KR100854072B1 - Apparatus for inspecting glass - Google Patents

Abstract

A substrate inspection apparatus is provided to transfer a substrate omnidirectionally without using an expensive articulated robot, thereby significantly reducing an inspection cost. A first horizontal driving unit(120) is connected to move in a first horizontal direction on a base(110). A second horizontal driving unit(130) is connected to move in a second horizontal direction orthogonal to the first horizontal direction on the first horizontal driving unit. A first rotation unit(140) is connected to rotate around a vertical direction on the second horizontal driving unit. A couple of vertical driving units(150) are mounted in both sides of an upper part of the first rotation unit. The vertical driving unit asymmetrically lifts a holder(170), for supporting a substrate, in the vertical direction. A second rotation unit(160) rotates the holder around the first horizontal direction. To prevent skew of an inspection medium when the one couple of vertical driving units are asymmetrically driven, a slide changes a location of the second rotation unit between at least one vertical driving unit and the second rotation unit of the upper part.

Description

Substrate inspection apparatus {Apparatus for inspecting glass}

TECHNICAL FIELD The present invention relates to a display inspection apparatus, and more particularly, to a substrate inspection apparatus constituting a display element.

In general, in the process of manufacturing a flat panel display panel, for example, a liquid crystal display panel, as a test for the display panel, a macro test made by the naked eye and a micro test using equipment such as a microscope should be performed.

Here, the macro inspection is a method of inspecting the flaw or contamination present on the surface of the substrate by the naked eye by irradiating illumination light on the surface of the display panel or by irradiating a backlight on the back surface of the glass substrate.

Current display devices are being miniaturized to be adopted in portable components, and at the same time, they are being enlarged with high quality to be applied to ultra-large TVs. Currently, 8th generation substrates with an area of 1870 × 2200mm ² to 9th generation substrates with an area of 1950 × 2250mm ² have been released.

Such an enlarged substrate may be obtained by attaching a plurality of glass substrates, or may consist of a single glass substrate, which is difficult to transport and attach, and the previous equipment for inspecting it moves only in the front, rear, left and right directions. This made it difficult to carry out inspections in various directions.

In the past, an inspection apparatus called an articulated robot has been proposed. This articulated robot inspection apparatus has an advantage that a large substrate can be moved at various angles by using a robot arm bent in various directions.

Since the articulated robot must support such a large substrate, a relatively large size is required to withstand the load. However, the transfer of the substrate by the large articulated robot not only causes anxiety to the operator, but also may cause a serious problem that the safety of the operator may not be ensured as well as the substrate is broken when the articulated robot malfunctions. Moreover, since such articulated robots are very expensive, they cause substrate inspection costs and even display manufacturing costs to rise.

Accordingly, it is an object of the present invention to provide a substrate inspection apparatus capable of transferring a substrate in various directions without using an expensive articulated robot.

In order to achieve the above object of the present invention, the present invention provides a base, a first horizontal drive unit movably connected along a first horizontal direction on the base, the first horizontal direction on the first horizontal drive unit A second horizontal drive unit movably connected along a second horizontal direction orthogonal to the first horizontal unit, a first rotation unit rotatably connected about a vertical direction on the second horizontal drive unit, and mounted on the first rotation unit And a vertical driving unit for moving the holder supporting the substrate along the vertical direction, and a second rotating unit for rotating the holder about the first horizontal direction.

The first horizontal drive unit may include a first ball screw arranged along the first horizontal direction on the base, a first block screwed to the first ball screw, and a first ball screw that transmits rotational force to the first ball screw. It may include one drive source.

The second horizontal drive unit may further include a second ball screw arranged along the second horizontal direction on the first horizontal drive unit, a second block screwed to the second ball screw, and the second ball screw. It may include a second drive source for transmitting a rotational force to the.

The first rotation unit may include a first rotation block rotatably connected about the vertical direction on the second rotation unit, and a third driving source for transmitting rotational force to the first rotation block.

The vertical driving unit includes a fourth driving source, and when the power is transmitted from the fourth driving source, the vertical driving unit extends in the vertical direction to elevate the holder. The vertical drive unit has a hollow vertical support mounted on the first rotating unit, and a lower portion inserted in the hollow vertical support to be movable along the vertical direction, and an upper portion of the vertical driving unit is connected to the second rotating unit. And a rod connected to the rod, and the rod is operated by receiving power from the fourth driving source. The vertical driving unit may be disposed at both sides of the first rotation unit to support both sides of the holder, The extension lengths of the respective vertical drive units may be asymmetrical to each other.

The second rotating unit may be rotatably connected to the vertical driving unit about the first horizontal direction, and may include a second rotating block to which the holders are fixed, and a fifth driving source transmitting a rotating force to the second rotating block. It may include. In this case, when the vertical driving unit is located at both sides of the first rotating unit, and the second rotating unit is installed in each of the vertical driving units, each of the second rotating units may be operated with different rotational forces. .

In addition, at least two of the first horizontal driving unit, the second horizontal driving unit, the first rotating unit, the vertical driving unit, and the second rotating unit may be simultaneously driven in combination.

According to the present invention, it is possible to transfer the substrate in all directions without using an expensive articulated robot, so that the operator can perform the substrate inspection stably and further reduce the inspection cost.

Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings.

1 and 2, the substrate inspection apparatus 100 according to the present embodiment may include a base 110, a first horizontal drive unit 120, a second horizontal drive unit 130, a first rotation unit 140, The vertical driving unit 150, the second rotating unit 160, and the holder 170 may be configured.

The first horizontal drive unit 120 is located above the base 110, as shown in FIGS. 1, 2, 3A, and 3B, and the holder ( 170). The first horizontal drive unit 120 may be composed of a first ball screw 122, a first block 124 and a first drive source 126. That is, the first horizontal drive unit 120 may be configured in the form of a so-called linear motion guide (LM guide). The first ball screw 122 is arranged along the first horizontal direction on the base 110, and the first block 124 is screwed with the first ball screw 122 to substantially drive the first horizontal. The unit 120 is driven, and the first drive source 126 transmits rotational force to the first ball screw 122.

As shown in FIGS. 1, 2, 4a, and 4b, the second horizontal drive unit 130 has a second horizontal direction, for example, orthogonal to the holder 170, in a first horizontal direction (x direction). To move in the direction of The second horizontal drive unit 130 may include a second ball screw 132, a second block 134, and a second drive source 136. The second ball screw 132 is arranged along the second horizontal direction on the first horizontal drive unit 120, the second block 134 is screwed with the second ball screw 132, and The second drive source 136 transmits rotational force to the second ball screw 132.

The first rotating unit 140 is located on the second horizontal drive unit 130, as shown in FIGS. 1, 2, 5a and 5b, to move the holder 170 in a vertical direction, such as z. Rotate around the direction. The first rotation unit 140 is connected to the first rotation block 142 and the first rotation block 142 rotatably connected about the vertical direction (z direction) on the second horizontal driving unit 130. It may include a third drive source 144 for transmitting a rotational force.

The vertical driving unit 150 is mounted to the first rotating unit 140 as shown in FIGS. 1, 2, 6A, and 6B to move the holder 170 along the vertical direction. Two such vertical driving units 150 may be provided to support both sides of the holder 170. Each vertical drive unit 150 may include, for example, a hollow vertical support 152, a rod 154, and a fourth drive source 156. The rod 154 is embedded in the hollow vertical support 152 and has a lower portion that is movably inserted along the vertical direction, and an upper portion thereof may be connected to the second rotating unit 160. That is, the vertical support 152 and the rod 154 has a telescopic shape, and the fourth driving source 156 is a driving force (for example, a driving force converted into a linear motion force) to the rod 154 in the vertical support 152. ) Is installed to transmit, the rod 154 is raised when transmitting the driving force. In this case, the vertical driving unit 140 may further include a linear motion guide, a timing belt, and / or a ball screw, although not shown in the drawing. The timing belt and the ball screw may transmit a driving force to the rod 154 together with the fourth driving source 156. Here, the pair of vertical driving units 150 may elevate the holder 170 in symmetry with each other. The lifting height of the vertical drive unit 150 may be controlled from the magnitude of the power provided from the fourth drive source 156. For example, the fourth driving source 156 may generate a rotational force, which is converted into a power to cause a linear movement by a gear device (not shown) embedded in the substrate inspection device to load the rod 154. Is provided. The power applied to the rod 154 thus controls the rising height of the rod 154.

In addition, as shown in FIG. 7A, the pair of vertical driving units 150 may be asymmetrically driven. That is, only one vertical driving unit 150 may be operated, or each vertical driving unit 150 may be operated at different heights. This is achieved by selective operation of the fourth drive source 156 or by providing different drive forces of the fourth drive source 156.

At this time, in order for each of the manual driving units 150 to drive normally asymmetrically, the second rotating unit 160 on the more elevated side must be transported by a predetermined length M. That is, as shown in FIG. 7B, when the distance A between the second rotating units 160 and the vertical driving unit 150 are asymmetrically driven when the vertical driving unit 150 is symmetrically driven. A distance difference of M is generated between the distances B between the second rotation units 160. This distance difference M may cause the holder 170 to which the glass substrate (not shown) is inserted to be twisted. Therefore, the second rotation unit 160 on the vertical drive unit 150 on the relatively lifted side must be transported by the distance difference M.

In the present embodiment, in order to reduce the distance difference by M, a slide 190 for transferring the second rotation unit 160 is provided between the vertical drive unit 150 and the second rotation unit 160. It is provided. The slide 190 may be installed on at least one side, and when the vertical driving unit 150 is asymmetrically driven, the slide 170 may swing normally.

The second rotation unit 160 rotates the holder 170 about the first horizontal direction (x direction) as shown in FIGS. 1, 2, 8a and 8b. The second rotating unit 160 may be installed in each of the vertical driving units 150, and may be configured of the second rotating block 162 and the fifth driving source 164, or may be configured of only a simple rotating bearing. . The second rotating block 162 is rotatably connected to the vertical driving unit 150 about the first horizontal direction (x direction) and is fixed to the holder 170. The fifth driving source 164 transmits rotational force to the second rotating block 160. Here, reference numeral 166 denotes a reduction gear unit for adjusting the rotational speed of the fifth drive source 164. In this case, the second rotating unit 160 may be installed on the vertical driving unit 150 to support the holder 170 together with the vertical driving unit 150. Accordingly, in consideration of the asymmetrical driving of the vertical drive unit 150, the second rotating unit 160 and at least one side of the vertical drive unit 150 are held by a passive support member such as a universal joint. It may be fixed to (170). Here, the manual support member may be substantially the rotation block 162.

The holder 170 is for supporting the glass substrate 180, and may have a frame shape, for example, and the support bar 174 extending in a vertically, vertically, horizontally, or diagonally direction in the space defined by the frame. Can be installed.

In addition, the reference numeral 200 is a control unit for controlling the substrate inspection apparatus, the control unit 200 controls the movement of the holder 170 by controlling the operation of each drive unit (120-160).

The board | substrate inspection apparatus of this embodiment which has such a structure is driven as follows.

First, as shown in FIGS. 3A and 3B, the first horizontal drive unit 120 operates by operating the first ball screw 122 that receives the rotational force from the first drive source 126. The first block 125 screwed with the 122 is moved in a first horizontal direction (x direction) which is a direction in which the first ball screw 122 extends. Accordingly, the holder 170 is moved in the x direction, which is the first horizontal direction. Accordingly, the operator can inspect the left and right sides of the substrate while minimizing the position variation.

4A and 4B, the second horizontal drive unit 130 is screwed with the second ball screw 132 by operating the second ball screw 132 that has received the rotational force from the second drive source 136. The combined second block 134 is operated by moving in the second horizontal direction (y direction), which is the extension direction of the second ball screw 132. Accordingly, the holder 170 is moved by the second horizontal driving unit 130 in the y direction, which is the second horizontal direction. Accordingly, the inspection can be performed while adjusting the perspective of the substrate 180 while minimizing the positional variation of the operator.

As shown in FIGS. 5A and 5B, the first rotation unit 140 may rotate the holder 170 about a vertical direction (z direction). The first rotation unit 140 is operated by rotating the first rotation block 142 in the direction of the arrow in the drawing by the rotation force applied by the third drive source 144. The first rotation unit 140 may further include a speed reducer 146, for example, a planetary gear reducer, to control the rotation speed of the first rotation unit 140. Accordingly, the worker may proceed with the inspection while rotating while standing the substrate 180.

As shown in FIGS. 6A and 6B, the vertical driving unit 150 raises and lowers the holder 170 in a vertical direction (z-axis direction). The vertical drive unit 150 is a rod 154 in the hollow vertical support 152 is raised by a timing belt (not shown) and a ball screw (not shown) in accordance with the power supply of the fourth drive source 156. As a result, the holder 170 is elevated. In this case, the pair of vertical driving units 150 may be controlled individually (that is, asymmetrically) as described above. That is, as shown in Figure 6b, the vertical drive unit 150 may be elevated (extended) to the same height, or may be extended to different heights as shown in Figure 7a by individual control. Such individual control may be performed by a command to drive the controller 200. By the vertical driving unit 150, the operator can inspect the upper and lower surfaces of the substrate 180 in detail without large movement, and perform inspection while rocking the substrate.

As shown in FIGS. 8A and 8B, the second rotation unit 160 rotates the holder 170 about the first horizontal direction (x-axis direction). The second rotation unit 160 is installed in the pair of vertical drive units 150, respectively, to rotate the holder 170 when power is transmitted from the fifth drive source 164 to the second rotation block 162. The second rotation unit 160 may also include a speed reducer (not shown), such as a planetary gear reducer, to control the rotation speed. Accordingly, the operator may perform the inspection while rotating the substrate 180 by 360 ° based on the x direction. In addition, the substrate inspection apparatus according to the present embodiment may drive at least two driving units in combination.

Referring to FIG. 9, since the vertical driving unit 150 is driven in a state where the first horizontal driving unit 120 is moved to a desired position, the substrate may be moved according to the worker position. In the driving order of the first horizontal driving unit 120 and the vertical driving unit 150, the vertical driving unit 150 may be driven after the first horizontal driving unit 120 is driven first, and the vertical driving unit 150 may be driven. This may be driven first and the first horizontal drive unit 120 may be driven, or may be driven simultaneously. This order may be changed by the operation of the controller 200.

In addition, as shown in FIG. 10, the second horizontal driving unit 130 and the vertical driving unit 150 may also be driven in combination. Again, the driving order can be varied.

According to this embodiment, the substrate is conveyed in the x direction (first horizontal direction), the y direction (second horizontal direction), the z direction (vertical direction), the direction of rotation about the z axis, and the direction of rotation about the x axis. In addition, the substrate can be moved in an oblique direction (asymmetrical operation of the vertical moving unit), so that defects of the substrate can be inspected in more detail. Thereby, the inspection can be performed while transporting the substrate in all directions without purchasing an expensive articulated robot, and the operator can inspect the substrate more stably.

In the present embodiment, for convenience of explanation, the driving sources are indicated by dotted lines on a portion of each driving unit, but the driving sources of the present embodiment may be embedded in the driving unit or installed at various positions.

Although the present invention has been described in detail with reference to preferred embodiments, the present invention is not limited to the above embodiments, and various modifications may be made by those skilled in the art within the scope of the technical idea of the present invention. .

The board can be moved in all directions without using expensive joint robots, thereby greatly reducing inspection costs.

1 is a perspective view of a substrate inspection apparatus according to an embodiment of the present invention,

2 is a plan view of a substrate inspection apparatus according to an embodiment of the present invention,

3A and 3B are front cross-sectional views of a substrate inspection apparatus according to an exemplary embodiment of the present invention, illustrating a movement in the x-axis direction of the substrate inspection apparatus;

4A and 4B are side cross-sectional views of a substrate inspection apparatus according to an embodiment of the present invention, showing a movement in the y-axis direction of the substrate inspection apparatus;

5A and 5B are front cross-sectional views of a substrate inspection apparatus according to an embodiment of the present invention, illustrating rotation of the substrate inspection apparatus based on the z-axis direction;

6A and 6B are front cross-sectional views of a substrate inspection apparatus according to an exemplary embodiment of the present invention, illustrating a movement in a z-axis direction of the substrate inspection apparatus;

7A and 7B are front cross-sectional views of a substrate inspection apparatus according to an exemplary embodiment of the present invention, illustrating asymmetrical operation of a vertical driving unit;

8A and 8B are side cross-sectional views of a substrate inspection apparatus according to an exemplary embodiment of the present invention, illustrating rotation of the substrate inspection apparatus based on the x-axis direction;

9 is a front sectional view of a substrate inspection apparatus according to another embodiment of the present invention, and

10 is a side cross-sectional view of a substrate inspection apparatus according to another embodiment of the present invention.

<Explanation of symbols for the main parts of the drawings>

110: base 120: first horizontal drive unit

130: second horizontal drive unit 140: first rotating unit

150: vertical drive unit 160: second rotation unit

170: holder 180: substrate

Claims (14)

Base; A first horizontal drive unit movably connected in a first horizontal direction on the base; A second horizontal drive unit movably connected along the second horizontal direction orthogonal to the first horizontal direction on the first horizontal drive unit; A first rotating unit rotatably connected about a vertical direction on the second horizontal driving unit; A pair of vertical driving units mounted on both sides of the upper part of the first rotating unit to asymmetrically lift the holder supporting the substrate along the vertical direction; A second rotating unit for rotating the holder about the first horizontal direction; And When the pair of vertical drive units are driven asymmetrically, the position of the second rotating unit is changed between the at least one vertical drive unit and the second rotating unit thereon to prevent the test medium from being twisted. Substrate inspection device comprising a slide. The method of claim 1, The first horizontal drive unit, A first ball screw arranged along said first horizontal direction on said base; A first block screwed to the first ball screw; And And a first drive source for transmitting rotational force to the first ball screw. The method of claim 1, The second horizontal drive unit, A second ball screw arranged along the second horizontal direction on the first horizontal drive unit; A second block screwed to the second ball screw; And And a second drive source for transmitting rotational force to the second ball screw. The method of claim 1, The first rotating unit, A first rotating block rotatably connected about the vertical direction on the second horizontal drive unit; And And a third driving source for transmitting rotational force to the first rotating block. The method of claim 1, The vertical drive unit includes a fourth drive source, The substrate inspection apparatus extends the holder by extending the vertical drive unit in the vertical direction when transmitting power from the fourth drive source. The method of claim 5, wherein The vertical driving unit includes a rod therein, and the rod is operated by receiving power from the fourth driving source. delete delete delete The method of claim 1, The second rotating unit, A second rotating block rotatably connected to the vertical driving unit with respect to the first horizontal direction and fixed to the holders; And And a fifth driving source for transmitting rotational force to the second rotating block. The method of claim 10, And the second rotating block is a universal joint. The method of claim 1, And at least two of the first horizontal driving unit, the second horizontal driving unit, the first rotating unit, the vertical driving unit, and the second rotating unit are simultaneously driven in combination. delete delete

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