CN201359599Y - Photo-mask detection device - Google Patents
Photo-mask detection device Download PDFInfo
- Publication number
- CN201359599Y CN201359599Y CNU2009201295230U CN200920129523U CN201359599Y CN 201359599 Y CN201359599 Y CN 201359599Y CN U2009201295230 U CNU2009201295230 U CN U2009201295230U CN 200920129523 U CN200920129523 U CN 200920129523U CN 201359599 Y CN201359599 Y CN 201359599Y
- Authority
- CN
- China
- Prior art keywords
- light shield
- console
- operator
- checkout equipment
- vertically moves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001514 detection method Methods 0.000 title abstract description 14
- 230000003287 optical effect Effects 0.000 claims abstract description 12
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 230000007547 defect Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 3
- 230000003467 diminishing effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Images
Landscapes
- Microscoopes, Condenser (AREA)
Abstract
The utility model discloses a photo-mask detection device, which comprises: a trestle table consisting of a horizontal plane and an upright surface, and a supporting arm extends out from the rear direction of the trestle table; a movable operation panel which is disposed on the horizontal plane of the trestle table; and a microscope mechanism including a plurality of optical lenses with different multiplying powers, and the microscope mechanism is fixed above the movable operation panel through the supporting arm. The photo-mask detection device can realize detection of flaws of photo-masks with high precision and very small line width, and can be applied to the photo-mask detection of a plurality of accuracy grades.
Description
Technical field
The utility model relates to the light shield detection technique, relates in particular to a kind of light shield checkout equipment.
Background technology
Along with advancing by leaps and bounds and the develop rapidly of technology of semiconductor and LCD (LCD) industry, light shield has become the important utensil in IC, TFT, the HDI manufacturing, demand to the quantity of light shield is increasing, also more and more higher to the requirement of the precision of light shield and every performance index, particularly aspect semiconductor system, when precision rises to nanometer era from micron, this quality requirements to light shield manufacture is also more and more important, what the lifting of precision directly produced is exactly that lines diminish, and dwindling of live width makes the light shield inspection be faced with more stern challenge.
In traditional light shield detection scheme, generally there are following two kinds of detection schemes;
A kind of scheme is to adopt magnifier to detect mask defect: light shield is put on the work light platform, carry out the magnified sweep check by the magnifier that adopts 5 times, 10 times or 20 times, this test mode is missed defective easily, and can't guarantee that the light shield surface is scanned all; And because the diminishing of live width, this mode also is difficult to be applicable to present light shield check.
Another kind of scheme is to adopt similar biological microscope to detect mask defect: optical lens is to be in transfixion, and optical lens is fixed as one, light shield is put under the camera lens, be transmitted in the eyepiece human eye by lens imaging, and to checking on whole light shield surface, be by manually the mobile of light shield being carried out, so this mode rate of displacement, displacement stability, the size of tested light shield, all can have influence on the recall rate of light shield surface imperfection, comprise that this optical lens is quite single, this kind detection mode can't be applicable to present light shield examination requirements.
Along with diminishing of light shield live width, the lifting of precision, these detection schemes more and more have been difficult to detect mask defect, and the check of mask defect suffers from very big puzzlement and obstruction.
The utility model content
Technical problem to be solved in the utility model is: a kind of light shield checkout equipment is provided, and this equipment can realize that the mask defect of high precision and very little live width detects, and goes for the light shield detection of multiple accuracy class.
For solving the problems of the technologies described above, the utility model adopts following technical scheme:
A kind of light shield checkout equipment includes:
The trestle table that constitutes by surface level and vertical plane, and extend upward a sway brace from described trestle table rear;
The move operation platform is arranged on the surface level of described trestle table;
Include the microscope mechanism of the optical lens of a plurality of different multiplying, this microscope mechanism is fixed on the top of described move operation platform by described sway brace.
The beneficial effects of the utility model are:
Embodiment of the present utility model is by being provided with the move operation platform of placing detected light shield, and adopt the optical lens combine detection of multiple different multiplying, thereby the mask defect of having realized high precision and very little live width detects, and goes for the light shield detection of multiple accuracy class.
Below in conjunction with accompanying drawing the utility model is described in further detail.
Description of drawings
Fig. 1 is the front view of the embodiment of light shield checkout equipment that provides of the utility model.
Fig. 2 is the side view of the embodiment of light shield checkout equipment that provides of the utility model.
Fig. 3 is the vertical view of the embodiment of light shield checkout equipment that provides of the utility model.
Embodiment
Describe an embodiment of the light shield checkout equipment that the utility model provides in detail below with reference to Fig. 1-Fig. 3.As shown in the figure, present embodiment mainly includes:
The trestle table that constitutes by surface level 11 and vertical plane 12, and extend upward a sway brace 2 from described trestle table rear;
The move operation platform is arranged on the surface level 11 of trestle table, during specific implementation, it can by operator's console 300, vertically move portion and laterally moving part be overlapped into up and down;
Include the microscope mechanism 4 of the optical lens of a plurality of different multiplying, this microscope mechanism 4 is fixed on the top of move operation platform 3 by sway brace 2.
During specific implementation, described portion and the described horizontal moving part of vertically moving can include respectively and vertically move platform 311 and horizontal mobile platform 321, and vertically move platform 311 and laterally be respectively arranged with longitudinal movement rail 312 and horizontal moving guide rail 322 on the mobile platform 321, longitudinal movement rail 312 and laterally then being provided with on the moving guide rail 322 is mated respectively vertically moves slide block 313 and horizontal moving slider 323, and vertically move slide block 313 and be connected to vertical drive motor 314 and horizontal drive motor 324 by screw mandrel respectively, and link to each other with operator's console 300 respectively with horizontal moving slider 323.
During specific implementation, laterally mobile platform 321 is set directly on the surface level 11, vertically move slide block 313 and be set directly at operator's console 300 belows, and laterally moving slider 323 links to each other with operator's console 300 by web joint 301, laterally mobile platform 321 is set directly on the surface level 11, vertically moves 311 on platform and is arranged on the web joint 301.
In addition, present embodiment also includes the control device (not shown) that links to each other with drive motor 314,324, and this control device includes and is used to the touch-screen control part controlling the rocking bar of described move operation platform shift length and speed and be used to be provided with displacement parameter.
During present embodiment work, with detected light shield as on the operator's console 300, behind touch-screen control part input moving parameter, the vertical or horizontal rocking bar that shakes, when rocking bar horizontal when mobile, then horizontal drive motor 324 work, thus drive horizontal moving slider 323 along laterally moving guide rail 322 slips by screw mandrel, make operator's console 300 laterally move in the drive lower edge of slide block 323;
When rocking bar vertically moved, then vertical drive motor 314 work vertically moved slide block 313 guide rail 312 that is along the longitudinal movement and slides thereby drives by screw mandrel, makes operator's console 300 be along the longitudinal movement under the drive of slide block 313.
During specific implementation, described vertically move portion and laterally moving part can also adopt vertically move last, laterally move under iterative structure, in this case, laterally moving slider 323 is set directly at operator's console 300 belows, links to each other with operator's console 300 by web joint 301 and vertically move slide block 313.
In addition, in order to make present embodiment can keep better stable, to reach better detection effect consideration in operating process, the rear side of described support and downside also are respectively arranged with the quakeproof bracket 13 and the shockproof leg 14 of the shape of the mouth as one speaks, and the area of section of quakeproof bracket 13 should be greater than the area of section sum of described trestle table and sway brace.
During specific implementation, present embodiment also can be provided with light source 5, and this light source 5 can be arranged on the position of the below corresponding microscope mechanism projection of operator's console 300, and therefore, operator's console 300 preferably adopts light penetrating object, as glass plate etc.
In addition, also be provided with a display 6 above described sway brace, when light source 5 was luminous, optical lens 41 was imaged onto the light mask image under the camera lens in display 6 or the microscope mechanism 4, thereby whether detect light mask image correct.
During specific implementation, described microscope mechanism includes the optical lens of 5 different multiplying, adopt one group of 5 camera lens that multiplying power does not wait, thereby present embodiment is detected applicable to the light shield of multiple light shield precision or live width grade, and the optical lens multiplying power of using is high more, and the live width that then can detect light shield is tiny more.
The above is a preferred implementation of the present utility model; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the utility model principle; can also make some improvements and modifications, these improvements and modifications also are considered as protection domain of the present utility model.
Claims (10)
1, a kind of light shield checkout equipment is characterized in that, this equipment includes:
The trestle table that constitutes by surface level and vertical plane, and extend upward a sway brace from described trestle table rear;
The move operation platform is arranged on the surface level of described trestle table;
Include the microscope mechanism of the optical lens of a plurality of different multiplying, this microscope mechanism is fixed on the top of described move operation platform by described sway brace.
2, light shield checkout equipment as claimed in claim 1, it is characterized in that, the rear side of described trestle table and downside are respectively arranged with the quakeproof bracket and the shockproof leg of the shape of the mouth as one speaks, and the area of section of this quakeproof bracket is greater than the area of section sum of described trestle table and sway brace.
3, light shield checkout equipment as claimed in claim 1 or 2 is characterized in that, the portion that vertically moves and horizontal moving part that described move operation platform includes operator's console and is arranged on described operator's console below.
4, light shield checkout equipment as claimed in claim 3, it is characterized in that, the described portion that vertically moves includes respectively with horizontal moving part and vertically moves platform and horizontal mobile platform, and described vertically moving is respectively arranged with longitudinal movement rail and horizontal moving guide rail on platform and the horizontal mobile platform, described longitudinal movement rail and laterally then being provided with on the moving guide rail is mated respectively vertically moves slide block and horizontal moving slider, and the described slide block that vertically moves is connected to vertical drive motor and horizontal drive motor by screw mandrel respectively with horizontal moving slider, and links to each other with described operator's console respectively.
5, light shield checkout equipment as claimed in claim 4, it is characterized in that, this equipment also includes the control device that links to each other with horizontal drive motor with described vertical drive motor, and this control device includes and is used to the touch-screen control part controlling the rocking bar of described move operation platform shift length and speed and be used to be provided with displacement parameter.
6, light shield checkout equipment as claimed in claim 1 is characterized in that, described operator's console is a light penetrating object, and the position of corresponding microscope mechanism projection below described operator's console is provided with a light source.
7, light shield checkout equipment as claimed in claim 6 is characterized in that, also is provided with a display above described sway brace.
8, light shield checkout equipment as claimed in claim 1 is characterized in that, described microscope mechanism includes the optical lens of 5 different multiplying.
9, light shield checkout equipment as claimed in claim 4 is characterized in that, the described slide block that vertically moves is set directly at the operator's console below, and described horizontal moving slider then links to each other with operator's console by a plate.
10, light shield checkout equipment as claimed in claim 4 is characterized in that, described horizontal moving slider is set directly at the operator's console below, and the described slide block that vertically moves then links to each other with operator's console by a plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2009201295230U CN201359599Y (en) | 2009-01-16 | 2009-01-16 | Photo-mask detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2009201295230U CN201359599Y (en) | 2009-01-16 | 2009-01-16 | Photo-mask detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201359599Y true CN201359599Y (en) | 2009-12-09 |
Family
ID=41425364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2009201295230U Expired - Fee Related CN201359599Y (en) | 2009-01-16 | 2009-01-16 | Photo-mask detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201359599Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102155921A (en) * | 2011-01-05 | 2011-08-17 | 苏州天魁电子科技有限公司 | Optical detection device |
| CN107860778A (en) * | 2017-11-20 | 2018-03-30 | 深圳市资福技术有限公司 | A kind of dirty detection means of capsule endoscope and detection method |
| CN113176267A (en) * | 2021-05-06 | 2021-07-27 | 艾斯尔光电(南通)有限公司 | Photomask highlight detection process |
-
2009
- 2009-01-16 CN CNU2009201295230U patent/CN201359599Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102155921A (en) * | 2011-01-05 | 2011-08-17 | 苏州天魁电子科技有限公司 | Optical detection device |
| CN107860778A (en) * | 2017-11-20 | 2018-03-30 | 深圳市资福技术有限公司 | A kind of dirty detection means of capsule endoscope and detection method |
| CN107860778B (en) * | 2017-11-20 | 2022-12-13 | 深圳市资福医疗技术有限公司 | Capsule endoscope dirt detection device and detection method |
| CN113176267A (en) * | 2021-05-06 | 2021-07-27 | 艾斯尔光电(南通)有限公司 | Photomask highlight detection process |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104516132B (en) | A kind of measurement jig | |
| TWI447381B (en) | Glass substrate inspection device and glass substrate inspection method | |
| TWI333544B (en) | Substrate inspection apparatus | |
| CN101718714B (en) | System and method for detecting surface defects of flat glass | |
| KR20100023258A (en) | Method and apparatus for inspecting of flat display panel | |
| CN201359599Y (en) | Photo-mask detection device | |
| CN108375582A (en) | Automated optical detection equipment | |
| CN207096622U (en) | A kind of detection means based on LCDs | |
| CN204241387U (en) | Image detects imaging device and image detecting apparatus | |
| CN107796336B (en) | Automatic optical detector | |
| TWI247899B (en) | Apparatus for inspecting substrate | |
| CN206058718U (en) | Optical element coaxial adjustment experimental provision | |
| CN207232037U (en) | A kind of two-sided visual inspection platform | |
| CN209673664U (en) | A kind of full-automatic level detection device of AOI for large scale display panel | |
| CN211426223U (en) | Multi-axial fabric stiffness detection device | |
| CN209263940U (en) | A kind of LCD sheet glass flatness detecting device | |
| TW201032934A (en) | Substrate processing equipment | |
| CN207096625U (en) | For adjusting the visualization device and lighting jig of probe | |
| KR102308226B1 (en) | Substrate surface defect review apparatus | |
| TWI226098B (en) | Multi-purpose stage in substrate inspection apparatus | |
| KR101607089B1 (en) | Cell Mounting Device of Liquid Crystal Display Panel Examination Apparatus | |
| TW201821818A (en) | Checking device of printed circuit board | |
| CN109342441A (en) | A kind of full-automatic level detection device of AOI for large scale display panel | |
| CN216594825U (en) | Up-down illumination integrated online AOI (automated optical inspection) detection equipment | |
| TW501219B (en) | Holder mechanism |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SHENZHEN NEWWAY PHOTOMASK MAKING CO., LTD. Free format text: FORMER OWNER: SHENZHEN NEWWAY ELECTRONIC CO., LTD. Effective date: 20130423 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 518000 SHENZHEN, GUANGDONG PROVINCE TO: 518057 SHENZHEN, GUANGDONG PROVINCE |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130423 Address after: 518057 Guangdong, Nanshan District, China, No., Long Hill Road, innovation park, No. D, first floor, block Patentee after: SHENZHEN NEWWAY PHOTOMASK MAKING CO., LTD. Address before: 518000 Guangdong province Shenzhen city Nanshan District high tech Zone North Keyuan Avenue Xihua Han Innovation Park D Building 1 floor Patentee before: Shenzhen Newway Electronic Co., Ltd. |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Photo-mask detection device Effective date of registration: 20140716 Granted publication date: 20091209 Pledgee: Shenzhen high tech investment and financing Company limited by guarantee Pledgor: SHENZHEN NEWWAY PHOTOMASK MAKING CO., LTD. Registration number: 2014990000580 |
|
| PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20150817 Granted publication date: 20091209 Pledgee: Shenzhen high tech investment and financing Company limited by guarantee Pledgor: SHENZHEN NEWWAY PHOTOMASK MAKING CO., LTD. Registration number: 2014990000580 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Photo-mask detection device Effective date of registration: 20150821 Granted publication date: 20091209 Pledgee: Shenzhen high tech investment and financing Company limited by guarantee Pledgor: SHENZHEN NEWWAY PHOTOMASK MAKING CO., LTD. Registration number: 2015990000707 |
|
| PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091209 Termination date: 20180116 |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20210311 Granted publication date: 20091209 Pledgee: Shenzhen high tech investment and financing Company limited by guarantee Pledgor: SHENZHEN NEWWAY PHOTOMASK MAKING Co.,Ltd. Registration number: 2015990000707 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right |