JP2014093381A - Substrate storage container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate storage container which can be provided by turning reinforcement bodies in right and left cross directions and improve strength of a lid to prevent deformation.SOLUTION: A substrate storage container is constituted of: a lid body 11 comprising a lid 10 which is fitted to an opened front face 5 of a container body 1, and a locking mechanism 30 for locking the lid 10 fitted to the front face 5 of the container body 1, and of which the lid 10 is fitted to the opened front face 5 of the container body 1; and a cover plate 19 which covers the opened front face of the lid body 11. On the cover plate 19, automatic operation holes 20 and manual operation holes 21 for a rotary operation reel 31 of the locking mechanism 30 are pierced, respectively, the manual operation holes 21 are positioned in the vertical direction of the automatic operation hole 20, and the cover plate 19 is vertically and horizontally provided with reinforcement bodies 70 by utilizing positions of the manual operation holes 21. Since a pair of manual operation holes 21 are positioned in the vertical direction of the automatic operation hole 20, the manual operation holes 21 do not become obstacles to installation of the reinforcement bodies 70.

Description

  The present invention relates to a substrate storage container used when storing, storing, transporting, and transporting a substrate such as a semiconductor wafer.

  Although the conventional substrate storage container is not shown in the figure, a container main body for aligning and storing a plurality of semiconductor wafers, a lid fitted in a sealed state on the open front of the container main body, and an open front of the container main body And a locking mechanism that locks the lid fitted to the frame (see Patent Documents 1 and 2).

  The container body is formed into a front open box from a predetermined molding material, and a plurality of locking holes for a locking mechanism are formed at intervals on the inner periphery of the opened front. The lid includes a substantially dish-shaped lid body that is fitted to the front surface of the container body, and a cover plate that is covered on the opened surface of the lid body. A front retainer for press-fitting and holding the front edge of the peripheral edge of the semiconductor wafer housed in the housing is mounted, and a plurality of intrusion holes for a locking mechanism are formed at intervals in the peripheral wall of the lid body.

  The cover plate is covered with a locking mechanism between the cover plate and an automatic operation hole for the locking mechanism and a plurality of manual operation holes. These automatic operation holes and the plurality of manual operation holes are in a relationship in which the manual operation holes are spaced apart from each other in the horizontal direction of the automatic operation hole.

  The locking mechanism includes a pair of left and right rotational operation plates that are pivotally supported by the lid body of the lid body and are rotated from the automatic operation holes and manual operation holes of the cover plate, and the vertical rotation in the lid body by the rotation of each rotation operation plate. It consists of a plurality of slide plates that slide, and a plurality of locking claws that slide in and out of the lid hole of the lid body by sliding of each slide plate, and are brought into and out of the locking hole of the container body, and fitted to the front of the container body It functions to prevent the lid from falling off.

Japanese Patent Laid-Open No. 2003-133405 JP 2006-303015 A

  By the way, the lid body is pressed against the front edge of the semiconductor wafer via the front retainer, so it may be deformed in a bowed shape. In this case, the lid body does not fit properly into the open front of the container body. In some cases, particles may enter the inside of the container body from the outside to cause contamination of the semiconductor wafer.

  In order to solve this problem, it is sufficient to prevent the deformation by providing reinforcing bodies vertically and horizontally in the lid body, but the manual operation holes are located in the left and right directions of the automatic operation holes, respectively, and the manual operation holes are obstacles to the installation of the reinforcement body. Therefore, the reinforcing body cannot be provided by extending in the lateral direction. As a result, there is a problem that the strength and rigidity of the lid body are insufficient, and the lid body cannot be sufficiently prevented from being deformed.

  The present invention has been made in view of the above, and it is an object of the present invention to provide a substrate storage container in which a reinforcing body can be provided in the horizontal direction, and the strength of the lid can be improved to prevent deformation. Yes.

In the present invention, in order to solve the above problems, a lid body fitted into the opening of the container body and a locking mechanism for locking the lid body fitted into the container body,
The lid includes a lid body fitted into the opening of the container body, and a cover plate for closing the opening of the lid body. The cover plate includes an automatic operation hole and a manual operation hole for the locking mechanism. And place the manual operation hole in the vertical direction of the automatic operation hole,
The locking mechanism includes a rotary operation body that is rotatably supported by the lid body of the lid body, an advancing / retracting body that moves forward / backward by the rotary operation body, and an inner periphery of the opening of the container body by the forward / backward movement of the forward / backward moving body. Including a locking body that comes into contact with and leaves the locking hole,
A reinforcing body that reinforces the lid body is provided on at least a surface of the lid body that faces the lid body of the cover plate, and the reinforcing body is provided with a vertical reinforcing member that extends in the vertical direction of the cover plate, A horizontal reinforcing member extending in the left-right lateral direction, and a part of the horizontal reinforcing member is disposed on the peripheral side of the cover plate from the vicinity of at least one of the automatic operation hole and the manual operation hole of the cover plate It is characterized by extending to the department.

The lid body of the lid body is formed in a substantially dish-shaped cross section, and a storage enclosure wall for the locking mechanism is formed therein, and the storage enclosure wall surrounds the rotary operation body of the locking mechanism. Formed from a plurality of arc walls and a plurality of straight walls extending from the plurality of arc walls in the direction of the peripheral wall of the lid body and sandwiching the advancing / retracting body of the locking mechanism;
An intrusion hole for a locking body of the locking mechanism can be provided on the peripheral wall of the lid body.

Further, the locking mechanism includes a guide reinforcing body that is attached to the advancing / retracting body and the locking body and restricts the operation of the locking body,
At the time of locking, the rotating operation body rotates in the locking direction to advance the forward / backward moving body in the direction of the peripheral wall of the lid body, and the locking body is guided by the guide reinforcement body from the lid body into the locking hole of the container body. The locking body that has entered the locking hole of the container body rotates in the thickness direction of the lid while being guided by the guide reinforcing body, and contacts the wall surface that defines the locking hole.
At the time of unlocking, the rotating operation body rotates in the unlocking direction to retract the advance / retreat body inward of the lid, and the locking body is guided by the guide reinforcing body in the thickness direction of the lid. The rotation body returns and leaves the wall surface of the locking hole, and the locking body separated from the wall surface of the locking hole is receded linearly from the locking hole of the container body into the lid body while being guided by the guide reinforcing body. it can.

  Further, the rotary operating body of the locking mechanism includes a rotatable key slot that is supported in the housing enclosure wall of the lid body and is operated from the outside of the cover plate, and an end of the forward / backward moving body provided at the peripheral edge of the key slot. It is also possible to form a deformation preventing portion for the advancing / retracting body in the cam groove portion.

Further, the advancing / retracting body of the locking mechanism is formed in a plate directed from the vicinity of the center of the lid toward the circumferential wall, and a support groove for the locking body is formed at the tip thereof, and guide reinforcing bodies are formed on both sides of the tip of the plate. Forming a guide groove for each, and forming a convex portion that fits into the cam groove portion of the rotary operating body at the end portion of the plate, and contacting the convex portion and the deformation preventing portion of the cam groove portion,
The lock body is bent into a substantially L-shaped cross section, and a support shaft is rotatably supported in the support groove of the advancing / retracting body in the vicinity of the bent portion, and one bent side of the lock body can be slid into the guide reinforcement body And the other bent side can be brought into and out of the locking hole of the container body, the first convex portions for the guide reinforcing body are formed on both sides of the distal end portion of the one bent side of the locking body, respectively, It is possible to form the 2nd convex part for a guide reinforcement body in the both sides of this bending side, respectively.

  It is also possible to provide a cam groove portion for advancing and retracting the advancing / retracting body on the rotary operation body of the locking mechanism, and to form a deformation preventing portion for preventing the cam groove portion from being deformed.

  Further, the guide reinforcing body of the locking mechanism is formed in a substantially U-shaped cross-section that can be fitted to the locking body, and the rotation allowance is rotatably fitted to the front end portion of one of the bent sides of the locking body. A recess is formed, and a positioning elastic member for the locking body is provided inside the guide reinforcement body so as to be adjacent to the rotation-permissible recess, and it is slidably fitted into the guide groove of the advance / retreat body on both sides of the rear portion of the guide reinforcement body. A slide groove is formed on each side wall of the guide reinforcement body so as to be slidably fitted to the first convex portion of the locking body, and the second convex portion of the locking body can be slid. It may be supported.

Furthermore, the vertical reinforcing member of the reinforcing body is brought into contact with a plurality of straight walls of the storage enclosure wall, and the horizontal reinforcing member of the reinforcing body is extended in a lateral direction from a substantially central portion of the cover plate; A circular arc portion formed on the linear portion and opposed to a plurality of arc walls of the storage enclosure wall, and the circular arc portion surrounds the automatic operation hole and the manual operation hole of the cover plate,
The vertical reinforcing member of the reinforcing body and the arc portion of the horizontal reinforcing member may be integrated.

  Here, the container main body in the claims can accommodate various substrates, for example, semiconductor wafers (for example, φ200, 300, 450 mm type), liquid crystal substrates, glass substrates, and the like. One or more cover plates of the lid can be attached to the open surface of the lid body.

  There is no particular limitation on the number of rotating operation bodies, advancement / retraction bodies, locking bodies, and guide reinforcing bodies of the locking mechanism. The number of the automatic operation holes and the manual operation holes may be one or may be increased to a plurality. Furthermore, the vertical reinforcing member and the horizontal reinforcing member of the reinforcing body can be combined into a cross shape, a key shape, a # shape, a lattice shape, or the like. The vertical reinforcing member and the horizontal reinforcing member can be increased or decreased or the shape can be changed as necessary. Examples of the vertical reinforcing member, the horizontal reinforcing member, the straight portion, and the arc portion include various protrusions and ribs.

  According to the present invention, the manual operation hole is not positioned in the left-right direction of the automatic operation hole of the cover plate, but the manual operation hole is positioned in the vertical direction of the automatic operation hole. It is rare to become. Accordingly, a part of the reinforcing body, for example, a horizontal reinforcing member can be provided in the lateral direction so that it can be continuously located between both sides of the cover plate, improving the strength and rigidity of the lid, and the lid on the container body. When the is fitted, deformation of the lid can be suppressed.

  According to the present invention, the reinforcing body can be provided in the horizontal direction, and there is an effect that the strength of the lid can be improved and the deformation thereof can be prevented. Specifically, the vertical reinforcing member of the reinforcing body suppresses the lid and its cover plate from warping in the vertical direction, and the horizontal reinforcing member suppresses deformation of the lid and the cover plate in the horizontal direction. Moreover, it is possible to effectively suppress the cover plate from being deformed from the vicinity of the automatic operation hole or the manual operation hole to the peripheral side portion by a part of the lateral reinforcing member.

  According to the second aspect of the present invention, the storage enclosure wall for the locking mechanism prevents the rotation operating body, the advancing / retracting body and the locking body of the locking mechanism from falling off, and smoothly guides these operations. The strength of can be improved.

According to the invention described in claim 3, it is possible to stabilize the locking by the locking mechanism and to eliminate the possibility of deformation and damage of the container body, the lid, and the locking mechanism.
According to the fourth aspect of the present invention, the vertical reinforcing member of the reinforcing body is in opposed contact with the straight wall of the storage enclosure wall, and the arc portion of the lateral reinforcing member is in contact with the arc wall of the storage enclosure wall. As a result, the strength of the storage wall can be expected to increase.

It is a whole perspective explanatory view showing typically an embodiment of a substrate storage container concerning the present invention. It is front explanatory drawing which shows typically embodiment of the substrate storage container which concerns on this invention. It is a longitudinal cross-sectional view of FIG. It is a perspective explanatory view showing typically the lid body of the lid in the embodiment of the substrate storage container concerning the present invention. It is front explanatory drawing which shows typically the cover main body and locking mechanism in embodiment of the substrate storage container which concerns on this invention. It is front explanatory drawing which shows typically the cover plate in embodiment of the substrate storage container which concerns on this invention. It is a perspective explanatory view showing typically a cover plate and a reinforcement in an embodiment of a substrate storage container concerning the present invention. It is explanatory drawing which shows typically the cover plate and reinforcement body in embodiment of the board | substrate storage container which concerns on this invention. It is a perspective explanatory view showing typically the locking mechanism in the embodiment of the substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the locking mechanism in the embodiment of the substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the rotation operation reel of the locking mechanism and a part of the advance / retreat link in the embodiment of the substrate storage container according to the present invention. It is a perspective explanatory view showing typically an advancing / retreating link and locking latch of a locking mechanism in an embodiment of a substrate storage container concerning the present invention. It is a perspective explanatory view showing typically an advancing / retreating link of a locking mechanism in an embodiment of a substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the locking latch of the locking mechanism in the embodiment of the substrate storage container according to the present invention. It is a perspective explanatory view showing typically the guidance reinforcement block of the locking mechanism in the embodiment of the substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the inside of a guide reinforcement block of a locking mechanism in an embodiment of a substrate storage container concerning the present invention. It is front explanatory drawing which shows typically the locking state of the locking mechanism in embodiment of the board | substrate storage container which concerns on this invention. It is a partial section explanatory view showing typically the locking state of the locking mechanism in the embodiment of the substrate storage container concerning the present invention.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. As shown in FIGS. 1 to 18, the substrate storage container in the present embodiment is arranged on an open front surface 5 of a container body 1 for aligning and storing semiconductor wafers. The lid body 10 includes a lid body 10 to be fitted, and a locking mechanism 30 that locks the lid body 10, and the lid body 10 is fitted to the front surface 5 opened of the container body 1. The cover plate 19 covers the open surface of the cover 10, and the cover plate 19 of the lid body 10 has a plurality of automatic operation holes 20 and a plurality of manual operation holes 21 for the rotation operation reel 31 of the locking mechanism 30. Then, a plurality of manual operation holes 21 are positioned in the vertical direction of each automatic operation hole 20, and the reinforcing bodies 70 are provided vertically and horizontally on the cover plate 19 of the lid body 10 using the positions of the plurality of manual operation holes 21. I have to

  The semiconductor wafer is not particularly limited. For example, from the viewpoint of increasing the memory capacity, reducing the chip size accompanying the reduction of the minimum processing line width formed in the semiconductor component, and improving the productivity, the thickness of φ450 mm is thin. A brittle and easily warped silicon wafer is used.

  The container main body 1 and the lid body 10 are each composed of a combination of a plurality of parts, each of which is injection-molded with a molding material containing a required resin. Examples of the required resin for the molding material include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyether ketone, polybutylene terephthalate, polyether ether ketone, and liquid crystal polymer, and alloys thereof. When it is desired to ensure conductivity, a conductive material such as carbon fiber, carbon powder, carbon nanotube, or conductive polymer is added to these thermoplastic resins as necessary.

  As shown in FIGS. 1 to 3, the container body 1 is formed into a front open box type in which the front surface 5 is opened horizontally, and the lid attached to the semiconductor processing apparatus with the opened front surface 5 oriented in the horizontal horizontal direction. It is positioned and mounted on the body opening / closing device, or washed with a washing liquid in a washing tank. The container body 1 is provided with a pair of left and right support pieces 2 for supporting the semiconductor wafer substantially horizontally on the inner sides of the container body 1, in other words, on the inner surfaces of the side walls 9. The support pieces 2 are formed in a long and narrow arc-shaped plate that supports the peripheral side portion of the semiconductor wafer.

  Positioning tools for positioning the container body 1 are disposed on both sides of the front part and the center of the rear part of the bottom plate of the container body 1. Further, a separate bottom plate 3 is screwed horizontally to the bottom plate of the container body 1 via a screw tool, and a plurality of positioning tools are respectively exposed from the bottom plate 3. At the center of the top plate of the container main body 1, a transport top flange 4 gripped by a factory ceiling transport mechanism is detachably mounted.

  A peripheral portion of the front surface 5 of the container body 1 is formed to bulge through a holding rib on a rim flange 6 which is bent outward and extends, and a detachable lid body 10 is formed in the rim flange 6 by a lid body opening / closing device. Fit and lock. Locking holes 7 for the locking mechanism 30 are formed in the inner periphery of the front surface 5 of the container body 1, in other words, on both the upper and lower sides of the inner peripheral surface of the rim flange 6, and each locking hole 7 is rectangular. The wall surface that is partitioned into a shape and is closest to the outside is the front side wall surface 8.

  The rear surface of the inner surface of both side walls 9 of the container body 1, specifically, the position located near the rear portion of the support piece 2 is the surface of the support piece 2 when the lid 10 is fitted to the front surface 5 of the container body 1. It contacts both sides of the periphery of the semiconductor wafer that has floated from the surface to effectively regulate the position of the semiconductor wafer and prevent rattling.

  As shown in FIGS. 1 to 8, 10, and the like, the lid body 10 has a front rectangular lid body 11 fitted to the opened front face 5 of the container body 1, and an open surface of the lid body 11. And a separate cover plate 19 covered with screws or the like. The lid body 11 is formed in a substantially dish-shaped cross section, and its four corners are rounded and chamfered, and locking mechanisms 30 are disposed on both sides of the lid body 11 and a storage enclosure wall 12 for the locking mechanism 30 is defined. .

  The storage wall 12 is provided in the center of both sides of the lid body 11 and is opposed to each other with a pair of left and right arc ribs 13 facing each other at an interval, and from the ends of the pair of arc ribs 13 toward the circumferential wall of the lid body 10. Specifically, it is formed of a pair of left and right linear ribs 14 extending linearly in the vertical direction, and functions to improve the strength and rigidity of the lid body 11 in addition to positioning and storing the locking mechanism 30.

  A split structure support rib 15 and a pair of left and right alignment blocks 16 are disposed between the pair of arc ribs 13, and the alignment blocks 16 are disposed on both the left and right sides of the support rib 15 at intervals. (See FIG. 10). Each alignment block 16 is formed in a pin shape, a block shape, or the like as necessary. A plurality of guide bosses 17 are arranged at intervals in the longitudinal direction between the pair of linear ribs 14, and each guide boss 17 is formed in a substantially cylindrical shape so that a rotatable roller for reducing friction is selected. Fitted.

  The upper and lower sides of the peripheral wall of the lid body 11 are respectively provided with recesses 18 that face the locking holes 7 of the container body 1, and the recesses 18 communicate with the open ends between the pair of linear ribs 14. To do. Further, a front retainer that elastically presses and clamps the front edge of the semiconductor wafer housed in the container body 1 with an elastic piece is attached to the back surface of the lid body 11. A frame-shaped gasket that is deformed by being pressed against the inner periphery of the front surface 5 of the container body 1 is tightly fitted. This gasket is molded using, for example, a polyester-based, polystyrene-based, or polyolefin-based thermoplastic elastomer having excellent weather resistance, electrical insulation, compression characteristics, and the like.

  The cover plate 19 is formed in a substantially rectangular shape with four corners rounded and chamfered, and an automatic operation hole 20 for the rotation operation reel 31 of the locking mechanism 30 and a pair of upper and lower manual operation holes 21 are formed near the center of both sides. Each is perforated. The automatic operation hole 20 is formed in a front rectangular shape and is positioned with a space between a pair of upper and lower manual operation holes 21, and each manual operation hole 21 is formed in a substantially fan-shaped front surface.

  As shown in FIGS. 3, 5, 9 to 18, and the like, the locking mechanism 30 includes a pair of left and right rotation operation reels 31 that are arranged in the housing enclosure wall 12 of the lid 10 and rotate by an external operation. A plurality of forward / backward links 38 that move forward / backward in the vertical direction of the lid 10 by the rotation of each rotary operation reel 31, and the locking holes 7 on the inner periphery of the front surface 5 of the container body 1 by the forward / backward movement of the forward / backward links 38 A plurality of locking latches 45 to be separated, and a plurality of guide reinforcing blocks 51 which are attached to the distal end portions of the respective advance / retreat links 38 and the locking latches 45 to restrict the operation of the locking latches 45, and deviate from the SEMI standard. Configured not to. Each component of the locking mechanism 30 is molded using, for example, polybutylene terephthalate or polyacetal.

  As shown in FIGS. 5, 9 to 11, and the like, each rotation operation reel 31 is surrounded by the arc rib 13 of the storage enclosure wall 12 with a gap and is operated from the automatic operation hole 20 of the cover plate 19. A key slot 32 is provided, and a pair of cam groove portions 33 connected to the distal end portion of the advance / retreat link 38 are eccentrically provided at a part of the peripheral portion of the key slot 32. A pair of hollow manual operation portions 34 that are operated by a finger from the manual operation hole 21 of the cover plate 19 are provided in the remaining portion of the cover plate 19.

  The key slot 32 is formed in, for example, a cylindrical shape having a substantially U-shaped cross section that is rotatably fitted and supported by the support rib 15 in the storage enclosure wall 12, and a long and narrow key groove 35 is formed in the surface. An operation key of the lid opening / closing device that passes through the automatic operation hole 20 of the cover plate 19 is inserted into the groove 35.

  Each cam groove portion 33 is formed in a substantially arc shape, and a deformation prevention rib 36 that is a deformation prevention portion for the advance / retreat link 38 is integrally formed in the vicinity of the inner peripheral side in the front-back direction. On the outer peripheral side of the cam groove portion 33, a flexible interference piece 37 that interferes with the alignment block 16 in the storage enclosure wall 12 is bent and integrally formed, and this interference piece 37 is either inside or outside the alignment block 16. By being opposed to each other in this direction, excessive rotation of the rotary operation reel 31 is restricted. The deformation prevention rib 36 is integrally formed in the height direction of the key slot 32 and functions to suppress and prevent deformation of at least the cam groove portion 33.

  As shown in FIGS. 9 to 13 and the like, each forward / backward link 38 is sandwiched between the pair of linear ribs 14 of the storage enclosure wall 12 through a gap and is a long rectangular portion that is directed from the vicinity of the center of the lid 10 toward the peripheral wall. A plurality of long holes 39 are formed on the center line in the longitudinal direction at intervals, and each long hole 39 is slidably fitted to the guide boss 17 of the storage wall 12 and moved. Regulate the amount. Between these long holes 39 and the guide bosses 17, rollers, bearings and the like that reduce friction and resistance are selectively interposed.

  A substantially L-shaped receiving claw 40 is formed on both sides of the front and rear ends of the concave and convex portions of the advance / retreat link 38, and substantially L-shaped extending in the longitudinal direction on both side surfaces near the front end portion of the advance / retreat link 38. The plurality of receiving pieces 40 are integrally formed, and the plurality of receiving claws 40 and the tip end portions of the dividing pieces 41 form a support groove 42 for the locking latch 45. A guide groove 43 for the guide reinforcing block 51 is formed in the longitudinal direction between the side surface of the forward / backward link 38 near the tip and the partition piece 41.

  A cylindrical connecting pin 44 protrudes from the narrowed end portion of the advance / retreat link 38. The connecting pin 44 is slidably fitted into the cam groove portion 33 of the rotary operation reel 31 from the back side, and the rotary operation reel. It functions to convert 31 rotational motion into linear motion. The peripheral surface of the connecting pin 44 is in sliding contact with the deformation preventing rib 36 of the cam groove 33, and transmits a load acting on the locking latch 45 during locking to the deformation preventing rib 36 (see FIG. 11). By this transmission, the deformation preventing rib 36 suppresses and prevents the bending of the advance / retreat link 38 during locking.

  Each of the locking latches 45 is formed in a plate bent in a substantially L-shaped cross section as shown in FIGS. 9, 10, 12, 14, etc., and the forward / backward link 38 is located near the bent portion on the back side of the uneven surface. A support shaft 46 that is rotatably fitted and supported in the support groove 42 is integrally formed. The support shaft 46 linearly protrudes and retracts from the retracting hole 18 of the lid body 10 and swings into the locking hole 7 of the container body 1 to be pressed. To do.

  The distal end portion of one bent side 47 of the locking latch 45 is curved and formed in a substantially cylindrical shape, and first convex portions 48 for the guide reinforcement block 51 are integrally formed in a cylindrical shape on both sides of the distal end portion. In addition, second convex portions 50 for the guide reinforcing block 51 are formed on both side surfaces of the other bent side 49 so as to protrude in a columnar shape. Of the pair of bent sides 47, 49 of the locking latch 45, one bent side 47 slidably contacts the guide reinforcing block 51, and the other tapered bent side 49 protrudes from the front portion of the guide reinforcing block 51. It protrudes into the locking hole 7 of the container main body 1 and press-contacts (refer FIG.5, FIG.9, FIG.10).

  When the locking mechanism 30 is locked, the locking latch 45 moves forward from the rear of the guide reinforcing block 51 as the advance / retreat link 38 advances, and can swing when the advancement is restricted (see FIG. 9 and FIG. 10), and when the locking mechanism 30 is unlocked, it swings as the advance / retreat link 38 moves backward, and when it returns to its original position, the guide reinforcing block 51 moves backward from the front.

  As shown in FIGS. 9, 10, 15, 16 and the like, each guide reinforcing block 51 is formed in a substantially U-shaped cross section in which side walls 57 are respectively disposed on both sides of a flat bottom plate 52. A plurality of positioning elastic members 54 for the locking latch 45 are juxtaposed in the left-right direction on the bottom plate 52, and are slidably fitted to the distal end portion of the forward / backward link 38 and the locking latch 45, respectively, and a pair of linear ribs 14 is sandwiched between the end portions of 14 and is located in the vicinity of the intrusion hole 18 of the lid body 10, and contacts the cover plate 19 of the lid body 10.

  In front of the inner surface of the bottom plate 52, a rocking allowance groove 53 having a substantially semi-cylindrical cross section is formed in the left-right direction, and one bending side 47 of the locking latch 45 over the positioning elastic member 54 passes over the rocking allowance groove 53. The tip portion is fitted and can be rotated. Each positioning elastic member 54 is made of, for example, an elastically deformable leaf spring or elastomer that is formed by cutting out a part of the bottom plate 52, and is provided from the center to the rear of the bottom plate 52, adjacent to the rocking allowance groove 53, and rocking. The distal end portion of one bent side 47 fitted in the movement allowing groove 53 is positioned, and the locking latch 45 is allowed to swing around the distal end portion of the one bent side 47.

  On both sides of the rear portion of the bottom plate 52, elongated pieces 55 that are slidably fitted in the guide grooves 43 of the advance / retreat link 38 are bent into a substantially L shape, and each elongated piece 55 is formed near the end of the partition piece 41. Lock it so that it can come in and out. A locking notch 56 for elastically locking to the lid main body 11 of the lid 10 is formed in the vicinity of the bent portion of the elongated piece 55.

  Both side walls 57 of the guide reinforcement block 51 are respectively pierced in the front-rear direction by slide grooves 58 that are slidably fitted to the first protrusions 48 of the locking latch 45. The second convex portions 50 are slidably supported. Each slide groove 58 is formed in an oval shape extending in the front-rear direction of the guide reinforcing block 51, and the tip end portion is formed integrally with the end of the swing allowable groove 53 of the bottom plate 52 so as to have a larger diameter. When the first convex portion 48 of the locking latch 45 comes into contact with the portion, the linear slide of the locking latch 45 is restricted, and the locking latch 45 can swing only in the thickness direction of the lid body 10. Become.

  Between the front portions of the side walls 57 of the guide reinforcement block 51, a front wall 59 that restricts excessive sliding of the locking latch 45 adjacent to the rocking allowance groove 53 of the bottom plate 52 is installed lower than the side wall 57. A plate-shaped receiving flange 60 is formed on the outer surface of each side wall 57 so as to slidably contact the partition piece 41 of the forward / backward link 38, and the extending piece 55 is integrated with the rear portion of each side wall 57.

  Such a guide reinforcing block 51 is relatively close to the tip of the advance / retreat link 38 when the lock mechanism 30 is locked, and advances and retracts link when the lock mechanism 30 is unlocked. As the cover 38 moves backward, it moves away from the tip of the advance / retreat link 38 relatively.

  As shown in FIGS. 1, 7, and 8, the reinforcing body 70 extends horizontally in the horizontal direction of the cover plate 19 and a plurality of vertical reinforcing members 71 that linearly extend in the vertical direction of the cover plate 19. The horizontal reinforcing member 73 is provided, and the plurality of vertical reinforcing members 71 and the horizontal reinforcing member 73 are disposed on the opposite back surface of the cover plate 19 facing the inside of the lid main body 11. It functions to improve and prevent its deformation.

  The plurality of vertical reinforcing members 71 and the horizontal reinforcing members 73 are combined vertically and horizontally in consideration of the positions of the storage enclosure wall 12 and the locking mechanism 30 to form a substantially square shape, and a part of the horizontal reinforcing member 73 is a cover plate. The automatic operation holes 20 and the manual operation holes 21 are extended from the vicinity of the 19 automatic operation holes 20 and the manual operation holes 21 so as to align with the side portions of the cover plate 19.

  Each vertical reinforcing member 71 is composed of a pair of vertical reinforcing ribs facing each other at an interval. The pair of vertical reinforcing ribs are formed in a shape similar to the linear rib 14 of the storage enclosure wall 12, and It is in opposing contact and prevents the lid 10 from curving in a vertical direction as a vertical reinforcing member. A plurality of opposed bosses 72 arranged in the longitudinal direction are arranged between the pair of longitudinal reinforcing ribs, and each opposed boss 72 is formed in a cylindrical shape and is screwed to face the guide boss 17 between the pair of linear ribs 14. Is done.

  The lateral reinforcement member 73 is composed of a pair of lateral reinforcement ribs facing each other at an interval, and is continuously located between both side portions of the cover plate 19, and the lid 10 is bowed in the left-right direction as a lateral reinforcement member. Control. The lateral reinforcement member 73 is formed on a straight portion 74 extending horizontally in the horizontal direction from the substantially central portion of the cover plate 19, and integrally formed on both sides of the linear portion 74, and is formed on the plurality of arc ribs 13 of the storage enclosure wall 12. It is formed from a pair of left and right circular arc portions 75 that face each other. Each arc portion 75 surrounds the automatic operation hole 20 and the manual operation hole 21 and is integrated with an end portion of the vertical reinforcing member 71 positioned in the vertical direction.

  In such a lateral reinforcing member 73, the end of the straight portion 74 and the circular arc portion 75 are continuously extended from the periphery of the automatic operation hole 20 and the manual operation hole 21 of the cover plate 19 to the peripheral side portion of the cover plate 19. .

  In the above configuration, when the lid body 10 is fitted to the container body 1 containing the semiconductor wafer and locked by the locking mechanism 30, the lid body 10 is shallowly fitted into the front surface 5 of the container body 1 to cover the cover plate 19. The key groove that protrudes slightly to the outside, and then inserts the operation key of the lid opening / closing device into each automatic operation hole 20 of the lid 10, and points in the lateral direction of each rotary operation reel 31 of the locking mechanism 30. The operation key of the lid opening / closing device is inserted into 35 and gradually rotated counterclockwise, that is, in the locking direction.

  Then, each rotation operation reel 31 of the locking mechanism 30 is gradually rotated in the locking direction to advance the forward / backward link 38 in the direction of the peripheral wall of the lid 10, and the front end portion of each forward / backward link 38 and the guide reinforcing block 51 are connected. The locking latches 45 approach each other and relatively advance in the direction of the peripheral wall of the lid 10, and the other bent side 49 of each locking latch 45 protrudes from the intrusion hole 18 of the lid 10 to enter the locking hole 7 of the container body 1. Project linearly.

  At this time, the locking latch 45 is linearly guided to the surfaces of the slide groove 58 and both side walls 57 of the guide reinforcing block 51, and one bent side 47 is formed on the inner surface of the bottom plate 52 of the guide reinforcing block 51 and the plurality of positioning elastic members 54. Slidably contact and advance relatively in the direction of the front wall 59 of the guide reinforcement block 51. Therefore, the locking latch 45 slides linearly in a state where the swinging of the lid body 10 in the thickness direction is restricted.

  The other bent side 49 of the locking latch 45 projects linearly into the locking hole 7 of the container body 1, and the one bent side 47 of the locking latch 45 gets over the positioning elastic member 54 and fits into the swing allowable groove 53. When the locking latch 45 is in a swingable state for the first time, the linear slide of the locking latch 45 is restricted, and the locking latch 45 draws an arc around the tip of the one bent side 47 while drawing an arc. Swings in the thickness direction.

  Then, the other bent side 49 of the locking latch 45 is brought into rocking contact with the front side wall surface 8 that defines the locking hole 7, and the lid body 10 is gradually drawn into the front surface 5 of the container body 1. 45 is finally firmly inserted and locked, and the lid 10 is completely tightly fitted, so that the lid 10 can be fitted to the front surface 5 of the container body 1 and locked by the locking mechanism 30.

  At this time, a strong load acts on the other bent side 49 of the locking latch 45, but the rotary operation reel 31 and the locking latch 45 are stretched against each other via the forward / backward link 38, and are opposite in the height direction of the lid 10. Since the force acts, deformation of the lid 10 in the thickness direction is effectively prevented.

  Further, if a strong load is applied to the other bent side 49 of the locking latch 45, the forward / backward link 38 may be bowed in the thickness direction of the lid 10, but the deformation preventing rib 36 of the rotary operation reel 31 is not formed. Since a strong load acting on the locking latch 45 and a stress generated on the connecting pin 44 are received, the load can be applied linearly from the rotary operation reel 31 to the locking latch 45. Accordingly, the advance / retreat link 38 does not bow in the thickness direction of the lid 10.

  In addition, because the front retainer is in pressure contact with the front edge of the semiconductor wafer, the lid body 10 tends to bend in a bow shape, but the reinforcing body 70 reinforces the lid body 10 vertically and horizontally to increase rigidity. The lid 10 is not bent and properly fitted to the front surface 5 of the container body 1 that is opened, and particles do not enter the inside of the container body 1 from inside to contaminate the semiconductor wafer.

  Next, when the locked locking mechanism 30 is unlocked and the lid 10 fitted to the front surface 5 of the container body 1 is removed, the operation key of the lid opening / closing device is inserted into each automatic operation hole 20 of the lid 10. The operation key of the lid opening / closing device is inserted into the key groove 35 directed to the vertical direction of each rotary operation reel 31 and is gradually rotated in the clockwise direction, that is, the unlocking direction.

  Then, each rotation operation reel 31 of the locking mechanism 30 is gradually rotated in the unlocking direction to retract the advance / retreat link 38 to the original position, and the distal end portion of each advance / retreat link 38 and the guide reinforcement block 51 mutually. The locking latch 45 moves away from the original position relative to the original position, and the other bent side 49 of the locking latch 45 swings away from the front side wall surface 8 of the locking hole 7. At this time, one bent side 47 of the locking latch 45 interferes with the end portion of the positioning elastic member 54, and thus swings in a state of being fitted in the swing allowance groove 53 of the bottom plate 52 without being displaced. .

  When the other bent side 49 of the locking latch 45 moves away from the front side wall surface 8 of the locking hole 7 and returns to the original position in the thickness direction of the lid body 10, the one bent side 47 of the locking latch 45 swings. The positioning elastic member 54 is passed from the permissible groove 53 and slid to the rear of the bottom plate 52, and the other bent side 49 of the upright locking latch 45 is straight from the locking hole 7 of the container body 1 into the protrusion / retraction hole 18 of the lid 10. By retreating, the lid body 10 fitted to the front surface 5 of the container body 1 becomes removable.

  According to the above configuration, the pair of manual operation holes 21 is not positioned in the left-right direction of each automatic operation hole 20 but the pair of manual operation holes 21 is positioned in the vertical direction of each automatic operation hole 20. The operation hole 21 does not hinder the installation of the reinforcing body 70. Accordingly, the lateral reinforcing member 73 of the reinforcing body 70 can be extended in the left-right lateral direction so as to be continuously located between the both side portions of the cover plate 19, and the strength and rigidity of the lid body 10 can be remarkably improved. The deformation of the lid body 10 when the lid body 5 is fitted to 1 can be sufficiently prevented.

  Further, the locking latch 45 is not projected and swung simultaneously, but after the locking latch 45 is sufficiently inserted into the locking hole 7 of the container body 1, the other side of the locking latch 45 is placed on the front side wall surface 8 of the locking hole 7. Since the lid body 10 is gradually drawn into the front surface 5 of the container body 1 for the first time, the contact force of the locking latch 45 with respect to the locking hole 7 is increased compared to the prior art, and the lid body 10 is sufficiently It can be pulled in, and the locking by the locking mechanism 30 can be stabilized, and the locking hole 7 of the container body 1 and the locking latch 45 of the locking mechanism 30 can be effectively prevented from being damaged. In particular, it is possible to effectively prevent the rim flange 6 of the container body 1 from spreading outward and being damaged.

  Further, since the lid body 10 can be sufficiently pulled in, the lid body 10 that receives the reaction force of the front retainer can be fitted to the container body 1 with high accuracy. Further, since the locking latch 45 and the guide reinforcement block 51 exist in the vicinity of the intrusion hole 18 of the lid body 10, the strength in the vicinity of the intrusion hole 18 of the lid body 10 can be ensured, and a large locking force acts when locking. Even so, it is possible to eliminate the possibility that the lid 10 and the forward / backward link 38 of the locking mechanism 30 will be deformed. Therefore, a safe and reliable operation of the locking mechanism 30 can be greatly expected.

  Further, the locking latch 45 or the like need not be elongated longer than the conventional one, and can be formed small and short to ensure rigidity. Therefore, even if a large locking force is applied during locking, the advance / retreat link 38 and the locking link There is no possibility that the latch 45 is easily deformed. Therefore, it is not necessary to prevent the deformation by forming the locking latch 45 and the like thick, and it is possible to prevent the pulling stroke amount of the locking latch 45 from being reduced.

  In the above embodiment, the deformation preventing rib 36 is integrally formed with the cam groove portion 33 of the locking mechanism 30. However, the present invention is not limited to this. For example, the deformation preventing rib 36 may be given elasticity to improve the drop resistance of the substrate storage container. Moreover, the cam groove part 33 may be penetrated and the recessed part which has not penetrated may be sufficient. In addition, a pair of manual operation portions 34 may be provided in the partial thickness direction of the peripheral edge portion of the key slot 32. Furthermore, a roller that reduces the generation of particles can be rotatably supported at the tip of the other bent side 49 of the locking latch 45.

  The substrate storage container according to the present invention can be used in fields such as electricity, electronics, semiconductors, and liquid crystals.

1 Container body 5 Front (opening)
6 Rim flange 7 Locking hole 8 Front side wall (wall surface)
10 Lid 11 Lid Main Body 12 Enclosure Wall 13 Arc Rib (Arc Wall)
14 Straight rib (straight wall)
18 In / out hole 19 Cover plate 20 Automatic operation hole 21 Manual operation hole 30 Locking mechanism 31 Rotation operation reel (rotation operation body)
32 Key slot 33 Cam groove part 34 Manual operation part 35 Key groove 36 Deformation prevention rib 38 Advance / retreat link (advance / retreat body)
44 Connecting pin 45 Locking latch (locking body)
51 Guide reinforcement block (guide reinforcement body)
70 Reinforcing body 71 Vertical reinforcing member (Vertical reinforcing member)
73 Lateral reinforcement member (transverse reinforcement member)
74 Straight part 75 Arc part

Claims (4)

A substrate storage container comprising a lid fitted to the opening of the container body and a locking mechanism for locking the lid fitted to the container body,
The lid includes a lid body fitted into the opening of the container body, and a cover plate for closing the opening of the lid body. The cover plate includes an automatic operation hole and a manual operation hole for the locking mechanism. And place the manual operation hole in the vertical direction of the automatic operation hole,
The locking mechanism includes a rotary operation body that is rotatably supported by the lid body of the lid body, an advancing / retracting body that moves forward / backward by the rotary operation body, and an inner periphery of the opening of the container body by the forward / backward movement of the forward / backward moving body. Including a locking body that comes into contact with and leaves the locking hole,
A reinforcing body that reinforces the lid body is provided on at least a surface of the lid body that faces the lid body of the cover plate, and the reinforcing body is provided with a vertical reinforcing member that extends in the vertical direction of the cover plate, A horizontal reinforcing member extending in the left-right lateral direction, and a part of the horizontal reinforcing member is disposed on the peripheral side of the cover plate from the vicinity of at least one of the automatic operation hole and the manual operation hole of the cover plate A substrate storage container characterized by being extended to a portion. The lid body of the lid body is formed in a substantially dish-shaped cross section, and a storage enclosure wall for the locking mechanism is formed therein, and the storage enclosure wall includes a plurality of rotary operation bodies surrounding the locking mechanism. Formed from an arc wall and a plurality of straight walls extending from the plurality of arc walls in the direction of the peripheral wall of the lid body and sandwiching the advancing / retracting body of the locking mechanism;
The substrate storage container according to claim 1, wherein an intrusion hole for a locking body of the locking mechanism is provided in a peripheral wall of the lid body. The locking mechanism includes a guide reinforcing body that is attached to the advancing / retracting body and the locking body and restricts the operation of the locking body,
At the time of locking, the rotating operation body rotates in the locking direction to advance the forward / backward moving body in the direction of the peripheral wall of the lid body, and the locking body is guided by the guide reinforcement body from the lid body into the locking hole of the container body. The locking body that has entered the locking hole of the container body rotates in the thickness direction of the lid while being guided by the guide reinforcing body, and contacts the wall surface that defines the locking hole.
At the time of unlocking, the rotating operation body rotates in the unlocking direction to retract the advance / retreat body inward of the lid, and the locking body is guided by the guide reinforcing body in the thickness direction of the lid. The rotary body is recovered from rotation and separated from the wall surface of the locking hole, and the locking body separated from the wall surface of the locking hole recedes linearly from the locking hole of the container body into the lid body while being guided by the guide reinforcing body. The substrate storage container according to 1 or 2. The vertical reinforcing member of the reinforcing body is brought into contact with a plurality of linear walls of the storage enclosure wall, and the horizontal reinforcing member of the reinforcing body is extended in a horizontal direction from a substantially central portion of the cover plate, Formed from a circular arc portion that is opposed to and contacts a plurality of arc walls of the storage enclosure wall, and the circular arc portion surrounds the automatic operation hole and the manual operation hole of the cover plate,
The substrate storage container according to claim 2 or 3, wherein the longitudinal reinforcing member of the reinforcing body and the arc portion of the lateral reinforcing member are integrated.

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