CN104576474A - Transfer robot having multiple arms - Google Patents
Transfer robot having multiple arms Download PDFInfo
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- CN104576474A CN104576474A CN201410438219.XA CN201410438219A CN104576474A CN 104576474 A CN104576474 A CN 104576474A CN 201410438219 A CN201410438219 A CN 201410438219A CN 104576474 A CN104576474 A CN 104576474A
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- arm
- transfer robot
- robots arm
- robots
- manipulator
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
Abstract
The invention provides a transfer robot having multiple arms, and specifically provides a transfer robot with multiple arms capable of individual driving of the multiple arms and loading and lifting cargos up and down according to predetermined pitch units. The transfer robot with multiple arms comprises a first robot arm, a second robot arm, a third robot arm, and a fourth robot arm, the four robot arms are respectively provided with a first manipulator, a second manipulator, a third manipulator, and a fourth manipulator for transferring cargos and have the same movement paths, the movement paths are arranged in a square shape, and the cargos are simultaneously or individually lifted, transferred or loaded to the other same position via the four robot arms. According to the transfer robot, cargos can be simultaneously transferred, and the operation tact time is reduced.
Description
Technical field
The present invention relates to the transfer robot with multi-arm, particularly relate to a kind of indivedual drivings can carrying out multi-arm, and can load simultaneously and mention the transfer robot with multi-arm of the goods (substrate or wafer etc.) loaded up and down by both constant pitch units.
Background technology
In the manufacturing process such as semiconductor equipment or liquid crystal indicator, the substrate of semiconductor wafer or liquid crystal indicator glass substrate etc. is performed and introduces and mention process.
Substrate board treatment (transfer robot) for research and develop and the transfer robot etc. using tow-armed robot, be made up of multi-arm, and, generally comprise: carrier support portion, support multiple carrier; Processing substrate portion, treatment substrate; Rotary unit, stacked on top of one another between carrier support portion and processing substrate portion; Protractor robot (indexer robot), carrying substrate between each rotary unit and carrier support portion; Main transfer robot, carrying substrate between each rotary unit and processing substrate portion.
This transfer robot is used for fundamentally more effectively transfer wafers, substrate or goods, and thus, to shorten operation pitch time (Tack Time), raising process efficiency is R&D direction.
The transfer robot with both arms is have developed by from the transfer robot with an arm for carrying a substrate, and undertaken for the purpose of more effective technique by the structure improving both arms, disclose No. 10-2008-0047205, KR published patent document (carrying substrate robot) and No. 10-2012-0007449, KR published patent document (substrate board treatment and board carrying method).
No. 10-2008-0047205, KR published patent document disclose can independently in rotary moving and move up and down simultaneously there is multi-arm and effectively can realize the carrying substrate robot of carrying substrate.
No. 10-2008-0047205, KR published patent document, from this aspect of structure that all directions can be transported goods, there is advantage being arranged at four corners of the world four direction, but because running independently to four corners of the world four direction, therefore, in orthoscopic technique or the technique of carrying out to a direction, there is the shortcoming being not easy to use.
No. 10-2012-0007449, KR published patent document provides a kind of throughput for increasing substrate board treatment (through put, the process quantity of the substrate of unit interval), shorten the transfer robot of the stand-by time of protractor robot and main transfer robot.
No. 10-2012-0007449, KR published patent document has the advantage shortening the process time, but there is following shortcoming, cause is structure single armed being attached with many manipulators, and must drive simultaneously, and by the structure of many manipulators, when being only in given pitch, multiple goods could be carried.
Prior art document
Patent documentation
No. 10-2008-0047205th, patent documentation 1 KR published patent document
No. 10-2012-0007449th, patent documentation 2 KR published patent document
Summary of the invention
the problem that invention will solve
Object of the present invention, can simultaneously or the transfer robot with multi-arm individually transported goods for providing a kind of rectilinear motion by identical horizontal direction.
And, object of the present invention is for providing a kind of in orthoscopic (In-Line) technique and a direction continuous print technique, by carrying one to four goods simultaneously, technological process is fast carried out in guiding, shortens the transfer robot with multi-arm that the process time also can improve process efficiency.
for the scheme of dealing with problems
In order to solve problem as above, the transfer robot with multi-arm of the present invention comprises the 1st to the 4th robots arm, 1st to the 4th robots arm has the 1st to the 4th manipulator transported goods respectively respectively, 1st to the 4th manipulator has identical motion path and is arranged in " ロ " word shape, by described 1st to the 4th robots arm, another same position can be mentioned, carries or be loaded into described goods from a same position at the same time or separately, multiple goods can be carried thus simultaneously, thus shorten operation pitch time (TACT TIME).
At this, described 1st to the 4th robots arm lateral surface separately by guide rail be bonded to "
" word shape or "
" the manipulator base of word shape.
At this, described 1st to the 4th robots arm medial surface is separately engaged with horizontal miter guide by guide rail, thus carries out horizontal rectilinear motion.
At this, the horizontal miter guide of the horizontal miter guide in upper end and lower end of described horizontal miter guide is arranged above and below, the the 1st and the 2nd robots arm being positioned at upside is engaged to the two sides of the horizontal miter guide in described upper end respectively by guide rail, the 3rd and the 4th robots arm being positioned at downside is engaged to the two sides of the horizontal miter guide in described lower end respectively by guide rail.
At this, upper end vertical sliding motion device and lower end vertical sliding motion device are connected to the downside of the horizontal miter guide of upper side and described lower end of the horizontal miter guide in described upper end respectively by link.
At this, described upper end vertical sliding motion device and lower end vertical sliding motion device are connected to vertical member, and upper and lower vertical direction moves back and forth.
At this, described vertical member is connected with rotating parts in bottom, by described rotating parts, described robots arm is rotated.
At this, described rotating parts is connected with slider base in bottom, and described slider base engages with guide rail at two ends, carries out left and right horizontal rectilinear motion.
At this, described 1st to the 4th robots arm passes through rotating parts, can rotate, when described 1st to the 4th robots arm and described 1st to the 4th manipulator are mounted with the state of described goods in the position of not carrying out horizontal linear movement, the central point of described goods and the pivot axis of described rotating parts are positioned in same line, the radius of turn of transfer robot can be shortened thus, and improve the efficiency of working space.
At this, preferably, when by described 1st to the 4th robots arm, mention simultaneously, when carrying or load described goods, the central point of described goods becomes the state of upper and lower vertical arrangement in same line.
Further, the transfer robot with multi-arm of the present invention comprises the 1st to the 3rd robots arm, and the 1st to the 3rd robots arm has the 1st to the 3rd manipulator transported goods respectively respectively, the 1st to the 3rd manipulator there is identical motion path and be arranged in "
" word shape or "
" word shape, by described 1st to the 3rd robots arm, another same position can be mentioned, carries or be loaded into described goods from a same position at the same time or separately.
invention effect
The structure tool of the invention described above has the following advantages, can according to the rectilinear motion of identical horizontal direction, simultaneously or transport goods individually, in orthoscopic (In-Line) technique and a direction continuous print technique, by carrying three or four goods simultaneously, shock processing flow process is carried out in guiding, thus shortens the process time and improve process efficiency.
Accompanying drawing explanation
Fig. 1 is the cutaway view with the transfer robot of multi-arm of the present invention;
Fig. 2 is the front elevation with the transfer robot of multi-arm of the present invention;
Fig. 3 is the state diagram that the level with the 1st robots arm of the transfer robot of multi-arm of the present invention is advanced;
Fig. 4 is the state diagram that the level with the 2nd robots arm of the transfer robot of multi-arm of the present invention is advanced;
Fig. 5 is the state diagram that the level with the 3rd robots arm of the transfer robot of multi-arm of the present invention is advanced;
Fig. 6 is the state diagram that the level with the 4th robots arm of the transfer robot of multi-arm of the present invention is advanced;
Fig. 7 is the state diagram that the multi-arm integral level with the transfer robot of multi-arm of the present invention is advanced;
Fig. 8 is the structure chart with the transfer robot of multi-arm of another embodiment of the present invention.
Description of reference numerals
10: multi-arm robot 11: bedframe
12: slider base 13: guide rail box
14: guide rail 15a: rotating parts
15b: vertical member 16: rotary middle spindle
17a, 17b: vertical sliding motion device 18a, 18b: link
19a, 19b: horizontal miter guide 20a, 20b, 20c, 20d: robots arm
21a, 21b, 21c, 21d: manipulator base
22a, 22b, 22c, 22d: manipulator
23: goods 24: fixture
25: stop
Embodiment
Below, the structure having the transfer robot of multi-arm (Multiple Arm) with reference to accompanying drawing to of the present invention and action effect are described.
Fig. 1 is the cutaway view with the transfer robot of multi-arm of the present invention, and Fig. 2 is the front elevation with the transfer robot of multi-arm of the present invention, and Fig. 1 (A) and (B) are respectively from the cutaway view of different angles display.
As shown in Figures 1 and 2, the transfer robot (10) with multi-arm of the present invention comprises: bedframe (11), slider base (12), guide rail box (13), guide rail (14), rotating parts (15a), vertical member (15b), upper and lower side vertical sliding motion device (17a, 17b), upper and lower side link (18a, 18b), horizontal miter guide (the 19a of upper and lower side, 19b), 1st to the 4th robots arm (20a to 20d), upper and lower side manipulator base (21a, 21b) and the 1st to the 4th manipulator (22a to 22d).
Bedframe (11) supports multi-arm robot (10), and formed by four frame shapes, as required, the pulley being convenient to movement is installed, and multiple fixture (24) is installed, be moved when operating to prevent robot.Further, in order to confirm that multi-arm robot's (10) moves left and right distance, bedframe (11) is provided with stop (25).
Slider base (12) is formed to the inner side of bedframe (11), the both sides of bedframe (11) is formed with the guide rail (14) for moving horizontally slider base (12).
Guide rail (14) is covered by guide rail box (13), is provided with the cable (not shown) of transmission power supply and control signal in direction guiding rail box (13).
Slider base (12) is connected with the guide rail (14) of both sides, left and right horizontal can be carried out move, rotating parts (15a) is formed at upper end, center, and the front end of rotating parts (15a) is formed with vertical member (15b).The center of rotating parts (15a) is formed with rotary middle spindle (16).
Rotating parts (15a) with rotary middle spindle (16) for benchmark, make the 1st to the 4th robots arm (20a to 20d) rotating 360 degrees, vertical member (15b) can make the 1st to the 4th robots arm (20a to 20d) carry out up and down reciprocatingly rectilinear motion.
One side of vertical member (15b) is formed with guide rail, this guide rail is bonded to upper end vertical sliding motion device (17a) and lower end vertical sliding motion device (17b), and upper and lower side vertical sliding motion device (17a, 17b) carries out up and down reciprocatingly rectilinear motion simultaneously.
In the front end of upper and lower side vertical sliding motion device (17a, 17b), upper end link (18a) is formed with direction relative respectively with lower end link (18b), and, upper end horizontal miter guide (19a) is connected to the downside of upper end link (18a), and lower end horizontal miter guide (19b) is connected to the upside of lower end link (18b).
The two sides of the horizontal miter guide in upper end (18a) are formed with guide rail, this guide rail is bonded to the 1st and the 2nd robots arm (20a, 20b), the two sides of the horizontal miter guide in lower end (18b) are formed with guide rail, and this guide rail is bonded to the 3rd and the 4th robots arm (20c, 20d).
1st to the 4th robots arm (20a to 20d) becomes checkering to arrange, namely the 1st and the 4th robots arm (20a, 20d) and the 2nd and the 3rd robots arm (20b, 20c) are respectively mutually to configure angular direction, 1st and the 2nd robots arm (20a, 20b) for upper end horizontal, 3rd and the 4th robots arm (20c, 20d) for lower end horizontal, the 1st to the 4th manipulator (22a to 22d) and goods (23) are positioned at its center.
1st to the 4th manipulator base (21a to 21d) is engaged in the lateral surface of the 1st to the 4th robots arm (20a to 20d) with moving horizontally, the 1st and the 2nd manipulator base (21a, 21b) is configured to '
' word shape, the 3rd and the 4th manipulator base (21c, 21d) is configured to '
' word shape.
The leading section of the 1st to the 4th manipulator base (21a to 21d) is separately installed with the 1st to the 4th manipulator (22a to 22d), and goods (23) is positioned on the 1st to the 4th manipulator (22a to 22d).
1st to the 4th robots arm (20a to 20d) is independently driven respectively, also can be driven via storage capacitors simultaneously.
Be positioned over being centrally located in same line of goods (23) of the 1st to the 4th manipulator (22a to 22d), and be positioned at in the same line of the rotary middle spindle of rotating parts (15a) (16).
At this, goods (23) i.e. four goods are positioned at same position, four goods can be loaded simultaneously and are carried to same position, the center of goods (23) and rotary middle spindle (16) is made to be positioned in same line, the working space of transfer robot and radius of turn are minimized, to improve the validity of working space.
1st to the 4th robots arm (20a to 20d) simultaneously or individually carry out the horizontal rectilinear motion (x) in x-axis direction, the vertical linear motion (y) in y-axis direction, two sections of horizontal rectilinear motions (z1, z2) in z-axis direction and rotary motion (θ).
The horizontal rectilinear motion (x) in x-axis direction is by the joint by slider base (12) and guide rail (14), can move back and forth by the x-axis direction of slider base (12), the vertical linear motion (y) in y-axis direction with vertical member (15b) for benchmark, make upper and lower side vertical sliding motion device (17a, 17b) move both vertically up and down along the y-axis direction, two sections of horizontal rectilinear motion (z1 in z-axis direction, z2) with the horizontal miter guide (19a of upper and lower side, 19b) be benchmark, the the 1st to the 2nd robots arm (20a to 20d) is made to carry out one section of horizontal rectilinear motion (z1) along the z-axis direction, with the 1st to the 4th robots arm (20a to 20d) for benchmark, the the 1st to the 4th manipulator base (21a to 21d) is made to carry out two sections of horizontal rectilinear motions (z2) along the z-axis direction, rotary motion (θ) is carried out according to the 360 degree of rotary motions carried out for benchmark with the rotary middle spindle of rotating parts (15a) (16).
The arrangement of the 1st to the 4th robots arm (20a to 20d) forms checkering arrangement, namely ' ロ ' character arranging, can carry and lade (23) simultaneously.
According to the arrangement of the 1st to the 4th robots arm (20a to 20d), can carry simultaneously or individually and load four goods (23), according to technique, there is no driving that is some or two robots arms, and pass through the driving of three robots arms or two robots arms, can carry simultaneously and load three goods or two goods individually.
Further, also can not form the some robots arms in the 1st to the 4th robots arm (20a to 20d) and form three robots arms, robots arm's arrangement now can be arranged in '
' word or '
' word shape.
Fig. 3 is the state diagram that the level with the 1st robots arm of the transfer robot of multi-arm of the present invention is advanced, Fig. 4 is the state diagram that the level with the 2nd robots arm of the transfer robot of multi-arm of the present invention is advanced, Fig. 5 is the state diagram that the level with the 3rd robots arm of the transfer robot of multi-arm of the present invention is advanced, and Fig. 6 is the state diagram that the level with the 4th robots arm of the transfer robot of multi-arm of the present invention is advanced.
With reference to Fig. 3,1st robots arm (20a) with upper end horizontal miter guide (19a) for benchmark, move horizontally (first paragraph z-axis direction is moved) by direction of advance, the 1st manipulator (22a) with the 1st robots arm (20a) for benchmark moves horizontally (second segment z-axis direction is moved) by direction of advance.
With reference to Fig. 4,2nd robots arm (20b) with the horizontal miter guide in upper end (19a) for benchmark moves horizontally (first paragraph z-axis direction is moved) by direction of advance, the 2nd manipulator (22b) with the 2nd robots arm (20b) for benchmark moves horizontally (second segment z-axis direction is moved) by direction of advance.
With reference to Fig. 5,3rd robots arm (20c) with the horizontal miter guide in lower end (19b) for benchmark moves horizontally (first paragraph z-axis direction is moved) by direction of advance, the 3rd manipulator (22c) with the 3rd robots arm (20c) for benchmark moves horizontally (second segment z-axis direction is moved) by direction of advance.
With reference to Fig. 6,4th robots arm (20d) with the horizontal miter guide in lower end (19b) for benchmark moves horizontally (first paragraph z-axis direction is moved) by direction of advance, the 4th manipulator (22d) with the 4th robots arm (20d) for benchmark moves horizontally (second segment z-axis direction is moved) by direction of advance.
Fig. 7 is the state diagram that the multi-arm integral level with the transfer robot of multi-arm of the present invention is advanced, and (A) and (B) is the cutaway view shown from each different angles.
Fig. 3 to Fig. 6 is the illustration that display multi-arm carries out indivedual situation about driving, and Fig. 7 is the illustration that the situation that equidirectional drives is pressed in display multi-arm (the 1st to the 4th robots arm) simultaneously.
1st to the 4th robots arm (20a to 20d) by slider base (12) and guide rail (14) carry out horizontal linear reciprocating motion (
), by rotating parts (15a) can be rotated (
), by vertical member (15b) and upper and lower side vertical sliding motion device (17a, 17b) can carry out vertical line reciprocating motion (
), by engaging with the guide rail of the horizontal miter guide of upper and lower side (19a, 19b), can carry out first time horizontal front-rear reciprocation movement (
), the 1st to the 4th manipulator (22a to 22d) is engaged by the side guide of the 1st to the 4th robots arm (20a to 20d), can carry out the horizontal front-rear reciprocation movement of second time (
).
Should
extremely
motion can run four robots arms simultaneously, as required, can run individually, the order of its direction of motion can change according to site technique.
Existing situation employs both arms transfer robot, but respectively from after instrument end mentions three or four goods simultaneously, be accommodated in box respectively, or from after box is mentioned respectively, instrument end can be accommodated in simultaneously, significantly can reduce TACT TIME (operation technique time).
As mentioned above, the transfer robot with multi-arm of the present invention also can arrange four robots arms by square lattice formula, but as required, two or three robots arms can be run, and realization only installs the transfer robot of three robots arms with reference to above-mentioned explanation simultaneously.Further, four robots arms realize with the structure being removable at the horizontal miter guide of upper and lower side (19a, 19b).
Fig. 8 is the structure chart with the transfer robot of multi-arm of another embodiment of the present invention.
Fig. 8 is the embodiment removed some robots arms four robots arms (20a to 20d) of embodiment from Fig. 1 to Fig. 7 and be formed as three robots arms.
When not forming a robots arm and realize transfer robot by three robots arms, its arrangement is formed as "
" word shape or "
" arrangement of word shape, the central part of three robots arms is configured with manipulator and goods.
With reference to above accompanying drawing preferred embodiments of the present invention have been disclosed for illustrative, but be to be understood that, the technical structure of the invention described above, under the scope that the technical field of the invention personnel do not change technological thought of the present invention or essential feature, also can realize with other concrete form of implementation.Therefore, be to be understood that, the embodiment of above-mentioned explanation is not only for limiting the present invention in all respects for illustration, scope of the present invention illustrates not by described above according to right display, and the form of all changes that the meaning of accessory rights claimed range and scope and equivalent conception thereof carry out or distortion is all included within the scope of the present invention.
Claims (11)
1. there is a transfer robot for multi-arm, it is characterized in that,
Comprise the 1st to the 4th robots arm, the 1st to the 4th robots arm has the 1st to the 4th manipulator transported goods respectively respectively, and the 1st to the 4th manipulator has identical motion path and is arranged in " ロ " word shape,
By described 1st to the 4th robots arm, another same position can be mentioned, carries or be loaded into described goods from a same position at the same time or separately.
2. the transfer robot with multi-arm according to claim 1, is characterized in that,
On described 1st to the 4th robots arm lateral surface separately by guide rail be bonded to "
" word shape or "
" the manipulator base of word shape.
3. the transfer robot with multi-arm according to claim 1, is characterized in that,
Described 1st to the 4th robots arm medial surface is separately engaged with horizontal miter guide by guide rail, thus carries out horizontal rectilinear motion.
4. the transfer robot with multi-arm according to claim 3, is characterized in that,
The horizontal miter guide of the horizontal miter guide in upper end and lower end of described horizontal miter guide is arranged above and below,
The the 1st and the 2nd robots arm being positioned at upside is engaged to the two sides of the horizontal miter guide in described upper end respectively by guide rail,
The the 3rd and the 4th robots arm being positioned at downside is engaged to the two sides of the horizontal miter guide in described lower end respectively by guide rail.
5. the transfer robot with multi-arm according to claim 4, is characterized in that,
Upper end vertical sliding motion device and lower end vertical sliding motion device are connected to the downside of the horizontal miter guide of upper side and described lower end of the horizontal miter guide in described upper end respectively by link.
6. the transfer robot with multi-arm according to claim 5, is characterized in that,
Described upper end vertical sliding motion device and lower end vertical sliding motion device are connected to vertical member, and upper and lower vertical direction moves back and forth.
7. the transfer robot with multi-arm according to claim 6, is characterized in that,
Described vertical member is connected with rotating parts in bottom, by described rotating parts, described robots arm is rotated.
8. the transfer robot with multi-arm according to claim 7, is characterized in that,
Described rotating parts is connected with slider base in bottom, and described slider base engages with guide rail at two ends, carries out left and right horizontal rectilinear motion.
9. the transfer robot with multi-arm according to claim 1, is characterized in that,
Described 1st to the 4th robots arm, by rotating parts, can rotate,
When described 1st to the 4th robots arm and described 1st to the 4th manipulator are mounted with the state of described goods in the position of not carrying out horizontal linear movement, the central point of described goods and the pivot axis of described rotating parts are positioned in same line.
10. the transfer robot with multi-arm according to claim 1, is characterized in that,
When by described 1st to the 4th robots arm, mention simultaneously, when carrying or load described goods, become the state of upper and lower vertical arrangement in same line at the central point of described goods.
11. 1 kinds of transfer robots with multi-arm, is characterized in that,
Comprise the 1st to the 3rd robots arm, the 1st to the 3rd robots arm has the 1st to the 3rd manipulator transported goods respectively respectively, the 1st to the 3rd manipulator there is identical motion path and be arranged in "
" word shape or "
" word shape,
By described 1st to the 3rd robots arm, another same position can be mentioned, carries or be loaded into described goods from a same position at the same time or separately.
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|---|---|---|---|
| KR10-2013-0103791 | 2013-08-30 | ||
| KR1020130103791A KR101506188B1 (en) | 2013-08-30 | 2013-08-30 | Transfer robot having multiple arm |
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| CN104576474A true CN104576474A (en) | 2015-04-29 |
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| CN201410438219.XA Pending CN104576474A (en) | 2013-08-30 | 2014-08-29 | Transfer robot having multiple arms |
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| KR (1) | KR101506188B1 (en) |
| CN (1) | CN104576474A (en) |
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| CN104985592A (en) * | 2015-07-17 | 2015-10-21 | 付建生 | Five-axis linkage robot |
| CN106409740A (en) * | 2016-10-21 | 2017-02-15 | 山东大学 | Single-arm three freedom degree wafer transfer manipulator and use method thereof |
| CN108463420A (en) * | 2016-01-11 | 2018-08-28 | 现代重工集团股份有限公司 | Board carrying robot |
| WO2019092557A1 (en) | 2017-11-09 | 2019-05-16 | Omron Corporation | A robotic apparatus |
| CN111194253A (en) * | 2017-10-13 | 2020-05-22 | 日本电产三协株式会社 | Industrial robot |
| US10722942B2 (en) | 2017-07-19 | 2020-07-28 | Anhui University of Science and Technology | Multi-arm hanging rail type casting cleaning robot |
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| KR102279408B1 (en) * | 2015-04-06 | 2021-07-20 | 현대중공업지주 주식회사 | Transfer robot with multi arm |
| KR102299107B1 (en) * | 2015-04-21 | 2021-09-07 | 현대중공업지주 주식회사 | Transfer robot with multi arm |
| KR102299106B1 (en) * | 2015-04-22 | 2021-09-07 | 현대중공업지주 주식회사 | Transfer robot with multi arm |
| KR102314364B1 (en) * | 2016-01-11 | 2021-10-19 | 현대중공업지주 주식회사 | Robot for transferring substrate |
| KR102312697B1 (en) * | 2016-01-11 | 2021-10-14 | 현대중공업지주 주식회사 | Robot for transferring substrate |
| KR102314362B1 (en) * | 2016-01-11 | 2021-10-19 | 현대중공업지주 주식회사 | Robot for transferring substrate |
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| CN111194253B (en) * | 2017-10-13 | 2022-09-27 | 日本电产三协株式会社 | Industrial robot |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR101506188B1 (en) | 2015-03-26 |
| KR20150025775A (en) | 2015-03-11 |
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Application publication date: 20150429 |