JP2003264215A - Method and device for carrying plate-like member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a carrying method and a carrying device for reversing each side of a plate-like member without a suction means such as a vacuum adsorption mechanism or an electrostatic chuck, in addition, reversing the plate- like member in a simple structure, and furthermore quickly delivering the plate- like member as compared with a conventional type. <P>SOLUTION: The carrying device 10 has: a carrying hand comprising a pair of holding hand parts 11 and 12 facing each other with a distance; a rotating means 13 such as a motor constituting the carrying hand rotatably; a first arm 15 to which the carrying hand is rotatably attached around an axis orthogonal to a rotating axis of the rotating means 13; a second arm 16 to which the first arm 15 is rotatably attached; and a pedestal 17 to which the second arm 16 is rotatably attached. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for transferring plate-shaped members, and more particularly to the structure of a transfer hand used in a transfer robot or the like.

[0002]

2. Description of the Related Art Generally, in the process of manufacturing an electronic device, it is necessary to convey a plate-shaped member such as a semiconductor or piezoelectric wafer, a liquid crystal panel substrate, or other various substrates. 2. Description of the Related Art A transfer robot having a plate-shaped hand having a suction means for suction-holding a plate surface of a plate-shaped member by vacuum suction or the like is usually used.

In the above manufacturing process, the front and back of the plate-shaped member may be inverted during the processing of the plate-shaped member, for example, in the step of bonding a pair of liquid crystal panel substrates to each other. As a device for reversing the front and back of a plate-shaped member, in the case of the above-described transport robot, a device provided with a rotary shaft for rotating the hand around a horizontal axis is known.

[0004]

However, in the above-mentioned conventional transfer robot, since the hand provided with the suction means for sucking the plate-shaped member is used, the plate-shaped member is inverted inside the vacuum device. There is a problem that is impossible.

In the above situation, it is conceivable to use a known electrostatic chuck to attract and hold a plate-shaped member, but the electrostatic chuck needs to have a conductor provided on the plate-shaped member. However, it cannot be applied to an insulator such as a glass substrate made of only an insulator, and the hand structure is complicated.

Further, it is conceivable that the front and back of the plate-shaped member are reversed by transferring the plate-shaped member using two hands, but in this case, the mechanism becomes complicated and the carrying capacity is improved. Becomes difficult, and when it is necessary to convey without touching the surface of the plate-shaped member, a hand with a special shape must be used,
There is a problem that it is difficult to configure it as a general-purpose transport means.

Therefore, the present invention solves the above-mentioned problems, and its object is to convey a plate-like member which can be turned upside down without providing a suction means such as a vacuum suction mechanism or an electrostatic chuck. A method and a transport device are provided. It is another object of the present invention to provide a carrying method and a carrying device capable of reversing a plate member with a simple structure. Another object of the present invention is to provide a carrying method and a carrying device that can deliver the plate-shaped member more quickly than before.

[0008]

In order to solve the above-mentioned problems, a plate-shaped member carrying method of the present invention is a method of holding and carrying a plate-shaped member, wherein both sides of the plate-shaped member are The plate-shaped member held by the transfer hand is transferred in a state where a pair of holding portions provided in the transfer hand are arranged with a gap larger than the thickness of the plate-shaped member. .

According to the present invention, by disposing the pair of holding portions on both sides of the plate-like member, the plate-like member can be attached to the front and back sides without providing a suction means including a vacuum suction mechanism or an electrostatic chuck. It can be held without any trouble in any of the postures facing upward, and can be held without applying a pinching force to the plate member.

Here, it is desirable that the outer edge of the plate-shaped member is held by the pair of holding portions while being engaged with the holding portions. According to this, the plate-shaped member can be held in an arbitrary posture, and can be held without coming into contact with the surface other than the outer edge of the plate-shaped member.

In the present invention, it is preferable that a reversing operation of reversing the front and back of the plate member is performed by reversing the transport hand.

According to the present invention, it is possible to reverse the front and back of the plate-shaped member by reversing the transport hand in the above structure, but since the holding portions are arranged on both sides of the plate-shaped member, there is no problem. It is possible to continue holding the plate member.

Another plate-shaped member carrying method of the present invention is a method of holding and carrying a plate-shaped member, wherein the plate-shaped member is held from both front and back sides by a pair of holding portions provided in a carrying hand. Is held, and the plate-like member is reversed together with the transport hand.

According to the present invention, since the plate-like member is reversed together with the transport hand in a state where the plate-like member is held from the front and back sides by the pair of holding portions, the vacuum suction mechanism and the electrostatic chuck are provided. It is possible to reverse the front and back of the plate-shaped member without providing suction means.

In the present invention, the plate-shaped member is received by a locking portion provided on the transfer hand in a state where the plate-shaped member is in a vertical posture or an inclined posture by rotating the transport hand. Thus, it is preferable that the plate member is positioned with respect to the transport hand.

According to the present invention, since the plate-shaped member is positioned in the vertical posture or the inclined posture by the plate-shaped member being received by the locking portion provided in the transport hand, the positioning is complicated. Even if you do not use a simple positioning mechanism, simply adapt the shape of the locking part to the plate-shaped member,
Positioning can be easily performed by the weight of the plate member.

In the present invention, the plate-shaped member is moved in and out between the pair of holding portions while the pair of holding portions are separated from each other, and the plate-shaped member is moved in the state where the pair of holding portions are close to each other. It is preferably transported.

According to the present invention, the plate-like member is moved in and out of the carrying hand with the pair of holding parts separated from each other, and the plate-shaped member is carried with the pair of holding parts approaching each other, whereby the plate-like member is carried out. In the case of transferring between the transfer hand and another place, it is possible to increase the degree of freedom of the introduction direction and the introduction mode of the plate-like member with respect to the transfer hand, and to make one side even if the other place is a narrow space. It is also possible to insert and hold only the holding portion to transfer the plate-shaped member.

In the present invention, one plate-shaped member is placed on one of the holding parts, and another plate-shaped member is placed on the other holding part separated from the one holding part. It is preferable that the material is supplied, and then the one plate-shaped member is removed from the one holding portion.

According to the present invention, while one plate-shaped member is placed on one holding portion, another plate-shaped member is fed on the other holding portion, and then one holding portion is provided. By removing one plate-shaped member from the top, it is possible to temporarily support the two plate-shaped members on the holding portion and transfer the plate-shaped members, so that the plate-shaped members can be transferred quickly. It can be carried out. For example, take out the other plate-shaped member from a certain place,
Since it becomes possible to supply one plate-shaped member to the same place, it becomes possible to quickly replace the plate-shaped member at that certain place.

Next, the plate-shaped member transfer device of the present invention is a transfer robot that holds and transfers the plate-shaped member, and moves the transfer hand having a pair of holding portions and the transfer hand. Moving means, the pair of holding portions, in the closed state, are arranged on both front and back sides of the plate-shaped member with a gap therebetween, and engage with the outer edge of the plate-shaped member. To do.

In the present invention, it is preferable to have a reversing means configured so that the carrying hand can be reversed.

Another plate-shaped member transfer device of the present invention is a transfer robot that holds and transfers a plate-shaped member, and moves a transfer hand having a pair of holding portions and the transfer hand. And a reversing means for rotating the carrying hand holding the plate-shaped member so that the front and back of the plate-shaped member are reversed.

In the present invention, a plurality of engaging portions of the holding portion that engage with the outer edge of the plate-shaped member are distributed around the plate-shaped member to ensure stability of the holding state of the plate-shaped member. Preferred to obtain.

In the present invention, it is preferable that the pair of holding portions are configured to be openable and closable with each other, and have an opening / closing driving means for driving the pair of holding portions to open / close.

In the present invention, it is preferable that the engaging portion of the holding portion that engages with the outer edge of the plate-shaped member is an inclined surface with respect to the plate surface of the plate-shaped member.

According to the present invention, by engaging the outer edge of the plate-shaped member by the inclined surface, the outer edge corners of the plate-shaped member are engaged by line contact or point contact without contacting both front and back surfaces of the plate-shaped member. Can be held together.

In the present invention, it is preferable that the carrying hand has a locking portion that abuts when the plate member is in a vertical posture or an inclined posture.

In the present invention, it is preferable to have a hinge portion that is configured to open and close the pair of holding portions.

According to the present invention, since the pair of holding portions is provided with the hinge portion which can be opened and closed, the pair of holding portions can be opened and closed with a simple structure, and the inner surfaces of both of them are diagonally upward. If configured so as to face, as will be described later, it becomes possible to simultaneously support the two plate-shaped members by the pair of holding portions.

In the present invention, it is preferable that a locking portion for locking the plate member is provided on the hinge portion side.

According to the present invention, by having the locking portion for locking the plate member on the side of the hinge portion, it is possible to perform the operation when the transport hand is placed in the vertical posture or the inclined posture so that the hinge portion faces downward. The plate member is locked and held by the stopper.

In the present invention, it is preferable that the locking portion is configured to position the plate member with respect to the transport hand when the plate member is in a vertical posture or an inclined posture.

In the present invention, it is preferable that the inner surfaces of the pair of holding portions can be opened in a state where both of them are directed upward or obliquely upward.

According to the present invention, it becomes possible to simultaneously support two plate-like members by the pair of holding portions. In this case, the plate-shaped member may be configured to be locked by the locking part when the pair of holding parts respectively support the plate-shaped member in a state of facing upward or obliquely upward. desirable.

[0036]

BEST MODE FOR CARRYING OUT THE INVENTION Next, with reference to the accompanying drawings, an embodiment of a plate-shaped member carrying method and a carrying device according to the present invention will be described in detail.

1 to 3 are schematic perspective views showing a plate-shaped member carrying method and carrying device according to a first embodiment of the present invention, and FIG. 4 is a sectional structure of a hand portion of the first embodiment. FIG.

The carrying device 10 of the present embodiment is configured such that a pair of holding hand portions 11 and 12 are opposed to each other with a space therebetween, and a rotating hand such as a motor that rotatably constitutes the carrying hand. The moving means 13, the first arm 15 on which the above-described transfer hand is rotatably attached about an axis orthogonal to the rotation axis of the rotating means 13, and the second arm 16 on which the first arm 15 is rotatably attached. And a base 17 on which the second arm 16 is rotatably attached. That is, the transport hand having the pair of holding hand portions 11 and 12 having the above-described structure is configured to be rotatable about the rotation axis (horizontal axis in the illustrated example) by the rotation means 13 and the rotation thereof. It is configured to be rotatable about an axis (a vertical axis in the illustrated example) orthogonal to the axis.

A pair of holding hand parts 11, 1 of the transport hand
As shown in FIG. 4, the base 2 is provided with bases 11a and 12a connected to the rotating means 13, and the bases 11a and 12a are connected to the base 2.
The holding arms 11b and 12b extend from a. A plurality of holding arms 11b and 12b are preferably provided, and a pair of holding arms are provided substantially in parallel in the illustrated example. Further, the holding arms 11b and 12b of the holding hand portions 11 and 12 are provided with inner surfaces 11c and 12c provided in a concave shape so as to be separated from the work W except for the base portions 11a and 12a side and the tip end side.

On the other hand, the base 1 of the holding arms 11b and 12b
Engagement inner surface portions 11d, 12d configured to engage with the outer edge of the work W are provided on the inner surface 11a, 12a side.
It is provided so as to come closer to the work W side than c and 12c (with a step between the inner surface). Further, on the tip ends of the holding arms 11b and 12b, engagement inner surface portions 11e and 12e configured to engage with the outer edge of the work W are moved closer to the work W side than the inner surfaces 11c and 12c. Are provided so that there is a step between them.

Further, between the base portions 11a and 12a of the pair of holding hand portions 11 and 12 and the holding arms 11b and 12b, locking portions 11f and 12f facing the end surface of the work W are provided. These locking portions 11f and 12f are the work W.
Constitutes the end surface of the. Also, these locking portions 11
The inner edges (contours) of f and 12f are configured to have a concave shape in plan view, for example, a V shape in the illustrated example, as shown in FIGS. 1 to 3.

Here, the distance between the inner surfaces 11c and 12c is configured to be larger than the thickness of the work W. Further, in the case of the present embodiment, the distance between the engagement inner surface portions 11d and 12d and the distance between the engagement inner surface portions 11e and 12e are also configured to be larger than the thickness of the work W. These engagement inner surface portions are portions that engage with each other to support the outer edge of the work W. Since the outer edge of the work W contacts the holding portion due to the presence of these engagement inner surface portions, the outer edge of the work W is Except for the surface part, it is protected by not touching the holding part.

In this embodiment, one pair of holding hands 11 and 12 are fixed to each other so as to have the sectional structure shown in FIG. Here, the holding hand parts 11 and 12 may be directly fixed to each other, or may be indirectly fixed via a third member such as a rotating shaft. Further, the pair of holding hand parts 11 and 12 may be detachably attached to each other. Further, in this example, an interval (opening) A in which the work W can be inserted is provided between the pair of holding hand portions 11 and 12 at the tip of the transport hand.

In the present embodiment, the work W is carried by the carrying device 10 configured as described above as follows. First, as shown in FIG. 1, the holding hands 11 and 12 are received by receiving the work W from a first position (for example, a magazine, a processing device, a temporary work placing portion, etc.) in which the work W is not shown. The work W is inserted in between. At this time, the holding hand parts 11 and 12
Since the tips of the holding arms 11b and 12b are provided with a space A (see FIG. 4) into which the work W can be inserted, for example, a magazine or the like is supported with only both side ends of the work W, which is a plate-shaped member. The work W is inserted and held as shown in the drawing only by protruding the transfer hand so that the stored work W is inserted between the holding arm 11b and the holding arm 12b. In the illustrated example, the work W in the transport hand is in a state of being supported by the holding hand unit 12 arranged below.

Next, the first arm 15 and the second arm 16
After appropriately transporting the transport hand using the
2, the holding hands 11, 12 are set up so that the work W held by the transport hand is arranged above the bases 11a, 12a as shown in FIG. As a result, the work W moves toward the base parts 11a and 12a of the transfer hand and abuts on the locking parts 11f and 12f shown in FIG. Since the locking portions 11f and 12f are formed in a concave shape in a plan view as described above, the work W is locked by the locking portions 11f and 12f.
By abutting on f, the work W is positioned (centering) at the center position of the holding hand parts 11 and 12 in the width direction (direction in which a pair of holding arms are arranged in parallel) by its own weight.
To be done.

Next, by tilting the carrying hand to the opposite side as it is, as shown in FIG.
1 is arranged below, and the work W is supported by the holding arm 11. Work W in this way
Has a posture in which the front and back are reversed from the state in which it was first received from the first position. After that, for example, the transport hand is moved to a second position (for example, a magazine, a processing device, a temporary work placement part, etc.), and the work W is delivered to the second position. Here, the first position and the second position may be the same position or may be completely different positions.

In this embodiment, a pair of holding hand parts 1
Since the work W is held so that the work pieces 1 and 12 are arranged on both sides of the work W, the front and back of the work W can be easily reversed by reversing the transport hand.

Further, in the carrying hand of this embodiment, since the pair of holding hand portions are arranged to face each other, the work W can be supported on both front and back sides, and therefore a vacuum suction structure or an electrostatic chuck is used. Instead, the front and back of the work W can be reversed.

Further, when the conveying hand is in the vertical posture or the inclined posture while holding the work W, the engaging portion abuts on the outer edge of the work W, and the work W is conveyed by the concave shape of the engaging portion. Since it is configured to be positioned with respect to the hand, the workpiece W can be positioned by this positioning.
By correcting the position of, the delivery accuracy of the work W can be improved.

As the work W which can be positioned in two directions (that is, the direction toward the bases 11a and 12a side and the rotation axis direction orthogonal to the direction) by the concave locking portion as in the present embodiment. As a representative example, a work W having a substantially disk shape as shown in the figure is given as a representative example. Can be mentioned. For example, even with respect to a substantially rectangular work, two outer edges of the work W inclined in mutually opposite directions with respect to the contact direction of the work (the direction from the tip of the transport hand toward the bases 11a and 12a in this embodiment). If is held in such a posture that both of them come into contact with the concave locking portion, the same positioning as in the present embodiment can be performed.

Further, the locking portion is not one that is positioned in two directions as described above, but may be a simple contact portion that can position the workpiece only in one direction (that is, the contact direction). Further, when the locking portion can position the work in only one direction in this way, a mechanism for locking the work in another direction different from the one direction (for example, the work is pressed so as to be sandwiched from both sides). Mechanism) may be provided separately.

[Second Embodiment] Next, a second embodiment according to the present invention will be described with reference to FIGS. The carrying device 20 of this embodiment includes a carrying hand having a pair of holding hand parts 21 and 22 and rotating means 23 and 24 capable of independently turning the holding hand parts 21 and 22. I have it. Also, the first
It has a first arm 25, a second arm 26, and a base 27 similar to those in the embodiment.

The transport hand of this embodiment is constructed so that the pair of holding hand portions 21 and 22 can be independently rotated. The rotating means 23 and 24 for rotating the holding hand portions 21 and 22 can rotate both the holding hand portions 21 and 22, that is, the entire transport hand as a unit. The holding hand portion 21 functions as a reversing means for reversing around the axis.
And 22 are closed (states shown in FIGS. 6, 10, and 12) and open (FIGS. 5, 7, 8, 9, and 11).
(State shown in FIG. 2) also functions as an opening / closing means.

FIG. 12 shows the work W by the above-mentioned transfer hand.
It is sectional drawing which shows the state which hold | maintained. As shown in FIG. 12, the pair of holding hand portions 21 and 22 of the transport hand are
Bases 21a and 22a connected to the rotating means 23 and 24 are provided, and holding arms 21b and 22b extend from these bases 21a and 22a. This holding arm 21b,
22b is preferably provided in plurality, and in the illustrated example, a pair of holding arms are provided substantially in parallel. In addition, the holding arms 21b and 22 of the holding hand portions 21 and 22.
In b, an inner surface 21c, which is provided in a concave shape so as to be separated from the work W except for the base portions 21a and 22a side and the tip side,
22c.

On the other hand, the base 2 of the holding arms 21b and 22b
Engagement inner surface portions 21d, 22d configured to engage with the outer edge of the work W are provided on the side of 1a, 22a.
It is provided so as to approach the work W side from c and 22c. The engagement inner surface portions 21d and 22d provided on the base side of these holding arms are at the tip end side (held work W side).
It has an inclined surface that goes diagonally. Further, engagement inner surface portions 21e, 22e configured to engage with the outer edge of the work W are provided on the tip ends of the holding arms 21b, 22b so as to be closer to the work W side than the inner surfaces 21c, 22c. There is. The engagement inner surface portions 21e and 22e provided on the tip end side of these holding arms are provided with inclined surfaces that are inclined obliquely toward the base side (held work W side).

Further, between the base portions 21a and 22a of the pair of holding hand portions 21 and 22 and the holding arms 21b and 22b, locking portions 21f and 22f facing the end surface of the work W are provided. These locking portions 21f and 22f are the work W.
Constitutes the end surface of the. Also, these locking portions 21
The inner edges (contours) of f and 22f are configured to have a concave shape in plan view, for example, a V shape in the illustrated example, as shown in FIGS. 5 and 7 to 11.

In this example, a gap (opening) between the pair of holding hand portions 21 and 22 is formed at the leading end of the transport hand in a state where the pair of holding hand portions 21 and 22 are closed. The work W is small or has no gap (opening) formed so that the work W cannot be taken in and out. Thus, in the holding state shown in FIG. 12, the work W does not escape regardless of the posture of the transport hand. However, in this example as well, as in the first embodiment, a gap (opening) into which the work W can be inserted is provided at the tip of the transfer hand with the pair of holding hands closed. It doesn't matter.

Here, the distance between the inner surfaces 21c and 22c is configured to be larger than the thickness of the work W. Further, in the case of the present embodiment, the distance between the engagement inner surface portions 21d and 22d and the distance between the engagement inner surface portions 21e and 22e are also configured to be larger than the thickness of the work W. These engagement inner surface portions are portions that engage with each other to support the outer edge of the work W. Since the outer edge of the work W contacts the holding portion due to the presence of these engagement inner surface portions, the outer edge of the work W is Except for the surface part, it is protected by not touching the holding part.

In the present embodiment, as described above, since the pair of holding portions 21 and 22 are configured to be openable and closable with each other, the work W is held by the engagement inner surface portions 21d, 22d, 21e and 22e. It may be configured as follows.
This is not limited to the case where the engagement inner surface portion is an inclined surface as in the present embodiment, and even when the engagement inner surface portion is configured as a flat surface as in the first embodiment or is configured in any other shape. It is the same.

In the present embodiment, the work W is carried by the carrying device 20 configured as described above as follows. First, as shown in FIG. 5, the pair of holding hand portions 21 and 22 of the transport hand are opened to be separated from each other, and one of them, for example, the holding hand portion 22 as in the illustrated example, The work WA is placed on the holding hand unit 22 by receiving the work WA from a first position (for example, a magazine, a processing device, a temporary work placement unit, etc.) in which the work WA is arranged (not shown).

Next, from the state shown in FIG. 5, as shown in FIG. 6, the other holding hand portion 21 is rotated to close it on the holding hand portion 22, and the entire transport hand is rotated to rotate the work WA. Is set to a vertical posture or an inclined posture, and the work WA is brought into contact with the locking portions 21f and 22f and positioned as in the first embodiment.

After that, the transport hand is further rotated to turn it over so that the work WA is placed on the holding hand portion 21, and then the holding hand portion 22 is rotated to open.
The work WB is separated from the holding hand unit 21, and as shown in FIG. 7, the work WB is received on the holding hand unit 22 from a second position (not shown) (for example, a magazine, a processing device, a temporary work placement unit, etc.). At this time, the pair of holding hand portions 21 and 22 both face upward or obliquely upward,
Work pieces WA and W are provided on both of the holding hand portions 21 and 22.
B is in a mounted state.

Further, as shown in FIG. 8, the transport hand is rotated, for example, 180 degrees around an axis (a vertical axis in the illustrated example) orthogonal to the rotation axes of the rotation means 23 and 24, and thereafter,
As shown in FIG. 9, the work WA placed on the holding hand unit 21 is delivered to the second position. And FIG.
As shown in FIG. 0, the empty holding hand unit 21 is rotated toward the holding hand unit 22 supporting the work WB to close the transport hand, and the reversing operation of the transport hand is performed in the same manner as above. , Locking portions 21f, 2 similar to the above if necessary
The positioning is performed by 2f. Finally, as shown in FIG. 11, the holding hand unit 22 is rotated from above the holding hand unit 21 to open the transport hand, and the work WB on the holding hand unit 21 is moved to the first position. hand over.

According to the above method, the works WA and WB can be transferred in the inverted postures, and while one work WA is held, another work WB is received from a certain place to the same place. Since the work WA can be handed over, the work for exchanging a work arranged at a certain place for another work can be performed at high speed. For example, it is possible to extremely quickly remove a processed work from a processing position of a certain processing apparatus and supply an unprocessed work to the same processing position.

As described above, in the present embodiment, since the pair of holding hand portions 21 and 22 can be used to individually (independently) support the work, despite the simple structure, It is possible to give a work handling ability or a transfer ability similar to that of a double-hand robot.
For example, when it is necessary to sequentially perform a predetermined process on both sides of a work, the front and back of the work can be reversed and quickly supplied by the above-described work handling method.
Further, since the work can be reversely supplied and the work can be delivered inside the vacuum chamber as described above, it can greatly contribute to the efficiency of the processing.

In this embodiment, the pair of holding hand parts 2
The pair of holding hand portions 21 and 22 can be individually used for delivery of the work by configuring the opening and closing of the hands 1 and 22. Further, since there is no restriction on the direction of introduction of the work when introducing the work, a more flexible delivery method can be realized, and a work placement method at the delivery source or the delivery destination can be flexibly dealt with.

For example, when a plurality of works (wafers or substrates) are arranged in a work storage unit such as a magazine or a pallet, there is often insufficient space for taking out the work in the work storage unit. For example, when a plurality of works are vertically arranged in the work storage unit with a slight gap, the holding units are inserted between the works and slightly raised to support the works on the holding unit. A general method is to take out the work as it is from the work storage part. In this case, as in the present embodiment, it is possible to insert only one holding hand portion of the pair of holding hand portions 21 and 22 into the work storage portion and take out the work. It will be possible even if there is not enough space.

Also in this embodiment, as in the first embodiment, it is possible to use the pair of holding hand portions 21 and 22 in a state where they are mutually closed. In this case, when the work can be taken in and out as it is with the pair of holding hand portions 21 and 22 being closed as described above, the work is transferred in the same operation and procedure as in the first embodiment. Is possible. Further, as shown in FIG. 12, when the work cannot be taken in and out with the pair of holding hand parts 21 and 22 being closed, the holding hand parts 21 and 22 are opened to some extent and separated from each other when the work is delivered. It should be in a state.

Further, in the present embodiment, the engaging inner surface portions 21d, 22d, 21e, 22e which engage with the work are formed by inclined surfaces inclined with respect to the plate surface of the work.
Since it is possible to engage and hold the outer edge corners of the work without contacting both the front and back surfaces of the work, it is possible to prevent damage to the surface of the work. That is, in the present embodiment, since the outer edge of the work is engaged and held by contacting the inclined surface, the work and the transport hand are in line contact or point contact, and only the corner portion of the work outer edge is in contact with the transport hand. Like Therefore, it becomes possible to carry the work without substantially touching both front and back surfaces of the work.

The plate-shaped member carrying method and the carrying device according to the present invention are not limited to the above-mentioned illustrated examples.
Needless to say, various changes can be made without departing from the scope of the present invention.

[0071]

As described above, according to the present invention,
The front and back of the plate-shaped member can be reversed without providing a suction means such as a vacuum suction mechanism or an electrostatic chuck.

[Brief description of drawings]

FIG. 1 is a schematic perspective view showing a step in a first embodiment of a carrying method and a carrying apparatus according to the present invention.

FIG. 2 is a schematic perspective view showing a step in the first embodiment.

FIG. 3 is a schematic perspective view showing a step in the first embodiment.

FIG. 4 is a sectional view of a carrying hand in the carrying device of the first embodiment.

FIG. 5 is a schematic perspective view showing a step in the second embodiment of the transportation method and the transportation device according to the present invention.

FIG. 6 is a schematic perspective view showing a step in the second embodiment.

FIG. 7 is a schematic perspective view showing a step in the second embodiment.

FIG. 8 is a schematic perspective view showing a step in the second embodiment.

FIG. 9 is a schematic perspective view showing a step in the second embodiment.

FIG. 10 is a schematic perspective view showing a step in the second embodiment.

FIG. 11 is a schematic perspective view showing a step in the second embodiment.

FIG. 12 is a cross-sectional view of a transfer hand in the transfer device according to the second embodiment.

[Explanation of symbols]

10, 20 ... Conveying devices 11, 12, 21, 22 ... Holding hand parts 11a, 12a, 21a, 22a ... Base parts 11b, 12b, 21b, 22b ... Holding arms 11c, 12c, 21c, 22c ... inner surfaces 11d, 12d, 21d, 22d, 11e, 12e, 2
1e, 22e ... Engaging inner surface portions 11f, 12f, 21f, 22f ... Locking portions 13, 23, 24 ... Rotating means 15, 25 ... First arm 16, 26 ... 2 arms 17, 27 ... Base

Claims (16)

[Claims] 1. A method of holding and transporting a plate-shaped member, wherein a pair of holding portions provided on a transport hand has a gap larger than the thickness of the plate-shaped member on both sides of the plate-shaped member. A method of transporting a plate-shaped member, wherein the plate-shaped member held by the transport hand is transported in a state of being separated from each other. 2. The method of transporting a plate-shaped member according to claim 1, wherein a reversing operation of reversing the front and back of the plate-shaped member is performed by reversing the transport hand. 3. A method of holding and transporting a plate-shaped member, wherein the pair of holding portions provided on the transport hand holds the plate-shaped member from both front and back sides, and the plate-shaped member together with the transport hand. A method of transporting a plate-shaped member, characterized in that: 4. The transport hand is rotated, and in the state where the plate member is in a vertical posture or an inclined posture, the plate member is received by a locking portion provided on the transport hand, The plate-like member carrying method according to claim 1, wherein the plate-like member is positioned with respect to the carrying hand. 5. The plate-like member is moved in and out between the pair of holding parts with the pair of holding parts being separated from each other, and the plate-shaped member is conveyed with the pair of holding parts being close to each other. The method of transporting a plate-shaped member according to claim 1, wherein 6. A plate-shaped member is placed on one of the holding parts, and another plate-shaped member is fed onto the other holding part separated from the one holding part. The plate-shaped member conveying method according to claim 1, wherein the one plate-shaped member is removed from the one holding portion. 7. A transfer robot for holding and transferring a plate-shaped member, comprising: a transfer hand having a pair of holding parts, and a moving means for moving the transfer hand, wherein the pair of holding parts are provided. In the closed state, the plate-shaped member is arranged on both front and back sides of the plate-shaped member with a gap, and has an engagement inner surface portion that engages with an outer edge of the plate-shaped member. apparatus. 8. The plate-shaped member transfer device according to claim 7, further comprising a reversing unit configured to be capable of reversing the transfer hand. 9. A transport robot for holding and transporting a plate-shaped member, comprising: a transport hand having a pair of holding portions, and a moving means for moving the transport hand, A transporting device for a plate-shaped member, comprising reversing means for rotating the held transporting hand so that the front and back of the plate-shaped member are reversed. 10. The pair of holding portions is configured to be openable and closable with each other, and has an opening and closing drive means for driving the pair of holding portions to open and close. The transporting device for the plate-shaped member according to. 11. The engagement part of the holding part which engages with the outer edge of the plate-shaped member is an inclined surface with respect to the plate surface of the plate-shaped member. The transporting device for the plate-shaped member according to any one of claims. 12. The transport hand has a locking portion that abuts when the plate member is in a vertical posture or an inclined posture. The transporting device for the plate-shaped member according to. 13. The plate-shaped member transporting device according to claim 7, further comprising a hinge portion configured to open and close the pair of holding portions. 14. The plate-shaped member transport device according to claim 13, further comprising a locking portion that locks the plate-shaped member on the hinge portion side. 15. The locking portion is configured to position the plate member with respect to the transport hand when the plate member is in a vertical posture or an inclined posture. Item 12. The transport device for a plate-like member according to claim 12 or 14. 16. The structure according to claim 7, wherein the inner surface sides of the pair of holding portions can be opened in a state in which both of them are directed upward or obliquely upward. The transporting device for the plate-shaped member according to.