JP2002368058A - Carrier for display substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent a display substrate from slipping down from a carrier arm in the way of carrying. SOLUTION: The carrier carries a display substrate in the first direction. The carrier comprises at least a pair of carrying arms spaced apart in the second direction intersecting the first direction. These carrying arms comprise resilient bodies for clamping the opposite end edge parts of the display substrate together and are moved synchronously in the first and second directions by means of a drive mechanism.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an apparatus for transporting a display substrate such as a liquid crystal display panel.

[0002]

2. Description of the Related Art In an apparatus for testing or inspecting a display substrate, an uninspected display substrate received by a load stage is transported to a measurement stage, that is, an inspection stage, and an inspected substrate that has been inspected at the inspection stage is inspected. Some use a transfer device that returns the display substrate to the load stage or transfers the display substrate to an unload stage disposed on the opposite side of the inspection stage from the load stage.

[0003] As this type of transfer device, there are a transfer device in which a display substrate is transferred on a transfer arm, a transfer device in which a display substrate is vacuum-adsorbed to a transfer arm, and an opposite end of a display substrate. There has been proposed one that transports the rim with its edges received in the U-shaped portions of a pair of transport arms.

[0004]

However, in a conventional apparatus for transporting a display substrate on a transport arm, the display substrate cannot be prevented from slipping off the transport arm due to vibration or the like during the transportation.

In a conventional apparatus for transporting a display substrate in a state of being vacuum-sucked to a transfer arm, it is difficult to check whether the display substrate is vacuum-sucked to the transfer arm, and therefore, it is difficult to confirm whether the display substrate is vacuum-sucked. Due to the substrate not being attracted to the transfer arm, the display substrate may slide down from the transfer arm due to vibration or the like during the transfer.

[0006] In a conventional apparatus for transporting the display substrate while opposing edges of the display substrate are received in the U-shaped portions of the pair of transport arms, the U-shaped portion has rigidity, and the display substrate has a rigid shape. Since the opposing edges are merely received in the U-shaped portions, the display substrate may slide down from the transfer arm during the transfer.

An object of the present invention is to prevent a display substrate from slipping off a transfer arm during transfer.

[0008]

A transfer device according to the present invention relates to a device for transferring a display substrate in a first direction.
At least a pair of transfer arms spaced in a second direction intersecting the direction of the display arm, each of which has an elastic body at a portion that jointly sandwiches opposing edge portions of the display substrate; A drive unit for moving the transfer arm in the first direction in synchronization with the transfer arm and relatively moving the transfer arm in a direction toward and away from each other.

[0009] The transfer arm is moved in the direction in which the display substrate is sandwiched between the two elastic bodies, and in that state, the display substrate is transferred in the first direction. The transfer arm is
Further, the display substrate that is being held is released by being moved in a direction away from each other.

When the display substrate is transferred, the elastic members of the two transfer arms are elastically deformed by jointly holding the opposite edges of the display substrate, and the display substrate slides on the elastic member. Prevent that. Therefore, it is possible to prevent the display substrate from slipping off from the transfer arm during the transfer thereof, even though the display substrate is jointly held by the two transfer arms.

The driving device includes a pair of arm holders that individually support the transfer arms, and a first drive mechanism that displaces the two arm holders to move the transfer arms in the first direction in synchronization with each other. And a second drive mechanism that relatively displaces both arm holders to move the transfer arm in the second direction in synchronization. In this case, the two transfer arms are moved in the second direction by the arm holder being displaced by the first drive mechanism, to clamp the display substrate and release the same, and the arm holder is moved to the first position. The display substrate is moved in the first direction by being displaced by the drive mechanism, and transports the display substrate in the first direction. Therefore, the display substrate can be reliably held and released and transported.

[0012] The transfer device may further include a pair of second transfer arms individually supported by the arm holder at an interval from the transfer arm in the first direction, each of the pair of second transfer arms opposing a display substrate. It is possible to include a second transfer arm provided with an elastic body at a portion where the edges are jointly held. In this case, the display substrate is sandwiched by at least two pairs of the transfer arms, so that the display substrate is reliably held by the transfer arms.

One of the pair of transfer arms may be mounted on the arm holder via an urging mechanism for urging the transfer arm toward the other transfer arm.
In this case, not only the reaction force of the elastic deformation of the elastic body but also the urging force of the urging mechanism acts on the display substrate as a force for clamping the display substrate. Can be pinched.

Each of the transfer arms has an elastic body for holding the display substrate at each of a plurality of locations spaced in the second direction, and one of the pair of transfer arms is the first transfer arm.
And the other of the pair of transfer arms is connected to the biasing mechanism so as to be angularly rotatable about an axis extending in a third direction intersecting the second direction, and the other of the pair of transfer arms extends in the third direction. Can be connected to the arm holder so as to be angularly rotatable around the arm holder. By doing so, the second
Even if the position of the elastic body of each transfer arm in the direction of is not aligned with the edge of the display substrate, further movement of the transfer arm after one of the elastic bodies abuts the display substrate The transfer arm is rotated at an angle, so that the two elastic bodies reliably contact the display substrate, and as a result, the display substrate is more reliably held by the transfer arm.

Each elastic body may have a recess for receiving the edge of the display substrate on the opposite end face. By doing so, by receiving the edge of the display substrate in the recess, the display substrate is securely held by the transfer arm, and the display substrate is less likely to slide off the transfer arm during the transfer. It is surely prevented.

The urging mechanism includes a first base assembled to the arm holder, and a second base attached to the first base.
A second base movably disposed in the direction of
And a second elastic body for urging the base of the second arm toward the other transfer arm.

The first drive mechanism includes a plurality of drive means individually corresponding to the transfer arm, each drive means including a drive source and an axis extending in the second direction by the drive source. A moving body screwed to the screw rod, a moving body assembled to the arm holder, and a guide for regulating the moving direction of the moving body in the second direction. Can be included.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS With reference to FIGS. 1 to 5, a transfer device 10 is provided in a display substrate inspection apparatus, in which an uninspected display substrate received by a load stage 14 is measured or inspected. At the same time as the
It is used as a transport device for transferring the inspected display substrate inspected on the inspection stage 16 to an unloading stage (not shown).

The display substrate 12 is a rectangular liquid crystal display panel in which liquid crystal is sealed, and the inspection device using the transfer device 10 is a lighting inspection device. The loading stage 14 and the unloading stage are arranged at equal distances on the opposite side from the inspection stage 16 in the X direction (lateral direction).

The load stage 14 receives a work table 20 formed by a cross-shaped arm, and
It is assembled to a Z drive mechanism 22 that moves in the Z direction orthogonal to the direction 2.

The loading stage 14 is a pre-alignment stage in which a centering device 24 for actually receiving the work table 20 and centering the substrate 12 is arranged on each arm. Each centering tool 24 supports a pair of rollers rotatably around an axis extending in the Z direction on a plate-like block arranged so as to be movable in the radial direction of a virtual circle. The centering tool 24 is moved in the radial direction in synchronization with a common or per-centering tool driving mechanism (not shown).

The inspection stage 16 is mounted on a three-dimensional drive mechanism 28 for moving a work table 26 for receiving the substrate 12 in three directions of X, Y and Z in a plane parallel to the substrate 12. In the example shown in the figure, the work table 26 is a known chuck top having a box shape opened upward and containing a backlight unit.

The work table 26 has a plurality of suction grooves 30 on its top surface for sucking the received substrate 12 in a vacuum, and has one or more positioning pins 32 on each of adjacent rectangular sides. A pusher 34 for pushing the display panel 12 toward the positioning pin 32 is provided on each of the other sides adjacent to the rectangle.

The positioning pins 32 are attached to the work table 26.
Protruding from the top surface. Each pusher 34 is a known mechanism that pushes the substrate 12 against the positioning pin 32 by rotating the oscillator at an angle about an axis extending in the Z direction by a reversible rotating mechanism supported by the work table 26. .

The unloading stage has the same structure as the loading stage 12. For this reason, the unloading stage is assembled to a Z drive mechanism that moves a work table formed by a cross-shaped arm in a Z direction orthogonal to a substrate that has received the work table.

However, both the loading stage and the unloading stage are two-dimensional in the X direction and the Y direction (front-back direction) in a plane parallel to the substrate 12 receiving the work table, instead of the Z drive mechanism. The stage may be a type including a three-dimensional drive mechanism for moving the target in the Z direction while moving the target.

The transfer device 10 includes a load stage 14,
Two pairs (pairs) of transfer arms 40 spaced in the X direction;
A pair of arm holders 42 corresponding to each of the two transfer arms 40 located on one side of the two-arm set (arm pair) and corresponding to the two transfer arms 40 located on the other side and supporting the corresponding two transfer arms 40; A pair of urging mechanisms 44 for urging one of the transfer arms 40 of the arm set corresponding to the pair toward the other transfer arm 40, and synchronously move the two arm holders 42 in the X direction. A second drive mechanism 46 and a pair of first drive mechanisms respectively corresponding to the arm holders 42 for moving the corresponding arm holders 42 in the Y direction.
And a driving mechanism 48.

Each transfer arm 40 has two protrusions 52 that protrude from both ends of the main body 50 in the X direction toward the transfer path of the substrate 12. At the tip of each protrusion 52,
An elastic body 54 is provided which acts as a holding portion for holding the substrate 12 in cooperation with the counterpart transfer arm 40 forming an arm group together with the corresponding transfer arm. Elastic body 5
Reference numeral 4 denotes a plate made of rubber such as silicone rubber, and is adhered to the distal end surface of the projection 52.

The arm holder 42 extends in parallel with the transfer path of the substrate 12 therebetween, and is assembled to a corresponding second drive mechanism 46.

Each of the urging mechanisms 44 includes a first base 56 attached to an end of the arm holder 42 and a pair of guide rails 58 extending in parallel in the Y direction at intervals in the X direction.
A second base 60 movably arranged in the Y-direction on the guide rail 58; and a plurality of elastic bodies for urging the second base 60 against the first base 56 toward the substrate 12 transport path. 62.

Each of the first and second bases 56 and 60 has a U-shape, and its U-shaped opening is directed toward the transfer path side of the substrate 12 and the arm holder 42 side. The guide rail 58 is provided on the first base 56. The elastic body 62 is a tension coil spring applied to the first and second bases 50 and 60 in the illustrated example, but may be another elastic body such as a compression coil spring.

One of the two transfer arms 40 of each arm set is pivotally connected to the second base 60 of the corresponding biasing mechanism 44 by a mounting pin 64 extending in the Z direction, and the other is of the same type. A pin 64 is pivotally connected to the end of the corresponding arm holder 42.

Each second drive mechanism 48 is supported by the base 66 mounted on the first drive mechanism 46 so as to be moved in the X direction, and rotatable about an axis extending in the Y direction. A screw rod 68, a driving source 70 supported on the base 66 so as to rotate the screw rod 68, and a moving body 72 screwed to the screw rod 68.

In the illustrated example, the screw rod 68 is a lead screw, the driving source 70 is a reversible motor, and the moving body 72 has a lead nut. Arm holder 4
2 is attached to the moving body 72 at the center in the longitudinal direction. The moving direction of the moving body 72 is regulated in the Y direction by a pair of guides 74 provided on the base 66.

The driving sources of the two second driving mechanisms 48 are synchronously rotated in the same direction by the same amount. When the screw rod 68 is rotated forward by the driving source 70, the moving body 72 is moved to the side of the substrate 12 on the transport path, and when the screw rod 68 is rotated backward by the driving source 70, the moving body 72 is moved from the transportation of the substrate 12. Moved away. As a result, the arm holders 42 are synchronously moved in the direction (Y direction) where they are separated from each other, and the transfer arms 40 of each arm set are synchronously moved in the direction that are separated from each other.

The first drive mechanism 46 includes a pair of moving bodies, that is, support arms 76, which are moved synchronously in the X direction by a drive source (not shown). When the support arm 76 is moved in the X direction, the transfer arm 40 is moved in the X direction via the second drive mechanism 48, the transfer arm 42, the urging mechanism 44, and the like.

The first driving mechanism 46 is not limited to a driving mechanism using a pair of support arms 76, but may be another suitable driving mechanism such as a driving mechanism having a pair of cylinder mechanisms that are extended and contracted in the same direction by the same amount in synchronization with each other. Any suitable driving mechanism may be used. In this case, when a drive mechanism including a cylinder mechanism is used, the arm holder 42 is moved in the X direction by the cylinder mechanism.

Next, the operation of the transfer device 10 will be described.

Prior to the transfer by the transfer device 10, the loading stage 14 is separated from the transfer arms 40 forming the arm set by the corresponding second drive mechanism 48, and each centering tool 24 is moved to its own position. Substrate 1 on plate-shaped block
In the state of being moved outward so as to receive the substrate 2, the substrate 12 is received, and then each centering tool 24 is moved toward the center in the radial direction. Thereby, centering (pre-alignment) of the substrate 12 is performed.

The inspected substrate on the unloading stage is moved to an appropriate place such as a cassette. The substrate 12 on the inspection stage 16 is attracted to the work table 26. The transfer of the substrate 12 to the loading stage and the unloading stage can be performed by a robot or manually.

When the transfer device 10 receives the substrate 12 on the load stage 14 and the substrate 12 on the inspection stage 16, first, the transfer arm 40 of each arm set is separated from the other arm and the other arm. Each of the sets has a loading stage 14 and an inspection stage 16 in the X direction.
Are moved by the first drive mechanism 46 in the X direction.

Next, as shown in FIG. 3, each of the loading stage 14, the inspection stage 16 and the unloading stage has a substrate receiving height of the transfer device 10 such that the height of the receiving position of the substrate is equal to the substrate transfer height. In a state where the adjustment is performed by the driving mechanism and the suction of the substrate 12 on the inspection stage 16 is released, the transfer arms 40 of the two arm sets are moved in the directions approaching each other by the second driving mechanism 48.

At this time, each transfer arm 40 on the side of the load stage moves on the work table 20, and a part of the projection 52 and the elastic body 54 of each transfer arm 40 on the side of the inspection stage are removed. It is received in a recess 78 formed in the worktable 26.

When the two transfer arms 40 of each set are advanced in the opposite directions to hold the substrate 12, the elastic members 54 are brought into contact with the opposite edges of the substrate 12 as shown in FIG. The transport arm 40 is elastically deformed by further advance. As a result, the uninspected substrate 12 on the loading stage 14 is held by one set of transfer arms 40, and the inspected substrate 12 on the inspection stage 16 is held by the other set of transfer arms 40.

In each set of the transfer arms 40, the position of each elastic body 54 in the Y direction is uneven with respect to the edge of the substrate 12 so that one elastic body 54 comes into contact with the substrate 12 first. However, with the advance of the transfer arm 40, the two elastic members 5 rotate angularly around the assembly pins 64.
4 contacts the substrate 12. Accordingly, the substrate 12 is reliably clamped by the two transfer arms 40 of each pair, in combination with the pair of elastic members 54 having the opposing edge portions spaced in the X direction.

After the elastic body 54 comes into contact with the substrate 12, the one transfer arm 40 of each set is displaced against the force of the elastic body 62 of the urging mechanism 44. As a result, not only the reaction force of the elastic deformation of the elastic body 54 but also the urging force of the urging mechanism 44 acts on the substrate 12 as a force for clamping the substrate 12. It is reliably clamped at the appropriate pressure.

When each substrate 12 is held by the transfer arm 40, the work table of each stage is lowered. In this state, the substrate 12 held by one set of the transfer arms 40 is positioned above the inspection stage. , The other set of transfer arms 4
0, the transfer arm 40, the arm holder 42, the urging mechanism 44, and the second drive mechanism 48 are arranged so that the substrate 12 held by the first drive mechanism 4 is located above the unloading stage.
6 is moved in the X direction.

Next, the height of the place for receiving the substrate on each stage is set to the substrate transfer height by the transfer device 10.
After the work stage of each stage is raised by the corresponding drive mechanism, the transfer arms 40 of the two arm sets are moved in the direction away from each other by the second drive mechanism 48. Thereby, the untested substrate 12 is received by the inspection stage, and the inspected substrate 12 is received by the unloading stage.

Next, the substrate 12 on the inspection stage 16 is
Is attracted to the work table 26 and the inspection stage 16
Is adjusted to a predetermined height, and the inspection of the substrate 12 on the inspection stage 16 is performed in that state.

During the inspection of the substrate, the transfer arm 40 may be kept at a predetermined position in the X direction, or may be moved in a direction opposite to the above for the delivery of the next substrate. Further, the operation of removing the inspected substrate from the unloading stage and the operation of arranging a new substrate on the loading stage may be performed during the inspection of the substrate.

While the substrate 12 is being nipped and transported, each set of elastic members 54 prevents the corresponding substrate 12 from slipping with respect to the transport arm 40. Therefore, despite the fact that the substrate 12 is jointly held by both sets of the transfer arms 40, the substrate 1
2 can be prevented from slipping off from the transfer arm 40 during the transfer.

When the transfer device 10 pinches and transfers the substrate 12 in a horizontal posture, the transfer arms 40 of each arm group pinch the substrate 12 horizontally as shown in FIG. Transport.

However, when the transfer device 10 holds and transfers the substrate 12 in an oblique posture, the transfer arms 4 of each arm set
In the case of No. 0, as shown in FIG. 6B, the substrate 12 is sandwiched diagonally up and down, and transported in that state. When the transfer device 10 pinches and transfers the substrate 12 in an upright position, the transfer arms 40 of each arm set move the substrate 1 as shown in FIG.
2 is held up and down and transported in that state.

As shown in FIG. 6, each elastic body 54 preferably has a recess 80 for receiving the edge of the substrate 12 on the opposite end face side. Although the recess 80 has an arc-shaped cross-section extending in the thickness direction of the elastic body 54 with a large radius of curvature in the illustrated example, the V-shape and the U-shape are provided as long as the edge of the substrate 12 abuts. It may have another cross-sectional shape such as a shape.

When the elastic body 54 having such a concave portion 80 is used, the substrate 12 is securely held by the transfer arm 40 by receiving the edge portion of the substrate 12 into the concave portion 80. During the transfer, the transfer arm 4
Sliding from zero is more reliably prevented.

In order to more reliably prevent the substrate 12 from dropping from the transfer arm 40, as shown in FIG. 7, one or more projections 82 are formed at the tip of each protrusion 52 of each transfer arm 40. Is also good. In this case, the elastic body 54 may or may not have the recess 80. 7A, 7B, and 7C show examples in which the substrate 12 is transported in a horizontal posture, an oblique posture, and an upright posture, respectively.

The present invention is applicable not only to a liquid crystal display panel in which liquid crystal is sealed, but also to a transfer apparatus used for inspecting other display substrates having a plurality of electrodes, such as EL display panels and glass substrates used for those display panels. Can be applied.

The present invention is not limited to the above embodiment, but can be variously modified without departing from the gist thereof.

[Brief description of the drawings]

FIG. 1 is a plan view showing an embodiment of a transport device according to the present invention.

FIG. 2 is a sectional view taken along line 2-2 in FIG.

FIG. 3 is a sectional view taken along line 3-3 in FIG.

FIG. 4 is a cross-sectional view similar to FIG. 3, showing a state where the display substrate is held by a transfer arm.

FIG. 5 is an enlarged plan view of each element of a transport device located on one side of a transport path of a display substrate.

FIG. 6 is a view showing another embodiment of the elastic body of the transfer arm, wherein (A), (B) and (C) respectively hold the display substrate in a horizontal, oblique and upright position; It is a figure which shows the state which conveys.

FIGS. 7A, 7B, and 7C are views showing another embodiment of the projecting portion of the transfer arm, wherein (A), (B) and (C) respectively hold the display substrate in a horizontal, oblique and upright position; It is a figure which shows the state which conveys.

[Explanation of symbols]

 Reference Signs List 10 transfer device 12 display substrate 14 load stage 16 inspection stage 40 transfer arm 42 arm holder 44 urging mechanism 46 first drive mechanism 48 second drive mechanism 52 transfer arm projection 54 transfer arm elastic body 56 , 60 Base of the urging mechanism 58 Guide of the urging mechanism 62 Elastic body of the urging mechanism 64 Assembling pin 66 Base of the second driving mechanism 68 Screw rod of the second driving mechanism 70 Driving source 72 of the second driving mechanism 72 Moving body of second drive mechanism 74 Guide of second drive mechanism 76 Arm of first drive mechanism 80 Recess of elastic body 82 Projection of protrusion

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) // G02F 1/13 101 G02F 1/13 101 (72) Inventor Shinji Fujiwara Shinji 2, Kichijoji Honcho, Musashino City, Tokyo No. 6-8 Inside Japan Micronics Co., Ltd. (72) Inventor Isao Ueki 2-6-8 Kichijoji Honcho, Musashino City, Tokyo F-term in Japan Micronics Co., Ltd. (Reference) 2H088 FA17 FA30 HA01 MA16 3C007 AS24 DS06 ES03 ET08 EU01 EU18 EV10 EV14 EV18 EV21 EV22 EV24 HT20 NS13 5F031 CA05 FA15 GA10 GA13 GA14 GA15 GA47 GA48 HA24 HA26 KA11 MA33 5G435 AA17 BB05 BB12 EE33 KK05 KK10

Claims (6)

[Claims] 1. An apparatus for transporting a display substrate in a first direction, comprising at least a pair of transport arms spaced apart in a second direction intersecting said first direction, each of said arms being a display arm. A transfer arm provided with an elastic body at a portion which jointly sandwiches opposing edge portions of the substrate, and a transfer arm which is synchronously moved in the first direction and is relatively moved in a direction in which the transfer arm is separated from each other. And a driving device for moving the display substrate. 2. A driving device comprising: a pair of arm holders for individually supporting the transfer arms; and a first drive for displacing the two arm holders so as to move the transfer arms in the first direction in synchronization with each other. 2. A mechanism including a mechanism and a second drive mechanism that relatively displaces both arm holders to move the transport arm in the second direction in synchronization.
3. The transfer device according to claim 1. 3. A pair of second transfer arms individually supported by the arm holder at a distance from the transfer arm in the first direction, each of the pair of second transfer arms opposing edges of a display substrate. The transfer device according to claim 2, further comprising a second transfer arm including an elastic body at a portion where the portions are jointly held. 4. The transfer arm according to claim 1, wherein one of the pair of transfer arms is mounted on the arm holder via an urging mechanism for urging the transfer arm toward the other transfer arm.
4. The transfer device according to 2 or 3. 5. Each of the transfer arms has an elastic body for sandwiching a display substrate at each of a plurality of locations spaced in the second direction, and one of the pair of transfer arms is the first transfer arm. And the other of the pair of transfer arms is connected to the urging mechanism so as to be angularly rotatable about an axis extending in a third direction intersecting the second direction, and the other of the pair of transfer arms extends in the third direction. 5. The transport device according to claim 4, wherein the transport device is connected to the arm holder so as to be angularly rotatable around the arm holder. 6. The display device according to claim 1, wherein each elastic body has a recess for receiving an edge of the display substrate on an opposite end face side.
The transfer device according to any one of the above.