CN108519391A - A kind of substrate clamping positioning mechanism and substrate detection apparatus - Google Patents
A kind of substrate clamping positioning mechanism and substrate detection apparatus Download PDFInfo
- Publication number
- CN108519391A CN108519391A CN201810347748.7A CN201810347748A CN108519391A CN 108519391 A CN108519391 A CN 108519391A CN 201810347748 A CN201810347748 A CN 201810347748A CN 108519391 A CN108519391 A CN 108519391A
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- cylinder
- side plate
- substrate
- group
- positioning mechanism
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- 239000000758 substrate Substances 0.000 title claims abstract description 56
- 230000007246 mechanism Effects 0.000 title claims abstract description 47
- 238000001514 detection method Methods 0.000 title description 8
- 230000000694 effects Effects 0.000 claims abstract description 39
- 230000000903 blocking effect Effects 0.000 claims description 23
- 238000007689 inspection Methods 0.000 claims description 16
- 238000009434 installation Methods 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 208000036829 Device dislocation Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
Abstract
The invention discloses a kind of substrate clamping positioning mechanisms, it can be after panel-level placement using two fixed front and back clamping units of group and two front and back clamping units of activity group, panel is clamped positioning in front-rear direction, using two fixed groups bit location is leaned on by bit location and two activity groups, panel can be in left and right directions clamped to positioning, the panel having good positioning can be clamped using lifting clamping unit, so, in roll-over panels, panel will not skid off from horizontal direction, and take pictures to panel convenient for camera after overturning and look for origin.
Description
Technical field
The present invention relates to the detection technique field of substrate more particularly to a kind of substrate clamping positioning mechanism and substrate detection dresses
It sets.
Background technology
In the manufacturing process of the substrates such as light shield, it usually needs be placed on carrying out macroscopical inspection in macro -graph equipment
It surveys, whether there is defect in inspection panel or substrate.
The clamping device of the macro -graph equipment of the substrates such as existing light shield can only simply realize the folder of vertical direction
Tightly.During the inspection process, need to be overturn and be taken pictures after clamping substrate the actions such as positioning, to check different location and not
With the base board defect of angle.And it will be slided from horizontal direction using existing clamping device careless slightly substrate in switching process
Go out, causes fragmentation.In addition the premise that positioning is realized of taking pictures is the origin that camera can find substrate.Existing clamping device due to
When substrate is placed every time, the placement location per plate base can all have deviation, and cannot be adjusted to the position of substrate simultaneously accurately
Positioning, therefore positioning function of taking pictures can not be realized.
In view of the above shortcomings, the designer, is actively subject to research and innovation, to found a kind of substrate clamping and positioning machine
Structure and substrate detection apparatus make it with more the utility value in industry.
Invention content
It is an object of the invention to propose a kind of substrate clamping positioning mechanism and substrate detection apparatus, can steadily clamp
Panel avoids it from being skidded off in switching process, and can accurately be positioned to panel when clamping panel, so as to follow-up right
Panel is taken pictures positioning.
For this purpose, the present invention uses following technical scheme：
A kind of substrate clamping positioning mechanism, including frame, the clamp assembly and positioning component of setting on said frame,
In,
The frame has two opposite side plates；
The clamp assembly includes two groups of lifting clamping units, and clamping unit is lifted described in two groups and is separately positioned on two institutes
The opposite both ends of the panel can be clamped by stating on side plate and lifting clamping unit relatively, described in two groups；
The positioning component includes：
Two fixed front and back clamping units of group, two fixed front and back clamping units of group respectively opposite setting at two
On the side plate and it is located at the clamp assembly side；
Two front and back clamping units of activity group, two front and back clamping units of activity group respectively opposite setting at two
On the side plate and it is located at the clamp assembly other side；And clamping units and two activities before and after two fixed groups
The front and back clamping unit of group can be born against on two ends of two parallel sides of the panel.
Further, the substrate clamping positioning mechanism further includes：
Fixing group for two leans on bit location, two fixed groups to be disposed therein on a side plate and divide by bit location
Not Wei Yu the fixed front and back clamping unit of group with below the front and back clamping unit of activity group；
Two activity groups are arranged on another described side plate and divide by bit location by bit location, two activity groups
Not Wei Yu the fixed front and back clamping unit of group with below the front and back clamping unit of activity group；And two fixed groups lean on position
Unit is with two activity groups by two ends of bit location other two side that can to bear against the panel parallel
In portion.
Further, it includes the lower platen and top board being oppositely arranged, the pushing that clamping unit is lifted described in every group
Plate and the top board can move up and down and edge is moved perpendicular to the direction of the side plate.
Further, the lower platen and the top board are respectively connected with its edge of driving and are transported perpendicular to the direction of the side plate
The first dynamic cylinder is equipped with the first support base on first cylinder, and driving its lifting is connected on first support base
The second cylinder, second cylinder be mounted on the side plate on.
Further, the front and back clamping unit of fixed group includes the first blocking arm, driving first blocking arm along the side
The third cylinder of plate level movement, the third cylinder is mounted on the second support base on the side plate, and the third gas
Cylinder is equipped with and limits its first fastener moved relative to second support base.
Further, the front and back clamping unit of activity group includes the second blocking arm, driving second blocking arm along the side
4th cylinder of plate level movement, the 4th cylinder is mounted on the third support base on the side plate, and the 4th gas
Cylinder, which is equipped with, can make it relative to the first buffer spring device moved with the third support base.
Further, the fixed group includes the first bar being vertically arranged, driving first bar edge by bit location
First mounting base of the 5th cylinder, installation the 5th cylinder that are moved perpendicular to the direction of the side plate, first installation
Seat is mounted on the four-supporting on the side plate, and first mounting base is equipped with and limits its relatively described 4th support
The mobile second fastener of seat.
Further, the activity group includes the second bar being vertically arranged, driving second bar edge by bit location
Second mounting base of the 6th cylinder, installation the 6th cylinder that are moved perpendicular to the direction of the side plate, second installation
Seat be mounted on the side plate on the 5th support base on, and second mounting base be equipped with it can be made 5th relatively described
Support the second buffer spring device of seat movement.
The substrate macro inspection apparatus of the present invention, including support base and rotating mechanism, the rotating mechanism are set to institute
It states on support base, also includes above-mentioned substrate clamping positioning mechanism, the substrate clamping positioning mechanism passes through the rotating mechanism
It is fixed on the support base, and can be rotated around horizontal axis under the drive of the rotating mechanism.
Further, substrate macro inspection apparatus also includes rack and automatic optics inspection unit, the automated optical inspection
It surveys unit to be set in the rack, and can both vertically and horizontally realize linear movement.
Beneficial effects of the present invention are：Utilize two fixed front and back clamping units of group and two front and back clamping units of activity group
Panel can be clamped positioning in front-rear direction after panel-level placement, bit location and two are depended on using two fixed groups
Activity group leans on bit location, and panel can be in left and right directions clamped to positioning, the face that can will be had good positioning using lifting clamping unit
Plate is clamped, in this way, in roll-over panels, panel will not skid off from horizontal direction, and is clapped panel convenient for camera after overturning
According to looking for origin.
Description of the drawings
Fig. 1 is the structural schematic diagram for the substrate clamping positioning mechanism that the specific embodiment of the invention provides；
Fig. 2 is the structural schematic diagram of another angle for the substrate clamping positioning mechanism that the specific embodiment of the invention provides；
Fig. 3 is that the structure of the lifting clamping unit in the substrate clamping positioning mechanism that the specific embodiment of the invention provides is shown
It is intended to；
Fig. 4 is the front and back clamping unit of fixed group in the substrate clamping positioning mechanism that the specific embodiment of the invention provides
Structural schematic diagram；
Fig. 5 is the front and back clamping unit of activity group in the substrate clamping positioning mechanism that the specific embodiment of the invention provides
Structural schematic diagram；
Fig. 6 is structure of the fixed group in the substrate clamping positioning mechanism that the specific embodiment of the invention provides by bit location
Schematic diagram；
Fig. 7 is structure of the activity group in the substrate clamping positioning mechanism that the specific embodiment of the invention provides by bit location
Schematic diagram；
Fig. 8 is the partial schematic diagram in the substrate macro inspection apparatus that the specific embodiment of the invention provides；
Fig. 9 is the overall structure diagram for the substrate macro inspection apparatus that the specific embodiment of the invention provides.
In figure：100- substrate clamping positioning mechanisms, 10- side plates, 20- lift clamping unit, and 21- lower platens are pressed on 22-
Plate, the first cylinders of 23-, the first support bases of 24-, the second cylinders of 25-, 26- cushions, clamping unit before and after 30- fixation groups, 31-
One blocking arm, 32- third cylinders, the second support bases of 33-, 34- first fasteners, 35- cushion pads, 40- activities group is front and back to be clamped
Unit, the second blocking arms of 41-, the 4th cylinders of 42-, 43- third support bases, 44- the first buffer spring devices, 45- cushion pads, 50-
Fixed group leans on bit location, and the first bars of 51-, the 5th cylinders of 52-, the first mounting bases of 53-, 54- four-supportings, 55- second is tightly
Be fixedly mounted with and set, 56- rubber rolls, 60- activity groups lean on bit location, the second bars of 61-, the 6th cylinders of 62-, the second mounting bases of 63-,
The 5th support bases of 64-, 65- the second buffer spring devices, 66- rubber rolls, 70- panels, 200- support bases, 300- whirlers
Structure, 400- racks, 500- automatic optical detection devices.
Specific implementation mode
Technical solution to further illustrate the present invention below with reference to the accompanying drawings and specific embodiments.
As shown in Fig. 1 to 2, substrate clamping positioning mechanism of the invention includes frame, the clamp assembly that is arranged on frame
And positioning component, wherein frame has two opposite side plates 10；Clamp assembly include two groups of lifting clamping units 20, two groups
Lifting clamping unit 20 is separately positioned on two side plates 10 and relatively, two groups of lifting clamping units 20 can clamp 70 phase of panel
To both ends；Positioning component includes that two front and back clamping units 40, two of fixed front and back 30, two activity groups of clamping unit of group are solid
Fixed group leans on bit location 60 by bit location 50 and two activity groups, and opposite setting exists the front and back clamping units of two fixed groups 30 respectively
On two side plates 10 and it is located at clamp assembly side；The front and back clamping unit of two activity groups 40 respectively opposite setting two sides
On plate 10 and it is located at the clamp assembly other side, and two fixed front and back clamping units 30 of group and two front and back clamping units of activity group
40 can bear against on two ends of two parallel sides of panel 70；Two fixed groups are arranged by bit location 50 at it
In on a side plate 10 and be located at the front and back clamping unit 30 of fixed group and front and back 40 lower section of clamping unit of activity group；Two work
Before dynamic group leans on bit location 60 to be arranged on another side plate 10 and is located at the front and back clamping unit 30 of fixed group and activity group
40 lower section of clamping unit afterwards, and two fixed groups can bear against panel by bit location 50 and two activity groups by bit location 60
On two ends of 70 other two parallel side.
Before and after the substrate clamping positioning mechanism of the present invention is using two fixed front and back clamping units 30 of group and two activity groups
Panel 70 can be clamped positioning in front-rear direction, utilizes two fixed groups by clamping unit 40 after panel 70 is horizontal positioned
Bit location 60 is leaned on by bit location 50 and two activity groups, panel 70 positioning can be clamped in left and right directions, be pressed from both sides using lifting
The panel 70 having good positioning can be clamped by tight unit 20, in this way, in roll-over panels 70, panel 70 will not be slided from horizontal direction
Go out, and takes pictures to panel 70 convenient for camera after overturning and look for origin.
Specifically, as shown in figure 3, every group of lifting clamping unit 20 includes the lower platen 21 and top board being oppositely arranged
22, lower platen 21 and top board 22 can move up and down and along being moved perpendicular to the direction of side plate 10.
In order to enable lower platen 21 and top board 22 to move up and down and along being moved perpendicular to the direction of side plate 10, this hair
Bright the first cylinder 23 for being respectively connected with its edge of driving on lower platen 21 and top board 22 and being moved perpendicular to the direction of side plate 10, the
First support base 24 is installed on one cylinder 23, be connected on the first support base 24 driving its lifting the second cylinder 25, second
Cylinder 25 is mounted on side plate 10.
In addition, being equipped with cushion 26 on lower platen 21 and top board 22.The setting of cushion 26, can be in lower platen 21 and upper pressure
When plate 22 clamps panel 70, when chucking power, is flexible without being rigid, and avoids damage panel.
As shown in Fig. 1,2 and 4, the fixed front and back clamping unit 30 of group includes the first blocking arm 31, the first blocking arm 31 of driving along side
The third cylinder 32 that plate 10 moves horizontally, third cylinder 32 is mounted on the second support base 33 on side plate 10, and third cylinder
32 be equipped with limit its first fastener 34 moved relative to the second support base 33.
As shown in Fig. 1,2 and 5, the front and back clamping unit 40 of activity group includes the second blocking arm 41, the second blocking arm 41 of driving along side
The 4th cylinder 42 that plate 10 moves horizontally, the 4th cylinder 42 is mounted on the third support base 43 on side plate 10, and the 4th cylinder
42 be equipped with it can be made relative to the first buffer spring device 44 moved with third support base 43.
After two third cylinders 32 and two the 4th cylinders 42 start, two the first blocking arms 31 and two the second blocking arms 41
On two ends for bearing against two parallel sides of panel 70, and the first buffer spring device 44 can avoid two first
Blocking arm 31 and two 41 chucking powers of the second blocking arm are excessive and damage panel 70.
Bad panel 70 is pressed from both sides in order to further avoid two the first blocking arms 31 and two the second blocking arms 41, the present invention is in first gear
It is respectively equipped with rubber pad 34,45 on the end of arm 31 and the second blocking arm 40.
As shown in figs. 1 and 6, fixed group includes the first bar 51 being vertically arranged, the first bar 51 of driving by bit location 50
Along the first mounting base 53 of the 5th cylinder 52, the 5th cylinder 52 of installation that are moved perpendicular to the direction of side plate 10, the first mounting base
53 are mounted on the four-supporting 54 on side plate 10, and the first mounting base 53 is equipped with and limits it with respect to the shifting of four-supporting 54
Dynamic second fastener 55.
As shown in figs. 2 and 7, activity group includes the second bar 61 being vertically arranged, the second bar 61 of driving by bit location 60
Along the second mounting base 63 of the 6th cylinder 62, the 6th cylinder 62 of installation that are moved perpendicular to the direction of side plate 10, the second mounting base
63 are mounted on the 5th support base 64 on side plate 10, and the second mounting base 63 is equipped with its can be made with respect to the 5th support base 64
The second mobile buffer spring device 65.
After two the 5th cylinders 52 and two the 6th cylinders 62 start, two the first bars 51 and two the second bars 61
It bears against on two ends of other two parallel side of panel 70, and the second buffer spring device 65 can avoid two
First bar 51 and two 61 chucking powers of the second bar are excessive and damage panel 70.
Bad panel 70 is pressed from both sides in order to further avoid two the first bars 51 and two the second bars 61, the present invention is in first gear
It is respectively equipped with rubber roll 56,66 on the end of bar 51 and the second bar 61.
The present invention substrate clamping positioning mechanism operation principle be：Two lower platens 21 rise and advance in place, by panel
70 are placed on two lower platens 21, and two third cylinders 32 and two the 4th cylinders 42 start, two the first blocking arms 31 and two
A second blocking arm 41 clamps two ends of two parallel sides of panel 70, latter two right the 5th cylinder 52 and two
6th cylinder 62 starts, and two the first bars 51 and two the second bars 61 are by the two of other two parallel side of panel 70
A end clamps, and realizes that positioning, latter two right top board 22 are advanced and fallen into place, panel 70 is clamped.
As shown in Figure 8 and Figure 9, substrate macro inspection apparatus of the invention includes rack 400, is arranged in the rack 400
Interior support base 200 and the automatic optics inspection unit 500 being set in rack 400 are equipped with rotating mechanism on support base 200
300, above-mentioned substrate clamping positioning mechanism 100 is mounted on rotating mechanism 300, around level under the drive of rotating mechanism 300
Axial-rotation, automatic optics inspection unit 500, can for carrying out detection of taking pictures to the substrate on substrate clamping positioning mechanism 100
In both vertically and horizontally linear movement.
Above-mentioned rotating mechanism 300 is the common mechanism of this field, and which is not described herein again, in addition, automatic optics inspection list
The linear movement both vertically and horizontally of member 500 can realize that straight line module is Conventional mechanisms, here by straight line module
Also it repeats no more.
The technical principle of the present invention is described above in association with specific embodiment.These descriptions are intended merely to explain the present invention's
Principle, and it cannot be construed to limiting the scope of the invention in any way.Based on the explanation herein, the technology of this field
Personnel would not require any inventive effort the other specific implementation modes that can associate the present invention, these modes are fallen within
Within protection scope of the present invention.
Claims (10)
1. a kind of substrate clamping positioning mechanism, which is characterized in that including frame, clamp assembly on said frame is arranged and determines
Hyte part, wherein
The frame has two opposite side plates；
The clamp assembly includes two groups of lifting clamping units, and clamping unit is lifted described in two groups and is separately positioned on two sides
On plate and opposite, clamping unit is lifted described in two groups can clamp the opposite both ends of the panel；
The positioning component includes：
Two fixed front and back clamping units of group, two fixed front and back clamping units of group respectively opposite setting described in two
On side plate and it is located at the clamp assembly side；
Two front and back clamping units of activity group, two front and back clamping units of activity group respectively opposite setting described in two
On side plate and it is located at the clamp assembly other side；And before two fixed front and back clamping units of group and two activity groups
Clamping unit can be born against on two ends of two parallel sides of the panel afterwards.
2. substrate clamping positioning mechanism according to claim 1, which is characterized in that the substrate clamping positioning mechanism also wraps
It includes：
It fixes group for two and leans on bit location, two fixed groups are disposed therein on a side plate by bit location and difference position
Below the fixed front and back clamping unit of group and the front and back clamping unit of activity group；
Two activity groups are by bit location, and two activity groups are arranged on another described side plate by bit location and difference position
Below the fixed front and back clamping unit of group and the front and back clamping unit of activity group；And two fixed groups lean on bit location
With two activity groups on two ends of bit location other two side that can to bear against the panel parallel.
3. substrate clamping positioning mechanism according to claim 1 or 2, which is characterized in that lift clamping unit described in every group
Include the lower platen and top board that are oppositely arranged, the lower platen and the top board can move up and down and along perpendicular to
The direction of the side plate moves.
4. substrate clamping positioning mechanism according to claim 3, which is characterized in that the lower platen and the top board are equal
Being connected with driving, it is equipped with the first support along the first cylinder moved perpendicular to the direction of the side plate, first cylinder
, the second cylinder of its lifting of driving is connected on first support base, second cylinder is mounted on the side plate.
5. substrate clamping positioning mechanism according to claim 2, which is characterized in that the fixed front and back clamping unit packet of group
Include the first blocking arm, the third cylinder that driving first blocking arm is moved horizontally along the side plate, the third cylinder is mounted on institute
State on the second support base on side plate, and the third cylinder be equipped with limit its moved relative to second support base first
Clamp device.
6. substrate clamping positioning mechanism according to claim 2, which is characterized in that the front and back clamping unit packet of activity group
Include the second blocking arm, the 4th cylinder that driving second blocking arm is moved horizontally along the side plate, the 4th cylinder is mounted on institute
It states on the third support base on side plate, and the 4th cylinder is equipped with it can be made relative to moving with the third support base
First buffer spring device.
7. substrate clamping positioning mechanism according to claim 2, which is characterized in that the fixed group includes perpendicular by bit location
The first bar for being directly arranged, driving first bar along moved perpendicular to the direction of the side plate the 5th cylinder, installation institute
State the first mounting base of the 5th cylinder, first mounting base is mounted on the four-supporting on the side plate, and described the
One mounting base is equipped with and limits its second fastener moved relative to the four-supporting.
8. substrate clamping positioning mechanism according to claim 2, which is characterized in that the activity group includes perpendicular by bit location
The second bar for being directly arranged, driving second bar along moved perpendicular to the direction of the side plate the 6th cylinder, installation institute
State the second mounting base of the 6th cylinder, second mounting base is mounted on the 5th support base on the side plate, and described the
Two mounting bases, which are equipped with, can make the second buffer spring device that it is moved relative to the 5th support base.
9. a kind of substrate macro inspection apparatus, including support base and rotating mechanism, the rotating mechanism are set to the support
On seat, which is characterized in that also include the substrate clamping positioning mechanism as described in claim 1-8 any one, the substrate folder
Tight detent mechanism is fixed on by the rotating mechanism on the support base, and can be under the drive of the rotating mechanism around level
Axial-rotation.
10. substrate macro inspection apparatus according to claim 9, which is characterized in that also include that rack and automated optical are examined
Unit is surveyed, the automatic optics inspection unit is set in the rack, and can both vertically and horizontally realized linearly
It is mobile.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810347748.7A CN108519391B (en) | 2018-04-18 | 2018-04-18 | Substrate clamping and positioning mechanism and substrate detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810347748.7A CN108519391B (en) | 2018-04-18 | 2018-04-18 | Substrate clamping and positioning mechanism and substrate detection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108519391A true CN108519391A (en) | 2018-09-11 |
| CN108519391B CN108519391B (en) | 2024-04-16 |
Family
ID=63428878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810347748.7A Active CN108519391B (en) | 2018-04-18 | 2018-04-18 | Substrate clamping and positioning mechanism and substrate detection device |
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| Country | Link |
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| CN (1) | CN108519391B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114152865A (en) * | 2021-12-02 | 2022-03-08 | 业成科技（成都）有限公司 | Detection jig |
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| US20030155036A1 (en) * | 2002-02-19 | 2003-08-21 | Pavel Ledinek | Machine for profile working of front surfaces on oblong wood workpieces |
| US20100068014A1 (en) * | 2008-09-12 | 2010-03-18 | Ichiro Mitsuyoshi | Substrate processing apparatus and substrate conveying apparatus for use in the same |
| CN201512275U (en) * | 2009-07-02 | 2010-06-23 | 河北省机械科学研究设计院 | Lateral clamping transportation device for full-automatic block shaping production lines |
| CN204077856U (en) * | 2014-09-29 | 2015-01-07 | 广东富华重工制造有限公司 | Brake wheel automatic turnover machine |
| CN208580045U (en) * | 2018-04-18 | 2019-03-05 | 苏州精濑光电有限公司 | A kind of substrate clamping positioning mechanism and substrate detection apparatus |
-
2018
- 2018-04-18 CN CN201810347748.7A patent/CN108519391B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030155036A1 (en) * | 2002-02-19 | 2003-08-21 | Pavel Ledinek | Machine for profile working of front surfaces on oblong wood workpieces |
| US20100068014A1 (en) * | 2008-09-12 | 2010-03-18 | Ichiro Mitsuyoshi | Substrate processing apparatus and substrate conveying apparatus for use in the same |
| CN201512275U (en) * | 2009-07-02 | 2010-06-23 | 河北省机械科学研究设计院 | Lateral clamping transportation device for full-automatic block shaping production lines |
| CN204077856U (en) * | 2014-09-29 | 2015-01-07 | 广东富华重工制造有限公司 | Brake wheel automatic turnover machine |
| CN208580045U (en) * | 2018-04-18 | 2019-03-05 | 苏州精濑光电有限公司 | A kind of substrate clamping positioning mechanism and substrate detection apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114152865A (en) * | 2021-12-02 | 2022-03-08 | 业成科技（成都）有限公司 | Detection jig |
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| Publication number | Publication date |
|---|---|
| CN108519391B (en) | 2024-04-16 |
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