CN202533636U - Connecting mechanism used for focusing and leveling - Google Patents
Connecting mechanism used for focusing and leveling Download PDFInfo
- Publication number
- CN202533636U CN202533636U CN201220089378XU CN201220089378U CN202533636U CN 202533636 U CN202533636 U CN 202533636U CN 201220089378X U CN201220089378X U CN 201220089378XU CN 201220089378 U CN201220089378 U CN 201220089378U CN 202533636 U CN202533636 U CN 202533636U
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- leveling
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Abstract
A connecting mechanism used for focusing and leveling of the utility model comprises an adjustment assembly and an auxiliary operation assembly. The adjustment assembly includes an adjusting screw, a first toothed nut, an aligning seat, an aligning ball, an anti-rotation pin and a first lock nut, wherein the first toothed nut is sleeved on the adjusting screw; the aligning seat, the aligning ball and the first lock nut are sleeved on the adjusting screw, one end of the aligning ball is a spherical end and other end of the aligning ball is a planar end, the aligning seat is connected with the spherical end of the aligning ball, and the first lock nut is connected with the planar end of the aligning ball; and one end of the anti-rotation pin passes through the aligning seat and the aligning ball and then contacts the outer side wall of the adjusting screw. The auxiliary operation assembly includes a rotating shaft, a fixing nut, a second toothed nut and a second lock nut, wherein the fixing nut is sleeved on and connected with the rotating shaft; the second toothed nut is sleeved on and fixedly connected with the rotating shaft; and the second lock nut is sleeved on and connected with the rotating shaft.
Description
Technical field
The utility model relates to the microelectronics equipment, relates in particular to a kind of bindiny mechanism that is used for focusing and leveling.
Background technology
Shown in Figure 1 is prior art coupling mechanism; Said bindiny mechanism comprises upper connector 301, two cover 304 and following web member 305 of being threaded, and two covers 304 that are threaded have first screw thread and second screw thread that rotation direction is identical and pitch is different, and upper connector 301 has screw thread; Upper connector 301 has screw thread; The screw thread of upper connecting rod 301 is connected with two first threaded engagement that are threaded cover 304, and following web member 305 has screw thread, and the screw thread of lower connecting rod 305 is connected with two second threaded engagement that are threaded cover 304; Upper connecting rod 301 has interface to be fixedly connected with main substrate 1; One end of lower connecting rod 305 inserts aligning seat 307 and spherical ball 308, and aligning seat 307 cooperates with the sphere of spherical ball 308, and lower connecting rod 305 has interface to be fixedly connected with the focusing and leveling sensor support plate.Through two set nuts 303 and 306 and two cover 304 that is threaded position of adjusting focusing and leveling sensor support plate 2, the focal plane of focusing and leveling sensor is overlapped with the focal plane of projection objective.
During the adjustment prior art coupling mechanism; Need take bigger operating space, bindiny mechanism side (horizontal space); Do not meet the development trend of litho machine to the space constraint increasingly stringent; Particularly, arrange the microenvironment control system usually around the focusing and leveling sensor, operating the microenvironment control system around having influence on from the side;
In the prior art; The upper connector of bindiny mechanism and main substrate 1 are fixedly connected through screw thread, and following web member also is fixedly connected through screw thread with focusing and leveling sensor support plate 2, generally the plane parallel at the focal plane of projection objective and main substrate 1 place; The plane parallel at the plane at focusing and leveling sensor support plate 2 places and main substrate 1 place; If the plane at the focal plane of projection objective and main substrate 1 place is not parallel, will adjust the position of focusing and leveling sensor support plate 2 through adjustment bindiny mechanism, in the time of need adjusting in any bindiny mechanism; Focusing and leveling sensor support plate 2 must rotate around the line of two other bindiny mechanism; Yet bindiny mechanism all is fixedly connected with main substrate 1 and focusing and leveling sensor support plate 2, has limited the rotation of focusing and leveling sensor support plate 2.
The utility model content
The purpose of the utility model is to provide a kind of bindiny mechanism that is used for focusing and leveling, can save the lateral operation space.
In order to reach above-mentioned purpose; The utility model provides a kind of bindiny mechanism that is used for focusing and leveling; Comprise adjustment assembly and the non-productive operation assembly that is arranged at said adjustment assembly one side, said adjustment assembly comprises adjustment screw rod, the first band teeth nut, aligning seat, spherical ball, stop pin and first set nut; The lateral wall of said adjustment screw rod one end is provided with first external thread, and the lateral wall of the said adjustment screw rod other end is provided with second external thread; The said first band teeth nut is socketed on the said adjustment screw rod and with said first external thread and is threaded; Said aligning seat, spherical ball and first set nut all are socketed on the said adjustment screw rod; One end of said spherical ball is the sphere end; The other end of said spherical ball is a planar ends; Said aligning seat is connected with the sphere end of said spherical ball, and said first set nut is connected with the planar ends of said spherical ball, and said spherical ball and first set nut are threaded with said second external thread; One end of said stop pin passes said aligning seat with spherical ball, contact with the lateral wall of said adjustment screw rod; Said non-productive operation assembly comprises turning axle, hold-down nut, the second band teeth nut and second set nut; Said hold-down nut is socketed on the said turning axle, and is threaded with said turning axle; The said second band teeth nut is socketed on the said turning axle, and is fixedly connected with said turning axle; Said second set nut is socketed on the said turning axle, and is threaded with said turning axle.
The above-mentioned bindiny mechanism that is used for focusing and leveling, wherein, the lateral wall of the said first band teeth nut is provided with gear, and the lateral wall of the said second band teeth nut is provided with gear, and the gear of the gear of the said second band teeth nut and the said first band teeth nut is complementary.
The above-mentioned bindiny mechanism that is used for focusing and leveling, wherein, said first external thread and said second external thread rotary are to identical, and pitch is different.
The above-mentioned bindiny mechanism that is used for focusing and leveling, wherein, said adjustment assembly also comprises cover plate, said cover plate is arranged at the end of said aligning seat near first set nut, and is fixedly connected with said aligning seat.
The above-mentioned bindiny mechanism that is used for focusing and leveling, wherein, said adjustment assembly also comprises a plurality of balls, the first ball keeper and the second ball keeper; The said first ball keeper and the second ball keeper are socketed on the said adjustment nut; The said first ball keeper is arranged at the end of said aligning seat away from first set nut; Said a plurality of ball is embedded on the said first ball keeper, and said a plurality of ball contacts with said aligning seat rolling; The said second ball keeper is arranged at an end of the said first ball keeper and is fixedly connected with the said first ball keeper; The said second ball keeper is provided with a plurality of grooves near the end face of the first ball keeper, and a said groove rolls with a said ball and contacts.
The above-mentioned bindiny mechanism that is used for focusing and leveling, wherein, said turning axle is provided with convexity, and the said second band teeth nut is supported on the said convexity.
The above-mentioned bindiny mechanism that is used for focusing and leveling, wherein, said bindiny mechanism also comprises the elasticity limit assembly, said elasticity limit assembly comprises elastic spacing one and elastic spacing one fixture; Said elastic spacing one fixture is arranged at the periphery of said adjustment assembly; One end of said elastic spacing one passes said elastic spacing one fixture and contacts with the lateral wall of said aligning seat.
The above-mentioned bindiny mechanism that is used for focusing and leveling, wherein, said syndeton comprises three elasticity limit assemblies, and three elasticity limit assemblies are evenly respectively on same circumference.
The above-mentioned bindiny mechanism that is used for focusing and leveling, wherein, said elastic spacing one is a spring column pin.
The above-mentioned bindiny mechanism that is used for focusing and leveling, wherein, said elastic spacing one fixture is provided with threaded hole, and an end of said elastic spacing one passes said threaded hole and contacts with the lateral wall of said aligning seat.
The bindiny mechanism that the utility model is used for focusing and leveling utilizes the non-productive operation assembly to turn the first band teeth nut; The non-productive operation assembly is operated from the bottom; Utilize the position of adjustment assembly adjustment focusing and leveling sensor support plate; The adjustment assembly is also operated from the bottom, has saved the lateral operation space greatly, meets the development trend of litho machine to the space constraint increasingly stringent;
The bindiny mechanism that the utility model is used for focusing and leveling establishes ball between aligning seat and focusing and leveling sensor support plate; At aligning seat outer periphery elastic spacing one; Ball can make between focusing and leveling sensor support plate and the aligning seat and be easy to take place relative motion; Make the rotation of focusing and leveling sensor support plate unrestricted, elastic spacing one then can limit the excessive generation of this relative motion.
Description of drawings
The bindiny mechanism that is used for focusing and leveling of the utility model is provided by following embodiment and accompanying drawing.
Fig. 1 is the cut-open view of the junctor of prior art.
Fig. 2 is the synoptic diagram that the focusing and leveling sensor support plate is connected with main substrate in the utility model.
Fig. 3 is the cut-open view () that the utility model is used for the bindiny mechanism of focusing and leveling.
Fig. 4 is the synoptic diagram of adjustment assembly in the utility model.
Fig. 5 is the partial enlarged drawing of ball part in the utility model.
Fig. 6 is the cut-open view (two) that the utility model is used for the bindiny mechanism of focusing and leveling.
Embodiment
Below will combine Fig. 2～Fig. 6 that the bindiny mechanism that is used for focusing and leveling of the utility model is done further to describe in detail.
In the projection lithography technology that the super large integrated circuit is made,, use focusing and leveling sensor to reduce of the influence of silicon chip surface pattern usually to the projection objective focal plane for guaranteeing lithographic results.As shown in Figure 2; Projection objective (not showing among Fig. 2) is carried on the main substrate 10; Focusing and leveling sensor (not showing among Fig. 2) is installed on the focusing and leveling sensor support plate (FLS support plate) 20; Said focusing and leveling sensor support plate 20 is positioned at the below of said main substrate 10, and said focusing and leveling sensor support plate 20 is connected with said main substrate 10 through three identical bindiny mechanisms 4.
Plane with said main substrate 10 places is the XY plane, sets up three-dimensional system of coordinate.
Shown in Figure 3 is the cut-open view of a said syndeton 4, and said syndeton 4 comprises three parts: adjustment assembly, non-productive operation assembly and elasticity limit assembly;
Said adjustment assembly comprises adjustment screw rod 401, the first band teeth nut 402, aligning seat 403, spherical ball 404, stop pin 405 and first set nut 406;
The lateral wall of said adjustment screw rod 401 1 ends is provided with first external thread (not showing among Fig. 3); The lateral wall of said adjustment screw rod 401 other ends is provided with second external thread (not showing among Fig. 3); Said first external thread and said second external thread rotary are to identical, but pitch is different;
The said first band teeth nut 402 is socketed on the said adjustment screw rod 401 and with said first external thread and is threaded;
Said aligning seat 403, spherical ball 404 and first set nut 406 all are socketed on the said adjustment screw rod 401; One end of said spherical ball 404 is the sphere end; The other end of said spherical ball 404 is a planar ends; Said aligning seat 403 is connected with the sphere end of said spherical ball 404, and said first set nut 406 is connected with the planar ends of said spherical ball 404, and said spherical ball 404 and first set nut 406 are threaded with said second external thread;
One end of said stop pin 405 passes said aligning seat 403 with spherical ball 404, contact with the lateral wall of said adjustment screw rod 401; Said stop pin 405 is used for fixing the relative position between aligning seat 403, spherical ball 404 and the adjustment screw rod 401, prevents that said adjustment screw rod 401 from rotating around the Z axle.
As shown in Figure 4, the lateral wall of the said first band teeth nut 402 is provided with gear 4021.
Preferably, said adjustment assembly also comprises cover plate 407, and said cover plate 407 is arranged at an end of said aligning seat 403, and is fixedly connected with said aligning seat 403 through gib screw 408.Said cover plate 407 is used to prevent that said stop pin 405 from coming off.
Referring to Fig. 3 and Fig. 5, preferably, said adjustment assembly also comprises a plurality of ball 409, the first ball keeper 410 and the second ball keeper 411; The said first ball keeper 410 and the second ball keeper 411 are socketed on the said adjustment nut 401; The said first ball keeper 410 is arranged at the other end of said aligning seat 403; Said a plurality of ball 409 is embedded on the said first ball keeper 410, and said a plurality of ball 409 contacts with said aligning seat 403 rollings; The said second ball keeper 411 is arranged at an end of the said first ball keeper 410 and is fixedly connected with the said first ball keeper 410; The said second ball keeper 411 is provided with a plurality of grooves near the end face of the first ball keeper 410, and a said groove rolls with a said ball 409 and contacts; The said first ball keeper 410 and the second ball keeper 411 are used to grasp said ball 409, and can guarantee that said ball 409 freely rotates.
Between said aligning seat 403 and said focusing and leveling sensor support plate 20, establish ball 409; Can make between said focusing and leveling sensor support plate 20 and the said bindiny mechanism 4 and be easy to take place relative motion; When making any said bindiny mechanism 4 of adjustment, the rotation of said focusing and leveling sensor support plate 20 is unrestricted.
Said non-productive operation assembly is positioned at a side of said adjustment assembly, and it comprises turning axle 501, hold-down nut 502, the second band teeth nut 503, second set nut 504;
Said hold-down nut 502 is socketed on the said turning axle 501, and is threaded with said turning axle 501, and said hold-down nut 502 is used to prevent that said turning axle 501 from moving in the XY plane;
The said second band teeth nut 503 is socketed on the said turning axle 501, and is fixedly connected with said turning axle 501, rotates said turning axle 501 and can drive said second and be with teeth nut 503 to rotate together;
Said turning axle 501 is provided with protruding 5011, said second and is with teeth nut 503 to be supported on said protruding 5011;
The lateral wall of the said second band teeth nut 503 is provided with gear, and the gear 4021 of the gear of the said second band teeth nut 503 and the said first band teeth nut 402 is complementary;
Said second set nut 504 is socketed on the said turning axle 501, and is threaded with said turning axle 501, and said second set nut 504 is used for fixing the position of said turning axle 501 on Z-direction.
Said elasticity limit assembly comprises elastic spacing one 601 and elastic spacing one fixture 602;
Said elastic spacing one fixture 602 is arranged at the periphery of said adjustment assembly, and passes through screw retention on said focusing and leveling sensor support plate 20;
Said elastic spacing one fixture 602 is provided with threaded hole, and said threaded hole is used to install said elastic spacing one 601, and an end of said elastic spacing one 601 passes said threaded hole and contacts with the lateral wall of said aligning seat 403.
Each said syndeton 4 comprises three elasticity limit assemblies, and preferably, three elasticity limit assemblies are evenly respectively on same circumference.
Preferably, said elastic spacing one 601 is a spring column pin.
Can limit the excessive generation of relative motion between said focusing and leveling sensor support plate 20 and the said bindiny mechanism 4 at the outer periphery elastic spacing one 601 of said aligning seat 403.
When using said bindiny mechanism 4 to connect said focusing and leveling sensor support plate 20 and said main substrate 10; Said adjustment screw rod 401 is provided with first an externally threaded end and is threaded with said main substrate 10; The said first band teeth nut 402 is positioned at the bottom of said main substrate 10; The said first band teeth nut 402 is used for said adjustment screw rod 401 is fixed on said main substrate 10; Said adjustment screw rod 401 is provided with second an externally threaded end and passes said focusing and leveling sensor support plate 20, and the end face that the said second ball keeper 411 is not established groove is fixedly connected with the bottom of said focusing and leveling sensor support plate 20; One end of said turning axle 501 inserts in the said main substrate 10; Said turning axle 501 cooperates for the axis hole of certain interval with said main substrate 10; Said hold-down nut 502 is positioned at the bottom of said main substrate 10; The other end of said turning axle 501 passes said focusing and leveling sensor support plate 20, and said second set nut 504 is positioned at the bottom of said focusing and leveling sensor support plate 20; Said elastic spacing one fixture 602 is positioned at the bottom of said focusing and leveling sensor support plate 20, and passes through screw retention on said focusing and leveling sensor support plate 20.
When needing the position of the said relatively main substrate 10 of the said focusing and leveling sensor support plate 20 of adjustment, the position of the said turning axle 501 of adjustment on Z-direction makes gear 4021 engagements of the gear and the said first band teeth nut 402 of the said second band teeth nut 503 earlier; Adjust said turning axle 501 behind the position on the Z-direction, tighten said second set nut 504, the fixing position of said turning axle 501 on Z-direction; Then rotate said turning axle 501, drive the said second band teeth nut 503 and rotate together, thereby unclamp the said first band teeth nut 402 from the bottom of said turning axle 501; Unclamp said first set nut 406 again, just rotatable said adjustment screw rod 401 rotates the position that said adjustment screw rod 401 can be adjusted the said relatively main substrate 10 of said focusing and leveling sensor support plate 20 from the bottom of said adjustment screw rod 401; After adjusting the position of said focusing and leveling sensor support plate 20; But the said turning axle 501 of backward rotation is tightened the said first band teeth nut 402 through the said second band teeth nut 503, prevents that said adjustment screw rod 401 from rotating relative to said main substrate 10; Tighten said first set nut 406 again; Prevent that said adjustment screw rod 401 from rotating relative to said spherical ball 404, at this moment, can unclamp said second set nut 504; To drop-down said turning axle 501; The said second band teeth nut 503 is separated with the said first band teeth nut 402, let the said second band teeth nut 50 be shelved on the said focusing and leveling sensor support plate 20, tighten second set nut 504 again; Let said non-productive operation assembly be fixed on the said focusing and leveling sensor support plate 20, as shown in Figure 6.
Rotate said turning axle 501, adjustment screw rod 401 is all operated from the bottom; Turn said first set nut 406, second set nut 504 is also operated from the bottom; Promptly adjusting said bindiny mechanism 4 operates from the bottom of said bindiny mechanism 4; Saved the lateral operation space greatly, met the development trend of litho machine the space constraint increasingly stringent;
Said bindiny mechanism 4 is reduced to a part to the upper connector of prior art coupling mechanism, two screw shell and following web member---and adjust screw rod 401, reduced the part of a corrective action.
When said focusing and leveling sensor support plate 20 changes on Rx, Ry direction with respect to said main substrate 10 (plane at the focal plane of projection objective and said main substrate 10 places is not parallel); Need be through adjusting the position that said bindiny mechanism 4 adjusts said focusing and leveling sensor support plate 20; When adjusting arbitrary said bindiny mechanism 4; Can produce relative motion between the aligning seat 403 of said focusing and leveling sensor support plate 20 and two other said bindiny mechanism 4; Said ball 409 can make between said focusing and leveling sensor support plate 20 and the said aligning seat 403 and be easy to take place relative motion; Make the rotation of said focusing and leveling sensor support plate 20 unrestricted, and said elastic spacing one 601 can limit the excessive generation of relative motion, adjusts said elastic spacing one 601; Can also not change said focusing and leveling sensor support plate 20 under the situation of the position on Z axle, Rx, Ry and the Rz direction, change the position of said focusing and leveling sensor support plate 20 on X axle, Y direction.
Claims (10)
1. bindiny mechanism that is used for focusing and leveling; It is characterized in that; Comprise adjustment assembly and the non-productive operation assembly that is arranged at said adjustment assembly one side, said adjustment assembly comprises adjustment screw rod, the first band teeth nut, aligning seat, spherical ball, stop pin and first set nut;
The lateral wall of said adjustment screw rod one end is provided with first external thread, and the lateral wall of the said adjustment screw rod other end is provided with second external thread;
The said first band teeth nut is socketed on the said adjustment screw rod and with said first external thread and is threaded;
Said aligning seat, spherical ball and first set nut all are socketed on the said adjustment screw rod; One end of said spherical ball is the sphere end; The other end of said spherical ball is a planar ends; Said aligning seat is connected with the sphere end of said spherical ball, and said first set nut is connected with the planar ends of said spherical ball, and said spherical ball and first set nut are threaded with said second external thread;
One end of said stop pin passes said aligning seat with spherical ball, contact with the lateral wall of said adjustment screw rod;
Said non-productive operation assembly comprises turning axle, hold-down nut, the second band teeth nut and second set nut;
Said hold-down nut is socketed on the said turning axle, and is threaded with said turning axle;
The said second band teeth nut is socketed on the said turning axle, and is fixedly connected with said turning axle;
Said second set nut is socketed on the said turning axle, and is threaded with said turning axle.
2. the bindiny mechanism that is used for focusing and leveling as claimed in claim 1; It is characterized in that; The lateral wall of the said first band teeth nut is provided with gear, and the lateral wall of the said second band teeth nut is provided with gear, and the gear of the gear of the said second band teeth nut and the said first band teeth nut is complementary.
3. the bindiny mechanism that is used for focusing and leveling as claimed in claim 1 is characterized in that, said first external thread and said second external thread rotary are to identical, and pitch is different.
4. the bindiny mechanism that is used for focusing and leveling as claimed in claim 1 is characterized in that, said adjustment assembly also comprises cover plate, and said cover plate is arranged at the end of said aligning seat near first set nut, and is fixedly connected with said aligning seat.
5. the bindiny mechanism that is used for focusing and leveling as claimed in claim 1 is characterized in that, said adjustment assembly also comprises a plurality of balls, the first ball keeper and the second ball keeper; The said first ball keeper and the second ball keeper are socketed on the said adjustment nut; The said first ball keeper is arranged at the end of said aligning seat away from first set nut; Said a plurality of ball is embedded on the said first ball keeper, and said a plurality of ball contacts with said aligning seat rolling; The said second ball keeper is arranged at an end of the said first ball keeper and is fixedly connected with the said first ball keeper; The said second ball keeper is provided with a plurality of grooves near the end face of the first ball keeper, and a said groove rolls with a said ball and contacts.
6. the bindiny mechanism that is used for focusing and leveling as claimed in claim 1 is characterized in that said turning axle is provided with convexity, and the said second band teeth nut is supported on the said convexity.
7. like the described bindiny mechanism that is used for focusing and leveling of arbitrary claim in the claim 1～6, it is characterized in that said bindiny mechanism also comprises the elasticity limit assembly, said elasticity limit assembly comprises elastic spacing one and elastic spacing one fixture;
Said elastic spacing one fixture is arranged at the periphery of said adjustment assembly;
One end of said elastic spacing one passes said elastic spacing one fixture and contacts with the lateral wall of said aligning seat.
8. the bindiny mechanism that is used for focusing and leveling as claimed in claim 7 is characterized in that, said syndeton comprises three elasticity limit assemblies, and three elasticity limit assemblies are evenly respectively on same circumference.
9. the bindiny mechanism that is used for focusing and leveling as claimed in claim 7 is characterized in that, said elastic spacing one is a spring column pin.
10. the bindiny mechanism that is used for focusing and leveling as claimed in claim 7 is characterized in that, said elastic spacing one fixture is provided with threaded hole, and an end of said elastic spacing one passes said threaded hole and contacts with the lateral wall of said aligning seat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220089378XU CN202533636U (en) | 2012-03-09 | 2012-03-09 | Connecting mechanism used for focusing and leveling |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220089378XU CN202533636U (en) | 2012-03-09 | 2012-03-09 | Connecting mechanism used for focusing and leveling |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202533636U true CN202533636U (en) | 2012-11-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220089378XU Expired - Lifetime CN202533636U (en) | 2012-03-09 | 2012-03-09 | Connecting mechanism used for focusing and leveling |
Country Status (1)
| Country | Link |
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| CN (1) | CN202533636U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104656221A (en) * | 2015-02-12 | 2015-05-27 | 中国科学院长春光学精密机械与物理研究所 | Screw-type precise leveling mechanism for optical equipment |
| CN105371794A (en) * | 2015-11-16 | 2016-03-02 | 长安大学 | Leveling and aligning micro displacement worktable |
| CN107290936A (en) * | 2016-03-31 | 2017-10-24 | 上海微电子装备（集团）股份有限公司 | A kind of mask platform with mechanical limit structure |
| WO2018093453A1 (en) * | 2016-11-21 | 2018-05-24 | Raytheon Company | Lockable, precision adjustment screw, with operability through a pressure vessel wall |
| GB2584540A (en) * | 2019-04-09 | 2020-12-09 | Bae Systems Plc | A mount |
| CN115086529A (en) * | 2022-07-06 | 2022-09-20 | 东莞市维斗科技股份有限公司 | New-type high accuracy focusing drive structure |
-
2012
- 2012-03-09 CN CN201220089378XU patent/CN202533636U/en not_active Expired - Lifetime
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104656221A (en) * | 2015-02-12 | 2015-05-27 | 中国科学院长春光学精密机械与物理研究所 | Screw-type precise leveling mechanism for optical equipment |
| CN104656221B (en) * | 2015-02-12 | 2017-06-13 | 中国科学院长春光学精密机械与物理研究所 | A kind of spiral accurate levelling gear for optical device |
| CN105371794A (en) * | 2015-11-16 | 2016-03-02 | 长安大学 | Leveling and aligning micro displacement worktable |
| CN105371794B (en) * | 2015-11-16 | 2017-12-22 | 长安大学 | Leveling aligning micro displacement workbench |
| CN107290936A (en) * | 2016-03-31 | 2017-10-24 | 上海微电子装备（集团）股份有限公司 | A kind of mask platform with mechanical limit structure |
| CN107290936B (en) * | 2016-03-31 | 2019-03-08 | 上海微电子装备（集团）股份有限公司 | A kind of mask platform with mechanical limit structure |
| US10145506B2 (en) | 2016-11-21 | 2018-12-04 | Raytheon Company | Lockable, precision adjustment screw, with operability through a pressure vessel wall |
| WO2018093453A1 (en) * | 2016-11-21 | 2018-05-24 | Raytheon Company | Lockable, precision adjustment screw, with operability through a pressure vessel wall |
| GB2584540A (en) * | 2019-04-09 | 2020-12-09 | Bae Systems Plc | A mount |
| GB2584540B (en) * | 2019-04-09 | 2022-07-13 | Bae Systems Plc | A mount |
| US11821570B2 (en) | 2019-04-09 | 2023-11-21 | Bae Systems Plc | Mount for adjusting a mounting plane |
| CN115086529A (en) * | 2022-07-06 | 2022-09-20 | 东莞市维斗科技股份有限公司 | New-type high accuracy focusing drive structure |
| CN115086529B (en) * | 2022-07-06 | 2024-05-10 | 东莞市维斗科技股份有限公司 | High-precision focusing driving structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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| CP01 | Change in the name or title of a patent holder | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121114 |
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| CX01 | Expiry of patent term |