TW200503142A - Multi-purpose stage in substrate inspection apparatus - Google Patents

Multi-purpose stage in substrate inspection apparatus

Info

Publication number
TW200503142A
TW200503142A TW092127110A TW92127110A TW200503142A TW 200503142 A TW200503142 A TW 200503142A TW 092127110 A TW092127110 A TW 092127110A TW 92127110 A TW92127110 A TW 92127110A TW 200503142 A TW200503142 A TW 200503142A
Authority
TW
Taiwan
Prior art keywords
substrate
stage
inspection apparatus
holding
substrate inspection
Prior art date
Application number
TW092127110A
Other languages
Chinese (zh)
Other versions
TWI226098B (en
Inventor
Jae-Sin Sim
Dong-In Lee
Original Assignee
De & T Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by De & T Co Ltd filed Critical De & T Co Ltd
Application granted granted Critical
Publication of TWI226098B publication Critical patent/TWI226098B/en
Publication of TW200503142A publication Critical patent/TW200503142A/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

Multi-purpose stage in a substrate inspection apparatus for holding, and inspecting a substrate for an external defect, including a rectangular frame, a plurality of position shifting devices on the frame, each for shifting a position thereof in correspondence to a size of the substrate to be inspected, and a holding device on each of the position shifting devices for holding or releasing a corner part of the substrate, thereby permitting to shift a position of a substrate holding device on the stage by means of simple system and operation, for stable holding of different sizes of substrates on one stage.
TW092127110A 2003-07-02 2003-09-30 Multi-purpose stage in substrate inspection apparatus TWI226098B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2003-0044608A KR100530982B1 (en) 2003-07-02 2003-07-02 Multi-Stage for Substrate Inspection Device

Publications (2)

Publication Number Publication Date
TWI226098B TWI226098B (en) 2005-01-01
TW200503142A true TW200503142A (en) 2005-01-16

Family

ID=34587783

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092127110A TWI226098B (en) 2003-07-02 2003-09-30 Multi-purpose stage in substrate inspection apparatus

Country Status (3)

Country Link
KR (1) KR100530982B1 (en)
CN (1) CN100505207C (en)
TW (1) TWI226098B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100670288B1 (en) * 2005-02-05 2007-01-16 삼성에스디아이 주식회사 Jig apparatus for fixing substrate, apparatus for measuring leakage current therewith, and method for measuring leakage current
KR100654808B1 (en) * 2005-07-01 2006-12-08 삼성전자주식회사 Panel supporting apparatus
KR100686100B1 (en) * 2005-07-20 2007-02-26 엘지전자 주식회사 JIG for shock-testing Licquid Crystal Display for mobile
KR101290743B1 (en) * 2011-10-07 2013-07-29 삼성중공업 주식회사 Fixing device for forming curved surface
CN103399020A (en) * 2013-07-24 2013-11-20 惠晶显示科技（苏州）有限公司 Glass testing device
KR102007907B1 (en) 2016-07-26 2019-08-06 에이피시스템 주식회사 Stage unit and substrate treatment apparatus including the same and processing method using the same
KR102184167B1 (en) * 2020-04-29 2020-11-27 가온솔루션 주식회사 Work stage for inspection equipment

Also Published As

Publication number Publication date
CN1576827A (en) 2005-02-09
KR20050004434A (en) 2005-01-12
TWI226098B (en) 2005-01-01
KR100530982B1 (en) 2005-11-28
CN100505207C (en) 2009-06-24

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees