CN102200181A - Z-axis transmission structure - Google Patents
Z-axis transmission structure Download PDFInfo
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- CN102200181A CN102200181A CN2011100627584A CN201110062758A CN102200181A CN 102200181 A CN102200181 A CN 102200181A CN 2011100627584 A CN2011100627584 A CN 2011100627584A CN 201110062758 A CN201110062758 A CN 201110062758A CN 102200181 A CN102200181 A CN 102200181A
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Abstract
The invention relates to a Z-axis transmission structure. A triangular support sliding sleeve (6) and three sets of LF-type linear roll ball spline shafts/linear roll ball bushing combinations (3) are used to replace a vertical post and serve as a main body support structure. Since the LF-type linear roll ball spline shafts/linear roll ball bushing combinations (3) have higher transmission precision and are uniformly distributed in the circumference at an angle of 120 degrees, the triangular support sliding sleeve (6) only uniformly bears the weight of a T-axis mechanism and an R-axis mechanism, cannot generate an extra turning torque due to non-uniform applied force, and the stress state is greatly improved to make the Z-axis transmission structure more reasonable.
Description
Technical field
The present invention relates in semi-conductor silicon chip transferring robot manufacturing field, a kind ofly compare with upright post type Z shaft drive structure, have higher transmission accuracy, driven load circumference uniform distribution, in light weight, volume is little, the three-support formula Z shaft drive structure of saving the space.
Background technique
In the Z of chip transmission robot shaft drive structure, domestic most use upright post type Z shaft drive structure promptly uses spherical guide as the driven off by shaft motion benchmark of Z, spherical guide is installed on the reference level of column.But this drive mechanism exists following shortcoming: the one, and structural stress state is bad.Because the total weight of T axle and R axle all passes to spherical guide by T axle supporting slider with the form of overhang, spherical guide is outside the gravity that normally bears, also additionally bear very big turning torque, make spherical guide produce bigger microdeformation, gently then motion-affecting flexibility, heavy then shorten working life of spherical guide.The 2nd because between the attachment face and lateral register face of spherical guide, between the face of installing and locating up and down of column, all exist the shaped position tolerance of complexity between the reference for installation of spherical guide attachment face and ball screw, therefore column processing technology complexity, yield rate are lower, the processing cost height.The 3rd, because the weight of column is generally all at tens kilograms, face is installed in the side direction in the cabinet, inevitably causes crank, main frame is produced topple.The 4th, because area of contact is very big between the last lower installation board of the attachment face up and down of column and main frame, make it when assembling, be difficult for adjusting, waste time and energy.
Summary of the invention
The object of the present invention is to provide a kind of rational in infrastructure, have higher transmission accuracy, driven load circumference uniform distribution, in light weight, volume is little, the three-support formula Z shaft drive structure of saving the space.
Goal of the invention of the present invention is achieved in that a kind of Z shaft drive structure, comprises fitting seat 1, Z axial brake device combination 2, LF type straight line ball spline shaft/straight line ball bushing combination 3, flexible coupling 4, ball screw 5, three-support sliding sleeve 6, ball wire female component 7, T axis mechanism combination 8 down, goes up mounting cover 9 etc.The characteristics of the Z shaft drive structure of described highi degree of accuracy, equal load are: use three-support sliding sleeve 6 and three cover LF type straight line ball spline shaft/straight line ball bushings combinations 3 to substitute columns.Because LF type straight line ball spline shaft/straight line ball bushing combination 3 has very high transmission accuracy, and in circumference is installed, be 120 ° uniform, therefore make 6 of three-support sliding sleeves bear the weight of T axle and R axis mechanism equably, and can not produce extra turning torque because of unbalance stress, improved stress greatly, made Z shaft drive structure more reasonable.
3 LF type straight line ball spline shafts 3 are installed in down in the mounting hole of fitting seat 1, and are screwed in the screw of spline axle head fastening through the following counter sink of fitting seat 1 with fastening screw trip bolt.
3 LF type straight line ball bushings combination 3 is packed in the mounting hole of three-support sliding sleeve 6, and tighten with fastening screw trip bolt and to put in place.Again ball wire female component 7 is packed in the matching hole of three-support sliding sleeve 6, tighten fastening with fastening screw trip bolt.Screw in the ball wire female component 7 ball screw 5 stand-by at last.
Z axial brake device combination 2 is installed in down the relevant position of fitting seat 1, and connects fastening by the counterbore that descends fitting seat 1 with Z axial brake device combination 2 with fastening screw trip bolt.At the output terminal of Z axial brake device combination 2, flexible coupling 4 is installed then.
The three-support sliding sleeve combination 6 that 3 LF type straight line ball bushing combinations 3 and ball wire female component 7, ball screw 5 are housed is contained on 3 LF type straight line ball spline shafts 3, and the lower end of ball screw 5 packed in the hole of flexible coupling 4, tighten fastening with Cock screw.
After the positioning hole of 3 LF type straight line ball spline shaft 3 upper end positioning cylinders and last mounting cover 9 aligned, by the counterbore on the last mounting cover 9, be screwed in the screw of axle head on the LF type straight line ball spline shaft 3 fastening with fastening screw trip bolt.T axis mechanism combination 8 is installed then.As the need adjustment, unclamp fastening screw trip bolt, be encased inside certain thickness pad to corresponding spline axle head, get final product after again fastening screw trip bolt being tightened.
If the motor shaft rotation of Z axial brake device combination this moment 2, moment drives ball screw 5 rotations by coupling 4, drives ball wire female component 7 and makes straight line motion up and down.Ball screw 5 drives the straight line ball bushing along LF type straight line ball spline shaft 3 moving linearlies by three-support sliding sleeve 6.
The Z shaft drive structure of a kind of highi degree of accuracy of the present invention, equal load has following advantage:
1, compares with upright post type Z shaft drive structure, owing to use three-support sliding sleeve and three cover LF type straight line ball spline shaft/straight line ball bushing combination replacement columns, and LF type straight line ball spline shaft/straight line ball bushing combination has very high transmission accuracy, and in circumference is installed, be 120 ° uniform, therefore make a three-support sliding sleeve weight of bearing T axle and R axis mechanism equably, and can not produce extra turning torque because of unbalance stress, improved stress greatly, made Z shaft drive structure more reasonable.
2, owing to cancelled very complexity of manufacturing process, the column that difficulty of processing is very high, use the highi degree of accuracy LF type straight line ball spline shaft/straight line ball bushing combination that on market, to purchase instead, as long as following fitting seat, on the corresponding installation position of mounting cover and 3 matching holes of three-support sliding sleeve carry out with work step fine finishing, can guarantee assembly precision.Therefore effectively reduced cost.
3, owing to cancelled the heavier column of weight, and load is equally distributed along circumference, corrected the crank problem that column easily produces, and makes the main frame steadily of centre of gravity.
4,, make it when assembling, can use the adjustment pad to adjust, so adjustment process is simple relatively because the last lower shaft end diameter of LF type straight line ball spline shaft wants little many than the attachment face up and down of column.
Description of drawings
Fig. 1 is the stereogram of the Z shaft drive structure of a kind of highi degree of accuracy of the present invention, equal load.
In Fig. 1, concrete numeral: fitting seat, the combination of 2-Z axial brake device, 3-LF type straight line ball spline shaft/straight line ball bushing combination, 4-flexible coupling, 5-ball screw, 6-three-support sliding sleeve, 7-ball wire female component, the combination of 8-T axis mechanism, the last mounting cover of 9-etc. under the 1-.
Embodiment
The invention will be further described in conjunction with the accompanying drawings:
With reference to shown in Figure 1, a kind of highi degree of accuracy, all the Z shaft drive structure of load comprises fitting seat 1, Z axial brake device combination 2, LF type straight line ball spline shaft/straight line ball bushing combination 3, flexible coupling 4, ball screw 5, three-support sliding sleeve 6, ball wire female component 7, T axis mechanism combination 8 down, goes up mounting cover 9 etc.
The characteristics of the Z shaft drive structure of a kind of highi degree of accuracy, equal load are: use three-support sliding sleeve 6 and three cover LF type straight line ball spline shaft/straight line ball bushings combinations 3 to substitute columns.Because LF type straight line ball spline shaft/straight line ball bushing combination 3 has very high transmission accuracy, and in circumference is installed, be 120 ° uniform, therefore make 6 of three-support sliding sleeves bear the weight of T axle and R axis mechanism equably, and can not produce extra turning torque because of unbalance stress, improved stress greatly, made Z shaft drive structure more reasonable.
3 LF type straight line ball spline shafts 3 are installed in down in the mounting hole of fitting seat 1, and are screwed in the screw of spline axle head fastening through the following counter sink of fitting seat 1 with fastening screw trip bolt; 3 LF type straight line ball bushings combination 3 is packed in the mounting hole of three-support sliding sleeve 6, and tighten with fastening screw trip bolt and to put in place.Again ball wire female component 7 is packed in the matching hole of three-support sliding sleeve 6, tighten fastening with fastening screw trip bolt.Screw in the ball wire female component 7 ball screw 5 stand-by at last; Z axial brake device combination 2 is installed in down the relevant position of fitting seat 1, and makes up 2 fastening with the counterbore and the Z axial brake device of fastening screw trip bolt by descending fitting seat 1.At the output terminal of Z axial brake device 2, flexible coupling 4 is installed then.Three-support sliding sleeve 6 combinations that 3 LF type straight line ball bushing combinations 3 and ball screw 7, ball screw 5 are housed are contained on 3 LF type straight line ball spline shafts 3, and the lower end of ball screw 5 packed in the hole of flexible coupling 4, tighten fastening with Cock screw.After the positioning hole of 3 LF type straight line ball spline shaft 3 upper end positioning cylinders and last mounting cover 9 aligned, by the counterbore on the last mounting cover 9, be screwed in the screw of axle head on the LF type straight line ball spline shaft 3 fastening with fastening screw trip bolt.T axis mechanism combination 8 is installed then.As the need adjustment, unclamp fastening screw trip bolt, be encased inside certain thickness pad to corresponding spline axle head, get final product after again fastening screw trip bolt being tightened.
If the motor shaft rotation of Z axial brake device combination this moment 2, moment drives ball screw 5 rotations by coupling 4, drives 7 works of ball screw group straight line motion up and down.Ball screw 7 drives straight line ball bushing 3 along LF type straight line ball spline shaft 3 moving linearlies by three-support sliding sleeve 6.
Claims (2)
1. a Z shaft drive structure comprises fitting seat (1), the combination of Z axial brake device (2), the LF type straight line ball spline shaft/combination of straight line ball bushing (3), flexible coupling (4), ball screw (5), three-support sliding sleeve (6), ball wire female component (7), T axis mechanism combination (8) down, goes up mounting cover (9); It is characterized in that: described rotational structure uses three-support sliding sleeve (6) and three cover LF type straight line ball spline shaft/straight line ball bushing combinations (3) as main body supporting structure; Described LF type straight line ball spline shaft/straight line ball bushing combination (3) be installed in be on the circumference 120 ° uniform; Described 3 LF type straight line ball spline shafts (3) are installed in down in the mounting hole of fitting seat (1), and are screwed in the screw of spline axle head fastening with fastening screw trip bolt through the following counter sink of fitting seat (1); Described 3 LF type straight line ball bushings combinations (3) are packed in the mounting hole of three-support sliding sleeve (6), and tighten with fastening screw trip bolt and to put in place; Described ball wire female component (7) is packed in the matching hole of three-support sliding sleeve (6), tightens fastening with fastening screw trip bolt; Described ball screw (5) screws in the ball wire female component (7); Described Z axial brake device combination (2) is installed in down the relevant position of fitting seat (1), and fastening by the counterbore and the Z axial brake device combination (2) of following fitting seat (1) with fastening screw trip bolt; The output terminal of described Z axial brake device (2) is installed flexible coupling (4); Three-support sliding sleeve (6) combination of the described combination of 3 LF type straight line ball bushings (3) and ball screw (7), ball screw (5) is contained on 3 LF type straight line ball spline shafts (3), and the lower end of ball screw (5) packed in the hole of flexible coupling (4), tighten fastening with Cock screw; After the positioning hole of described 3 LF type straight line ball spline shafts (3) upper end positioning cylinder and last mounting cover (9) aligns, by the counterbore on the last mounting cover (9), be screwed into LF type straight line ball spline shaft (3) and go up in the screw of axle head fastening with fastening screw trip bolt; T axis mechanism combination (8) with last installation.
2. Z shaft drive structure according to claim 1, it is characterized in that: LF type straight line ball spline shaft (3) the location and installation hole of following fitting seat (1), LF type straight line ball spline shaft (3) the location and installation hole of going up mounting cover (9), and 3 matching holes of three-support sliding sleeve (6), be installed on the same positioning fixture and carry out with work step fine finishing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110062758.4A CN102200181B (en) | 2011-03-16 | 2011-03-16 | Z-axis transmission structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110062758.4A CN102200181B (en) | 2011-03-16 | 2011-03-16 | Z-axis transmission structure |
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| CN102200181A true CN102200181A (en) | 2011-09-28 |
| CN102200181B CN102200181B (en) | 2014-02-12 |
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| CN201110062758.4A Expired - Fee Related CN102200181B (en) | 2011-03-16 | 2011-03-16 | Z-axis transmission structure |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103196685A (en) * | 2013-03-04 | 2013-07-10 | 重庆大学 | Two-wheel differential wheel type mobile robot experimental platform with adjustable gravity center |
| WO2013102350A1 (en) * | 2012-01-06 | 2013-07-11 | 沈阳新松机器人自动化股份有限公司 | Vertical column structure |
| WO2013135052A1 (en) * | 2012-03-15 | 2013-09-19 | 哈尔滨工业大学 | Z-axis lifting mechanism capable of balancing stressed state |
| CN103846931A (en) * | 2014-02-21 | 2014-06-11 | 上海大学 | Separable cylindrical support structure |
| CN106886228A (en) * | 2017-04-29 | 2017-06-23 | 吉林大学 | A kind of 3 Shaft angle micro-adjusting mechanisms |
| CN108858120A (en) * | 2018-07-12 | 2018-11-23 | 北京理工大学 | It is a kind of for taking turns the parallel submissive wheel foot unit of biped robot |
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| JP2001157974A (en) * | 1999-11-30 | 2001-06-12 | Assist Japan Kk | Double arm type substrate carrying arm |
| CN1779936A (en) * | 2005-10-19 | 2006-05-31 | 哈尔滨工业大学 | Silicon wafer carrying robot with two-dimensional parallel driven |
| CN1970246A (en) * | 2005-11-23 | 2007-05-30 | 沈阳新松机器人自动化股份有限公司 | Planar multiple-articulation robot |
| CN101436562A (en) * | 2008-12-12 | 2009-05-20 | 哈尔滨工业大学 | Large elevating magnification ratio double-arm crystal transmission manipulator |
| JP2009269122A (en) * | 2008-05-07 | 2009-11-19 | Shindengen Electric Mfg Co Ltd | Workpiece conveying robot |
-
2011
- 2011-03-16 CN CN201110062758.4A patent/CN102200181B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001157974A (en) * | 1999-11-30 | 2001-06-12 | Assist Japan Kk | Double arm type substrate carrying arm |
| CN1779936A (en) * | 2005-10-19 | 2006-05-31 | 哈尔滨工业大学 | Silicon wafer carrying robot with two-dimensional parallel driven |
| CN1970246A (en) * | 2005-11-23 | 2007-05-30 | 沈阳新松机器人自动化股份有限公司 | Planar multiple-articulation robot |
| JP2009269122A (en) * | 2008-05-07 | 2009-11-19 | Shindengen Electric Mfg Co Ltd | Workpiece conveying robot |
| CN101436562A (en) * | 2008-12-12 | 2009-05-20 | 哈尔滨工业大学 | Large elevating magnification ratio double-arm crystal transmission manipulator |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013102350A1 (en) * | 2012-01-06 | 2013-07-11 | 沈阳新松机器人自动化股份有限公司 | Vertical column structure |
| WO2013135052A1 (en) * | 2012-03-15 | 2013-09-19 | 哈尔滨工业大学 | Z-axis lifting mechanism capable of balancing stressed state |
| CN103196685A (en) * | 2013-03-04 | 2013-07-10 | 重庆大学 | Two-wheel differential wheel type mobile robot experimental platform with adjustable gravity center |
| CN103196685B (en) * | 2013-03-04 | 2015-04-01 | 重庆大学 | Two-wheel differential wheel type mobile robot experimental platform with adjustable gravity center |
| CN103846931A (en) * | 2014-02-21 | 2014-06-11 | 上海大学 | Separable cylindrical support structure |
| CN103846931B (en) * | 2014-02-21 | 2016-03-30 | 上海大学 | Detachable tubular supporting construction |
| CN106886228A (en) * | 2017-04-29 | 2017-06-23 | 吉林大学 | A kind of 3 Shaft angle micro-adjusting mechanisms |
| CN108858120A (en) * | 2018-07-12 | 2018-11-23 | 北京理工大学 | It is a kind of for taking turns the parallel submissive wheel foot unit of biped robot |
| CN108858120B (en) * | 2018-07-12 | 2021-04-02 | 北京理工大学 | Parallel type compliant wheel foot device for wheel foot robot |
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| CN102200181B (en) | 2014-02-12 |
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