CN1779936A - Silicon wafer carrying robot with two-dimensional parallel driven - Google Patents
Silicon wafer carrying robot with two-dimensional parallel driven Download PDFInfo
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- CN1779936A CN1779936A CN 200510010440 CN200510010440A CN1779936A CN 1779936 A CN1779936 A CN 1779936A CN 200510010440 CN200510010440 CN 200510010440 CN 200510010440 A CN200510010440 A CN 200510010440A CN 1779936 A CN1779936 A CN 1779936A
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Abstract
A 2D parallelly driven robot for transporting the silicon wafers is composed of machine body, guide track, leading screw, ball-spline unit, frame nut, two synchronous motor-synchronous wheel units, two synchronous belt structure, two rocker arms, two axles, champing manipulator and casing.
Description
(1), affiliated field
What the present invention relates to is a kind of industrial robot.The robot that is used for silicon chip carrying transmission in specifically a kind of IC manufacturing process equipment.
(2), background technology
In the IC manufacturing process flow, from the many crucial manufacturing equipment that crystal-pulling is checked to the end, the various robot equipments that are used for the silicon chip carrying have been used in a large number.Develop rapidly along with IC is manufacturing, the movement velocity and the positioning accuracy of silicon wafer carrying robot proposed more and more higher requirement.The R axle of silicon wafer carrying robot and the motion of Z axle are two motions of this robotlike, all are to adopt the tandem draw bail at present.This cascaded structure has limited the further raising of R axle and Z axle movement velocity and positioning accuracy.
(3), summary of the invention
The object of the present invention is to provide a kind of compact conformation, movement inertia is little, in light weight, can realize the silicon wafer carrying robot that the two-dimensional parallel of the high-speed, high precision exercise performance of R axle and Z axle drives.
The object of the present invention is achieved like this: it comprises body, guide rail 2, leading screw 3, ball spline assembly, framework nut 5, sleeve 6, synchronous machine and synchronizing wheel I7, synchronous machine and synchronizing wheel II8, synchronous band structure I9, rocking arm I10, axle I12, rocking arm II13, synchronous band structure II14, axle II15, clamping manipulator 16 and cover body 17.Body comprises body base 1.1 and body bearing 1.2, synchronous machine and synchronizing wheel I7 are installed on the body base 1.1, three guide rails 2 are fixedly connected between body base 1.1 and the body bearing 1.2, leading screw 3 usefulness bearings are connected between body base 1.1 and the body bearing 1.2, leading screw 3 lower ends are connected with synchronizing wheel I7 with synchronous machine, the lower end of framework nut 5 is between body base 1.1 and body bearing 1.2, the upper end is on body bearing 1.2, the ball spline assembly comprises splined shaft 4.1, spline inner ring 4.2 and bearing outside 4.3, the upper end of splined shaft 4.1 and body bearing 1.2 has bearing to be connected, the lower end of splined shaft 4.1 is connected with synchronizing wheel II8 with synchronous machine, spline inner ring 4.2 is fixedlyed connected with rocking arm I10, bearing outside 4.3 is fixedlyed connected with synchronous pulley I9.1, band structure I comprises synchronous pulley I9.1 synchronously, synchronous pulley II9.2 and be connected in synchronous band I9.3 between two synchronous pulleys, the lower end of synchronous pulley I9.1 is connected by the upper surface of sleeve 6 and framework nut 5, band structure I is positioned within the rocking arm I10 synchronously, band structure II14 comprises synchronous pulley III14.1 synchronously, synchronous pulley IV14.2 and be connected in synchronous band II14.3 between two synchronous pulleys, band structure II14 is positioned within the rocking arm II13 synchronously, synchronous pulley II9.2 and synchronous pulley III14.1 are installed on the I12, and axle I12 and rocking arm I10 are fixed together.
The present invention can also comprise some architectural features like this:
1, the lower end of framework nut 5 is between body base 1.1 and body bearing 1.2, and the lower end of framework nut 5 and guide rail 2 are to be slidingly connected and leading screw 3 is that screw thread is in transmission connection.
2, be three pillars in the middle of the upper and lower side of framework nut 5, pillar passes body bearing 1.2 and body bearing 1.2 is contactless.
3, fixedly connected by sleeve 6 with synchronous pulley I9.1 in the upper end of described framework nut 5.
4, the upper end of splined shaft 4.1 and body bearing 1.2 has bearing to be connected, the lower end of splined shaft 4.1 is connected with synchronizing wheel II8 with synchronous machine, bearing inner sleeve 4.2 and splined shaft 4.1 have slide relative and do not have and relatively rotate, bearing inner sleeve 4.2 and bearing outside 4.3 relatively rotate and do not have slide relative, bearing inner sleeve 4.2 is fixedlyed connected with rocking arm 110, and bearing outside 4.3 is fixedlyed connected with synchronous pulley I9.1.
Operation principle of the present invention is:
The motion of Z axle: synchronous machine and synchronizing wheel I7 drive leading screw 3 and rotate, worm drive between leading screw 3 and the framework nut 5 drive framework nut 5 and move up and down along guide rail 2, move up and down along splined shaft 4.1 thereby drive sleeve 6, synchronous pulley I9.1, bearing outside 4.3, spline inner ring 4.2, and then band mechanisms and rocker arm body and clamping manipulator move up and down synchronously to drive all.
The motion of R axle: synchronous machine and synchronizing wheel II8 drive splined shaft 4.1 and rotate, and splined shaft 4.1 drives spline inner rings 4.2 and rotates, and are that rotate in the axle center thereby drive rocking arm I10 with the axle center of splined shaft 4.1.The lower end of synchronous pulley I9.1 is connected by the upper surface of sleeve 6 and framework nut 5, so there is not rotation.The transmission that relatively rotates by synchronous band I9.3 of rocking arm I10 and synchronous pulley I9.1 makes synchronous pulley II9.2 rotate with respect to axle I12, and axle I12 and rocking arm I10 are fixed together, so synchronous pulley II9.2 and rocking arm I10 relatively rotate.Fixedly connected with rocking arm II13 in the upper end of synchronous pulley II9.2, thereby rocking arm II13 is that rotate relative to a rocking arm I10 and an axle I12 in the axle center with the axle center of axle I12.A synchronous pulley III14.1 and an axle I12 are fixed together, so synchronous pulley III14.1 rotates relative to rocking arm II13, and then make synchronous pulley IV14.2 relative to rotating relative to rocking arm II13 by synchronous band II14.3.Synchronous pulley IV14.2 and axle II15 are fixed together, and axle II15 and rocking arm II13 connect by bearing I V11.4 and bearing V11.5, thereby an II15 is rotated relative to rocking arm II13.Axle II15 and clamping manipulator 16 are fixed together, thereby clamping manipulator 16 and rocking arm II13 are relatively rotated.
Synchronously the gearratio of band structure I9 is 2: 1, and the gearratio of band structure II14 is 1: 2 synchronously, and rocking arm I10 and rocking arm II13 are isometric, and entire mechanism can be simplified the crank block structure that becomes of equal value, can make clamping manipulator 16 move and keep attitude constant along the R direction of principal axis.
Robot architecture of the present invention is novel compact, and movement inertia is little, in light weight, can realize the high-speed, high precision exercise performance of R axle and Z axle.Wherein, the motion of R axle realizes that along the rectilinear motion of robot rotation (θ axle, rotatablely moving of robot waist because of not having direct relation with the present invention, do not drawn in the accompanying drawing) radial direction, the motion of R axle realizes the rectilinear motion along the robot vertical direction.
(4), description of drawings
Fig. 1 is the axonometric drawing of entire mechanism of the present invention;
Fig. 2 removes synchronous machine and synchronizing wheel I7, synchronous machine and synchronizing wheel II8, rocking arm I10, rocking arm II13, clamping manipulator 16 and cover body 17 internal structure afterwards for Fig. 1;
Fig. 3 is the perspective view of Fig. 2, is intended to point out bearing I 11.1 and bearing VIII11.8.
(5), specific embodiments
For example the present invention is done description in more detail below in conjunction with accompanying drawing:
Fixedly connected three guide rails 2 are that the center of circle distributes by 120 degree with the center of circle of circular body base 1.1 between body base 1.1 and the body bearing 1.2.The lower end of leading screw 3 connects by bearing VI11.6 and body base 1.1, and the upper end connects by bearing VIII11.8 and body bearing 1.2.Synchronous machine and synchronizing wheel I7 are fixed on the body base 1.1, and the lower end of it and synchronizing wheel and leading screw 3 is fixed together.
The axle center of framework nut 5 centers and leading screw 3 is harmonious, and is the screw thread driving coupling between them.Three holes and framework nut 5 that guide rail 2 passes framework nut 5 bottoms have slide relative up and down, and framework nut 5 is played the vertically-guided effect.Three pillars in the middle of the framework nut 5 pass three holes of body bearing 1.2, and are contactless between them.
Synchronous machine and synchronizing wheel II8 are fixed on the top of body bearing 1.2, and its synchronizing wheel is connected mutually with the lower end of splined shaft 4.1, and splined shaft 4.1 down is connected with the top of body bearing 1.2 by bearing VII11.7 again.4.2 of spline inner rings slide up and down and do not have and rotate relative to splined shaft 4.1, and bearing outside 4.3 relatively rotates not have by ball and spline inner ring 4.2 and slides up and down.The lower end of synchronous pulley I9.1 is connected by the upper surface of sleeve 6 and framework nut 5, and the inner ring of synchronous pulley I9.1 and bearing outside 4.3 are connected.An end and the spline inner ring 4.2 of rocking arm I10 are fixed together.The other end and axle I12 are fixed together.Synchronous pulley II9.2 is connected by bearing I 11.1, bearing I I11.2 and axle I12 and axle I12 relatively rotates.Synchronous pulley I9.1 has synchronous band transmission by synchronous band I9.3 and synchronous pulley II9.2.Fixedly connected with rocking arm II13 in the upper end of synchronous pulley II9.2.The upper end of axle I12 connects by bearing I II11.3 and rocking arm II13 and rocking arm II13 relatively rotates.Synchronous pulley III14.1 and axle I12 are fixed together.Synchronous pulley IV14.2 and axle II15 are fixed together.Synchronous pulley III14.1 and synchronous pulley IV14.2 are with transmission synchronously by synchronous band II14.3.Axle II15 and rocking arm II13 connect by bearing I V11.4 and bearing V11.5, relatively rotate between the two.Clamping manipulator 16 and axle II15 are fixed together.
Claims (6)
1; The silicon wafer carrying robot that a kind of two-dimensional parallel drives; It comprises body; Guide rail (2); Leading screw (3); The ball spline assembly; Framework nut (5); Sleeve (6); Synchronous motor and synchronizing wheel I (7); Synchronous motor and synchronizing wheel II (8); Timing Belt structure I (9); Rocking arm I (10); Axle I (12); Rocking arm II (13); Timing Belt structure I I (14); Axle II (15); Clamping manipulator (16) and cover body (17); It is characterized in that: body comprises body base (1.1) and body bearing (1.2); Synchronous motor and synchronizing wheel I (7) are installed on the body base (1.1); Three guide rails (2) are fixedly connected between body base (1.1) and the body bearing (1.2); Leading screw (3) is connected between body base (1.1) and the body bearing (1.2) with bearing; Leading screw (3) lower end is connected with synchronizing wheel I (7) with synchronous motor; The lower end of framework nut (5) is between body base (1.1) and body bearing (1.2); The upper end is on body bearing (1.2); The ball spline assembly comprises splined shaft (4.1); Spline inner ring (4.2) and bearing outside (4.3); Splined shaft (4.1) is connected 1.2 with the body bearing) the upper end have bearing to connect; The lower end of splined shaft (4.1) is connected 8 with synchronous motor with synchronizing wheel II) connect; Spline inner ring (4.2) is fixedly connected with rocking arm I (10); Bearing outside (4.3) is fixedly connected with synchronous pulley I (9.1); The Timing Belt structure I comprises synchronous pulley I (9.1); Synchronous pulley II (9.2) and be connected in Timing Belt I (9.3) between two synchronous pulleys; The lower end of synchronous pulley I (9.1) is connected by the upper surface of sleeve (6) and framework nut (5); The Timing Belt structure I is positioned within the rocking arm I (10); Timing Belt structure I I (14) comprises synchronous pulley III (14.1); Synchronous pulley IV (14.2) and be connected in Timing Belt II (14.3) between two synchronous pulleys; Timing Belt structure I I (14) is positioned within the rocking arm II (13); Synchronous pulley II (9.2) and synchronous pulley III (14.1) are installed on the axle I (12), and axle I (12) and rocking arm I (10) are fixed together.
2, the silicon wafer carrying robot of two-dimensional parallel driving according to claim 1, it is characterized in that: the lower end of framework nut (5) is between body base (1.1) and body bearing (1.2), and the lower end of framework nut (5) and guide rail (2) are to be slidingly connected and leading screw (3) is that screw thread is in transmission connection.
3, the silicon wafer carrying robot of two-dimensional parallel driving according to claim 1 and 2, it is characterized in that: in the middle of the upper and lower side of framework nut (5) is three pillars, and pillar passes body bearing (1.2) and body bearing (1.2) is contactless.
4, the silicon wafer carrying robot people of two-dimensional parallel driving according to claim 3, it is characterized in that: fixedly connected by sleeve (6) with synchronous pulley I (9.1) in the upper end of described framework nut (5).
5, the silicon wafer carrying robot that drives according to claim 1,2 or 4 described two-dimensional parallels, it is characterized in that: splined shaft (4.1) has bearing to be connected with the upper end of body bearing (1.2), the lower end of splined shaft (4.1) is connected with synchronizing wheel II (8) with synchronous machine, bearing inner sleeve (4.2) and splined shaft (4.1) have slide relative and do not have and relatively rotate, bearing inner sleeve (4.2) and bearing outside (4.3) relatively rotate and do not have slide relative, bearing inner sleeve (4.2) is fixedlyed connected with rocking arm 1 (10), and bearing outside (4.3) is fixedlyed connected with synchronous pulley I (9.1).
6, the silicon wafer carrying robot of two-dimensional parallel driving according to claim 3, it is characterized in that: splined shaft (4.1) has bearing to be connected with the upper end of body bearing (1.2), the lower end of splined shaft (4.1) is connected with synchronizing wheel II (8) with synchronous machine, bearing inner sleeve (4.2) and splined shaft (4.1) have slide relative and do not have and relatively rotate, bearing inner sleeve (4.2) and bearing outside (4.3) relatively rotate and do not have slide relative, bearing inner sleeve (4.2) is fixedlyed connected with rocking arm 1 (10), and bearing outside (4.3) is fixedlyed connected with synchronous pulley I (9.1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100104406A CN100342517C (en) | 2005-10-19 | 2005-10-19 | Silicon wafer carrying robot with two-dimensional parallel driven |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100104406A CN100342517C (en) | 2005-10-19 | 2005-10-19 | Silicon wafer carrying robot with two-dimensional parallel driven |
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| Publication Number | Publication Date |
|---|---|
| CN1779936A true CN1779936A (en) | 2006-05-31 |
| CN100342517C CN100342517C (en) | 2007-10-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100104406A Expired - Fee Related CN100342517C (en) | 2005-10-19 | 2005-10-19 | Silicon wafer carrying robot with two-dimensional parallel driven |
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| US6663333B2 (en) * | 2001-07-13 | 2003-12-16 | Axcelis Technologies, Inc. | Wafer transport apparatus |
| JP2003117877A (en) * | 2001-10-17 | 2003-04-23 | Japan Servo Co Ltd | Articulated industrial robot |
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| CN100410026C (en) * | 2006-10-17 | 2008-08-13 | 大连理工大学 | Purifying robot |
| CN101195220B (en) * | 2006-11-15 | 2010-06-09 | 罗普伺达机器人有限公司 | Double arm type robot |
| CN101599421B (en) * | 2009-04-21 | 2011-12-07 | 张万进 | Silicon chip stacking machine |
| CN101698253B (en) * | 2009-06-19 | 2011-07-20 | 南京理工大学 | Special mechanism for automatically conveying high-temperature saw bit |
| CN102059187A (en) * | 2009-11-17 | 2011-05-18 | 赵德志 | Small-size spraying robot |
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| CN102126209A (en) * | 2011-03-16 | 2011-07-20 | 哈尔滨工业大学 | W-shaft differential shaft transmission mechanism used for wafer-handling robot |
| CN102176423A (en) * | 2011-03-16 | 2011-09-07 | 哈尔滨工业大学 | Z-axis double-limit mechanism of silicon wafer transmission robot |
| CN102126209B (en) * | 2011-03-16 | 2012-08-15 | 哈尔滨工业大学 | W-shaft differential shaft transmission mechanism used for wafer-handling robot |
| CN102161199B (en) * | 2011-03-16 | 2012-09-19 | 哈尔滨工业大学 | W-axis coaxial transmission mechanism for silicon wafer transmission robot |
| CN102126208B (en) * | 2011-03-16 | 2012-09-19 | 哈尔滨工业大学 | Parallel connection type R-shaft expansion mechanical arm |
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| CN102157417A (en) * | 2011-03-16 | 2011-08-17 | 哈尔滨工业大学 | Silicon slice transmission robot |
| CN102157417B (en) * | 2011-03-16 | 2013-07-10 | 哈尔滨工业大学 | Silicon slice transmission robot |
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| CN102200181B (en) * | 2011-03-16 | 2014-02-12 | 哈尔滨工业大学 | Z-axis transmission structure |
| CN103802131A (en) * | 2012-11-08 | 2014-05-21 | 沈阳新松机器人自动化股份有限公司 | Stacker arm structure and wire layout method thereof |
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| CN106541042A (en) * | 2015-09-23 | 2017-03-29 | 任思旭 | Sheet parts punch process loading and unloading manipulator arm system |
| CN106184895A (en) * | 2016-08-29 | 2016-12-07 | 杭州三迪数控设备有限公司 | One has powder without powder medical latex glove packer clamp device |
| CN106379730A (en) * | 2016-11-09 | 2017-02-08 | 北京工业大学 | Double-arm wafer transfer robot rotating mechanism adopting nut rotation type ball spline |
| CN109760029A (en) * | 2019-03-22 | 2019-05-17 | 中国电子科技集团公司第三十八研究所 | Platypelloid type one armed robot based on synchronous belt pulley transmission |
| CN112621718A (en) * | 2020-12-10 | 2021-04-09 | 台州学院 | Two-degree-of-freedom parallel driving manipulator |
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| CN100342517C (en) | 2007-10-10 |
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