KR101295231B1 - Hermetically sealed container for large-sized precision sheet (semi-)product - Google Patents

Abstract

To house and support precision sheet-like (semi-) products, such as photomasks, which have a large planar dimension which is extremely difficult to form integral resins of the half body of the container, in a safe and unstressed manner. A relatively lightweight and generally resin sealed container for conveying is provided. The container includes a body portion and a lid portion having a generally symmetrical structure, each having a seal periphery which abuts against each other. Each of the main body portion and the lid portion includes a plurality of resin plates arranged on the same plane and abutting each other at an intermediate bonding boundary portion to be bonded to each other. A reinforcing metal belt member is disposed from the outside along the joining boundary and bolted to the resin plate in a sealing manner.

Sealed container, photo mask, precision sheet-shaped (semi) product, seal periphery, main body, cover, resin plate, reinforcing metal belt member

Description

HERMETICALLY SEALED CONTAINER FOR LARGE-SIZED PRECISION SHEET (SEMI-) PRODUCT}

1 is a plan view of an embodiment of a large precision sheet-like (semi) product according to the present invention.

Fig. 2 is a front view of the container as seen in the II-II direction of Fig. 1.

3 and 4 are partial cross-sectional views taken along lines III-III and IV-IV of FIG. 1.

Fig. 5 is a schematic perspective view of a main body portion of an embodiment of a sealed container of the present invention for a larger, larger sheet-like (semi) product.

6 is an enlarged view of part VI of FIG. 5;

7 is a perspective view of the fixing support used in the embodiment of FIG.

Figure 8 is a side view of the clamp of the fixing support fell down.

9 is a side view of the conductive open state of the holding support.

10A, 10B and 10C are three side views showing the operation of the fixing support for holding and holding the (semi) product sheet.

11A and 11B are two side views showing the operation of another embodiment of the fixing support for holding and holding the (semi) product sheet.

The present invention provides a precision sheet shape including a photo mask (including a reticle) or a pericle as a protective film for such a photo mask, a semiconductor wafer related product, various display products including a liquid crystal display (LCD), and the like. (Semi) product, i.e., a semi-finished product prior to completion of a precision sheet-like product or a precision sheet-like product such as a (glass) substrate of a precision sheet-shaped product, in particular herein, at least 750 mm for at least one side and A container for accommodating two half bodies, each of which is suitably used for conveying a large precision sheet-like (semi) product having a planar dimension so large that integral resin molding is extremely difficult.

As described above, the precision sheet-like (semi) product is often mechanically weak, and the precision parts or members formed thereon are also more often weak. Furthermore, such a precision sheet-like (semi) product is extremely disliked of dust, particularly adhesive dust of 0.3 µm or less, due to the characteristics associated with its use, and therefore requires special attention to the sealing properties of the container. In particular, such a precision sheet-like (semi) product is often exported from Japan using an aircraft from abroad, and fine dust is easily introduced into the container by the air pressure difference between the inside of the aircraft (particularly a luggage compartment) and atmospheric pressure. In addition, since the adhesion of fine dust is not desired, the container body portion is formed of a foamed resin which is likely to generate fine dust due to friction as in general glass products (for example, Japanese Patent Application Laid-Open No. 2001-31165), or foaming. It is also not suitable to arrange the resin buffer in the container. Such precision sheet-shaped (semi) products, in particular display products or photo masks corresponding thereto, are accompanied by the demand for large-sized display, and in the case of photo mask products, final products such as display products are added thereto. In order to bake more than one at a time, the enlargement (large area) is inevitable. There are some new problems with this. That is, with the increase in size, the weight of the precision sheet-shaped (semi) product itself, which is the contents, also becomes 5-l0 kg, and in order to support the load, the stress caused by deformation of the container during the support is further reduced. In order not to fall short of the product, considerable strength is required of the container itself. However, if the container is formed of a metal material according to the conventional method, it becomes 40 kg or more and only 50 kg or more if the container is included in its contents alone, and its external dimensions also increase, making it difficult to convey by human hands. In addition, even if a container made of resin is formed to reduce the weight of the container, a container for a large precision sheet-shaped (semi) product having at least one side of the precision sheet-shaped (semi) product having a large dimension of 750 mm or more is half the body. The resin molding method using a metal mold | die which makes it possible to shape | mold such a large half body, even if it forms by the combination of these, is not developed until now. Moreover, when accommodating a precision sheet-like (semi) product in a container, it is necessary to support so that it may not contact with the other member in a container at least on one surface (surface in which the precision member is formed on it).

Therefore, the main object of the present invention is to provide a precision sheet-like (semi) product, such as a photomask, which has a large planar dimension such that integral resin molding of the half body of the container is extremely difficult, without improper stress. It is to provide a relatively lightweight and generally resin-sealed container that can be safely received and supported.

According to a study by the inventors for achieving the above object, a container joined to the above object can be formed by adopting a structure in which a plurality of resin plates arranged in parallel in the same plane are combined to secure an appropriate reinforcing and sealing structure. It was found that it could. More specifically, according to the present invention, a sealed container for a large precision sheet-like (semi) product including a main body portion and a cover portion which are symmetrical to each other, and each of the main body portion and the cover portion has a seal periphery which comes into contact with each other. Each of the main body portion and the lid portion includes a plurality of resin plates arranged in the same plane and joined to each other at an intermediate bonding boundary portion, and along the bonding boundary portion, a metal belt member for reinforcement from the outside. Is arranged and bolted to the resin plate in a sealing manner, there is provided a container.

These and other objects, features and advantages of the present invention will become more apparent upon consideration of the following detailed description of the preferred embodiments of the present invention with reference to the accompanying drawings.

(Best Mode for Carrying Out the Invention)

1 is a liquid crystal display (LCD) formed on a substantially rectangular quartz substrate having dimensions of a precision sheet-shaped (semi) product (in this embodiment, a dimension of about 1200 mm x 1200 mm x 5 mm thick). Photomasks, hereinafter referred to as "semi-finished product sheets", which contain a precision sheet-like (semi-finished) product at a position approximately parallel to the joint surface between the body and the sealing periphery of the lid It is a top view of the container A (outer dimension is about 1300 mm x about 1300 mm x depth about 100 mm) of the structural form to become. 2 is a front view seen from the II-II direction, and FIG. 3 and FIG. 4 are partial sectional views along the III-III line and the IV-IV line, respectively. The container A is mutually with the lid part 11 mainly comprised by the ceiling board 1 which consists of two resin plates 1a and 1b joined together by the contact line (joint line) 1c of each other, and mutually. The main body part mainly comprised by the bottom plate 2 which consists of two sheets of resin plates 2a and 2b joined together by the contact line (bonding line) 2c (it is located in the lower part of 1c but not shown in particular) of ( 12). The lid part 11 and the main body part 12 are sealedly engaged with each other by the ratchet buckle lock 13 disposed at the surrounding 12 places to form a sealed container, and the (semi) product sheet B is formed therein. (Half) between the lid part 11 and the (semi) product sheet holding member of the main body part 12 in such a manner that both sides of the (semi) product sheet B do not substantially contact other members in the container. Product sheet B is retained (see FIG. 4).

The resin plates 1a and 1b are joined to each other at the contact ends of each other along the line 1c where the contact ends of the resin plates 1a and 1b abut each other, and as a metal belt member for reinforcement thereafter, An aluminum angle 5 having a width of about 40 mm, a thickness of about 20 mm, and a length of about 1300 mm is disposed, and is fixed to the resin plates 1a and 1b by two metal bolts 6 at four locations in the longitudinal direction. do. Thereafter, the backing resin plate 7 is joined to secure the sealability.

As shown in FIG. 4, along the periphery of the container A, the resin pieces (plates) 8a to 8h are mounted on the ceiling in order to support and fix the (semi) product sheet holding members 4a and 4b. Joined to the plate 1 and the bottom plate 2, the holding members 4a and 4b are supported and fixed to the resin plates (supporting portions) 8b and 8e by respective bolts 6a and 6b, respectively. Furthermore, on the main body 12 side, the splint board 8h is joined to the resin plates 8g, 8e and the like so as to protrude toward the ceiling plate 1, and thereafter, the resin plate 9b for forming a peripheral portion for sealing. This bonding is carried out, and the resin plate 9a is joined to the resin plate 8d etc. at the lid part 11 side, and the main body part 12 and the lid part 11 are formed.

Furthermore, along the left and right sides of the container A and along the centerline orthogonal to the reinforcing belt member 5, two divisions of the reinforcing metal belt members 5a and 5b are bolted and bonded respectively to the backing resin plates. It is fixed and reinforcing plates 10a and 10b are joined to both side walls of the container A. To the reinforcement boards 10a and 10b, the jig (recruitment member) 13a and 13b of the ratchet buckle lock 13 is fixed.

In the use of the container A, the (semi) product sheet B is set on the holding member 4b of the body part 12 positioned horizontally, and the 0 ring 14 is arranged so as to surround the splint board 8h. It arrange | positions, Then, the cover part 11 descends along the splint board 8h, and the 0 ring 14 is pinched | interposed between the lower end part and the upper end part of the sealing periphery resin plates 9a and 9b. In this state, the ratchet buckle lock 13 disposed along the periphery is closed to press the O-ring 14, thereby ensuring the sealing property between the main body portion and the lid portion. Moreover, in order to enhance sealing property, it is also preferable to attach an adhesive tape (not shown) to the outer side area | region S of the contact part between resin plates 9a and 9b. In addition to allowing the installation of the ratchet buckle locking jig 13a and 13b, the resin plates 10a and 10b also serve to provide a tape attachment area for improving the sealing property.

The holding member 4b on the main body side has a downward taper angle of about 5 ° with the (semi) product sheet contact sidewall 4ba having a height slightly smaller than the thickness of the (semi) product sheet B. It has a taper part 4bb. The holding member 4a on the lid portion side is different from the holding member 4b only in that there is no (semi) product sheet contact side wall and the upward taper portion 4ab is slightly longer than the downward taper portion 4bb. As a result of the presence of such tapered portions 4ab and 4bb, when the pressing force exerted by the ratchet buckle lock 13 acts on the retaining members 4a and 4b, the edge of the (semi) product sheet B is It moves slightly to the right from the position which contacts the side wall 4ba as shown in FIG. 4, and is hold | maintained in the position which leaves a gap (gap) from the side wall 4ba in a normal state. Such a structure for holding the (semi) product sheet (B) is such that the main two sides of the (semi) product sheet (B), in particular the surface supporting the precision member formed thereon, are in contact with and damaged by other members in the container. It is extremely preferable at the point which prevents. However, for example, when the container is placed vertically, it may be moved to a position in contact with the side wall 4ba as shown in FIG. Such slight contact can be tolerated without causing substantial damage to the (semi) product sheet (B). As shown in FIG. 1, a leg member 15 is disposed on the right side of the container to prevent damage to the buckle lock 13 when the container A is placed vertically. . Moreover, in each center area | region of the container 4 side, in order to reinforce a ceiling board and a bottom board in the position where the center buckle lock 13 is arrange | positioned, the resin board 16 of the material similar to resin piece 8a-8h. (And 17) are joined to the ceiling plate 1 (and bottom plate 2). 4 (although such a reinforcement plate does not exist at the position of the buckle lock 13 shown by the IV-IV line in FIG. 1), such resin reinforcement plates 16 and 17 are simply shown.

(material)

Supplementary explanation about the material of each part is given. (Semi) parts constituting the cover portion 11 and the main body portion 12 other than the product sheet holding members 4a and 4b and the bolts 6a and 6b, that is, the ceiling plate 1, the bottom plate 2, The backing resin plate 7 and the resin plates 8a to 8h, 9a and 9b are made of an arbitrary thermoplastic resin, but are made of an antistatic resin in order to avoid electrostatic adhesion of fine dust to the (semi) product sheet. desirable. Examples of known antistatic resins having permanent antistatic properties include: (a) hydrophilic polymer: 3 to 100 parts by weight, (b) thermoplastic resin: 0 to 97 parts by weight, (total amount with 100 parts by weight of (a)), And (c) divalent or higher metal salts: 0.001 to 0.5 parts by weight (WO-A 03/033590), and are also suitably used in the present invention. However, when extreme optical properties (prevention of blur) are not required, the addition of (c) divalent or more metal salts is not required. Among them, as the hydrophilic polymer (a), a mixture of an anionic surfactant with a graft copolymer containing a rubber-like interpolymer having an alkylene oxide group (JP-A 59-2462) is used. It is preferable to blend rigid thermoplastic resins such as polyacrylonitrile resins, polystyrene resins or polymethyl methacrylate resins to give a rigidity that does not easily give warp stress to the (semi) product sheet. . In this regard, in the above embodiment, an antistatic resin having a thickness of about 5 mm and 10% by weight of the hydrophilic polymer and 90% by weight of a polyacrylonitrile-based resin ("Barex210" made by BP Amoco) has a flexural modulus of 2 GPa. A plate is used to provide the members.

(Semi) The product sheet holding members 4a and 4b can be formed of the above antistatic resin. In this case, use of the bolts 6a and 6b can be omitted by joining the holding members 4a and 4b of the antistatic resin to the resin plates 8b and 8e.

The tapered supports 4ab and 4bb of the retaining members 4a and 4b because of a slight gap (gap) between the side wall 4ba of the retaining member 4b and the edge of the (semi) product sheet B as described above. A slight slip may occur between the edge of the and (semi) product sheet B. Therefore, more preferable is soft and slippery property which contains fluorine-type resins, such as polytetrafluoroethylene, and olefin resins, such as polyethylene or a polyacetal, rather than resin which comprises the top plate 1 or the bottom plate 2 It is good to use a good resin. In the above example, the holding members 4a and 4b made of polytetrafluoroethylene are used.

The reinforcement plates 10a, 10b, 16 and 17 may be any rigid body including metal because they do not directly participate in the sealability of the container. However, in order to reduce the weight of the whole container, it is preferable that it is made of resin, and for convenience of joining, it is preferable that it is made of resin plates (8d, 8e, etc.) and the same material.

Bonding between the resin plates 1a and 1b constituting the ceiling plate 1 and between the resin plates 2a and 2b constituting the bottom plate 2, bonding of these resin plates and the backing resin plate 7, Bonding between the ceiling plate 1 and the bottom plate 2 and the resin plates 8a to 8h, bonding the seal peripheral resin plates 9a and 9b, and further bonding to the reinforcement resin plates 10a and 10b. For this purpose, a separate adhesive resin may be used, but since there are few adhesive resins with good antistatic properties, local antistatic reduction by using these additional adhesive resins is likely to occur. Therefore, when said resin plate is comprised with antistatic resin, it is preferable to employ | adopt the solvent bonding which melt | dissolves an antistatic resin locally and joins using the favorable solvent of this antistatic resin. In this regard, in the above examples, it is confirmed that by using acetonitrile, which is a good solvent of polyacrylonitrile, a good joint having both high bonding strength and antistatic properties can be obtained. Since the reels are toxic, the joining work should be done with protective equipment in a well ventilated environment.)

The bolts 6 for fixing the reinforcing metal belt members 5, 5a, 5b to the ceiling plate 1 and the bottom plate 2, and the retaining members 4a, 4b are resin plates 8b, 8e, and the like. The bolts 6a and 6b for fixing to the metal may be made of metal or may be made of resin. In the case of using a resin bolt, fusion bonding of a resin bolt to the corresponding resin plate is also possible, and sealing sealing of the container is obtained by fusion bonding of the resin bolt. However, in order to obtain a container with better sealing property, by using the backing resin plate 7 and joining it to the ceiling plate 1 or the like, for example, the bonding strength and sealing between the resin plates 1a and 1b. It is desirable to improve the properties. As for the 0 ring 14 (refer FIG. 4), what consists of elastic resins, such as a fluororubber and silicone rubber, is used, and it is preferable that it becomes an antistatic elastic resin among these. The O-ring is not limited to a solid one (for example, a diameter of 8 mm) as shown, and it is also preferable to increase the deformation stroke as a hollow shape (for example, an inner diameter of 4 to 6 mm with respect to an outer diameter of 8 mm). Do.                     

(Other modifications)

In the above, a preferred embodiment of a horizontal container of a photo mask for a large liquid crystal display has been described. However, within the scope of the present invention, the container of the above embodiment can be variously modified. Various examples of such modifications are described below.

For example, in the above example, the ceiling plate 1 and the bottom plate 2 are obtained by joining each of two resin plates, but if necessary, in order to obtain a container with a larger area, each of the four joining structures is used. It is also possible.

In addition, the shape of the ratchet buckle lock 13 for the fixed engagement between the lid portion 11 and the main body portion 12 can be appropriately changed, and the number and the number of pairs of the holding members 4a and 4b (the above). In the example, three along each side and 12 in total) can be increased or decreased appropriately.

As the material of the reinforcing metal belt members 5 and 5a, an aluminum angle is used in the above example. It is also possible to use these.

In the above example, the conveyance state of the container accommodating the photomask having a weight of about 15 kg per se is about 26 kg and a large shape of about 1200 mm × 1200 mm, but it is 1 to 2 persons. It was possible to bring in and take out various vehicles including planes.

<Example of Larger Precision Sheet Shape (Semi) Product Container>                     

In the above, the example of the sealing container suitable for accommodating and conveying the (semi-) product sheet of about 750 mm or more at least one side was demonstrated. However, a larger and heavier (semi) product sheet, such as at least one side of about 1000 mm or more, for example, a glass sheet having a height of about 100 mm x about 2000 mm x thickness of about 15 mm, having a weight of about 50 kg or more. As for the above example, the (semi) product sheet is used in the X, Y, and Z directions (here, the (semi) product), rather than the structure in which the respective side walls of the main body and the cover are used for fixing the (semi) product sheet as in the above example. It is more preferable to use the structure which includes the fixing support which hold | maintains strongly in the vertical, horizontal, and thickness direction of a sheet | seat) at the bottom part of a main-body part side. FIG. 5: is a schematic perspective view of the main-body part AA of the container of this invention which provided such a fixed support at the bottom of a main-body part, FIG. 6 is an enlarged view of the B part of FIG.

5 and 6, in the main body AA, a zero ring receiving groove 52a is formed at the top of the resin side wall portion 52 whose lower portion is reinforced with the aluminum frame 51. And along the three sides on the bottom plate portion 53 surrounded by the side wall portion 52 (consisting of two resin plates joined together with a reinforcing metal belt member 5 extending along the central portion of the bottom plate portion 53). In the vicinity of the side wall, fixing supports (work locks) 54a, 54b, 54c are provided, respectively, and guide supports (corner work guides) of a pair of (semi) product sheets along two side walls near the other side ( 55a) is installed. Along the copper two side wall in the vicinity of the side where the fixing support 54b is provided, a guide support part (work guide) 55b of a pair of (semi) product sheets is provided, and further, the fixing support 54a, 54b, On the bottom plate 53 in the vicinity of 54c, the lower support part 55c of the (semi) product sheet is arrange | positioned. The support parts 55a, 55b, 55c are all made of resin, and a downward taper of about 5 ° is given toward the center of the bottom plate 53.

The fixed support (work lock) 54a, 54b, 54c applies a vertical (and horizontal) pressing force to a (semi) product sheet (not shown) located on the support 55a, 55b, 55c, (Semi) It has the function to fix and support the product sheet | seat in both of X, Y, and Z directions floatingly, and the whole perspective view regarding the fixing support 54b (an inverted fixed state) is shown in FIG. 8 and 9 show left side views of the inverted, inverted, and open states of the movable portion 542 which has fallen down the clamp 546 of the fixing support 54b.

7 to 9, the fixed supporter (work lock) 54b has an axial direction to the pair of fixing legs 541 fixed to the bottom plate 53 and the fixing legs 541. And a movable portion 542 pivotally supported. Moreover, the movable part 542 is the horizontal body part 544 fixed between a pair of movable leg part 543 fixed to the fixed leg part 541, and the upper part of the pair of movable leg part 543. A toggle clamp 546 for fixing the movable portion 542 to the leg portion 541, a horizontal pressing member 547 penetrating the horizontal body portion 544 in the horizontal direction and mounted to the horizontal body portion 544, And a vertical pressing member 549 mounted through it to the support plate 548 mounted to the horizontal fuselage 544.

The horizontal pressing member 547 also includes a knob 547a for driving the horizontal spiral, a tip 547b for pressing the horizontal end of the (semi) product sheet, and an intermediate portion 547c for engaging them. . The intermediate portion 547c includes a screw portion (not shown) provided near the knob 547a and a tube portion incorporating a spring (not shown) in proximity to the tip portion 547c. In addition, the vertical pressing member 549 includes a knob 549a, a lower end 549b for pressing the upper surface of the edge of the (semi) product sheet, and a threaded intermediate part 549c.

The fixing support 54b falls down from the upright state shown in FIG. 7 as shown in FIG. 9 by releasing the toggle clamp 546 as shown in FIG. It may be pivotally moved from the upright state shown to the upside down and open (or released) states shown in FIG. 9.

Since the fixed support 54a has a short length, the fixed support 54a is reduced except that the number of horizontal pressing members 547 decreases from 2 to 1 and the number of vertical pressing members 549 decreases from 4 to 2, respectively. Same as (54b). In addition, the fixing support 54c is the same as the fixing support 54a except the horizontal pressing member 547 is omitted.

The operation of these fixing supports 54a, 54b, 54c will be described. Referring to FIG. 5, prior to fixing the (semi) product sheet to the main body AA, these fixing supports 54a-54c are all placed in the conduction and open states shown in FIG. 9, and (half) The product sheet is horizontally above the guide supports 55a, 55b and the support 55c, or more preferably, to reduce the ease of work and the work space by one or a small number of people. Positioned as tilted as possible.

In this state, the positional relationship between the (semi) product sheet B and the fixing support 54b is shown in Fig. 10A. The positional relationship with the stationary support 54a is also the same in the side view, and the positional relationship with the stationary support 54c is also the same except that there is no horizontal pressing member 57. The positional relationship shown in FIG. 10A corresponds to the positional relationship of FIG. 4 in the foregoing embodiment (however, in FIG. 4, the fixed holding state. FIG. 10A is the state before fixing). In addition, as for convenience, left and right have the opposite positional relationship.

Next, as shown in FIG. 10B, the vertical pressing member 549 is moved downward by the helical motion of the knob 549a so that the lower end portion 549b is the upper surface of the edge of the (semi) product sheet B. Next, as shown in FIG. 10C, the horizontal pressing member 547 is moved to the right by the helical motion of the knob 547a, and the tip portion 547b shows the (semi) product sheet B. As shown in FIG. Press the left end. In this state, the (semi) product sheet B is firmly held in the Y, Z direction of FIG. 5 by the fixing support 54b. Further, as shown in FIG. 7, the clamp 546 is inverted to fix the movable portion 542 to the fixing leg portion 541 to fix the fixed support state of the (semi) product sheet. In addition, fixing of the movable part 542 by inverting the toggle clamp 546 may be prior to the vertical and horizontal fixed support operation of FIGS. 10B and 10C. As described above, the vertical pressing member 549 may be operated in the reverse order from the horizontal pressing member 547 to the horizontal pressing member 547 in the order of the vertical pressing member 549, or both may be operated at the same time. The good is easy to understand.

Subsequently, by using the fixing supports 54a and 54c, the (semi) product sheet B is similarly fixed in the X and Z directions, whereby the (semi) product sheet B is attached to the main body AA. It is firmly fixed in either of the, Y and Z directions.

Subsequently, a zero ring is disposed in the zero ring receiving groove 52a of the main body part AA, and does not include the stage fixing supports 54a-54c and the supporting parts 55a-55c in the same planar shape as the main body AA. And cover parts of almost the same structure except that they are slightly shallow (low side walls). Then, by the same buckle lock or the like described with reference to Fig. 4, the main body portion and the lid portion are coupled to each other to form the sealed container of the present invention for fixedly receiving the (semi) product sheet in a transportable state.

Embodiments of the sealed container using the fixed support described with reference to FIGS. 5 to 10 are, of course, various modifications possible. For example, in the fixed support 54 (54a-54c), the lower end portion 549c of the vertical pressing member 549 is spherical, which directly presses the upper surface of the (semi) product sheet B. As shown in FIGS. 11A and 11B corresponding to FIGS. 10A and 10B, the lower end portions of the vertical pressing members are formed in arbitrary shapes, the tapered plates 549d are joined to each other, and the (semi) product sheet B It may also be a form in which a pressing force in the center is applied as well as downward. Moreover, the shape of the front-end | tip part 547b of a horizontal pressing member, and the lower end part 549b of a vertical pressing member can be arbitrary shapes, such as a spherical shape, a flat surface, and a taper surface.

In Fig. 5, three types of 54a, 54b, and 54c are used as the fixing support, which strongly fixes the (semi) product sheet in the X, Y, and Z directions, and fixes the sealed container in an arbitrary direction. It is preferred for inverted transportation. When the inverted direction is fixed in the Y direction, it is also possible to use only the fixed support 54b and to omit the use of the fixed supports 54a and 54c. Of course, it is possible to increase the number of fixing supports as needed and to achieve stronger fixing and holding than the (semi) product sheet.

(New variant)

In any of the above embodiments, if necessary, at least one of the main body portion and the cover portion may be provided with a nozzle for replacing gas inside the container, preferably one or more and two or more in total. Such a nozzle for gas replacement in the container is very useful for replacing the inside of the sealed container of a (semi) product sheet which dislikes moisture in addition to dust adhesion, for example, an EL (electroluminescence) related sheet product. Suitable.

As described above, according to the present invention, in a large precision sheet-like (semi) product such as a photo mask, it has an inadequate stress that it has a planar dimension so large that integral resin molding of the container half containing it is extremely difficult. A substantially resin sealed container is provided which can be housed and supported stably without impact and which is relatively light.

Claims (14)

A sealed container for a large precision sheet-shaped (semi) product comprising a body portion and a cover portion which are symmetrical to each other, and each having a seal peripheral portion which is in contact with each other, wherein the body portion and the cover portion Each includes a plurality of resin plates which are arranged on the same plane and are brought into contact with each other at an intermediate joining boundary portion, and a reinforcing metal belt member is arranged from the outside from the outside along the joining boundary portion and is bolted to the resin plate in a sealing manner. Fixed, On the bottom of the main body portion, fixing and supporting the precision sheet-shaped (semi) product in the X, Y and Z directions orthogonal to each other (ie, the longitudinal, horizontal and thickness directions of the precision sheet-shaped (semi) product) and With a supporting structure, The fixed and support structure includes at least one pair of support portions for supporting a precision sheet-shaped (half) product thereon, and at least the precision sheet-shaped (half) portion at an edge portion of the precision sheet-shaped (semi) product placed on the support portion. Including a fixed support for applying a pressing force in the thickness direction of the product, Each of the at least one fixing support includes a leg portion fixed to a bottom portion of the main body portion, and the precision sheet mounted on the support portion by applying a pressing force to an edge portion of the precision sheet-shaped (semi) product in at least the thickness direction. Pivotally on the leg to permit pivotal movement of the movable part between an upright position holding the shape (semi) product fixed and an up and down position allowing the precision sheet-shaped (semi) product to be placed on the support. A container comprising a movable portion supported. The container according to claim 1, wherein each of the plurality of resin plates is made of an antistatic resin. The container according to claim 1, wherein the main body portion and the lid portion are provided with a pair of holding members for holding the precision sheet-like (semi) product. 4. The seal periphery of each of the main body portion and the lid portion includes a support member for supporting a side wall and a holding member for holding the precision sheet-shaped (semi) product on the side wall, The side wall and the support member are made of a resin plate set bonded to the plurality of resin plates. 4. The retaining member of one of the pair of retaining members disposed respectively in the main body portion and the lid portion includes abutting sidewalls of height less than the thickness of the tapered portion and the precision sheet-like (semi) product. The other holding member of the pair of holding members has a taper longer than the taper of the holding member. The container according to claim 1, wherein the precision sheet-like (semi) product and the main body portion are all rectangular in shape, and the at least one pair of support portions and the fixing support are disposed along at least one side thereof. The said at least one pair of support part and the said fixed support body act on the side end part of the said precision sheet-like (semi) product in addition to the pressing force in the thickness direction of the said precision sheet-like (semi) product. And at least one stationary support for applying a pressing force to the edge of said precision sheet-like (semi) product. The method of claim 7, wherein The precision sheet-like (semi) product and the main body are both rectangular in shape, and along the at least one side thereof, the at least one pair of support and the fixing support are disposed. In addition to the pressing force in the thickness direction of the precision sheet-shaped (semi) product, a pressing force acting on the side end of the precision sheet-shaped (semi) product can be applied to the edge portion of the precision sheet-shaped (semi) product. And a fixed support disposed along one side of the rectangle, and to support the precision sheet-like (semi) product in such a manner as to receive a pressing force applied to a side end of the precision sheet-like (semi) product. And a guide support disposed at a position near the opposite side. The container according to claim 1, wherein a sealing O-ring is disposed between a seal peripheral portion of the main body portion and a seal peripheral portion of the lid portion. The supporting resin plate is disposed on the opposite side of the reinforcing metal belt member along the joining boundary between the plurality of resin plates and bonded to the plurality of resin plates, thereby forming a sealing bolt fixing structure. Container characterized in that. The said resin plate is mutually melt | dissolved by the solvent bonding which locally melt | dissolves the said resin plate with the solvent of resin which forms the said resin plate, and joins the locally melted part of the said resin plate mutually. A container characterized in that it is bonded. delete delete delete

Images