CN106409740A - Single-arm three freedom degree wafer transfer manipulator and use method thereof - Google Patents
Single-arm three freedom degree wafer transfer manipulator and use method thereof Download PDFInfo
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- CN106409740A CN106409740A CN201610919448.2A CN201610919448A CN106409740A CN 106409740 A CN106409740 A CN 106409740A CN 201610919448 A CN201610919448 A CN 201610919448A CN 106409740 A CN106409740 A CN 106409740A
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- 230000033001 locomotion Effects 0.000 claims abstract description 86
- 238000010521 absorption reaction Methods 0.000 claims description 10
- 230000005611 electricity Effects 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 6
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- 238000001179 sorption measurement Methods 0.000 claims 1
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- 239000004065 semiconductor Substances 0.000 description 3
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- 238000005096 rolling process Methods 0.000 description 2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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Abstract
The invention discloses a single-arm three freedom degree wafer transfer manipulator and a use method thereof. The manipulator comprises a rotary motion system, a radial motion system, a vertical motion system and a bracket. The rotary motion system comprises a rotary drive motor which is connected with a lift frame. The rotary drive motor drives a main arm to rotate through a first drive device. The top end of the main arm runs through an upper bracket and is connected with the radial motion system to drive the radial motion system to rotate. The radial motion system comprises a radial drive motor which is connected with a radial bracket. The radial drive motor drives a mechanical gripper sliding along two radial guide rails through a second drive device. A vacuum suction device which is used for adsorbing a wafer is arranged on the surface of the mechanical gripper. The vertical motion system comprises a vertical drive motor which is connected with a vertical motor bracket. The vertical drive motor drives a lift frame which moves up and down along two linear guide shafts through a third drive device, and then drives the rotary motion system and the radial motion system to move up and down.
Description
Technical field
The present invention relates to a kind of wafer transfer mechanical hand of 3DOF and using method, achievable wafer is in different station
Between reliable accurately shift, be specifically for use in wafer on-line detecting system.
Background technology
Third generation wide bandgap semiconductor has the advantages such as high stability, high photoelectric conversion, low-yield loss, is widely used
In fields such as consumer-elcetronics devices, new-energy automobile, aircraft engines, its material price is also relatively valuable.Therefore, collect whole
Become in the manufacturing process of device, the detection and analysis to semi-conducting material is just particularly important.
Production yields and size with wafer are continuously increased it is desirable to the production of wafer and test are towards high speed, continuous
Change, automated production direction is developed.Due to needing to realize the fast transfer of wafer station in limited space, thus carrying out crystalline substance
During loop truss, to aspects such as the job stability of automatic transmission manipulator, action accuracy and cleanliness factors, it is proposed relatively
High requirement.
Accordingly, as the nucleus equipment of chip transmission and positioning in quasiconductor detection, wafer transfer mechanical hand is probed into,
To breaking the external monopolization to the high-end micro- market of China, promote the development of China's semiconductor industry, significant.
Content of the invention
For the problems referred to above, the purpose of the present invention is to propose to one kind can accomplish efficiently to carry, at a high speed and hi-Fix
Wafer transfer mechanical hand and using method.
For realizing described purpose, first technical scheme that the present invention adopts is as follows：
A kind of mechanical hand of transmission wafer, including rotary motion system, radial motion system, vertical movement system and installation
The support of three described systems；Described support include radial struts, casing and the upper bracket being arranged in casing, lower carriage,
Motor vertical support；
Described rotary motion system includes a rotary drive motor being connected on crane, and rotary drive motor passes through the
One actuator drives one principal arm rotates, described principal arm top pass described upper bracket be connected with radial motion system and then
Drive the rotation of radial motion system；Described radial motion system includes a radial drive motor being connected in radial struts, footpath
The mechanical paw being slided along two radial guidances by the second actuator drives one to motor, described mechanical paw surface sets
It is equipped with the vacuum absorption device for adsorbing wafer；Described vertical movement system includes one and is connected on described motor vertical support
Vertical driving motor, described vertical driving motor carries electromagnetic brake brake unit it is ensured that electromagnetic brake after motor dead electricity
Coil also dead electricity, makes the brake shoe of brake tightly embrace brake wheel motor and is braked and stall, and described vertical driving motor passes through the
The described crane that three actuator drives move up and down along two linear steering axles, and then drive rotary motion system and radially transport
Dynamic system moves up and down.
Further, described first actuating device include a drivewheel being connected with described rotary drive motor outfan and
The driven pulley being engaged with, described driven pulley makes gear shaft, and the lower end of described gear shaft is fixed on institute by thrust shaft block
State in the lower plate of crane, to prevent the axial float of gear shaft, described gear shaft passes through institute by deep groove ball bearing holder assembly
State the upper plate of crane, its upper end extension is described principal arm.
Further, described second actuating device includes a ball wire being connected with described radial drive motor output end
Thick stick, described ball-screw two ends are fixed by affixed side square leading screw mounting assembly and support side type leading screw mounting assembly respectively
In described radial struts；The feed screw nut of described ball-screw connects a plummer, and described plummer is fixed with described machine
Tool paw, and described plummer is connected with two guide rail slide blocks.
Further, described second actuating device, its described affixed side square leading screw mounting assembly includes an affixed side
Bearing, has, in described affixed side bearing, the angular contact ball bearing being mounted opposite a pair, to bear the axial force of both direction
Prevent axial float.
Further, described second actuating device, its described support side type leading screw mounting assembly includes a support side
Bearing, is provided with a deep groove ball bearing, to bear radial load in the collateral seat of described support.
Further, described 3rd actuating device includes a ball wire being connected with described vertical driving motor outfan
Thick stick, the two ends of described ball-screw are passed through affixed side round leading screw mounting assembly respectively and support side round leading screw mounting assembly even
It is connected on described upper and lower support；The feed screw nut of described ball-screw is fixed on described crane, two parallel lines
The property axis of guide is connected with described crane by linear bearing, and the two ends of the described axis of guide are separately fixed on upper and lower support.
Further, described 3rd actuating device, the round leading screw mounting assembly of its described affixed side includes an affixed side
Bearing, has, in described affixed side bearing, the angular contact ball bearing being mounted opposite a pair, to bear the axial force of both direction
Prevent axial float.
Further, described 3rd actuating device, the round leading screw mounting assembly in its described support side includes a support side
Bearing, is provided with a deep groove ball bearing, to bear radial load in the collateral seat of described support.
Further, also include a vacuum absorption device, described vacuum absorption device includes one and is arranged on mechanical paw
Vacuum runner, described runner two ends are vacuum adapter and go out oral sucker respectively, vacuum through paw vacuum-flow road reach described in go out
With wafer contacts thus producing absorption affinity absorption wafer at mouthful.
Second technical scheme that the present invention adopts is as follows：
The using method of the present invention is as follows：
During work, mechanical hand receives the control signal that industrial computer sends, rotary motion system and vertical movement system cooperation
Motion makes mechanical hand rise closely to film magazine height after rotating, and radial motion system drive mechanical paw is just extending out in film magazine wafer
Lower section；
Then vertical movement system continues slightly upper shifting, and end paw contacts wafer, and vacuum generator starts, and vacuum is through true
Empty runner reaches exit and holds wafer, and mechanical paw radial direction retraction makes wafer release sheet under the driving of radial motion system
Box；
After the wafer in film magazine is removed, film magazine decline two panels wafer pitch from height；Carry the mechanical hand of wafer
Reach after the height of prealignment platform through the routing motion of rotary motion system and vertical movement system, radial motion system drive
Mechanical paw moves to the top of prealignment platform, and mechanical hand declines under the driving of vertical movement system afterwards, and prealignment platform connects
Tactile wafer, mechanical hand vacuum release wafer simultaneously returns to initial zero position, completes a process.
The present invention adopts above technical scheme, has advantages below：
1st, mechanical hand involved in the present invention has 3 degree of freedom, is radial direction translation, principal arm revolution and elevating movement respectively,
Each of which degree of freedom has an independent motor, and these three motions both can link and can also move alone, and be so conducive to
The adjustment of the motion and anglec of rotation is compensated, and can achieve that the motion of wafer is fetched and delivered in arbitrary highly any position.
2nd, the mechanical paw of the present invention is fixed on plummer, and described plummer and radial drive connect firmly, thus real
Show the linkage with radial movement mechanism for the paw, achieve guarantee positioning precision, the beneficial effect of good reliability.
3rd, the present invention is moving vertically on direction in addition to setting lifting travel by computer program and controlling, described vertical
Motor also carry electromagnetic brake brake unit it is ensured that motor dead electricity can the stall by quick effective brake, thus protecting
Positioning precision and the braking ability of mechanical hand vertical direction are demonstrate,proved.
Brief description
Fig. 1 is the overall structure diagram of the present invention；
Fig. 2 is the assembling schematic diagram of rotary motion system in the present invention；
Fig. 3 is the assembling schematic diagram of radial direction motor system in the present invention；
Fig. 4 is the partial enlarged drawing of mechanical paw in the present invention；
Fig. 5 is the assembling schematic diagram of vertical movement system in the present invention；
In figure：1 rotary motion system, 2 radial motion systems, 3 vertical movement systems, 5 supports,
10 motors, 11 drivewheels, 12 driven pulleys, 13 principal arms, 14 tightening flanges, 15 thrust shaft blocks, 16 deep groove ball bearings
Holder assembly,
20 motors, 21 shaft couplings, 22 ball-screws, 23 affixed side square leading screw mounting assemblies, 24 support side type leading screw
Mounting assembly, 25 feed screw nuts, 26 guide rail slide blocks, 27 rolling guides,
30 motors, 31 shaft couplings, 32 ball-screws, 33 affixed sides round leading screw mounting assembly, 34 support the round leading screw in side
Mounting assembly, 35 feed screw nuts, 36 cranes, 37 linear bearings, 38 linear steering axles, 39 linear steering shaft stools,
40 plummers, 41 vacuum adapter, 42 mechanical paws, 43 vacuum runners, 44 go out oral sucker,
50 radial struts, 51 upper brackets, 52 lower carriages, 53 motor vertical supports, 54 right casing, 55 left casing, machine before 56
Shell.
Specific embodiment
With reference to the accompanying drawings and examples the present invention is described in detail.
As shown in figure 1, the present invention includes a rotary motion system 1, a radial motion system 2, a vertical movement system 3 and
The support 5 of above three motor system 1,2,3 is installed.
Described support 5 includes radial struts 50, right casing 54, left casing 55, front housing 56, back cabinet, lower casing and
It is arranged on the upper bracket 51 in casing, lower carriage 52 and motor vertical support 53.Wherein back cabinet and lower casing do not have in figure
It is indicated.
As shown in Fig. 2 the rotary motion system 1 of the present invention includes an AC servomotor 10 being arranged on crane 36,
The output shaft of motor 10 connects a driven pulley 12 by a drivewheel 11, and driven gear makes gear shaft, and its upper end passes through upper
Frame part is the principal arm 13 of rotary motion system, and principal arm 13 top is connected with radial motion system 2 by tightening flange 14, from
And through the mechanical hand realizing being fixed in radial motion system 2 that slows down of speed reducing gear pair 11,12 under the driving of motor 10
The rotary motion of pawl 42 arm 13.Thrust shaft block 15 is fixed in crane 36 lower plate, is connected with the lower end of gear shaft 12, tooth
Wheel shaft 12 passes through the upper plate of crane 36 by deep groove ball bearing holder assembly 16, and deep groove ball bearing holder assembly 16 is solid with crane 36
Fixed connection.
As shown in Figure 3, Figure 4, the radial motion system 2 of the present invention includes an AC servo electricity being arranged in radial struts 50
Machine 20, the output shaft of motor 20 is connected with ball-screw 22 by a shaft coupling 21, and the motor side of leading screw 22 passes through fixing side
Type leading screw mounting assembly 23 is fixing, and the other end passes through to support that side type leading screw mounting assembly 24 supports, affixed side square leading screw props up
There is the angular contact ball bearing being mounted opposite in holder assembly 23 a pair, support to be provided with deep-groove ball axle in side type leading screw mounting assembly 24
Hold, the feed screw nut 25 of leading screw 22 connects a plummer 40, motor 20 drives leading screw 22 to rotate, and plummer 40 is in feed screw nut 25
Drive lower moved radially along the rolling guide 27 that two are arranged in parallel by guide rail slide block 26, mechanical paw 42 is fixed on plummer
On 40, paw 42 is provided with a vacuum adapter 41, a vacuum runner 43 and goes out oral sucker 44, vacuum arrives through vacuum runner 43
Reach contact wafer at oral sucker 44 and can achieve the absorption to wafer.
As shown in figure 5, the vertical movement system 3 of the present invention includes one is arranged on motor vertical support 53 with electromagnetic brake
The AC servomotor 30 of brake unit, the output shaft of motor 30 is connected with ball-screw 32 by a shaft coupling 31, ball-screw
32 motor side is passed through affixed side round leading screw mounting assembly 33 and is fixed, and the other end passes through to support side round leading screw mounting assembly 34
Support in affixed side round leading screw mounting assembly 33, there is a pair the angular contact ball bearing being mounted opposite, support that the round leading screw in side props up
It is provided with deep groove ball bearing, the feed screw nut 35 of ball-screw 32 connects the upper plate of a crane 36, motor 30 drives in holder assembly 34
Dynamic leading screw 32 rotates, and crane 36 passes through linear bearing 37 along the two linear steering axles being arranged in parallel under feed screw nut 35 drive
38 vertically move, and linear steering axle 38 is fixedly connected with carrier parts 51,52 by guide shaft support 39.
During present invention work, mechanical hand receives the control signal that industrial computer sends, rotary motion system 1 and vertical movement system
3 routing motions of uniting make mechanical hand rise after rotating closely to film magazine 01 height, and it is brilliant that radial motion system 2 drives paw to extend out in film magazine
The underface of circle.Then vertical movement system 3 is slightly upper moves, and end paw contacts wafer, and vacuum generator starts, and vacuum is through true
Empty runner 43 reaches and holds wafer at outlet 44, and paw radial direction retraction makes wafer depart under the driving of radial motion system 2
Film magazine 01.
After the wafer in film magazine 01 is removed, film magazine 01 decline two panels wafer pitch from height.Carry the machine of wafer
Tool hand channel is crossed rotary motion system 1 and is reached after the height of prealignment platform with the routing motion of vertical movement system 3, radial motion system
System 2 driving paw moves to the top of prealignment platform, and mechanical hand declines under the driving of vertical movement system afterwards, prealignment platform
Contact wafer, mechanical hand vacuum release wafer simultaneously returns to initial zero position, completes a process.
Although the above-mentioned accompanying drawing that combines is described to the specific embodiment of the present invention, not model is protected to the present invention
The restriction enclosed.Drive mechanism in described rotary motion system 1, radial motion system 2 and vertical movement system 3 may also take on
Other different frame modes, such as in radial motion system 2, the part 27 that play the guiding role can be two be arranged in parallel lead
The feed rod that rail or two is arranged in parallel.Those skilled in the art do not need to pay that creative work can make is various
Modification or deformation are still within protection scope of the present invention.
Claims (10)
1. a kind of wafer transfer mechanical hand of single armed Three Degree Of Freedom is it is characterised in that include rotary motion system, radial motion system
System, vertical movement system and the frame installing three described systems；Described support includes the upper bracket installed up and down and lower
Frame；
Described rotary motion system includes a rotary drive motor being connected on crane, and rotary drive motor passes through first and passes
Dynamic device drives a principal arm rotation, and described principal arm top is passed described upper bracket and is connected with radial motion system and then drives
Radial motion system rotates；Described radial motion system includes a radial drive motor being connected in radial struts, radially drives
The mechanical paw that galvanic electricity machine is slided along two radial guidances by the second actuator drives one, described mechanical paw surface is provided with
For adsorbing the vacuum absorption device of wafer；Described vertical movement system includes one and is connected to hanging down on described motor vertical support
Straight motor, described vertical driving motor carries electromagnetic brake brake unit it is ensured that electromagnetic brake coil after motor dead electricity
Also dead electricity, makes the brake shoe of brake tightly embrace brake wheel motor and is braked and stall, and described vertical driving motor passes through the 3rd and passes
The described crane that dynamic device drives edge two linear steering axle moves up and down, and then drive rotary motion system and radial motion system
System moves up and down.
2. the wafer transfer mechanical hand of single armed Three Degree Of Freedom as claimed in claim 1 is it is characterised in that described first transmission fills
Put including one with the described rotary drive motor outfan drivewheel being connected and the driven pulley being engaged with, described driven pulley makes
Gear shaft, the lower end of described gear shaft is fixed in the lower plate of described crane by thrust shaft block, to prevent gear shaft
Axial float, described gear shaft passes through the upper plate of described crane by deep groove ball bearing holder assembly, and its upper end extension is
For described principal arm.
3. the wafer transfer mechanical hand of single armed Three Degree Of Freedom as claimed in claim 1 is it is characterised in that described second transmission fills
Put including a ball-screw being connected with described radial drive motor output end, affixed side is passed through at described ball-screw two ends respectively
Square leading screw mounting assembly and support side type leading screw mounting assembly are fixed in described radial struts；The silk of described ball-screw
Thick stick nut connects a plummer, and described plummer is fixed with described mechanical paw, and described plummer and two guide rail slide block phases
Even.
4. the wafer transfer mechanical hand of single armed Three Degree Of Freedom as claimed in claim 3 is it is characterised in that described affixed side square
Leading screw mounting assembly includes an affixed side bearing, has a pair the angular contact ball axle being mounted opposite in described affixed side bearing
Hold, axial float is prevented with the axial force bearing both direction.
5. the wafer transfer mechanical hand of single armed Three Degree Of Freedom as claimed in claim 3 is it is characterised in that described support side type
Leading screw mounting assembly includes a collateral seat of support, is provided with a deep groove ball bearing, to bear footpath in the collateral seat of described support
To load.
6. the wafer transfer mechanical hand of single armed Three Degree Of Freedom as claimed in claim 1 is it is characterised in that described 3rd transmission fills
Put including a ball-screw being connected with described vertical driving motor outfan, the two ends of described ball-screw are passed through to fix respectively
Side round leading screw mounting assembly and support side round leading screw mounting assembly are connected on described upper and lower support；Described ball wire
The feed screw nut of thick stick is fixed on described crane, and two parallel linear steering axles pass through linear bearing and described crane
Connect, the two ends of the described axis of guide are separately fixed on upper and lower support.
7. the wafer transfer mechanical hand of single armed Three Degree Of Freedom as claimed in claim 6 is it is characterised in that described affixed side is round
Leading screw mounting assembly includes an affixed side bearing, has a pair the angular contact ball axle being mounted opposite in described affixed side bearing
Hold, axial float is prevented with the axial force bearing both direction.
8. the wafer transfer mechanical hand of single armed Three Degree Of Freedom as claimed in claim 6 is it is characterised in that described support side is round
Leading screw mounting assembly includes a collateral seat of support, is provided with a deep groove ball bearing, to bear footpath in the collateral seat of described support
To load.
9. the wafer transfer mechanical hand of single armed Three Degree Of Freedom as claimed in claim 1 is inhaled it is characterised in that also including a vacuum
Adsorption device, described vacuum absorption device includes a vacuum runner being arranged on mechanical paw, and described runner two ends are true respectively
Sky is taken over and is gone out oral sucker, and vacuum reaches described exit with wafer contacts thus producing absorption affinity absorption through paw vacuum-flow road
Wafer.
10. the using method of the wafer transfer mechanical hand of the arbitrary described single armed Three Degree Of Freedom of claim 1-9, its feature exists
In,
During work, mechanical hand receives the control signal that industrial computer sends, rotary motion system and vertical movement system routing motion
So that mechanical hand is risen closely to film magazine height after rotating, radial motion system drive mechanical paw extend out to wafer in film magazine just under
Side；
Then vertical movement system continues slightly upper shifting, and end paw contacts wafer, and vacuum generator starts, and vacuum is through vacuum-flow
Road arrival exit holds wafer, and mechanical paw radial direction retraction makes wafer depart from film magazine under the driving of radial motion system；
After the wafer in film magazine is removed, film magazine decline two panels wafer pitch from height；The mechanical hand carrying wafer passes through
Rotary motion system reaches after the height of prealignment platform with the routing motion of vertical movement system, radial motion system drive machinery
Paw moves to the top of prealignment platform, and mechanical hand declines under the driving of vertical movement system afterwards, and the contact of prealignment platform is brilliant
Circle, mechanical hand vacuum release wafer simultaneously returns to initial zero position, completes a process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610919448.2A CN106409740B (en) | 2016-10-21 | 2016-10-21 | A kind of the wafer transfer manipulator and application method of single armed Three Degree Of Freedom |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610919448.2A CN106409740B (en) | 2016-10-21 | 2016-10-21 | A kind of the wafer transfer manipulator and application method of single armed Three Degree Of Freedom |
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| Publication Number | Publication Date |
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| CN106409740A true CN106409740A (en) | 2017-02-15 |
| CN106409740B CN106409740B (en) | 2019-08-20 |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108890628A (en) * | 2018-08-08 | 2018-11-27 | 中山市鸿菊自动化设备制造有限公司 | A kind of Novel translation manipulator |
| CN111668144A (en) * | 2020-05-22 | 2020-09-15 | 长园启华智能科技(珠海)有限公司 | Material structure is got to wafer |
| CN111834270A (en) * | 2020-07-28 | 2020-10-27 | 芯米(厦门)半导体设备有限公司 | Wafer transmission device |
| CN113053714A (en) * | 2019-12-27 | 2021-06-29 | 中微半导体设备(上海)股份有限公司 | Vacuum processing system, base station driving device and control method thereof |
| CN113664854A (en) * | 2021-09-17 | 2021-11-19 | 苏州恒嘉晶体材料有限公司 | Wafer carrying manipulator and control method |
| CN113770990A (en) * | 2021-08-27 | 2021-12-10 | 武汉普赛斯电子技术有限公司 | Compact precise four-dimensional adjusting platform |
| CN114620447A (en) * | 2022-04-26 | 2022-06-14 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Substrate transfer device |
| CN115632023A (en) * | 2022-12-22 | 2023-01-20 | 河北博特半导体设备科技有限公司 | Double-arm wafer transmission device |
| CN116110836A (en) * | 2023-04-13 | 2023-05-12 | 北京锐洁机器人科技有限公司 | Semiconductor single-chip-to-multi-chip wafer carrying executing mechanism, manipulator and operating method |
| CN117192342A (en) * | 2023-11-08 | 2023-12-08 | 深圳市森美协尔科技有限公司 | Probe station |
| CN117954375A (en) * | 2024-03-27 | 2024-04-30 | 上海图双精密装备有限公司 | Rotary driving device for double-shaft platform |
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Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108890628A (en) * | 2018-08-08 | 2018-11-27 | 中山市鸿菊自动化设备制造有限公司 | A kind of Novel translation manipulator |
| CN113053714A (en) * | 2019-12-27 | 2021-06-29 | 中微半导体设备(上海)股份有限公司 | Vacuum processing system, base station driving device and control method thereof |
| CN113053714B (en) * | 2019-12-27 | 2024-03-08 | 中微半导体设备(上海)股份有限公司 | Vacuum processing system, driving device for base station and control method thereof |
| CN111668144A (en) * | 2020-05-22 | 2020-09-15 | 长园启华智能科技(珠海)有限公司 | Material structure is got to wafer |
| CN111834270A (en) * | 2020-07-28 | 2020-10-27 | 芯米(厦门)半导体设备有限公司 | Wafer transmission device |
| CN113770990A (en) * | 2021-08-27 | 2021-12-10 | 武汉普赛斯电子技术有限公司 | Compact precise four-dimensional adjusting platform |
| CN113664854A (en) * | 2021-09-17 | 2021-11-19 | 苏州恒嘉晶体材料有限公司 | Wafer carrying manipulator and control method |
| CN114620447B (en) * | 2022-04-26 | 2024-01-26 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Substrate transfer apparatus |
| CN114620447A (en) * | 2022-04-26 | 2022-06-14 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Substrate transfer device |
| CN115632023B (en) * | 2022-12-22 | 2023-08-04 | 河北博特半导体设备科技有限公司 | Double-arm wafer transmission device |
| CN115632023A (en) * | 2022-12-22 | 2023-01-20 | 河北博特半导体设备科技有限公司 | Double-arm wafer transmission device |
| CN116110836A (en) * | 2023-04-13 | 2023-05-12 | 北京锐洁机器人科技有限公司 | Semiconductor single-chip-to-multi-chip wafer carrying executing mechanism, manipulator and operating method |
| CN116110836B (en) * | 2023-04-13 | 2023-07-04 | 北京锐洁机器人科技有限公司 | Semiconductor single-chip-to-multi-chip wafer carrying executing mechanism, manipulator and operating method |
| CN117192342A (en) * | 2023-11-08 | 2023-12-08 | 深圳市森美协尔科技有限公司 | Probe station |
| CN117192342B (en) * | 2023-11-08 | 2024-02-13 | 深圳市森美协尔科技有限公司 | probe station |
| CN117954375A (en) * | 2024-03-27 | 2024-04-30 | 上海图双精密装备有限公司 | Rotary driving device for double-shaft platform |
| CN117954375B (en) * | 2024-03-27 | 2024-07-02 | 上海图双精密装备有限公司 | Rotary driving device for double-shaft platform |
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