optical path L 3 The optical paths of the three are equal; the second optical path is held in a straight line by the holding mechanism.
CN202320055796.5U 2023-01-09 2023-01-09 Middle road direct-irradiation type edge three-side detection optical system and edge three-side detection device Active CN219590209U (en)

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Application Number Priority Date Filing Date Title
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