JP2002373925A - Delivery device for substrate for display - Google Patents

Abstract

PROBLEM TO BE SOLVED: To deliver different kinds of substrates. SOLUTION: For a delivery device 28, a worktable 50 is provided, a plurality of aligning tools 52 clamping an uninspected or inspected substrate 12 are arranged on the worktable 50 movably in the directions of approaching each other and separating from each other within a plane parallel to the substrate, and the aligning tools 52 are moved in the direction of approaching each other to clamp the substrate 12 in cooperation. Thus, the substrate 12 is aligned to the delivery device 28. The worktable 50 is angularly rotated around an axis extended in the horizontal direction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer device used for an apparatus for inspecting a display substrate such as a liquid crystal display panel.

[0002]

2. Description of the Related Art As one of inspection apparatuses for measuring or inspecting a display substrate such as a liquid crystal display panel in an oblique state, the display substrate is received in a horizontal state on an alignment stage, and the received display substrate is aligned. There is an apparatus provided with an alignment device (transfer device) that positions the alignment stage with respect to the stage, tilts the alignment stage, and transfers the display substrate to the transfer device in an oblique state (Japanese Patent Laid-Open No. 11-1).
No. 83863).

In this inspection apparatus, when the alignment apparatus operates as a transfer apparatus on the loader side, an uninspected (uninspected) display substrate is taken out of the cassette horizontally by a robot hand, and then is removed from the robot by the robot. It is passed horizontally to the turntable.

[0004] Next, the display substrate is angularly rotated about a Z-axis perpendicular to the display substrate by a turntable to change the supporting direction. Until this point, the alignment stage is maintained at a position lower than the turntable.

Then, the display substrate is horizontally transferred from the turntable to the alignment stage by moving the alignment stage above the turntable. On this alignment stage, the display substrate is moved to one side in the left-right direction and one side in the front-rear direction by a plurality of pushers to be aligned.

[0006] Next, the display substrate is tilted by being tilted in a state where the alignment stage sucks the display substrate, and is transferred to the transfer device in the tilted state.
The transport device transports the received display substrate in an oblique state,
Transfer to the inspection stage at an angle.

When the alignment device operates as a transfer device on the unloader side, the alignment device performs the reverse operation. That is, the alignment device
Receiving the inspected substrate from the transfer device in an oblique state on the centering device, then returning the alignment stage to horizontal, then lowering the alignment stage and passing the substrate to the turntable, raising the turntable and transferring the substrate to the robot It works like handing it to a hand.

[0008]

However, in the above-described alignment apparatus, at the time of alignment, the display substrate on the alignment stage is pressed by the pusher against the positioning pins arranged on one side in the left-right direction and one side in the front-rear direction. It's just

That is, the alignment by the above-described alignment apparatus is not so-called centering in which the center of the received substrate coincides with the center of the turntable. For this reason,
The above-described alignment apparatus can be used as an apparatus for delivering the same type of substrate, particularly, a substrate having the same size, but cannot be used as an apparatus for delivering a different type of substrate, particularly, a substrate having a different size.

It is an object of the present invention to enable the transfer of different types of substrates.

[0011]

A delivery device according to the present invention is a plurality of centering tools for holding a substrate in cooperation with a worktable, in a direction parallel to and away from the sandwiched substrate. A centering device movably disposed on the worktable; and a drive mechanism for angularly rotating the worktable about a horizontal axis extending in a horizontal direction.

When the transfer device is used as a device on the loader side, the substrate to be inspected is sandwiched in a horizontal state by the centering device by moving the centering device in a direction toward each other, and the substrate to be inspected is moved to the work table. Be aligned.
The substrate is also displaced in an oblique state by the work table being inclined by the drive mechanism, and is transferred to a processing apparatus such as a transfer apparatus in that state.

When the delivery device is used as a device on the unloader side, the delivery device performs the reverse operation. That is, the transfer device sandwiches the substrate from a processing device such as a transfer device in an oblique state with the centering tool, and displaces the work table from the oblique state to the horizontal state in that state. As a result, the substrate is displaced to a horizontal state that can be received by a hand of another processing apparatus such as a robot.

[0014] When the centering tools are moved in the direction toward each other, the substrate is moved toward the center of the work table, and is centered so that the center coincides with the center of the work table.
As a result, even if the substrates are of different types, the substrates are centered such that the center thereof coincides with the center of the work table. As a result, it is possible to transfer different types of substrates.

The drive mechanism angularly rotates the worktable about an axis extending in a horizontal direction so as to selectively displace a substrate sandwiched between the centering tools between a horizontal state and an inclined state. be able to.

Each of the centering tools is arranged on the work table so as to be movable in a radial direction of a virtual circle;
The block may include one or more rollers rotatably supported by the block about a Z axis perpendicular to the sandwiched substrate, the rollers being capable of abutting an end surface of the substrate. By doing so, at the time of alignment, the substrate is displaced with respect to the block with its end surface in contact with the roller, so that the movement of the substrate is smooth.

The work table has a plurality of arms extending in a radial direction of an imaginary circle in a plane parallel to the substrate sandwiched between the centering tools, and supports the arms and holds the arms. A support mechanism for angularly rotating about a Z axis perpendicular to the substrate, wherein each centering tool can be disposed on the arm so as to be movable in the radial direction. By doing so, the direction of the sandwiched substrate can be changed.

The work table is a lifting table arranged on the support mechanism for transferring the substrate, and the lifting table moves the Z-axis with respect to the centering tool.
A lifting table displaced in the direction of the axis may be included. By doing so, the lifting table can be moved in the direction of the Z axis, and the substrate can be transferred to a processing device such as a robot or a centering tool while the substrate is kept horizontal. It can also be configured to be releasably attached to the table.

The transfer device may further include a moving mechanism for moving the work table in a direction of a Z axis perpendicular to the substrate sandwiched between the centering tools. By doing so, the work table can be moved in the direction of the Z axis, and the substrate can be transferred to a processing device such as a transfer device.

The moving mechanism may include a receiving member that receives the supporting mechanism movably in the direction of the Z axis, and a mechanism that moves the receiving member in the direction of the Z axis.

The driving mechanism includes a base that receives the support mechanism so as to be pivotable about the pivot axis, a screw rod rotatably disposed on the base, and a screw rod that rotates the screw rod about its axis. A rotation source to be rotated, a nut screwed onto the threaded rod, a first link pivotally connected to the nut about an axis extending in a direction intersecting the threaded rod, and assembled to the worktable. A second link, the second link being movably connected to the first link.
Links. By doing so, the angle of the work table with respect to the horizontal line can be finely adjusted.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIGS. 1 and 2, an inspection apparatus 10 is used as a visual lighting inspection apparatus in which a rectangular liquid crystal display panel in which liquid crystal is sealed is used as a substrate 12 to be inspected.

The inspection apparatus 10 includes a main body 14 having an upper front surface inclined upward. The main body 14 is formed in a housing shape by a main body frame in which a plurality of channel members are assembled and a plurality of panels detachably attached to the main body frame.

The left-right direction of the inclined surface of the main body 14 (the direction perpendicular to the plane of FIG. 1 and hereinafter referred to as the "Y direction").
Is a test station for the substrate 12, that is, a test station 16 (see FIGS. 12 and 13). Each of the left and right areas of the test station 16 is a relay station 18 for an untested or tested board. (Only one is shown).

The rear area of the main body 14 is a cassette station (that is, a cassette mounting table) 20.
The front-back direction of the main body 14 (the left-right direction in FIG.
Hereinafter, it is referred to as “X direction”. The central area is a transfer station 22 for transferring the substrate 12 from the relay station 18 to the cassette station 20 or vice versa.

The inspection probe unit 24 and the inspection stage 26 are arranged at the inspection station 16 as shown in FIGS. 12 and 13, and the transfer device 28 is arranged at each relay station 18, and a plurality of cassettes 30 are arranged. Are arranged in the cassette station 20 at an interval in the Y direction, and a pair of substrate transfer robots 32 are arranged in the transfer station 22 at an interval in the Y direction.

As shown in FIGS. 12 and 13, the probe unit 24 is of a known type in which a plurality of probe blocks are mounted on a rectangular plate-like base, and the plate-like base of the probe unit 24 is disposed diagonally below. Substrate 12
Has a rectangular opening 34 for visually inspecting.

The transfer device 28 and the robot 32 have a one-to-one correspondence, and the transfer of the substrate 12 between the two is performed by the corresponding robot 32. One relay station 18 is used as a loader station that receives the substrate 12 from the robot 32, and the other relay station 18 is used as an unloader station that transfers the substrate 12 to the robot 32.

One or more cassettes 30 for horizontally storing untested substrates 12 such that the longitudinal direction thereof is in the X direction.
Is disposed at a position of the cassette station 20 corresponding to the rear of one of the relay stations 18 acting as a loader station.

One or more empty cassettes (not shown) that do not contain the substrate 12 are arranged in the cassette station 20 at a location corresponding to the rear of the other relay station 18 acting as an unloader station. . The empty cassette stores the inspected substrates horizontally such that the longitudinal direction thereof is in the X direction.

The robot 32 is movably supported by a pair of guide rails 36 extending in parallel with the transfer station 22 in the Y direction, and has a robot moving mechanism 38 having a motor and a lead screw rotated by the motor. To transfer the substrate 12 to the cassette 30 and the transfer device 28 in a horizontal state.

Each of the robots 32 moves the forked hand 40 along the guide rail 36 to the hand drive mechanism 4.
2 is a known device that transfers the substrate 12 by moving the substrate 12. The substrate 12 is transported and transferred horizontally by the robot 32 in a state where the longitudinal direction matches the longitudinal direction of the hand 40.

In the robot 32 on the loader side, the uninspected substrate is received by the hand 40 from the cassette 30 in a horizontal state, and the received substrate is transferred to the transfer device 28 on the loader side in a horizontal state. The robot 32 on the unloader side transfers the inspected substrate to the transfer device 28 on the unloader side.
And the substrate is transferred to an appropriate empty cassette in a horizontal state.

The inspection stage 26 includes a chuck top 44 for releasably adsorbing the substrate 12 and a chuck top 44.
And a drive stage 46 for moving the drive stage. The movement of the chuck top 44 by the drive stage 46 includes an angular rotation about a Z-axis orthogonal to the substrate 12 received by the chuck top 44 and an X-direction and a Y-direction in a plane parallel to the received substrate 12. It includes two-dimensional movement and movement in the direction of the Z axis.

The inspection stage 26 transfers the substrate 12 to the transfer device 48. The transport device 48 is reciprocated between the inspection stage 26 and the unloader-side transfer device 28, and a plurality of pairs of loader sandwiching members 48a reciprocated between the loader-side transfer device 28 and the inspection stage 26. A plurality of unloader sandwiching members 48 a (not shown) are supported by a pair of common arms 49.

The pair of holding members 48a are spaced from each other in the direction of inclination of the inclined surface of the main body 14, but are spaced from the adjacent pair of holding members 48a in the Y direction. The transfer device 48 transfers the substrate 12 while holding the substrate 12 between the pair of holding members 48a. The holding member for the loader and the holding member for the unloader are moved in synchronization with each other, and each transfer the substrate 12 to the corresponding transfer device 28.

As shown in FIGS. 3 to 5, each transfer device 28 is arranged on the work table 50 so as to sandwich the untested or inspected substrate 12 horizontally with respect to the robot 32. A plurality of centering tools 52
And a moving mechanism 54 for moving the work table 50 in the direction of the Z-axis perpendicular to the substrate 12 sandwiched between the centering tools 52.
And a drive mechanism 56 for angularly rotating the worktable 50 about a pivot extending in the Y direction.

The work table 50 has a plurality of arms 58 extending in a radial direction of an imaginary circle in a plane parallel to the substrate 12 sandwiched between the centering tools 52 supported by a support mechanism 60, and a robot 32 and a transfer device. An elevating table 62 for transferring the substrate 12 in cooperation with the centering device 52 with respect to 48 is arranged on the support mechanism 60 such that the elevating table 62 is located at the center of the arm 58.

In the illustrated example, four arms 58 are combined in a cross shape, and a centering tool 52 is arranged on each arm 58. Although not shown, the support mechanism 60
Is provided with a rotation mechanism for angularly rotating the arm 58 about a Z-axis perpendicular to the substrate 12, and a lifting mechanism, ie, a displacement mechanism for moving the lifting table 62 in the Z-axis direction. The elevating table 62 is formed in a disk shape, and has a plurality of suction pads 64 on its upper surface for releasably sucking the substrate 12.

The arm 58 is mounted on the output shaft of the rotation mechanism of the support mechanism 60, and the support mechanism 60 is
4 is supported. The elevating table 62 includes a support mechanism 6.
0 is selectively supported between a position where the centering tool 52 advances in the direction of the Z axis from the centering tool 52 by the displacement mechanism and a retracted position at substantially the same position as the centering tool 52 in the direction of the Z axis. Is displaced.

Each centering tool 52 has a plate-like block 66 on a guide rail 68 arranged on the arm 58.
And a pair of rollers 70 abutting on the end surface of the substrate 12 are rotatably supported by the block 66 about the Z axis. The centering tool 52 is synchronously moved in a direction in which the centering tool 52 moves toward and away from each other (a radial direction of a virtual circle) by a driving mechanism (not shown).

The moving mechanism 54 is provided with a guide rail 74 and a guide 76 which are fitted to the support mechanism 60 so as to be relatively movable and extend in the Z-axis direction inside a flat U-shaped receiving member 72.
To be movable in the direction of the Z axis. The receiving member 72 has a pair of pivots 78 coaxially extending in the Y direction.
Are supported by the drive mechanism 56 by the pivot 78. The pivots 78 extend in opposite directions from the receiving member 72.

The receiving member 72 includes a lead screw 8 attached to the receiving member 72 so as to extend in the Z-axis direction.
0 and the support mechanism 6 screwed to the lead screw 80
It is moved in the direction of the Z-axis by a Z-axis drive mechanism that includes one or more lead nuts 82 assembled to the zero and an electric motor 84 that rotates the lead screw 80 about its axis.

In the moving mechanism 54, when the lead screw 80 is rotated around the Z axis by the electric motor 84,
Since the lead nut 82 is moved in the direction of the Z axis, the support mechanism 60 is moved in the direction of the Z axis. This allows
The work table 50 is moved in the direction of the Z axis.

The driving mechanism 56 is a pivot 78 of the moving mechanism 54.
Are supported by a pair of brackets or bases 86, 88 spaced in the Y direction such that the moving mechanism 54 is pivotally movable between the bases 86, 88. The bases 86 and 88 are mounted on the frame of the inspection device 10 and support the entire delivery device 28. One base 86 has a U-shape that opens upward,
The other base 88 has an L-shape.

The driving mechanism 56 includes a lead screw 90 rotatably disposed on one base 86 and extending in the X direction, an electric motor 92 for rotating the lead screw 90 about its axis, and a lead screw 90. A threaded lead nut 94, a first link 96 pivotally connected to the lead nut 94 about an axis extending in the Y direction, and a second link 96 mounted to one pivot 78 of the moving mechanism 54. Link 98.

The lead nut 94 has an assembling portion 102 for assembling the first link 96 with the pivot 100. The first and second links 96 and 98 are relatively movably connected by a guide rail 104 and a guide 106 slidably connected to each other. The moving direction of the lead nut 94 is determined by a pair of guide rails 108 (see FIG. 3) attached to the base 86.
It is regulated in the X direction.

In the driving mechanism 56, the lead screw 90 is rotated by the
Is moved in the X direction, the first link 96
The first link 96 is rotated angularly about the zero axis.
A second link 98 slidably coupled to the pivot shaft 78 is angularly rotated about the axis of the pivot 78. As a result, the moving mechanism 54 is angularly rotated about the axis of the pivot 78, so that the work table 50 supported by the moving mechanism 54 is
Are rotated angularly about an axis extending in the Y direction (actually, the axis of pivot 78).

Next, the operation of the inspection apparatus 10 will be described with reference to FIGS.

First, the robot 32 on the loader side directs the hand 40 to the cassette 30 containing the uninspected substrate, and takes out the uninspected substrate 12 in the cassette 30 horizontally by the hand 40. At this point, the longitudinal direction of the uninspected substrate 12 matches the longitudinal direction (X direction) of the hand 40.

Next, the robot 32 on the loader side rotates the hand 40 around the Z axis by 180 degrees with the substrate 12 received as described above, and adjusts the hand 40 to a predetermined height position. Thus, the substrate 12 is displaced above the transfer device 28 on the loader side.

Next, as shown in FIG. 6, the lifting table 62 of the transfer device 28 on the loader side is
0, and is raised to a position above the hand 40. As a result, the substrate 12 has its longitudinal direction set to X.
In the horizontal state, the hand 40 passes from the hand 40 to the lifting table 62 and is sucked by the suction pad 64. In this state, the robot 32 moves the hand 40 to the cassette 3
Move to 0 side.

Next, the lifting table 62 is moved to the centering device 52.
It can be lowered to almost the same height as. However, alignment tool 5
2 is the substrate 1 before the descent of the elevating table 62 is started.
2 has been moved to a position where it can be received in the space formed by the rollers 70.

Next, as shown in FIG.
Are synchronously moved in the direction toward each other. Thereby, the centering tool 52 causes the roller 70 to abut on the end face of the substrate 12,
The substrate 12 is pushed toward the centering tool 52 of the other party. As a result, the substrate 12 is two-dimensionally moved in a plane parallel to the substrate 12 and is aligned with the transfer device 28, and is sandwiched in a horizontal position by the interaction of the centering tool 52.

The alignment by the transfer device 28
This is a so-called centering in which the center of the substrate 12 matches the center of the work table 50 or the arm 58, which is different from the conventional alignment in which one end surface of the substrate is brought into contact with positioning pins.

At the time of alignment, the substrate 12 is released from suction by the elevating table 62 and is moved with respect to the elevating table 62 while being slightly lifted from the elevating table 62 by the compressed air injected from the elevating table 62. You. For this reason, at the time of alignment, even if the substrate 12 is two-dimensionally moved with respect to the transfer device 28, damage to the substrate 12 is prevented.

At the time of alignment, the substrate 12 is displaced with respect to the block 66 while rotating the roller 70 with its end face abutting on the roller 70. Therefore, even if the substrate 12 is moved two-dimensionally. In addition, the movement of the substrate 12 becomes smooth.

When the alignment is completed, the arm 58 of the transfer device 28 is rotated by 90 degrees around the Z-axis, as shown in FIG. Thereby, the substrate 1 being received
2, the direction is changed such that the longitudinal direction is the transport direction (Y direction) of the substrate 12 by the transport device 48. At this time, since the substrate 12 is sandwiched between the centering tools 52 and adsorbed on the elevating table 62, it is not displaced with respect to the centering tool 52 and the elevating table 62.

Next, as shown in FIG. 9, the work table 50 and the moving mechanism 54 are pivoted by the driving mechanism 56 to the pivot 78.
Is rotated 60 degrees around the axis of As a result, the substrate 12 sandwiched between the centering members 52 and adsorbed on the elevating table 62 is changed to an oblique posture inclined by 60 degrees with respect to the horizontal line. At this time, the guide rail 104 and the guide 1
06 relatively slides in the coupled state.

In this state, the identifier formed on the upper surface of the substrate 12 is read by the video camera 110 mounted on the main body 14 and stored in the memory, as shown in FIGS. . The identifier is a character such as an arithmetic numeral for specifying a board, and is used when recording and storing the inspection result of the board. At this time, since the substrate 12 is centered with respect to the transfer device 28, the identifier is correctly read.

The identifier may be displayed on the monitor, and the operator may check the monitor screen and record the identifier. If the identifier is a barcode, a barcode reader may be used instead of the video camera 110.

Next, as shown in FIG. 10, only the members on the loader side are shown.
8 and the inspection station 16 so that the position of the substrate 12 in the Z-axis direction is
The work table 50 is moved by the moving mechanism 54 toward the transport device 48 in the direction of the Z-axis so as to coincide with the position a.

Next, as shown in FIG. 11, the loader sandwiching member 48a is moved in the opposite direction to sandwich the substrate 12, and the arm 58 is returned to the original position by the moving mechanism 54. As a result, the substrate 12 is transferred from the transfer device 28 to the holding member 48a in an oblique posture.

At the same time as the holding member 48a on the loader side holds the untested substrate 12, the holding member on the unloader side receives and holds the inspected substrate on the inspection stage 26 in an oblique posture. Also, the robot on the unloader side
The inspected substrate on the transfer device 28 on the unloader side is received by the hand in a horizontal state, and the operation of transferring the substrate to an empty cassette is completed.

When transferring the inspected substrate between the robot and the transfer device on the unloader side, the transfer device 28 on the unloader side transfers the inspected substrate to the lifting table 62.
In a state in which the robot hand is retracted, the centering tool 52 is moved in a direction in which these are separated from each other, and the lifting table 62 is raised in a state where the robot hand on the unloader side is retracted. In the state of being protruded to the side, the suction of the inspected substrate is released, and then the elevating table 62 is lowered. Thus, the substrate of the centering device transfer device 28 on the unloader side is transferred to the robot on the unloader side.

After the above, the transfer device 2 on the unloader side
8 rotates the work table 50 and the moving mechanism 54 about the axis of the pivot 78 by the drive mechanism 56 so as to receive the next inspected substrate obliquely from the transfer device 40.

Next, the transport device 48 transports the uninspected substrate and the inspected substrate to the inspection station 16 and the relay station 18 on the unloader side, respectively, and transfers the substrates to the inspection stage 26 and the transfer device 28 on the unloader side. Hand it diagonally. FIG. 12 shows an untested substrate 1
2 shows a state in which the test object 2 is passed to the inspection stage 26.

When the untested substrate is transported to the inspection station 16, the inspection stage 26 moves the chuck top 44
Is projected in the direction of the Z axis by the drive stage 46,
The uninspected substrate is attracted to the chuck top 44, and the chuck top 44 is returned to a predetermined position after the holding member 48a on the loader side is moved away, and the holding member 48a on the loader side is moved from the inspection station 16 to another position. After that, the chuck top 44 is again projected in the Z-axis direction to start inspection (see FIG. 13). Before starting the inspection, the alignment marks formed on the substrate may be read to perform precise alignment of the substrate.

When the inspected substrate is transferred to the relay station 18 on the unloader side, the transfer device 28 on the unloader side moves the work table 50 in the Z-axis direction with the work table 50 and the moving mechanism 54 inclined. The work table 50 is lowered to a predetermined position after the holding member 48a on the unloader side is moved in the direction in which the inspected substrate is held by moving the centering tool 52 in the direction in which the unloader side moves. After the holding member 48a is moved from the inspection station 16 to another position, the work table 50 is returned to a horizontal state, and the arm 58 is rotated by 90 degrees around the Z axis. Thereby, the inspected substrate is horizontally received by the transfer device 28 on the unloader side so that the substrate can be transferred to the robot on the unloader side.

In the transfer device 28 on the unloader side, the inspected substrate is transferred from the transport device 48 to the lifting table 6.
2 and the substrate is taken out of the elevating table 62 by the centering tool 5.
2 may be passed.

While the transfer device is transferring the two substrates as described above, the relay station 18 on the loader side returns the work table 50 to a horizontal state, reverses the work table 50 by 90 degrees, and sets a new unprocessed state. Wait to receive the board for inspection.

In the transfer device 28 on the loader side, instead of rotating the arm 90 degrees, the direction of the substrate may be changed by rotating the elevating table 62 90 degrees about the Z axis before descending the arm. .

In the above embodiment, the transfer device 28 on the loader side and the transfer device 28 on the unloader side are used, but the same transfer device 28 can be used for both the loader and the unloader. In this case, the transfer device 2
The transfer of the substrate to and from the display device 8 is performed by using a robot having a pair of hands to receive the inspected display substrate in one arm and to pass the untested display substrate received in the other arm to the same transfer device 28. Thus, the robot and the transfer device 28 can be controlled.

The present invention is not limited to the above embodiment. For example, the present invention is applicable not only to a delivery device for a visual inspection device but also to a delivery device for other inspection devices such as an automatic inspection device, an EL display substrate inspection device, a glass substrate inspection device for a display panel, and the like. can do.

The present invention is not limited to the above embodiment, but can be variously modified without departing from the gist thereof.

[Brief description of the drawings]

FIG. 1 is a diagram showing an embodiment of an inspection device using a delivery device according to the present invention.

FIG. 2 is a diagram of a loader station in the inspection device of FIG.

FIG. 3 is a plan view showing an embodiment of a delivery device according to the present invention.

FIG. 4 is a front view of the delivery device shown in FIG.

FIG. 5 is a sectional view taken along line 5-5 in FIG.

FIG. 6 is a diagram showing the operation of the inspection device shown in FIG.

FIG. 7 is a diagram showing an operation after FIG. 6;

FIG. 8 is a diagram showing the operation after FIG. 7;

FIG. 9 is a diagram showing the operation after FIG. 8;

FIG. 10 is a diagram showing the operation after FIG. 9;

FIG. 11 is a diagram showing an operation after FIG. 10;

FIG. 12 is a diagram showing the operation after FIG. 11;

FIG. 13 is a diagram showing the operation after FIG. 12;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Inspection apparatus 12 Display board 14 Main body 16 Inspection station 18 Relay station 20 Cassette station 22 Transfer station 24 Probe unit 26 Inspection stage 28 Delivery device 30 Cassette 32 Robot

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Shinji Fujiwara 2-6-8 Kichijoji Honcho, Musashino City, Tokyo Inside Micronics Co., Ltd. (72) Inventor Isao Ueki 2-6-8 Kichijoji Honmachi, Musashino City, Tokyo No. F term in Japan Micronics Co., Ltd. (reference) 2H088 FA11 FA30 MA20 5F031 CA05 FA02 FA12 FA15 GA38 GA49 HA13 HA24 HA27 HA44 HA58 JA04 KA11 KA20 LA12 MA33 PA16 5G435 AA17 AA19 BB12 KK05 KK09 KK10

Claims (8)

[Claims] 1. A work table and a plurality of centering tools for holding a substrate in cooperation with each other and arranged on the work table so as to be movable toward and away from each other in a plane parallel to the held substrate. A transfer device for a display substrate, comprising: a dispensing tool; and a driving mechanism for rotating the work table angularly about a pivot extending in a horizontal direction. 2. The method according to claim 1, wherein the driving mechanism is configured to angularly move the work table about an axis extending in a horizontal direction so as to selectively displace a substrate sandwiched between the centering tools between a horizontal state and an inclined state. The device of claim 1, wherein the device is rotated. 3. The centering device includes: a block arranged on the work table so as to be movable in a radial direction of a virtual circle; and a block rotatably around a Z axis perpendicular to a sandwiched substrate. The apparatus according to claim 1 or 2, further comprising at least one supported roller and a roller capable of abutting an end surface of the substrate. 4. The work table includes a plurality of arms extending in a radial direction of an imaginary circle in a plane parallel to the substrate sandwiched between the centering tools, supporting the arms, and holding the arms between the arms. A support mechanism for angularly rotating about a Z-axis perpendicular to the mounted substrate, wherein each centering tool is disposed on the arm so as to be movable in the radial direction.
Or the apparatus according to 3. 5. The elevating table arranged on the support mechanism for transferring a substrate, wherein the elevating table is displaced in the direction of the Z-axis with respect to the centering tool. The apparatus of claim 4, comprising a table. 6. The apparatus according to claim 1, further comprising a moving mechanism for moving the work table in a Z-axis direction perpendicular to the substrate sandwiched between the centering tools. 7. The moving mechanism includes:
The apparatus according to claim 4, further comprising a receiving member movably receiving in the direction of the axis, and a mechanism for moving the receiving member in the direction of the Z axis. 8. The drive mechanism includes a base for pivotally receiving the support mechanism about the axis, a threaded rod rotatably disposed on the base, and a threaded rod about the axis. A rotation source, a nut threadedly engaged with the threaded rod, a first link pivotally connected to the nut about an axis extending in a direction intersecting the threaded rod, and the worktable; 8. A device as claimed in any one of the preceding claims, comprising a second link assembled to the first link and a second link movably connected to the first link.