JP5916508B2 - Substrate storage container - Google Patents

Description

  The present invention relates to a substrate storage container that can store a reticle storage container for a reticle in addition to a semiconductor wafer.

  Conventional reticles used in the lithography process of a semiconductor production line are formed in a 5-inch square or 6-inch square (not shown), stored in a dedicated storage container, stored in a stocker, and transported to an exposure apparatus as needed. After that, it is used for an operation of forming an electronic circuit by exposing the semiconductor wafer (see Patent Documents 1 and 2).

  The reticle-dedicated container is mainly formed into a short rectangular shape that can accommodate a single reticle, but does not have means for automatic conveyance, and is therefore stored in a separate container during conveyance. Then, it is carried on a carriage or the like. In this container, for the convenience of transportation, it is possible to install some kind of transportation means, but it is omitted because it may increase the external dimensions and storage space.

  When the reticle is stored in the storage container, only one reticle is stored. However, when an electronic circuit is formed on a semiconductor wafer, generally a plurality of reticles are used. For this reason, the reticle is accommodated in the accommodating container and conveyed to the exposure apparatus many times so as not to hinder the operation of forming the electronic circuit.

  On the other hand, semiconductor wafers subjected to exposure processing are mainly of a large diameter φ300 mm type that contributes to productivity improvement, and 25 wafers are arranged vertically in a substrate storage container (for example, FOUP standardized by SEMI standards). Aligned and stored and used. The substrate storage container is formed in a tall front open box whose front is closed with a predetermined material, and a transfer flange is mounted on the ceiling. After the flange is suspended on the ceiling transfer device, the semiconductor storage container The production line is transported.

  As described above, the number of reticles and semiconductor wafers that can be transported at one time is different, and a plurality of reticles are required to form an electronic circuit, and the reticle must be transported many times. As a result, the transfer efficiency of the semiconductor wafer is deteriorated. In addition, since the container for the reticle and the substrate container for the semiconductor wafer are different in size and form of transport and require separate transport lines, a plurality of transport lines must be installed. There are problems in terms of cost, space occupation, and the like.

  In order to solve these problems, conventionally, there has been proposed a semiconductor manufacturing line in which a reticle is stored in a substrate storage container via a jig and transported using one type of substrate storage container (see Patent Document 3). ).

Japanese Unexamined Patent Publication No. 7-58192 JP 2011-3723 A Patent No. 3682170

  However, when a reticle is to be stored in a semiconductor wafer substrate storage container via a jig, the reticle jig and the substrate storage container are greatly different in weight and position of the center of gravity. This is very difficult because the reticle is damaged by vibration.

  The present invention has been made in view of the above, and can both store a reticle and a semiconductor wafer in the same container, improve transport efficiency, unify a transport line, and reduce equipment, cost, space, and the like. An object of the present invention is to provide a substrate storage container that can be used.

In order to solve the above problems in the present invention, a container body of a front open box capable of storing a plurality of semiconductor wafers arranged in the vertical direction, a lid body that removably opens and closes the front surface of the container body, and a container A reticle storing container for storing in the main body, and a container for automatic transport attached to the container main body,
A pair of support pieces for supporting the semiconductor wafer substantially horizontally are provided on both sides of the container body so as to face each other, and both sides of the receiving jig are supported by the pair of supporting pieces, and the holding jig is provided with a plurality of reticles. The storage container is a cassette that can be stored side by side in the vertical direction, and this cassette is a container that protrudes from each side panel, a pair of side panels that sandwich the reticle storage container facing each other, a connecting member that connects the pair of side panels. A plurality of supported members supported by the support pieces of the main body, and a pair of storage grooves that are fitted to the side portions of the reticle storage container are formed to face each other on at least facing surfaces of the pair of side panels. The upper surface of the groove extends from the front of the side panel while inclining to the rear lower side of the side panel, and the first inclined surface is inclined to the lower rear of the side panel. And a step groove formed at the end of the first lower surface and the lower surface of the storage groove, the first lower surface extending from the front of the side panel toward the rear of the side panel. And a second lower surface extending from the step groove toward the rear portion of the side panel, and the second lower surface is positioned lower than the first lower surface .

The reticle storage container includes a bottom plate for storing the reticle, an upper lid that is rotatably supported by the bottom plate, opens and closes an upper surface of the bottom plate, and is rotatably supported by a front portion of the upper lid to open the bottom plate. Including a front lid that opens and closes the front,
A spring is installed between the upper lid and the front lid, and a holding member for the reticle is rotatably supported via a bearing on the opposing surface facing the bottom plate of the upper lid, and a spring is attached to either the holding member or the bearing. When a part is connected and the front lid closes the front surface of the bottom plate, the pressing member can be interlocked and the reticle can be pressed by this pressing member.

In addition, a regulation protection member that contacts at least one of the inner surface of the container body and the front lid of the reticle storage container may be provided on at least one of the pair of side panels.

Further, laterally extending guide members may be provided on both side walls of the bottom plate of the reticle container, and mounting pieces for supporting the guide members of the reticle container may be provided opposite to each other on the opposing surfaces of the pair of side panels. Is possible.

Here, the semiconductor wafer in the claims includes at least a φ300 mm or 450 mm type silicon wafer. The carrier may be a flange, a rail, or the like as long as it is compatible with an automatic machine for automatic conveyance . The cassette side panel and the supported member may be integral or separate.

According to the present invention, both the reticle and the semiconductor wafer can be stored in the same container, so that the transfer efficiency can be improved and the transfer line can be unified to reduce the equipment and cost. Moreover, it is possible to reduce the capital investment and the installation space for the transport line, and it is possible to transport a plurality of reticles at a time in a stable posture. In addition, since the second inclined surface on the upper surface of the storage groove comes into contact with the side portion of the reticle storage container, it can be expected that the reticle storage container is prevented from rattling. Furthermore, since the step groove on the lower surface of the storage groove contacts the side portion of the reticle storage container, it can be expected to prevent displacement of the reticle storage container in the front-rear direction.

According to the second aspect of the present invention, when the regulation protection member is in contact with the inner surface such as the back surface or the side surface in the container body, the cassette or the adapter can be prevented from being displaced in the front-rear direction of the container body. It becomes possible. In addition, when the regulation protection member comes into contact with the front lid of the reticle container, it is possible to prevent the front lid from rotating due to an impact or the like and opening the front surface of the bottom plate to cause reticle contamination or the like. .

  According to the fourth aspect of the present invention, the second inclined surface on the upper surface of the storage groove comes into contact with the side portion of the reticle storage container, so that it can be expected to prevent the reticle storage container from rattling. Further, since the step groove on the lower surface of the storage groove is in contact with the side portion of the reticle storage container, it is expected that the reticle storage container is prevented from being displaced in the front-rear direction.

Further, according to the invention described in claim 3 , even when the storage groove cannot be formed in the opposing inner surfaces of the pair of side panels, the cassette can be manufactured, and the configuration of the cassette can be diversified. Can do.

1 is an overall perspective view schematically showing an embodiment of a substrate storage container according to the present invention. It is a whole perspective view showing typically the state where a cassette is stored in a container main part in an embodiment of a substrate storage container concerning the present invention. It is a perspective view which shows typically the state which accommodated the cassette in the container main body of FIG. FIG. 4 is a sectional view taken along line IV-IV in FIG. 3. It is a perspective view showing typically a cassette in an embodiment of a substrate storage container concerning the present invention. It is a perspective view which shows typically the reticle storage container of the open state in embodiment of the substrate storage container which concerns on this invention. It is a principal part perspective view which shows typically the state in the middle of inserting the guide grip of a reticle storage container in the storage groove of the cassette in embodiment of the substrate storage container which concerns on this invention. It is a principal part perspective view which shows typically the state which inserted the guide grip into the accommodation groove | channel of FIG. It is a perspective view showing typically a 2nd embodiment of a substrate storage container concerning the present invention. It is a perspective view which shows typically the cassette in 3rd Embodiment of the substrate storage container which concerns on this invention. It is a whole perspective view showing typically a 4th embodiment of a substrate storage container concerning the present invention. It is a whole perspective view showing typically the state where a plurality of adapters were stored in a container main part in a 4th embodiment of a substrate storage container concerning the present invention. It is a perspective explanatory view showing typically an adapter in a 5th embodiment of a substrate storage container concerning the present invention. It is a whole perspective view showing typically a 5th embodiment of a substrate storage container concerning the present invention.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. As shown in FIGS. 1 to 8, a substrate storage container in the present embodiment includes a container body 1 capable of storing a plurality of semiconductor wafers W, The container body 1 is provided with a lid 10 that removably opens and closes the opened front surface. A container jig 50 for a reticle container 30 is attached to and detached from the container body 1 from the front side instead of a plurality of semiconductor wafers W. They are stored freely.

  The container body 1 and the lid body 10 are each formed by a combination of a plurality of parts, each of which is injection-molded with a molding material containing a predetermined resin. Examples of the resin of the molding material include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyether imide, polyether ketone, polyether ether ketone, polybutylene terephthalate, polyacetal, and liquid crystal polymer, and alloys thereof. An appropriate amount of carbon black, carbon fiber, carbon nanofiber, carbon nanotube, conductive polymer, metal fiber, metal oxide or the like is added to the thermoplastic resin in order to impart conductivity.

  As shown in FIG. 1 and FIG. 2, the container body 1 is formed into a tall front open box whose front is opened horizontally, and is a semiconductor wafer having a diameter of 300 mm on both inner sides, in other words, on the inner surfaces of the left and right side walls. A pair of support pieces 2 that horizontally support the peripheral edge of W from below are provided, and a plurality of the pair of support pieces 2 are arranged at predetermined intervals in the vertical direction.

  The container body 1 is formed in a size that can accommodate, for example, 25 or 26 semiconductor wafers W arranged in the vertical direction. Each support piece 2 is formed, for example, on a flat shelf extending in the front-rear direction of the container body 1, and the semiconductor wafer W accommodated in at least the front part of the front-rear part of the surface is displaced in the front direction. The stopper 3 is prevented from being raised and is integrally formed.

  A bottom plate (not shown) is selectively attached to the bottom surface of the bottom plate of the container body 1, and a flat rectangular robotic flange 4, which is a carrier for automatic conveyance, is detachably attached to the center of the ceiling of the container body 1. The robotic flange 4 is gripped and suspended by a factory ceiling transport device and then transported on a semiconductor production line. In addition, a plurality of rear supports capable of sandwiching the rear periphery of the semiconductor wafer W in an emergency are arranged in parallel on the inner back surface of the container body 1, and the front periphery of the container body 1 is bent outward in the width direction to form a bulge. The locking holes 5 for the lid 10 are respectively formed in a recessed manner on both the upper and lower sides of the inner surface of the front peripheral edge.

  Operation handles 6 for manual operation are detachably mounted on the outer surfaces of both side walls of the container body 1, and a transport rail 7 as an automatic transport tool is detachably mounted on the lower part of each side wall as necessary. Orient horizontally in the front-rear direction.

  As shown in FIGS. 1 and 2, the lid 10 includes a lid body 11 having a substantially dish-shaped cross section that is detachably fitted to the front surface of the container body 1, and a cover plate that covers the opened surface of the lid body 11. 15, and a locking mechanism 17 is built in between the lid body 11 and the cover plate 15. The lid body 11 is formed in a horizontally long and substantially rectangular shape, and a front retainer 12 that elastically holds the front periphery of the semiconductor wafer W with an elastic piece is detachably attached to the center of the back surface.

  A frame-shaped gasket 13 that is pressed against the inner peripheral surface of the front surface of the container main body 1 is fitted to the peripheral wall of the lid main body 11, and the upper and lower sides of the peripheral wall of the lid main body 11 are provided for the locking mechanism 17. Recessed holes 14 are respectively drilled through. The cover plate 15 is formed of a transparent, translucent, or opaque plate, and operation holes 16 for the locking mechanism 17 are formed through both sides to open and close the operation holes 16. A rotatable operation key of the device penetrates from the outside.

  As shown in the figure, the locking mechanism 17 includes a pair of left and right rotating plates 18 that are rotated by operating keys of the lid opening / closing device that penetrates the operating holes 16 of the cover plate 15, and the rotation of each rotating plate 18. A plurality of slide bars 19 that slide in the vertical direction and are connected to the tip of each slide bar 19, and are fitted and locked into the locking holes 5 of the container body 1 through the intrusion hole 14 in the peripheral wall of the lid body 11. And a plurality of lockable claws 20 capable of appearing and retracting.

  The locking mechanism 17 is formed of the same molding material as the container body 1 and the lid body 10. The plurality of rotating plates 18 and the slide bar 19 are pivotally supported or supported via support ribs provided in the lid body 11, and are formed in a pair of arc grooves 21 near the peripheral edge of each rotating plate 18. The end portions of the slide bar 19 are loosely fitted via pins. Each locking claw 20 is bent and formed, for example, in a substantially L-shaped cross section, and a friction reducing roller is rotatably supported at a free end portion.

  In such a substrate storage container, a plurality of semiconductor wafers W are sequentially stored in the container main body 1, and a lid body 10 is press-fitted and fitted to the front surface of the container main body 1 by a lid body opening / closing device. The front retainer 12 holds the front periphery of the wafer W, and the locking mechanism 17 is locked by the lid opening / closing device to firmly fix the lid 10. When the lid 10 is firmly fixed, the robotic flange 4 of the container body 1 is suspended on the ceiling transfer device of the factory and transferred to the next processing step so that each semiconductor wafer W is sequentially processed and processed. As a result, an electronic circuit is formed on the surface of the semiconductor wafer W.

  As shown in FIGS. 3, 4, and 6 to 8, the reticle storage container 30 includes a flat rectangular bottom plate 31 that houses one reticle, an upper lid 39 that opens and closes the opened upper surface of the bottom plate 31, and A front lid 44 that is rotatably supported by the upper lid 39 and that opens and closes the front surface of the bottom plate 31 that is opened is configured. The bottom plate 31 of the reticle container 30 is formed in a substantially channel shape with a short front view, and a block-shaped rear wall 32 is erected on the rear peripheral edge of the plate body, and the block shape is formed on both peripheral edges of the plate body. The rear wall 32 and the pair of side walls 33 are integrally connected to each other.

  A pair of left and right support rails 34 for horizontally mounting one reticle are disposed on both sides of the upper surface of the bottom plate 31. Each support rail 34 is formed, for example, in a generally convex shape that contributes to a reduction in the contact area with the reticle, and is linearly directed in the front-rear direction of the reticle container 30. In addition, guide grips 35 are provided on the outer surfaces of both side walls of the bottom plate 31 so as to project in the horizontal and lateral directions.

  Each guide grip 35 is basically formed in a substantially planar groove shape that can be gripped, and an insertion recess 36 is formed in the front portion. One end of a fixing pressing spring 37 is formed in the insertion recess 36. Part is inserted. The holding spring 37 is bent and formed in a substantially bowl shape at the other end, and the other end engages with the side wall 33 and the side of the upper lid 39 to urge and compress the upper lid 39 to the bottom plate 31. To function. Further, the rear portion 38 of the guide grip 35 is formed so as to protrude in the horizontal and horizontal direction from the other portions, and is a guide when the reticle storage container 30 is stored or taken out from a storage shelf (not shown) for the reticle storage container. Become.

  The upper lid 39 is formed as a flat rectangular plate corresponding to the size of the bottom plate 31, and is pivotally supported on the rear wall 32 of the bottom plate 31 so as to be swingable in the vertical direction. In the vicinity of both side portions of the facing surface 40 facing the upper surface of the bottom plate of the upper lid 39, holding members 41 for holding the reticle from above are pivotally supported via bearings 42 so as to be swingable (can be raised and lowered), and each holding member 41 is supported. Formed into a straight short bar.

  One end of a coil spring 43 positioned behind the pressing member 41 is mounted near both sides of the facing surface 40 of the upper lid 39, and a part of the center of each coil spring 43 is connected to the bearing 42. The other end of each coil spring 43 is attached to the inner surface of the front lid 44. The pair of coil springs 43 is stretched between the upper lid 39 and the front lid 44 and elastically biases the front lid 44 toward the front surface where the bottom plate 31 is opened, so that the front surface where the bottom plate 31 is opened is placed on the front lid 44. It functions to block by.

  The front lid 44 is formed in a horizontally long plate corresponding to the front surface of the bottom plate 31, is rotatably supported on the front end portion of the upper lid 39, and rotates to swing the pair of pressing members 41 together. That is, when the front lid 44 rotates to open the front surface of the bottom plate 31, the holding member 41 is separated from the reticle in conjunction with the front lid 44 by the extension operation of the coil spring 43 coupled to the bearing 42, and It swings in the direction of the facing surface 40 to allow the reticle to be removed from the bottom plate 31.

  On the other hand, when the front lid 44 rotates and closes the front surface of the bottom plate 31, the pressing member 41 is opposed to the upper lid 39 in conjunction with the front lid 44 by the compression operation of the coil spring 43 connected to the bearing 42. By moving away from 40 and contacting in the reticle direction, the removal of the reticle from the bottom plate 31 and rattling are regulated.

  As shown in FIGS. 1 and 3 to 5, the storage jig 50 includes a hollow cassette 51 in which a plurality of reticle storage containers 30 can be aligned and stored in the vertical direction. The cassette 51 includes a pair of side panels 52 that sandwich the reticle holding container 30 in a horizontal state from the left and right sides, and a plurality of (for example, 2 to 8) bridges connected between the pair of side panels 52. ) And a pair of supported pieces 63 that protrude from the vicinity of the center of the outer surface of the pair of side panels 52 and are supported by the support piece 2 of the container body 1.

  The side panel 52, the connecting bar 62, and the supported piece 63 constituting the cassette 51 are predetermined molding materials such as various synthetic resins such as polycarbonate, polybutylene terephthalate, polyacetal, polyether ether ketone, polyester-based, polystyrene-based, polyolefin. It is molded from a thermoplastic elastomer such as a system. When it is desired to impart conductivity to these molding materials, a conductive additive such as carbon black, carbon fiber, carbon nanofiber, carbon nanotube, conductive polymer, metal fiber, or metal oxide is added.

  The pair of side panels 52 are each formed in a rectangular plate, and a plurality of screw holes for the connecting bar 62 are drilled through the peripheral edge including the four corners. A pair of storage grooves 53 to be inserted into a guide grip 35 that is a side portion of the reticle storage container 30 are cut out to face each other at least on the inner surfaces facing each other of the pair of side panels 52. Are arranged at a predetermined pitch in the vertical direction, and each of the storage grooves 53 is formed in a long tapered trapezoidal shape that becomes narrower from the front to the rear of the side panel 52.

  As shown in FIGS. 6 and 7, the upper surface of the storage groove 53 includes a first inclined surface 54 that extends from the front end portion of the side panel 52 while being inclined downward from the center portion of the side panel 52, and the first inclined surface. 54 is formed integrally with a step surface 55 slightly extending downward from the end of 54 and a second inclined surface 56 extending long from the end of the step surface 55 while being slightly inclined downward in the rear part of the side panel 52. The

  The first and second inclined surfaces 54 and 56 are greatly inclined so that the first inclined surface 54 can be easily fitted with the guide grip 35 of the reticle container 30, and the second inclined surface 56 is the first inclined surface 56. By being positioned lower than the inclined surface 54 and contacting the guide grip 35, rattling of the reticle container 30 is effectively prevented.

  As shown in the figure, the lower surface of the storage groove 53 has a first lower surface 57 extending from the front end portion of the side panel 52 toward the center portion of the side panel 52, and slightly downward from the end portion of the first lower surface 57. A step groove 58 having a substantially J-shaped section extending upward and folded upward, and a second lower surface 59 extending from the short end portion of the step groove 58 extending in the rear direction of the side panel 52 to be integrally formed. The The length (height) between the first lower surface 57 and the first inclined surface 54 is longer than the length (height) between the second lower surface 59 and the second inclined surface 56. , Adjusted to open large. Further, the second lower surface 59 is located slightly below the first lower surface 57.

  The step groove 58 is located, for example, directly below or near the step surface 55 of the storage groove 53, and is fitted and brought into contact with the rear portion 38 of the guide grip 35 stored in the storage groove 53, so that the reticle storage container 30 extends in the front-rear direction. Effectively prevent misalignment. The curved bottom of the step groove 58 is selectively formed deeply below the avoidance portion 60 that can alleviate the adverse effects of dimensional errors of the guide grip 35.

  The regulation protection piece 61 protrudes inward from the rear end portion of each side panel 52, and the regulation protection piece 61 is elongated in the vertical direction. The regulation protection piece 61 regulates the cassette 51 from being displaced in the back direction of the container body 1 by contacting the inner surface of the container body 1 such as the back surface or the side surface, or the front cover side of the reticle container 30. The front lid 44 is rotated by an action such as an impact to prevent the front surface of the bottom plate 31 from being unnecessarily opened by contacting the part or restricting the rotation thereof.

  Each connecting bar 62 is formed in, for example, an elongated cylinder, and screw grooves are formed on the peripheral surfaces of both ends, and the screw grooves are screwed into the screw holes of the side panel 52. The length of the connecting bar 62 is set in consideration of the width of the reticle container 30, the outer side surfaces of the reticle container 30 are brought into contact with the inner surfaces of the side panels 52, and the reticle container 30 rattles in the left-right direction. To prevent. Such a connecting bar 62 is screwed into a screw hole of each side panel 52, and a fastener such as a bolt or a screw is screwed into the end exposed from the screw hole. The panel 52 is firmly connected.

  The pair of supported pieces 63 are each formed on a plate having a thickness and a length that can be inserted between the support pieces 2 of the container body 1, and the maximum width dimension B1 between the supported pieces 63 and the supported pieces 63 is Each width dimension is set so that it may become smaller than the maximum width dimension B2 of the support groove which a pair of support piece 2 of the container main body 1 forms (refer FIG. 4, FIG. 5). Each supported piece 63 is formed in a flat rectangular shape extending in the front-rear direction of the cassette 51, and a positioning notch 64 is formed at the front end of the lower surface, and this notch 64 is connected to the stopper 3 of the support piece 2. The cassette 51 is effectively prevented from being displaced in the front direction and the back side direction of the container body 1 by being fitted and supported between the back side wall of the support piece 2.

  In the substrate storage container, the center of gravity when the cassette 51 in which the plurality of reticle storage containers 30 are aligned and stored is stored in the container body 1 is 0 to ± 1.0 mm from the position of the center of gravity when the plurality of semiconductor wafers W are aligned and stored. Adjusted within the range of. By adjusting within this range, even when a cassette 51 storing a plurality of reticle storage containers 30 is stored in the container main body 1, it can be transferred by a ceiling transfer device in a factory.

  In the above configuration, when a single reticle is stored in the reticle storage container 30, the reticle is horizontally supported on the pair of support rails 34 of the opened bottom plate 31, the opened upper lid 39 is closed, and the bottom plate 31 is closed. By fixing the upper lid 39 with the holding spring 37 and closing the front lid 44 at the front end, the reticle holding container 30 accommodates one reticle if the pair of pressing members 41 are rotated and brought into contact with the reticle. be able to.

  Next, when the reticle storage container 30 is stored in the cassette 51, the reticle storage container 30 is inserted between the pair of side panels 52, and the guide grip 35 is inserted into the storage groove 53 (see FIG. 7). The reticle storage container 30 is slid in the rear direction from the front portion of the panel 52 so that both side portions of the front lid 44 are brought into contact with the pair of regulation protection pieces 61, and the guide grip 35 is placed on the second inclined surface 56 of each storage groove 53. If the guide grip 35 is fitted to the step surface 55 of each storage groove 53 to prevent rattling (see FIG. 8), the reticle storage container 30 is stored in the cassette 51. be able to.

  Next, when the cassette 51 is stored in the substrate storage container, the cassette 51 is stored in the empty container body 1, and the supported pieces 63 of the cassette 51 are respectively placed on the pair of supporting pieces 2 facing the container body 1. After supporting and stabilizing the position and posture, the cassette 51 can be stored in the substrate storage container by press-fitting the lid 10 into the open front of the container body 1.

  According to the above configuration, the center of gravity of the substrate storage container storing the semiconductor wafer W is adjusted so that the position of the center of gravity of the substrate storage container when the cassette 51 is stored is substantially matched. It is possible to prevent the position of the center of gravity from greatly differing. Therefore, even if the substrate storage container storing the semiconductor wafer W and the substrate storage container storing the reticle storage container 30 are transported at high speed, they can be transported safely in the same manner.

  Further, if the substrate storage container and the cassette 51 are used, a plurality of reticles can be transferred at a time, so that deterioration of the transfer efficiency of the semiconductor wafer W can be effectively prevented. In addition, since there is no need to install a plurality of transfer lines, facilities, costs, space, etc. can be greatly reduced.

  Next, FIG. 9 shows a second embodiment of the present invention. In this case, one end portion of each side panel 52 for supporting a locking spring 65 located near the storage groove 53 is shown. The locking spring 65 is disposed so as to be inclined, and the locking spring 65 is elastically contacted with the guide grip 35 that is completely fitted in the storage groove 53.

  The upper surface of the storage groove 53 extends from the front end of the side panel 52 while inclining downward from the center of the side panel 52, and gently curves upward from the end of the first inclined surface 54. A substantially inverted V-shaped step surface 55A that extends while being folded downward, and a second inclined surface 56 that extends from the folded end portion of the step surface 55A while being slightly inclined downward from the rear side of the side panel 52. It is integrally formed. The locking spring 65 is formed of, for example, an elongated leaf spring, and is bent in a substantially hemispherical shape so that its short tip 66 is pressed against the guide grip 35 from above. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.

  In the present embodiment, it is obvious that the same operational effects as those in the above embodiment can be expected, and that the reticle container 30 can be more effectively prevented from shaking in the vertical direction with a simple configuration.

  Next, FIG. 10 shows a third embodiment of the present invention. In this case, a mounting piece 67 for supporting the guide grip 35 of the reticle container 30 on the opposing inner surfaces of the pair of side panels 52. The pair of mounting pieces 67 are arranged at a predetermined pitch in the vertical direction.

  The dimension of the pair of mounting pieces 67 is set such that the maximum distance B3 between the root portions is slightly larger than the maximum width dimension B of the reticle container 30 (refer to FIG. 6 for this point). Further, the interval B4 between the tip portions of the pair of mounting pieces 67 is set to be smaller than the maximum width dimension B of the reticle container 30 (also in this regard, see FIG. 6), and preferably supports the guide grip 35 reliably. Therefore, the width is set slightly larger than the side wall width of the bottom plate 31. These dimensions are realized by adjusting the lengths of the connecting bar 62 and the mounting piece 67.

  Each mounting piece 67 is formed in a flat rectangular elongated plate extending in the front-rear direction of the cassette 51. The upper surface of the mounting piece 67 includes, for example, a first upper surface 68 extending from the front end portion of the side panel 52 toward the center portion of the side panel 52, and a step surface slightly extending downward from the end portion of the first upper surface 68. The second upper surface 69 that extends from the short end of the step surface toward the rear portion of the side panel 52 is integrally formed. The second upper surface 69 is located slightly below the first upper surface 68. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.

  In this embodiment, the same effect as that of the above embodiment can be expected, and when the cassette 51 is manufactured, the storage grooves 53 cannot be cut out with high accuracy on the opposing inner surfaces of the pair of side panels 52, respectively. It is very meaningful.

  Next, FIGS. 11 and 12 show a fourth embodiment of the present invention. In this case, instead of using the holding jig 50 as a hollow cassette 51, a single reticle storage container 30 is provided. The adapter 70 is mounted, and the adapter 70 is stored in the container main body 1 in the vertical direction with a space in the vertical direction.

  The reticle container 30 may be the container described in the above embodiment, but may be another type 30A (for example, a container called a reticle SMIF POD 14). This other reticle storage container 30A includes, for example, a flat rectangular box-shaped bottom plate that horizontally stores one reticle, and a flat rectangular top cover that is detachably fitted to the open top surface of the bottom plate. The

  The adapter 70 is formed into a disk having a thickness and a size that can be inserted between the adjacent support pieces 2 of the container body 1, using a molding material similar to that of the cassette 51, for example. The support piece 2 is supported. Near the peripheral edge of the upper surface of the adapter 70, a plurality of positioning bars 71 for positioning the reticle container 30, 30A in contact with the front and rear, right and left, front and rear, or left and right are arranged at intervals. It is formed in a linear substantially I shape or the like. On the upper surface of the adapter 70, an accommodation hole or the like for the reticle accommodation container 30 or 30A can be selectively provided. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.

  In the present embodiment, the same effects as those of the above-described embodiment can be expected, and the capital investment can be reduced, the space can be saved, and the production efficiency can be improved. In addition, since there is enough space above and to the left and right of the adapter 70, another type of reticle storage container 30A can be easily stored.

  Next, FIGS. 13 and 14 show a fifth embodiment of the present invention. In this case, the adapter 70 is formed in a horizontally long planar rectangle, and the reticle container 30 is formed on the upper surface of the adapter 70. A plurality of positioning bars 71A that are positioned in contact with each other from four corners, two diagonal corners, or two corners are arranged at intervals, and each positioning bar 71A is bent and formed in a substantially plane L shape.

  The adapter 70 has, at the rear end of its upper surface, a regulation protection piece 61A that contacts at least the lower part of the front lid 44 among the inner surface of the container body 1 and the front lid 44 of the reticle container 30 and regulates its rotation. The thin overhanging pieces 72 project in the horizontal lateral direction from both sides, and the pair of overhanging pieces 72 are detachably supported by the support piece 2 of the container body 1. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.

  Also in the present embodiment, as in the above-described embodiment, it is possible to reduce capital investment and save space, and to expect an improvement in production efficiency.

  In the above embodiment, a part of the coil spring 43 and the bearing 42 of the pressing member 41 are connected. However, if the front lid 44 and the pressing member 41 can be interlocked, one of the pressing member 41 and the coil spring 43 is connected. You may connect a part. In the above embodiment, the storage groove 53 is cut out only on the inner surface of the side panel 52, but the storage groove 53 may be cut through the side panel 52. In addition, the regulation protection piece 61 is integrally formed at the rear end portion of each side panel 52 or adapter 70. However, the regulation protection piece 61 may be formed at the rear part of at least one side panel 52, or separate regulation protection. The piece 61 may be retrofitted.

  Further, although the regulation protection pieces 61 are continuously elongated in the vertical direction, a plurality of regulation protection pieces 61 are arranged in the rear vertical direction of the side panel 52 at intervals, and each regulation protection piece 61 is provided in the reticle container 30. It is also possible to contact the front lid 44 side portion. In the above embodiment, the end of the connecting bar 62 is screwed into the screw hole of the side panel 52, but the connecting bar is connected to the side panel 52 by a thermal welding method, an ultrasonic welding method, a high frequency welding method, a laser welding method, or the like. 62 can also be connected.

  Further, a concave portion is formed on one of the side panel 52 and the connecting bar 62, and a convex portion is formed on the other, and the concave portion and the convex portion are frictionally engaged with each other, whereby the side panel 52 and the connecting bar 62 are Can also be connected. Further, the connecting member is not limited to the cylindrical connecting bar 62, and may be, for example, a single or a plurality of connecting plates installed between the pair of side panels 52.

  The substrate storage container according to the present invention can be used in the field of handling semiconductors and reticles.

1 Container body 2 Support piece 3 Stopper 4 Robotic flange (conveying device)
10 Lid 17 Locking Mechanism 30 Reticle Container 30A Reticle Container 31 Bottom Plate 33 Side Wall 35 Guide Grip (Side)
39 Upper lid 40 Opposing surface 41 Holding member 42 Bearing 43 Coil spring (spring)
44 Front lid 50 Storage jig 51 Cassette 52 Side panel 54 First inclined surface 55 Step surface 55A Step surface 56 Second inclined surface 57 First lower surface 58 Step groove 59 Second lower surface 61 Regulation protection piece (regulation protection) Element)
61A regulation protection piece (regulation protection member)
62 Connection bar (connection member)
63 Supported pieces (supported members)
64 Notch 67 Mounting piece 70 Adapter 70A Adapter 71 Positioning bar (positioning member)
71A Positioning bar (positioning member)
W Semiconductor wafer

Claims (3)

A container body of a front open box that can store a plurality of semiconductor wafers arranged in the vertical direction, a lid that removably opens and closes the front surface of the container body, and accommodation for a reticle container that is accommodated in the container body A substrate storage container provided with a jig and having a container for automatic conveyance attached to the container body,
A pair of support pieces for supporting the semiconductor wafer substantially horizontally are provided on both sides of the container body so as to face each other, and both sides of the receiving jig are supported by the pair of supporting pieces, and the holding jig is provided with a plurality of reticles. The storage container is a cassette that can be stored side by side in the vertical direction, and this cassette is a container that protrudes from each side panel, a pair of side panels that sandwich the reticle storage container facing each other, a connecting member that connects the pair of side panels. A plurality of supported members supported by the support pieces of the main body, and a pair of storage grooves that are fitted to the side portions of the reticle storage container are formed to face each other on at least facing surfaces of the pair of side panels. The upper surface of the groove extends from the front of the side panel while inclining to the rear lower side of the side panel, and the first inclined surface is inclined to the lower rear of the side panel. And a step groove formed at the end of the first lower surface and the lower surface of the storage groove, the first lower surface extending from the front of the side panel toward the rear of the side panel. And a second lower surface extending from the step groove toward the rear portion of the side panel, and the second lower surface is positioned lower than the first lower surface . The substrate storage container according to claim 1, wherein a regulation protection member that contacts at least one of the inner surface of the container main body and the front lid of the reticle storage container is provided on at least one of the pair of side panels. On both side walls of the bottom plate of the reticle container, provided with a guide member laterally protruding respectively on the opposing surfaces of the pair of side panels, claim provided to face the mounting piece for supporting the guide member of the reticle container 1 Or the board | substrate storage container of 2 .

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