JPH1018033A - Holding member of substrate, housing body of substrate, method for transporting substrate and treating device for substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To smoothly hold substrates even if the sizes thereof increase and to house the plural substrates into a cassette. SOLUTION: A holding member 10 composed by a pair of holding members 21, 22 and an energizing member is used and the edges of the glass substrate P are held by the holding parts at the energized front ends. The substrate is then perpendicularly hung down. The holding member 10 itself is detained to bars 46 put on horizontally within the cassette 40. The housing of the glass substrates P in juxtaposition perpendicularly in the cassette 40 is made possible.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a substrate holding member,
The present invention relates to a substrate storage body, a substrate transfer method, and a substrate processing apparatus.

[0002]

2. Description of the Related Art For example, an LCD (Liquid Cryst) is used as a substrate.
If a glass substrate for an Al Display (liquid crystal display device) is taken as an example, various processes such as etching and ashing have been conventionally performed on the glass substrate in order to manufacture a semiconductor device required for an LCD.

For example, regarding the etching process, for example, 25 glass substrates are stored in a slot of a storage body called a cassette in a horizontal state and vertically arranged, and the glass substrates to be processed are taken out one by one by a transport arm. This is carried into a processing vessel of an etching apparatus in a horizontal state, and is subjected to an etching process.

When transporting the glass substrate, it is of course necessary to hold the glass substrate so as not to fall, but it is necessary to minimize the contact area with the substrate in consideration of contamination and the like. Therefore, the conventional transfer arm is provided with a material having a high coefficient of friction, for example, a fluorine-based rubber or PEEK, at several places on the surface of the mounting portion main body made of stainless steel or aluminum.
About three to five supporting members made of (polyetheretherketone) are arranged, and the glass substrate is mounted on these supporting members.

[0005] Further, with respect to the cassette, an edge (usually two or three edges) of the glass substrate, which is less affected by the device, is placed on a protrusion formed horizontally on the peripheral edge in the slot. Then, the glass substrate was housed.

[0006]

However, today, LCDs
The size of the glass substrate is expanding, and accordingly, the size of the glass substrate is 550 mm × 650 mm or more. Then, the following problem arises in the conventional method of holding and transporting the substrate by supporting the back surface of the substrate with several supporting members while keeping the substrate horizontal.

First, since the weight of the substrate increases due to the enlargement of the size, the degree of bending of the substrate downward increases, so that it is necessary to increase the number of supporting portions as compared with the conventional case. However, doing so undesirably increases the contact area and contact area with the substrate. In addition, conventionally, the supporting member is supported at the peripheral portion as much as possible, but it is required to arrange the supporting member as uniformly as possible including the central portion by enlarging the substrate. Then, it is necessary to increase the size of the entire transfer arm, and it is necessary to increase the strength of the arm itself in terms of structure. Further, when transported in a horizontal state, extra space is required over the entire apparatus.

In the case of a cassette, when the glass substrate is housed by placing two or three edges of the glass substrate on the projection, the substrate cannot be supported as it is due to the enlargement and weight increase of the substrate. It is necessary to widen the edge to be placed to a portion that enters the center more. However, if you do so, you will end up placing the part near the center,
Not preferred.

The present invention has been made in view of such a point, and even if a substrate such as the above-mentioned glass substrate becomes large, the holding member can hold and hold the substrate at its edge and transport it as it is. The first object is to provide Further, a second object of the present invention is to provide a housing that can store substrates in a vertical state using the holding member, instead of the conventional cassette that stores substrates in a horizontal state. Further, a third object of the present invention is to provide a transport method for transporting a substrate in a vertically suspended state using the holding member. A fourth object of the present invention is to provide a processing apparatus for performing processing on a substrate using a transfer device that transfers the substrate while being vertically suspended using the holding member.

[0010]

According to a first aspect of the present invention, there is provided a method for holding a substrate by holding an edge of the substrate and suspending the substrate. A member, comprising a pair of holding members, a biasing member, a holding portion is formed on the distal end side of the holding member, a pressed portion is formed on the rear end side of the holding member, A rotating portion is formed at a position between the holding portion and the pressurized portion, and each holding member rotates around the rotating portion, so that the holding portions of the holding members can freely contact and separate. In addition, there is provided a substrate holding member, wherein the holding member of each holding member is normally contacted by the urging member in a normal state.

According to the holding member for the substrate, the holding portions are normally in contact with each other by the biasing member.
By pressing against the pressed portion against this bias, the holding portion is separated from the rotating portion as a center, for example, the edge of the above-mentioned glass substrate is positioned therebetween, and then the pressing is performed. When released, the glass substrate can be held by the holding portion by the urging by the urging member. Therefore, the glass substrate can be hung as it is. In addition, since only the edge of the substrate is sandwiched, the contact area with the substrate may be small. Further, a plurality of nozzles, for example, an ionizer for preventing charge or an air nozzle for removing dust on the surface may be provided in the direction in which the holding member holds the substrate. Further, a sensor or the like that can sense the contact pressure during holding may be provided so that the substrate does not drop. Then, based on the output from this sensor, when the contact pressure becomes a predetermined pressure or more,
It may be controlled to carry.

In view of such an effect, the material of the holding portion which is in direct contact with the substrate is preferably a material which can maintain adhesion to the substrate and has a high friction coefficient, for example, resin or rubber. Further, when the substrate itself is easily charged, it is preferable to further select a material having conductivity as the material of the holding portion, and to provide a configuration in which the holding portion is grounded via the holding member. For example, if a conductive resin or a conductive rubber studded with a conductive material is used for the resin or the like, such a grounding configuration can be easily realized.

As the urging member of the substrate holding member, the urging member urged by elasticity is the simplest and can reduce the cost. Of course, an air cylinder using air pressure or a biasing member using magnetic force may be used. If a spring member is used, a simpler configuration can be realized. Examples of the spring member include a coil spring and a leaf spring. Further, a substantially C-shaped spring member is used, the open end of the spring member is fixed to the distal end side of the rotating portion of the holding member, and the middle point of the arc portion is rotated. You may make it locate in a rear-end part side rather than a part. According to such a configuration, the opening end can be biased by contraction, and the structure is extremely simple.

In the substrate holding member having the above structure, an insertion portion through which a shaft-shaped transfer jig can be inserted is provided. A more preferable effect can be obtained by providing a lockable portion on the transfer jig.

That is, for example, if the glass substrate is sandwiched by a plurality of holding members, and the substrate is hung by the holding members, a shaft-shaped transfer jig is inserted into the insertion portion of each holding member. By lifting the holding member together with the transport jig, the substrate can be transported to an arbitrary position in a vertical state. In this case, if the holding member is provided with a locking portion that can be locked to the shaft-shaped transfer jig as in claim 5, the transfer can be performed in a more stable state.

According to a sixth aspect of the present invention, in order to achieve the second object,
According to the present invention, there is provided an accommodating body for accommodating a substrate held by the substrate holding member according to any one of claims 1, 2, 3, 4, and 5, wherein the accommodating body has a size capable of accommodating the substrate. A housing for a substrate is provided, in which locking members for locking the holding member are provided at predetermined intervals at an upper portion in the main body.

According to this housing, the substrates are housed in the housing in a suspended state, so that the substrates can be housed side by side in a vertical state. An appropriate bar (bar) provided horizontally is the simplest as the locking member.

In this case, as described in claim 7, if a spacer located between lower edges of the substrate is provided at a predetermined interval at a lower portion in the housing body, the suspended substrate can be provided. It is possible to prevent the vicinity of the lower ends from coming into contact with each other due to vibrating wind or the like. Therefore, it is preferable that the spacer has appropriate elasticity, such as a fluorine-based resin.

In order to achieve the third object, the present invention provides a method for manufacturing a semiconductor device comprising:
According to the method, the substrate held by the substrate holding member according to claim 4 is transferred, wherein the shaft-shaped transfer jig is inserted through the insertion portion of the holding member, and the substrate is suspended in that state. And transporting the suspended substrate together with the holding member.

According to a ninth aspect of the present invention, there is provided a method for transporting a substrate held by a substrate holding member according to the fifth aspect, wherein the locking portion of the holding member is locked to a shaft-shaped transfer jig. The substrate is suspended in this state, and the suspended substrate is transported together with the holding member.

According to the transfer method of the eighth and ninth aspects,
The substrate can be transported in a vertical state. Therefore, the transport space can be narrowed, and even if the substrate becomes large, it can be transported safely, and the contact portion with the substrate may be small.

According to a tenth aspect of the present invention, in order to achieve the fourth object, a transfer device and a processing container are provided, and an unprocessed substrate is taken out of the storage body storing the substrate, and the unprocessed substrate is removed by the transfer device. An apparatus configured to transport a processing substrate to a predetermined position and to perform predetermined processing on the unprocessed substrate in a processing container, wherein the transport device is configured to be inserted into the substrate holding member according to claim 4. A shaft-shaped transfer jig through which the portion can be inserted, and the substrate held by the holding member is transported to the predetermined position by the transfer jig together with the holding member. , A processing device is provided.

According to the eleventh aspect, the apparatus includes a transfer device and a processing container, takes out the unprocessed substrate from the storage body storing the substrate, and transfers the unprocessed substrate to a predetermined position by the transfer device. 6. An apparatus configured to perform a predetermined process on the unprocessed substrate within the apparatus, wherein the transport device is a shaft-shaped transport in which a locking portion of a substrate holding member according to claim 5 is locked. A processing apparatus is provided, comprising a jig, and configured to transfer the substrate held by the holding member to the predetermined position by the transfer jig together with the holding member.

According to the processing apparatus of the tenth and eleventh aspects, the substrate in the housing suspended vertically by the holding member can be transported to the predetermined position by the transport jig in the vertical state as it is with the holding member. it can.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows the appearance of a holding member 10 according to the present embodiment, and FIG.
The holding member 10 includes a pair of holding members 21 and 22 and an urging member 30.

The holding members 21 and 22 have substantially the same shape and size, and the holding members 21 are formed of appropriately bent plate materials near the front end and the rear end, respectively.
The portion closer to the front end from the bent portion on the front end side is the holding portion 21a, and the portion closer to the rear end from the bent portion on the rear end side is the pressed portion 21b.
Is composed. Similarly, the holding member 22 has a holding portion 22a on the front end side and a pressed portion 22b on the rear end side. A rotating portion 23 is formed inside the holding members 21 and 22 from the intermediate point to the front end. For example, the rotating portion 23 is formed with rotating members 21 c and 22 c inside the holding members 21 and 22,
c and 22c are rotatably connected by a pin 24. Therefore, the holding members 21 and 22 are rotatable about the turning portion 23 as a turning fulcrum.

The holding members 21 and 22 can be made of a material such as ceramics, fluorine-based resin, or quartz that generates less dust. However, the inner surfaces of the holding portions 21a and 22a, A fluorine-based rubber material having a particularly high coefficient of friction may be used for a portion that directly contacts the substrate. Alternatively, the entire holding members 21 and 22 may be made of an aluminum material, and the inner surfaces of the holding portions 21a and 22a may be made of a fluorine-based resin or a fluorine-based rubber material.

The urging members 30 abut against the pressurized portions 21b and 22b of the holding members 21 and 22 to urge them outward, and the urging members 30a and 30b to apply the urging force. , For example, a main body 30c in which a spring member (not shown) is housed.
The elastic members allow the protrusions 30a and 30b to be pressed in the normal state as shown by arrows in FIG.
b, 22b are urged outward. Also, this urging member 3
0, the pressurized portion 21 is pressed as shown in FIG.
When the pressure is applied to b and 22b, the holding portions 21a and 22a are separated from each other with the rotating portion 23 as a fulcrum. In addition, an appropriate concave portion 30 d forming a locking portion
Are formed.

According to the holding member 10 having the above-described structure, by pressing the pressed portions 21b and 22b, the holding portion 2 is pressed.
If the substrates 1a and 22a are separated from each other, the edge of the substrate is sandwiched therebetween, and then the pressure is released, the substrate can be sandwiched by the urging of the urging member 30 and the substrate can be hung. . As described above, according to the holding member 10 according to the present embodiment, the glass substrate P can be suspended vertically by sandwiching the edge of the glass substrate P with the holding member 10 at, for example, several places. Therefore, even if the size of the glass substrate P becomes large, it can be suitably held. In addition, since only the edge is sandwiched, the center of the substrate and the area where the pattern is formed are not affected at all.

FIG. 4 shows the external appearance of a cassette 40 which is a storage body for storing the LCD glass substrate together with the holding member 10 while holding the two edges of the LCD glass substrate by the holding member 10. ing.

The cassette 40 has a glass substrate P
It is in the form of a plate hexahedron with an open front only for taking in and out. That is, the outer shape of the cassette 40 is
It comprises a bottom plate 42 and three side plates 43, 44, 45. And inside the cassette 40,
A plurality of bars 46 serving as locking members for locking the holding member 10 are arranged in parallel at appropriate intervals. The installation interval of the bar 46 is set so as to substantially correspond to the outer width of the holding member 10 where the rotating portion 23 is located. Accordingly, as shown in FIGS. 4 and 5, the holding member 10 is locked between the two bars 46, 46 at an outer portion of the rotating portion 23.
In the present embodiment, the bar 46 has a circular cross section, but is not limited to this, and may have an appropriate shape such as a triangle. In particular, if a section having a triangular or trapezoidal shape is used, when the holding member 10 is locked, the holding member 10 can be stably locked without swinging.

The bar 46 is supported by, for example, a support column 48 erected on a support base 47 grounded on the bottom plate 42. Of course, the present invention is not limited to this, and it may be configured to be suspended by an appropriate suspending member 49 suspended from the top plate 41, or the support column 48 and the suspending member 49 may be used in combination.

The support base 47 includes a ridge 47a and a groove 4a.
7b are formed alternately, and the ridge 47a
Constitute a spacer. That is, as shown in FIG. 5, each lower end of the glass substrate P sandwiched by each holding member 10 locked by the bar 46 is located in each groove 47b, and the lower end of the adjacent glass substrate P is located. The ridge 47a is located between the edges. The spacer is not limited to such a ridge configuration, and several appropriate protrusions and projections may be provided along the longitudinal direction of the lower edge of the glass substrate P.

According to the cassette 40 having the above-described structure, as shown in FIG. 5, the glass substrate P is held in a state where several upper end edges of the glass substrate P are sandwiched by the holding members 10 and suspended. A plurality of sheets can be stored vertically.
Therefore, even if the size of the glass substrate P becomes large, it can be stored safely and without difficulty.

Further, in order to take out the glass substrate P stored in the cassette 40 in this manner, transport the taken glass substrate P, or store the processed glass substrate P in the cassette 40 again. For example, the transfer device 50 shown in FIG.

The transfer device 50 includes a support portion 52 having a shaft-shaped transfer jig 51, an elevating portion 53 for elevating and lowering the support portion 52, and an elevating portion 53. On the front side, the movable base 54 is movable in the X and Y directions. Transport jig 51
Are formed on the upper surface of the substrate. Further, the elevating unit 53 supported on the movable base 54 may be configured to be freely rotatable by θ.

A process of taking out the unprocessed glass substrate P housed in the cassette 40, for example, by using the transport device 50 having such a configuration will be described.
First, the moving base 54 moves to the front of the cassette 40, and stops at the front of the glass substrate P to be transported, as shown in FIG. Next, the moving base 54 moves forward, and the transfer jig 51 is surrounded by the holding members 21 and 22 and the urging member 30 in the holding member 10 holding the glass substrate P, as shown in FIG. Each of the urging members 30, 30 of the holding members 10, 10 enters the substantially triangular space at a predetermined position.
The transfer jig 51 is provided in the recesses 30d, 30d formed in
Stop at a position corresponding to the concave portions 51a and 51b.

In this state, the elevating unit 53 moves up,
The conveying jig 51 moves the holding members 10 and 10 into the concave portions 51a and 51.
Then, the glass substrate P is lifted together with the holding mechanisms 10 and 10 locked on the bar 46 as shown in FIG. Thereafter, when the movable base 54 is retracted, as shown in FIG. 9, the glass substrate P is taken out of the cassette 40 together with the holding mechanisms 10 and 10 holding the glass substrate P.

As described above, by using the transfer device 50,
The glass substrate P can be taken out of the cassette 40 or transported while being kept vertical, and even if the size of the glass substrate P becomes large, it can be taken out easily and safely.
It can be transported. Moreover, since the transfer can be performed in a vertical state, the transfer space can be narrower than in the conventional case, and the space can be used effectively. In addition, since the transport jig 51 itself can have a very simple structure, the overall configuration of the transport device 50 can be made compact or simplified.

The holding member 10, the cassette 40, and the transfer device 50 are, for example, the etching device 6 shown in FIG.
0 can be used. The etching apparatus 60 includes an etching chamber 61 configured to perform a predetermined etching process on a glass substrate P in a processing container, and a load chamber adjacent to the etching chamber 61 via a gate valve 62. And a lock chamber 63.
3 is provided with a float chuck device 64 disposed before the loading / unloading port 3 and the transfer device 50. The cassette 40 is mounted on the loader / unloader.

The float chuck device 64 is shown in FIG.
As shown in JP-A-63-267178 and JP-A-63-67178, it is possible to hold the glass substrate P in a non-contact manner.
No. 267186) A float chuck 64a, an arm 64b that supports the entire float chuck 64a and is rotatable, and rotates the arm 64b by θ in the horizontal direction on the stage 64c, moves the arm 64b up and down as appropriate, and performs predetermined conveyance. And a supporting portion 64c that moves on the road.

According to the etching apparatus 60 having the above-described structure, the unprocessed glass substrate P taken out of the cassette 40 in accordance with the processes shown in FIGS. When 10 is conveyed, it stops at the predetermined position D first.

Next, the float chuck 64a of the float chuck device 64 approaches the glass substrate P vertically suspended together with the holding member 10 by the transfer jig 51 of the transfer device 50, and as shown in FIG. The substrate P is held in a non-contact manner. In this state, the float chuck 64a
Is raised 90 degrees, and the glass substrate P is held horizontally as shown in FIG. At this time, if the transport jig 51 itself is rotated at the same time, the lifting can be performed smoothly. Thereafter, as shown in FIG. 14, the pressurized portions 21b and 22b of the holding members 21 and 22 of the holding member 10 holding the glass substrate P are pressed by an appropriate pressing device (not shown). To release the pinching state. The holding state of the holding member 10 is released once the float chuck 64a holds the glass substrate P, as shown in FIG.
It may be performed in the state of.

Thereafter, if the float chuck 64a holding the glass substrate P in a horizontal state transfers the unprocessed glass substrate P onto a predetermined mounting table in the load lock chamber 63 as it is, the load lock chamber A conventional transfer arm (not shown) provided in 63 transfers the glass substrate P into the etching chamber 61, where a predetermined etching process is performed on the glass substrate P. In order to store the glass substrate P after the etching process again in the cassette 40, the glass substrate P may be stored in the cassette 40 by the float chuck device 64 and the transfer device 50 in a procedure reverse to the above-described process.

As described above, in the etching apparatus 60,
The glass substrate P vertically accommodated in the cassette 40 can be taken out and transported in the vertical state, and the place where the entire apparatus is installed can be used effectively. In addition, even if the size of the glass substrate P becomes large, the glass substrate P can be moved to a predetermined position while holding only its edge.

In the holding member 10 according to the above embodiment, the holding portions 21a of the holding members 21 and 22 are used.
22a directly sandwiches the edge of the substrate, but instead of this, as shown in FIG.
a and 22a, each of which is capable of swinging,
2e may be provided. That is, each of these holding bodies 21e, 2e
2e are attached to the holding portions 21a, 22a with so-called "play" via appropriate support pins 21f, 22f, and as shown by arrows in FIG.
1e and 22e are swingable. The holding body 2 attached to the holding portions 21a and 22a with such "play"
When 1e and 22e are added, when the pressurized portions 21b and 22b are released and the glass substrate P is clamped, even when the glass substrate P is clamped by a plurality of holding members 10, it is easy to synchronously clamp the glass substrate P. And no excessive load is applied to the substrate.

Further, in the holding member 10 according to the above embodiment, the urging member 30 is used as a member for applying the urging force, but instead, the holding member 1 shown in FIG.
As shown in FIG. 1, a coil spring 31 can be used.
7, a substantially C-shaped spring member 3 like the holding member 12 shown in FIG.
2 may be used. That is, the holding member 12 has a configuration in which windows 21g and 22g are formed in the holding members 21 and 22, and the open ends of the spring members 32 are fixed to the vicinity of the holding portions 21a and 22a through the windows 21g and 22g. I am taking it. According to the holding member 12 having such a configuration, the space surrounded by the spring member 32 and the rotating portion 23 can constitute the insertion portion as referred to in the present invention, and has an extremely simple configuration as a whole. ing.

In the above description, the substrate has been described by taking a glass substrate for LCD as an example. However, the substrate may of course be a substrate for PDP (Plasma Display Panel). In the above-described embodiment, an etching apparatus has been described as an example of a processing apparatus. However, the present invention is not limited to this and may be embodied as another film forming apparatus, an ashing apparatus, or a cleaning apparatus.

[0049]

According to the substrate holding member according to the first to fifth aspects, the substrate can be hung while sandwiching the edge thereof.
The substrate can be held vertically. In addition, since it contacts only the peripheral edge of the substrate, there is almost no influence on the substrate. Even if the size of the substrate becomes large, it can be appropriately dealt with. In particular, in the case of claim 2, a simpler configuration can be realized, and in the case of claim 3, the structure becomes extremely simple. In the case of the fourth and fifth aspects, the substrate can be further transported in a vertical state by a shaft-like transport jig. In the case of the fifth aspect, the substrate can be transported in a more stable state. It is possible.

According to the substrate storage bodies of the sixth and seventh aspects, the substrates can be stored side by side in a vertical state. Of course, even in such a case, since only the edge of the substrate is sandwiched by the holding member, the area of the contact portion between the holding member and the substrate is small, and only the edge is in contact. In particular, in the case of claim 7, the vicinity of the lower end of the suspended substrate is prevented from coming into contact with vibrating wind or the like.

According to the transfer method of the eighth and ninth aspects, the substrate can be transferred in a vertical state, so that the transfer space can be smaller than that of the conventional horizontal transfer, and the substrate can be larger. Can be safely transported, and the contact portion with the substrate may be small. Further, a transport member for moving the transport jig can be made compact.

According to the processing apparatus of the tenth and eleventh aspects, the substrate in the housing suspended vertically by the holding member can be transferred to the predetermined position by the transfer jig in the vertical state as it is with the holding member. . Therefore, the transfer space can be narrower than in the conventional horizontal transfer, and even if the size of the substrate becomes large, it can be safely transferred, and the contact portion with the substrate may be small. In addition, since the transport mechanism for moving the transport jig can be made compact, the entire processing apparatus can be made compact.

[Brief description of the drawings]

FIG. 1 is a perspective view of a holding member according to an embodiment of the present invention.

FIG. 2 is a front view of the holding member of FIG. 1;

FIG. 3 is a front view of the holding member of FIG. 1 when the holding unit is in a separated state.

FIG. 4 is a perspective view of a substrate storage body according to the embodiment.

FIG. 5 is a front sectional view of a main part of the storage body of FIG. 4;

FIG. 6 is an explanatory diagram of a process of taking out a glass substrate from the storage body of FIG.

FIG. 7 is an explanatory diagram of a process of taking out a glass substrate from the storage body of FIG.

FIG. 8 is an explanatory diagram of a process of taking out a glass substrate from the storage body of FIG.

FIG. 9 is an explanatory diagram of a process of taking out a glass substrate from the storage body of FIG. 4;

FIG. 10 is an explanatory view schematically showing a configuration of an etching apparatus according to an embodiment of the present invention.

11 is a perspective view of a float chuck device used in the etching device of FIG.

FIG. 12 is an explanatory view when the float chuck of the float chuck device of FIG. 11 holds a glass substrate in a vertical state.

FIG. 13 is an explanatory diagram when the glass substrate held by the float chuck of the float chuck device of FIG. 11 is in a horizontal state.

FIG. 14 is an explanatory view showing a state in which the holding state of the holding member is released after the glass substrate held by the float chuck of the float chuck device of FIG.

FIG. 15 is a front view of a holding member according to another embodiment in which a holding body is attached to a holding portion.

FIG. 16 is a perspective view of a holding member according to another embodiment using a coil spring as an urging member.

FIG. 17 is a perspective view of a holding member according to another embodiment using a substantially C-shaped spring member as an urging member.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Holding member 21, 22 Nipping member 21a, 22a Nipping part 21b, 22b Pressed part 23 Rotating part 30 Urging member 40 Cassette 46 Bar 47a Ridge 50 Transporting device 51 Transporting jig 51a, 51b Recess 60 Etching device P glass substrate

Claims (11)

[Claims] 1. A member for holding a substrate by holding an edge of the substrate and suspending the substrate, the member being constituted by a pair of holding members and an urging member, A holding portion is formed on the front end side of the member, a pressed portion is formed on the rear end side of the holding member, and a rotating portion is formed at a position between the holding portion and the pressed portion. By rotating each of the holding members about the rotating portion, the holding portions of each of the holding members can freely contact and separate from each other, and the holding members of the holding members contact each other in a normal state by the urging member. A holding member for a substrate, wherein 2. The substrate holding member according to claim 1, wherein the urging member is a spring member. 3. The spring member has a substantially C-shape as a whole, the open end of which is fixed to the leading end side of the rotating portion of the holding member, and the midpoint of the arc portion is the rear end of the rotating portion. The substrate holding member according to claim 2, wherein the substrate holding member is located on the side of the substrate. 4. An insertion portion through which a shaft-shaped transfer jig can be inserted is formed.
4. The holding member for a substrate according to item 1. 5. A locking part for locking to a shaft-shaped conveying jig is formed.
4. The holding member for a substrate according to item 1. 6. A storage body for storing a substrate held by the substrate holding member according to any one of claims 1, 2, 3, 4, and 5, wherein the storage body has a size capable of storing the substrate. A storage body for a substrate, wherein locking members for locking a holding member are provided at predetermined intervals in an upper part in a body main body. 7. The substrate storage body according to claim 6, wherein spacers located between lower edge portions of the substrate are provided at predetermined intervals in a lower portion of the storage body. 8. A method for conveying a substrate held by a substrate holding member according to claim 4, wherein a shaft-shaped conveying jig is inserted through an insertion portion of the holding member, and the substrate is suspended in that state. Moving the suspended substrate together with the holding member. 9. A method for transporting a substrate held by a substrate holding member according to claim 5, wherein the locking portion of the holding member is locked by a shaft-shaped transport jig, and the substrate is held in that state. And transporting the suspended substrate together with the holding member. 10. An unprocessed substrate is provided from a storage body having a transfer device and a processing container, wherein the unprocessed substrate is transported to a predetermined position by the transfer device, and the unprocessed substrate is stored in the processing container. In a device configured to perform a predetermined process on the transfer device,
And a shaft-shaped transfer jig through which the insertion portion of the substrate holding member can be freely inserted, and the substrate held by the holding member is transferred to the predetermined position by the transfer jig together with the holding member. A processing device, characterized in that: 11. An unprocessed substrate is provided from a storage body having a transfer device and a processing container, in which a substrate is stored, the unprocessed substrate is transferred to a predetermined position by the transfer device, and the unprocessed substrate is stored in the processing container. In a device configured to perform a predetermined process on the transfer device,
And a shaft-shaped transfer jig in which a locking portion of the substrate holding member is locked, and the substrate held by the holding member is transferred to the predetermined position by the transfer jig together with the holding member. A processing device, characterized in that it is configured to: