TWI226098B - Multi-purpose stage in substrate inspection apparatus - Google Patents

Abstract

Multi-purpose stage in a substrate inspection apparatus for holding, and inspecting a substrate for an external defect, including a rectangular frame, a plurality of position shifting devices on the frame, each for shifting a position thereof in correspondence to a size of the substrate to be inspected, and a holding device on each of the position shifting devices for holding or releasing a corner part of the substrate, thereby permitting to shift a position of a substrate holding device on the stage by means of simple system and operation, for stable holding of different sizes of substrates on one stage.

Description

1226098

[Technical field to which the invention belongs] The present invention relates to a substrate detection device, and more particularly, to an adjustable platform of a substrate detection device to use the same platform for the detection of substrates of different sizes such as liquid crystal displays, plasma displays, and the like. [Previous technology] Generally, a device for detecting defects in a glass substrate of a flat panel display such as a liquid crystal display or a plasma display is a device that converts a macroscopic inspection to a microscopic inspection. The macroscopic inspection is to directly irradiate the surface of the glass substrate with light to inspect its defective parts, such as cracks or pollution; and the microscopic inspection is to enlarge the defective part of the macroscopic inspection and perform more accurate inspection. 0 Known substrate inspection The device, as described in Japanese Patent No. H5-322783, places the substrate on a platform that can move in the χ-γ direction. This platform can be moved in two dimensions to cooperate with the macroscopic inspection with the macroscopic inspection function. System and micro inspection function, however, it cannot meet the inspection requirements of large-size flat-panel displays that have become the trend. In order to solve the above-mentioned large-size flat display substrate inspection problem, Korean Patent No. 20100238629, which was proposed in August 2001, discloses a substrate inspection device. The substrate is placed on a rotatable platform. The detection is performed by using the illumination light provided by the visible light source installed on the device and rotated to the macro inspection platform. For microscopic inspection, it is necessary to adjust the microscopic inspection system installed on the rotatable platform and having its own light source to water trauma 'and make it perform detection according to the horizontal movement. However, the conventional substrate inspection device is used for substrate inspection.

Page 7 1226098 V. Description of the invention (2) The platform of the fixed substrate can often only be used for a single-size substrate. For the inspection of other size substrates, it is necessary to change the fixed platform of the substrate, and even use a substrate inspection device that meets the size. In this way, it will increase the burden on the user and the production cost of the substrate. SUMMARY OF THE INVENTION The present invention provides an adjustable platform for a substrate inspection device, which can avoid many limitations and disadvantages of the conventional technology. b

The main purpose of the present invention is to provide an adjustable platform of a substrate detection device. The position of the fixing element of the platform can be adjusted by a simple system and "work", so as to fix substrates of different sizes. Other features and advantages of the present invention will be In the following description, it will be clarified, a part of which will be clearly explained or can be learned from the examples of the invention. Other objects and advantages of the present invention can also be described by the description of the invention, the scope of patent application and the appendix The specific structure proposed in the figure can be understood.

In order to achieve the above object and other advantages, which are consistent with the object of the present invention, according to the embodiments, the adjustable platform of the substrate detection device disclosed in the present invention includes a rectangular frame with a plurality of positioning on the frame. The adjusting element can adjust its position for detection with different size plates, and each positioning adjusting element is provided with a fixing element ^ to fix or release a corner portion of the substrate. According to the present invention, the position of the fixing element used to fix or release the substrate placed on the frame can be adjusted by using the positioning adjustment element to cooperate with substrates of different sizes to fix or release it on the platform.

Page 8 1226098 V. Description of the invention (3) The positioning adjustment element includes a first guide, a first adjustment plate, a second guide, a second adjustment plate, a first driving unit and a second driving unit. The guide is attached to the frame, and the first adjusting plate is coupled to the first guide and moves along the first guide. What is the first life? S-In the field, π πm m Γ automatically drives the first adjustment plate to move. The second guide is located on the other side of the first-adjustment plate, and the second adjustment plate is coupled to the second guide to move. The first guide is turned over and the second guide is π. . !! The face of the second adjustment plate may be provided as a parallel first guide member; the first drive unit may be a pressure cylinder provided in parallel with the second guide member; or other drive devices may be used as the drive unit. ·; Detailed; = the best features and implementation 1 with the illustration as the best embodiment [Embodiment] In order to further explain the adjustable platform of the present invention, please click on the diagram Π Overall structure of the substrate inspection device of the embodiment of the present invention =. The backlight unit 3 can be moved up and down. As shown in Fig. 1, the substrate detection device includes a platform 2 mounted on it, and a rotating rod 2a is provided on the base portion i. Aunt: a. The substrate is rotated and fixed for inspection. Take the light- :: Only between the platform 2 and the upper surface of the base bottom 丨 early 3 series § and directly provide light to the back of the platform 2 < above the base 1 has a The backlight unit 3 moves up and down: the top end is connected to the base 8 through the base portion 1, and & set on the base = to set the base 8 of the backlight unit 3, and

1226098 V. Description of the invention (5) The positioning adjustment element is used to adjust the position of the fixing element. Please refer to FIG. 4, which is a schematic diagram of the structure below the positioning adjustment element. The positioning and adjusting elements include L-shaped pads 22 provided at each corner of the frame 21 to fix the positioning and adjusting elements. A plurality of LM guides 241 are provided on the frame 21 in a diagonal direction. An L-shaped first adjusting plate 243 is provided. In addition, a first pneumatic cylinder 245 is provided to move the first adjusting plate along the LM guide 241 'and a stopper is provided at one end of the operating rod 246 of the first pneumatic cylinder 245. 247 fixes the bottom of the L-shaped first adjustment plate 24 3. In order that the positioning adjustment element can adjust its position in the direction of the long side of the frame, please refer to FIG. 5, which is a schematic diagram of the upper structure of the positioning adjustment element. The plurality of LM guides 251 are provided on the upper surface of the L-shaped first adjustment plate 243 in a direction parallel to the long side of the frame, and the LM slide 252 of the LM guide 251 is provided with a second adjustment plate 253. In order to move the second adjustment plate 253, a second pneumatic cylinder 255 is provided on the upper surface of the first adjustment plate 243, and a stopper 257 is provided at one end of the operation of the second pneumatic cylinder 255 to fix the bottom of the second adjustment plate 253. = Zhou Zhengyuan: Please refer to Figure 6 for the overall structure. It is a positioning adjustment element. Schematic L includes LM guide and LM slider as the bow and guide. unit. The operating lever, the pneumatic cylinder and its actuating lever constitute the operation of the dislocation. The pneumatic cylinder and the second pneumatic red are operated by the compressed gas supplied by ^ Zaowu (not shown) provided by the substrate detection unit I. The operation of controlling the adjustable platform of the present invention is as follows:

Page 11 1226098 V. Description of the invention (6) The adjustable platform of the embodiment of the present invention can be used to clamp three sizes of substrates, the proportions of which are 680x 880, 610x 720, and 600x 720 mm (mm). When the 6 1 0 X 72 0 substrate is fixed to the platform for testing, the control unit of the substrate detection device provides compressed gas to the first pneumatic cylinder 2 4 5 and moves the operating rod 2 4 6 forward; The movement of 2 4 6 causes the first adjustment plate to move inward along the LM guide 2 41 in a diagonal direction. Accordingly, the distance between the fixing elements can be reduced in accordance with the size of the substrate. In this state, 'When the substrate is mounted on the frame, compressed gas needs to be supplied to the pneumatic cylinder 231' in order to fix the position of the substrate according to the proper rotation of the clamping members 235 and 236, so that the actuating rod 23 2 and its Move lever 234 forward. When a substrate of 6 0 X 7 2 0 is to be fixed, the width is reduced by 10 mm compared to the substrate 'to be tested. As described above, the compressed air is first supplied to the first pneumatic cylinder 245, and the operating rod 246 is moved forward; by the movement of the operating rod 246, the first adjusting plate is moved inward along the LM guide 241 in a diagonal direction. Compressed gas is further supplied to the second pneumatic cylinder 255, so that the operating rod 256 is moved forward 'so that the second adjustment plate connected to the operating rod 256 can be shortened by a distance of 10 cm along the lm guide rail in the direction of the long side of the frame 21. In this state, when the substrate is mounted on the frame, as described above, the clamping members 235, 236 need to be properly rotated, and the corner position of the substrate is fixed by the compressed gas supplied to the pneumatic cylinder 231. When releasing the substrate fixed to the frame 21, it is necessary to reversely move the actuating rods 2 32 of the pneumatic cylinders and rotate the clamping members 235 and 23 6 in opposite directions.

Fifth, description of the invention on page 12 (7) ——: Fang Ran The embodiment of the present invention is based on the direction of the diagonal and the length of the frame = the second kind; the second adjustment plate 253 to make it possible ίϊdirection 'or the diagonal of the frame and the width \ long side determine the second one! The movement of the separation adjustment plate 243 and the second adjustment coffee ’is determined by: ΐϊ :; The operation can use any driving unit to replace the air castle bearing. Drive unit. For example, the motor and the ball screw system or a platform with a different ruler are used to fix the fixing and opening in three directions. The same principle can be used to detect the fixing of the substrate. The same platform can be used for more kinds of size adjustments ::] = Measurement f is placed on the adjustable platform without the need to change the fixing of the substrate. Fixing the substrate of different sizes to change the fixed or flat σ of the substrate, reducing Generally carried out between the base and manpower. The money and time required by the cattle or platform is used to limit the present invention. Second, the best embodiment is disclosed as above, but it is not within the spirit and scope. The scope of protection is subject to this change, so the inventor shall prevail. The scope of the patent application attached to the certificate is 1226098. The diagram is briefly explained. The first diagram is the overall structural diagram of the substrate inspection device according to the embodiment of the present invention. The second diagram is the schematic diagram of the platform structure of the embodiment of the present invention. The third diagram is fixed. Schematic diagram of the components; Figure 4 is a schematic diagram of the lower structure of the positioning adjustment element; Figure 5 is a schematic diagram of the upper structure of the positioning adjustment element; and Figure 6 is a schematic sectional view of the positioning adjustment element. [Illustration of Symbols] 1 Base 2 Platform 2a Rotating rod 3 Backlight unit 5 Connecting rod 8 Base 9 Operating board 10 Lifting cylinder 11 Motor 12 Operating rod 13 Link rod 21 Frame 22 L-shaped cushion 231 Pneumatic cylinder 232 Actuating rod 233 LM guide

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1226098 Brief description of the drawing 234 Operating lever 235 Holding member 236 Holding member 241 LM guide 242 LM slider 243 First adjustment plate 245 First pneumatic cylinder 246 Operating rod 247 Stopper 251 LM guide 252 LM slider 253 Second Adjustment plate 255 Second pneumatic cylinder 256 Operating lever 257 stop

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Claims (1)

1226098 VI. Scope of patent application 1. An adjustable platform for detecting substrates, which is used for fixing a substrate when detecting external defects of the substrate, including: a rectangular frame; ^ a plurality of positioning adjustment elements, provided on The rectangular frame, the positioning adjustment piece is adjusted to be aligned with different substrates of different sizes to be detected; and a fixed element is provided on the positioning adjustment element to fix or release a corner portion of the substrate. 2. The adjustable platform of the substrate inspection device described in Item 丨 of the patent application scope, wherein the positioning adjustment element includes: a first guide member provided on the rectangular frame; a first adjustment plate coupled to the first A guide member and the guide member move; a mouth drive unit is used to drive the first adjustment plate to move along the first guide member;% six guide dr, 'is provided in the first adjustment The plate is lightly closed on the first-guide; ::: The r-reverse handle is attached to the second guide and follows the second movement: the first moving unit is used to drive the second adjustment plate to follow the test β The first guide moves. ^ Shen = the adjustable opening of the substrate inspection device described in item 1 of the scope of the article, wherein the fixed element includes: a plurality of clamping members, which are mounted on the positioning adjustment element and rotate A pneumatic pressure rainbow on page 16 has an actuating rod; an operating rod whose one end is connected to the clamping member and actuates the rod for reciprocating movement; and Ϊ226098-, patent application ~ _ --- and methods on the rectangular frame The corners of the substrate are in contact; and the t 2 holder operation unit is coupled to the holder and the 4 · ruo holder to fix or release the corners of the substrate. A Please refer to 基板 η of the substrate inspection device described in item 3 of the patent scope, wherein the operation unit of the misplacement member includes another guide member for guiding the movement of the operating lever. The base plate inspection device described in item 2 of the patent scope is acceptable, wherein the fixing element includes a plurality of misfits and is mounted on the second adjustment plate. "The spear" quotes of the substrate on the frame is in contact with the corners of the substrate; and the gripper operating unit is coupled to the gripper so as to stand or release it to hold or release the substrate. corner of. Platform, the substrate detection device described in item 5 of the π patent scope, wherein the operating unit of the misplacement member includes: a pneumatic pressure ring, which has an actuating rod; to you, an operating rod whose one end is connected to the clamping member And also-moving the rod for reciprocating motion; and for guiding the movement of the operating rod. The base plate detection device described in item 2 is located along the diagonal of the frame. When the rotary flat-end connection is adjusted, the rotary flat | end when the rotary flat-end connection is set. A guide, such as a patent application scope, where the first command causes the first switch 1226098 VI. Scope of patent application :: Detect the substrate inspection device described in item 7 of the patent scope: 'wherein the second bow 丨 the guide is placed horizontally along the length of the frame, so that the first The two adjusting plates move along the long side or wide direction of the frame. Reverse universal shift • = Adjustable flat mouth of the substrate inspection device described in item 8 of the scope of patent application, where the second drive unit is a parallel to the second guide and a pneumatic cylinder. ° 1 〇 · If a patent is applied for The adjustable platform of the substrate inspection device described in the seventh item of the scope, wherein the first driving unit is provided in parallel with the first guide.