CN100410026C - Purifying robot - Google Patents
Purifying robot Download PDFInfo
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- CN100410026C CN100410026C CNB2006100480644A CN200610048064A CN100410026C CN 100410026 C CN100410026 C CN 100410026C CN B2006100480644 A CNB2006100480644 A CN B2006100480644A CN 200610048064 A CN200610048064 A CN 200610048064A CN 100410026 C CN100410026 C CN 100410026C
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Abstract
The present invention relates to an industrial robot, in the concrete, it is a cleaning robot which is used for implementing chip transmission between different working modules in the integrated circuit production process. It is characterized by that it includes a machine seat, R-direction linear telescopic mechanism, theta-direction rotating mechanism, Z-direction lifting and falling mechanism and tail end executor. Besides, said invention also provides its working principle and concrete operation method.
Description
Technical field
The invention belongs to the industrial robot technical field, relate to a kind of purifying robot, specially refer to a kind of chip transmission purifying robot, mainly be meant a kind of purifying robot of realizing chip transmission between the processing modules different in integrated circuit is made.
Background technology
The development of microelectric technique makes ic manufacturing technology and equipment thereof always be among the continuous change.Particularly current along with the increase of die size and reducing of characteristic line breadth, speed, precision and the cleanliness factor of integrated circuit manufacturing equipment are had higher requirement.The silicon chip transmission system part that in the manufacturing of integrated circuit, is absolutely necessary, and purifying robot occupies an important position in this system.It is mainly being born the accurate location of silicon chip and is carrying task fast, stably.Purifying robot self will be realized three kinds of motions, that is: elevating movement rotatablely moves, and the radial alignment stretching motion, finally makes end effector finish the carrying operation of silicon chip.
Existing technology is as follows:
Patent name is a Workpiece handling robot, the patent No. is CN 1344194A, be characterized in Z to being that drive motors drives the helical screw rotation and drives the feed screw nut again and vertically move and realize, perpendicular to Z to X-Y plane in motion respectively by two drive motors, just the transmission mechanisms such as connecting rod that form of band, pulley and seamless rectangular pipe move and realize.Particularly, centre strut comprises a pair of overlapping concentric shafts.First motor is arranged on and vertically in the matrix moves each, and second motor is arranged in the matrix and drives the near-end connecting rod by outer shaft, and the 3rd motor is arranged in the matrix by interior axle rotation far-end connecting rod.This robot belongs to the selective compliance assembly robot arm of indirect driving, and its complicated in mechanical structure to having relatively high expectations of control system, should not be made.
Patent name is a kind of transferring robot, and the patent No. is CN 2762970Y, is characterized in that Z adopts the ball screw spline pair to realize to, θ to motion, and R adopts timing belt wheel mechanism and linkage to organize a performance to motion and realizes.This robot makes arm volume, weight increase because R is placed on to drive motors, deceleration device in the arm, thereby makes the entire arms rotary inertia become big, so should not realize high-speed motion.Owing to do not use sealing device, this robot also will exert an influence to the cleanliness factor of chip transmission environment simultaneously.
Patent name is the purification transfer robot that two-dimensional parallel drives, and the patent No. is CN 1779936A, be characterized in adopting parallel connecting structure realize R to Z to motion.Because this robot is only limited to the motion of two-dimensional directional, so its range of movement, working space are limited.
Summary of the invention
The technical problem to be solved in the present invention is the weak point at prior art, provide a kind of novelty simple in structure, movement inertia little, take up an area of that the space is little, working space is big, use the cleanliness factor height, make and safeguard easily, can realize the radial alignment stretching motion simultaneously, rotatablely move and the purifying robot of the high-speed, high precision of elevating movement.The weight lighter weight of each arm of working, higher material (as the hard aluminium alloy) processing and fabricating of hardness.
Technical scheme of the present invention is: this purifying robot is made up of to lifting mechanism I I and the terminal IV that carries out to rotating mechanism II, Z to the III of linear telescopic mechanism, θ support I, R.R is placed on base inner to rotating mechanism, Z to the driver part and the corresponding transmission device of elevating mechanism to linear telescopic mechanism, θ, and at the installed inside float-ring sealing device 29 of support loam cake 13.Wherein each to the motion both can realize independently moving, also can realize any two to or 3 to simultaneously the motion.
R links to each other to elevating mechanism with Z by sleeve gripper shoe 33, cylindrical central sleeve 11 to linear telescopic mechanism, and θ links to each other with support by rotation platform 6 to rotating mechanism, and end effector 23 links to each other to linear telescopic mechanism with R by forearm turntable 20; Support is made up of base 1, support shell 29 and support loam cake 13, and base 1 links to each other with brace table 2, and links to each other with rotation platform 6 by crossed roller bearing 37, rotation support 4; Rotation platform 6 links to each other with rotation platform loam cake 27 by 6 rods and forms rotating frame, rotating frame is inner installs ball spline pair (30.1,30.2), and places each drive motors and synchronous toothed belt wheel reducing gear to mechanism on the upper surface of rotation platform 6.Crossed roller bearing 37 can make whole rotating frame axially and radially keep stable, and prevents that whole arm body mechanism from producing inclination with respect to the horizontal plane.
R to linear telescopic mechanism by R to electric rotating machine, 4 groups (9.1,9.2,9.3; 36.1,36.2,36.3; 42.1,42.2,42.3; 46.1,46.2,46.3) synchronous toothed belt wheel reducing gear, ball spline pair (30.1,30.2), radial alignment telescoping mechanism form, shown in Fig. 2,3.R passes through 3 groups (42.1,42.2,42.3 to electric rotating machine 41; 46.1,46.2,46.3; 36.1,36.2,36.3) synchronous toothed belt wheel reducing gear, hub splines 35 link to each other with ball spline shaft 30.1, splined nut urceolus 31 links to each other with the arm body mechanism by timing belt wheel mechanism (9.1,9.2,9.3), outer sleeve 14.
θ to rotating mechanism by 50,2 group (51.1,51.2,51.3 of electric rotating machine; 55.1,55.2,55.3) synchronous toothed belt wheel reducing gear, planetary wheeling mechanism (3.1,3.2,3.3) and rotation platform 6 form, shown in Fig. 2,4.Electric rotating machine 50 is by 2 groups (51.1,51.2,51.3; 55.1,55.2,55.3) the timing belt wheel mechanism links to each other with little synchronous toothed belt wheel 3.1, big synchronous toothed belt wheel 3.3 links to each other with sole plate supports platform 2 and keeps static, rotation platform 6 links to each other with crossed roller bearing 37 inner rings by rotation support 4.
Z is made up of lifting motor 10, timing belt wheel mechanism (5.1,5.2,5.3), ball screw assembly, (7.1,7.2), cylindrical central sleeve 11, ball spline pair (30.1,30.2) and sleeve gripper shoe 33 to elevating mechanism, as shown in Figure 2.Little synchronous toothed belt wheel 5.1 on the lifting motor 10 links to each other with big synchronous toothed belt wheel 5.3 through timing belt 5.2, ball screw 7.2 links to each other with angular contact bearing 39 inner rings, use shaft end ring 40, axle sleeve 37 ball screw 7.2 to be fixed on the central axis of support, ball-screw nut 7.1 links to each other with sleeve gripper shoe 33, sleeve gripper shoe 33 links to each other with the spline urceolus by deep groove ball bearing, end effector 23 links to each other with terminal arm body 21, terminal arm body loam cake 22, there is through hole its inside, and links to each other with air-channel system.
The arm body mechanism is by big arm body 15, timing belt wheel mechanism (16.1,16.2,16.3), big arm turntable 17, big arm brace table 25; forearm body 18, timing belt wheel mechanism 19, forearm turntable 20, forearm brace table 24 and deep groove ball bearing are formed, as shown in Figure 2.Big arm body 18 links to each other with outer sleeve 15, big synchronous toothed belt wheel 16.1 links to each other with cylindrical central sleeve 11, little synchronous toothed belt wheel 16.3 links to each other with big arm turntable 17 and is axially fixed on big arm brace table 25, big arm brace table 25 links to each other with big arm body 15; forearm body 18 links to each other with big arm turntable 17; little synchronous toothed belt wheel 19.1 links to each other with big arm brace table 25; big synchronous toothed belt wheel 19.3 links to each other with forearm brace table 20 and is axially fixed on forearm brace table 24, and forearm brace table 24 links to each other with forearm body 18.
Support loam cake 13 installed inside float-ring sealing devices 59 make outer sleeve 14 and float-ring sealing device keep less clearance diametrically simultaneously, and are represented as Fig. 5.
Effect of the present invention and benefit are:
(1) robot mechanism is simple novel, movement inertia is little, take up an area of that the space is little, working space is big, use the cleanliness factor height, make and safeguard easily, can realize R to, θ to the exercise performance of Z to high-speed, high precision
(2) at the installed inside float-ring sealing device of support loam cake, prevent to enter high clean manufacturing environment by the dust particle that transmission device produces, use the kind of drive of band that power is transferred to high clean environment from low clean environment simultaneously, drive arm motion, thereby help the maintenance of Cleanroom system.
(3) each to the motion both can realize independently moving, also can realize any two to or three-dimensional move simultaneously, each to motion be easy to control.
(4) adopt lighter weight, the higher material (as hard aluminium alloy) of hardness to carry out processing and fabricating, alleviated the weight of the arm of respectively working.
Description of drawings
Fig. 1 is the outside drawing according to purifying robot of the present invention.
Fig. 2 is the overall structure cutaway view of purifying robot of the present invention.
Fig. 3 is the cutaway view of the R of purifying robot of the present invention to driver part.
Fig. 4 is the cutaway view of the θ of purifying robot of the present invention to driver part.
Fig. 5 is the structure cutaway view of the support loam cake of purifying robot of the present invention.
Among Fig. 1, to rotating mechanism, III.R is to linear telescopic mechanism to lifting, θ for I. support, II.Z, the IV. end effector.
Among Fig. 2,1. base, 2. sole plate supports platform, 3. central synchronous flute profile belt wheel 4. rotates support, the little synchronous toothed belt wheel of 5.1., 5.2. timing belt, the big synchronous toothed belt wheel of 5.3., 6. rotation platform, 7.1. ball screw, 7.2. ball screw nut, 8. back-up ring, the little synchronous toothed belt wheel of 9.1., 9.2. timing belt, 9.3. big synchronous toothed belt wheel, 10.Z be to lifting motor, 11. cylindrical central sleeves, 12. rod, 13. the support loam cake, 14. outer sleeves, 15. big arm bodies, 16.1. big synchronous toothed belt wheel, 16.2. timing belt, the little synchronous toothed belt wheel of 16.3., 17. big arm turntables, 18. forearm body, 19.1. little synchronous toothed belt wheel, the synchronous toothed belt wheel of 19.2., the big synchronous toothed belt wheel of 19.3., 20. forearm turntable, 21. terminal arm, 22. terminal arm loam cakes, 23. end effectors, 24. forearm brace table, 25. big arm brace table, 26. regulating wheel mechanisms, 27. rotation platform loam cakes, 28. bearing support, 29. the support shell, 30.1. ball spline shaft, 30.2. ball spline nuts, 31. splined nut urceolus, 32. bearing gland, 33. sleeve gripper shoes, 34. bearing glands, 35. hub splines, 36. the timing belt wheel mechanism, 37. crossed roller bearings, 38. axle sleeves, 39. angular contact ball bearing, 40. shaft end rings.
Among Fig. 3,41.R is to electric rotating machine, the little synchronous toothed belt wheel of 42.1., 42.2. synchronous toothed belt wheel, the big synchronous toothed belt wheel of 42.2., 43. bearing supports, 44. axle sleeve, 45. axle, the little synchronous toothed belt wheel of 46.1., 46.2. timing belt, 46.3. big synchronous toothed belt wheel, 47. axle, 48. axle sleeves, 49. bearing supports.
Among Fig. 4,50. θ are to electric rotating machine, the little synchronous toothed belt wheel of 51.1., 51.2. timing belt, the big synchronous toothed belt wheel of 51.3., 52. bearing supports, 53. axle sleeve, 54. axle, the little synchronous toothed belt wheel of 55.1., 55.2. timing belt, 55.3. big synchronous toothed belt wheel, 56. axle, 57. axle sleeves, 58. bearing supports.
Among Fig. 5,13. support loam cakes, 14. outer sleeves, 59. float-ring sealing devices.
The specific embodiment
Below in conjunction with accompanying drawing the present invention is done description in more detail:
Purifying robot of the present invention is by support I, and R forms to lifting mechanism I I and end effector IV to rotating mechanism II, Z to the III of linear telescopic mechanism, θ.
R is to motion: electric rotating machine 41 is through 3 groups (42.1,42.2,42.3; 46.1,46.2,46.3; 36.1,36.2,36.3) synchronous toothed belt wheel reducing gear, hub splines 35 drive ball spline shafts 30.1 rotations, ball spline shaft 30.1 carries out the moment of torsion transmission by splined nut 30.2, and then make splined nut 30.2 drive 9.1 rotations of coupled little synchronous toothed belt wheel by nut overcoat 31, by timing belt 9.2, big synchronous toothed belt wheel 9.3 and then drive outer sleeve 15 and the big arm body 15 that connects firmly with it is rotated around the support central shaft.Big synchronous toothed belt wheel 16.1 in the big arm body 15 is because of connecting firmly with cylindrical central sleeve 11, so on the direction of rotation of support central shaft, keep static, and little synchronous toothed belt wheel 16.3 is by big arm turntable 17, deep groove ball bearing, be fixed on the big arm brace table 25 axially, thereby big synchronous toothed belt wheel 16.1, timing belt 16.2 and little synchronous toothed belt wheel 16.3 constitute a cover planet cyclic gear train.The motion of big arm body 15 not only drives little synchronous toothed belt wheel 16.3 and is rotated motion, and also the central axis that centers on big arm brace table 25 by big arm turntable 17 drive forearm bodies 18 is rotated motion.Little synchronous toothed belt wheel 19.1 in the forearm body 18 connects firmly with big arm brace table upper surface and keeps relative static, big synchronous toothed belt wheel 19.3 is by forearm turntable 20, deep groove ball bearing, be fixed on the forearm brace table 24 axially, make equally little synchronous toothed belt wheel 19.1, synchronously be with 19.2 and big synchronous toothed belt wheel 19.3 constitute a cover planet cyclic gear train.The rotation of forearm body 18 is by big synchronous toothed belt wheel 19.3, big arm turntable 20, finally drives terminal arm body 21, terminal arm body loam cake 22 and the end effector 23 that connects firmly with it moves simultaneously.
The gearratio of synchronous pulley mechanism (16.1,16.2,16.3) is 2: 1, and the gearratio of synchronous pulley mechanism (19.1,19.2,19.3) is 1: 2, and the centre distance of two synchronous toothed belt wheels equates in big arm body 15 and the forearm body 18.Based on above condition, make end effector do linear telescopic along radial direction all the time under the acting in conjunction of two above-mentioned cover planet cyclic gear trains and move.
θ is to motion: electric rotating machine 50 is by 2 groups (51.1,51.2,51.3; 55.1,55.2,55.3) synchronous toothed belt wheel reducing gear drives 3.1 rotations of little synchronous toothed belt wheel, big synchronous toothed belt wheel 3.3 links to each other with sole plate supports platform 2 and keeps static.Little synchronous toothed belt wheel 3.1, synchronously be with 3.2 and big synchronous toothed belt wheel 3.3 constitute a cover planetary gear cyclic train.The rotation of little synchronous toothed belt wheel 3.1 just drive rotation platform 6, with and on all parts be rotated motion around the support central shaft, thereby realize rotatablely moving of whole arm body mechanism.
Z is to motion: stretch and fall the little synchronous toothed belt wheel 5.1 that motor 10 drives on it and be rotated, drive big synchronous toothed belt wheel 5.3 rotations through timing belt 5.2.Big synchronous toothed belt wheel 5.3 drives ball screw 7.1 by key and is rotated, and ball screw 7.1 drives ball-screw nut 7.2 and the sleeve gripper shoe 33 that connects firmly with it, cylindrical central sleeve 11, outer sleeve 14, ball spline nuts 30.2 and integral arms body mechanism move along the direction at ball spline shaft 30.1 places.Ball spline shaft 30.1 be installed in the perpendicular direction of the upper surface of rotation platform 6 on, Z ball spline nuts 30.2 when motion is moved along ball spline shaft 30.1 and is finished the guide function that Z makes progress.Adopt ball spline make parts such as whole arm body mechanism remain at Z to vertical direction on, and can not depart from this direction.
The controller preferred site control model of purifying robot of the present invention.Control system is made up of four parts, i.e. main control microcomputer (PC), servo motion control card (MPC02 card), AC servo motor, sensing detection.Main control microcomputer (PC) is used to carry out the tension management function, the real-time monitoring side of the management of chief leading cadre's machine interactive interface and control system and work, servo motion control card (MPC02 card) is based on the upper control module of the digital servomotor of main control microcomputer (PC) pci bus, as lower floor's motion controller, carry out all details (comprising the processing, initial point of output, the automatic lifting speed of pulse and direction and the inspection of signal such as spacing) of motion control by it.Main control microcomputer (PC) links to each other with servo motion control card (MPC02 card) and constitutes the master slave control structure, it sends position or speed command by data wire, be provided with, regulate parameter, the line number of going forward side by side mould (D/A) conversion, the analog signal that makes output is through ac servo amplifier rear drive AC servo motor.The AC servo motor axle head is equipped with increment photoelectric code disk, the position feedback that provides feedback signal to come the completing place servo-drive system by photoelectric code disk, thus formed a half-closed loop control system.
Claims (4)
1. purifying robot is to comprise that support (I), R to elevating mechanism (II) and end effector (IV), is characterized in that to rotating mechanism (II), Z to linear telescopic mechanism (III), θ:
R links to each other to elevating mechanism with Z by cylindrical central sleeve (11), sleeve gripper shoe (33) to linear telescopic mechanism, θ links to each other with support by rotation platform (6) to rotating mechanism, end effector (23) links to each other to linear telescopic mechanism with R by forearm turntable (20), support is made up of base (1), support shell (29) and support loam cake (13), base (1) links to each other with sole plate supports platform (2), and links to each other with rotation platform (6) by crossed roller bearing (37), rotation support (4); Rotation platform (6) links to each other with rotation platform loam cake (27) by 6 rods (12) and forms rotating frame, the inner ball spline pair (30.1,30.2) of installing of rotating frame, place each drive motors and synchronous toothed belt wheel reducing gear on the upper surface of rotation platform (6) to mechanism, crossed roller bearing (37) makes whole rotating frame axially and radially keep stable, and prevents that whole arm body mechanism from producing inclination with respect to the horizontal plane;
R to linear telescopic mechanism by R to electric rotating machine (41), 4 groups (9.1,9.2,9.3; 36.1,36.2,36.3; 42.1,42.2,42.3; 46.1,46.2,46.3) synchronous toothed belt wheel reducing gear, ball spline pair (30.1,30.2), radial alignment telescoping mechanism form, R to electric rotating machine (41) by 3 groups (42.1,42.2,42.3; 46.1,46.2,46.3; 36.1,36.2,36.3) synchronous toothed belt wheel reducing gear, hub splines (35) link to each other with ball spline shaft (30.1), splined nut urceolus (31) links to each other with the arm body mechanism by synchronous toothed belt wheel reducing gear (9.1,9.2,9.3), outer sleeve (14);
θ to rotating mechanism by electric rotating machine (50), 2 groups (51.1,51.2,51.3; 55.1,55.2,55.3) synchronous toothed belt wheel reducing gear, planetary wheeling mechanism (3.1,3.2,3.3) and rotation platform (6) form, electric rotating machine (50) is by 2 groups (51.1,51.2,51.3; 55.1,55.2,55.3) synchronous toothed belt wheel reducing gear links to each other to the little synchronous toothed belt wheel of rotating mechanism (3.1) with θ, θ links to each other with sole plate supports platform (2) to the big synchronous toothed belt wheel of rotating mechanism (3.3) and keeps static, and rotation platform (6) links to each other with crossed roller bearing (37) inner ring by rotation support (4);
Z to elevating mechanism by lifting motor (10), synchronous toothed belt wheel reducing gear (5.1,5.2,5.3), ball screw assembly, (7.1,7.2), cylindrical central sleeve (11), ball spline pair (30.1,30.2) and sleeve gripper shoe (33) composition, little synchronous toothed belt wheel (5.1) on the lifting motor (10) links to each other with big synchronous toothed belt wheel (5.3) on the ball screw (7.2) through timing belt (5.2), ball screw (7.2) links to each other with angular contact bearing (39) inner ring, use shaft end ring (40), axle sleeve (37) is fixed on ball screw (7.2) on the central axis of support, ball-screw nut (7.1) links to each other with sleeve gripper shoe (33), sleeve gripper shoe (33) links to each other with splined nut urceolus (31) by deep groove ball bearing, end effector (23) and terminal arm body (21), terminal arm body loam cake (22) links to each other, there is through hole end effector (23) inside, and links to each other with air-channel system;
The arm body mechanism is by big arm body (15); The arm body mechanism first timing belt wheel mechanism (16.1; 16.2; 16.3); Big arm turntable (17); Big arm brace table (25); Forearm body (18); The arm body mechanism second timing belt wheel mechanism (19.1; 19.2; 19.3); Forearm turntable (20); Forearm brace table (24) and deep groove ball bearing form; Big arm body (18) links to each other with outer sleeve (15); The first synchronous toothed belt wheel of arm body mechanism (16.1) links to each other with cylindrical central sleeve (11); The arm body mechanism first little synchronous toothed belt wheel (16.3) links to each other with big arm turntable (17) and is axially fixed at big arm brace table (25); Big arm brace table (25) links to each other with big arm body (15); Forearm body (18) links to each other with big arm turntable (17); The arm body mechanism second little synchronous toothed belt wheel (19.1) links to each other with big arm brace table (25); The second largest synchronous toothed belt wheel of arm body mechanism (19.3) links to each other with forearm turntable (20) and is axially fixed at forearm brace table (24), and forearm brace table (24) links to each other with forearm body (18).
2. according to the described purifying robot of claim 1, it is characterized in that: each all places base inner to drive motors, the reducing gear of mechanism, and be installed on the upper surface of rotation platform (6), rotation platform (6) links to each other with base (1) by rotation support (4), crossed roller bearing (37), sole plate supports platform (2).
3. according to the described purifying robot of claim 1, it is characterized in that: the installed inside float-ring sealing device (59) in support loam cake (13).
4. according to the described purifying robot of claim 1, it is characterized in that each arm body adopts light hard material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100480644A CN100410026C (en) | 2006-10-17 | 2006-10-17 | Purifying robot |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100480644A CN100410026C (en) | 2006-10-17 | 2006-10-17 | Purifying robot |
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| Publication Number | Publication Date |
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| CN1935469A CN1935469A (en) | 2007-03-28 |
| CN100410026C true CN100410026C (en) | 2008-08-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2006100480644A Expired - Fee Related CN100410026C (en) | 2006-10-17 | 2006-10-17 | Purifying robot |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5046729B2 (en) * | 2007-04-25 | 2012-10-10 | 株式会社不二製作所 | Blast gun moving device in blasting machine |
| CN101543991B (en) * | 2008-03-28 | 2012-07-18 | 常州鸿臻电子技术有限公司 | Three-dimensional mechanical hand |
| CN101758497B (en) * | 2010-01-05 | 2011-05-11 | 浙江大学 | Charging and blanking robot of punch press |
| KR101083273B1 (en) * | 2010-02-12 | 2011-11-14 | 유병소 | Apparatus and method of rotation, and rotational system |
| CN102019615A (en) * | 2010-10-20 | 2011-04-20 | 沈阳芯源微电子设备有限公司 | Chip transfer device |
| CN106541042A (en) * | 2015-09-23 | 2017-03-29 | 任思旭 | Sheet parts punch process loading and unloading manipulator arm system |
| CN105500404B (en) * | 2015-12-29 | 2018-02-02 | 东莞市圣荣自动化科技有限公司 | A kind of mechanical arm of band auxiliary heightening structure |
| CN106379730B (en) * | 2016-11-09 | 2018-11-02 | 北京工业大学 | Using the both arms wafer transfer robot rotating mechanism of female rotary ball spline |
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| JPH0994791A (en) * | 1995-10-02 | 1997-04-08 | Zetetsuku Kk | Robot for corrosive atmosphere |
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| CN1759478A (en) * | 2003-03-11 | 2006-04-12 | 应用材料有限公司 | Vision system and method for calibrating a wafer carrying robot |
| CN2762970Y (en) * | 2004-11-04 | 2006-03-08 | 大连理工大学 | Transferring robot |
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| Title |
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| 径向直线运动型硅片传输机器人的设计与研究. 丛，明，张士军，金洙吉，康仁科.制造业自动化，第27卷第2期. 2005 |
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| CN1935469A (en) | 2007-03-28 |
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