CN106409740B - A kind of the wafer transfer manipulator and application method of single armed Three Degree Of Freedom - Google Patents
A kind of the wafer transfer manipulator and application method of single armed Three Degree Of Freedom Download PDFInfo
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- CN106409740B CN106409740B CN201610919448.2A CN201610919448A CN106409740B CN 106409740 B CN106409740 B CN 106409740B CN 201610919448 A CN201610919448 A CN 201610919448A CN 106409740 B CN106409740 B CN 106409740B
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- 238000010521 absorption reaction Methods 0.000 claims abstract description 8
- 238000009434 installation Methods 0.000 claims description 7
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- 238000001179 sorption measurement Methods 0.000 claims description 3
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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Abstract
The invention discloses a kind of wafer transfer manipulator of single armed Three Degree Of Freedom and application method, including rotary motion system, radial motion system, the system that moves vertically and bracket；Rotary motion system includes the rotary drive motor being connected on crane, and rotary drive motor drives principal arm rotation by the first transmission device, and principal arm top is pierced by the upper bracket and is connected with radial motion system and then drives the rotation of radial motion system；Radial motion system includes a radial drive motor being connected in radial struts, and radial drive motor passes through the mechanical paw that two radial guidance of the second transmission device drives edge slides, and mechanical paw surface is provided with the vacuum absorption device for adsorbing wafer；Vertical movement system includes the vertical driving motor being connected on the motor vertical bracket, the crane that vertical driving motor is moved up and down by two linear steering axis of third transmission device drives edge, and then rotary motion system and radial motion system is driven to move up and down.
Description
Technical field
The present invention relates to the wafer transfer manipulator and application method of a kind of 3DOF, it can be achieved that wafer is in different station
Between reliable accurately transfer, be specifically for use in wafer on-line detecting system.
Background technique
Third generation wide bandgap semiconductor has the advantages such as high stability, high photoelectric conversion, low energy loss, is widely used
In fields such as consumer-elcetronics devices, new-energy automobile, aircraft engines, material price is also relatively valuable.Therefore, entirely collecting
At in the manufacturing process of device, to the detection and analysis of semiconductor material with regard to particularly important.
As the production yields and size of wafer are continuously increased, it is desirable that the production of wafer and test are towards high speed, continuous
Change, automated production direction is developed.Due to needing to realize the fast transfer of wafer station in a limited space, thus carrying out crystalline substance
When loop truss, to the job stability, action accuracy and cleanliness etc. of automatic transmission manipulator, be proposed compared with
High requirement.
Therefore, the core equipment as chip transmission and positioning in semiconductor detection, probes into wafer transfer manipulator,
To the external monopolization to the high-end micro- market of China is broken, promotes the development of China's semiconductor industry, be of great significance.
Summary of the invention
In view of the above-mentioned problems, the purpose of the present invention is to propose to one kind can accomplish efficiently carrying, high speed and high accuracy positioning
Wafer transfer manipulator and application method.
In order to achieve the object, first technical solution that the present invention uses is as follows:
A kind of manipulator transmitting wafer, including rotary motion system, radial motion system, the system that moves vertically and installation
The bracket of three systems；The bracket include radial struts, casing and the upper bracket being mounted on casing, lower bracket,
Motor vertical bracket；
The rotary motion system includes a rotary drive motor being connected on crane, and rotary drive motor passes through the
One transmission device drives principal arm rotation, and the principal arm top is pierced by the upper bracket and is connected in turn with radial motion system
Drive the rotation of radial motion system；The radial motion system includes a radial drive motor being connected in radial struts, diameter
The mechanical paw slided to driving motor by the second transmission device driving one along two radial guidances, the mechanical paw surface is set
It is equipped with the vacuum absorption device for adsorbing wafer；The vertical movement system is connected on the motor vertical bracket including one
Vertical driving motor, the vertical driving motor have electromagnetic brake brake apparatus, it is ensured that electromagnetic brake after motor power loss
Coil also power loss, makes the brake shoe of brake tightly embrace brake wheel motor and is braked and stalls, and the vertical driving motor passes through the
The crane that three transmission device drives edges, two linear steering axis moves up and down, and then drive rotary motion system and radial fortune
Dynamic system moves up and down.
Further, first transmission device include a driving wheel being connect with the rotary drive motor output end and
The driven wheel being engaged with, the driven wheel are made into gear shaft, and the lower end of the gear shaft is fixed on institute by thrust shaft block
It states in the lower plate of crane, to prevent the axial float of gear shaft, the gear shaft passes through institute by deep groove ball bearing holder assembly
The upper plate of crane is stated, the upper end extension is the principal arm.
Further, second transmission device includes a ball wire connecting with the radial drive motor output end
Thick stick, the ball-screw both ends pass through affixed side square leading screw bearing component respectively and type leading screw bearing component in side are supported to fix
In the radial struts；The feed screw nut of the ball-screw connects a plummer, is fixed with the machine on the plummer
Tool gripper, and the plummer is connected with two guide rail slide blocks.
Further, second transmission device, the affixed side square leading screw bearing component include an affixed side
Support has the angular contact ball bearing of a pair of opposite installation, in the affixed side support to bear the axial force of both direction
Prevent axial float.
Further, second transmission device, the support side type leading screw bearing component include a support side
Support is equipped with a deep groove ball bearing, in the collateral seat of support to bear radial load.
Further, the third transmission device includes a ball wire connecting with the vertical driving motor output end
Thick stick, the both ends of the ball-screw pass through the round leading screw bearing component of affixed side respectively and the round leading screw bearing component in side are supported to connect
It connects on the upper and lower bracket；The feed screw nut of the ball-screw is fixed on the crane, two parallel lines
Property guiding axis connect with the crane by linear bearing, the both ends of the guiding axis are separately fixed on upper and lower bracket.
Further, the third transmission device, the round leading screw bearing component of affixed side include an affixed side
Support has the angular contact ball bearing of a pair of opposite installation, in the affixed side support to bear the axial force of both direction
Prevent axial float.
Further, the third transmission device, the round leading screw bearing component in support side include a support side
Support is equipped with a deep groove ball bearing, in the collateral seat of support to bear radial load.
It further, further include a vacuum absorption device, the vacuum absorption device includes a setting on mechanical paw
Vacuum runner, the runner both ends are vacuum adapter and oral sucker out respectively, vacuum through gripper vacuum-flow road reach it is described go out
With wafer contacts to generate adsorption capacity absorption wafer at mouthful.
Second technical solution that the present invention uses is as follows:
Application method of the invention is as follows:
When work, manipulator receives the control signal of industrial personal computer sending, rotary motion system and vertical movement system cooperation
Movement rises after rotating manipulator closely to film magazine height, and radial motion system drive mechanical paw is extending out in film magazine wafer just
Lower section；
Then the continuation of vertical movement system slightly moves up, and end gripper contacts wafer, and vacuum generator starting, vacuum is through true
Empty runner reaches exit and wafer is sucked, and radially retraction makes wafer release sheet to mechanical paw under the driving of radial motion system
Box；
After wafer in film magazine is removed, film magazine decline two wafer spacing from height；Carry the manipulator of wafer
After the cooperative movement of rotary motion system and vertical movement system reaches the height of prealignment platform, radial motion system drive
Mechanical paw moves to the top of prealignment platform, and manipulator declines under the driving of vertical movement system later, and prealignment platform connects
Wafer is touched, manipulator vacuum release wafer is simultaneously restored to initial zero position, completion upper piece process.
The invention adopts the above technical scheme, has the advantage that
1, manipulator according to the present invention has 3 freedom degrees, be respectively it is radial translation, principal arm revolution and elevating movement,
Each of which freedom degree has an independent motor, these three movements both can link or move alone, and is conducive in this way
The adjustment of movement and rotation angle is compensated, and can realize that the movement of wafer is fetched and delivered in any position of any height.
2, mechanical paw of the invention is fixed on plummer, and the plummer is connected firmly with radial drive, thus real
Gripper is showed with the linkage of radial movement mechanism, has achieved and guarantee positioning accuracy, the beneficial effect of good reliability.
3, the present invention is outer except through computer program setting lifting travel control in vertical movement direction, described vertical
Driving motor also has electromagnetic brake brake apparatus, it is ensured that motor power loss can be braked quickly and effectively and be stalled, to protect
The positioning accuracy and braking ability of manipulator vertical direction are demonstrate,proved.
Detailed description of the invention
Fig. 1 is overall structure diagram of the invention；
Fig. 2 is the assembling schematic diagram of rotary motion system in the present invention；
Fig. 3 is the assembling schematic diagram of radial kinematic system in the present invention；
Fig. 4 is the partial enlarged view of mechanical paw in the present invention；
Fig. 5 is the assembling schematic diagram of vertical movement system in the present invention；
In figure: 1 rotary motion system, 2 radial motion systems, 3 vertical movement systems, 5 brackets,
10 motors, 11 driving wheels, 12 driven wheels, 13 principal arms, 14 tightening flanges, 15 thrust shaft blocks, 16 deep groove ball bearings
Holder assembly,
20 motors, 21 shaft couplings, 22 ball-screws, 23 affixed side square leading screw bearing components, 24 support side type lead screw
Mounting assembly, 25 feed screw nuts, 26 guide rail slide blocks, 27 rolling guides,
30 motors, 31 shaft couplings, 32 ball-screws, the round leading screw bearing component of 33 affixed sides, 34 support the round lead screw in side
Mounting assembly, 35 feed screw nuts, 36 cranes, 37 linear bearings, 38 linear steering axis, 39 linear steering shaft stools,
40 plummers, 41 vacuum adapters, 42 mechanical paws, 43 vacuum runners, 44 go out oral sucker,
50 radial struts, 51 upper brackets, 52 lower brackets, 53 motor vertical brackets, 54 right cabinets, 55 left cabinets, machine before 56
Shell.
Specific embodiment
The present invention is described in detail below with reference to the accompanying drawings and embodiments.
As shown in Figure 1, the present invention include a rotary motion system 1, a radial motion system 2, one vertical movement system 3 and
The bracket 5 of above three kinematic system 1,2,3 is installed.
The bracket 5 include radial struts 50, right cabinet 54, left cabinet 55, front housing 56, back cabinet, lower casing and
The upper bracket 51 being mounted on casing, lower bracket 52 and motor vertical bracket 53.Wherein back cabinet and lower casing do not have in figure
It is indicated.
As shown in Fig. 2, rotary motion system 1 of the invention includes an AC servo motor 10 being mounted on crane 36,
The output shaft of motor 10 connects a driven wheel 12 by a driving wheel 11, and driven gear is made into gear shaft, and the upper end passes through upper branch
Frame part is the principal arm 13 of rotary motion system, and 13 top of principal arm is connect by tightening flange 14 with radial motion system 2, from
And the manipulator being fixed in radial motion system 2 is realized by the deceleration of speed reducing gear pair 11,12 under the driving of motor 10
The rotary motion of 42 arm 13 of pawl.Thrust shaft block 15 is fixed in 36 lower plate of crane, is connected with the lower end of gear shaft 12, tooth
Wheel shaft 12 passes through the upper plate of crane 36 by deep groove ball bearing holder assembly 16, and deep groove ball bearing holder assembly 16 and crane 36 are solid
Fixed connection.
As shown in Figure 3, Figure 4, radial motion system 2 of the invention includes an AC servo electricity being mounted in radial struts 50
The output shaft of machine 20, motor 20 is connect by a shaft coupling 21 with ball-screw 22, and the motor side of lead screw 22 passes through fixed side
Type leading screw bearing component 23 is fixed, and the other end is by supporting side type leading screw bearing component 24 to support, affixed side square lead screw branch
There is the angular contact ball bearing of a pair of opposite installation in holder assembly 23, supports to be equipped with deep-groove ball axis in side type leading screw bearing component 24
It holds, the feed screw nut 25 of lead screw 22 connects a plummer 40, and motor 20 drives lead screw 22 to rotate, and plummer 40 is in feed screw nut 25
Drive under pass through guide rail slide block 26 along two parallel arrangement rolling guide 27 move radially, mechanical paw 42 is fixed on plummer
On 40, a vacuum adapter 41 is provided on gripper 42, a vacuum runner 43 and one goes out oral sucker 44, vacuum is arrived through vacuum runner 43
Wafer is contacted at up to oral sucker 44 out can realize the absorption to wafer.
As shown in figure 5, vertical movement system 3 of the invention is mounted on motor vertical bracket 53 with electromagnetic brake including one
The output shaft of the AC servo motor 30 of brake apparatus, motor 30 is connect by a shaft coupling 31 with ball-screw 32, ball-screw
32 motor side is fixed by the round leading screw bearing component 33 of affixed side, and the other end is by supporting the round leading screw bearing component 34 in side
Support there is the angular contact ball bearing of a pair of opposite installation in the round leading screw bearing component 33 of affixed side, supports the round lead screw branch in side
Deep groove ball bearing is equipped in holder assembly 34, the feed screw nut 35 of ball-screw 32 connects the upper plate of a crane 36, and motor 30 drives
Dynamic lead screw 32 rotates, and crane 36 is under the drive of feed screw nut 35 by linear bearing 37 along the linear steering axis of two parallel arrangements
38 vertically move, and linear steering axis 38 is fixedly connected by guide shaft support 39 with upper and lower bracket 51,52.
When the invention works, manipulator receives the control signal of industrial personal computer sending, and rotary motion system 1 and vertical movement are
3 cooperative movements of uniting are risen after rotating manipulator closely to 01 height of film magazine, and it is brilliant that radial motion system 2 drives gripper to extend out in film magazine
Round underface.Then vertical movement system 3 slightly moves up, and end gripper contacts wafer, and vacuum generator starting, vacuum is through true
Empty runner 43 reaches and wafer is sucked at outlet 44, and radially retraction is detached from wafer to gripper under the driving of radial motion system 2
Film magazine 01.
After the wafer in film magazine 01 is removed, film magazine 01 decline two wafer spacing from height.Carry the machine of wafer
After tool hand channel crosses the height of the cooperative movement arrival prealignment platform of rotary motion system 1 and vertical movement system 3, radial motion system
2 driving gripper of system moves to the top of prealignment platform, and manipulator declines under the driving of vertical movement system later, prealignment platform
Wafer is contacted, manipulator vacuum release wafer is simultaneously restored to initial zero position, completion upper piece process.
Above-mentioned, although the foregoing specific embodiments of the present invention is described with reference to the accompanying drawings, not protects model to the present invention
The limitation enclosed.Transmission mechanism in the rotary motion system 1, radial motion system 2 and vertical movement system 3 can also be taken
Other different frame modes, such as in radial motion system 2, the component 27 playing the guiding role can be leading for two parallel arrangements
Rail is also possible to the feed rod of two parallel arrangements.Those skilled in the art do not need to make the creative labor can make it is various
Modification or deformation are still within protection scope of the present invention.
Claims (5)
1. a kind of wafer transfer manipulator of single armed Three Degree Of Freedom, which is characterized in that including rotary motion system, radial motion system
System, vertical movement system and the rack for installing three systems；The rack includes the upper bracket installed up and down and lower branch
Frame；
The rotary motion system includes a rotary drive motor being connected on crane, and rotary drive motor is passed by first
Dynamic device drives principal arm rotation, and the principal arm top is pierced by the upper bracket and is connected with radial motion system and then drives
The rotation of radial motion system；The radial motion system includes a radial drive motor being connected in radial struts, radial to drive
By the second transmission device driving one along the mechanical paw of two radial guidances sliding, the mechanical paw surface is provided with dynamic motor
For adsorbing the vacuum absorption device of wafer；The vertical movement system includes a vertical drive being connected on motor vertical bracket
Dynamic motor, the vertical driving motor have electromagnetic brake brake apparatus, it is ensured that electromagnetic brake coil also loses after motor power loss
Electricity makes the brake shoe of brake tightly embrace brake wheel motor and is braked and stalls, and the vertical driving motor is driven by third and is filled
The crane that two linear steering axis of drives edge moves up and down is set, and then is driven in rotary motion system and radial motion system
Lower movement；
First transmission device include a driving wheel being connect with the rotary drive motor output end and be engaged with from
Driving wheel, the driven wheel are made into gear shaft, and the lower end of the gear shaft is fixed under the crane by thrust shaft block
On plate, to prevent the axial float of gear shaft, the gear shaft passes through the upper of the crane by deep groove ball bearing holder assembly
Plate, the upper end extension are the principal arm；
Second transmission device includes a ball-screw connecting with the radial drive motor output end, the ball-screw
Both ends pass through affixed side square leading screw bearing component respectively and type leading screw bearing component in side are supported to be fixed on the radial struts
On；The feed screw nut of the ball-screw connects a plummer, is fixed with the mechanical paw on the plummer, and described holds
Microscope carrier is connected with two guide rail slide blocks；
The affixed side square leading screw bearing component includes an affixed side support, has a pair of of phase in the affixed side support
To the angular contact ball bearing of installation, axial float is prevented to bear the axial force of both direction；
The third transmission device includes a ball-screw connecting with the vertical driving motor output end, the ball-screw
Both ends pass through the round leading screw bearing component of affixed side respectively and to support that the round leading screw bearing component in side is connected to described upper and lower
On bracket；The feed screw nut of the ball-screw is fixed on the crane, and two parallel linear steering axis pass through straight
Spool is held to be connect with the crane, and the both ends of the guiding axis are separately fixed on upper and lower bracket；
The round leading screw bearing component of affixed side includes an affixed side support, has a pair of of phase in the affixed side support
To the angular contact ball bearing of installation, axial float is prevented to bear the axial force of both direction；
Manipulator receives the control signal of industrial personal computer sending, and rotary motion system and vertical movement system cooperative movement make manipulator
It is risen after rotation closely to film magazine height, radial motion system drive mechanical paw extend out to the underface of wafer in film magazine；Then it hangs down
Straight kinematic system continuation slightly moves up, and end gripper contacts wafer, vacuum generator starting, and vacuum is reached through vacuum runner and exported
Wafer is sucked in place, and radially retraction makes wafer be detached from film magazine to mechanical paw under the driving of radial motion system.
2. the wafer transfer manipulator of single armed Three Degree Of Freedom as described in claim 1, which is characterized in that support side type
Leading screw bearing component includes one and supports collateral seat, is equipped with a deep groove ball bearing, in the collateral seat of support to bear diameter
To load.
3. the wafer transfer manipulator of single armed Three Degree Of Freedom as described in claim 1, which is characterized in that the support side is round
Leading screw bearing component includes one and supports collateral seat, is equipped with a deep groove ball bearing, in the collateral seat of support to bear diameter
To load.
4. the wafer transfer manipulator of single armed Three Degree Of Freedom as described in claim 1, which is characterized in that further include that a vacuum is inhaled
Adsorption device, the vacuum absorption device include a vacuum runner being arranged on mechanical paw, and the runner both ends are true respectively
Sky adapter tube and out oral sucker, vacuum reach the exit and wafer contacts through gripper vacuum-flow road and adsorb to generate adsorption capacity
Wafer.
5. the application method of the wafer transfer manipulator of any single armed Three Degree Of Freedom of claim 1-4, which is characterized in that
When work, manipulator receives the control signal of industrial personal computer sending, rotary motion system and vertical movement system cooperative movement
Rise after rotating manipulator closely to film magazine height, radial motion system drive mechanical paw extend out to wafer in film magazine just under
Side；
Then the continuation of vertical movement system slightly moves up, and end gripper contacts wafer, and vacuum generator starting, vacuum is through vacuum-flow
Road reaches exit and wafer is sucked, and radially retraction makes wafer be detached from film magazine to mechanical paw under the driving of radial motion system；
After wafer in film magazine is removed, film magazine decline two wafer spacing from height；The manipulator for carrying wafer passes through
After the cooperative movement of rotary motion system and vertical movement system reaches the height of prealignment platform, radial motion system drive is mechanical
Gripper moves to the top of prealignment platform, and manipulator declines under the driving of vertical movement system later, and the contact of prealignment platform is brilliant
Circle, manipulator vacuum release wafer are simultaneously restored to initial zero position, completion upper piece process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610919448.2A CN106409740B (en) | 2016-10-21 | 2016-10-21 | A kind of the wafer transfer manipulator and application method of single armed Three Degree Of Freedom |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610919448.2A CN106409740B (en) | 2016-10-21 | 2016-10-21 | A kind of the wafer transfer manipulator and application method of single armed Three Degree Of Freedom |
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| CN106409740A CN106409740A (en) | 2017-02-15 |
| CN106409740B true CN106409740B (en) | 2019-08-20 |
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Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108890628A (en) * | 2018-08-08 | 2018-11-27 | 中山市鸿菊自动化设备制造有限公司 | A kind of Novel translation manipulator |
| CN113053714B (en) * | 2019-12-27 | 2024-03-08 | 中微半导体设备(上海)股份有限公司 | Vacuum processing system, driving device for base station and control method thereof |
| CN111668144A (en) * | 2020-05-22 | 2020-09-15 | 长园启华智能科技(珠海)有限公司 | Material structure is got to wafer |
| CN111834270A (en) * | 2020-07-28 | 2020-10-27 | 芯米(厦门)半导体设备有限公司 | Wafer transmission device |
| CN113770990B (en) * | 2021-08-27 | 2023-07-04 | 武汉普赛斯电子技术有限公司 | Compact precise four-dimensional adjustment platform |
| CN114620447B (en) * | 2022-04-26 | 2024-01-26 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Substrate transfer apparatus |
| CN115632023B (en) * | 2022-12-22 | 2023-08-04 | 河北博特半导体设备科技有限公司 | Double-arm wafer transmission device |
| CN116110836B (en) * | 2023-04-13 | 2023-07-04 | 北京锐洁机器人科技有限公司 | Semiconductor single-chip-to-multi-chip wafer carrying executing mechanism, manipulator and operating method |
| CN117192342B (en) * | 2023-11-08 | 2024-02-13 | 深圳市森美协尔科技有限公司 | probe station |
| CN117954375B (en) * | 2024-03-27 | 2024-07-02 | 上海图双精密装备有限公司 | Rotary driving device for double-shaft platform |
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| CN104576474A (en) * | 2013-08-30 | 2015-04-29 | 罗普伺达机器人有限公司 | Transfer robot having multiple arms |
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|---|---|---|---|---|
| US8951002B2 (en) * | 2002-05-09 | 2015-02-10 | Brooks Automation, Inc. | Dual arm robot |
| CN101383313A (en) * | 2008-10-24 | 2009-03-11 | 陈百捷 | Manipulator for fetching and delivering silicon chip |
| CN103199044A (en) * | 2013-03-06 | 2013-07-10 | 北京自动化技术研究院 | Silicon slice conveying device |
| CN104576474A (en) * | 2013-08-30 | 2015-04-29 | 罗普伺达机器人有限公司 | Transfer robot having multiple arms |
| CN103802095A (en) * | 2014-02-26 | 2014-05-21 | 温州职业技术学院 | Four-degree-of-freedom servo manipulator |
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| CN106409740A (en) | 2017-02-15 |
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