TWI226098B - Multi-purpose stage in substrate inspection apparatus - Google Patents

Multi-purpose stage in substrate inspection apparatus Download PDF

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TWI226098B
TWI226098B TW092127110A TW92127110A TWI226098B TW I226098 B TWI226098 B TW I226098B TW 092127110 A TW092127110 A TW 092127110A TW 92127110 A TW92127110 A TW 92127110A TW I226098 B TWI226098 B TW I226098B
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substrate
guide
item
scope
device described
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TW200503142A (en
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Jae-Sin Sim
Dong-In Lee
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De & T Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306Details
    • G02F1/1309Repairing; Testing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

Multi-purpose stage in a substrate inspection apparatus for holding, and inspecting a substrate for an external defect, including a rectangular frame, a plurality of position shifting devices on the frame, each for shifting a position thereof in correspondence to a size of the substrate to be inspected, and a holding device on each of the position shifting devices for holding or releasing a corner part of the substrate, thereby permitting to shift a position of a substrate holding device on the stage by means of simple system and operation, for stable holding of different sizes of substrates on one stage.

Description

12260981226098

【發明所屬之技術領域】 本發明係關於一種基板檢測裝置,特別是關於一種基 板檢測裝置之可調式平台以利用同一平台進行液晶顯示 器、電漿顯示器等類似產品之不同尺寸基板的檢測。 【先前技術】 一般來說,用以檢測液晶顯示器、電漿顯示器等平面 顯示器之玻璃基板缺陷的裝置,係具有將巨觀的檢驗轉換 至微觀的檢驗之裝置。巨觀的檢驗係以光線直接照射玻璃 基板表面來檢查其缺陷部分,如裂縫或污染等;而微觀的 檢驗’係將巨觀檢驗之缺陷部分放大並進行更準確的檢 測0 習知的基板檢測裝置,如日本第H5 —322783號特許專 利所述,係將基板置於可往χ—γ方向移動的平台,此平台 可作兩維度的移動以分別配合具有巨觀檢測功能之巨觀檢 測f統和微觀檢測功能之微觀檢測系統,然而其無法符合 目前成為趨勢的大尺寸平面顯示器之檢測需求。 為了解決上述之大尺寸平面顯示器基板檢測問題,於 2001年8月所提出的韓國第2〇 一〇238629號專利係揭露一種 基板檢測裝置,將基板置於可旋轉的平台,其巨觀的檢驗 係使用安裝於裝置並旋轉至偏向巨觀檢驗平台的可見光源 所提供之照明光線來進行檢測。微觀的檢驗則需將設置於 可旋轉平台且本身具有光源的微觀檢測系統調整為水 悲’並使其依據水平方向移動來進行檢測。 然而習知的基板檢測裝置於進行基板檢測時,其用以[Technical field to which the invention belongs] The present invention relates to a substrate detection device, and more particularly, to an adjustable platform of a substrate detection device to use the same platform for the detection of substrates of different sizes such as liquid crystal displays, plasma displays, and the like. [Previous technology] Generally, a device for detecting defects in a glass substrate of a flat panel display such as a liquid crystal display or a plasma display is a device that converts a macroscopic inspection to a microscopic inspection. The macroscopic inspection is to directly irradiate the surface of the glass substrate with light to inspect its defective parts, such as cracks or pollution; and the microscopic inspection is to enlarge the defective part of the macroscopic inspection and perform more accurate inspection. 0 Known substrate inspection The device, as described in Japanese Patent No. H5-322783, places the substrate on a platform that can move in the χ-γ direction. This platform can be moved in two dimensions to cooperate with the macroscopic inspection with the macroscopic inspection function. System and micro inspection function, however, it cannot meet the inspection requirements of large-size flat-panel displays that have become the trend. In order to solve the above-mentioned large-size flat display substrate inspection problem, Korean Patent No. 20100238629, which was proposed in August 2001, discloses a substrate inspection device. The substrate is placed on a rotatable platform. The detection is performed by using the illumination light provided by the visible light source installed on the device and rotated to the macro inspection platform. For microscopic inspection, it is necessary to adjust the microscopic inspection system installed on the rotatable platform and having its own light source to water trauma 'and make it perform detection according to the horizontal movement. However, the conventional substrate inspection device is used for substrate inspection.

第7頁 1226098 五、發明說明(2) 固定基板的平台往往只能使用於單一尺寸基板。欲進行其 他尺寸基板的檢測則需轉換基板的固定平台,甚至使用^ 他符合尺寸的基板檢測裝置,如此,會增加使用者的負擔 以及k南基板的生產成本。 【發明内容】 本發明提出一種基板檢測裝置之可調式平台,能夠避 免習知技術的諸多限制與缺點。 bPage 7 1226098 V. Description of the invention (2) The platform of the fixed substrate can often only be used for a single-size substrate. For the inspection of other size substrates, it is necessary to change the fixed platform of the substrate, and even use a substrate inspection device that meets the size. In this way, it will increase the burden on the user and the production cost of the substrate. SUMMARY OF THE INVENTION The present invention provides an adjustable platform for a substrate inspection device, which can avoid many limitations and disadvantages of the conventional technology. b

本發明的主要目的在於提供一種基板檢測裝置之可調式平 台’其平台之固定元件的位置可以利用簡單的系統和“作 來調整,藉以固定不同尺寸之基板。 本發明的其它特徵及優點,將在接下來的說明中將以 闡明,其中一部分會被明白地說明或可由發明所舉的實例 中獲知。而本發明的其它目的及優點,亦可由發明之文字 說明、其中的申請專利範圍以及附圖所具體提出的架構中 加以瞭解得到。 ’、The main purpose of the present invention is to provide an adjustable platform of a substrate detection device. The position of the fixing element of the platform can be adjusted by a simple system and "work", so as to fix substrates of different sizes. Other features and advantages of the present invention will be In the following description, it will be clarified, a part of which will be clearly explained or can be learned from the examples of the invention. Other objects and advantages of the present invention can also be described by the description of the invention, the scope of patent application and the appendix The specific structure proposed in the figure can be understood.

為了達到上述目的及其它優點使其與本發明的目的一 致,根據其實施例大致上所述,本發明所揭露之基板檢測 裝置之可調式平台,包括有一矩形框架,於框架上具有複 數個定位調整元件,可調整其位置以配合不同尺寸^板進 行檢測,以及每一定位調整元件係設有一固定元件^以固 定或釋放基板的角落部分。 根據本發明所述,其用以固定或釋放置於框架的基板 之固定元件的位置可以利用定位調整元件來加以調整,以 配合不同尺寸的基板,使其固定或釋放於平台。In order to achieve the above object and other advantages, which are consistent with the object of the present invention, according to the embodiments, the adjustable platform of the substrate detection device disclosed in the present invention includes a rectangular frame with a plurality of positioning on the frame. The adjusting element can adjust its position for detection with different size plates, and each positioning adjusting element is provided with a fixing element ^ to fix or release a corner portion of the substrate. According to the present invention, the position of the fixing element used to fix or release the substrate placed on the frame can be adjusted by using the positioning adjustment element to cooperate with substrates of different sizes to fix or release it on the platform.

第8頁 1226098 五、發明說明(3) 此定位調整元件包含第—引導件、第一調整板、第二 引導件、第二調整板、第一驅動單元和第二驅動單元。 導件係設於框架,第一調整板耦合於第一引導件並沿 著第一引導件移動,第一鱗命? S -在田、, 〇 π莫m Γ 帛動驅動第一調整板 移動。第二引導件係設於第-調整板輕合 第引導件的另一側,第二調整板耦合於 著第二引導件移動,第一嗎翻 W导什艾/ 口 著第二引導件π。!; 第二調整板沿 置之顏^ 可為平行第-引導件設 ;,第一驅動單元可為平行第二引導件設置之裔 壓缸’或是使用其他驅動裝置作為驅動單元。 ·; 詳細;=明的特徵與實作1配合圖示作最佳實施例 【實施方式】 為了進一步解釋本發明之可調式平台,請夂 圖’ Π本發明實施例之基板檢測裝置之整體結=。 背光單元3可上下移動 如第1圖所示,基板檢測裝置係包含安裝於 之平台2,旋轉桿2a係設於基底部i。姑:a 。轉動並且固定基板以進行檢測。以了光-者:: 於平台2和基底部丨的上表面之間 才光早疋3係§又 且直接提供光線至平台2的背面< 於基底部1上方係具有用 各有一 為了使背光單元3上下移動: 頂端通過基底部1連接於底座8,以&設於基底= 以設置背光單元3之底座8,並Page 8 1226098 V. Description of the invention (3) The positioning adjustment element includes a first guide, a first adjustment plate, a second guide, a second adjustment plate, a first driving unit and a second driving unit. The guide is attached to the frame, and the first adjusting plate is coupled to the first guide and moves along the first guide. What is the first life? S-In the field, π πm m Γ automatically drives the first adjustment plate to move. The second guide is located on the other side of the first-adjustment plate, and the second adjustment plate is coupled to the second guide to move. The first guide is turned over and the second guide is π. . !! The face of the second adjustment plate may be provided as a parallel first guide member; the first drive unit may be a pressure cylinder provided in parallel with the second guide member; or other drive devices may be used as the drive unit. ·; Detailed; = the best features and implementation 1 with the illustration as the best embodiment [Embodiment] In order to further explain the adjustable platform of the present invention, please click on the diagram Π Overall structure of the substrate inspection device of the embodiment of the present invention =. The backlight unit 3 can be moved up and down. As shown in Fig. 1, the substrate detection device includes a platform 2 mounted on it, and a rotating rod 2a is provided on the base portion i. Aunt: a. The substrate is rotated and fixed for inspection. Take the light- :: Only between the platform 2 and the upper surface of the base bottom 丨 early 3 series § and directly provide light to the back of the platform 2 < above the base 1 has a The backlight unit 3 moves up and down: the top end is connected to the base 8 through the base portion 1, and & set on the base = to set the base 8 of the backlight unit 3, and

1226098 五、發明說明(5) 定位調整元件係用以調整固定元件的位置,請參考第 4圖,其為定位調整元件之下方結構示意圖。定位調整元 件係包含設置於框架21每一角落之L形墊22用以固定定位 調整元件,複數個LM導軌241係以對角線方向設於框架21 ,LM導軌241之LM滑塊242上係設有一L形之第一調整板 243 〇 此外,設有第一氣壓缸245使第一調整板沿著LM.導執 241移動’以及於第一氣壓缸245之運作桿246的一端設置 檔塊247以固定L形之第一調整板24 3的底部。 為使定位調整元件可沿著框架之長邊的方向調整其位 置,請參考第5圖,其為定位調整元件之上方結構示意 圖。複數個LM導軌251係以平行於框架之長邊的方向的方 式設置於L形之第一調整板243上表面,LM導軌251之LM滑 塊252上係設有第二調整板253。 為了移動第二調整板253,於第一調整板243之上表面 設有第二氣壓缸255,以及於第二氣壓缸255之運作 的一端设置檔塊257以固定第二調整板253的底部。 =周整元:之整體結構請參考第6圖,其為定位調整元 思圖L其中’LM導執和LM滑塊係組成弓丨導件。 單元。、運作桿、氣壓缸及其作動桿即組成失持件操作 …氣壓缸和第二氣壓紅係由基板檢測I置的^ 早兀(無圖不)所供應之壓縮氣體來操作。 ,控制 本發明之可調式平台的操作如下所述:1226098 V. Description of the invention (5) The positioning adjustment element is used to adjust the position of the fixing element. Please refer to FIG. 4, which is a schematic diagram of the structure below the positioning adjustment element. The positioning and adjusting elements include L-shaped pads 22 provided at each corner of the frame 21 to fix the positioning and adjusting elements. A plurality of LM guides 241 are provided on the frame 21 in a diagonal direction. An L-shaped first adjusting plate 243 is provided. In addition, a first pneumatic cylinder 245 is provided to move the first adjusting plate along the LM guide 241 'and a stopper is provided at one end of the operating rod 246 of the first pneumatic cylinder 245. 247 fixes the bottom of the L-shaped first adjustment plate 24 3. In order that the positioning adjustment element can adjust its position in the direction of the long side of the frame, please refer to FIG. 5, which is a schematic diagram of the upper structure of the positioning adjustment element. The plurality of LM guides 251 are provided on the upper surface of the L-shaped first adjustment plate 243 in a direction parallel to the long side of the frame, and the LM slide 252 of the LM guide 251 is provided with a second adjustment plate 253. In order to move the second adjustment plate 253, a second pneumatic cylinder 255 is provided on the upper surface of the first adjustment plate 243, and a stopper 257 is provided at one end of the operation of the second pneumatic cylinder 255 to fix the bottom of the second adjustment plate 253. = Zhou Zhengyuan: Please refer to Figure 6 for the overall structure. It is a positioning adjustment element. Schematic L includes LM guide and LM slider as the bow and guide. unit. The operating lever, the pneumatic cylinder and its actuating lever constitute the operation of the dislocation. The pneumatic cylinder and the second pneumatic red are operated by the compressed gas supplied by ^ Zaowu (not shown) provided by the substrate detection unit I. The operation of controlling the adjustable platform of the present invention is as follows:

第11頁 1226098 五、發明說明(6) 本發明實施例之可調式平台可用以夾持三種尺寸的基 板,其比例分別為680x 880、610x 720和600χ 720公釐 (mm)。 欲將6 1 0 X 72 0之基板固定於平台以進行檢測時,基板 檢測裝置之控制單元係提供壓縮氣體至第一氣壓缸2 4 5, 將運作桿2 4 6前移;藉由運作桿2 4 6的移動,第一調整板沿 著L Μ導軌2 41以對角線方向向内移動。據此,固定元件之 距離可以配合基板尺寸加以縮小。 在此狀態下’當基板被安裝在框架上時,需供應壓縮 氣體至氣壓缸231 ’以根據夾持件235、236所能適當轉動 來固定基板的位置,使作動桿23 2和其連結的運作桿234 前移。 欲固定6 0 0 X 7 2 0之基板時,相較於前述欲進行檢測之 基板’其寬度減少了 1 0公釐。如前所述,先提供壓縮氣體 至第一氣壓缸245,將運作桿246前移;藉由運作桿246的 移動,第一調整板沿著LM導軌241以對角線方向向内移 動。再提供壓縮氣體至第二氣壓缸255,使運作桿256前 移’使連接至運作桿256之第二調整板可沿著lm導軌以框 架21之長邊的方向縮短1〇釐米的距離。 於此狀態下’當基板被安裝在框架上時,如前所述, 夾持件235、236需適當轉動,並藉由供應至氣壓缸231的 壓縮氣體來固定基板的角落位置。 釋放固定於框架21之基板時,需使氣壓缸之作動桿 2 32反向退回,並使夾持件235、23 6朝相反方向轉動。Page 11 1226098 V. Description of the invention (6) The adjustable platform of the embodiment of the present invention can be used to clamp three sizes of substrates, the proportions of which are 680x 880, 610x 720, and 600x 720 mm (mm). When the 6 1 0 X 72 0 substrate is fixed to the platform for testing, the control unit of the substrate detection device provides compressed gas to the first pneumatic cylinder 2 4 5 and moves the operating rod 2 4 6 forward; The movement of 2 4 6 causes the first adjustment plate to move inward along the LM guide 2 41 in a diagonal direction. Accordingly, the distance between the fixing elements can be reduced in accordance with the size of the substrate. In this state, 'When the substrate is mounted on the frame, compressed gas needs to be supplied to the pneumatic cylinder 231' in order to fix the position of the substrate according to the proper rotation of the clamping members 235 and 236, so that the actuating rod 23 2 and its Move lever 234 forward. When a substrate of 6 0 X 7 2 0 is to be fixed, the width is reduced by 10 mm compared to the substrate 'to be tested. As described above, the compressed air is first supplied to the first pneumatic cylinder 245, and the operating rod 246 is moved forward; by the movement of the operating rod 246, the first adjusting plate is moved inward along the LM guide 241 in a diagonal direction. Compressed gas is further supplied to the second pneumatic cylinder 255, so that the operating rod 256 is moved forward 'so that the second adjustment plate connected to the operating rod 256 can be shortened by a distance of 10 cm along the lm guide rail in the direction of the long side of the frame 21. In this state, when the substrate is mounted on the frame, as described above, the clamping members 235, 236 need to be properly rotated, and the corner position of the substrate is fixed by the compressed gas supplied to the pneumatic cylinder 231. When releasing the substrate fixed to the frame 21, it is necessary to reversely move the actuating rods 2 32 of the pneumatic cylinders and rotate the clamping members 235 and 23 6 in opposite directions.

第12頁 五、發明說明(7) —— ί:方^然本發明實施例係藉由以對角線方向和框架之長 夠=種二第;二調整板253,使其能 的方向ίϋ ίϊ方向’或是框架之對角線和寬\長邊 定其所二!離调整板243和第二調整咖的移動’來決 紅,:ίΐϊ:;操作可以利用任何驅動單元取代氣堡 轴承。驅動單元。如馬達和滾珠螺桿系統或是 種不同尺所平台係用以固定三 由更多方向的調整固定开^ 相同原理,本發明亦可藉 之檢測基板的固定。 ,;同一平台進行更多種尺寸 由調件::】的=測f置之可調式平台係藉 板,而無須改變基板的固定固定不同尺寸的基 板檢測時改變基板的固或平σ,減少一般進行基 間和人力。 牛或平台所需花費的金錢、時 用以限定本發明,二ϋ;佳實施例揭露如上,然其並非 之精神和範圍内,當;=像技藝者’在不脫離本發日月 之專利保護範圍須視本更動^間飾’因此本發明 者為準。 明書所附之申請專利範圍所界定 1226098 圖式簡單說明 第1圖為本發明實施例之基板檢測裝置之整體結構 圖; 第2圖為本發明實施例之平台結構示意圖; 第3圖為固定元件之結構示意圖; 第4圖為定位調整元件之下方結構示意圖; 第5圖為定位調整元件之上方結構示意圖;及 第6圖為定位調整元件之剖面示意圖。 【圖 式符號說明】 1 基底部 2 平台 2a 旋轉桿 3 背光單元 5 連接桿 8 底座 9 操作板 10 升降氣壓缸 11 馬達 12 操作桿 13 鏈結桿 21 框架 22 L形墊 231 氣壓缸 232 作動桿 233 LM導執Fifth, description of the invention on page 12 (7) ——: Fang Ran The embodiment of the present invention is based on the direction of the diagonal and the length of the frame = the second kind; the second adjustment plate 253 to make it possible ίϊdirection 'or the diagonal of the frame and the width \ long side determine the second one! The movement of the separation adjustment plate 243 and the second adjustment coffee ’is determined by: ΐϊ :; The operation can use any driving unit to replace the air castle bearing. Drive unit. For example, the motor and the ball screw system or a platform with a different ruler are used to fix the fixing and opening in three directions. The same principle can be used to detect the fixing of the substrate. The same platform can be used for more kinds of size adjustments ::] = Measurement f is placed on the adjustable platform without the need to change the fixing of the substrate. Fixing the substrate of different sizes to change the fixed or flat σ of the substrate, reducing Generally carried out between the base and manpower. The money and time required by the cattle or platform is used to limit the present invention. Second, the best embodiment is disclosed as above, but it is not within the spirit and scope. The scope of protection is subject to this change, so the inventor shall prevail. The scope of the patent application attached to the certificate is 1226098. The diagram is briefly explained. The first diagram is the overall structural diagram of the substrate inspection device according to the embodiment of the present invention. The second diagram is the schematic diagram of the platform structure of the embodiment of the present invention. The third diagram is fixed. Schematic diagram of the components; Figure 4 is a schematic diagram of the lower structure of the positioning adjustment element; Figure 5 is a schematic diagram of the upper structure of the positioning adjustment element; and Figure 6 is a schematic sectional view of the positioning adjustment element. [Illustration of Symbols] 1 Base 2 Platform 2a Rotating rod 3 Backlight unit 5 Connecting rod 8 Base 9 Operating board 10 Lifting cylinder 11 Motor 12 Operating rod 13 Link rod 21 Frame 22 L-shaped cushion 231 Pneumatic cylinder 232 Actuating rod 233 LM guide

第14頁Page 14

1226098 圖式簡單說明 234 運作桿 235 夾持件 236 夾持件 241 LM導執 242 LM滑塊 243 第一調整板 245 第一氣壓缸 246 運作桿 247 檔塊 251 LM導軌 252 LM滑塊 253 第二調整板 255 第二氣壓缸 256 運作桿 257 檔塊1226098 Brief description of the drawing 234 Operating lever 235 Holding member 236 Holding member 241 LM guide 242 LM slider 243 First adjustment plate 245 First pneumatic cylinder 246 Operating rod 247 Stopper 251 LM guide 252 LM slider 253 Second Adjustment plate 255 Second pneumatic cylinder 256 Operating lever 257 stop

Hi· 第15頁Hi · page 15

Claims (1)

1226098 六、申請專利範圍 1. 一種基板檢測冑置之可調式平台,係用以於檢測一基板 之外部缺陷時固定該基板,包括有: 一矩形框架; ^複數個定位調整元件,係設於該矩形框架,該定位 调整疋件係配合欲進行檢測之不同尺寸基板調整直位 •置;及 一固定兀件,係設置於該定位調整元件用以固定或 釋放該基板的角落部分。 2· $申請專利範圍第丨項所述之基板檢測裝置之可調式平 台,其中該定位調整元件包含: 一第一引導件,係設於該矩形框架; 一第一調整板,耦合於該第一引導件並 引導件移動; ,口耆4弟 第驅動單元,係用以驅動該第一調整板使其沿 者该第一引導件移動; %六 引導dr, ’係設於該第一調整板輕合於該第- 引導;::調r反’柄合於該第二引導件並沿著該第二 著今:第動單元,係用以驅動該第二調整板使其沿 考β第一引導件移動。 ^申=ί利範圍第1項所述之基板檢測裝置之可調式平 口 ,,中該固定元件包含: 複數個夾持件,係安裝於該定位調整元件並以轉動1226098 VI. Scope of patent application 1. An adjustable platform for detecting substrates, which is used for fixing a substrate when detecting external defects of the substrate, including: a rectangular frame; ^ a plurality of positioning adjustment elements, provided on The rectangular frame, the positioning adjustment piece is adjusted to be aligned with different substrates of different sizes to be detected; and a fixed element is provided on the positioning adjustment element to fix or release a corner portion of the substrate. 2. The adjustable platform of the substrate inspection device described in Item 丨 of the patent application scope, wherein the positioning adjustment element includes: a first guide member provided on the rectangular frame; a first adjustment plate coupled to the first A guide member and the guide member move; a mouth drive unit is used to drive the first adjustment plate to move along the first guide member;% six guide dr, 'is provided in the first adjustment The plate is lightly closed on the first-guide; ::: The r-reverse handle is attached to the second guide and follows the second movement: the first moving unit is used to drive the second adjustment plate to follow the test β The first guide moves. ^ Shen = the adjustable opening of the substrate inspection device described in item 1 of the scope of the article, wherein the fixed element includes: a plurality of clamping members, which are mounted on the positioning adjustment element and rotate 第16頁 一氣壓虹,係具有一作動桿; 運作桿,其一端連接至該夾持件並且 作動桿以進行往復運動;及 Ϊ226098 -、申請專利~_ --- 方式和該矩形框架上之該基板的角落接觸;及 轉兮t 2持件操作單元,係耦接於該夾持件以至 4·如申持件,使其固定或釋放該基板的角落。 A 請專利範圍第3項所述之基板檢測裝置之玎 η,其中該失持件操作單元包含·· 之 另 如二引導件,用以引導該運作桿之運動。 台,睛專利範圍第2項所述之基板檢測裝置之可 〇 ,其中該固定元件包含·· 方複數個失持件,係安裝於該第二調整板。』 矛"亥矩幵> 框架上之該基板的角落接觸;及 轉兮夾持件操作單元,係耦接於該夾持件以立 如ΐ ί持件丄使其固定或釋放該基板的角落。 台,π專利範圍第5項所述之基板檢測裝置之可 ’其中該失持件操作單元包含: 一氣壓虹,係具有一作動桿; 至你一運作桿,其一端連接至該夾持件並且另-動桿以進行往復運動;及 用以引導該運作桿之運動。 第2項所述之基板檢測裴置之可 引導件係沿該框架之對角線方ρ 當的旋 調式平 -端連接 調式平 L以轉動 |當的旋 調式平 -端連接 調式平 J設置, 一引導件, 如申請專利範圍 台’其中該第一 乂使该第一調替A pneumatic pressure rainbow on page 16 has an actuating rod; an operating rod whose one end is connected to the clamping member and actuates the rod for reciprocating movement; and Ϊ226098-, patent application ~ _ --- and methods on the rectangular frame The corners of the substrate are in contact; and the t 2 holder operation unit is coupled to the holder and the 4 · ruo holder to fix or release the corners of the substrate. A Please refer to 基板 η of the substrate inspection device described in item 3 of the patent scope, wherein the operation unit of the misplacement member includes another guide member for guiding the movement of the operating lever. The base plate inspection device described in item 2 of the patent scope is acceptable, wherein the fixing element includes a plurality of misfits and is mounted on the second adjustment plate. "The spear" quotes of the substrate on the frame is in contact with the corners of the substrate; and the gripper operating unit is coupled to the gripper so as to stand or release it to hold or release the substrate. corner of. Platform, the substrate detection device described in item 5 of the π patent scope, wherein the operating unit of the misplacement member includes: a pneumatic pressure ring, which has an actuating rod; to you, an operating rod whose one end is connected to the clamping member And also-moving the rod for reciprocating motion; and for guiding the movement of the operating rod. The base plate detection device described in item 2 is located along the diagonal of the frame. When the rotary flat-end connection is adjusted, the rotary flat | end when the rotary flat-end connection is set. A guide, such as a patent application scope, where the first command causes the first switch 1226098 六、申請專利範圍 ---- :申明專利範圍第7項所述之基板檢測裝 :’其中該第二弓丨導件係沿該框架之長 \可^式平 置,以使該第二調整板沿該框架之長邊或寬方向設 動。 逆万向移 •=申請專利範圍第8項所述之基板檢測裝置之可調式平 口 其中该苐二驅動單元係為平行該第二引導件設晉” 一氣壓缸。 ° 1 〇 ·如申請專利範圍第7項戶斤述之基板檢測裝置之可調式平 台’其中該第一驅動單元係為平行該第一引導件設置1226098 VI. Scope of patent application :: Detect the substrate inspection device described in item 7 of the patent scope: 'wherein the second bow 丨 the guide is placed horizontally along the length of the frame, so that the first The two adjusting plates move along the long side or wide direction of the frame. Reverse universal shift • = Adjustable flat mouth of the substrate inspection device described in item 8 of the scope of patent application, where the second drive unit is a parallel to the second guide and a pneumatic cylinder. ° 1 〇 · If a patent is applied for The adjustable platform of the substrate inspection device described in the seventh item of the scope, wherein the first driving unit is provided in parallel with the first guide.
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KR100670288B1 (en) * 2005-02-05 2007-01-16 삼성에스디아이 주식회사 Jig apparatus for fixing substrate, apparatus for measuring leakage current therewith, and method for measuring leakage current
KR100654808B1 (en) * 2005-07-01 2006-12-08 삼성전자주식회사 Panel supporting apparatus
KR100686100B1 (en) * 2005-07-20 2007-02-26 엘지전자 주식회사 JIG for shock-testing Licquid Crystal Display for mobile
KR101290743B1 (en) * 2011-10-07 2013-07-29 삼성중공업 주식회사 Fixing device for forming curved surface
CN103399020A (en) * 2013-07-24 2013-11-20 惠晶显示科技(苏州)有限公司 Glass testing device
KR102007907B1 (en) 2016-07-26 2019-08-06 에이피시스템 주식회사 Stage unit and substrate treatment apparatus including the same and processing method using the same
KR102184167B1 (en) * 2020-04-29 2020-11-27 가온솔루션 주식회사 Work stage for inspection equipment

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