TW501219B - Holder mechanism - Google Patents

Holder mechanism Download PDF

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Publication number
TW501219B
TW501219B TW090110033A TW90110033A TW501219B TW 501219 B TW501219 B TW 501219B TW 090110033 A TW090110033 A TW 090110033A TW 90110033 A TW90110033 A TW 90110033A TW 501219 B TW501219 B TW 501219B
Authority
TW
Taiwan
Prior art keywords
movable
holder
glass substrate
movable reference
frame
Prior art date
Application number
TW090110033A
Other languages
Chinese (zh)
Inventor
Norio Maruyama
Original Assignee
Olympus Optical Co
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Publication date
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Publication of TW501219B publication Critical patent/TW501219B/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting substrates others than wafers, e.g. chips

Abstract

The holder mechanism of the present invention comprises a holder frame holding a held body, a fixed reference member installed on the holder frame and allowing the held body to press thereagainst, a movable reference member movable relative to the holder frame according to the size of the held body and allowing the held body to press thereagainst, a pressing member installed, by at least one, on the holder frame in lateral and vertical directions and pressing the held body against the fixed reference member or the movable reference member, and a drive part driving the movable reference member.

Description

501219 A7 B7 五、發明説明（1 ) 【技術領域】 本發明係有關例如檢查使用於液晶顯示器（LCD )等 之光板顯示器（F P D )之玻璃基板，而適用於將缺陷等檢 測出之基板檢查裝置之保持器機構。 【技術背景】 使用於L C D之玻璃基板的缺陷檢查中，實彳了有稱爲巨 觀觀察之檢查與稱爲微觀察之檢查。其中巨觀觀察中在玻 璃基板之表面以照明光照射，將其反射光或者透過光之光 學變化藉由檢查者之目視來觀察，而檢測出玻璃基板表面 上的傷等缺陷。 在此巨觀觀察牛，將玻璃基板保持在基板檢查裝置之 保持器上，在此狀態下搖動前述保持器，藉由檢查者之目 視來觀察前述玻璃基板之表面。並且，在接著觀察前述玻 璃基板之背面的情形將前述玻璃基板翻面，與上述相同搖 動前述保持器，藉由檢查者之目視來觀察前述玻璃基板之 背面。 在上述般之巨觀觀察或者使用顯微鏡等之微觀觀察中 ，係對於複數尺寸的玻璃基板來進行檢查。 第1 4圖係顯示有關使用以往例之基板檢查裝置之基板 保持器的構成。基板保持器1係由形成四邊形框狀的保持 器框2所形成。在此保持器框2雖然有爲了將FPD之玻璃 基板從背面支持之圖中未示之支持棒或者支持銷’但是係 以所定之間隔均等地設置。另外，在保持器框2中沿著右 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） _ 4 - (請先閱讀背面之注意事項再填寫本頁) 裝·501219 A7 B7 V. Description of the Invention (1) [Technical Field] The present invention relates to, for example, inspecting glass substrates of light panel displays (FPDs) used in liquid crystal displays (LCDs) and the like, and is applicable to substrate inspection devices that detect defects and the like. Its holder mechanism. [Technical Background] In the inspection of glass substrates used in L C D, inspections called macro observations and inspections called micro observations have been implemented. In the macroscopic observation, the surface of the glass substrate is illuminated with illumination light, and the optical changes of the reflected light or transmitted light are observed by the inspector's eyes, and defects such as injuries on the surface of the glass substrate are detected. Observe the cow at this giant observation, hold the glass substrate on the holder of the substrate inspection device, shake the holder in this state, and observe the surface of the glass substrate by the inspector's eyes. Then, when the back surface of the glass substrate is observed next, the glass substrate is turned upside down, the holder is shaken in the same manner as described above, and the back surface of the glass substrate is observed by the inspector's eyes. In the above-mentioned macroscopic observation or microscopic observation using a microscope, a glass substrate of a plurality of sizes is inspected. Figure 14 shows the structure of a substrate holder using a conventional substrate inspection apparatus. The substrate holder 1 is formed of a holder frame 2 formed in a rectangular frame shape. Here, the retainer frame 2 has support rods or support pins (not shown) for supporting the glass substrate of the FPD from the back side, but is evenly arranged at predetermined intervals. In addition, along the right side of the holder frame 2, this paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) _ 4-(Please read the precautions on the back before filling this page)

、1T 經濟部智慧財產局員工消費合作社印製 501219 A7 B7 五、發明説明（2 ) 側與下側的框，各別之基準銷3a、3b與3c、3d被固定而 設定之同時，在保持器2中沿著上側與左側之框，設置有 各別之卡壓銷4a、4b與4c、4d。這些卡壓銷4a、4b與 4c、4d係各別彈壓於各卡壓方向Π、f2，將玻璃基板8卡 壓於基準銷3c、3d與3a、3b來進行玻璃基板8之位置決 定。但是，各卡壓銷4a、4b與4c、4d係在各別之可動孔 5a、5b與5c、5d內可向各卡壓方向f1、f2移動。 另外，在保持框2中於上側與下側之框上，各別形成 有基準銷元件安裝部7a、7b。在這些基準銷元件安裝部7a 、7b中，爲了設定尺寸相異之玻璃基板的基準位置之基準 銷元件（棧）6係藉由螺絲等而被安裝。基準銷元件6係設 定尺寸小之玻璃基板的基準位置。在基準銷元件6中，2個 基準銷6a、6b係被固定而設置。 第1 5圖係顯示在上述基板保持器中將大型玻璃基板保 持之狀態。在前述基板保持架1進行大型玻璃基板8之巨 觀觀察（或者微觀觀察）時，藉由檢查者之手動作業，從 保持框2將基準銷元件2去除。在此狀態下當在保持框2 將大型玻璃基板8組立時，卡壓銷4a、4b與4c、4d將各 別向卡壓方向Π、f2卡壓，大型之玻璃基板8之二邊將在 基準銷3c、3d與3a、3b被卡壓。藉此可決定大型玻璃基 板8之位置。. 第1 6圖係顯示在上述基板保持器中將小型玻璃基板保 持之狀態。在前述基板保持架彳進行小型玻璃基板9之巨 觀觀察（或者微觀觀察）時，藉由檢查者之手動作業，在 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -5 - (請先閲讀背面之注意事項再填寫本頁) _裝· 線 經濟部智慧財產局員工消費合作社印製 501219 經濟部智慧財產局員工消費合作社印製 A7 _B7_五、發明説明（3 ) 保持框2將基準銷元件6安裝。在此種狀態下當在保持框 2將小型玻璃基板8組立時，卡壓銷4b與4c、4d將各別 向卡壓方向Π、f2卡壓，小型之玻璃基板9的二邊將在各 別之基準銷3d與6a、6b被卡壓。藉此可決定小型玻璃基 板9之位置。 在上述基板保持器1中，例如在大型玻璃基板8之巨 觀觀察之後進行小型玻璃基板9之微觀觀察的情形，爲了 變更此小型玻璃基板9的基準位置，必須將基準銷元件6 藉由檢查者的手動作業來安裝。此基準銷元件6雖然藉由 螺絲等手段使基準位置不動而安裝，但是此安裝之去除作 業非常地繁雜且需要時間。因此，當尺寸相異之玻璃基板 混在群中時，在基準銷元件6之著脫作業上需要時間，使 爲要求檢查之效率化將變困難。並且，隨著之大化，保持 框2也變成大型產品。因此，在安裝基準玻璃基板8銷元 件6時，檢查者將無法將手達到基板保持器1之後方，而 也有無法鎖螺絲之情形。並且，因爲隨著此作業的麈埃， 而產生基板檢查裝置之淸深度降低的問題。 本發明之目的係提供對於尺寸相異之玻璃基板可簡單 地進行基準構件之變更作業。 【發明之開示.】 (1 ) '本發明之保持器機構係具備有保持被保持物之 保持器框 '與設置在前述保持器框，將前述被保持卡壓之 @ f基準構件、與針對前述被保持體之尺寸對於前述保持 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇χ297公釐） -Q： - (請先閱讀背面之注意事項再填寫本頁) -裝· 訂 線 501219 經濟部智慧財產局員工消費合作社印製 A7 B7五、發明説明（4 ) 器框可動的，而將前述被保持體卡壓之可動基準構件、與 在前述保持器框之橫方向與縱方向至少各自設置一個，將 前述被保持體卡壓在前述固定基準構件或者前述可動基準 構件之卡壓構件、與驅動前述可動基準構件之驅動部。 (2 )、本發明之保持器機構係如上述（1 )之機構， 其中前述可動基準構件係對應於複數之前述被保持體之尺 寸之位置，複數組地被設置。 (3 )、本發明之保持器機構係如上述（1 )或（2 )之 機構，其中前述固定基準構件係將前述被保持體之鄰二邊 卡壓般設置成複數個。 (4 )、本發明之保持器機構係如上述（2 )之機構， 其中前述驅動部係對應於保持在前述保持器框之被保持體 的尺寸，選擇性地驅動複數組之前述可動基準構件。 (5 )、本發明之保持器機構係如上述（1 )之機構， 其中前述可動基準構件係在對應前述被保持體之尺寸位置 可自由旋轉，將前述保持器框在保持所定尺寸之被保持體 時向前述保持器框之內側方向旋轉，在保持前述所定尺寸 以之外之被保持體時向前述保持器框之外側方向轉。 (6 )、本發明之保持器機構係如上述（5 )之機構， 其中前述保持器框係在將前述可動基準構件向前述保持器 框體之外側方向旋轉時，將前述可動基準構件退避形成退 避部。 (7 )、本發明之保持器機構係如上述（1 )之機構’ 其中前述可動基準構件係設置在前述保持器框之橫方向與 (請先閲讀背面之注意事項再填寫本頁) .裝. 訂 線 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 501219 經濟部智慧財產局員工消費合作社印製 A7 __ B7五、發明説明（5 ) 縱方向之至少一方可自由移動地設置之移動構件上。 (8 )、本發明之保持器機構係如上述（7 )之機構， 其中前述移動構件係在前述橫方向與縱方向之至少一方形 成自由移動之工字型。 (9 )、本發明之保持器機構係如（7 )之機構，其中 前述移動構件係在前述橫方向與縱方向之西方形成自由移 動之L字型。 (1 0 )本發明之保持器機構具備有保持被保持體之保 持器框、與設置在前述保持器框，將前述被保持體卡壓之 固定基準構件、與對應於前述被保持體的尺寸對於前述保 持器可動，將前述保持體卡壓之可動構件、與驅動前述可 動構件之驅動部。 【爲實施發明之最良形態】 以下將本發明之第1實施形態參照圖面加以說明。但 是，在各圖中與第14圖相同之部分將附上同一圖號並省略 其詳細說明。 第1圖係爲顯示有關本發明之第1實施形態的基板檢 查裝置的構成斜視圖。此檢查裝置係爲了檢查液晶顯示器 或電漿顯示器等之閃光板顯示器（FPD )之玻璃基板。在 第1圖中，於裝置本體201上設置有保持檢查對象之玻璃 基板8之保持器框2。 保持器框2係形成爲四角形狀之框，在其周緣部吸附 保持大型之玻璃基板8。在保持器框2中，於其緣部所包圍 (請先閲讀背面之注意事項再填寫本頁) •裝·1T printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 501219 A7 B7 V. Description of the invention (2) The frame on the side and the lower side, the respective reference pins 3a, 3b and 3c, 3d are fixed and set, while maintaining In the device 2, along the upper and left sides of the frame, respective latching pins 4a, 4b and 4c, 4d are provided. These clamping pins 4a, 4b, 4c, and 4d are respectively spring-pressed in the respective clamping directions Π, f2, and the glass substrate 8 is pressed against the reference pins 3c, 3d, 3a, and 3b to determine the position of the glass substrate 8. However, each of the locking pins 4a, 4b, 4c, and 4d is movable within the respective movable holes 5a, 5b, 5c, and 5d in the respective locking directions f1 and f2. In the holding frame 2, reference pin element mounting portions 7a, 7b are formed on the upper and lower frames, respectively. In these reference pin element mounting portions 7a and 7b, a reference pin element (stack) 6 is set by screws or the like in order to set a reference position of glass substrates having different sizes. The reference pin element 6 sets a reference position of a small-sized glass substrate. In the reference pin element 6, two reference pins 6a, 6b are fixed and provided. Fig. 15 shows a state where a large glass substrate is held in the substrate holder. When the substrate holder 1 performs macroscopic observation (or microscopic observation) of a large glass substrate 8, the reference pin element 2 is removed from the holding frame 2 by a manual operation of an inspector. In this state, when the large glass substrate 8 is assembled in the holding frame 2, the clamping pins 4a, 4b, 4c, and 4d will be respectively pressed in the clamping direction Π and f2, and the two sides of the large glass substrate 8 will be at The reference pins 3c, 3d and 3a, 3b are clamped. By this, the position of the large glass substrate 8 can be determined. Fig. 16 shows a state where a small glass substrate is held in the substrate holder. During the macroscopic observation (or microscopic observation) of the small glass substrate 9 by the aforementioned substrate holder, by the manual operation of the inspector, the Chinese National Standard (CNS) A4 specification (210X297 mm) is applied at this paper size -5 -(Please read the notes on the back before filling out this page) _Printed · Printed by the Consumers 'Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 501219 Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economics A7 _B7_ V. Description of the invention (3) Keep The frame 2 mounts the reference pin element 6. In this state, when the small glass substrates 8 are assembled in the holding frame 2, the clamping pins 4b, 4c, and 4d will be respectively pressed in the clamping directions Π and f2, and the two sides of the small glass substrate 9 will be at each The other reference pins 3d, 6a, and 6b are stuck. By this, the position of the small glass substrate 9 can be determined. In the substrate holder 1 described above, for example, when the microscopic observation of the small glass substrate 9 is performed after the macroscopic observation of the large glass substrate 8, in order to change the reference position of the small glass substrate 9, the reference pin element 6 must be inspected. Installation manually. Although the reference pin element 6 is mounted by keeping the reference position fixed by means of screws or the like, the removal work of the mounting is very complicated and requires time. Therefore, when glass substrates of different sizes are mixed in the group, it takes time to perform the work of removing the reference pin element 6, and it becomes difficult to improve the efficiency of inspection. Moreover, as it becomes larger, the holding frame 2 also becomes a large-scale product. Therefore, when the pin 6 of the reference glass substrate 8 is mounted, the inspector cannot reach behind the substrate holder 1 and the screw cannot be locked. In addition, a problem arises in that the depth of the substrate is reduced due to the angstrom of the work. An object of the present invention is to provide a method for easily changing a reference member for glass substrates having different sizes. [Invention of the invention.] (1) 'The retainer mechanism of the present invention is provided with a retainer frame for holding an object to be held' and an @f reference member provided in the aforementioned retainer frame to hold and hold the aforementioned retainer. For the size of the above-mentioned retained body, the Chinese National Standard (CNS) A4 specification (21 × 297 mm) applies to the above-mentioned holding of the paper size. -Q:-(Please read the precautions on the back before filling this page)-Binding and binding 501219 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (4) The movable reference member with the holder held in place, and the horizontal and vertical directions of the holder held by the holder At least one of each is provided, and the holding body is pressed against the fixed reference member or the movable reference member by a pressing member and a driving portion that drives the movable reference member. (2) The retainer mechanism of the present invention is the mechanism as described in (1) above, wherein the movable reference member corresponds to a plurality of positions of the size of the retained body, and is provided in plural arrays. (3) The retainer mechanism of the present invention is the mechanism as described in (1) or (2) above, in which the aforementioned fixed reference member is provided as a plurality of clamped adjacent sides of the retained body. (4) The retainer mechanism of the present invention is the mechanism as described in (2) above, wherein the aforementioned drive unit selectively drives the aforementioned movable reference member of the complex array corresponding to the size of the object to be retained held in the aforementioned retainer frame. . (5) The retainer mechanism of the present invention is a mechanism as described in (1) above, wherein the movable reference member is freely rotatable at a position corresponding to the size of the object to be held, and the retainer frame is held while maintaining a predetermined size. The body rotates toward the inner side of the holder frame when the body is turned, and turns toward the outer side of the holder frame when the held body other than the predetermined size is held. (6) The retainer mechanism of the present invention is the mechanism as described in (5) above, wherein the retainer frame is formed by retreating the movable reference member when the movable reference member is rotated toward the outside of the retainer frame. Retreat. (7) The retainer mechanism of the present invention is the mechanism as described in (1) above, wherein the aforementioned movable reference member is provided in the transverse direction of the aforementioned retainer frame and (please read the precautions on the back before filling this page). . The paper size of the book is applicable to China National Standard (CNS) A4 specification (210X297 mm) 501219 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 __ B7 V. Description of the invention (5) At least one of the vertical direction can move freely Set on the moving member. (8) The retainer mechanism of the present invention is the mechanism as described in (7) above, wherein the moving member is an I-shape that moves freely in at least one of the horizontal and vertical squares. (9) The retainer mechanism of the present invention is a mechanism such as (7), wherein the moving member is formed in an L-shape that can move freely in the west of the horizontal direction and the vertical direction. (10) The holder mechanism of the present invention includes a holder frame for holding an object to be held, and a fixed reference member provided in the holder frame to hold the object to be held, and a size corresponding to the object to be held. Regarding the holder being movable, a movable member that compresses the holder and a driving section that drives the movable member. [Best Mode for Carrying Out the Invention] A first embodiment of the present invention will be described below with reference to the drawings. However, in each figure, the same parts as those in FIG. 14 will be assigned the same figure numbers and detailed explanations thereof will be omitted. Fig. 1 is a perspective view showing a configuration of a substrate inspection apparatus according to a first embodiment of the present invention. This inspection device is used to inspect the glass substrate of a flash panel display (FPD) such as a liquid crystal display or a plasma display. In Fig. 1, a holder frame 2 for holding a glass substrate 8 to be inspected is provided on the apparatus body 201. The holder frame 2 is formed as a rectangular frame, and a large-sized glass substrate 8 is sucked and held at its peripheral portion. The holder frame 2 is surrounded by its edges (please read the precautions on the back before filling this page)

、tT 線‘ 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -8 - 501219 經濟部智慧財產局員工消費合作社印製 A7 ____B7__五、發明説明（6 ) 之空間係形成四角形狀，前述空部的面積要比大型之玻璃 基板8的面積稍小。另外，沿著保持器框2之周緣部設置 有未圖示之複數吸附盤，因藉由未圖示之真空幫浦將玻璃 基板8之周緣部吸附在保持器框2表面，而能將玻璃基板 8不會在保持器框2上脫落地保持。但是，有關保持框2 之詳細構成將在後面敘述。 如第1圖所示，在裝置本體201沿著保持器框2之兩 側緣向丫軸方向平行配置一對導引軌道202、202。另外， 在保持器框2之上方，跨越此保持器框2般配置門柱型觀 察元件支持部203。此觀察元件支持部203係沿著導引軌 道2 02、2 02將保持在玻璃基板8之上方，也就是水平狀態 之保持器框2之上方可在Y軸方向移動而設置。 在觀察元件支持部203中，觀察元件204係對於觀察 元件部203之移動方向（Y軸方向）之直交方向（X軸方 向）沿著未圖示之導引軌道可移動地被支持。並且在觀察 元件支持部203中，對向於觀察元件204之移動線設置有 透過線照明光源205。此透過線照明光源205係通過保持 器框2下方在支持部203的背板206上沿著X軸方向而配 置。因爲透過線照明光源205係從玻璃基板8的下方進行 直線狀的透過照明，所以與觀察元件支持部203 —起可向 Y軸方向移動。 觀察元件204係具有設置指標用照明光源207之微細 觀察元件208與巨觀觀察用的部分巨觀照明光源209。指 標用照明光源207係因爲爲了特定玻璃基板8上之缺陷的 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -9 - (讀先閱讀背面之注意事項再填寫本頁) •裝. 訂 線 501219 經濟部智慧財產局員工消費合作社印製 A7 _B7五、發明説明（7 ) 位置，所以將光學性集光之投影光投射在玻璃基板8表面 〇 微細觀察元件208係具備有接物鏡211、接目鏡212 以及未圖示之具有落射照明光源之顯微鏡機能，檢查者係 能將玻璃基板8表面的像介著接物鏡2 1 1藉由接目鏡2 1 2 來觀察。另外在微細觀察元件208中，介著三眼鏡筒裝設 有TV攝影機。TV攝影機2 1 3係將藉由接物鏡2 1 1所得之 玻璃基板8表面的觀察像攝影，送往控制部226。控制部 221係將以TV攝影機213所攝影的觀察像表示在TV監視 器2 22上。在控制部221中檢查者爲了進行動作指令或數 據入力而連接有人力部223。 部分巨觀照明光源209係使用於巨觀觀察，將保持於 水平狀態之保持器框2上之玻璃基板8表面的一部分，以 巨觀照明光照射。但是使用未圖示之全面巨觀照明光源來 進行玻璃基板8之表面全體的巨觀觀察時，雖然搖動保持 玻璃基板8之保持器框2，但是有關其機構則省略圖示。 第2圖係爲顯示使用於上述基板檢查裝置之基板保持 器的構成圖。基板保持器1係由形成爲四角形框狀之保持 器框2所形成。在此保持器雁2中設置有一對可動基準銷 機構1 〇、1 1。此一對之可動基準銷機構1 0、1 1係如第1 4 圖所示設定在對應小型玻璃基板（被保持體）1 9之基準位 置。這些可動基準銷機構1 0、1 1係在各別之保持器框2中 於檢查者之後側與前側對向地配置。可動基準銷機構1 〇、 1 1係對應於基板尺寸的切換指示，有在將各別之可動基準 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） :10 - ^~ (請先閱讀背面之注意事項再填寫本頁) .裝· 訂 線 501219 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明説明（8) 銷101、111退避的位置或者基準位置上可動控制之機能。 也就是，因可動基準銷1 0 1、1 1 1係在前述基準位置可移動 ，所以對於小型玻璃基板9基準位置將自動地被設定。另 外，在保持器框2中在檢查者之背側與前側的框上，相當 於各別前述退避位置的場所，形成有U字型之退避用孔1 4 、1 5 〇 第3A圖係爲可動基準銷機構1 1 ( 1 〇 )之具體構成圖 ，第3B圖爲L字型臂之平面圖與側斷面圖。在第3A圖中 ，顯示於保持器框2之前側（檢查者側）的框內所配置之 可動基準銷機構1 1。 可動基準銷機構1 1 ( 1 0 )係具備有L字型臂1 02。如 第3B圖所示，在L字型臂102的自由端部上面，自由旋轉 地設置有在鋼架軸承之周面塗覆耐摩耗性樹脂（例如：聚 醯亞胺、氯乙醚、甲酮等）之可動基準銷1 1 1 ( 1 01 )。在 L字型臂1 02的基端部下面，自由旋轉地設置可動銷1 03 ( 鋼珠軸承）。另外，在保持器框2內設置有空氣汽缸1 04 〇 空氣汽缸1 04係具有可直動之二隻汽缸桿1 05、1 05。 在汽缸桿1 05、1 05的先端部，裝設有直動、旋動變換構件 1 06。在直動、旋動構件1 06中，設置有長孔1 07，此長孔 1 〇7插入有可動銷1 03。在L字型臂1 02的屈曲部中，介 著鋼珠軸承設置有旋轉軸108。L字型臂102係以旋轉軸 108爲中心自由旋轉地配置在箭頭a方向。, TT line 'This paper size applies to Chinese National Standard (CNS) A4 specification (210X 297 mm) -8-501219 Printed by A7 ____B7__ of the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. The space of the invention description (6) is formed In a rectangular shape, the area of the aforementioned hollow portion is slightly smaller than that of the large-sized glass substrate 8. In addition, a plurality of suction pads (not shown) are provided along the peripheral edge portion of the holder frame 2, and the peripheral edge portion of the glass substrate 8 is adsorbed on the surface of the holder frame 2 by a vacuum pump (not shown), thereby enabling glass The substrate 8 is held without falling off from the holder frame 2. However, the detailed structure of the holding frame 2 will be described later. As shown in Fig. 1, a pair of guide rails 202 and 202 are arranged in parallel on the apparatus body 201 along the two sides of the holder frame 2 in the direction of the y-axis. Further, above the holder frame 2, a gate-type observation element supporting portion 203 is disposed across the holder frame 2. This observation element supporting portion 203 is provided above the glass substrate 8 along the guide rails 202 and 202, that is, it can be moved in the Y-axis direction above the holder frame 2 in a horizontal state. In the observation element supporting portion 203, the observation element 204 is movably supported along a guide track (not shown) in a direction orthogonal to the moving direction (Y-axis direction) of the observation element portion 203 (X-axis direction). In the observation element supporting portion 203, a transmission line illumination light source 205 is provided for a moving line toward the observation element 204. This transmission line illumination light source 205 is arranged along the X-axis direction on the back plate 206 of the support portion 203 under the holder frame 2. Since the transmission line illumination light source 205 performs linear transmission illumination from below the glass substrate 8, it can move in the Y-axis direction together with the observation element support portion 203. The observation element 204 is a fine observation element 208 provided with an illumination light source 207 for indexing and a part of the macroscopic illumination light source 209 for macroscopic observation. The illuminating light source 207 for the index is because the paper size of this paper is used to specify the defects on the glass substrate 8. The Chinese standard (CNS) A4 specification (210X297 mm) -9-(Read the precautions on the back before filling in this page) • Binding line 501219 Printed by A7 _B7 in the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. The description of the invention (7), so the projection light of the optical light collection is projected on the surface of the glass substrate 8. The fine observation element 208 is The objective lens 211, the eyepiece 212, and a microscope function with an epi-illumination light source (not shown) allow the inspector to observe the image on the surface of the glass substrate 8 through the objective lens 2 1 1 through the eyepiece 2 1 2. A TV camera is installed in the micro-viewing element 208 through a three-lens tube. The TV camera 2 1 3 photographs the observation image on the surface of the glass substrate 8 obtained by the objective lens 2 1 1 and sends it to the control unit 226. The control unit 221 displays the observation image captured by the TV camera 213 on the TV monitor 222. The control unit 221 is connected to the manpower unit 223 in order to perform operation instructions or data input. Part of the macroscopic illumination light source 209 is used for macroscopic observation, and a part of the surface of the glass substrate 8 on the holder frame 2 held in a horizontal state is irradiated with macroscopic illumination light. However, when the macroscopic observation of the entire surface of the glass substrate 8 is performed using a general macroscopic illumination light source (not shown), although the holder frame 2 of the glass substrate 8 is shaken and held, the illustration of the mechanism is omitted. Fig. 2 is a configuration diagram showing a substrate holder used in the substrate inspection apparatus. The substrate holder 1 is formed of a holder frame 2 formed in a rectangular frame shape. A pair of movable reference pin mechanisms 10 and 11 are provided in the holder 2. The pair of movable reference pin mechanisms 10 and 11 are set to a reference position corresponding to 19 of a small glass substrate (substrate) as shown in Fig. 14. These movable reference pin mechanisms 10 and 11 are arranged in the respective holder frames 2 so as to face the rear side and the front side of the inspector. The movable reference pin mechanism 1 0, 1 1 is a switch instruction corresponding to the size of the substrate, and there are various standards for moving the paper. The Chinese national standard (CNS) A4 specification (210X297 mm) is applicable: 10-^ ~ (Please (Please read the notes on the back before filling this page). Binding line 501219 Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (8) The controllable position of the pins 101 and 111 or the reference position can be moved. function. That is, since the movable reference pins 1 0 1 and 1 1 1 are movable in the aforementioned reference position, the reference position for the small glass substrate 9 is automatically set. In addition, in the holder frame 2, U-shaped retraction holes 14, 15 are formed on the frames on the back and front sides of the inspector, respectively, corresponding to the aforementioned retreat positions. A specific configuration diagram of the movable reference pin mechanism 1 1 (10), and FIG. 3B is a plan view and a side sectional view of the L-shaped arm. In Fig. 3A, a movable reference pin mechanism 11 arranged in a frame on the front side (inspector side) of the holder frame 2 is shown. The movable reference pin mechanism 1 1 (1 0) is provided with an L-shaped arm 10 02. As shown in FIG. 3B, on the free end portion of the L-shaped arm 102, a friction-resistant resin (for example, polyimide, chloroethyl ether, and ketone) coated on the peripheral surface of the steel frame bearing is provided for free rotation. Etc.) of the movable reference pin 1 1 1 (1 01). Below the base end portion of the L-shaped arm 10 02, a movable pin 103 (steel ball bearing) is rotatably provided. In addition, an air cylinder 1 04 is provided in the holder frame 2. The air cylinder 1 04 has two cylinder rods 105 and 105 that can be moved linearly. At the front ends of the cylinder rods 105 and 105, a direct-motion and rotary-motion converting member 106 is installed. A long hole 10 07 is provided in the direct-moving and rotating member 106, and a movable pin 103 is inserted into the long hole 107. A rotation shaft 108 is provided in the bent portion of the L-shaped arm 102 via a ball bearing. The L-shaped arm 102 is rotatably arranged in the direction of the arrow a about the rotation axis 108.

一方面，在保持器框2之空部2側的邊上，於旋轉L 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -11 - 妙衣 Ί I I訂 I 線 (請先閲讀背面之注意事項再填寫本頁) 501219 A7 __ B7 _________ 五、發明説明（9 ) 字型臂1 02時之可動基準銷1 1 1 ( 1 0 1 )的軌跡上，形成有 u字型的退臂用孔（也稱爲缺口）1 5 ( 1 4 )。另外，在保 持器框2內，配置有爲了卡止L字型臂之由螺絲所形成之 停止器1 6。檢查者因旋轉停止器1 6而將其先端部放出收 入，而能微調整L字型臂102的卡止位置。藉此，可調整 對於可動基準銷1 1 1 ( 1 〇 1 )之固定位置的基準位置之誤差 〇 在如以上般所構成之可動基準銷機構11 ( 10 )中，可 動基準銷111 ( 101)係在保持所定尺寸之玻璃基板，例如 小型玻璃基板9時，向保持器框2的內側（空部側）方向 旋轉，對應小型玻璃基板9而設定在基準位置上。並且可 動基準銷111 (101)係在保持上述所定尺寸以外的尺寸之 玻璃基板，例如大型玻璃基板8時，向保持器框2之外側 (前側（後側））方向旋轉，退避於退避用孔1 5 ( 1 4 )之 內。但是，可動基準銷機構1 〇係因雖然與可動基準銷機構 1 1之設置位置相異，但是爲同一構成，所以省略其構成之 說明。 這些可動基準銷1 〇 1、1 1 1係藉由來自於後述操作部之 玻璃基板尺寸的切換指示，自動地設定於小型玻璃基板9 的各基準位置，或者退避於各退避用孔14、15。 但是，各卡壓銷4a〜4d也與可動基準銷101、111相 同藉由使用空氣汽缸之機構來驅動。 第4圖係爲顯示可動基準銷機構1 0、1 1之驅動系構成 之模式圖。在可動基準銷機構10、11之各空氣汽缸104、 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐) -12 -~ ~ (請先閲讀背面之注意事項再填寫本頁) -裝On the one hand, on the side of the space 2 side of the holder frame 2, the size of the paper is adapted to the Chinese National Standard (CNS) A4 specification (210X297 mm) -11-MiaoyiΊ II order I line (please first Read the notes on the back and fill in this page again) 501219 A7 __ B7 _________ V. Description of the invention (9) On the locus of the movable reference pin 1 1 1 (1 0 1) at the time of the shape arm 1 02, a U-shape is formed. A hole (also called a notch) 1 5 (1 4) for the arm. In the holder frame 2, a stopper 16 formed by a screw for locking the L-shaped arm is arranged. The inspector is able to finely adjust the locking position of the L-shaped arm 102 by releasing the tip of the stopper 16 for income. Thereby, it is possible to adjust the reference position error with respect to the fixed position of the movable reference pin 1 1 1 (100). In the movable reference pin mechanism 11 (10) constructed as above, the movable reference pin 111 (101) When holding a glass substrate of a predetermined size, for example, a small glass substrate 9, the glass substrate is rotated toward the inner side (the space portion side) of the holder frame 2 and is set at a reference position corresponding to the small glass substrate 9. In addition, when the movable reference pin 111 (101) is held on a glass substrate having a size other than the predetermined size, for example, a large glass substrate 8, it is rotated toward the outer side (front side (rear side)) of the holder frame 2 and retracted into the retreat hole. Within 1 5 (1 4). However, the movable reference pin mechanism 10 has the same configuration although the installation position of the movable reference pin mechanism 11 is different from that of the movable reference pin mechanism 10. Therefore, the description of the configuration is omitted. These movable reference pins 1 0 1 and 1 1 1 are automatically set at the reference positions of the small glass substrate 9 or retracted from the retreat holes 14 and 15 by the glass substrate size switching instruction from the operation section described later. . However, each of the clamping pins 4a to 4d is driven by a mechanism using an air cylinder in the same manner as the movable reference pins 101 and 111. Fig. 4 is a schematic diagram showing the drive system configuration of the movable reference pin mechanisms 10 and 11. The air cylinders 104 of the movable reference pin mechanisms 10 and 11 are in accordance with the Chinese National Standard (CNS) A4 specifications (210X 297 mm) -12-~ ~ (Please read the precautions on the back before filling this page) -Load

、1T 經濟部智慧財產局員工消費合作社印製 501219 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（10) 104中，連接有配管310、320。在各配管310、320中， 各別設置有閥301、303與洩氣閥302、304。在各配管 310、320中，流入壓縮空氣。驅動部31則進行各閥301 、303與洩氣閥302、3 04之開閉驅動。在驅動部31中連 接有操作部32。各空氣汽缸1 04、1 04係藉由壓縮空氣， 介著各L字型臂102將各可動基準銷101、101可動於各 旋轉軸1 08的周圍。檢查者係對於驅動部3 1由操作部1 9 輸入玻璃基板尺寸之資訊。 在上述驅動系中，將各可動基準銷機構1 0、1 1藉由各 別之汽缸1 04、1 04而驅動。但是，並不偏限於此，也可以 在1個空氣汽缸與各可動基準銷機構1 0、1 1之間設置連結 機構，將各L字型臂1 02旋轉。在可動基準銷機構1 〇、1 1 中，在空氣汽缸以外也能適用步進行式馬達等各種傳動裝 置。 藉由上述驅動系之控制，各可動基準銷101、111係自 動地對準小型玻璃基板9設定各基準位置，或者退避於各 退避用孔1 4、1 5內。但是不侷限於此，也可以將各可動基 準銷1 0 1、1 1 1藉由檢查之手作業，對應小型玻璃基板9來 設定基準位置，或者退避於各退避用孔14、15內。 接著，說明有關在如上述構成之基板保持器之基板保 持作用。 首先，在進行大型玻璃基板8之巨觀（或者微觀）觀 察時，可動基準銷1 0 1、1 1 1被設定在對應小型玻璃基板9 之基準位置將被檢測出來。此時，藉由檢查者從操作部32 (請先閱讀背面之注意事項再填寫本頁) •裝. 訂 線_ 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -13 - 經濟部智慧財產局員工消費合作社印製 501219 A7 B7 五、發明説明（11) 將大型玻璃基板8之尺寸情報輸入，顯示大型玻璃基板8 尺寸的驅動控制訊號將送往驅動部3 1。 驅動部31係將各可動基準銷101、111各別退避用孔 1 4、1 5內般，而驅動各空氣汽缸1 04、1 04。此時驅動部 31係在打開閥301、301而關閉洩氣閥302、3 02之同時， 關閉閥303、303而打開洩氣閥304、304。藉此，因從各 配管310流入各汽缸104、104之壓縮空，與各汽缸桿105 、1 05 —起各直動、旋動變換構件1 06將被押擠出來。所 以，長孔1 07內之可動銷1 03與沿著長孔1 07之側壁向保 持器框2之內側（空部側）方向移動。隨此，因各L字型 臂102將在各旋轉軸108的周圍旋動，所以各可動基準銷 1 01、1 1 1將向保持器框2之外側（前側（後側））方向旋 動。因此，各可動基準銷1 〇 1、1 1 1係各別插入於退避孔 1 4、1 5內，因各可動銷1 03對接於各長孔彳07之前退避而 停止。藉此，各可動基準銷彳〇 1、彳1彳將變成從保持器框2 之空部2退避到各退避用孔14、15。 第5A圖係顯示在上述基板保持器保持大型玻璃基板8 時之狀態圖。在各可動基準銷1 〇 1、1 1 1退避到各別之退避 用孔1 4、1 5內的狀態下，大型玻璃基板8係藉由檢查者如 第5A圖所示般而設定在保持器框2上，其二邊則對接在各 別之基準銷3c、3d與3a、3d。如此，卡壓銷4a、4b與 4c、4d將各別被擠押到各個卡壓方向Π、f2，大型玻璃基 板8之二邊將卡壓在各個基準銷3c、3d與3a、3d。藉此 ，大型玻璃基板8將被卡壓在各基準銷3a〜3d而決定其位 i紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ;14 : (請先閲讀背面之注意事項再填寫本頁)Printed by 1T Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 501219 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. In the description of the invention (10) 104, pipes 310 and 320 are connected. Each of the pipes 310 and 320 is provided with valves 301 and 303 and vent valves 302 and 304, respectively. Compressed air flows into each of the pipes 310 and 320. The driving unit 31 drives the opening and closing of each of the valves 301 and 303 and the vent valves 302 and 304. An operation section 32 is connected to the driving section 31. Each of the air cylinders 104 and 104 uses compressed air to move the movable reference pins 101 and 101 around the rotary shafts 108 through the L-shaped arms 102. The inspector inputs information on the size of the glass substrate for the driving section 31 and the operating section 19. In the above drive system, each of the movable reference pin mechanisms 10 and 11 is driven by the respective cylinders 104 and 104. However, the invention is not limited to this, and a connecting mechanism may be provided between one air cylinder and each of the movable reference pin mechanisms 10 and 11 to rotate each L-shaped arm 102. The movable reference pin mechanisms 10 and 11 can be applied to various transmission devices such as a stepping motor in addition to an air cylinder. By the control of the above drive system, each of the movable reference pins 101 and 111 is automatically aligned with the small glass substrate 9 to set each reference position, or retracted into each of the retraction holes 14 and 15. However, it is not limited to this, and each of the movable reference pins 1 0 1 and 1 1 1 may be set by the inspection hand to set the reference position corresponding to the small glass substrate 9 or retracted into each of the retraction holes 14 and 15. Next, the substrate holding effect in the substrate holder configured as described above will be described. First, when the macro (or micro) observation of the large glass substrate 8 is performed, the movable reference pins 1 0 1 and 1 1 1 are set at the reference positions corresponding to the small glass substrate 9 and detected. At this time, by the inspector from the operation section 32 (please read the precautions on the back before filling in this page). • Binding. _ This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -13- Printed by the Intellectual Property Bureau's Consumer Cooperative of the Ministry of Economic Affairs 501219 A7 B7 V. Description of the invention (11) Input the size information of the large glass substrate 8 and the drive control signal indicating the size of the large glass substrate 8 will be sent to the drive unit 31. The driving unit 31 drives the air cylinders 104 and 104 by moving the respective movable reference pins 101 and 111 into the retraction holes 14 and 15 respectively. At this time, the driving section 31 opens the valves 301 and 301 and closes the air vent valves 302 and 302, and closes the valves 303 and 303 to open the air vent valves 304 and 304. As a result, the compressed air flowing into each of the cylinders 104 and 104 from each of the piping 310 causes each of the linear and rotary conversion members 106 to be pushed out together with the cylinder rods 105 and 105. Therefore, the movable pin 103 in the long hole 107 and the side wall along the long hole 107 are moved toward the inner side (the hollow portion side) of the holder frame 2. Following this, each L-shaped arm 102 will rotate around each rotation shaft 108, so each movable reference pin 1 01, 1 1 1 will rotate toward the outside (front (rear)) direction of the holder frame 2 . Therefore, each of the movable reference pins 101, 111 is inserted into the retraction holes 14 and 15, respectively, and it is stopped because the movable pins 103 are retracted before they abut on the long holes 彳 07. As a result, each of the movable reference pins 彳 01, 彳 1 彳 will be retracted from the hollow portion 2 of the holder frame 2 to the respective escape holes 14,15. Fig. 5A is a view showing a state when the large-scale glass substrate 8 is held by the substrate holder. In a state where each movable reference pin 1 0 1, 1 1 1 is retracted into each of the retraction holes 1 4 and 15, the large glass substrate 8 is set and held by the inspector as shown in FIG. 5A. The two sides of the device frame 2 are butted to the respective reference pins 3c, 3d and 3a, 3d. In this way, the clamping pins 4a, 4b, 4c, and 4d will be squeezed to the respective clamping directions Π, f2, and the two sides of the large glass substrate 8 will be clamped to the reference pins 3c, 3d, 3a, and 3d. As a result, the large glass substrate 8 will be clamped on each of the reference pins 3a to 3d to determine its position. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm); 14: (Please read the precautions on the back first (Fill in this page again)

501219 經濟部智慧財產局員工消費合作社印製 A7 B7五、發明説明（12) 置。 接著，在進行小型玻璃基板9的巨觀觀察的情形，藉 由檢查者從操作部32與小型玻璃基板9之尺寸資訊輸入時 ，顯示小型玻璃基板9尺寸之驅動控制訊號將送至驅動部 31 〇 驅動部3 1係將各可動基準銷1 0 1、1 1 1從各個退避用 孔1 4、彳5內送出，對應於保持器框2之內側（空部側）的 小型玻璃基板9而設定在基準位置般驅動各汽缸1 04、1 04 。此時驅動部31係將閥301、301關閉而將洩氣閥302、 302打開之同時，將閥303、303打開而關閉洩氣閥304、 304。藉此，因從各配管320向各汽缸1 04、1 04流入之壓 縮空氣，與各汽缸桿105、105 —起各直動、旋動變換構件 106將被拉回。所以長孔1〇7內之可動銷1〇3將沿著長孔 1 07之側避向保持器框2之內側（空部側）方向移動。隨 此，因各L字型臂1 02將在各旋轉軸彳08周圍旋動，所以 各可動基準銷1 〇 1、1 1 1將向保持器框2之內側（空部側） 方向旋動。因此’各可動基準銷彳0 1、1 1 1係從各別退避孔 14、15突出103因各L字型臂102對接於停止器16而停 止。藉此，各可動基準銷1 0 1、1 1彳將從各個退避用孔1 4 、1 5突出，變成設定於對應小型玻璃基板9之基準位置。 第5 B圖係爲顯示在上述基板保持器保持小型玻璃基板 時之狀態圖、。在將各可動基準銷彳01、111設定在對應於各 個保持器框2之內側（空部側）的小型玻璃基板9之基準 位置的狀態下，小型玻璃基板9將如第5 B圖所示設定在保 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） _ 15 - (請先閱讀背面之注意事項再填寫本頁) .裝· 訂 -線 501219 A7 _ B7_ 五、發明説明（13) (請先閱讀背面之注意事項再填寫本頁) 持器框2上，其二邊將對接在各個基準銷3d與各可動基準 銷1 01、1 1 1上。所以，卡壓銷4b與4c、4d將被擠出於 各個卡壓方向Π、f 2，小型玻璃基板9之二邊將卡壓在各 個基準銷3d與各可動基準銷1 〇 1、1 1 1上。藉此，小型玻 璃基板9係被卡壓在基準銷3d與可動基準銷1 01、1 1 1上 而決定位置。 但是，如第6A、6B圖所示，也可以設置將可動基準銷 與卡壓銷兼用之銷1 〇竹、1 1 1 ’。這些銷1 0 1 ^ 1 1 1 1系將作 爲小型玻璃基板被卡壓之可動基準銷或者卡壓小型玻璃基 板之卡壓銷，對應於基板尺寸而選擇性動作。銷1 01 ’、 1 1 1 ’係在進行大型玻璃基板8之觀察時，如第6A圖所示’ 退避到各個退避用孔彳4、1 5。另外銷1 〇 V、1 1 1 ’係在進行 小型玻璃基板9卡壓於各基準銷3a、3b上。 經濟部智慧財產局員工消費合作社印製 在如以上之本第1實施形態中，於保持小型玻璃基板9 時，將可動基準銷1 〇 1、1 1 1向保持器框2內側旋動而設定 在對應小型玻璃基板9之基準位置，且在保持大型玻璃基 板8時，設置將可動基準銷1 0 1、1 1 1向保持器框2之外側 旋動，向退避用孔1 4內退避之機構，藉此，就算觀察對象 變更爲大型玻璃基板8或者小型玻璃基板9，旋動各可動銷 1 0 1、1 1 1針對該當尺寸之玻璃基板自動地設定基準銷，能 整列配置對應大型玻璃基板8或者小型玻璃基板9之基準 位置。而且，藉由基準銷之自動設定觀察所需之時間也能 縮短，因爲檢查者沒有必要進行手作業，也不會出現塵埃 -16- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 501219 A7 _B7 ____ 五、發明説明（14) 但是，將各可動基準銷101、111藉由檢者的手作業而 設定也是可能的’因爲只要將各可動基準銷1 〇彳、111旋動 ，所以不花時間而能以簡單之作業來設定。 另外在本第1實施形態中，接受玻璃基板尺寸之操作 輸入，自動地設定對應大型之玻璃基板8或者小型玻璃基 板9之基準銷。藉此，就算觀察對象變更爲大型玻璃基板8 或者小型玻璃基板9，也能正確地設定對應於這些玻璃基板 8、9位置的基準銷。 另外，在將大型玻璃基板8以透過光觀察的情形，將 可動銷1 01、1 1 1向各個保持器框2之外側旋動退避到退避 用孔1 4、1 5內。藉此，可動基準銷1 0 1、1 1 1將不會影響 大型玻璃基板8之透過光觀察。 接著，參照圖面說明本發明之第2實施形態，而，各 圖中與第2圖相同的部分則標示相同的圖號，並省略該部 份的詳細說明。 第7A、7 B圖，是顯示本發明之第2實施形態之基板保 持器構造的圖。在保持器框2中，設置有複數對（2對）之 可動基準銷機構1 〇、1 1、複數組（二組）之可動基準銷 121、122與123、124。這些可動基準銷121，122與123 、1 24係設定各個第1小型玻璃基板20與第2小型玻璃基 板21之各基準位置。 一對之可動基準銷1 2 1、1 22係設定第1小型玻璃基板 20的基準位置。另一對可動基準銷123、124係設定此第 (請先閱讀背面之注意事項再填寫本頁) -裝· 訂 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -17- 501219 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明説明（15) 1小型玻璃2 0的尺寸要大之第2小型玻璃基板21的基準 位置。這些可動基準銷1 2 1〜1 2 4與基驅動機構係與上述第 1實施形能所示之可動基準銷1 〇 1、彳彳1的情形相同構成， 故省略其詳細說明。 這些可動基準銷121、122與123、124係在保持各個 所定尺寸之小型玻璃基板20、2 1時，向保持器框2的內側 方向旋動，而設定在基準位置。並且可動基準銷121~124 係在保持所定尺寸預外的尺寸之玻璃基板’也就是大型的 玻璃基板8時，向保持器框2的外側旋動’退避到各退避 穴 131、132、133、134 內。 另外，這些可動基準銷1 2 1〜1 2 4係如上述第1實施形 態所示的，藉由汽缸等所形成之驅動機構來驅動。也就是 ，驅動部31係接受藉由檢查者由操作部32所輸入之玻璃 基板的尺寸，來驅動汽缸1 〇4 ’介著L字型臂1 02自重地 旋動可動基準銷121〜124。 接著，說明有關在如上述構成之保持器機構之基板保 持作用。 首先，在進行大型玻璃基板8之觀察時，藉由檢查者 從操作部32輸入大型玻璃基板8之尺寸資訊。接著，與上 述第1實施例相同，各可動基準銷1 2 1、1 2 2與1 2 3、1 2 4 係因藉由各汽缸1 〇4將各L字型臂1 02在各旋轉軸1 08周 圍旋動，而退避到各個退避用孔1 31、1 32、1 33、1 34內 〇 在此狀態下，大型玻璃基板8係如第5A、6A圖所示 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -18- 裝 ^ 訂 線 (請先閲讀背面之注意事項再填寫本頁) 501219 A7 B7 五、發明説明（16) 相同，設定在保持器框2上，在其二邊對接在各個基準銷 3C、3d與3a、3d之同時，藉由因各個卡壓銷4a、4b與 4c、4d之各卡壓方向Π、f2的卡壓力，而卡壓在各基準銷 3c、3d 上。 接著，在進行第1小型玻璃基板20之觀察時，藉由檢 查者，由操作部32輸入第1小型玻璃基板20之尺寸資訊 時，顯示第1小型玻璃基板20尺寸之驅動控制訊號驅動部 31 〇 驅動部31係如第7A圖所示各可動基準銷121、122 將從各個退避用孔1 3 1、1 32內突出，被設定在對應保持框 2內側之第1小型玻璃基板20之基準位置而驅動各汽缸 104、104。藉此，各可動基準銷121、122將因藉由各汽 缸104將各L字型臂102旋動於各旋轉軸108周圍，從各 個退避用孔1 3 1、1 32突出，被投定在對應第1小型玻璃基 板20之基準位置。此時，其他各可動基準銷123、124係 退避到各個退避孔1 33、1 34內。 在此狀態下，第1小型玻璃基板20係如第7圖所示設 定在保持器框2，在其二邊對接於各個基準銷3d與各可動 基準銷121、122之同時，藉由因各卡壓銷4d與4c、4d 之各卡壓方向Π、f2的卡壓力，而卡壓於基準銷3d與各 可動基準銷121、122上。 接著，在進行第2小型玻璃基板2 1之觀察的情形’藉 由檢查者，由操作部32輸入第2小型玻璃基板21的尺寸 資訊時，顯示第2小型玻璃基板2 1之尺寸之驅動控制訊號 (請先閱讀背面之注意事項再填寫本頁) 裝·501219 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Invention Description (12). Next, when the macroscopic observation of the small glass substrate 9 is performed, when the inspector inputs the size information from the operation unit 32 and the small glass substrate 9, the drive control signal indicating the size of the small glass substrate 9 will be sent to the driving unit 31. 〇 Drive unit 3 1 sends out each of the movable reference pins 1 0 1 and 1 1 1 from the retraction holes 14 and 彳 5, corresponding to the small glass substrate 9 on the inner side (empty side) of the holder frame 2. Each of the cylinders 1 04 and 1 04 is driven at the reference position. At this time, the driving unit 31 closes the valves 301 and 301 and opens the air vent valves 302 and 302, and opens the valves 303 and 303 to close the air vent valves 304 and 304. As a result, the compressed air flowing into each of the cylinders 104 and 104 from the piping 320 causes the linear and rotary conversion members 106 to be pulled back together with the cylinder rods 105 and 105. Therefore, the movable pin 103 in the long hole 107 will move along the side of the long hole 107 in the direction of the inner side (the side of the empty portion) of the holder frame 2. Following this, each L-shaped arm 102 will rotate around each rotation shaft 彳 08, so each movable reference pin 1 0 1, 1 1 1 will rotate toward the inner side (empty side) of the holder frame 2. . Therefore, each of the movable reference pins 11, 1 1 1 protrudes from each of the retreat holes 14, 15 and 103, because each L-shaped arm 102 abuts on the stopper 16 and stops. As a result, each of the movable reference pins 1 0 1 and 1 1 突出 protrudes from each of the retreat holes 1 4 and 15 and becomes a reference position set to the small glass substrate 9. Fig. 5B is a view showing a state when the small-sized glass substrate is held by the substrate holder. When the movable reference pins 彳 01 and 111 are set to the reference position of the small glass substrate 9 corresponding to the inner side (empty side) of each holder frame 2, the small glass substrate 9 will be as shown in FIG. 5B. The paper size set at the capital protection applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) _ 15-(Please read the precautions on the back before filling this page). Binding · Order-Line 501219 A7 _ B7_ V. Description of the invention (13) (Please read the precautions on the back before filling this page) On the holder frame 2, the two sides will be docked with each reference pin 3d and each movable reference pin 1 01, 1 1 1. Therefore, the clamping pins 4b, 4c, and 4d will be extruded in the respective clamping directions Π and f 2, and the two sides of the small glass substrate 9 will be clamped to each of the reference pins 3d and each of the movable reference pins 1 01, 1 1 1 on. Thereby, the small glass substrate 9 is clamped on the reference pin 3d and the movable reference pins 1 01 and 1 1 1 to determine the position. However, as shown in Figs. 6A and 6B, pins 10b, 1 1 1 'that use both the movable reference pin and the snap pin may be provided. These pins 1 0 1 ^ 1 1 1 1 are used as movable reference pins to be pressed on a small glass substrate or to be pressed pins on a small glass substrate, and are selectively operated in accordance with the size of the substrate. The pins 1 01 'and 1 1 1' are retracted into each of the retraction holes 、 4, 15 as shown in Fig. 6A when the large glass substrate 8 is observed. In addition, the pins 10 V and 1 1 1 'are pressed against each of the reference pins 3a and 3b by the small glass substrate 9 being pressed. Printed by the employee consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs in the first embodiment as described above, when the small glass substrate 9 is held, the movable reference pin 1 0 1 and 1 1 1 are set to rotate inside the holder frame 2 and set. At the reference position corresponding to the small glass substrate 9 and when holding the large glass substrate 8, a movable reference pin 1 0 1, 1 1 1 is provided to rotate outside the holder frame 2 and retreat into the retreat hole 14 With this mechanism, even if the observation object is changed to a large glass substrate 8 or a small glass substrate 9, the movable pins 1 0 1, 1 1 1 are automatically set for the glass substrate of the same size, and the large glass can be arranged in a row. The reference position of the substrate 8 or the small glass substrate 9. In addition, the time required for observation by the automatic setting of the reference pin can be shortened, because the inspector does not need to perform manual work and dust does not appear. -16- This paper size applies the Chinese National Standard (CNS) A4 specification (210X297) (Centi) 501219 A7 _B7 ____ 5. Description of the invention (14) However, it is also possible to set the movable reference pins 101 and 111 by the hand of the inspector. 'Because the movable reference pins 101 and 111 are rotated, , So it can be set up with simple operations without taking time. In addition, in the first embodiment, a reference pin corresponding to a large-sized glass substrate 8 or a small-sized glass substrate 9 is automatically set in response to an operation input of a glass substrate size. Accordingly, even if the observation target is changed to the large glass substrate 8 or the small glass substrate 9, the reference pins corresponding to the positions of the glass substrates 8 and 9 can be set accurately. In addition, when the large glass substrate 8 is viewed with transmitted light, the movable pins 1 01, 1 1 1 are revolved to the outside of each holder frame 2 and retracted into the retreating holes 14, 15. Thereby, the movable reference pins 1 0 1 and 1 1 1 will not affect the transmitted light observation of the large glass substrate 8. Next, a second embodiment of the present invention will be described with reference to the drawings. The same parts in each figure as those in FIG. 2 are denoted by the same reference numerals, and detailed descriptions of the parts will be omitted. Figures 7A and 7B are diagrams showing the structure of a substrate holder according to a second embodiment of the present invention. In the holder frame 2, a plurality of pairs (two pairs) of movable reference pin mechanisms 10, 11 and a plurality of sets (two sets) of movable reference pin mechanisms 121, 122, and 123, 124 are provided. These movable reference pins 121, 122, 123, and 124 set reference positions of each of the first small glass substrate 20 and the second small glass substrate 21, respectively. The pair of movable reference pins 1 2 1 and 1 22 set the reference position of the first small glass substrate 20. Another pair of movable reference pins 123 and 124 set this section (please read the precautions on the back before filling this page)-Binding and ordering. Printed on paper standards applicable to the Chinese National Standards (CNS). A4 specification (210X 297mm) -17- 501219 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (15) 1 Small glass 2 0 The reference position of the second small glass substrate 21 . These movable reference pins 1 2 1 to 1 2 4 and the base drive mechanism have the same configuration as those of the movable reference pins 1 01 and 彳 彳 1 shown in the first embodiment, so detailed descriptions thereof are omitted. These movable reference pins 121, 122, 123, and 124 are set to the reference position while rotating the small glass substrates 20, 21 of a predetermined size while rotating toward the inside of the holder frame 2. In addition, when the movable reference pins 121 to 124 are held on a glass substrate 'that is a large-sized glass substrate 8 which maintains a predetermined size and a predetermined size, it is rotated to the outside of the holder frame 2' to retreat to the retreat holes 131, 132, 133, Within 134. The movable reference pins 1 2 1 to 1 2 4 are driven by a driving mechanism formed by a cylinder or the like as shown in the first embodiment. That is, the driving unit 31 receives the size of the glass substrate inputted by the inspector from the operating unit 32 to drive the cylinder 1 0 4 ′ to rotate the movable reference pins 121 to 124 through the L-shaped arm 102 by its own weight. Next, a description will be given of the substrate holding effect in the holder mechanism configured as described above. First, when the large glass substrate 8 is observed, the inspector inputs the size information of the large glass substrate 8 from the operation unit 32. Next, as in the first embodiment described above, each of the movable reference pins 1 2 1, 1 2 2 and 1 2 3, 1 2 4 is caused by each of the cylinders 104 and the L-shaped arms 102 on each of the rotation axes. 1 08 Rotate around and retreat into each retreat hole 1 31, 1 32, 1 33, 1 34. In this state, the large glass substrate 8 is shown in Figures 5A and 6A. Standard (CNS) A4 specification (210X297 mm) -18- binding ^ (please read the precautions on the back before filling this page) 501219 A7 B7 V. Description of the invention (16) Same, set on the holder frame 2 , While its two sides are abutted to each of the reference pins 3C, 3d and 3a, 3d, by the pressing force of the respective pressing directions Π, f2 of the respective pressing pins 4a, 4b and 4c, 4d, the Each reference pin 3c, 3d. Next, when the first small glass substrate 20 is observed, when the size information of the first small glass substrate 20 is input by the inspector via the operating unit 32, the drive control signal driving unit 31 for displaying the size of the first small glass substrate 20 is displayed. 〇 The drive unit 31 is a reference for the first small glass substrate 20 corresponding to the inside of the holding frame 2 as each movable reference pin 121 and 122 protrudes from each of the retraction holes 1 3 1 and 1 32 as shown in FIG. 7A. Position to drive each cylinder 104, 104. As a result, the movable reference pins 121 and 122 are rotated around the rotation shafts 108 by the cylinders 104 and protrude from the retraction holes 1 3 1 and 1 32. Corresponds to the reference position of the first small glass substrate 20. At this time, the other movable reference pins 123 and 124 are retracted into the respective escape holes 133 and 134. In this state, the first small glass substrate 20 is set in the holder frame 2 as shown in FIG. 7, and the two sides thereof are abutted to each of the reference pins 3 d and each of the movable reference pins 121 and 122. The pressing forces of the pressing pins 4d, 4c, and 4d in the respective pressing directions Π and f2 are pressed against the reference pin 3d and the movable reference pins 121 and 122. Next, when the observation of the second small glass substrate 21 is performed, when the size information of the second small glass substrate 21 is input from the operating unit 32 by the inspector, the drive control of the size of the second small glass substrate 21 is displayed. Signal (please read the precautions on the back before filling this page)

、1T 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -19 - 501219 A7 B7 五、發明説明（17) 將送到驅動部31。 驅動部31係如第7B圖所示各可動基準銷123、124 從各個退避用孔133、134內突出’而設定在對應於保持器 框2內側之第2小型玻璃基板2 1之基準位置來驅動各汽缸 1 04、104。藉此，各可動基準銷123、124將因藉由各汽 缸1 04使各L字型臂1 02旋動在各旋轉軸1 08周圍’從各 個退避用孔1 33、1 34突出’被設定在對應第2小型玻璃基 板21之基準位置上。此時，其他各可動基準銷121、122 係退避於各個退避用孔1 32內。 在此狀態下，第2小型玻璃基板21係如第7 B圖所示 被設定在保持器框2上，在將其二邊對接於各個基準銷3d 與各可動基準銷123、124之同時，藉由因各卡壓銷4d與 4c，4d之各卡壓方向f1、f2的卡壓力，而卡壓於基準銷 3d與各可動基準銷123、124上。 在以上之本第2實施形態中，設置有爲了設定在大型 玻璃基板8之外，複數尺寸之玻璃基板，例如第1小型玻 璃基板20以及第2小型玻璃基板21的基準位置之各可動 基準銷121〜124。藉此，不會弄錯對應複數尺寸之玻璃基 板的基準銷，且能自動地設定。並且，藉由基準銷的自動 設定，能縮短觀察所需之時間，也因爲檢查表沒有必要作 業，所以不會出現塵埃。 接著，參照圖面說明本發明之第3實施形態。 第8A、8B係爲顯示有關本發明第3實施形態之基板 保持器的構成圖。在保持器框2中I字型之可動基準板30 ^紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） :20- (請先閲讀背面之注意事項再填寫本頁) -裝·， 1T Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs This paper size applies the Chinese National Standard (CNS) A4 specification (210X297mm) -19-501219 A7 B7 V. The description of the invention (17) will be sent to the drive unit 31. As shown in FIG. 7B, each of the movable reference pins 123 and 124 protrudes from each of the retraction holes 133 and 134, and is set at a reference position corresponding to the second small glass substrate 21 inside the holder frame 2. Each cylinder 104, 104 is driven. As a result, the movable reference pins 123 and 124 are set to 'project from the retraction holes 1 33 and 1 34' by rotating the L-shaped arms 102 around the rotary shafts 108 by the cylinders 104. At the reference position corresponding to the second small glass substrate 21. At this time, the other movable reference pins 121 and 122 are retracted in each of the retraction holes 132. In this state, the second small glass substrate 21 is set on the holder frame 2 as shown in FIG. 7B, and the two sides thereof are butted to each of the reference pins 3d and the movable reference pins 123 and 124, The reference pin 3d and the movable reference pins 123 and 124 are pressed by the pressing force in the respective pressing directions f1 and f2 of the pressing pins 4d and 4c and 4d. In the second embodiment described above, each of the movable reference pins for the reference position of the plurality of glass substrates, such as the first small glass substrate 20 and the second small glass substrate 21, is provided in addition to the large glass substrate 8. 121 ~ 124. Thereby, reference pins corresponding to a plurality of glass substrates are not mistaken, and can be set automatically. In addition, by automatically setting the reference pin, the time required for observation can be shortened, and no work is required for the checklist, so dust does not appear. Next, a third embodiment of the present invention will be described with reference to the drawings. 8A and 8B are diagrams showing the structure of a substrate holder according to a third embodiment of the present invention. I-shaped movable reference plate 30 in the holder frame 2 ^ The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm): 20- (Please read the precautions on the back before filling this page)- Loading ·

-、1T 經濟部智慧財產局員工消費合作社印製 501219 A7 B7 五、發明説明（18) 係可自由移動地設置在橫方向（X方向）。在此可動基準板 30中，例如2個可動基準銷30a、30b係以所定之間隔而 設置。此可動基準板30係藉由向橫方向移動，可第8 B圖 所示設定特定尺寸之玻璃基板33的基準位置。但是當如第 8A圖所示將可動基準板30移向圖面上最右側時，各可動 基準銷30a、30b將被設定在大型玻璃基板8的基準位置上 〇 第9A圖係爲顯示可動基準板30之驅動機構的構成模 式圖，第9B圖爲其斷面圖。可動基準板30之一端部係與 送入螺絲34相螺合，兩端附近之腳部301、301係介著各 個鋼珠軸承壓在軌道35、35上。這些送入螺絲34與軌道 35係收納於收納於保持器框2內。送入螺絲34係連結於 馬達（步進馬達）37的旋轉軸上。馬達37係藉由馬達控制器 36而被驅動。在馬達控制部36中連接有操作部38。 在操作部38中，藉由檢查者將操作輸入玻璃基板的尺 寸。馬達控制部36係對應從操作部38所操作輸入之玻璃 基板的尺寸來控制馬達37之驅動時間，移動可動基準板 30，將各可動基準銷30a、3 0b設定在該當玻璃基板之基準 位置上。 但是，除了將可動基準板30以電動來移動之外，也可 以在敷設之2隻軌道上壓上可動基準板30的腳部301、 301，而藉由檢查者之手作業而移動可動基準板30，將各 可動基準銷30a、30b設定在該當玻璃基板的基準位置。 : 接著，說明有關在如上述構成之基板保持器的基板保 (請先閱讀背面之注意事項再填寫本頁) 裝. 訂 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -21 - 501219 A7 B7 五、發明説明（19) 持作用。 藉由檢查者，由操作部38將特定尺寸之玻璃基板33 的尺寸資訊輸入時，顯示特定尺寸之玻璃基板33尺寸之驅 動訊號將傳送到馬達控制部36。馬達控制部36係對應所 輸入之玻璃基板33的尺寸來控制馬達37，藉由將送入螺 絲34旋轉而移動可動基準板30，使各可動基準銷30a、 30b被設定在該當玻璃基板的基準位置。 在此種狀態下，特定尺寸之玻璃基板33係如第8B圖 所示，藉由檢查者設定在保持器框2上，在其二邊當接在 各個基準銷3c、3d與可動基準板30之各可動基準銷30a 、30b之同時，藉由因各卡壓銷4a、4b與4c ' 4d之各卡 壓方向f1、f2的卡壓力，而卡壓在基銷3c、3d與各可動 基準銷30a、30b上。 在以上之本第3實施形態中，於保持器框2上於橫方 向（X方向）可自由移動地，設置有設有例如兩個可動基準銷 30a、30b之可動基準板30。藉此，不只大型玻璃基板8、 小型玻璃基板9，能自動地設定特定尺寸之玻璃基板33的 基準位置。並且，藉由基準銷之自動設定，能縮短觀察所 需之時間，且因爲檢查者沒有手作業的必要’所以不會產 生塵埃。 但是，在將可動基準銷30a、30b藉由檢查者的手作業 而設定時，也因爲只移動可動基準板30，所以能不費工時 而以簡單的作業來設定。 接著，參照圖面說明有關本發明之第4實施形態。但 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -22 - (請先閱讀背面之注意事項再填寫本頁) 裝· 線 經濟部智慧財產局員工消費合作社印製 501219 經濟部智慧財產局員工消費合作社印製 A7 B7五、發明説明（2〇) 是，在各圖中於與第2圖相同部分將附上同一圖號並省略 其詳細說明。 第10A、10B圖係爲顯示有關本發明之第4實施形態 之基板保持器的構成圖。在保持器框2上，L字型之可動基 準板40係被自由移動地設置在縱橫（XY方向）。在此可動基 準板40中，例如在縱橫方向以所定的間隔設置有各個可動 基準41、42與43、44。此可動基準板40係藉由向縱橫方 向移動，而設定在如第10B圖所示之特定尺寸之玻璃基板 45的基準位置。但是當如第10A圖所示將可動基準板40 移到圖面上最右下側時，各可動基準銷4 1〜44將被設定在 大型玻璃基板8的基準位置。 第11圖係爲顯示可動基準板40之驅動機構之構成模 式圖。可動基準板40係對於保持器框23，藉由複數個例 如2個連接構件46連結起來。這些連接構件46、47係對 於保持器框2與可動基準板40，藉由各個旋轉軸46b、 46a與47b、47a而自由旋動地被設置。另外，在各旋轉軸 46b、47a、47b之任何個中，連結有未圖示之馬達旋轉軸 。藉由驅動此馬達，可動基準板40將對保持器框2向縱方 向（XY方向）移動。藉此，能自動地設定特定尺寸之玻璃基 板45的基準位置。 接下來，針對如上述所構成之基板保持器的基板保持 作用進行說明。 當採上述基板保持器，保持特定尺寸之玻璃基板45時 ，藉用馬達使圖面中未顯示之各個連結構件46、47朝同方 本紙張尺度適甩中國國家標準（CNS )A4規格(210X297公釐) -23: ~ (請先閱讀背面之注意事項再填寫本頁) 裝·-、 1T Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 501219 A7 B7 V. Description of the invention (18) It can be installed in the horizontal direction (X direction) freely and movably. In this movable reference plate 30, for example, two movable reference pins 30a and 30b are provided at predetermined intervals. The movable reference plate 30 is moved in the horizontal direction, and the reference position of the glass substrate 33 having a specific size can be set as shown in Fig. 8B. However, when the movable reference plate 30 is moved to the far right on the drawing as shown in FIG. 8A, each of the movable reference pins 30a, 30b will be set at the reference position of the large glass substrate 8. FIG. 9A shows the movable reference FIG. 9B is a schematic cross-sectional view of the structure of the driving mechanism of the plate 30. One end portion of the movable reference plate 30 is screwed with the feed screw 34, and the foot portions 301 and 301 near the two ends are pressed against the rails 35 and 35 via ball bearings. These feed screws 34 and rails 35 are housed in the holder frame 2. The feed screw 34 is connected to a rotation shaft of a motor (stepping motor) 37. The motor 37 is driven by a motor controller 36. An operation unit 38 is connected to the motor control unit 36. In the operation unit 38, an operator inputs an operation to the size of the glass substrate. The motor control section 36 controls the driving time of the motor 37 corresponding to the size of the glass substrate input from the operation section 38, moves the movable reference plate 30, and sets each movable reference pin 30a, 30b at the reference position of the current glass substrate. . However, in addition to moving the movable reference plate 30 electrically, the feet 301 and 301 of the movable reference plate 30 may be pressed on the two tracks to be laid, and the movable reference plate may be moved by the inspector's hand. 30. The movable reference pins 30a and 30b are set at the reference position of the current glass substrate. : Next, explain the substrate protection on the substrate holder configured as above (please read the precautions on the back before filling out this page). Order the paper printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and the Consumer Cooperative to apply the Chinese national standard ( CNS) A4 specification (210X297 mm) -21-501219 A7 B7 V. Description of invention (19) When the inspector inputs the size information of the glass substrate 33 of a specific size from the operation unit 38, a driving signal indicating the size of the glass substrate 33 of a specific size is transmitted to the motor control unit 36. The motor control unit 36 controls the motor 37 in accordance with the size of the input glass substrate 33, and rotates the feed screw 34 to move the movable reference plate 30 so that each movable reference pin 30a, 30b is set to the reference of the current glass substrate. position. In this state, as shown in FIG. 8B, the glass substrate 33 of a specific size is set on the holder frame 2 by the inspector, and the reference pins 3c, 3d and the movable reference plate 30 are connected to the two sides. At the same time as each of the movable reference pins 30a, 30b, the base pins 3c, 3d and each movable reference are clamped by the pressing force in each of the clamping directions f1, f2 of the clamping pins 4a, 4b, and 4c '4d. Pins 30a, 30b. In the third embodiment described above, a movable reference plate 30 provided with, for example, two movable reference pins 30a and 30b is provided on the holder frame 2 so as to be freely movable in the lateral direction (X direction). Thereby, not only the large glass substrate 8 and the small glass substrate 9, but also the reference position of the glass substrate 33 of a specific size can be automatically set. In addition, by automatically setting the reference pin, the time required for observation can be shortened, and no dust is generated because the inspector does not need a manual operation. However, when the movable reference pins 30a and 30b are set by the hand of the inspector, since only the movable reference plate 30 is moved, it can be set with a simple operation without labor. Next, a fourth embodiment of the present invention will be described with reference to the drawings. However, this paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -22-(Please read the precautions on the back before filling out this page). Printed by the Intellectual Property Bureau employee consumer cooperative A7 B7 V. Description of invention (20) Yes, in each figure, the same figure is attached to the same part as in Figure 2 and its detailed description is omitted. Figures 10A and 10B are diagrams showing the structure of a substrate holder according to a fourth embodiment of the present invention. On the holder frame 2, the L-shaped movable reference plate 40 is arranged in the vertical and horizontal directions (XY direction) so as to be freely movable. In this movable reference plate 40, for example, the movable references 41, 42, and 43, 44 are provided at predetermined intervals in the vertical and horizontal directions, for example. This movable reference plate 40 is set at a reference position of a glass substrate 45 having a specific size as shown in Fig. 10B by moving in the vertical and horizontal directions. However, when the movable reference plate 40 is moved to the lower rightmost side in the drawing as shown in Fig. 10A, each of the movable reference pins 4 1 to 44 is set at the reference position of the large-sized glass substrate 8. Fig. 11 is a diagram showing the configuration of the driving mechanism of the movable reference plate 40. The movable reference plate 40 is connected to the holder frame 23 by a plurality of connection members 46, for example. These connection members 46 and 47 are provided to the holder frame 2 and the movable reference plate 40 so as to be freely rotated by the respective rotation shafts 46b, 46a, 47b, and 47a. A motor rotation shaft (not shown) is connected to each of the rotation shafts 46b, 47a, and 47b. By driving this motor, the movable reference plate 40 moves the holder frame 2 in the vertical direction (XY direction). Thereby, the reference position of the glass substrate 45 of a specific size can be automatically set. Next, the substrate holding operation of the substrate holder configured as described above will be described. When using the above-mentioned substrate holder to hold a glass substrate 45 of a specific size, use a motor to make each connecting member 46, 47 not shown in the drawing toward the same paper size as the Chinese standard (CNS) A4 (210X297). PCT) -23: ~ (Please read the precautions on the back before filling this page)

、1T 線 501219 A7 _ B7 五、發明説明（21 ) 向回轉，可使可動基準板4 0朝縱橫方向（X、γ方向）移動。 藉此，各可動基準銷41〜44可設定於前述玻璃基板45的基 準位置。 在此狀態下，特定尺寸之玻璃基45係如第1 0B圖所示 ，藉由檢查者而被設定在保持器框2上，在其二邊對接於 各個可動基準銷43、44與41、42的同時，因藉由各卡壓 銷4a、4b與4c、4d之各卡壓方向f1、f2的卡壓力，被卡 壓在可動基準銷43、44與41、42上。 在以上之上述第4實施形態中，在保持框2上在縱橫 方向可自由移動地設置有設置4個可動基準銷41〜44之可 動基準板40。藉此，不只大型玻璃基板也能自動地設定特 定尺寸之玻璃基板45的基準位置。並且，藉由自動地設定 基準銷能縮短巨觀觀察所需的時間，且因檢查者沒有作手 作業之必要，所以不會產生麈埃。 但是，就算在將各可動基準銷41〜44藉由檢查者手動 作業來設定時，因爲只移動可動基準板40，能不費工時的 以簡單的作業來設定。 第12A、12B圖係顯示有關上述第4實施形態之變形 例之基板保持器的構成圖。在上述第4實施形態中，雖然 向縱橫方向（XY方向）可自由移動地設置L字型可動基準板 40，但是如第1 2A、1 2B圖所示，也可以使在XY方向各個 獨立移動地設置可動基板48、49。在可動基板48、49。在 可動基板48、49中，設置有各個基準銷本體50、51與52 、53。可動基準板48、49係藉由個別設置之各種傳動裝置 本紙張尺度適用中國國家標準（CNS ) A4規抬T210X297公釐） ：24 - (請先閱讀背面之注意事項再填寫本頁；> -裝· 訂_ 經濟部智慧財產局員工消費合作社印製 經濟部智慧財產局員工消費合作社印製 501219 A7 ___B7_ 五、發明説明（22) 成馬達（步進馬達）而被驅動。可動基板48、49係在往X丫 方向移動時互相不會干涉般配置在一起。藉此，保持器框2 之厚度不用增加便完成。 以下，說明上述第1〜第4實施形態之變形例。 在上述第1實形態中，雖然可動基準銷係旋動而設定 在基準位置，將玻璃基板卡壓在該可動基準銷而構成，但 是並不侷限於此。爲了確保尺寸不同玻璃基板，例如尺寸 小之小型玻璃基板的基準位置，能將相當於可動基準銷之 構件，以直線地移動設定在保持器內側（空部側）。而且’小 型之玻璃基板以外的玻璃基板，例如觀察大型之玻璃基板 之情形，相當於前述可動基準銷之構件將以直線的移動退 避於保持器框之退避用穴內。 第1 3 A、1 3 B圖係爲顯示第6 A、6 B圖所示構成之變形 例。在第6A、6 B的構成中，在將可動基準銷作爲卡壓銷而 作用時，將其銷旋動。在第13A、13B圖之構成中，對於 保持器框2於斜面方向設置有退避用孔60、6 1，將相當於 卡壓銷構件62、63以對於玻璃基板形成角度之狀態直線地 移動。 構件62、63係在進行大型玻璃基板8之巨觀觀察時， 如第13A圖所示，各別退避於退避用孔60、61中。另外 構件62、63 .係在進行小型玻璃基板9的觀察時，如第1 3B 圖所示，從各個退避用孔1 4、1 5中突出，將小型玻璃基板 9從斜面方向卡壓。但是構件62、63係藉由個別設置之各 種傳動馬達或馬達（步進馬達）而驅動。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -25 - 批衣 I ΙΊ I I I I 線 (請先閱讀背面之注意事項再填寫本頁) 501219 A7 B7_ 五、發明説明（23) 另外，在上述第3實施形態中’檢查者在操作部操作 輸入玻璃基板的尺寸，對應於所輸入之玻璃基板的尺寸> 可動基準板的可動基準銷將控制成設定在該當玻璃基板的 基準位置。但是，並不侷限於如此之實施形態’例如也可 以配置爲之檢測在保持器框2的複數地方之玻璃基板的尺 寸。此時，當在保持器框2上載置玻璃基板時，對應於檢 知後之玻璃基板的尺寸，移動可動基準板’而將可動基準 銷設定於該當玻璃基板的基準位置而控制。 另外，在上述第3實施形態中，對應由操作部所操作 輸入之尺寸，將可動基板之移動以馬達的驅動時間來控制 ，雖然可動基準板之可動基準銷將被設定在該當玻璃基板 的基準位置，但是並不侷限於如此之實施形態。 在第6A、6B與13A、13B圖之構成中，將可動基準銷 作爲卡壓銷來作用。在這些例之外，例如也可以將具備可 動基準銷之可動基準板對應觀察對象之玻璃基板的尺寸向 縱橫方向（X丫方向）移動，在該可動基準銷上將該玻璃基板 卡壓於保持器框的各基準銷上。 本發明係不侷限於上述各實施形態，在不變更要旨之 範圍可實施適度之變化。 【產業上之利用可能性】 根據本發明能提供對於尺寸不同之玻璃基板能簡單地 進行基準構件之變更作業之保持器機構。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -26 - (請先閲讀背面之注意事項再填寫本頁) -裝· 線 經濟部智慧財產局員工消費合作社印製 501219 A7 B7__ 五、發明説明（24) 【圖面之簡單說明】 第1圖 係顯示有關本發明之實施形態的基板檢查裝 置的構成之斜視圖。 第2圖 係顯示有關本發明之實施形態使用於基板檢 查裝置之基板保持器的構成圖。 第3A圖 係顯示有關本發明之實施形態的可動基準 銷機構之具體構成圖。 第3 B圖 係顯示有關本發明之實施形態的L字形臂 之平面圖與側斷面圖。 第4圖 係顯示有關本發明之實施形態的可動基準銷 機構之驅動系的構成模式圖。 第5A圖 係顯示有關本發明之實施形態的在基板保 持器將大型玻璃基板保持時之狀態圖。 第5 B圖 係顯示有關本發明之實施形態的在基板保 持器將小型玻璃基板保持時之狀態圖。 第6A圖 係顯示有關本發明之實施形態的在基板保 持器將大型玻璃基板保持時之狀態圖。 第6 B圖 係顯示有關本發明之實施形態的在基板保 持器將小型玻璃基板保持時之狀態圖。 第7 A、7 B圖 係顯示有關本發明之實施形態的基板 保持器構成圖。 第8 A、8 B圖 係顯示有關本發明之實施形態的基板 保持器構成圖。 第9A圖 係顯示有關本發明之實施形態的可動基準 (請先閲讀背面之注意事項再填寫本頁) 裝· 訂 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -27 - 經濟部智慧財產局員工消費合作社印製 501219 A7 _B7_ 五、發明説明（25) 板的驅動機構之構成的模式圖。 第9 B圖 係顯示有關本發明之實施形態的可動基準 板的驅動機構之構成的斷面圖。 第1 Ο A、1 0 B 係顯示有關本發明之實施形態的基板 保持器的構成圖。 第1 1圖 係顯示有關本發明之實施形態的可動基板 之構成的模式圖。 第1 2 A、1 2 B圖 係顯示有關本發明之實施形態的變 形例之基板保持器構成圖。 第13A、13B圖 係顯示有關本發明之實施形態變形 例之基板保持器的構成圖。 第1 4圖 係顯示有關以往例所使用於基板檢查裝置 之基板保持器構成圖。 第1 5圖 係顯示有關以往例之在基板保持器將大型 玻璃基板保持之狀態圖。 第1 6圖 係顯示有關以往例之在基板保持器將大型 玻璃基板保持之狀態圖。 【符號說明】 1 基板保持器 2 保持器框 (請先閱讀背面之注意事項再填寫本頁), 1T line 501219 A7 _ B7 V. Description of the invention (21) Rotating to the direction can move the movable reference plate 40 in the vertical and horizontal directions (X, γ directions). Thereby, each of the movable reference pins 41 to 44 can be set at the reference position of the aforementioned glass substrate 45. In this state, as shown in FIG. 10B, the glass base 45 of a specific size is set on the holder frame 2 by the inspector, and is abutted to each of the movable reference pins 43, 44 and 41, At the same time as 42, it is pressed against the movable reference pins 43, 44 and 41, 42 due to the pressing force in the respective pressing directions f1 and f2 of the pressing pins 4a, 4b and 4c, 4d. In the above-mentioned fourth embodiment, the movable frame 40 provided with four movable reference pins 41 to 44 is provided on the holding frame 2 so as to be freely movable in the vertical and horizontal directions. Thereby, not only a large glass substrate, but also a reference position of a glass substrate 45 having a specific size can be automatically set. In addition, by automatically setting the reference pin, the time required for macroscopic observation can be shortened, and since the inspector does not need to perform manual work, no anger is generated. However, even when the movable reference pins 41 to 44 are manually set by the inspector, since only the movable reference plate 40 is moved, it can be set with a simple operation without labor. Figures 12A and 12B are diagrams showing the structure of a substrate holder according to a modification of the fourth embodiment. In the fourth embodiment described above, although the L-shaped movable reference plate 40 is movably provided in the vertical and horizontal directions (XY directions), as shown in FIGS. 12A and 12B, each of the XY directions may be independently moved. The movable substrates 48 and 49 are provided on the ground. On the movable substrates 48 and 49. Each of the movable substrates 48 and 49 is provided with reference pin bodies 50, 51, 52, and 53. The movable reference plates 48 and 49 are equipped with various transmission devices individually. The paper size is applicable to the Chinese National Standard (CNS) A4 rule T210X297 mm. ： 24-(Please read the precautions on the back before filling this page; > -Assembly and order_ Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed 501219 A7 ___B7_ V. Description of the invention (22) It is driven by a motor (stepping motor). The 49 series are arranged together without interfering with each other when moving in the X-Y direction. Thereby, the thickness of the holder frame 2 can be completed without increasing. The following describes modifications of the first to fourth embodiments described above. In the actual form, although the movable reference pin is rotated and set to the reference position, and the glass substrate is clamped on the movable reference pin, it is not limited to this. In order to ensure different sizes of glass substrates, for example, small and small size The reference position of the glass substrate allows a member corresponding to a movable reference pin to be set in a linear movement on the inner side of the holder (the side of the empty portion). Glass substrates other than plates, for example, when observing large glass substrates, the components corresponding to the aforementioned movable reference pins will recede in the receding holes of the holder frame in a linear movement. Figures 1 A and 1 3B are A modified example of the configuration shown in Figs. 6A and 6B is shown. In the configurations of 6A and 6B, when the movable reference pin functions as a snap pin, the pin is rotated. Figs. 13A and 13B In the structure, the retainer frame 2 is provided with retreating holes 60 and 61 in the oblique direction, and linearly moves the clamping pin members 62 and 63 at an angle to the glass substrate. The members 62 and 63 are When the macroscopic observation of the large-sized glass substrate 8 is performed, as shown in FIG. 13A, each is retracted into the retraction holes 60 and 61. In addition, the members 62 and 63. When the small-sized glass substrate 9 is observed, as shown in FIG. As shown in the figure 3B, the small glass substrate 9 is protruded from each of the retreat holes 14 and 15 and is pressed from the inclined direction. However, the members 62 and 63 are provided by various transmission motors or motors (stepping motors) provided separately. It is driven. This paper standard applies Chinese national standard (C NS) A4 size (210X297mm) -25-Approved I ΙΊ IIII line (please read the precautions on the back before filling this page) 501219 A7 B7_ 5. Description of the invention (23) In addition, in the third embodiment above 'The inspector operates to input the size of the glass substrate in the operation section, corresponding to the size of the input glass substrate> The movable reference pin of the movable reference plate is controlled to be set at the reference position of the proper glass substrate. However, it is not limited to this The embodiment “for example, it may be arranged to detect the size of the glass substrate in a plurality of places of the holder frame 2. At this time, when the glass substrate is placed on the holder frame 2, it corresponds to the size of the glass substrate after detection. , The movable reference plate is moved and the movable reference pin is set to the reference position of the current glass substrate for control. In addition, in the third embodiment described above, the movement of the movable substrate is controlled by the driving time of the motor corresponding to the size of the input operated by the operating unit. Although the movable reference pin of the movable reference plate is set to the reference of the glass substrate The position is not limited to such an embodiment. In the configurations of FIGS. 6A and 6B and FIGS. 13A and 13B, the movable reference pin functions as a snap pin. In addition to these examples, for example, a movable reference plate provided with a movable reference pin may be moved in the vertical and horizontal direction (X-Y direction) in accordance with the size of the glass substrate to be observed, and the movable reference pin may be used to hold the glass substrate in place. On each reference pin of the frame. The present invention is not limited to the above-mentioned embodiments, and appropriate changes can be made without changing the gist. [Industrial Applicability] According to the present invention, it is possible to provide a retainer mechanism that can easily change a reference member for glass substrates of different sizes. This paper size applies to China National Standard (CNS) A4 specification (210X297 mm) -26-(Please read the precautions on the back before filling out this page)-Printed · Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and Consumer Cooperatives 501219 A7 B7__ V. Description of the invention (24) [Brief description of the drawing] Fig. 1 is a perspective view showing the structure of a substrate inspection device according to an embodiment of the present invention. Fig. 2 is a configuration diagram showing a substrate holder used in a substrate inspection apparatus according to an embodiment of the present invention. Fig. 3A is a diagram showing a specific configuration of a movable reference pin mechanism according to an embodiment of the present invention. Fig. 3B is a plan view and a side sectional view showing an L-shaped arm according to an embodiment of the present invention. Fig. 4 is a schematic diagram showing a configuration of a drive train of a movable reference pin mechanism according to an embodiment of the present invention. Fig. 5A is a diagram showing a state when a large-sized glass substrate is held by a substrate holder according to an embodiment of the present invention. Fig. 5B is a view showing a state when the small-sized glass substrate is held by the substrate holder according to the embodiment of the present invention. Fig. 6A is a view showing a state when a large-sized glass substrate is held by a substrate holder according to an embodiment of the present invention. Fig. 6B is a view showing a state when the small-sized glass substrate is held by the substrate holder according to the embodiment of the present invention. Figures 7A and 7B are diagrams showing the structure of a substrate holder according to an embodiment of the present invention. Figures 8A and 8B are diagrams showing the structure of a substrate holder according to an embodiment of the present invention. Figure 9A shows the movable standard related to the implementation form of the present invention (please read the precautions on the back before filling this page) Binding and ordering printed by the Intellectual Property Bureau Staff Consumer Cooperatives of the Ministry of Economic Affairs The paper standards are applicable to China National Standards (CNS) A4 specification (210X297 mm) -27-Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 501219 A7 _B7_ V. Description of the invention (25) The pattern of the drive mechanism of the board. Fig. 9B is a sectional view showing the structure of a driving mechanism of a movable reference plate according to an embodiment of the present invention. 10A and 10B are diagrams showing the structure of a substrate holder according to an embodiment of the present invention. Fig. 11 is a schematic diagram showing a configuration of a movable substrate according to an embodiment of the present invention. Figs. 12A and 12B are diagrams showing the structure of a substrate holder according to a modification of the embodiment of the present invention. Figures 13A and 13B are diagrams showing the structure of a substrate holder according to a modified example of the embodiment of the present invention. Fig. 14 is a diagram showing the structure of a substrate holder used in a substrate inspection apparatus in a conventional example. Fig. 15 is a view showing a state where a large glass substrate is held by a substrate holder in a conventional example. Fig. 16 is a view showing a state where a large glass substrate is held by a substrate holder in a conventional example. [Symbol description] 1 Board holder 2 Holder frame (Please read the precautions on the back before filling this page)

3 a ，3 b : ，3 c : ，3 d 基準銷 4 a ，4 b， 丨4 c ' ，4 d 壓銷 5 a ，5 b ： _ 5 c ， ，5 d 可動孔 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -28 - 501219 經濟部智慧財產局員工消費合作社印製 A7 B7五、發明説明（26) 6 基準銷元件 7 a，7 b 基準銷元件安裝部 8 玻璃基板 1 0，1 1 可動基準銷機構 14，15，131〜134 退避用孔 16 停止器 2 0 第1小型玻璃基板 2 1 第2小型玻璃基板 30 可動基準板 3 1 驅動部 3 2 操作部 34 送入螺絲 3 5 軌道 36 馬達控制部 3 7 馬達（步進馬達） 4 6，4 7 連結構件 50，51，52，53 基準銷本體 1 0 1，1 1 1，1 2 1〜1 2 4 可動基準銷 10 2 L字型臂 103 可動銷 104 空氣汽缸 105 汽缸桿 106 直動旋動變換構件 10 7 長孔 (請先閲讀背面之注意事項再填寫本頁) -裝- 訂 線 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -29- 501219 A7 B7 五、發明説明（27) 1 〇 8 旋 轉 軸 2 〇 1 裝 置 本 體 2 0 2 導 引 軌 道 2 0 3 觀 察 元 件 支 持 部 2 0 4 觀 察 元 件 2 0 5 透 過 線 照 明 光 源 2 0 6 背 板 2 0 7 指 標 用 照 明 光 源 2 〇 8 微 細 觀 察 元 件 2 0 9 部分 巨 觀 照 明 光源 2 1 1 對 接 物 鏡 2 1 2 接 巨 鏡 2 1 3 T V 攝 影 機 3 0 1 ，3 0 3 閥 3 0 2 ，3 0 4 洩 氣 閥 3 1 0 ，3 2 0 配 管 經濟部智慧財產局員工消費合作社印製 (請先閱讀背面之注意事項再填寫本頁)3 a, 3 b:, 3 c:, 3 d Reference pins 4 a, 4 b, 丨 4 c ′, 4 d Press pins 5 a, 5 b: _ 5 c,, 5 d The size of this paper is applicable to China National Standard (CNS) A4 specification (210X297 mm) -28-501219 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (26) 6 Reference pin components 7 a, 7 b Reference pin component mounting section 8 Glass substrate 1 0, 1 1 Moveable reference pin mechanism 14, 15, 131 to 134 Evacuation hole 16 Stopper 2 0 First small glass substrate 2 1 Second small glass substrate 30 Moveable reference plate 3 1 Drive unit 3 2 Operating unit 34 Feed screw 3 5 Rail 36 Motor control unit 3 7 Motor (stepping motor) 4 6, 4 7 Connecting member 50, 51, 52, 53 Reference pin body 1 0 1, 1 1 1, 1 2 1 to 1 2 4 Movable reference pin 10 2 L-shaped arm 103 Movable pin 104 Air cylinder 105 Cylinder rod 106 Straight-moving rotation conversion member 10 7 Long hole (Please read the precautions on the back before filling this page)-Binding-Binding paper Standards apply to Chinese National Standard (CNS) A4 specifications (210X297 mm) -29- 501219 A7 B7 V. Description of invention (27 ) 1 〇8 Rotary shaft 2 〇1 Device body 2 0 2 Guide rail 2 0 3 Observation element support 2 0 4 Observation element 2 0 5 Light source through light 2 0 6 Back plate 2 0 7 Illumination light source for indicators 2 〇 8 Micro-viewing element 2 0 9 Part of the macro-view illumination light source 2 1 1 Docking objective lens 2 1 2 Connecting giant lens 2 1 3 TV camera 3 0 1, 3 0 3 valve 3 0 2, 3 0 4 vent valve 3 1 0, 3 2 0 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Piping Ministry of Economic Affairs (please read the precautions on the back before filling this page)

本紙張尺度適用中國國家標準（CNS ) A4規格（210><297公釐） -30 -This paper size applies to China National Standard (CNS) A4 specifications (210 > < 297 mm) -30-

Claims (1)

501219 ABCD 經濟部智慧財產局員工消費合作社印製 六、申請專利範圍 1 1 . 一種保持器機構，其特徵爲具備有保持被保持物之 保持器框；與設置在前述保持器框’將前述被保持卡壓之 固定基準構件；與針對前述被保持體之尺寸對於前述保持 器框可動的，而將前述被保持體卡壓之可動基準構件；與 在前述保持器框之橫方向與縱方向至少各自設置一個’將 前述被保持體卡壓在前述固定基準構件或者前述可動基準 構件之卡壓構件；與驅動前述可動基準構件之驅動部。 2. 如申請專利範圍第1項之保持器機構，其中前述可 動基準構件係對應於複數之前述被保持體之尺寸之位置， 複數組地被設置。 3. 如申請專利範圍第1或者2項之保持器機構，其中 前述固定基準構件係將前述被保持體之鄰二邊卡壓般設置 成複數個。 4. 如申請專利範圍第2項之保持器機構，其中前述驅 動部係對應於保持在前述保持器框之被保持體的尺寸，選 擇性地驅動複數組之前述可動基準構件。 5. 如申請專利範圍第1項之保持器機構，其中前述可 動基準構件係在對應前述被保持體之尺寸位置可自由旋轉 ’將前述保持器框在保持所定尺寸之被保持體時向前述保 持器框之內側方向旋轉，在保持前述所定尺寸以之外之被 保持體時向前述保持器框之外側方向轉。 6·如申請專利範圍第5項之保持器機構，其中前述保 持器框係在將前述可動基準構件向前述保持器框體之外側 方向旋轉時，將前述可動基準構件退避形成退避部。 本紙張尺度適用中國國家標準（CNS ) A4規格（2i0x297公釐） (請先閱讀背面之注意事項再填寫本頁)501219 ABCD Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 6. Application scope for patents 1 1. A holder mechanism characterized by having a holder frame for holding an object to be held; and A fixed reference member that holds the clamp; a movable reference member that compresses the retained body while the retainer frame is movable with respect to the size of the retained body; and at least the lateral and longitudinal directions of the retainer frame Each of them is provided with a pressing member that compresses the held body against the fixed reference member or the movable reference member; and a driving portion that drives the movable reference member. 2. As for the retainer mechanism of the first patent application range, wherein the aforementioned movable reference member corresponds to a position of a plurality of the aforementioned held objects, a plurality of arrays are provided. 3. The retainer mechanism according to item 1 or 2 of the scope of the patent application, wherein the fixed reference member is a plurality of adjacent fixed sides of the retained body. 4. The holder mechanism according to item 2 of the patent application range, wherein the aforementioned driving portion corresponds to the size of the object to be held in the aforementioned holder frame, and selectively drives the aforementioned movable reference member of the complex array. 5. For the holder mechanism of the first patent application range, wherein the movable reference member is freely rotatable at a position corresponding to the size of the body to be held, and the holder frame is held toward the body while holding the body with a predetermined size. The holder frame rotates in the inner direction and rotates toward the outer side of the holder frame while holding the held body other than the predetermined size. 6. The retainer mechanism according to item 5 of the patent application, wherein the retainer frame is configured to retreat the movable reference member to form a retreat portion when the movable reference member is rotated toward the outside of the retainer frame. This paper size applies to Chinese National Standard (CNS) A4 (2i0x297 mm) (Please read the precautions on the back before filling this page) -31 - 501219 A8 B8 C8 D8 六、申請專利範圍 2 7. 如申請專利範圍第1項之保持器機構，其中前述可 動基準構件係設置在前述保持器框之橫方向與縱方向之至 少一方可自由移動地設置之移動構件上。 8. 如申請專利範圍第7項之保持器機構，其中前述移 動構件係在前述橫方向與縱方向之至少一方形成自由移動 之工字型。 9. 如申請專利範圍第7項之保持器機構，其中前述移 動構件係在前述橫方向與縱方向之西方形成自由移動之L 字型。 1 0. —種保持器機構，其特徵爲具備有保持被保持體 之保持器框、與設置在前述保持器框，將前述被保持體卡 壓之固定基準構件、與對應於前述被保持體的尺寸對於前 述保持器可動，將前述保持體卡壓之可動構件、與驅動前 述可動構件之驅動部。 |丨_rl—I ,#! (請先閱讀背面之注意事項再填寫本頁) 、1T 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) Α4規格（210 X 297公釐） -32--31-501219 A8 B8 C8 D8 6. Application for Patent Scope 2 7. For the holder mechanism of the first scope of the patent application, the movable reference member may be provided in at least one of the horizontal and vertical directions of the holder frame. Freely arranged on a moving member. 8. As for the retainer mechanism of claim 7 in the scope of the patent application, the aforementioned moving member is formed in a free-moving I-shape in at least one of the aforementioned horizontal and vertical directions. 9. The retainer mechanism according to item 7 of the scope of patent application, wherein the moving member is formed in a freely moving L-shape in the transverse direction and the longitudinal direction in the west. 1 0. A holder mechanism comprising a holder frame for holding an object to be held, and a fixed reference member provided in the holder frame to hold the object to be held, and a holder corresponding to the object to be held. The size is movable to the holder, a movable member that compresses the holder, and a driving portion that drives the movable member. | 丨 _rl—I, #! (Please read the notes on the back before filling this page), 1T Printed by the Intellectual Property Bureau Staff Consumer Cooperatives of the Ministry of Economic Affairs This paper is printed in accordance with Chinese National Standard (CNS) Α4 specifications (210 X 297 Mm) -32-
TW090110033A 2000-04-26 2001-04-26 Holder mechanism TW501219B (en)

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JP5941971B2 (en) * 2014-12-10 2016-06-29 東京エレクトロン株式会社 Ring-shaped shield member and substrate mounting table provided with ring-shaped shield member

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WO2001081903A1 (en) 2001-11-01
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AU5257001A (en) 2001-11-07
JP4803940B2 (en) 2011-10-26
KR20020022697A (en) 2002-03-27

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