JPH1010705A - Reticle case - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a reticle case capable of placing a reticle at both of upper and lower positions, as for the reticle case for storing the reticle used in a semiconductor manufacturing process. SOLUTION: The reticle case 50 is provided with reticle 1 holding members 60 installed on both of a base plate 52 and an upper cover 58. The holding member 60 is provided with a tapered surface 62, then, the end face of the reticle 1 is supported by the tapered part 62. A lever-like fixing member 70 is freely rotatably supported by a supporting bar 80, and the member 70 is provided with a V-shaped groove 72 formed in the leading end part. The fixing member 70 is energized by a tension spring so that the reticle may be held by the V-shaped groove 72, then, the end face of the reticle is held and fixed from both sides. The reticle 1 is loaded/unloaded in/from the reticle case by releasing the fixing member 70 and opening a front gate 56.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a case for accommodating a glass substrate such as a reticle or a mask used in semiconductor manufacturing.

[0002]

2. Description of the Related Art A conventional reticle case is designed exclusively for each device. For example, in a reticle inspection machine, the film surface of the reticle is stored upward, whereas in a stepper, the film surface of the reticle is stored downward in a reticle case. In a conventional reticle case, the reticle is held and fixed by a holding member that comes into contact with the glass surface of the reticle. Specifically, an example of a conventional reticle case will be described.

FIG. 8 shows a conventional reticle case, and FIG. 8 is a plan view showing the inside of the reticle case.
FIG. 9 is a sectional view of FIG. The reticle case generally designated by reference numeral 10 has a substantially square bottom plate 12 and a box-shaped case body surrounded by a side wall plate 14. For example, it is attached by a hinge and is supported on the case body so as to be freely opened and closed. An upper cover 16 is attached to the upper surface of the case body so as to be freely opened and closed.

On the bottom plate 12, for example, five holding members 2
0 is provided. The holding member 20 has a flat surface 21 and supports the periphery of one flat surface 1a of the reticle 1 by surface contact. A plurality of fixing pins 22 are attached to the top cover 16 via springs 24, and the reticle 1
Is pressed by applying a preload to the other flat surface 1b.

Therefore, the reticle 1 is pressed and fixed to the holding member 20 by the pins 22 and held. The fixing pin 22 is configured to release the fixing of the reticle 1 when the front gate 18 is opened. When the reticle 1 is taken in and out of the reticle case 10, the top cover 1
Open 6 and perform. Further, when the apparatus automatically carries in and takes out the reticle 1 from the reticle case, the automatic reticle transporting apparatus of the apparatus automatically opens the front gate 18 to perform the operation.

[0006]

As described above, in the conventional reticle case, it is impossible to take out the reticle 1 with the reticle case installed upside down because of its structure. For this reason, a reticle case is commonly used between an apparatus such as a stepper which is formed on one flat surface of the reticle 1 and uses the film surface downward, and an EB apparatus or an inspection apparatus which uses the film surface upward. Was impossible. Further, in the conventional reticle case, since the holding member 20 is configured to directly contact the polished glass surface of the reticle 1,
Dust generated from the contact portion tends to adhere to the polished glass surface, which may have an adverse effect on a pattern drawn with ultra-precision. Furthermore, since the reticle 1 is fixed only in the vertical direction, the reticle 1 is easily moved in the direction 1d of the side surface of the reticle 1, which has the disadvantage that the generation of dust is spurred.

[0007]

In order to solve the above-mentioned drawbacks of the conventional reticle case, in the present invention, the reticle case can be used upside down, and it is held by the end face of the reticle 1 as a measure against dust. The holding members to be mounted are symmetrically set on both the upper and lower surfaces of the reticle. Further, the reticle fixing member has been devised so that the end face of the reticle is sandwiched from the left and right, thereby overcoming the drawbacks of the conventional reticle case.

As described above, according to the present invention, since the reticle case can be used upside down, it can be used for all reticle-related devices, and a reticle case or a reticle carrier that differs for each process can be used. There is no need to replace them. For this reason, the opportunity for the operator to intervene in the reticle is greatly reduced, and dust adhering to the reticle is significantly reduced. Also,
Since the reticle case according to the present invention is configured to suppress dust generated inside the reticle case, an ultra-clean environment can be provided.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a reticle case according to the present invention will be described with reference to FIGS. FIG. 1 is a perspective view of a reticle case according to the present invention, in which a top cover 58 and a front gate 56 of the reticle case are open. FIG. 2 is a plan view showing a state where the reticle 1 is fixed by the fixing member 70, FIG. 3 is a view taken along the line AA in FIG.
FIG. 3 is a view as viewed in the direction of arrows BB in FIG. 2.

A reticle case generally designated by reference numeral 50 is:
It has a substantially square bottom plate 52 and a side wall plate 54 surrounding three sides of the bottom plate 52, and a front gate 56 is attached to the remaining sides by a hinge (not shown) so as to be openable and closable.

A holding member 60 is fixed on the bottom plate 52. For example, five holding members 60 are provided, and each holding member 60 has a tapered portion 62, and the tapered portion 62 supports the circumferential portion of the reticle 1.

The reticle 1 is a substantially square plate made of a glass material having polished planes 1a and 1b and side surfaces 1d. Generally, the reticle 1 has an angle of about 45 degrees between the polished planes 1a and 1b and the side surfaces 1d. A chamfer is formed. Accordingly, the reticle 1 is supported by the tapered portion 62 of the holding member 60 at the chamfered portion of the reticle 1 in line contact or surface contact.

The reticle case 50 of the present invention has an upper cover 58 that can be freely opened and closed by a hinge (not shown) on the case body, and a holding member 60 is also provided on the back surface of the upper cover 58.

Therefore, when the upper cover 58 is closed, the reticle 1 can be placed on the reticle case 50 with the bottom plate 52 down or with the upper cover 58 down. Is the reticle 1 by the holding member 60.
Will be supported by the end face.

In the reticle case 50, a pair of fixing members 70 are disposed on two opposing side walls of the case body. The fixing member 70 is rotatably supported by the support column 80, and has a V-shaped groove 72 formed at a position facing the reticle 1. A tension spring 82 is stretched between a pin 84 erected on the bottom plate 52 and a pin 86 erected on the fixing member 70, and the V-shaped groove 72 is always attached to the reticle 1. Energize.

Therefore, when the reticle 1 is clamped from both sides by the fixing member 70 and fixed, the end surface of the reticle 1 contacts only the V-shaped groove 72 of the fixing member 70 as shown in FIG. It does not contact the tapered portion 62 of the member 60 (see FIG. 3).

In this state, V
The lever portion 74 provided on the side opposite to the groove 72 projects outward from the side wall plate 54 of the case.

FIG. 5 is a plan view showing a state where the fixing member 70 has opened the reticle 1, FIG. 6 is a view taken along the line AA in FIG. 5, and FIG.
FIG. 6 is a view on arrow B-B of FIG. 5. By pressing the lever portion 74 of the fixing member 70, the V-shaped groove 72 releases the reticle 1, and the reticle 1 is supported by the tapered portion 62 of the holding member 60 at the end surface of the reticle 1.

The fixing member 70 is provided with a stopper mechanism such as a click, and is held in an open state. In this state, the reticle 1 is in a state where it can be taken out by an operator or an automatic transport device. In a state where the fixing member 70 is opened, the reticle case 50 is placed and only supported by the lower holding member 60. Since the holding members 60 are arranged vertically, the reticle case 5
Regardless of whether 0 is placed upward or downward, it is possible to take out only by opening the front gate 56. When the reticle 1 is fixed again, the stopper mechanism may be released by pressing the lever 74.

Further, the present embodiment is not limited to the above configuration. For example, when the front gate 56 of the reticle case 50 is opened, the fixing member 70 can release the fixing of the reticle 1 in conjunction therewith. It is. Although not shown in the drawings of this embodiment, it is convenient to provide a reticle confirmation window in the reticle case in this embodiment.

[0021]

As described above, according to the present invention, the reticle case can be installed upside down.
A reticle case can be shared between an apparatus that uses the reticle with its film surface facing down and an apparatus that uses the reticle with its film surface facing up. Therefore, when the reticle is moved from one device to another device, it is not necessary to take out the reticle from the reticle case, and dust does not adhere to the reticle. Further, in the reticle case of the present invention, since the end face of the reticle is held, the reticle does not move in the reticle case and does not damage the glass surface or the film surface of the reticle. For this reason, it is possible to maintain a safe and clean state.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a state in which a top cover of a reticle case according to the present invention is half opened.

FIG. 2 is a plan view showing a state where the reticle of the reticle case according to the present invention is fixed.

FIG. 3 is a view taken in the direction of arrows AA in FIG. 2;

FIG. 4 is a view taken in the direction of arrows BB in FIG. 2;

FIG. 5 is a plan view showing a state where the reticle of the reticle case according to the present invention is not fixed.

FIG. 6 is a view taken in the direction of arrows AA in FIG. 5;

7 is a view taken in the direction of arrows BB in FIG. 5;

FIG. 8 is a plan view of a conventional reticle case.

FIG. 9 is a side view of a conventional reticle case.

[Explanation of symbols]

 Reference Signs List 1 reticle 50 reticle case 52 bottom plate 56 front gate 58 top cover 60 holding member 70 fixing member 82 tension spring

Claims (6)

[Claims] 1. A reticle case in which holding members for holding a reticle by an end face of the reticle are arranged on both the front side and the back side of the reticle. 2. The reticle case according to claim 1, further comprising a reticle fixing member for fixing the reticle by an end face of the reticle. 3. A reticle fixing member comprising: a preload means for fixing the reticle fixing member by applying a preload toward an end face of the reticle; and a releasing means for releasing the fixing of the reticle fixing member to the reticle. 2. The reticle case according to 2. 4. A substantially square bottom plate, a side wall plate surrounding three sides of the bottom plate, a front gate openably and closably attached to the remaining sides of the bottom plate, and a holding member disposed on the bottom plate to support an end surface of the reticle. A reticle case, comprising: a member, an upper cover that is openably and closably attached to a side wall member, and a holding member that is provided on a back surface of the upper cover and supports an end surface of the reticle. 5. A pair of fixing members rotatably supported by supporting columns on opposing side wall members of the reticle case,
The reticle case according to claim 4, further comprising a pressurizing unit that urges the fixing member against an end surface of the reticle. 6. The fixing member has a V pinched between end faces of the reticle.
The reticle case according to claim 5, further comprising a groove.