CN108519391B - Substrate clamping and positioning mechanism and substrate detection device - Google Patents
Substrate clamping and positioning mechanism and substrate detection device Download PDFInfo
- Publication number
- CN108519391B CN108519391B CN201810347748.7A CN201810347748A CN108519391B CN 108519391 B CN108519391 B CN 108519391B CN 201810347748 A CN201810347748 A CN 201810347748A CN 108519391 B CN108519391 B CN 108519391B
- Authority
- CN
- China
- Prior art keywords
- clamping
- cylinder
- units
- substrate
- supporting seat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 55
- 238000001514 detection method Methods 0.000 title claims description 11
- 230000000903 blocking effect Effects 0.000 claims description 24
- 238000003825 pressing Methods 0.000 claims description 23
- 238000007689 inspection Methods 0.000 claims description 12
- 238000009434 installation Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000000034 method Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Automatic Assembly (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a substrate clamping and positioning mechanism, which is characterized in that two fixed group front and back clamping units and two movable group front and back clamping units are utilized to clamp and position a panel in the front and back direction after the panel is horizontally placed, the two fixed group leaning units and two movable group leaning units are utilized to clamp and position the panel in the left and right direction, and the lifting clamping units are utilized to clamp the positioned panel, so that the panel cannot slide out from the horizontal direction when the panel is turned over, and a camera can conveniently photograph the panel to find an origin after the panel is turned over.
Description
Technical Field
The invention relates to the technical field of substrate detection, in particular to a substrate clamping and positioning mechanism and a substrate detection device.
Background
In the process of manufacturing a substrate such as a photomask, it is generally required to perform macro inspection by placing it on a macro inspection apparatus to inspect whether or not there is a defect on the panel or the substrate.
The clamping mechanism of the conventional macro inspection equipment for substrates such as photomasks can simply realize clamping in the vertical direction. In the inspection process, the substrate needs to be turned over, photographed, positioned and the like after being clamped so as to inspect the defects of the substrate at different positions and different angles. The substrate can slide out from the horizontal direction by adopting the existing clamping mechanism with little carelessness in the overturning process, so that fragments are caused. In addition, the premise of realizing photographing positioning is that the camera can find the origin of the substrate. The existing clamping mechanism has the defects that the placing position of each substrate is deviated when the substrate is placed every time, and the position of the substrate cannot be adjusted and accurately positioned, so that the photographing and positioning function cannot be realized.
In view of the above-mentioned drawbacks, the present inventors have actively studied and innovated to create a substrate clamping and positioning mechanism and a substrate inspection device, which are more industrially valuable.
Disclosure of Invention
The invention aims to provide a substrate clamping and positioning mechanism and a substrate detection device, which can stably clamp a panel, avoid the panel from sliding out in the overturning process, and accurately position the panel when clamping the panel so as to facilitate the subsequent photographing and positioning of the panel.
To achieve the purpose, the invention adopts the following technical scheme:
a substrate clamping and positioning mechanism comprises a frame, a clamping component and a positioning component which are arranged on the frame, wherein,
the frame has two opposite side plates;
the clamping assembly comprises two groups of lifting clamping units, the two groups of lifting clamping units are respectively arranged on the two side plates and are opposite to each other, and the two groups of lifting clamping units can clamp the two opposite ends of the panel;
the positioning assembly includes:
the front and rear clamping units of the two fixed groups are respectively and oppositely arranged on the two side plates and positioned at one side of the clamping assembly;
the front and rear clamping units of the two movable groups are respectively and oppositely arranged on the two side plates and positioned on the other side of the clamping assembly; and the two front and rear clamping units of the fixed group and the two front and rear clamping units of the movable group can respectively abut against two end parts of two side edges parallel to the panel.
Further, the substrate clamping and positioning mechanism further comprises:
the two fixed group leaning units are arranged on one side plate and are respectively positioned below the front and rear clamping units of the fixed group and the front and rear clamping units of the movable group;
the two movable group leaning units are arranged on the other side plate and are respectively positioned below the front and rear clamping units of the fixed group and the front and rear clamping units of the movable group; and the two fixed group leaning units and the two movable group leaning units can respectively lean against two end parts of the other two parallel side edges of the panel.
Further, each group of lifting clamping units comprises a lower pressing plate and an upper pressing plate which are oppositely arranged, and the lower pressing plate and the upper pressing plate can do lifting movement and move along the direction vertical to the side plate.
Further, the lower pressing plate and the upper pressing plate are both connected with a first air cylinder for driving the lower pressing plate and the upper pressing plate to move along the direction perpendicular to the side plates, a first supporting seat is arranged on the first air cylinder, a second air cylinder for driving the lower pressing plate to lift is connected to the first supporting seat, and the second air cylinder is arranged on the side plates.
Further, the front and rear clamping unit of the fixed group comprises a first blocking arm and a third cylinder driving the first blocking arm to horizontally move along the side plate, the third cylinder is installed on a second supporting seat on the side plate, and a first fastening device limiting the third cylinder to move relative to the second supporting seat is arranged on the third cylinder.
Further, the front and rear clamping unit of the movable group comprises a second blocking arm and a fourth air cylinder driving the second blocking arm to horizontally move along the side plate, the fourth air cylinder is installed on a third supporting seat on the side plate, and a first buffer spring device capable of enabling the fourth air cylinder to move relative to the third supporting seat is arranged on the fourth air cylinder.
Further, the fixed group leaning unit comprises a first stop lever which is vertically arranged, a fifth air cylinder which drives the first stop lever to move along the direction vertical to the side plate, and a first mounting seat which is used for mounting the fifth air cylinder, wherein the first mounting seat is mounted on a fourth supporting seat on the side plate, and a second fastening device which is used for limiting the first mounting seat to move relative to the fourth supporting seat is arranged on the first mounting seat.
Further, the movable group leaning unit comprises a second stop lever which is vertically arranged, a sixth air cylinder which drives the second stop lever to move along the direction vertical to the side plate, and a second installation seat which is installed on the sixth air cylinder, wherein the second installation seat is installed on a fifth supporting seat on the side plate, and a second buffer spring device which can enable the second stop lever to move relative to the fifth supporting seat is arranged on the second installation seat.
The substrate macroscopic inspection device comprises a supporting seat, a rotating mechanism and the substrate clamping and positioning mechanism, wherein the rotating mechanism is arranged on the supporting seat, and the substrate clamping and positioning mechanism is fixed on the supporting seat through the rotating mechanism and can rotate around a horizontal axial direction under the driving of the rotating mechanism.
Further, the substrate macroscopic inspection device further comprises a frame and an automatic optical detection unit, wherein the automatic optical detection unit is arranged on the frame and can realize linear movement in the vertical direction and the horizontal direction.
The beneficial effects of the invention are as follows: the front and back clamping units of the two fixed groups and the front and back clamping units of the two movable groups are utilized to clamp and position the panel in the front and back direction after the panel is horizontally placed, the two fixed groups and the two movable groups can clamp and position the panel in the left and right direction, and the lifting clamping units can clamp the positioned panel, so that the panel cannot slide out from the horizontal direction when the panel is turned over, and the camera is convenient to take pictures of the panel to find an origin after the panel is turned over.
Drawings
FIG. 1 is a schematic view of a substrate clamping and positioning mechanism according to an embodiment of the present invention;
FIG. 2 is a schematic view of another angular configuration of a substrate clamping and positioning mechanism according to an embodiment of the present invention;
FIG. 3 is a schematic view of a lifting clamping unit in a substrate clamping and positioning mechanism according to an embodiment of the present invention;
FIG. 4 is a schematic view of the structure of the front and rear clamping units of the fixed group in the substrate clamping and positioning mechanism according to the embodiment of the present invention;
FIG. 5 is a schematic view of the structure of the front and rear clamping units of the movable group in the substrate clamping and positioning mechanism according to the embodiment of the present invention;
FIG. 6 is a schematic view of a structure of a fixed-group positioning unit in a substrate clamping and positioning mechanism according to an embodiment of the present invention;
FIG. 7 is a schematic view of a movable set of positioning units in a substrate clamping and positioning mechanism according to an embodiment of the present invention;
FIG. 8 is a schematic view of a portion of a device for macro-inspection of a substrate according to an embodiment of the present invention;
fig. 9 is a schematic overall structure of a substrate macro inspection apparatus according to an embodiment of the present invention.
In the figure: 100-substrate clamping and positioning mechanism, 10-side plate, 20-lifting clamping unit, 21-lower pressing plate, 22-upper pressing plate, 23-first cylinder, 24-first supporting seat, 25-second cylinder, 26-cushion, 30-fixed group front and rear clamping unit, 31-first blocking arm, 32-third cylinder, 33-second supporting seat, 34-first fastening device, 35-cushion, 40-movable group front and rear clamping unit, 41-second blocking arm, 42-fourth cylinder, 43-third supporting seat, 44-first buffer spring device, 45-cushion, 50-fixed group leaning unit, 51-first blocking rod, 52-fifth cylinder, 53-first mounting seat, 54-fourth supporting seat, 55-second fastening device, 56-rubber roller, 60-movable group leaning unit, 61-second blocking rod, 62-sixth cylinder, 63-second mounting seat, 64-fifth supporting seat, 65-second buffer spring device, 66-rubber roller, 70-panel, 200-automatic supporting seat, 200-rotating mechanism, 400-detecting frame, 500-detecting device.
Detailed Description
The technical scheme of the invention is further described below by the specific embodiments with reference to the accompanying drawings.
As shown in fig. 1 to 2, the substrate clamping and positioning mechanism of the present invention comprises a frame, a clamping assembly and a positioning assembly provided on the frame, wherein the frame has two opposite side plates 10; the clamping assembly comprises two groups of lifting clamping units 20, wherein the two groups of lifting clamping units 20 are respectively arranged on the two side plates 10 and are opposite, and the two groups of lifting clamping units 20 can clamp the opposite two ends of the panel 70; the positioning assembly comprises two fixed group front and rear clamping units 30, two movable group front and rear clamping units 40, two fixed group leaning units 50 and two movable group leaning units 60, wherein the two fixed group front and rear clamping units 30 are respectively and oppositely arranged on the two side plates 10 and are positioned at one side of the clamping assembly; the two movable group front and rear clamping units 40 are respectively oppositely arranged on the two side plates 10 and positioned at the other side of the clamping assembly, and the two fixed group front and rear clamping units 30 and the two movable group front and rear clamping units 40 can respectively abut against two end parts of two side edges parallel to the panel 70; the two fixed group leaning units 50 are arranged on one side plate 10 and are respectively positioned below the fixed group front and rear clamping units 30 and the movable group front and rear clamping units 40; the two movable group leaning units 60 are disposed on the other side plate 10 and respectively located below the fixed group front and rear clamping units 30 and the movable group front and rear clamping units 40, and the two fixed group leaning units 50 and the two movable group leaning units 60 can respectively lean against two ends of the other two side edges parallel to the panel 70.
The substrate clamping and positioning mechanism of the invention can clamp and position the panel 70 in the front-rear direction after the panel 70 is horizontally placed by utilizing the two fixed group front-rear clamping units 30 and the two movable group front-rear clamping units 40, clamp and position the panel 70 in the left-right direction by utilizing the two fixed group leaning units 50 and the two movable group leaning units 60, clamp and position the positioned panel 70 by utilizing the lifting clamping unit 20, so that the panel 70 can not slide out from the horizontal direction when the panel 70 is turned over, and the camera can conveniently shoot the panel 70 to find an origin after the panel 70 is turned over.
Specifically, as shown in fig. 3, each set of lifting and clamping units 20 includes a lower platen 21 and an upper platen 22 which are disposed opposite to each other, and the lower platen 21 and the upper platen 22 are capable of lifting and moving in a direction perpendicular to the side plates 10.
In order to enable the lower pressing plate 21 and the upper pressing plate 22 to do lifting movement and move along the direction vertical to the side plate 10, a first air cylinder 23 for driving the lower pressing plate 21 and the upper pressing plate 22 to move along the direction vertical to the side plate 10 is connected to the lower pressing plate 21 and the upper pressing plate 22, a first supporting seat 24 is arranged on the first air cylinder 23, a second air cylinder 25 for driving the first supporting seat 24 to lift is connected to the first air cylinder, and the second air cylinder 25 is arranged on the side plate 10.
In addition, a cushion 26 is provided on each of the lower platen 21 and the upper platen 22. The provision of the cushion 26 allows the panel 70 to be clamped between the lower 21 and upper 22 platens with a clamping force that is flexible rather than rigid, avoiding damage to the panel.
As shown in fig. 1, 2 and 4, the fixed group front-rear clamping unit 30 includes a first blocking arm 31, a third cylinder 32 driving the first blocking arm 31 to move horizontally along the side plate 10, the third cylinder 32 is mounted on a second support seat 33 on the side plate 10, and a first fastening device 34 restricting its movement relative to the second support seat 33 is provided on the third cylinder 32.
As shown in fig. 1, 2 and 5, the swing group front-rear clamping unit 40 includes a second blocking arm 41, a fourth cylinder 42 driving the second blocking arm 41 to move horizontally along the side plate 10, the fourth cylinder 42 is mounted on a third support seat 43 on the side plate 10, and a first buffer spring device 44 capable of moving relative to the third support seat 43 is provided on the fourth cylinder 42.
When the two third cylinders 32 and the two fourth cylinders 42 are started, the two first blocking arms 31 and the two second blocking arms 41 respectively abut against two ends of two parallel sides of the panel 70, and the first buffer spring device 44 can avoid damage to the panel 70 due to excessive clamping force of the two first blocking arms 31 and the two second blocking arms 41.
In order to further avoid pinching the panel 70 by the two first blocking arms 31 and the two second blocking arms 41, the invention provides rubber pads 34, 45 on the ends of the first blocking arms 31 and the second blocking arms 40, respectively.
As shown in fig. 1 and 6, the fixed group positioning unit 50 includes a first bar 51 vertically disposed, a fifth cylinder 52 driving the first bar 51 to move in a direction perpendicular to the side plate 10, a first mount 53 mounting the fifth cylinder 52, the first mount 53 being mounted on a fourth support 54 on the side plate 10, and the first mount 53 being provided with a second fastening means 55 restricting movement thereof with respect to the fourth support 54.
As shown in fig. 2 and 7, the movable group positioning unit 60 includes a second bar 61 vertically disposed, a sixth cylinder 62 driving the second bar 61 to move in a direction perpendicular to the side plate 10, and a second mount 63 to which the sixth cylinder 62 is mounted, the second mount 63 being mounted on a fifth support 64 on the side plate 10, and the second mount 63 being provided with a second buffer spring device 65 capable of moving it relative to the fifth support 64.
When the two fifth cylinders 52 and the two sixth cylinders 62 are started, the two first stop rods 51 and the two second stop rods 61 respectively abut against two ends of the other two parallel sides of the panel 70, and the second buffer spring device 65 can avoid damage to the panel 70 due to excessive clamping force of the two first stop rods 51 and the two second stop rods 61.
In order to further avoid pinching the panel 70 by the two first bars 51 and the two second bars 61, the invention provides rubber rollers 56, 66 on the ends of the first bars 51 and the second bars 61, respectively.
The working principle of the substrate clamping and positioning mechanism of the invention is as follows: the two lower pressure plates 21 are lifted and advanced to place the panel 70 on the two lower pressure plates 21, the two third air cylinders 32 and the two fourth air cylinders 42 are started, the two first baffle arms 31 and the two second baffle arms 41 clamp the two ends of the two parallel sides of the panel 70, then the two fifth air cylinders 52 and the two sixth air cylinders 62 are started, the two first stop rods 51 and the two second stop rods 61 clamp the two ends of the other two parallel sides of the panel 70 to realize positioning, and then the two upper pressure plates 22 are advanced and lowered to place to clamp the panel 70.
As shown in fig. 8 and 9, the substrate macroscopic inspection apparatus of the present invention includes a frame 400, a supporting seat 200 disposed in the frame 400, and an automatic optical detection unit 500 disposed on the frame 400, wherein a rotation mechanism 300 is mounted on the supporting seat 200, the substrate clamping and positioning mechanism 100 is mounted on the rotation mechanism 300, and is rotated around a horizontal axis under the driving of the rotation mechanism 300, and the automatic optical detection unit 500 is used for photographing and detecting the substrate on the substrate clamping and positioning mechanism 100 and can move linearly in a vertical direction and a horizontal direction.
The above-mentioned rotating mechanism 300 is a common mechanism in the art, and will not be described herein, and in addition, the linear movement of the automatic optical detection unit 500 in the vertical direction and the horizontal direction can be implemented by a linear module, which is a common mechanism, and will not be described herein.
The technical principle of the present invention is described above in connection with the specific embodiments. The description is made for the purpose of illustrating the general principles of the invention and should not be taken in any way as limiting the scope of the invention. Other embodiments of the invention will be apparent to those skilled in the art from consideration of this specification without undue burden.
Claims (7)
1. A substrate clamping and positioning mechanism is characterized by comprising a frame, a clamping component and a positioning component which are arranged on the frame, wherein,
the frame has two opposite side plates;
the clamping assembly comprises two groups of lifting clamping units, the two groups of lifting clamping units are respectively arranged on the two side plates and are opposite to each other, and the two groups of lifting clamping units can clamp two opposite ends of the panel;
the positioning assembly includes:
the front and rear clamping units of the two fixed groups are respectively and oppositely arranged on the two side plates and positioned at one side of the clamping assembly;
the front and rear clamping units of the two movable groups are respectively and oppositely arranged on the two side plates and positioned on the other side of the clamping assembly; the front and rear clamping units of the two fixed groups and the front and rear clamping units of the two movable groups can respectively abut against two end parts of two side edges parallel to the panel;
the substrate clamping and positioning mechanism further comprises:
the two fixed group leaning units are arranged on one side plate and are respectively positioned below the front and rear clamping units of the fixed group and the front and rear clamping units of the movable group;
the two movable group leaning units are arranged on the other side plate and are respectively positioned below the front and rear clamping units of the fixed group and the front and rear clamping units of the movable group; the two fixed group leaning units and the two movable group leaning units can respectively lean against two end parts of the other two parallel side edges of the panel;
the front and rear clamping unit of the fixed group comprises a first blocking arm and a third cylinder for driving the first blocking arm to horizontally move along the side plate, the third cylinder is arranged on a second supporting seat on the side plate, and a first fastening device for limiting the movement of the third cylinder relative to the second supporting seat is arranged on the third cylinder;
the movable group leaning unit comprises a second stop lever which is vertically arranged, a sixth air cylinder which drives the second stop lever to move along the direction vertical to the side plate, and a second installation seat which is installed on the sixth air cylinder, wherein the second installation seat is installed on a fifth supporting seat on the side plate, and a second buffer spring device which can enable the second stop lever to move relative to the fifth supporting seat is arranged on the second installation seat.
2. The substrate clamping and positioning mechanism according to claim 1, wherein each of the lifting and clamping units comprises a lower platen and an upper platen which are disposed opposite to each other, the lower platen and the upper platen being capable of lifting and moving in a direction perpendicular to the side plates.
3. The substrate clamping and positioning mechanism according to claim 2, wherein the lower pressing plate and the upper pressing plate are both connected with a first cylinder for driving the lower pressing plate and the upper pressing plate to move along a direction perpendicular to the side plates, a first supporting seat is installed on the first cylinder, a second cylinder for driving the lower pressing plate and the upper pressing plate to lift is connected to the first supporting seat, and the second cylinder is installed on the side plates.
4. The substrate clamping and positioning mechanism according to claim 1, wherein the movable group front-rear clamping unit comprises a second blocking arm and a fourth cylinder for driving the second blocking arm to horizontally move along the side plate, the fourth cylinder is mounted on a third supporting seat on the side plate, and a first buffer spring device capable of enabling the fourth cylinder to move relative to the third supporting seat is arranged on the fourth cylinder.
5. The substrate clamping and positioning mechanism according to claim 1, wherein the fixed group leaning unit comprises a first stop lever arranged vertically, a fifth cylinder driving the first stop lever to move along a direction perpendicular to the side plate, and a first mounting seat for mounting the fifth cylinder, wherein the first mounting seat is mounted on a fourth supporting seat on the side plate, and a second fastening device limiting the movement of the first mounting seat relative to the fourth supporting seat is arranged on the first mounting seat.
6. The substrate macroscopic inspection device comprises a supporting seat and a rotating mechanism, wherein the rotating mechanism is arranged on the supporting seat, and the substrate macroscopic inspection device is characterized by further comprising the substrate clamping and positioning mechanism according to any one of claims 1-5, wherein the substrate clamping and positioning mechanism is fixed on the supporting seat through the rotating mechanism and can rotate around a horizontal axial direction under the drive of the rotating mechanism.
7. The apparatus according to claim 6, further comprising a frame and an automatic optical detection unit provided on the frame and linearly movable in a vertical direction and a horizontal direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810347748.7A CN108519391B (en) | 2018-04-18 | 2018-04-18 | Substrate clamping and positioning mechanism and substrate detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810347748.7A CN108519391B (en) | 2018-04-18 | 2018-04-18 | Substrate clamping and positioning mechanism and substrate detection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108519391A CN108519391A (en) | 2018-09-11 |
| CN108519391B true CN108519391B (en) | 2024-04-16 |
Family
ID=63428878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810347748.7A Active CN108519391B (en) | 2018-04-18 | 2018-04-18 | Substrate clamping and positioning mechanism and substrate detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108519391B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111781212A (en) * | 2020-07-30 | 2020-10-16 | 南宁华数轻量化电动汽车设计院有限公司 | Plank defect visual inspection device |
| CN114152865B (en) * | 2021-12-02 | 2023-06-23 | 业成科技（成都）有限公司 | Detection jig |
| CN115744171A (en) * | 2022-11-29 | 2023-03-07 | 成都毕普智造科技有限公司 | Automatic centering clamping feeding device and system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201512275U (en) * | 2009-07-02 | 2010-06-23 | 河北省机械科学研究设计院 | Lateral clamping transportation device for full-automatic block shaping production lines |
| CN204077856U (en) * | 2014-09-29 | 2015-01-07 | 广东富华重工制造有限公司 | Brake wheel automatic turnover machine |
| CN208580045U (en) * | 2018-04-18 | 2019-03-05 | 苏州精濑光电有限公司 | A kind of substrate clamping positioning mechanism and substrate detection apparatus |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SI20729A (en) * | 2002-02-19 | 2002-06-30 | Pavel Ledinek | Machine for profiling front plates on oblong wooden work pieces |
| KR101181560B1 (en) * | 2008-09-12 | 2012-09-10 | 다이닛뽕스크린 세이조오 가부시키가이샤 | Substrate processing apparatus and substrate conveying apparatus for use in the same |
-
2018
- 2018-04-18 CN CN201810347748.7A patent/CN108519391B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201512275U (en) * | 2009-07-02 | 2010-06-23 | 河北省机械科学研究设计院 | Lateral clamping transportation device for full-automatic block shaping production lines |
| CN204077856U (en) * | 2014-09-29 | 2015-01-07 | 广东富华重工制造有限公司 | Brake wheel automatic turnover machine |
| CN208580045U (en) * | 2018-04-18 | 2019-03-05 | 苏州精濑光电有限公司 | A kind of substrate clamping positioning mechanism and substrate detection apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108519391A (en) | 2018-09-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108519391B (en) | Substrate clamping and positioning mechanism and substrate detection device | |
| JP5108420B2 (en) | Multistage polarizing film inspection system | |
| CN116116750B (en) | Appearance detection device for square battery after blue film packaging | |
| CN110102494A (en) | It is a kind of to detect the equipment that auxiliary material attaches state on mobile phone shell or center | |
| CN113176280B (en) | Liquid crystal panel layering detection device and method | |
| CN107685978B (en) | Conveying device | |
| TW200424528A (en) | Apparatus for inspecting substrate | |
| CN208921398U (en) | High-precision display screen detection device | |
| CN208580045U (en) | A kind of substrate clamping positioning mechanism and substrate detection apparatus | |
| CN220322933U (en) | Protective film tensile testing machine | |
| CN116087218B (en) | Cell blue film detection equipment | |
| CN107884417A (en) | A kind of substrate edges check machine and marginal check method | |
| WO2012121489A1 (en) | Aligning apparatus for inspecting a sheet film | |
| CN213843698U (en) | Liquid crystal screen detection equipment | |
| TWI226098B (en) | Multi-purpose stage in substrate inspection apparatus | |
| JP2003302346A (en) | Surface inspection device for sheet work | |
| KR100813291B1 (en) | Apparatus for inspecting and repairing substrate | |
| CN113189803A (en) | Equipment and method for full lamination of vehicle-mounted special-shaped curved screen | |
| CN210840227U (en) | Automatic flattening module | |
| CN117169235B (en) | Defect detection device of display panel and operation method | |
| CN220894549U (en) | Mylar film stretching machine | |
| CN217543176U (en) | Antistatic fabric detects fabric surface resistance device | |
| CN211254197U (en) | Automatic full inspection equipment for silica gel nodes | |
| CN218272009U (en) | Mould detection device | |
| CN216971288U (en) | Horizontal adjustment mechanism and optical microscope |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |